CN207567341U - A kind of coating machine liquid nitrogen rotary cooling device - Google Patents
A kind of coating machine liquid nitrogen rotary cooling device Download PDFInfo
- Publication number
- CN207567341U CN207567341U CN201721674403.XU CN201721674403U CN207567341U CN 207567341 U CN207567341 U CN 207567341U CN 201721674403 U CN201721674403 U CN 201721674403U CN 207567341 U CN207567341 U CN 207567341U
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- CN
- China
- Prior art keywords
- liquid nitrogen
- sealing device
- vacuum sealing
- gear wheel
- rotating device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of coating machine liquid nitrogen rotary cooling devices, include liquid nitrogen rotating device, studdle, vacuum sealing device, hollow pipe, chip bench successively from top to bottom, the shell of liquid nitrogen rotating device is connected with the shell of vacuum sealing device by studdle；Connector, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device, gear wheel is located at connector lower part and is bolted with connector, motor cabinet is fixed on vacuum sealing device shell, motor is provided on the motor cabinet, gear wheel is connected to by pinion gear, belt；Gear wheel is welded with the hollow pipe across vacuum sealing device, is provided with cooling tube in hollow pipe, cooling tube top is connected with liquid nitrogen rotating device, and lower part is connected with chip bench.The utility model drives jackshaft to rotate by motor, realizes chip bench rotation, makes chip bench lower surface plated film uniform, improve cooling velocity so that chip bench can efficient Quick uniform plated film.
Description
Technical field
The utility model is related to a kind of cooling device more particularly to a kind of coating machine liquid nitrogen rotary cooling devices.
Background technology
When making plated film print, cooling treatment often is carried out to substrate, passes plated film system cooling means generally using cooling
Water cooling or ethanol medium cooling method cool down static chip bench, but the equal cooling velocity of both modes is slow, is unfavorable for plating
Film fast cooling shaping in addition, static chip bench easily causes plated film uneven, leads to below substrate membrane material distribution of steam not
Uniformly, close to the substrate position film thickness of evaporation source, the substrate position film far from evaporation source is thin, in view of drawbacks described above, it is really necessary to
Design a kind of coating machine liquid nitrogen rotary cooling device.
Utility model content
The utility model provides a kind of coating machine liquid nitrogen rotary cooling device, uneven and not to solve Coating Materials plated film
Very fast can cool down causes to plate membrane efficiency reduction, plates the undesirable problem of film quality.Its technical solution is as described below：
A kind of coating machine liquid nitrogen rotary cooling device includes liquid nitrogen rotating device, studdle, vacuum successively from top to bottom
Sealing device, hollow pipe, chip bench, the shell of liquid nitrogen rotating device and the shell of vacuum sealing device pass through studdle phase
Even；Connector, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device, gear wheel is located at connection
Body lower part is simultaneously bolted with connector, and motor cabinet is fixed on vacuum sealing device shell, electricity is provided on the motor cabinet
Machine, the motor are connected with pinion gear, and pinion gear is connected to gear wheel by belt；Gear wheel is with passing through vacuum sealing device
Hollow pipe welds, and is provided with cooling tube in hollow pipe, cooling tube top is connected with liquid nitrogen rotating device, lower part and chip bench phase
Even.
Top on the outside of hollow pipe is provided with bellows, and bellows is located at vacuum sealing device in the following, the two bolt is connected.
The jackshaft of liquid nitrogen rotating device and vacuum sealing device is connected using bolt with connector respectively.
The cooling tube includes into nitrogen mouth and goes out nitrogen mouth, and the cooling tube is in chip bench helical arrangement, formation spiral cooling
Face.
The liquid nitrogen rotating device includes and into nitrogen mouth and goes out the corresponding liquid nitrogen entrance of nitrogen mouth and liquid nitrogen outlet.
Gear wheel is high vacuum seal gear, is below vacuum sealing device, the centre of gear wheel and vacuum sealing device
Axle bolt connects.
Compared with prior art, this rotary cooling device drives jackshaft to rotate, realizes substrate by motor
Platform rotates, in addition, liquid nitrogen enters the device from liquid nitrogen rotating device liquid nitrogen entrance, flows through cooling tube, into chip bench lower end, makes
Chip bench lower surface plated film is uniform, improve cooling velocity, above structure allows chip bench efficiently Quick uniform plated film.
Description of the drawings
Fig. 1 is the structure diagram of the coating machine liquid nitrogen rotary cooling device；
Fig. 2 is pipe structure for cooling layout drawing inside the hollow pipe；
Fig. 3 is liquid nitrogen circulation line figure inside the chip bench；
In figure：Heating collar -1；Liquid nitrogen rotating device -2；Studdle -3；Vacuum sealing device -4；Bellows -5；It is hollow
Pipe -6；Chip bench -7；Connector -8；Belt -9；Pinion gear -10；Motor -11；Gear wheel -12；Motor cabinet -13；Cooling tube-
14；Flange -15；Into nitrogen mouth -16；Go out nitrogen mouth -17；Spiral cooling surface -18；Inlet -19；Exit -20.
Specific embodiment
Hereinafter, a variety of specific details are elaborated, in order to provide the saturating of the concept to forming described embodiment basis
Thorough understanding.However, it will be apparent to those skilled in the art that described embodiment can be in these no specific details
In it is some or all in the case of put into practice.In other cases, well-known processing step is not specifically described.
As shown in Figure 1, Figure 2, Figure 3 shows, include liquid nitrogen rotating device 2, studdle 3, vacuum sealing dress successively from top to bottom
Put 4, hollow pipe 6, chip bench 7, connector 8, gear wheel 12, the shell of the liquid nitrogen rotating device 2 and vacuum sealing device 4
Shell is connected by studdle 3.
The jackshaft that can be rotated is provided in the shell of liquid nitrogen rotating device 2, is set in the shell of vacuum sealing device 4
There is the jackshaft that can be rotated, connector 8, big is provided between the jackshaft of liquid nitrogen rotating device 2 and vacuum sealing device 4
Gear 12, gear wheel 12 are located at the lower part of connector 8 and are bolted with connector 8, and liquid nitrogen rotating device 2 and vacuum are close
The jackshaft of seal apparatus 4 is connected using bolt with connector 8 respectively, and gear wheel 12 is high vacuum seal gear, is vacuum below
Sealing device 4, gear wheel 12 and the jackshaft of vacuum sealing device 4 are bolted.In this way, when gear wheel rotates, liquid nitrogen is driven
The jackshaft of rotating device 2 and vacuum sealing device 4 rotates together, and the shell of liquid nitrogen rotating device 2 and vacuum sealing device 4
It is fixed.
Motor cabinet 13 is fixed on the shell of vacuum sealing device 4, motor 11, the electricity are provided on the motor cabinet 13
Machine 11 is connected with pinion gear 10, and pinion gear 10 is connected to gear wheel 12 by belt 9.Gear wheel is driven by the rotation of motor 11
12 rotations.
Gear wheel 12 is welded with the hollow pipe 6 across vacuum sealing device, and hollow pipe 6 is passed through in vacuum sealing device 4
Countershaft, 6 outside of hollow pipe are provided with bellows 5 at vacuum sealing device 4, and bellows 5 is located under vacuum sealing device 4
Face, the two bolt are connected.6 lower end of hollow pipe is fixedly connected by flange 15 with chip bench 7.
The middle part setting hole of cooling tube 14, gear wheel 12 and connector 8, cooling tube 14 are provided in hollow pipe 6
Top passes through gear wheel 12 and connector 8, and then the central shaft with liquid nitrogen rotating device is connected, as shown in Fig. 2, the cooling
Pipe 14 includes into nitrogen mouth 16 and goes out nitrogen mouth 17, the liquid nitrogen rotating device 2 include with into nitrogen mouth 16 and to go out nitrogen mouth 17 corresponding respectively
Liquid nitrogen entrance and liquid nitrogen outlet.
Setting is there are two channel on the jackshaft of the liquid nitrogen rotating device 2, wherein first channel runs through jackshaft, under
End is fixedly connected with into nitrogen mouth 16, and upper end is connected with the liquid nitrogen entrance of 2 cover top portion of liquid nitrogen rotating device；Other second logical
Road is pierced by the middle part of jackshaft, and lower end is fixedly connected with going out nitrogen mouth 17, and upper end goes out with the liquid nitrogen in the middle part of 2 shell of liquid nitrogen rotating device
Mouth is connected.Jackshaft is provided with annular groove at the position that second channel is pierced by jackshaft, no matter the rotation court of jackshaft
To liquid nitrogen can all enter the annular groove when second channel comes out, and then export and discharge from liquid nitrogen.In annular groove both sides
Sealing ring is provided with, separates liquid nitrogen entrance above and the hole of lower end.
2 surface of liquid nitrogen rotating device is fluted, and embedded heating collar 1, the two bolt closely connect in slot, forms heat preservation knot
Structure.
The lower part of the cooling tube 14 is connected with chip bench 7, in 7 helical arrangement of chip bench, forms spiral cooling surface 18, cold
But pipe 14 proceeds by helical arrangement in the inlet of spiral cooling surface 18 19, is finally returned from exit 20.
This rotary cooling device drives jackshaft to rotate, realizes chip bench 7 by 11 drive gear wheel of motor
Rotation in addition, liquid nitrogen enters the device from the liquid nitrogen entrance of liquid nitrogen rotating device 2, flows through cooling tube 14, into chip bench 7
Lower end so that 7 lower surface plated films of substrate are uniform, improve cooling velocity, and above structure allows chip bench 7 efficiently quick
Even plated film.
The utility model is not limited to above-mentioned specific embodiment, and those of ordinary skill in the art visualize from above-mentioned
Hair, without performing creative labour, the various transformation made are all fallen within the scope of protection of the utility model.
Claims (6)
1. a kind of coating machine liquid nitrogen rotary cooling device, it is characterised in that：Include liquid nitrogen rotating device, support successively from top to bottom
Screw rod, vacuum sealing device, hollow pipe, chip bench, the shell of liquid nitrogen rotating device and the shell of vacuum sealing device pass through branch
Support screw rod is connected；Connector, gear wheel, gear wheel are provided between liquid nitrogen rotating device and the jackshaft of vacuum sealing device
It is bolted positioned at connector lower part and with connector, is fixed with motor cabinet on vacuum sealing device shell, on the motor cabinet
Motor is provided with, the motor is connected with pinion gear, and pinion gear is connected to gear wheel by belt；Gear wheel is close with passing through vacuum
The hollow pipe welding of seal apparatus, is provided with cooling tube in hollow pipe, and cooling tube top is connected with liquid nitrogen rotating device, lower part and
Chip bench is connected.
2. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Top on the outside of hollow pipe is set
Bellows is equipped with, bellows is located at vacuum sealing device in the following, the two bolt is connected.
3. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Liquid nitrogen rotating device and vacuum
The jackshaft of sealing device is connected using bolt with connector respectively.
4. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：The cooling tube is included into nitrogen
Mouthful and go out nitrogen mouth, the cooling tube forms spiral cooling surface in chip bench helical arrangement.
5. coating machine liquid nitrogen rotary cooling device according to claim 4, it is characterised in that：The liquid nitrogen rotating device packet
It includes and into nitrogen mouth and goes out the corresponding liquid nitrogen entrance of nitrogen mouth and liquid nitrogen exports.
6. coating machine liquid nitrogen rotary cooling device according to claim 1, it is characterised in that：Gear wheel is high vacuum seal
Gear is below vacuum sealing device, and the jackshaft of gear wheel and vacuum sealing device is bolted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721674403.XU CN207567341U (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721674403.XU CN207567341U (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207567341U true CN207567341U (en) | 2018-07-03 |
Family
ID=62690339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721674403.XU Expired - Fee Related CN207567341U (en) | 2017-12-05 | 2017-12-05 | A kind of coating machine liquid nitrogen rotary cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207567341U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
| CN116145099A (en) * | 2023-04-21 | 2023-05-23 | 合肥铠柏科技有限公司 | Straight liquid nitrogen cooling sample holder |
-
2017
- 2017-12-05 CN CN201721674403.XU patent/CN207567341U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815660A (en) * | 2017-12-05 | 2018-03-20 | 北京帕托真空技术有限公司 | A kind of coating machine liquid nitrogen rotary cooling device |
| CN116145099A (en) * | 2023-04-21 | 2023-05-23 | 合肥铠柏科技有限公司 | Straight liquid nitrogen cooling sample holder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180703 Termination date: 20201205 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |