CN107819183A - 一种吊装式谐振腔装置 - Google Patents
一种吊装式谐振腔装置 Download PDFInfo
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- CN107819183A CN107819183A CN201711158078.6A CN201711158078A CN107819183A CN 107819183 A CN107819183 A CN 107819183A CN 201711158078 A CN201711158078 A CN 201711158078A CN 107819183 A CN107819183 A CN 107819183A
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- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 7
- 229910052741 iridium Inorganic materials 0.000 claims description 6
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 6
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000601 superalloy Inorganic materials 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 33
- 238000003825 pressing Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 14
- 230000008878 coupling Effects 0.000 description 10
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- 238000005859 coupling reaction Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910000629 Rh alloy Inorganic materials 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/10—Dielectric resonators
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Abstract
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Claims (8)
Priority Applications (1)
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CN201711158078.6A CN107819183B (zh) | 2017-11-20 | 2017-11-20 | 一种吊装式谐振腔装置 |
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CN201711158078.6A CN107819183B (zh) | 2017-11-20 | 2017-11-20 | 一种吊装式谐振腔装置 |
Publications (2)
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CN107819183A true CN107819183A (zh) | 2018-03-20 |
CN107819183B CN107819183B (zh) | 2020-09-01 |
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CN201711158078.6A Expired - Fee Related CN107819183B (zh) | 2017-11-20 | 2017-11-20 | 一种吊装式谐振腔装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111128664A (zh) * | 2018-11-01 | 2020-05-08 | 北京北方华创微电子装备有限公司 | 谐振腔结构和半导体处理设备 |
Citations (14)
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CN1120165A (zh) * | 1995-08-12 | 1996-04-10 | 浙江大学 | 非金属材料微波介电性能的测试方法及其实施设备 |
CN2874523Y (zh) * | 2005-12-06 | 2007-02-28 | 电子科技大学 | 一种圆柱形高q谐振腔及微波电介质复介电常数测试装置 |
CN101187683A (zh) * | 2007-10-30 | 2008-05-28 | 电子科技大学 | 低损耗电介质材料高温复介电常数测试装置及方法 |
US7602193B1 (en) * | 2007-05-11 | 2009-10-13 | L-3 Communications Corporation | RF waveguide mode suppression in cavities used for measurement of dielectric properties |
CN201666921U (zh) * | 2010-02-03 | 2010-12-08 | 北京无线电计量测试研究所 | 宽带高温介电性能测量装置 |
JP2011007716A (ja) * | 2009-06-29 | 2011-01-13 | National Institute Of Advanced Industrial Science & Technology | 広域温度対応型複素誘電率測定用空洞共振器 |
CN102393490A (zh) * | 2011-11-04 | 2012-03-28 | 电子科技大学 | 一种介质材料高温复介电常数测量装置 |
CN103487666A (zh) * | 2013-09-25 | 2014-01-01 | 长沙新图仪器有限公司 | 一种用于材料介电常数测试的谐振腔测试装置 |
US20160146742A1 (en) * | 2014-11-26 | 2016-05-26 | National Tsing Hua University | System and method for measuring permittivity |
CN105911361A (zh) * | 2016-04-13 | 2016-08-31 | 青岛大学 | 一种结构陶瓷样品介电性能测量装置及方法 |
CN105927695A (zh) * | 2016-06-23 | 2016-09-07 | 燕山大学 | 一种机电一体化脉动控制器 |
CN105929240A (zh) * | 2016-05-04 | 2016-09-07 | 南京大学 | 测量高温超导薄膜表面本征阻抗的谐振器装置及测量方法 |
CN107044902A (zh) * | 2017-03-17 | 2017-08-15 | 西安聚能超导磁体科技有限公司 | 一种加速器用超导磁体的检漏装置及检漏方法 |
CN207368195U (zh) * | 2017-11-20 | 2018-05-15 | 四川中测微格科技有限公司 | 一种吊装式谐振腔装置 |
-
2017
- 2017-11-20 CN CN201711158078.6A patent/CN107819183B/zh not_active Expired - Fee Related
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1120165A (zh) * | 1995-08-12 | 1996-04-10 | 浙江大学 | 非金属材料微波介电性能的测试方法及其实施设备 |
CN2874523Y (zh) * | 2005-12-06 | 2007-02-28 | 电子科技大学 | 一种圆柱形高q谐振腔及微波电介质复介电常数测试装置 |
US7602193B1 (en) * | 2007-05-11 | 2009-10-13 | L-3 Communications Corporation | RF waveguide mode suppression in cavities used for measurement of dielectric properties |
CN101187683A (zh) * | 2007-10-30 | 2008-05-28 | 电子科技大学 | 低损耗电介质材料高温复介电常数测试装置及方法 |
JP2011007716A (ja) * | 2009-06-29 | 2011-01-13 | National Institute Of Advanced Industrial Science & Technology | 広域温度対応型複素誘電率測定用空洞共振器 |
CN201666921U (zh) * | 2010-02-03 | 2010-12-08 | 北京无线电计量测试研究所 | 宽带高温介电性能测量装置 |
CN102393490A (zh) * | 2011-11-04 | 2012-03-28 | 电子科技大学 | 一种介质材料高温复介电常数测量装置 |
CN103487666A (zh) * | 2013-09-25 | 2014-01-01 | 长沙新图仪器有限公司 | 一种用于材料介电常数测试的谐振腔测试装置 |
US20160146742A1 (en) * | 2014-11-26 | 2016-05-26 | National Tsing Hua University | System and method for measuring permittivity |
CN105911361A (zh) * | 2016-04-13 | 2016-08-31 | 青岛大学 | 一种结构陶瓷样品介电性能测量装置及方法 |
CN105929240A (zh) * | 2016-05-04 | 2016-09-07 | 南京大学 | 测量高温超导薄膜表面本征阻抗的谐振器装置及测量方法 |
CN105927695A (zh) * | 2016-06-23 | 2016-09-07 | 燕山大学 | 一种机电一体化脉动控制器 |
CN107044902A (zh) * | 2017-03-17 | 2017-08-15 | 西安聚能超导磁体科技有限公司 | 一种加速器用超导磁体的检漏装置及检漏方法 |
CN207368195U (zh) * | 2017-11-20 | 2018-05-15 | 四川中测微格科技有限公司 | 一种吊装式谐振腔装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111128664A (zh) * | 2018-11-01 | 2020-05-08 | 北京北方华创微电子装备有限公司 | 谐振腔结构和半导体处理设备 |
CN111128664B (zh) * | 2018-11-01 | 2022-05-27 | 北京北方华创微电子装备有限公司 | 谐振腔结构和半导体处理设备 |
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CN107819183B (zh) | 2020-09-01 |
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Effective date of registration: 20200803 Address after: 610000, No. seven, No. 699, Chengdong Road, Longquanyi District, Sichuan, Chengdu Applicant after: CHENGDU AERONAUTIC POLYTECHNIC Address before: 610000 No. 1, Tianfu Road, Chengdu hi tech Zone, Sichuan, China Applicant before: SICHUAN ZHONGCE MICROGRID TECHNOLOGY Co.,Ltd. |
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CB03 | Change of inventor or designer information | ||
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Inventor after: Deng Jianhua Inventor after: Liu Tie Inventor after: Lv Xin Inventor before: Pang Lifei Inventor before: Deng Jianhua Inventor before: Dong Yuliang Inventor before: Wang Kai |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20200901 |