CN109161866B - Vacuum coating machine - Google Patents
Vacuum coating machine Download PDFInfo
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- CN109161866B CN109161866B CN201811085077.8A CN201811085077A CN109161866B CN 109161866 B CN109161866 B CN 109161866B CN 201811085077 A CN201811085077 A CN 201811085077A CN 109161866 B CN109161866 B CN 109161866B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The invention discloses a vacuum coating machine, which is internally provided with a coating chamber, wherein a workpiece rotating frame is rotatably arranged in the coating chamber, the vacuum coating machine further comprises a circulating water cooling system, the circulating water cooling system is provided with a cooling water flow pipe, the cooling water flow pipe is arranged in the workpiece rotating frame and can cool a workpiece hung on the workpiece rotating frame, one end of the workpiece rotating frame is provided with a transmission shaft, the transmission shaft penetrates out of the coating chamber and is connected with a motor arranged outside the coating chamber, the outer end of the transmission shaft is provided with a rotary water pipe joint, and the in-out cooling water flow pipe is connected with an external water source through the rotary water pipe joint. The invention solves the problem of temperature rise of the workpiece which is not resistant to temperature during continuous coating, and can continuously coat the workpiece which is not resistant to temperature.
Description
Technical Field
The invention relates to a vacuum coating machine.
Background
The vacuum coating machine is generally provided with a cathode arc source or a magnetron sputtering target which are separately arranged on the side wall of the coating chamber in a partitioned manner, and a target material coating plasma is emitted into the coating chamber. The workpiece rotating frame is arranged in the coating chamber, the workpiece rotating frame is driven by a motor to rotate, the workpiece to be coated is hung or clamped on the workpiece rotating frame, and the workpiece rotates along with the workpiece rotating frame in revolution and/or rotation, so that the workpiece can receive plasmas emitted by the target from multiple angles when passing through the front region of the target and deposit the film. The uniformity of the coating can be effectively improved through the rotation of the workpiece rotating frame. However, during the film plating process, the workpiece is continuously bombarded by energetic particles, the temperature of the workpiece is continuously increased, and the heat dissipation effect in vacuum is poor, so that the temperature rise of certain workpiece matrixes can exceed the allowable value (such as plastic), and when the temperature rise exceeds the allowable value, the film plating process can only be interrupted, which can cause adverse effects on the continuous growth of a film layer.
Disclosure of Invention
The invention aims to solve the technical problem of providing a vacuum coating machine, which solves the problem of temperature rise when a workpiece which is not resistant to temperature is continuously coated, and can continuously coat the workpiece which is not resistant to temperature.
The technical scheme adopted by the invention is as follows:
a vacuum coating machine is provided with a coating chamber, a workpiece rotating frame is rotatably arranged in the coating chamber, and is characterized by further comprising a circulating water cooling system, a cooling water flow pipe is arranged in the workpiece rotating frame and used for cooling the workpiece rotating frame, a transmission shaft is arranged at one end of the workpiece rotating frame, the transmission shaft penetrates out of the coating chamber and is connected with a motor arranged outside the coating chamber, a rotary water pipe connector is arranged at the outer end of the transmission shaft, and the cooling water flow pipe passing in and out is connected with an external water source through the rotary water pipe connector.
The rotary water pipe joint comprises a rotary cover base and a rotary cover, wherein the rotary cover base is fixedly arranged at the outer end of a transmission shaft, a rotatable sealing sleeve of the rotary cover is arranged at the outer end of the rotary cover base, a communication cavity is formed between the inner face of the rotary cover and the outer end of the rotary cover base, a system water inlet and a system water outlet positioned in the middle are arranged on the rotary cover, the system water inlet is communicated with the communication cavity, a water inlet channel and a water outlet channel positioned in the middle of the rotary cover base are arranged in the rotary cover base, the water inlet end of the water inlet channel is communicated with the communication cavity, the water outlet end of the water inlet channel is connected with the water inlet end of a cooling water flow pipe, the water outlet end of the water outlet channel penetrates out from the outer end of the rotary cover base and penetrates through the communication cavity, the rotatable sealing sleeve is inserted into the inner end of the system water outlet, and the water inlet end of the water outlet channel is connected with the water outlet end of the cooling water flow pipe.
An upper water collecting cavity and a lower water collecting cavity which are mutually isolated are arranged in the rotary cover base, the upper water collecting cavity is communicated with the communicating cavity through the communicating hole, the water inlet end of the water inlet channel is communicated with the upper water collecting cavity, the water inlet end of the water outlet channel is communicated with the lower water collecting cavity, and the lower water collecting cavity is communicated with the water outlet end of the cooling water flow pipe.
The outer side wall of the rotary cover base is connected with the inner side wall of the rotary cover through a first bearing, and an oil seal used for sealing is further arranged between the outer side wall of the rotary cover base and the inner side wall of the rotary cover and is located between the communication cavity and the first bearing.
The transmission shaft is provided with a first synchronous belt pulley, the first synchronous belt pulley is positioned outside the coating chamber, the side edge of the first synchronous belt pulley is provided with a reduction gearbox through a fixing frame, the output shaft of the reduction gearbox is provided with a second synchronous belt pulley, the first synchronous belt pulley is connected with the second synchronous belt pulley through a synchronous belt, and the input end of the reduction gearbox is connected with a motor.
And a magnetic fluid sealing piece is arranged outside the upper top wall of the coating chamber, and is sleeved on the transmission shaft so as to achieve dynamic sealing.
The circulating water cooling system is provided with a plurality of cooling water flow pipes and a flow distribution disc, the flow distribution disc is arranged in the workpiece rotating frame, a water inlet flow channel and a water outlet converging flow channel are arranged in the flow distribution disc, a water inlet separating connecting port and a water inlet collecting connecting port which are communicated with the water inlet flow distribution channel are arranged on the surface of the flow distribution disc, a water outlet separating connecting port and a water outlet collecting connecting port which are communicated with the water outlet converging flow channel are also arranged on the surface of the flow distribution disc, the number of the water inlet separating connecting ports and the water outlet separating connecting ports are respectively the same as the number of the cooling water flow pipes, the water inlet separating connecting ports and the water outlet separating connecting ports are respectively connected with the water inlet ends and the water outlet ends of the water inlet channels, and the water inlet ends of the water outlet channels.
The central axis department of transmission shaft is equipped with the middle part through-hole, is equipped with inlet tube and outlet pipe in the middle part through-hole, and the water inlet end of inlet tube is connected with the play water end of water inlet channel, and the play water end of inlet tube is connected with total water inlet connector, and the water inlet end of outlet pipe is connected with total play water connector, and the play water end of outlet pipe is connected with the play water end of water outlet channel.
The lower extreme at the transmission shaft is equipped with the second shoulder, it has the mounting hole to open at the roof of work piece revolving rack, and weld fixedly have the go-between seat in the mounting hole, open threaded hole on the lateral wall of go-between seat, the lower extreme of transmission shaft inserts in the intermediate hole of go-between seat and wears out from the below of go-between seat, the second shoulder supports and leans on the up end of go-between seat, be equipped with the external screw thread on the lateral wall of the part below the go-between seat that wears out of transmission shaft, and the cooperation is twisted and is screwed up lock nut, thereby lock the transmission shaft on the go-between seat, open in the lower extreme of transmission shaft the position of corresponding threaded hole has the blind hole, twist into in the threaded hole and have locking bolt, locking bolt's inner end inserts in the blind hole, thereby can prevent the transmission shaft relative go-between seat rotation.
The lower end of the transmission shaft is fixedly provided with a transmission shaft sealing plate for sealing the lower port of the transmission shaft through a screw, the transmission shaft sealing plate is provided with a water inlet pipe and a water outlet pipe, the water outlet end of the water inlet pipe is connected with the upper end of the water inlet pipe, the lower end of the water inlet pipe is connected with a total water inlet connecting port through a high-pressure metal corrugated pipe, the water inlet end of the water outlet pipe is connected with the upper end of the water outlet pipe, and the lower end of the water outlet pipe is connected with the total water outlet connecting port through a high-pressure metal corrugated pipe.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention successfully sets the circulating water cooling system in the vacuum coating machine, arranges the cooling water flow pipe of the circulating water cooling system in the workpiece rotating frame to cool the workpiece rotating frame and the workpiece on the workpiece rotating frame, solves the temperature rise problem when the workpiece which is not temperature resistant is coated continuously, can coat the workpiece which is not temperature resistant (such as plastic and low melting point alloy) continuously, and enlarges the material range of the workpiece which can be coated in the vacuum coating machine.
2. The existing vacuum coating machine is suitable for coating non-heat-resistant workpieces, the temperature rise of the workpieces is controlled by adopting a low coating power or intermittent coating mode, the coating quality is greatly influenced, the invention is not limited by the adverse conditions, more reasonable process coating is facilitated, and the quality of a coating layer is improved.
3. The invention solves the problem that the cooling water flow pipe rotating along with the workpiece rotating frame is connected with an external static water source through the rotary water pipe joint.
4. The rotary water pipe joint has the advantages of simple and compact structure and reasonable design.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is an enlarged schematic view of the portion II of FIG. 1;
FIG. 3 is an enlarged schematic view of the portion I of FIG. 1;
FIG. 4 is an enlarged schematic view at IV in FIG. 1;
FIG. 5 is an enlarged schematic view at III in FIG. 1;
FIG. 6 is a schematic view of the structure of the diverter tray of the present invention;
FIG. 7 is a schematic cross-sectional view of a diverter tray of the present invention;
FIG. 8 is an enlarged schematic view at A in FIG. 7;
FIG. 9 is a schematic flow distribution view of the diverter tray of the present invention;
FIG. 10 is a schematic view of the structure of the work piece turret of the present invention;
FIG. 11 is a schematic cross-sectional view of a workpiece turret of the present invention;
FIG. 12 is a schematic view of the cooling water flow tube of the present invention mounted to a side wall plate;
FIG. 13 is a side view schematic illustration of the cooling water flow tube of the present invention mounted to a side fascia;
FIG. 14 is a schematic illustration of the assembly of the water tube platen and cooling water flow tube of the present invention;
FIG. 15 is a schematic view showing the assembly relationship between the shaping reinforcing ribs and the cooling water flow tube according to the present invention.
The meaning of the reference numerals in the figures:
1-1 a system water inlet; 1-2 a system water outlet; 1-3 a first water nozzle; 1-4 third water nozzle; 1-5 second water nozzle; 1-6 fourth water nozzle; 1-9 communicating cavities; 1-10 upper water collecting cavity; 1-11 lower water collecting cavity; 2 a first sealing ring; 3, rotating the cover; 4, oil sealing; 5 spacer rings; 6, a first bearing; 7, an annular cover plate; 8, rotating a cover base; 8-1 communicating holes; 8-2 water outlet channels; 8-3 middle separator; 8-4 water inlet channels; 9, a rotation stopping piece; 10, a synchronous belt; 11 a first synchronous pulley; 12 transmission shafts; 12-1 upper end cover; 12-2 magnetic fluid seal; 13-1 water inlet pipe; 13-2 water outlet pipes; 15 locking nuts; 16 knives; 16-1 water inlet conduit; 16-2 water outlet conduit; 17 diverter trays; 17-1 water outlet and collecting channels; 17-2 water inlet flow channels; 17-3 total water outlet connection ports; 17-4 total water inlet connection ports; 17-5 branch water connectors; 17-6 parts of water inlet connectors; 18 high pressure metal bellows; 19 limiting shafts; 19-1 connectors; 20 limit seats; 20-1 a second synchronous pulley; a reduction gearbox 21; a 22 motor; 23 fixing frames; 25 a second seal ring; 26 a second bearing; 27 workpiece rotating frames; 28 an upper top wall of the coating chamber; 29 coating chambers; 30 coating the indoor bottom surface of the film; 31 top plate; 31-1 connecting ring seat; 31-2 locking bolts; a 32-bottom plate; 33 supporting the upright; 35 coaming screws; 36 a flange seat; 37-1 connectors; 38 annular flow field plates; 40 side coaming; 41 water pipe connectors; 42 cooling the water flow tube; 43 water tube press plate; and (4) shaping and reinforcing the tendons.
Detailed Description
The invention is further described below with reference to examples.
As shown in fig. 1, the vacuum coating machine of this embodiment is provided with a coating chamber 29, vacuum is provided in the coating chamber 29, a workpiece rotating frame 27 is rotatably installed in the coating chamber 29, the vacuum coating machine further comprises a circulating water cooling system, the circulating water cooling system is provided with a cooling water flow pipe 42, the cooling water flow pipe 42 is arranged in the workpiece rotating frame 27 to cool the workpiece rotating frame 27 and the workpiece on the workpiece rotating frame, one end of the workpiece rotating frame 27 is provided with a transmission shaft 12, the transmission shaft 12 penetrates out of the coating chamber 29 and is connected with a motor 22 installed outside the coating chamber, the motor 22 drives the workpiece rotating frame 27 to rotate through the transmission shaft 12, a rotary water pipe connector is installed at the outer end of the transmission shaft 12, and the cooling water flow pipe 42 is connected with an external water source through the rotary water pipe connector. The workpiece rotating frame 27 can be transversely mounted, vertically mounted or obliquely mounted, the workpiece rotating frame 27 of the embodiment is vertically mounted, the lower end of the workpiece rotating frame 27 is rotatably supported on the bottom surface of the coating chamber 29, and the transmission shaft 12 vertically upwards penetrates out of the upper surface of the coating chamber 29.
As shown in fig. 2, the rotary water pipe joint of the present embodiment includes a rotary cover base 8 and a rotary cover 3, the rotary cover base 8 is fixedly mounted at the outer end of the transmission shaft 12, and the specific fixing manner is as follows: an upper end cover 12-1 is fixed on the upper end of the transmission shaft 12 by bolts, and the rotary cover base 8 is welded and fixed on the upper end cover 12-1. The rotatable seal of rotary lid 3 is adorned in the outer end of rotary lid base 8 (in this embodiment, the upper end of rotary lid base is its outer end), form intercommunication chamber 1-9 between rotary lid 3 inner face and the outer end of rotary lid base 8, be provided with system water inlet 1-1 and system delivery port 1-2 in the centre on rotary lid 3, system water inlet 1-1 is connected with intercommunication chamber 1-9, be equipped with water inlet channel 8-4 and the play water channel 8-2 in the centre of rotary lid base in rotary lid base 8, the water inlet end of water inlet channel 8-4 communicates with intercommunication chamber 1-9, the water outlet end of water inlet channel 8-4 is finally connected with the water inlet end of cooling water flow pipe 42, the water outlet end of water outlet channel 8-2 is worn out from the outer end of rotary lid base 8 (in this embodiment, the upper end of rotary lid base is its outer end) and passes intercommunication chamber 1-9, and rotatable sealed grafting is in the inner end of system delivery port 1-2, the water inlet end of water outlet channel 8-2 is finally connected with the water outlet end of cooling pipe 42.
The more specific structure of the inside of the rotary cover base is: an upper water collecting cavity 1-10 and a lower water collecting cavity 1-11 which are mutually isolated are formed in the rotary cover base 8 through a middle partition plate 8-3, the upper water collecting cavity 1-10 is communicated with the communicating cavity 1-9 through a communicating hole 8-1, the water inlet end of the water inlet channel 8-4 is communicated with the upper water collecting cavity 1-10, the water inlet end of the water outlet channel 8-2 is communicated with the lower water collecting cavity 1-11, and the lower water collecting cavity 1-11 is finally communicated with the water outlet end of the cooling water flow pipe 42.
The rotatable seal cover of rotatory lid 3 dress is at the concrete structure of rotatory lid base 8's outer end: the outer side wall of the rotary cover base 8 and the inner side wall of the rotary cover 3 are connected through a first bearing 6, and an oil seal 4 used for sealing is further arranged between the outer side wall of the rotary cover base 8 and the inner side wall of the rotary cover, and the oil seal 4 is located between the communication cavities 1-9 and the first bearing 6.
A spacer ring 5 is arranged between the oil seal 4 and the first bearing 6.
The mounting structure of the first bearing is as follows: the rotary cover base 8 is provided with a first shaft shoulder, the periphery of the rotary cover base 8 is sleeved with a first bearing, the first bearing is propped against the first shaft shoulder, the inner end of the rotary cover 3 is provided with an annular cover plate 7 through a bolt, and the first bearing is limited.
The water outlet end of the water outlet channel 8-2 is rotatably and hermetically inserted into the inner end of the system water outlet 1-2: the inner end of the system water outlet 1-2 is provided with a convex ring, the water outlet end of the water outlet channel 8-2 is movably inserted into the convex ring, and a first sealing ring 2 is arranged between the convex ring and the water outlet end of the water outlet channel.
The outer ends of the system water inlet 1-1 and the system water outlet 1-2 are respectively provided with a connecting water nozzle which is used for being connected with a water pipe of an external water source.
The circulating water cooling system is also provided with a rotation stopping piece 9 for preventing the rotating cover from rotating, one end of the rotation stopping piece 9 is fixed on the rotating cover 3, and the other end of the rotation stopping piece 9 is fixed on a fixing piece of the vacuum coating machine, and the embodiment is fixed on the magnetic fluid sealing piece 12-2. During rotation of the drive shaft 12, the rotation stop 9 prevents the spin cover 3 from following rotation, and also prevents the spin cover 3 from shaking.
The connection structure of the transmission shaft 12 and the motor 22 is as follows: the transmission shaft 12 is provided with a first synchronous pulley 11, the first synchronous pulley 11 is positioned outside the upper top wall 28 of the coating chamber 29, the side edge of the first synchronous pulley 11 is provided with a reduction gearbox 21 through a fixing frame 23, the output shaft of the reduction gearbox 21 is provided with a second synchronous pulley 21-1, the first synchronous pulley 11 is connected with the second synchronous pulley 21-1 through a synchronous belt 10, and the input end of the reduction gearbox 21 is connected with a motor 22.
The magnetic fluid sealing piece 12-2 is arranged outside the upper top wall 28 of the coating chamber 29, and is sleeved on the transmission shaft 12 to achieve dynamic sealing. The magnetic fluid sealing member 12-2 of this embodiment is mounted on the upper surface of the coating chamber 29, and the second sealing ring 25 is used for sealing between the upper surface of the coating chamber 29 and the magnetic fluid sealing member 12-2.
The circulating water cooling system of this embodiment is provided with a plurality of cooling water flow pipes 42 and a diverter plate 17, the diverter plate is installed in a workpiece rotating frame, the embodiment is provided with five cooling water flow pipes 42, as shown in fig. 1, 6 and 9, the diverter plate 17 of this embodiment is installed on the top surface in the workpiece rotating frame, the diverter plate 17 is internally provided with a water inlet runner 17-2 and a water outlet sink runner 17-1, the surface of the diverter plate 17 is provided with a water inlet branch connecting port 17-6 and a water inlet branch connecting port 17-4 communicated with the water inlet sink runner 17-2, the surface of the diverter plate 17 is also provided with a water outlet branch connecting port 17-5 and a water outlet branch connecting port 17-3 communicated with the water outlet sink runner 17-1, the number of the water inlet branch connecting ports 17-6 and the water outlet branch connecting ports 17-5 are respectively the same as the number of the cooling water flow pipes 42, the embodiment is provided with five water inlet branch connecting ports 17-6 and five water outlet connecting ports 17-5, the water inlet branch connecting ports 17-6 and the water outlet connecting ports 17-5 are respectively connected with the water inlet port 3 and the water outlet port 4 of the water inlet port 3 and the water outlet port 8 respectively. The water inlet flow channel and the water outlet converging flow channel are annular channels.
As shown in fig. 2 and 3, a central through hole is arranged at the central axis of the transmission shaft 12, a water inlet pipe 13-1 and a water outlet pipe 13-2 are arranged in the central through hole, the water inlet end of the water inlet pipe 13-1 is connected with the water outlet end of the water inlet channel 8-4 through a first water nozzle 1-3, the water outlet end of the water inlet pipe 13-1 is connected with a total water inlet connection port through a second water nozzle 1-5, the water inlet end of the water outlet pipe 13-2 is connected with a total water outlet connection port through a fourth water nozzle 1-6, and the water outlet end of the water outlet pipe 13-2 is connected with the water outlet end of the water outlet channel through a third water nozzle 1-4. The first water nozzle 1-3 and the third water nozzle 1-4 are respectively arranged on the upper end sealing cover 12-1.
As shown in fig. 10 to 15 and fig. 4, the workpiece turret of the present embodiment has the following specific structure: the workpiece rotating frame 27 comprises a top plate 31, a bottom plate 32, a plurality of side coamings 40 and a plurality of supporting vertical rods 33, five side coamings and four supporting vertical rods are arranged in the embodiment, the four supporting vertical rods are distributed at four corners, flange seats 36 are welded at two ends of the supporting vertical rods 33 respectively, the flange seats 36 are connected with the top plate 31 and the bottom plate 32 through bolts, so that the top plate 31 and the bottom plate 32 are supported, the upper side and the lower side of the side coamings 40 are fixed on the side surfaces of the top plate 31 and the bottom plate 32 through coaming screws 35, and the side coamings 40 are distributed around the workpiece rotating frame 27. The inner face of each side coaming is respectively provided with a cooling water flow pipe. As shown in fig. 12 to 15, each side wall plate 40 is formed by three times of bending, the cooling water flow pipes 42 are bent back up and down to be distributed on the inner surface of the side wall plate 40 in an S-shape, the cooling water flow pipes 42 are basically distributed on the side wall plate 40, the water pipe connectors 41 of the cooling water flow pipes 42 are all positioned on the upper part of the side wall plate 40, the side wall plate 40 is fixedly provided with a water pipe pressing plate 43 through bolts, the water pipe pressing plate 43 is pressed on the outer surface of the cooling water flow pipe 42, the side wall plate 40 is fixedly provided with a shaping reinforcing rib 44, the shaping reinforcing rib 44 is provided with through holes corresponding to the cooling water flow pipes 42, and the cooling water flow pipes 42 pass through the through holes of the shaping reinforcing rib 44 up and down in turn. The water pipe platen 43 and the shaping reinforcing ribs 44 firmly fix the cooling water flow pipe 42.
As shown in fig. 3, a second shoulder is provided at the lower end of the transmission shaft 12, a mounting hole is provided on the top plate 31 of the workpiece rotating frame, a connecting ring seat 31-1 is welded and fixed in the mounting hole, a threaded hole is provided on the side wall of the connecting ring seat 31-1, the lower end of the transmission shaft 12 is inserted into the middle hole of the connecting ring seat 31-1 and penetrates out from the lower side of the connecting ring seat 31-1, the second shoulder abuts against the upper end surface of the connecting ring seat, an external thread is provided on the side wall of the portion of the transmission shaft 12 penetrating out of the lower side of the connecting ring seat, and a locking nut 15 is screwed in cooperation, thereby locking the transmission shaft 12 on the connecting ring seat 31-1. A blind hole is formed at the lower end of the transmission shaft 12 corresponding to the position of the threaded hole on the side wall of the connecting ring seat 31-1, a locking bolt 31-2 is screwed into the threaded hole, and the inner end of the locking bolt 31-2 is inserted into the blind hole, so that the transmission shaft 12 can be prevented from rotating relative to the connecting ring seat 31-1.
The lower end of the transmission shaft 12 is fixedly provided with a transmission shaft sealing plate 16 for sealing the lower port of the transmission shaft through a screw, the transmission shaft sealing plate 16 is provided with a water inlet pipe 16-1 and a water outlet pipe 16-2, the water outlet end of the water inlet pipe 13-1 is connected with the upper end of the water inlet pipe 16-1 through a second water nozzle 1-5, the lower end of the water inlet pipe 16-1 is connected with a total water inlet connecting port through a high-pressure metal corrugated pipe 18, the water inlet end of the water outlet pipe 13-2 is connected with the upper end of the water outlet pipe 16-2 through a fourth water nozzle 1-6, and the lower end of the water outlet pipe 16-2 is connected with the total water outlet connecting port through the high-pressure metal corrugated pipe 18.
As shown in fig. 7 and 8, the split water inlet connection port, the total water inlet connection port, the split water outlet connection port and the total water outlet connection port have the same structure, and the specific structure is as follows: the outer end of the connecting port is provided with a counter bore, an annular runner sealing plate 38 is embedded and fixed in the counter bore, a runner hole is formed in the middle of the annular runner sealing plate 38 and is smaller than the connecting port, the outer end of the connecting port is provided with a water pipe connector 37-1, and the connector 37-1 is in threaded connection with a water pipe.
The cooling water flow tube 42 is a stainless steel tube.
The water inlet pipe 13-1 and the water outlet pipe 13-2 are hoses.
As shown in fig. 5, the specific supporting structure of the lower end of the workpiece turret 27 is: a limiting shaft 19 is arranged at the lower end of the workpiece rotating frame 27, a limiting seat 20 is fixedly arranged on the bottom surface 30 of the film plating chamber corresponding to the limiting shaft, and the limiting shaft 19 is matched and arranged on the limiting seat 20 through a second bearing 26.
The limiting seat 20 is fixed in the coating chamber through a limiting seat fixing ring 20-1.
A limiting shaft mounting hole is formed in the middle of the bottom plate 32 of the workpiece rotating frame, a connecting piece 19-1 is fixedly welded at the upper end of the limiting shaft 19, the connecting piece 19-1 is fixedly arranged on the bottom plate 32 of the workpiece rotating frame through a bolt, and the limiting shaft 19 downwards penetrates through the limiting shaft mounting hole.
The operation process of the circulating water cooling system of the embodiment is as follows: firstly, a system water inlet and a system water outlet are connected with an external water source supply circulation system, water flows into a system water inlet 1-1, enters an upper water converging cavity 1-10 in a rotary cover base 8 through a communication cavity 1-9, passes through a water inlet channel 8-4, then enters a water inlet pipe 13-1 in a transmission shaft 12, passes through a water inlet guide pipe 16-1, enters a water inlet split channel 17-2 of a split flow disc 17 through a high-pressure metal corrugated pipe, and is split into five cooling water flow pipes 42 through five split water inlet connectors on the channels, and the water flowing through the cooling water flow pipes 42 takes away heat of a workpiece rotating frame and a workpiece on the workpiece rotating frame. The water flows through the cooling water flow pipe 42, returns to the water outlet converging channel 17-1 of the split disc 17 through the split water outlet connecting port 17-5, flows out from the total water outlet connecting port 17-3 to the water outlet guide pipe 16-2, flows into the lower water collecting cavity 1-11 through the water outlet pipe 13-2, flows out from the system water outlet 1-2 through the water outlet channel 8-2.
And after the water inlet and outlet of the system are smooth, starting the workpiece rotating frame to test operation. The start motor 22 drives the reduction gearbox 21 to rotate, the output shaft of the reduction gearbox rotates together with the synchronous belt wheels thereon, and then the synchronous belt drags the transmission shaft 12 to rotate, the transmission shaft 12 is a driving shaft of the workpiece rotating frame, and the transmission shaft 12 realizes dynamic seal through an external magnetic fluid sealing piece. The transmission shaft 12 extends into the vacuum coating chamber and is fixedly connected with the workpiece rotating frame 27, so that the workpiece rotating frame 27 rotates along with the transmission shaft 12. In order to operate more stably, a limiting shaft and a bearing assembly at the bottom of the workpiece rotating frame 27 are arranged at the center of the bottom plate of the rotating frame, and the workpiece rotating frame 27 hung and fastened above the workpiece rotating frame is movably connected with a limiting supporting seat below the central axis to prevent the workpiece rotating frame from swinging. The other function of the transmission shaft 12 is to realize two channels of water inlet and water outlet entering the inner cavity of the transmission shaft by utilizing the special position of the central axis of the equipment in the cavity of the middle hole, and the transmission shaft stretches into the coating chamber to rotate together with the fixedly connected workpiece rotating frame, so that water can smoothly enter and exit while rotating. However, the water nozzle of the system water inlet and the system water outlet which are connected with the outside at the upper end of the transmission shaft can not move along the transmission shaft, otherwise, the external pipeline can be twisted together. The outer end of the transmission shaft adopts a rotary water pipe joint component, and is characterized in that an external water inlet nozzle and an external water outlet nozzle are fixed, the interfaces of a cavity in the shaft, which rotates along with the transmission shaft, and the water inlet nozzle and the water outlet nozzle are not directly connected with the fixed water inlet nozzle and the fixed water outlet nozzle, but the water flows of the fixed water inlet nozzle and the fixed water outlet nozzle outside the coating chamber respectively flow into respective water converging cavities in the rotary water pipe joint, and the rotary water inlet and the rotary water outlet on the transmission shaft are connected to the corresponding water converging cavities, so that the communication of a runner which rotates in an external static state is realized, and the problem is skillfully solved.
Claims (8)
1. The vacuum coating machine is internally provided with a coating chamber, a workpiece rotating frame is rotatably arranged in the coating chamber, and is characterized by further comprising a circulating water cooling system, wherein the circulating water cooling system is provided with a cooling water flow pipe, the cooling water flow pipe is arranged in the workpiece rotating frame and used for cooling the workpiece rotating frame, one end of the workpiece rotating frame is provided with a transmission shaft, the transmission shaft penetrates out of the coating chamber and is connected with a motor arranged outside the coating chamber, the outer end of the transmission shaft is provided with a rotary water pipe joint, and the in-out cooling water flow pipe is connected with an external water source through the rotary water pipe joint;
the rotary water pipe joint comprises a rotary cover base and a rotary cover, the rotary cover base is fixedly arranged at the outer end of the transmission shaft, the rotary cover is rotatably sleeved at the outer end of the rotary cover base in a sealing manner, a communication cavity is formed between the inner face of the rotary cover and the outer end of the rotary cover base, a system water inlet and a system water outlet positioned in the middle are arranged on the rotary cover, the system water inlet is communicated with the communication cavity, a water inlet channel and a water outlet channel positioned in the middle of the rotary cover base are arranged in the rotary cover base, the water inlet end of the water inlet channel is communicated with the communication cavity, the water outlet end of the water inlet channel is connected with the water inlet end of the cooling water flow pipe, the water outlet end of the water outlet channel penetrates out of the outer end of the rotary cover base and penetrates through the communication cavity, the water outlet end of the water outlet channel is rotatably connected with the water outlet end of the cooling water flow pipe in a sealing manner;
the outer side wall of the rotary cover base is connected with the inner side wall of the rotary cover through a first bearing, an oil seal used for sealing is further arranged between the outer side wall of the rotary cover base and the inner side wall of the rotary cover, and the oil seal is located between the communication cavity and the first bearing.
2. The vacuum coating machine according to claim 1, wherein: the rotary cover base is internally provided with an upper water collecting cavity and a lower water collecting cavity which are mutually isolated, the upper water collecting cavity is communicated with the communicating cavity through a communicating hole, the water inlet end of the water inlet channel is communicated with the upper water collecting cavity, the water inlet end of the water outlet channel is communicated with the lower water collecting cavity, and the lower water collecting cavity is communicated with the water outlet end of the cooling water flow pipe.
3. The vacuum coating machine according to claim 1, wherein: the transmission shaft is provided with a first synchronous belt pulley, the first synchronous belt pulley is positioned outside the coating chamber, the side edge of the first synchronous belt pulley is provided with a reduction gearbox through a fixing frame, the output shaft of the reduction gearbox is provided with a second synchronous belt pulley, the first synchronous belt pulley is connected with the second synchronous belt pulley through a synchronous belt, and the input end of the reduction gearbox is connected with a motor.
4. The vacuum coating machine according to claim 1, wherein: and a magnetic fluid sealing piece is arranged outside the upper top wall of the coating chamber, and is sleeved on the transmission shaft so as to achieve sealing.
5. The vacuum coating machine according to claim 1, wherein: the circulating water cooling system is provided with a plurality of cooling water flow pipes and a flow distribution disc, the flow distribution disc is arranged in the workpiece rotating frame, a water inlet flow channel and a water outlet flow converging channel are arranged in the flow distribution disc, a water distribution inlet connection port and a total water inlet connection port which are communicated with the water inlet flow converging channel are arranged on the surface of the flow distribution disc, a water distribution outlet connection port and a total water outlet connection port which are communicated with the water outlet flow converging channel are also arranged on the surface of the flow distribution disc, the number of the water distribution inlet connection ports and the water distribution outlet connection ports is the same as that of the cooling water flow pipes, the water distribution inlet connection ports and the water distribution outlet connection ports are connected with the water inlet ends and the water outlet ends of the cooling water flow pipes, and the total water inlet connection ports and the total water outlet connection ports are connected with the water outlet ends of the water inlet channels and the water inlet ends of the water outlet channels.
6. The vacuum coating machine according to claim 1, wherein: the utility model discloses a water inlet device, including the transmission shaft, the axis department of transmission shaft is equipped with middle part through-hole be equipped with inlet tube and outlet pipe in the middle part through-hole, the inlet end of inlet tube is connected with the play water end of inlet channel, the play water end of inlet tube is connected with total inlet connection mouth, the inlet end of outlet pipe is connected with total outlet connection mouth, the play water end of outlet pipe is connected with the play water end of outlet channel.
7. The vacuum coating machine according to claim 1, wherein: the lower extreme of transmission shaft is equipped with the second shoulder the roof of work piece revolving rack is opened there is the mounting hole, and in the mounting hole welded fastening has the go-between seat open there is the screw hole on the lateral wall of go-between seat, the lower extreme of transmission shaft inserts in the intermediate hole of go-between seat and wears out from the below of go-between seat, the second shoulder supports and leans on the up end of go-between seat be equipped with the external screw thread on the lateral wall of the part of transmission shaft that wears out below the go-between seat to cooperate to twist and have lock nut the lower extreme of transmission shaft is opened there is the blind hole in the position that corresponds the screw hole screw into locking bolt in the screw hole, locking bolt's inner end inserts in the blind hole.
8. The vacuum coating machine according to claim 6, wherein: the lower extreme of transmission shaft is through screw fixed mounting has the transmission shaft shrouding that is used for sealing the transmission shaft lower port be provided with intake conduit and play water conduit on the transmission shaft shrouding, the play water end of inlet tube is connected with the upper end of intake conduit, the lower extreme of intake conduit is connected with total intake connector through high-pressure metal bellows, the intake end of outlet pipe is connected with the upper end of play water conduit, the lower extreme of play water conduit is connected with total play water connector through high-pressure metal bellows.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811085077.8A CN109161866B (en) | 2018-09-17 | 2018-09-17 | Vacuum coating machine |
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| CN201811085077.8A CN109161866B (en) | 2018-09-17 | 2018-09-17 | Vacuum coating machine |
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| CN109161866A CN109161866A (en) | 2019-01-08 |
| CN109161866B true CN109161866B (en) | 2023-06-13 |
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| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
| CN108193185A (en) * | 2018-03-14 | 2018-06-22 | 嘉兴岱源真空科技有限公司 | A kind of fixture cooling device and nano material making apparatus |
| CN209292469U (en) * | 2018-09-17 | 2019-08-23 | 东莞市汇成真空科技有限公司 | A kind of vacuum coating equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5415694A (en) * | 1992-05-08 | 1995-05-16 | Balzers Aktiengesellschaft | Vacuum coating apparatus with rotary-driven substrate carrier |
| CN104131261A (en) * | 2014-07-08 | 2014-11-05 | 东莞市汇成真空科技有限公司 | Vacuum optical coating machine capable of moving along with workpiece and in-place dynamically monitoring membrane thickness |
| JP2018040051A (en) * | 2016-08-03 | 2018-03-15 | アイエッチアイ ハウザー テクノ コーティング ベー．フェー．ＩＨＩ Ｈａｕｚｅｒ Ｔｅｃｈｎｏ Ｃｏａｔｉｎｇ Ｂ．Ｖ． | Base material coating device |
| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
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| CN109161866A (en) | 2019-01-08 |
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Address after: No.2, Yanwu Longyuan Road, Dalingshan Town, Dongguan City, Guangdong Province, 523838 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: No. 2, Wangyuan Road, Yanwu Village, Dalingshan, Dongguan, Guangdong 523820 Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY CO.,LTD. |