CN107815660A - A kind of coating machine liquid nitrogen rotary cooling device - Google Patents
A kind of coating machine liquid nitrogen rotary cooling device Download PDFInfo
- Publication number
- CN107815660A CN107815660A CN201711265509.9A CN201711265509A CN107815660A CN 107815660 A CN107815660 A CN 107815660A CN 201711265509 A CN201711265509 A CN 201711265509A CN 107815660 A CN107815660 A CN 107815660A
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- CN
- China
- Prior art keywords
- liquid nitrogen
- sealing device
- vacuum sealing
- gear wheel
- coating machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The invention discloses a kind of coating machine liquid nitrogen rotary cooling device, include liquid nitrogen rotating device, studdle, vacuum sealing device, hollow pipe, chip bench successively from top to bottom, the shell of liquid nitrogen rotating device is connected with the shell of vacuum sealing device by studdle；Connector, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device, gear wheel be located at connector bottom and and connector bolt connection, motor cabinet is fixed with vacuum sealing device shell, motor is provided with the motor cabinet, gear wheel is connected to by little gear, belt；Gear wheel welds with the hollow pipe through vacuum sealing device, is provided with cooling tube in hollow pipe, cooling tube top is connected with liquid nitrogen rotating device, and bottom is connected with chip bench.The present invention drives jackshaft to rotate by motor, realizes that chip bench rotates, makes chip bench lower surface plated film uniform, improve cooling velocity so that chip bench can efficient Quick uniform plated film.
Description
Technical field
The present invention relates to a kind of cooling device, more particularly to a kind of coating machine liquid nitrogen rotary cooling device.
Background technology
When making plated film print, cooling treatment often is carried out to substrate, passes plated film system cooling means typically using cooling
Water cooling or ethanol medium cooling method cool down to static chip bench, but the equal cooling velocity of both modes is slow, is unfavorable for plating
Film fast cooling shaping, in addition, static chip bench easily causes plated film uneven, cause below substrate membrane material distribution of steam not
Uniformly, close to the substrate position thickness of evaporation source, the substrate position film away from evaporation source is thin, in view of drawbacks described above, is necessary in fact
Design a kind of coating machine liquid nitrogen rotary cooling device.
The content of the invention
The present invention provides a kind of coating machine liquid nitrogen rotary cooling device, uneven and can not pole to solve Coating Materials plated film
The problem of quickly cooling but causes to plate membrane efficiency reduction, and plating film quality is bad.Its technical scheme is as described below：
A kind of coating machine liquid nitrogen rotary cooling device, include liquid nitrogen rotating device, studdle, vacuum successively from top to bottom
Sealing device, hollow pipe, chip bench, the shell of liquid nitrogen rotating device and the shell of vacuum sealing device pass through studdle phase
Even；Connector, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device, gear wheel is positioned at connection
Body bottom and and connector bolt connection, be fixed with motor cabinet on vacuum sealing device shell, electricity be provided with the motor cabinet
Machine, the motor connection have little gear, and little gear is connected to gear wheel by belt；Gear wheel is with passing through vacuum sealing device
Hollow pipe welds, and is provided with cooling tube in hollow pipe, cooling tube top is connected with liquid nitrogen rotating device, bottom and chip bench phase
Even.
Top on the outside of hollow pipe is provided with bellows, and bellows is located at below vacuum sealing device, and the two bolt is connected.
The jackshaft of liquid nitrogen rotating device and vacuum sealing device is connected with connector respectively using bolt.
The cooling tube includes into nitrogen mouth and goes out nitrogen mouth, and the cooling tube is in chip bench helical arrangement, formation spiral cooling
Face.
The liquid nitrogen rotating device is included with entering nitrogen mouth and going out corresponding liquid nitrogen entrance and the liquid nitrogen outlet respectively of nitrogen mouth.
Gear wheel is high vacuum seal gear, is the centre of vacuum sealing device, gear wheel and vacuum sealing device below
Axle bolt connects.
Compared with prior art, this rotary cooling device, drive jackshaft to rotate by motor, realize substrate
Platform rotates, in addition, liquid nitrogen enters the device from liquid nitrogen rotating device liquid nitrogen entrance, flows through cooling tube, into chip bench lower end, makes
Chip bench lower surface plated film is uniform, improve cooling velocity, said structure allows chip bench efficiently Quick uniform plated film.
Brief description of the drawings
Fig. 1 is the structural representation of the coating machine liquid nitrogen rotary cooling device；
Fig. 2 is the hollow pipe internal cooling tubular construction layout drawing；
Fig. 3 is liquid nitrogen circulation line figure inside the chip bench；
In figure：Heating collar -1；Liquid nitrogen rotating device -2；Studdle -3；Vacuum sealing device -4；Bellows -5；It is hollow
Pipe -6；Chip bench -7；Connector -8；Belt -9；Little gear -10；Motor -11；Gear wheel -12；Motor cabinet -13；Cooling tube-
14；Flange -15；Enter nitrogen mouth -16；Go out nitrogen mouth -17；Spiral cooling surface -18；Porch -19；Exit -20.
Embodiment
Hereinafter, a variety of specific details are elaborated, to provide the saturating of the concept to forming described embodiment basis
Thorough understanding.However, it will be apparent to those skilled in the art that described embodiment can be in these no specific details
In it is some or all in the case of put into practice.In other cases, well-known processing step is not specifically described.
As shown in Figure 1, Figure 2, Figure 3 shows, liquid nitrogen rotating device 2, studdle 3, vacuum sealing dress are included successively from top to bottom
Put 4, hollow pipe 6, chip bench 7, connector 8, gear wheel 12, the shell of the liquid nitrogen rotating device 2 and vacuum sealing device 4
Shell is connected by studdle 3.
The jackshaft that can be rotated is provided with the shell of liquid nitrogen rotating device 2, is set in the shell of vacuum sealing device 4
There is the jackshaft that can be rotated, connector 8, big is provided between the jackshaft of liquid nitrogen rotating device 2 and vacuum sealing device 4
Gear 12, gear wheel 12 are located at the bottom of connector 8 and are bolted with connector 8, and liquid nitrogen rotating device 2 and vacuum are close
The jackshaft of seal apparatus 4 is connected with connector 8 respectively using bolt, and gear wheel 12 is high vacuum seal gear, is vacuum below
Sealing device 4, the jackshaft bolt connection of gear wheel 12 and vacuum sealing device 4.So, when gear wheel rotates, liquid nitrogen is driven
The jackshaft of rotating device 2 and vacuum sealing device 4 rotates together, and the shell of liquid nitrogen rotating device 2 and vacuum sealing device 4
It is fixed.
Motor cabinet 13 is fixed with the shell of vacuum sealing device 4, motor 11, the electricity are provided with the motor cabinet 13
Machine 11 is connected with little gear 10, and little gear 10 is connected to gear wheel 12 by belt 9.Gear wheel is driven by the rotation of motor 11
12 rotations.
Gear wheel 12 is welded with the hollow pipe 6 through vacuum sealing device, and hollow pipe 6 is passed through in vacuum sealing device 4
Countershaft, the outside of hollow pipe 6 are provided with bellows 5 at vacuum sealing device 4, and bellows 5 is located under vacuum sealing device 4
Face, the two bolt are connected.The lower end of hollow pipe 6 is fixedly connected by flange 15 with chip bench 7.
The middle part setting hole of cooling tube 14, gear wheel 12 and connector 8, cooling tube 14 are provided with hollow pipe 6
Top passes through gear wheel 12 and connector 8, and then the central shaft with liquid nitrogen rotating device is connected, as shown in Fig. 2 the cooling
Pipe 14 includes into nitrogen mouth 16 and goes out nitrogen mouth 17, the liquid nitrogen rotating device 2 include with enter nitrogen mouth 16 and go out nitrogen mouth 17 it is corresponding respectively
Liquid nitrogen entrance and liquid nitrogen outlet.
Two passages are provided with the jackshaft of the liquid nitrogen rotating device 2, wherein first passage runs through jackshaft, under
Hold and be fixedly connected with entering nitrogen mouth 16, upper end is connected with the liquid nitrogen entrance of the cover top portion of liquid nitrogen rotating device 2；Other second logical
Road is passed in the middle part of jackshaft, and lower end is fixedly connected with going out nitrogen mouth 17, and upper end goes out with the liquid nitrogen in the middle part of the shell of liquid nitrogen rotating device 2
Mouth is connected.Jackshaft is provided with annular groove at the position that second passage passes jackshaft, no matter the rotation court of jackshaft
To liquid nitrogen can all enter the annular groove when second passage comes out, and then export and discharge from liquid nitrogen.In annular groove both sides
Sealing ring is provided with, separates liquid nitrogen entrance above and the hole of lower end.
The surface of liquid nitrogen rotating device 2 is fluted, and embedded heating collar 1, the two bolt closely connect in groove, forms insulation knot
Structure.
The bottom of the cooling tube 14 is connected with chip bench 7, in the helical arrangement of chip bench 7, forms spiral cooling surface 18, cold
But pipe 14 proceeds by helical arrangement in the porch 19 of spiral cooling surface 18, is finally returned from exit 20.
This rotary cooling device, drive jackshaft to rotate by the drive gear wheel of motor 11, realize chip bench 7
Rotation, in addition, liquid nitrogen enters the device from the liquid nitrogen entrance of liquid nitrogen rotating device 2, flows through cooling tube 14, into chip bench 7
Lower end so that 7 lower surface plated films of substrate are uniform, improve cooling velocity, and said structure allows chip bench 7 efficiently quick
Even plated film.
The present invention is not limited to above-mentioned specific embodiment, one of ordinary skill in the art from above-mentioned design,
Without performing creative labour, a variety of conversion made, it is within the scope of the present invention.
Claims (6)
- A kind of 1. coating machine liquid nitrogen rotary cooling device, it is characterised in that：Include liquid nitrogen rotating device, support successively from top to bottom Screw rod, vacuum sealing device, hollow pipe, chip bench, the shell of liquid nitrogen rotating device and the shell of vacuum sealing device pass through branch Support screw rod is connected；Connector, gear wheel, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device Positioned at connector bottom and and connector bolt connection, motor cabinet is fixed with vacuum sealing device shell, on the motor cabinet Motor is provided with, the motor connection has little gear, and little gear is connected to gear wheel by belt；Gear wheel is close with passing through vacuum The hollow pipe welding of seal apparatus, is provided with cooling tube in hollow pipe, and cooling tube top is connected with liquid nitrogen rotating device, bottom and Chip bench is connected.
- 2. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Top on the outside of hollow pipe is set Bellows is equipped with, bellows is located at below vacuum sealing device, and the two bolt is connected.
- 3. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Liquid nitrogen rotating device and vacuum The jackshaft of sealing device is connected with connector respectively using bolt.
- 4. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：The cooling tube is included into nitrogen Mouthful and go out nitrogen mouth, the cooling tube forms spiral cooling surface in chip bench helical arrangement.
- 5. coating machine liquid nitrogen rotary cooling device according to claim 4, it is characterised in that：The liquid nitrogen rotating device bag Include with entering nitrogen mouth and going out corresponding liquid nitrogen entrance and the liquid nitrogen outlet respectively of nitrogen mouth.
- 6. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Gear wheel is high vacuum seal Gear, it is the jackshaft bolt connection of vacuum sealing device, gear wheel and vacuum sealing device below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265509.9A CN107815660A (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711265509.9A CN107815660A (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107815660A true CN107815660A (en) | 2018-03-20 |
Family
ID=61605660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711265509.9A Pending CN107815660A (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
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| Country | Link |
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| CN (1) | CN107815660A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161866A (en) * | 2018-09-17 | 2019-01-08 | 东莞市汇成真空科技有限公司 | A kind of vacuum coating equipment |
| CN112663013A (en) * | 2020-12-15 | 2021-04-16 | 华能新能源股份有限公司 | Substrate auxiliary cooling system for vacuum evaporation and working method |
| CN114134478A (en) * | 2021-11-26 | 2022-03-04 | 上海大学 | Fast-cooling film coating sample stage device and application thereof |
| CN116145099A (en) * | 2023-04-21 | 2023-05-23 | 合肥铠柏科技有限公司 | Straight liquid nitrogen cooling sample holder |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6314858A (en) * | 1986-07-03 | 1988-01-22 | Hitachi Ltd | Vacuum deposition device |
| JPH08158046A (en) * | 1994-10-06 | 1996-06-18 | Mitsubishi Electric Corp | Thin film forming device |
| JP2007063645A (en) * | 2005-09-01 | 2007-03-15 | Shin Meiwa Ind Co Ltd | Rotary sealing mechanism for vacuum treatment device, and vacuum treatment device |
| CN206328457U (en) * | 2016-12-13 | 2017-07-14 | 沈阳聚智真空设备有限公司 | A kind of vacuum film plating substrate sample stage |
| CN207567341U (en) * | 2017-12-05 | 2018-07-03 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
-
2017
- 2017-12-05 CN CN201711265509.9A patent/CN107815660A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6314858A (en) * | 1986-07-03 | 1988-01-22 | Hitachi Ltd | Vacuum deposition device |
| JPH08158046A (en) * | 1994-10-06 | 1996-06-18 | Mitsubishi Electric Corp | Thin film forming device |
| JP2007063645A (en) * | 2005-09-01 | 2007-03-15 | Shin Meiwa Ind Co Ltd | Rotary sealing mechanism for vacuum treatment device, and vacuum treatment device |
| CN206328457U (en) * | 2016-12-13 | 2017-07-14 | 沈阳聚智真空设备有限公司 | A kind of vacuum film plating substrate sample stage |
| CN207567341U (en) * | 2017-12-05 | 2018-07-03 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161866A (en) * | 2018-09-17 | 2019-01-08 | 东莞市汇成真空科技有限公司 | A kind of vacuum coating equipment |
| CN109161866B (en) * | 2018-09-17 | 2023-06-13 | 东莞市汇成真空科技有限公司 | Vacuum coating machine |
| CN112663013A (en) * | 2020-12-15 | 2021-04-16 | 华能新能源股份有限公司 | Substrate auxiliary cooling system for vacuum evaporation and working method |
| CN114134478A (en) * | 2021-11-26 | 2022-03-04 | 上海大学 | Fast-cooling film coating sample stage device and application thereof |
| CN116145099A (en) * | 2023-04-21 | 2023-05-23 | 合肥铠柏科技有限公司 | Straight liquid nitrogen cooling sample holder |
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