CN109161866A - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
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- CN109161866A CN109161866A CN201811085077.8A CN201811085077A CN109161866A CN 109161866 A CN109161866 A CN 109161866A CN 201811085077 A CN201811085077 A CN 201811085077A CN 109161866 A CN109161866 A CN 109161866A
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- water
- water inlet
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- chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The invention discloses a kind of vacuum coating equipments, coating chamber is equipped in it, workpiece rotating frame is rotatably mounted in coating chamber, vacuum coating equipment further includes circulating water cooling system, circulating water cooling system is equipped with flow of cooling water pipe, flow of cooling water pipe is arranged in workpiece rotating frame, it can be cooled down to extension workpiece is filled on workpiece rotating frame, transmission shaft is equipped in one end of workpiece rotating frame, transmission shaft is pierced by coating chamber and connect with the motor being mounted on outside coating chamber, rotation water pipe head is installed in the outer end of transmission shaft, the flow of cooling water pipe of disengaging is connect by rotating water pipe head with external water source.The present invention solves problem of temperature rise when not heatproof workpiece continuous coating, can carry out continuous coating to not heatproof workpiece.
Description
Technical field
The present invention relates to a kind of vacuum coating equipments.
Background technique
Vacuum coating equipment generally configures cathode arc source or magnetic controlled sputtering target subregion is discretely mounted on coating chamber side wall,
Emit target plating material plasma into coating chamber.Coating chamber is provided with workpiece rotating frame, and workpiece rotating frame is driven by a motor rotation, quilt
Workpiece hanging or clamping are plated on workpiece rotating frame, as workpiece rotating frame makees revolution and/or spinning motion, before such workpiece passes through target
Qu Shineng receives the plasma of target transmitting from multi-angle and deposits film forming.Coating can be effectively improved by the rotation of workpiece rotating frame
Uniformity.But since workpiece constantly receives the bombardment of lotus energy particle in coating process, the temperature of workpiece is continuously improved, and true
Aerial heat dissipation effect is very poor, therefore certain workpiece substrate temperature rises can be more than its permissible value (such as plastic cement), when being more than its permissible value
Coating process can only be interrupted, this, which can continuously grow film layer, adversely affects.
Summary of the invention
The technical problems to be solved by the invention are just to provide a kind of vacuum coating equipment, and it is continuous to solve not heatproof workpiece
Problem of temperature rise when plated film can carry out continuous coating to not heatproof workpiece.
Above-mentioned technical problem is solved, The technical solution adopted by the invention is as follows:
A kind of vacuum coating equipment, it is interior to be equipped with coating chamber, workpiece rotating frame, feature are rotatably mounted in coating chamber
It is that the vacuum coating equipment further includes circulating water cooling system, circulating water cooling system is equipped with flow of cooling water pipe, flow of cooling water pipe
It is arranged in workpiece rotating frame, workpiece rotating frame is cooled down, be equipped with transmission shaft in one end of workpiece rotating frame, transmission shaft is pierced by plated film
Room is simultaneously connect with the motor being mounted on outside coating chamber, is equipped with rotation water pipe head, the cooling of disengaging in the outer end of transmission shaft
Water flowing pipe is connect by rotating water pipe head with external water source.
The rotation water pipe head includes rotation cover base and rotation lid, and rotation cover base is fixedly mounted on the outer of transmission shaft
End, rotation cover rotatable sealing shroud mounted in the outer end of rotation cover base, rotation lid inner face and rotate cover base outer end it
Between form connection chamber, cover to be provided in rotation and system water inlet and be located in the middle system water outlet, system water inlet and company
Cavity connection is equipped with intake tunnel and the exhalant canal among rotation cover base in rotation cover base, intake tunnel
Water inlet end is connect with chamber connection, the water outlet of intake tunnel is connected to the water inlet end of flow of cooling water pipe, the water outlet of exhalant canal
It holds the outer end from rotation cover base to be pierced by, and passes through connection chamber, and rotatably sealing is plugged on the inner end of system water outlet, out
The water inlet end of aquaporin is connect with the water outlet of flow of cooling water pipe.
Be equipped with the upper charge for remittance chamber and lower charge for remittance chamber that are isolated from each other in rotation cover base, upper charge for remittance chamber by intercommunicating pore with
It is connected to chamber connection, the water inlet end of intake tunnel is connected to upper charge for remittance chamber, and the water inlet end of exhalant canal is connected to lower charge for remittance chamber, lower remittance
Water cavity is connected to the water outlet of flow of cooling water pipe again.
It is connected between the lateral wall of the rotation cover base and the inner sidewall of rotation lid by first bearing, and is covered in rotation
The oil sealing for sealing is additionally provided between the lateral wall of pedestal and the inner sidewall of rotation lid, oil sealing is located at connection chamber and first bearing
Between.
First synchronous pulley is installed on the transmission shaft, the first synchronous pulley is located at outside coating chamber, same first
The side of step belt wheel is equipped with reduction gearbox by fixed frame, is equipped with the second synchronous pulley on the output shaft of reduction gearbox, and first
With the second synchronous pulley by synchronous band connection, the input terminal of reduction gearbox is connected to motor synchronous pulley.
Magnetic fluid seal is installed outside the upper roof of the coating chamber, and magnetic fluid seal is placed on transmission shaft,
To reach dynamic sealing.
The circulating water cooling system is equipped with a plurality of flow of cooling water pipe and shunting disk, shunting disk are mounted in workpiece rotating frame,
In shunting disk be equipped with water inlet runner and water outlet confluence road, the surface of shunting disk be equipped with water inlet runner be connected to divide into
Water connector and total water inlet connector are additionally provided on the surface of shunting disk and are discharged point water outlet connector that confluence road is connected to and always
Water outlet connector, a point water inlet and divide the quantity of water outlet connector identical as the quantity of flow of cooling water pipe respectively at connector, divide into
Water connector and water outlet connector is divided to connect respectively with the water inlet end of flow of cooling water pipe and water outlet, total connector and total of intaking
Water outlet connector is connect with the water inlet end of the water outlet of intake tunnel and exhalant canal respectively.
It is equipped with middle through-hole at the central axes of the transmission shaft, water inlet pipe and outlet pipe, water inlet are equipped in middle through-hole
The water outlet of the water inlet end of pipe and intake tunnel connects, and the water outlet of water inlet pipe is connect with connector of always intaking, outlet pipe into
Water end (W.E.) is connect with total water outlet connector, and the water outlet of outlet pipe and the water inlet end of exhalant canal connect.
It is equipped with second shaft shoulder in the lower end of transmission shaft, is provided with mounting hole in the top plate of workpiece rotating frame, and weld in mounting hole
It connects and is fixed with connection ring seat, threaded hole, the centre of the lower end insertion connection ring seat of transmission shaft are provided on the side wall of connection ring seat
It is pierced by hole and below connection ring seat, second shaft shoulder is resisted against on the upper surface of connection ring seat, in the company of being pierced by of transmission shaft
The side wall for connecing the part below ring seat is equipped with external screw thread, and cooperates and be screwed with locking nut, so that transmission shaft is locked at connection
In ring seat, it is provided with blind hole in the position that the lower end of transmission shaft corresponds to threaded hole, locking bolt has been screwed into threaded hole, locks spiral shell
In the inner end insertion blind hole of bolt, thus prevent transmission shaft relative to connection ring seat rotation.
It is mounted by means of screws with the transmission shaft sealing plate for sealing transmission shaft lower port in the lower end of transmission shaft, is being passed
Penstock and water output duct are provided on moving axis sealing plate, the water outlet of water inlet pipe and the upper end of penstock connect, and water inlet is led
The lower end of pipe is connect by high-pressure metal bellows with total water inlet connector, and the water inlet end of outlet pipe and the upper end of water output duct connect
It connects, the lower end of water output duct is connect by high-pressure metal bellows with total water outlet connector.
Compared with prior art, the invention has the following advantages:
1, circulating water cooling system is successfully arranged in the present invention in vacuum coating equipment, by the flow of cooling water of circulating water cooling system
Pipe is arranged in workpiece rotating frame and cools down to the workpiece on workpiece rotating frame and workpiece rotating frame, solves not heatproof workpiece and continuously plates
Problem of temperature rise when film can carry out continuous coating to not heatproof workpiece (such as plastic cement and low-melting alloy), expand vacuum coating
Machine plates workpiece material range.
2, existing vacuum coating equipment is that heatproof workpiece plated film is not helpless to force down plated film power or be plated using interval for adaptation
Film mode controls workpiece temperature rise, causes extreme influence to coating quality, the present invention can not be limited by above-mentioned unfavorable conditions, favorably
In carrying out more reasonable technique plated film, film quality is improved.
3, the present invention solves the flow of cooling water pipe rotated with workpiece rotating frame and outer, stationary by rotating water pipe head
Water source connection the problem of.
4, rotation water pipe head of the invention is simple and compact for structure, and design is reasonable.
Detailed description of the invention
Fig. 1 is schematic cross-sectional view of the invention；
Fig. 2 be II in Fig. 1 at enlarged diagram；
Fig. 3 be I in Fig. 1 at enlarged diagram；
Fig. 4 be IV in Fig. 1 at enlarged diagram；
Fig. 5 be III in Fig. 1 at enlarged diagram；
Fig. 6 is the structural schematic diagram of shunting disk of the invention；
Fig. 7 is the schematic cross-sectional view of shunting disk of the invention；
Fig. 8 is the enlarged diagram in Fig. 7 at A；
Fig. 9 is the shunting schematic diagram of shunting disk of the invention；
Figure 10 is the structural schematic diagram of workpiece rotating frame of the invention；
Figure 11 is the schematic cross-sectional view of workpiece rotating frame of the invention；
Figure 12 is the schematic diagram that flow of cooling water pipe of the invention is mounted in lateral coaming plate；
Figure 13 is the schematic side view that flow of cooling water pipe of the invention is mounted in lateral coaming plate；
Figure 14 is the assembly relation schematic diagram of water pipe pressing plate and flow of cooling water pipe of the invention；
Figure 15 is the assembly relation schematic diagram of sizing reinforcing rib and flow of cooling water pipe of the invention.
Appended drawing reference meaning in figure:
1-1 system water inlet；1-2 system water outlet；The first water tap of 1-3；1-4 third water tap；The second water tap of 1-5；1-6
Four water taps；1-9 is connected to chamber；The upper charge for remittance chamber of 1-10；Charge for remittance chamber under 1-11；2 first sealing rings；3 rotation lids；4 oil sealings；5 spacer rings；6
First bearing；7 annular cover plates；8 rotation cover bases；8-1 intercommunicating pore；8-2 exhalant canal；Partition in 8-3；8-4 intake tunnel；9
Rotation stop part；10 synchronous belts；11 first synchronous pulleys；12 transmission shafts；The capping of the upper end 12-1；12-2 magnetic fluid seal；13-1 into
Water pipe；13-2 outlet pipe；15 locking nuts；16 knives；16-1 penstock；16-2 water output duct；17 shunting disks；17-1 water outlet converges
Runner；17-2 water inlet runner；The total water outlet connector of 17-3；17-4 is always intake connector；17-5 divides water outlet connector；17-6 points
Water inlet connector；18 high-pressure metal bellowss；19 limit shafts；19-1 connector；20 limit bases；The second synchronous pulley of 20-1；21
Reduction gearbox；22 motors；23 fixed frames；25 second sealing rings；26 second bearings；27 workpiece rotating frames；The upper roof of 28 coating chambers；29
Coating chamber；30 coating chamber inner bottom surfaces；31 top plates；31-1 connection ring seat；31-2 locking bolt；32 bottom plates；33 supported rod erectings；35 enclose
Plate bolt；36 flange seats；37-1 connector；38 annular runner sealing plates；40 lateral coaming plates；41 water pipe joints；42 flow of cooling water
Pipe；43 water pipe pressing plates；44 sizing reinforcing ribs.
Specific embodiment
The present invention is further described below with reference to embodiment.
It is as shown in Figure 1 the vacuum coating equipment of the present embodiment, it is interior to be equipped with coating chamber 29, it is vacuum in coating chamber 29,
Rotatably mounted in coating chamber 29 to have workpiece rotating frame 27, vacuum coating equipment further includes circulating water cooling system, and circulating water cooling system is set
There is flow of cooling water pipe 42, flow of cooling water pipe 42 is arranged in workpiece rotating frame 27, on workpiece rotating frame 27 and workpiece rotating frame
Workpiece is cooled down, and is equipped with transmission shaft 12 in one end of workpiece rotating frame 27, transmission shaft 12 is pierced by coating chamber 29 and plates with being mounted on
The motor 22 in face connects outside film room, and motor 22 drives workpiece rotating frame 27 to rotate by transmission shaft 12, pacifies in the outer end of transmission shaft 12
Equipped with rotation water pipe head, flow of cooling water pipe 42 is connect by rotating water pipe head with external water source.Workpiece rotating frame 27 can be with
It is to be transversely mounted, vertically install or tilt installation, the workpiece rotating frame 27 of the present embodiment is vertical installation, the lower end of workpiece rotating frame 27
Rotatable support is pierced by the upper surface of coating chamber 29 in the bottom surface of coating chamber 29, transmission shaft 12 straight up.
As shown in Fig. 2, the rotation water pipe head of the present embodiment includes rotation cover base 8 and rotation lid 3, cover base 8 is rotated
It is fixedly mounted on the outer end of transmission shaft 12, specific fixed form are as follows: be bolted upper end seal in the upper end of transmission shaft 12
12-1 is covered, rotation cover base 8 is weldingly fixed on the upper surface of upper end capping 12-1.The rotatable sealing shroud of lid 3 is rotated mounted in rotation
The outer end (in the present embodiment, the upper end for rotating cover base is its outer end) of cover base 8, in rotation 3 inner face of lid and rotation base
Connection chamber 1-9 is formed between the outer end of seat 8, is provided with system water inlet 1-1 on rotation lid 3 and is located in the middle system water outlet
Mouth 1-2, system water inlet 1-1 are connect with chamber 1-9 is connected to, and intake tunnel 8-4 is equipped in rotation cover base 8 and is located to rotate and is covered
Exhalant canal 8-2 among pedestal, the water inlet end of intake tunnel 8-4 are connected to chamber 1-9 is connected to, the water outlet of intake tunnel 8-4
Finally connect with the water inlet end of flow of cooling water pipe 42, the water outlet of exhalant canal 8-2 from the outer end of rotation cover base 8 (this
In embodiment, the upper end for rotating cover base is its outer end) it is pierced by, and connection chamber 1-9 is passed through, and rotatably sealing is plugged on
The inner end of system water outlet 1-2, the water inlet end of exhalant canal 8-2 are finally connect with the water outlet of flow of cooling water pipe 42.
Rotate cover base inside more specific structure are as follows: rotation cover base 8 in by middle partition 8-3 formed mutually every
The upper charge for remittance chamber 1-10 and lower charge for remittance chamber 1-11, upper charge for remittance chamber 1-10 left is connected to by intercommunicating pore 8-1 with chamber 1-9 is connected to, into
The water inlet end of water channel 8-4 is connected to upper charge for remittance chamber 1-10, and the water inlet end of exhalant canal 8-2 is connected to lower charge for remittance chamber 1-11, under
Charge for remittance chamber 1-11 is finally connected to the water outlet of flow of cooling water pipe 42 again.
The rotatable sealing shroud of lid 3 is rotated mounted in the specific structure of the outer end of rotation cover base 8 are as follows: rotation cover base 8
By first bearing connection 6 between lateral wall and the inner sidewall for rotating lid 3, and covered in the lateral wall of rotation cover base 8 and rotation
Inner sidewall between be additionally provided with oil sealing 4 for sealing, oil sealing 4 is located between connection chamber 1-9 and first bearing 6.
Spacer ring 5 is equipped between oil sealing 4 and first bearing 6.
The mounting structure of first bearing are as follows: first shaft shoulder is equipped on rotation cover base 8, first bearing is placed on rotation base
8 periphery of seat, and be resisted against on first shaft shoulder, annular cover plate 7 is equipped with by bolt in the inner end of rotation lid 3, first bearing
Limit.
The water outlet of exhalant canal 8-2 rotatably seals the inner end for being plugged on system water outlet 1-2: in system water outlet
The inner end of 1-2 is equipped with bulge loop, and the water outlet activity of exhalant canal 8-2 is inserted into bulge loop, in the water outlet of bulge loop and exhalant canal
Between the first sealing ring 2 is installed.
It is separately provided for connecting with the water pipe of external water source in the outer end of system water inlet 1-1 and system water outlet 1-2
The connection water tap connect.
Circulating water cooling system is additionally provided with the rotation stop part 9 for preventing rotation lid rotation, and 9 one end of rotation stop part is fixed on rotation lid
On 3, the other end is fixed on the fixing piece of vacuum coating equipment, and the present embodiment is to be fixed on the upper surface of magnetic fluid seal 12-2.
In 12 rotation process of transmission shaft, rotation stop part 9 prevents rotation lid 3 from following rotation, is also prevented from rotation lid 3 and shakes.
The connection structure of transmission shaft 12 and motor 22 are as follows: the first synchronous pulley 11 is equipped on transmission shaft 12, first is same
Step belt wheel 11 is located at 28 outside of upper roof of coating chamber 29, is equipped with and is subtracted by fixed frame 23 in the side of the first synchronous pulley 11
Fast case 21 is equipped with the second synchronous pulley 21-1, the first synchronous pulley 11 and the second synchronous belt on the output shaft of reduction gearbox 21
Wheel 21-1 is connected by synchronous belt 10, and the input terminal of reduction gearbox 21 is connect with motor 22.
Magnetic fluid seal 12-2 is installed outside the upper roof 28 of coating chamber 29, and magnetic fluid seal is placed on transmission shaft
On 12, to reach dynamic sealing.The magnetic fluid seal 12-2 of the present embodiment is mounted on 29 upper surface of coating chamber, table on coating chamber 29
Installation is also sealed by the second sealing ring 25 between face and magnetic fluid seal 12-2.
The circulating water cooling system of the present embodiment is equipped with a plurality of flow of cooling water pipe 42 and shunting disk 17, and shunting disk is mounted on work
In part pivoted frame, the present embodiment is equipped with five flow of cooling water pipes 42, as shown in Fig. 1, Fig. 6 and Fig. 9, the shunting disk 17 of the present embodiment
It is mounted on the top surface inside workpiece rotating frame, equipped with water inlet runner 17-2 and water outlet confluence road 17-1 in shunting disk 17, is being divided
The surface of flow table 17 is equipped with point water inlet connector 17-6 being connected to runner 17-2 of intaking and total water inlet connector 17-4, is dividing
The surface of flow table 17 is additionally provided with point water outlet connector 17-5 and total water outlet connector 17-3 being connected to water outlet confluence road 17-1, point
Water inlet and divides the quantity of water outlet connector 17-5 identical as the quantity of flow of cooling water pipe 42 respectively at connector 17-6, this implementation is set
There are five a point water inlet connector 17-6 and five points of water outlet connector 17-5, divide water inlet connector 17-6 and divide water outlet connector
17-5 is connect with the water inlet end of flow of cooling water pipe 42 and water outlet respectively, total connector 17-4 and total water outlet connector of intaking
17-3 is connect with the water inlet end of the water outlet of intake tunnel 8-4 and exhalant canal 8-2 respectively.Intake runner and water outlet confluence road
It is circular passage.
As shown in Figures 2 and 3, it is equipped with middle through-hole at the central axes of transmission shaft 12, water inlet pipe is equipped in middle through-hole
The water inlet end of 13-1 and outlet pipe 13-2, water inlet pipe 13-1 are connect by the first water tap 1-3 with the water outlet of intake tunnel 8-4,
The water outlet of water inlet pipe 13-1 is connect by the second water tap 1-5 with total water inlet connector, and the water inlet end of outlet pipe 13-2 passes through the
Four water tap 1-6 are connect with total water outlet connector, and the water outlet of outlet pipe 13-2 passes through the water inlet of third water tap 1-4 with exhalant canal
End connection.First water tap 1-3 and third water tap 1-4 is separately positioned on upper end capping 12-1.
As shown in Figure 10~15 and Fig. 4, the specific structure of the workpiece rotating frame of the present embodiment are as follows: workpiece rotating frame 27 includes top plate
31, bottom plate 32, muti-piece lateral coaming plate 40 and a plurality of supported rod erecting 33, the present embodiment is provided with five pieces of lateral coaming plates and four supports are vertical
Bar, four supported rod erectings are distributed in four angles, are respectively welded flange seat 36 at the both ends of supported rod erecting 33, flange seat 36 passes through
Bolt is connect with top plate 31 and bottom plate 32, to form support to top plate 31 and bottom plate 32, the both sides up and down of lateral coaming plate 40 pass through
Coaming plate screw 35 is fixed on the side of top plate 31 and bottom plate 32, and lateral coaming plate 40 is distributed around workpiece rotating frame 27.Every piece of lateral coaming plate
Inner face be respectively arranged with a flow of cooling water pipe.As shown in Figure 12~15, every piece of lateral coaming plate 40 all through bending and molding three times,
About 42 zigzag of flow of cooling water pipe is distributed in the inner face of lateral coaming plate 40 at S type, and flow of cooling water pipe 42 is covered with side substantially
Coaming plate 40, the water pipe joint 41 of flow of cooling water pipe 42 are respectively positioned on the top of lateral coaming plate 40, pass through bolt in lateral coaming plate 40
It is fixed with water pipe pressing plate 43, water pipe pressing plate 43 is pressed on the outer surface of flow of cooling water pipe 42, the also fixed peace in lateral coaming plate 40
Equipped with sizing reinforcing rib 44, flow of cooling water pipe 42 is corresponded on sizing reinforcing rib 44 and is provided with through-hole, on flow of cooling water pipe 42
Under sequentially pass through back and forth sizing reinforcing rib 44 on through-hole.Water pipe pressing plate 43 and sizing reinforcing rib 44 to flow of cooling water pipe 42 into
It has gone and has been firmly fixed.
As shown in figure 3, being equipped with second shaft shoulder in the lower end of transmission shaft 12, it is provided with mounting hole in the top plate 31 of workpiece rotating frame,
And connection ring seat 31-1 is welded in mounting hole, threaded hole, transmission shaft 12 are provided on the side wall of connection ring seat 31-1
Lower end insertion connection ring seat 31-1 interstitial hole in and from connection ring seat 31-1 below be pierced by, second shaft shoulder is resisted against connection
On the upper surface of ring seat, it is equipped with external screw thread on the side wall for the part of transmission shaft 12 being pierced by below connection ring seat, and cooperate and twist
There is locking nut 15, so that transmission shaft 12 is locked on connection ring seat 31-1.Ring seat is correspondingly connected in the lower end of transmission shaft 12
The position of threaded hole on 31-1 side wall is provided with blind hole, and locking bolt 31-2 has been screwed into threaded hole, locking bolt 31-2's
Inner end is inserted into blind hole, thus prevents transmission shaft 12 relative to connection ring seat 31-1 rotation.
It is mounted by means of screws with the transmission shaft sealing plate 16 for sealing transmission shaft lower port in the lower end of transmission shaft 12,
Penstock 16-1 and water output duct 16-2, the water outlet of water inlet pipe 13-1 and penstock are provided on transmission shaft sealing plate 16
The upper end of 16-1 passes through high-pressure metal bellows 18 and total water inlet by the second water tap 1-5 connection, the lower end of penstock 16-1
Connector connection, the water inlet end of outlet pipe 13-2 are connect with the upper end of water output duct 16-2 by the 4th water tap 1-6, water output duct
The lower end of 16-2 is connect by high-pressure metal bellows 18 with total water outlet connector.
As shown in Figure 7 and Figure 8, divide water inlet connector, connector of always intaking, divide water outlet connector and total water outlet connector
Structure is identical, specific structure are as follows: and it is equipped with counterbore in the outer end of connector, is embedded in counterbore and is fixed with annular runner sealing plate 38,
The centre of annular runner sealing plate 38 offers runner hole, and runner hole is less than connector, and the outer end of connector is provided with water pipe and connects
Connector 37-1 is spirally connected between connector 37-1 and water pipe.
Flow of cooling water pipe 42 is stainless steel tube.
Water inlet pipe 13-1 and outlet pipe 13-2 is hose.
As shown in figure 5, the specific supporting structure of the lower end of workpiece rotating frame 27 are as follows: be equipped with limit in the lower end of workpiece rotating frame 27
Axis 19 is fixedly installed with limit base 20 in the corresponding limit shaft of coating chamber inner bottom surface 30, and limit shaft 19 is cooperated by second bearing 26
It is mounted on limit base 20.
Limit base 20 is fixed in coating chamber by limit base fixed ring 20-1.
It is provided with limit shaft mounting hole in the middle part of the bottom plate 32 of workpiece rotating frame, is welded with connection in the upper end of limit shaft 19
Part 19-1, connector 19-1 are bolted on the upper surface of bottom plate 32 of workpiece rotating frame, and limit shaft 19 is passed down through limit shaft
Mounting hole.
The operational process of the circulating water cooling system of the present embodiment are as follows: first by system water inlet and system water outlet and outside
The connection of the water source supply circulatory system, water flow flow into 1-1 from system water inlet, by being connected to chamber 1-9, into rotation cover base 8
Upper charge for remittance chamber 1-10, using intake tunnel 8-4, subsequently into the water inlet pipe 13-1 in transmission shaft 12, then through penstock
After 16-1, the water inlet runner 17-2 of shunting disk 17 is entered by high-pressure metal bellows, and through five points of water inlets on runner
Connector branches to five flow of cooling water pipes 42, and the water flow for flowing through flow of cooling water pipe 42 will take away workpiece rotating frame and workpiece turn
The heat of workpiece on frame.After water flow flows through flow of cooling water pipe 42, shunting disk 17 is back to through a point water outlet connector 17-5
Water outlet confluence road 17-1, flows out to water output duct 16-2 from total water outlet connector 17-3, passes through outlet pipe 13-2 into lower remittance
Water cavity 1-11 flows out after passing through exhalant canal 8-2 from system water outlet 1-2.
After system Inlet and outlet water is unimpeded, start workpiece rotating frame test running.Starting motor 22 drives reduction gearbox 21 to rotate, and slows down
The output shaft of case is rotated together together with with wheel is synchronized thereon, then synchronized band dragging transmission shaft 12 rotates, and transmission shaft 12 is workpiece
The drive shaft of pivoted frame, transmission shaft 12 realize dynamic sealing by its outer magnetic fluid seal.Transmission shaft 12 protrudes into vacuum coating room
And the workpiece rotating frame 27 that is connected, allow workpiece rotating frame 27 to rotate together in company with transmission shaft 12.It is more stable in order to run, workpiece rotating frame 27
Bottom plate center is equipped with pivoted frame bottom limit shaft and bearing assembly, allows the workpiece rotating frame 27 of its top hanging fastening below central axes
There is limit fulcrum bearing to be flexibly connected, prevents its swing.Another function of transmission shaft 12 is to occupy equipment using the cavity in in-between hole
Central axes specific position, realize two channel of inflow and outflow for entering transmission shaft inner cavity, protrude into coating chamber in company with transmission shaft
Interior to rotate together with connected workpiece rotating frame, Inlet and outlet water is smoothed in realization while rotating.But in transmission shaft upper end and the external world
The system water inlet of connection and the water tap of system water outlet cannot be rotated together with transmission shaft, and otherwise external pipe meeting wringing exists
Together.Thus in the outer end of transmission shaft using rotation water pipe joint assembly, its structure feature exactly outside is solid into and out of water tap
It is fixed motionless, and as the interface of two inlet tube and outlet tube of axis internal cavity of transmission shaft rotation is not direct and above-mentioned motionless into and out of water tap
Connection, but the motionless water flow into and out of water tap separately flows into respective charge for remittance chamber in rotation water pipe head outside coating chamber, and allows
The entery and delivery port rotated on transmission shaft is connected on corresponding charge for remittance chamber, realizes the outer quiet interior runner connection turned, ingenious
Ground solves the problems, such as.
Claims (10)
1. a kind of vacuum coating equipment, interior to be equipped with coating chamber, workpiece rotating frame is rotatably mounted in the coating chamber, it is special
Sign is that the vacuum coating equipment further includes circulating water cooling system, and the circulating water cooling system is equipped with flow of cooling water pipe, described cold
But water flowing pipe is arranged in the workpiece rotating frame, is cooled down to the workpiece rotating frame, is set in one end of the workpiece rotating frame
There is transmission shaft, the transmission shaft is pierced by the coating chamber and connect with the motor being mounted on outside coating chamber, in the transmission shaft
Outer end rotation water pipe head is installed, the flow of cooling water pipe of disengaging passes through the rotation water pipe head and external water source connects
It connects.
2. vacuum coating equipment according to claim 1, it is characterised in that: the rotation water pipe head includes rotation cover base
It is covered with rotation, the rotation cover base is fixedly mounted on the outer end of the transmission shaft, the rotatable sealing suit of rotation lid
In the outer end of the rotation cover base, is formed between the rotation lid inner face and the outer end for rotating cover base and be connected to chamber, in institute
It states rotation and covers and be provided with system water inlet and be located in the middle system water outlet, the system water inlet is connected to chamber is connected to,
It is described rotation cover base in be equipped with intake tunnel and positioned at rotation cover base among exhalant canal, the intake tunnel into
Water end (W.E.) is connected to chamber connection with described, and the water outlet of the intake tunnel is connect with the water inlet end of the flow of cooling water pipe, described
The water outlet of exhalant canal is pierced by from the outer end of the rotation cover base, and passes through the connection chamber, and rotatably sealing is inserted
It connects in the inner end of system water outlet, the water inlet end of the exhalant canal is connect with the water outlet of the flow of cooling water pipe.
3. vacuum coating equipment according to claim 2, it is characterised in that: be equipped in the rotation cover base mutually isolated
The upper charge for remittance chamber and lower charge for remittance chamber opened, the upper charge for remittance chamber are connected to chamber connection with described by intercommunicating pore, the intake tunnel
Water inlet end is connected to the upper charge for remittance chamber, and the water inlet end of the exhalant canal is connected to the lower charge for remittance chamber, the lower charge for remittance chamber
It is connected to again with the water outlet of flow of cooling water pipe.
4. vacuum coating equipment according to claim 2 or 3, it is characterised in that: the lateral wall of the rotation cover base and institute
It states and is connected between the inner sidewall of rotation lid by first bearing, and in the lateral wall of the rotation cover base and the rotation lid
The oil sealing for sealing is additionally provided between inner sidewall, the oil sealing is between connection chamber and the first bearing.
5. vacuum coating equipment according to claim 1, it is characterised in that: be equipped with the first synchronous belt on the transmission shaft
Wheel, first synchronous pulley are located at outside the coating chamber, are installed in the side of first synchronous pulley by fixed frame
There is reduction gearbox, the second synchronous pulley is installed on the output shaft of the reduction gearbox, first synchronous pulley is synchronous with second
Belt wheel passes through synchronous band connection, and the input terminal of the reduction gearbox is connected to motor.
6. vacuum coating equipment according to claim 1, it is characterised in that: be equipped with magnetic outside the upper roof of the coating chamber
Fluid seal, and the magnetic fluid seal is placed on transmission shaft, to reach sealing.
7. vacuum coating equipment according to claim 1, it is characterised in that: the circulating water cooling system is equipped with a plurality of cooling water
Flow duct and shunting disk, the shunting disk are mounted in the workpiece rotating frame, in the shunting disk be equipped with water inlet runner and
Water outlet confluence road is equipped with point water inlet connector being connected to water inlet runner on the surface of the shunting disk and total water inlet connects
Mouthful, point water outlet connector and total water outlet connector being connected to water outlet confluence road are additionally provided on the surface of the shunting disk, it is described
Divide water inlet connector and divide the quantity of water outlet connector identical as the quantity of the flow of cooling water pipe respectively, described point of water inlet connects
Interface and water outlet connector is divided to connect respectively with the water inlet end of the flow of cooling water pipe and water outlet, total water inlet connector
It is connect respectively with the water inlet end of the water outlet of the intake tunnel and the exhalant canal with total water outlet connector.
8. vacuum coating equipment according to claim 1, it is characterised in that: logical equipped with middle part at the central axes of the transmission shaft
Hole, is equipped with water inlet pipe and outlet pipe in the middle through-hole, and the water inlet end of the water inlet pipe and the water outlet of intake tunnel connect
It connecing, the water outlet of the water inlet pipe is connect with total water inlet connector, and the water inlet end of the outlet pipe is connect with total water outlet connector,
The water outlet of the outlet pipe and the water inlet end of exhalant canal connect.
9. vacuum coating equipment according to claim 1, it is characterised in that: be equipped with the second axis in the lower end of the transmission shaft
Shoulder is provided with mounting hole in the top plate of the workpiece rotating frame, and is welded with connection ring seat in the mounting hole, in the company
It connects and is provided with threaded hole on the side wall of ring seat, in the interstitial hole of the lower end of transmission shaft insertion connection ring seat and from connection ring seat
It is pierced by below, second shaft shoulder is resisted against on the upper surface of connection ring seat, in being pierced by below connection ring seat for the transmission shaft
Part side wall be equipped with external screw thread, and cooperate be screwed with locking nut, correspond to the position of threaded hole in the lower end of the transmission shaft
It sets and is provided with blind hole, locking bolt has been screwed into the threaded hole, the inner end of the locking bolt is inserted into the blind hole.
10. vacuum coating equipment according to claim 1, it is characterised in that: solid by screw in the lower end of the transmission shaft
Dingan County is provided with penstock and is gone out on the transmission shaft sealing plate equipped with the transmission shaft sealing plate for sealing transmission shaft lower port
Water conduit, the water outlet of the water inlet pipe and the upper end of penstock connect, and the lower end of the penstock passes through high-pressure metal
Bellows is connect with total water inlet connector, and the water inlet end of the outlet pipe and the upper end of water output duct connect, the water output duct
Lower end connect with total water outlet connector by high-pressure metal bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811085077.8A CN109161866B (en) | 2018-09-17 | 2018-09-17 | Vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811085077.8A CN109161866B (en) | 2018-09-17 | 2018-09-17 | Vacuum coating machine |
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| Publication Number | Publication Date |
|---|---|
| CN109161866A true CN109161866A (en) | 2019-01-08 |
| CN109161866B CN109161866B (en) | 2023-06-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811085077.8A Active CN109161866B (en) | 2018-09-17 | 2018-09-17 | Vacuum coating machine |
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| Country | Link |
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| CN (1) | CN109161866B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5415694A (en) * | 1992-05-08 | 1995-05-16 | Balzers Aktiengesellschaft | Vacuum coating apparatus with rotary-driven substrate carrier |
| CN104131261A (en) * | 2014-07-08 | 2014-11-05 | 东莞市汇成真空科技有限公司 | Vacuum optical coating machine capable of moving along with workpiece and in-place dynamically monitoring membrane thickness |
| JP2018040051A (en) * | 2016-08-03 | 2018-03-15 | アイエッチアイ ハウザー テクノ コーティング ベー．フェー．ＩＨＩ Ｈａｕｚｅｒ Ｔｅｃｈｎｏ Ｃｏａｔｉｎｇ Ｂ．Ｖ． | Base material coating device |
| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
| CN108193185A (en) * | 2018-03-14 | 2018-06-22 | 嘉兴岱源真空科技有限公司 | A kind of fixture cooling device and nano material making apparatus |
| CN209292469U (en) * | 2018-09-17 | 2019-08-23 | 东莞市汇成真空科技有限公司 | A kind of vacuum coating equipment |
-
2018
- 2018-09-17 CN CN201811085077.8A patent/CN109161866B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5415694A (en) * | 1992-05-08 | 1995-05-16 | Balzers Aktiengesellschaft | Vacuum coating apparatus with rotary-driven substrate carrier |
| CN104131261A (en) * | 2014-07-08 | 2014-11-05 | 东莞市汇成真空科技有限公司 | Vacuum optical coating machine capable of moving along with workpiece and in-place dynamically monitoring membrane thickness |
| JP2018040051A (en) * | 2016-08-03 | 2018-03-15 | アイエッチアイ ハウザー テクノ コーティング ベー．フェー．ＩＨＩ Ｈａｕｚｅｒ Ｔｅｃｈｎｏ Ｃｏａｔｉｎｇ Ｂ．Ｖ． | Base material coating device |
| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
| CN108193185A (en) * | 2018-03-14 | 2018-06-22 | 嘉兴岱源真空科技有限公司 | A kind of fixture cooling device and nano material making apparatus |
| CN209292469U (en) * | 2018-09-17 | 2019-08-23 | 东莞市汇成真空科技有限公司 | A kind of vacuum coating equipment |
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| CN109161866B (en) | 2023-06-13 |
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Address after: No.2, Yanwu Longyuan Road, Dalingshan Town, Dongguan City, Guangdong Province, 523838 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: No. 2, Wangyuan Road, Yanwu Village, Dalingshan, Dongguan, Guangdong 523820 Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY CO.,LTD. |
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