CN107795546A - Glass synthesis fluid supply apparatus - Google Patents
Glass synthesis fluid supply apparatus Download PDFInfo
- Publication number
- CN107795546A CN107795546A CN201710756151.3A CN201710756151A CN107795546A CN 107795546 A CN107795546 A CN 107795546A CN 201710756151 A CN201710756151 A CN 201710756151A CN 107795546 A CN107795546 A CN 107795546A
- Authority
- CN
- China
- Prior art keywords
- type operation
- operation valve
- air type
- supply line
- purge gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 118
- 239000011521 glass Substances 0.000 title claims abstract description 64
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 43
- 238000003786 synthesis reaction Methods 0.000 title claims abstract description 43
- 238000006243 chemical reaction Methods 0.000 claims abstract description 46
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 36
- 238000010926 purge Methods 0.000 claims description 104
- 230000005611 electricity Effects 0.000 abstract description 14
- 230000002159 abnormal effect Effects 0.000 abstract description 12
- 230000006866 deterioration Effects 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 130
- 230000002411 adverse Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000006121 base glass Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- 229910006113 GeCl4 Inorganic materials 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B20/00—Safety arrangements for fluid actuator systems; Applications of safety devices in fluid actuator systems; Emergency measures for fluid actuator systems
- F15B20/002—Electrical failure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/021—Valves for interconnecting the fluid chambers of an actuator
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B20/00—Safety arrangements for fluid actuator systems; Applications of safety devices in fluid actuator systems; Emergency measures for fluid actuator systems
- F15B20/004—Fluid pressure supply failure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/08—Servomotor systems incorporating electrically operated control means
- F15B21/087—Control strategy, e.g. with block diagram
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A kind of glass synthesis fluid supply apparatus is provided, its from have a power failure etc. it is abnormal when restored electricity when etc. make air type operation valve work air pressure be less than proper range in the case of, can also suppress the deterioration of pipe arrangement or volume control device.With the MFC (15) that the corrosive fluid supply line (L1) of corrosive fluid is supplied to reaction vessel (11) and is set in corrosive fluid supply line (L1), in MFC (15) path of corrosive fluid is flowed through, it is respectively arranged with the corrosive fluid supply line (L1) than MFC (15) upstream side and than the corrosive fluid supply line (L1) in MFC (15) downstream by magnetic valve (16a, air type operation valve (17a 16c) operated, 17c), air type operation valve (17a, 17c) it is entirely closed type, it is higher than the operating pressure in the air type operation valve (17a) set than MFC (15) upstream side in the operating pressure of the air type operation valve (17c) set than MFC (15) downstream.
Description
Technical field
The present invention relates to a kind of glass synthesis fluid supply apparatus.
Background technology
A kind of known glass synthesis fluid supply apparatus, used corrosive fluid, purging when it is by synthetic glass
Gas is supplied to glass synthesizer (for example, referring to patent document 1).
Patent document 1：Japanese Unexamined Patent Publication 2014-131946 publications
For example, the glass synthesis fluid supply apparatus described in patent document 1, used corruption when by synthetic glass
Corrosion fluid, purge gas, which are supplied into the path of glass synthesizer, is provided with air type operation valve.Air type operation valve root
The opening and closing of valve is carried out according to the air pressure supplied, is opened in the case where air pressure is more than or equal to operating pressure, in sky
Atmospheric pressure is closed in the case of being less than operating pressure.The air type operation valve is closed type (if not acting air pressure, is tieed up
Hold closed mode).
In addition, the air type operation valve of closed type is in the situation that the air pressure supplied and operating pressure are equal extents
Under, due to reasons such as the individual differences of air type operation valve, it is possible to the only a part in multiple air type operation valves be present
The air type operation valve of closed type turns into open mode.
Therefore, in the case where the air pressure supplied turns into low state, the air type operation of a part of closed type
Valve is not opened sometimes.If for example, the air type operation valve that downstream is arranged on compared with volume control device is opened, is arranged at
The air type operation valve of trip is closed, then in reaction vessel, the gas removed the evil in device is possible to, to pipe arrangement upstream side adverse current, occur
Diffusion.
On the other hand, the supply to the air pressure of air type operation valve is by being set in air pressure feed path
The opening and closing of magnetic valve be controlled.The opening and closing of magnetic valve is electrically controlled, and has following types, i.e. is not had in power failure etc.
In the case of having power supply supply, remain off the closed type of state and be maintained open the open type of state.
Generally, in glass synthesis fluid supply apparatus, air type operation valve is entered on being set in each path
The magnetic valve of row control, appropriately configured closed type and open type, due to occur to have a power failure etc. it is abnormal and what power supply supply was cut off
In the case of so that flow purge gas in the pipe arrangement before and after volume control device, volume control device.But from power failure
Etc. it is abnormal when restore electricity when, make sometimes air type operation valve work air pressure turn into less than proper range state, this
When it is for example as noted above, it is possible to the gas react in container, removed the evil in device is to pipe arrangement upstream side adverse current, diffusion etc.
The deterioration preventing of phenomenon, pipe arrangement or volume control device becomes insufficient.
The content of the invention
It is an object of the invention to provide a kind of glass synthesis fluid supply apparatus, the glass synthesis is supplied with fluid and filled
Put even in from when being restored electricity when having a power failure etc. abnormal etc., make the air pressure that air type operation valve works less than proper range
In the case of, it can also suppress the deterioration of pipe arrangement or volume control device.
Glass synthesis fluid supply apparatus involved by the mode of the present invention, it has：
Corrosive fluid supply line, it supplies corrosive fluid to reaction vessel；And
Volume control device, it is arranged at the corrosive fluid supply line,
In the path of the corrosive fluid of the volume control device is flowed through, with the volume control device phase
The corrosive fluid in downstream than the corrosive fluid supply line of upstream side and compared with the volume control device
Supply line, the air type operation valve operated by magnetic valve is respectively arranged with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and institute
State the volume control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
In addition, the glass synthesis fluid supply apparatus involved by the mode of the present invention, it has：
Purge gas supply line, it supplies purge gas to reaction vessel；And
Volume control device, it is arranged at the purge gas supply line,
In the path of the purge gas of the volume control device is flowed through, compared with the volume control device
The purge gas supply line of upstream side and compared with the volume control device downstream the purge gas supply line,
The air type operation valve operated by magnetic valve is respectively arranged with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and institute
State the volume control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
In addition, the glass synthesis fluid supply apparatus involved by the mode of the present invention, it has：
Corrosive fluid supply line, it supplies corrosive fluid；
Purge gas supply line, it supplies purge gas；
Bus bar, it is the purge gas supply line and the corrosive fluid supply line confluxes and formed；
Volume control device, it is arranged at the bus bar；
Reaction vessel line, it is from the bus bar branch in downstream compared with the volume control device and orientating reaction
Container；And
Discharge gas line, it is from the bus bar branch in downstream compared with the volume control device and towards removing the evil
Device,
In the corrosive fluid supply line, the purge gas supply line, the reaction vessel line and the discharge gas
Body line, the air type operation valve operated by magnetic valve is respectively arranged with,
It is arranged at the magnetic valve of the air type operation valve of the purge gas supply line and is arranged at the discharge
The magnetic valve of the air type operation valve of gas line is open type,
It is arranged at the magnetic valve of the air type operation valve of the corrosive fluid supply line and is arranged at described anti-
The magnetic valve for answering the air type operation valve of container line is closed type,
The air type operation valve of the reaction vessel line is arranged at, is had than being arranged at the corrosive fluid supply
The high operating pressure of the operating pressure of the air type operation valve of line,
The air type operation valve of the discharge gas line is arranged at, is had than being arranged at the purge gas supply line
The air type operation valve the high operating pressure of operating pressure.
The effect of invention
According to foregoing invention, even in from when being restored electricity when having a power failure etc. abnormal etc., the sky that makes air type operation valve work
In the case that atmospheric pressure is less than proper range, it can also suppress the deterioration of pipe arrangement or volume control device.
Brief description of the drawings
Fig. 1 is the block diagram for the schematic configuration for representing the glass synthesis fluid supply apparatus involved by present embodiment.
The explanation of label
The reaction vessel 12 of the 1 glass synthesis fluid supply apparatus 11 corrosive fluid supply unit 14 of device 13 of removing the evil blows
Sweep the flow section of the volume control device of gas supply part 15 (MFC) 16a~16d magnetic valve 17a~17d air types operation valve 18
Flow valve L1 corrosive fluid supply line L2 purge gas supply line L3 bus bar L4 reaction vessel line L5 discharge gas lines
Embodiment
(explanations of embodiments of the present invention)
First, embodiments of the present invention are enumerated and illustrated.
Glass synthesis fluid supply apparatus involved by the mode of the present invention,
(1) it has：
Corrosive fluid supply line, it supplies corrosive fluid to reaction vessel；And
Volume control device, it is arranged at the corrosive fluid supply line,
In the path of the corrosive fluid of the volume control device is flowed through, with the volume control device phase
The corrosive fluid in downstream than the corrosive fluid supply line of upstream side and compared with the volume control device
Supply line, the air type operation valve operated by magnetic valve is respectively arranged with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and institute
State the volume control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
According to said structure, the air type operation valve in the downstream compared with volume control device is arranged on, is had than setting
In the high operating pressure of the operating pressure of the air type operation valve of upstream side compared with volume control device, therefore make air type
In the case that the air pressure of operation valve work gradually increases from the state less than proper range, the air type operation of upstream side
Valve is first opened, and is opened after the air type operation valve in downstream.Thereby, it is possible to prevent from have a power failure etc. it is abnormal when restore electricity when
In the case of being less than proper range Deng, the air pressure that makes air type operation valve work, gas in reaction vessel is on pipe arrangement
Side adverse current is swum, is spread, therefore the deterioration of pipe arrangement or volume control device can be suppressed.
In addition, the glass synthesis fluid supply apparatus involved by the mode of the present invention,
(2) it has：
Purge gas supply line, it supplies purge gas to reaction vessel；And
Volume control device, it is arranged at the purge gas supply line,
In the path of the purge gas of the volume control device is flowed through, compared with the volume control device
The purge gas supply line of upstream side and compared with the volume control device downstream the purge gas supply line,
The air type operation valve operated by magnetic valve is respectively arranged with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and institute
State the volume control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
According to said structure, the air type operation valve in the downstream compared with volume control device is arranged on, is had than setting
In the high operating pressure of the operating pressure of the air type operation valve of upstream side compared with volume control device, therefore make air type
In the case that the air pressure of operation valve work gradually increases from the state less than proper range, the air type operation of upstream side
Valve is first opened, and is opened after the air type operation valve in downstream.Thereby, it is possible to prevent from have a power failure etc. it is abnormal when restore electricity when
In the case of being less than proper range Deng, the air pressure that makes air type operation valve work, gas in reaction vessel is on pipe arrangement
Side adverse current is swum, is spread, therefore the deterioration of pipe arrangement or volume control device can be suppressed.
In addition, the glass synthesis fluid supply apparatus involved by the mode of the present invention,
(3) it has：
Corrosive fluid supply line, it supplies corrosive fluid；
Purge gas supply line, it supplies purge gas；
Bus bar, it is the purge gas supply line and the corrosive fluid supply line confluxes and formed；
Volume control device, it is arranged at the bus bar；
Reaction vessel line, it is from the bus bar branch in downstream compared with the volume control device and orientating reaction
Container；And
Discharge gas line, it is from the bus bar branch in downstream compared with the volume control device and towards removing the evil
Device,
In the corrosive fluid supply line, the purge gas supply line, the reaction vessel line and the discharge gas
Body line, the air type operation valve operated by magnetic valve is respectively arranged with,
It is arranged at the magnetic valve of the air type operation valve of the purge gas supply line and is arranged at the discharge
The magnetic valve of the air type operation valve of gas line is open type,
It is arranged at the magnetic valve of the air type operation valve of the corrosive fluid supply line and is arranged at described anti-
The magnetic valve for answering the air type operation valve of container line is closed type,
The air type operation valve of the reaction vessel line is arranged at, is had than being arranged at the corrosive fluid supply
The high operating pressure of the operating pressure of the air type operation valve of line,
The air type operation valve of the discharge gas line is arranged at, is had than being arranged at the purge gas supply line
The air type operation valve the high operating pressure of operating pressure.
According to said structure, the air type operation valve in the downstream compared with volume control device is arranged on, is had than setting
In the high operating pressure of the operating pressure of the air type operation valve of upstream side compared with volume control device, therefore make air type
Operation valve work air pressure from the state less than proper range gradually increase in the case of, corrosive fluid supply line or
The air type operation valve of person's purge gas supply line is first opened, after the air type operation valve of reaction vessel line or discharge gas line
Open.Thereby, it is possible to prevent from have a power failure etc. it is abnormal when restore electricity when etc., make air type operation valve work air pressure it is low
In the case of proper range, in reaction vessel or the gas removed the evil in device is to pipe arrangement upstream side adverse current, spreads, because
This can suppress the deterioration of pipe arrangement or volume control device.
(4) the purge gas supply line is preferably provided with flow throttle valve.
Due to being provided with flow throttle valve in purge gas supply line, thus can suppress have a power failure when flow of purge gas
Amount.Thereby, it is possible to save purge gas, in addition, the reduction of purging pressure when can suppress to restore electricity.
(detailed contents of embodiments of the present invention)
Below, referring to the drawings to the concrete example of the glass synthesis fluid supply apparatus involved by embodiments of the present invention
Illustrate.
In addition, the present invention is not limited to these illustrations, but represented by claims, comprising with claims etc.
Whole changes in same implication and scope.
Fig. 1 is the figure for an example for representing glass synthesis fluid supply apparatus.
Glass synthesis shown in Fig. 1 with fluid supply apparatus 1 by synthetic glass when used corrosive fluid to reaction
Container 11 supplies.In addition, the corrosive fluid not used when glass synthesis fluid supply apparatus 1 is by synthetic glass is to removing the evil
Device 12 is discharged.
In reaction vessel 11, for example, by OVD methods, VAD methods, the glass of the cylindric base glass material of progress optical fiber etc.
Synthesis.In the case of OVD methods, initial glass bar is set to move back and forth and rotate vertically in reaction vessel 11, while will be from
The corrosive fluid and H as frit that corrosive fluid supply unit 13 supplies2Deng fuel gas and O2Deng combustion-supporting gas one
Rise from burner and spray to its periphery.Moreover, reacted by flame hydrolyzable to generate glass granules and deposit, it is micro- as glass
Grain lithosomic body and synthesize cylindric base glass material.In addition, in device 12 of removing the evil, to the corrosivity not used during synthetic glass
Fluid carries out purified treatment.As corrosive fluid, glass synthesis unstrpped gas or liquid (POCl are used3、TiCl4、
SiCl4、GeCl4Deng), technique gas or liquid (BCl3、SF6、Cl2、SiF4、CF4Deng).
In glass synthesis with fluid supply apparatus 1, as the stream of supply fluid, have：Supplied from corrosive fluid
Portion 13 orientating reaction container 11 supplies the corrosive fluid supply line L1 of corrosive fluid and from the direction of purge gas supply unit 14
Reaction vessel 11 supplies the purge gas supply line L2 of purge gas.In addition, glass synthesis fluid supply apparatus 1 has：Will
The bus bar L3 that corrosive fluid supply line L1 and purge gas supply line L2 conflux；Branch and court are carried out from bus bar L3
To the reaction vessel line L4 of reaction vessel 11；And from bus bar L3 carry out branch and towards the discharge gas line of device 12 of removing the evil
L5。
The air type operation valve 17a that magnetic valve 16a operated is provided with corrosive fluid supply line L1, is being blown
Sweep gas feed line L2 and be provided with the air type operation valve 17b that magnetic valve 16b is operated.In addition, supplied in purge gas
Give line L2, compared with air type operation valve 17b upstream side be provided with and the flow of the purge gas of process can be controlled
Flow throttle valve (for example, needle-valve etc.) 18.Moreover, corrosive fluid supply line L1 air type operation valve 17a downstream
Conflux with purge gas supply line L2 air type operation valve 17b downstream and turn into bus bar L3.
In bus bar L3 (corrosive fluid supply line L1 and purge gas supply line L2) midway, being provided with can be to warp
The volume control device that the flow for the fluid crossed is controlled is (for example, Mass Flow Controller：MFC)15.Moreover,
Bus bar L3 MFC 15 downstream, reaction vessel line L4 and discharge gas line L5 carry out branch from bus bar L3.
The air type operation valve 17c that magnetic valve 16c operated is provided with reaction vessel line L4, in discharge gas
Line L5 is provided with the air type operation valve 17d that magnetic valve 16d is operated.Moreover, in reaction vessel line L4 air type
Operation valve 17c downstream is connected with reaction vessel 11, in discharge gas line L5 air type operation valve 17d downstream connection
Remove the evil device 12.In addition, the Flow Corrosion fluid in reaction vessel line L4, therefore reaction vessel line L4 is also referred to as MFC
The corrosive fluid supply line in 15 downstream.In addition, flowing purge gas in discharge gas line L5, therefore will also it discharge gas
Body line L5 is referred to as the purge gas supply line in MFC 15 downstream.
Air type operation valve 17a~17d is the valve that action is opened and closed by the air pressure of driving.Magnetic valve 16a
~16d is to supply electric current to solenoidal coil and the valve of action is opened and closed.Magnetic valve 16a~16d is by omitting diagram
Solenoid valve control portion is controlled to respective opening and closing.Pass through each magnetic valve 16a~16d on/off, purge gas supply
The purge gas in portion 14 acts on each air type operation valve 17a~17d as the air pressure of driving, passes through the air pressure
Opening and closing of the power to each air type operation valve 17a~17d operates.That is, the air type set in each stream (L1, L2, L4, L5)
Operation valve 17a~17d is acted by controlling magnetic valve 16a~16d of driving respectively, can by each stream (L1,
L2, L4, L5) it is set to open mode or closed mode.
The air type operation valve 17c that reaction vessel line L4 in the downstream compared with MFC 15 is set, has used work to press
The power valve higher than the air type operation valve 17a that the corrosive fluid supply line L1 in the upstream side compared with MFC 15 is set.In addition,
Compared with MFC 15 downstream discharge gas line L5 set air type operation valve 17d, used operating pressure ratio with
Valve high compared to the air type operation valve 17b that the purge gas supply line L2 of upstream side is set MFC 15.
Air type operation valve 17a~17d has used in non-action stream to turn into the closed type of closed mode.It is in addition, electric
Magnet valve 16a, 16c have used in solenoidal non-action stream to turn into the closed type of closed mode, and magnetic valve 16b, 16d are used
Stream turns into the open type of open mode in solenoidal non-action.In addition, MFC 15 has used the stream in non-action
As the open type of open mode.
Next, glass synthesis is illustrated with the action of fluid supply apparatus 1.
(when glass synthesizes)
When glass synthesizes, the control of glass synthesis fluid supply apparatus 1 is, by the way that magnetic valve 16b is closed sky
Gas formula operation valve 17b is closed, and is opened air type operation valve 17a by the way that magnetic valve 16a is opened.Thus, in bus bar L3
MFC 15 upstream side, not from purge gas supply line L2 supply purge gas, and from corrosive fluid supply line L1 supply
The corrosive fluids such as glass raw material gas.Moreover, carrying out suitable control to flow by MFC 15, supplied to MFC 15 downstream
To corrosive fluid.
In addition, control is, air type operation valve 17d is closed by the way that magnetic valve 16d is closed, by by magnetic valve
16c is opened and is opened air type operation valve 17c.Thus, corrosivity is not supplied to device 12 of removing the evil from MFC 15 downstream
Fluid, and supply corrosive fluid to reaction vessel 11.
(during glass non-synthetic)
In glass non-synthetic, glass synthesis fluid supply apparatus 1, which controls, is, will by the way that magnetic valve 16a is closed
Air type operation valve 17a is closed, and is opened air type operation valve 17b by the way that magnetic valve 16b is opened.Thus, in bus bar
L3 MFC 15 upstream side, not from the corrosive fluid supply line L1 supply corrosive fluids such as glass raw material gas, and from blowing
Sweep gas feed line L2 supply purge gas.Moreover, suitable control is carried out to flow by MFC 15, to MFC 15 downstream
Supply purge gas.
Moreover, control is, air type operation valve 17c is closed by the way that magnetic valve 16c is closed, by by magnetic valve
16d is opened and is opened air type operation valve 17d.Thus, the corruption remained in the line before and after MFC 15 inside, MFC 15
Corrosion fluid is discharged together with purge gas by discharge gas line L5 to device 12 of removing the evil.
Below, action example is enumerated to the dynamic of the glass synthesis fluid supply apparatus 1 in the case of the exceptions such as generation power failure
Illustrate.
(action example 1)
Occur to have a power failure etc. it is abnormal and in the case that the supply of power supply is cut off, glass synthesis with fluid supply apparatus 1 with
Following manner is acted.
Magnetic valve 16a is closed type, therefore by the cut-out of power supply, automatically remains off state.Therefore, as normally closed
The air type operation valve 17a of type, the air pressure (purge gas) of driving is not applied in and turns into closed mode.It is in addition, electric
Magnet valve 16b is open type, therefore by the cut-out of power supply, is automatically maintained open state.Therefore, air type operation valve 17b is not
It is applied in the air pressure of driving and turns into open mode.Thus, bus bar L3 MFC 15 upstream side, turn into not from
Corrosive fluid supply line L1 supplies corrosive fluid, and the state of purge gas is supplied from purge gas supply line L2.
MFC 15 is open type, therefore by the cut-out of power supply, automatically turns into open mode.Therefore, MFC 15
The purge gas of upstream side supplies to MFC 15 downstream.Magnetic valve 16c is closed type, therefore by the cut-out of power supply, from
State is remained off dynamicly.Therefore, the air type operation valve 17c as closed type, be not applied in driving air pressure and
As closed mode.In addition, magnetic valve 16d is open type, therefore by the cut-out of power supply, automatically it is maintained open state.Cause
This, air type operation valve 17d is not applied in the air pressure of driving and turns into open mode.Thus, MFC 15 downstream
Purge gas do not supplied to reaction vessel 11, and supplied from discharge gas line L5 to device 12 of removing the evil.Now, such as in MFC
The corrosive fluid remained in 15 inside, MFC 15 front and rear line together with purge gas by discharge gas line L5 and to
Device 12 of removing the evil is discharged.
In addition, in the case of there occurs the exception such as have a power failure, MFC 15 is open type, therefore turns into standard-sized sheet, passes through flow
Choke valve 18 throttles to flow.Thus, the flow of the purge gas to being supplied from purge gas supply unit 14 suppresses.
(action example 2)
Have a power failure etc. it is abnormal when, there occurs for make air type operation valve work driving air pressure (purging
The pressure of gas) reduce exception in the case of, glass synthesis is acted as follows with fluid supply apparatus 1.
As noted above, when having a power failure, air type operation valve 17b and air type operation valve 17d turn into open mode, from blowing
Sweep gas supply part 14 supply purge gas by purge gas supply line L2, bus bar L3 and discharge gas line L5 and to except
Evil device 12 flows.
In the state of as described above, if the pressure of purge gas gradually reduces, as the air type of open mode
Air type operation valve 17d in operation valve 17b and air type operation valve 17d, operating pressure is high action changes first.
If the pressure of purge gas is less than air type operation valve 17d operating pressure, air type operation valve 17d, which turns into, closes shape
State.Now, the operating pressure air type operation valve 17b lower than air type operation valve 17d is maintained open state.Moreover, purging
When the pressure of gas further reduces and is less than air type operation valve 17b operating pressure, air type operation valve 17b, which turns into, to close
State.As described above, the air type operation valve 17d in downstream first turns into closed mode than the air type operation valve 17b of upstream side.
(action example 3)
From have a power failure etc. it is abnormal when restore electricity when, there occurs for make air type operation valve work driving air
In the case of the exception that pressure (pressure of purge gas) reduces, glass synthesis is carried out as follows with fluid supply apparatus 1
Action.
In the case where system after just restoring electricity is in start-up course, it is possible to the pressure of purge gas occurs not
Stablize and reduce.
Glass synthesis fluid supply apparatus 1 is set as example maintaining and above-mentioned action example 1 in the case where restoring electricity
Identical state.That is, it is set as that air type operation valve 17b, 17d turns into open mode, purge gas supplies by purge gas
Line L2, bus bar L3 and discharge gas line L5 and flowed to device 12 of removing the evil.
Therefore, it is same with above-mentioned action example 2 in the case that when restoring electricity, the pressure of purge gas is there occurs reduction
Ground, the air type operation valve 17d in downstream first turn into closed mode than the air type operation valve 17b of upstream side.
(action example 4)
When glass synthesizes, there occurs for make air type operation valve work driving air pressure (purge gass
The pressure of body) reduce exception in the case of, glass synthesis is acted as follows with fluid supply apparatus 1.
When glass synthesizes, as it was previously stated, control is to close air type operation valve 17b, air type operation valve 17a is beaten
Open, control as air type operation valve 17d is closed, air type operation valve 17c is opened.Thus, corrosive fluid is by reaction
Container line L4 and supplied to reaction vessel 11.
In the state of as described above, if the pressure of purge gas gradually reduces, as the air type of open mode
Air type operation valve 17c in operation valve 17a, 17c, that operating pressure is high turns into closed mode first.If moreover, purge gass
The pressure of body further reduces, then the operating pressure air type operation valve 17a lower than air type operation valve 17c, which turns into, closes shape
State.As described above, the air type operation valve 17c in downstream first turns into closed mode than the air type operation valve 17a of upstream side.
(action example 5)
In glass non-synthetic, there occurs the air pressure (purge gass of the driving for making the work of air type operation valve
The pressure of body) reduce exception in the case of, glass synthesis is acted as follows with fluid supply apparatus 1.
In glass non-synthetic, as it was previously stated, control is to close air type operation valve 17a, by air type operation valve 17b
Open, air type operation valve 17c is closed, air type operation valve 17d is opened.Thus, purge gas passes through discharge gas line
L5 and supplied to device 12 of removing the evil.
In the state of as described above, if the pressure of purge gas reduces, the high air type operation valve of operating pressure
17d turns into closed mode first.Moreover, if the pressure of purge gas further gradually reduces, operating pressure compares air type
Air type operation valve 17b low operation valve 17d turns into closed mode.As described above, the air type operation valve 17d in downstream is than upper
The air type operation valve 17b of trip side first turns into closed mode.
(action example 6)
In above-mentioned 2~action example of action example 5, there occurs for make air type operation valve work driving air
After pressure (pressure of purge gas) reduces compared with air type operation valve 17a~17d operating pressure, gradually constantly rise
In the case of exception, glass synthesis is acted as follows with fluid supply apparatus 1.
In the case of action example 2,3,5, turn into air type operation valve 17b, 17d of closed mode, upstream side
Purge gas supply line L2 air type operation valve 17b first turns into open mode, the discharge gas line L5 in downstream air type
Turn into open mode after operation valve 17d.In addition, in the case of action example 4, turn into closed mode air type operation valve 17a,
In 17c, upstream side corrosive fluid supply line L1 air type operation valve 17a first turns into open mode, downstream it is anti-
Turn into open mode after answering container line L4 air type operation valve 17c.
As described above, according to the glass synthesis fluid supply apparatus 1 of present embodiment, for making air type operation valve
Abnormal, such as the feelings that gradually reduce of pressure of purge gas occur for the air pressure (pressure of purge gas) of the driving of work
Under condition, the air type operation valve in downstream first turns into closed mode, and the air type operation valve of upstream side turns into after which closes
State.In addition, the pressure in such as purge gas decreases below what is be gradually increasing after the operating pressure of air type operation valve
In the case of, the air type operation valve of upstream side first turns into open mode, and the air type operation valve in downstream turns into after which beats
Open state.Thus, for example when having a power failure, the when of restoring electricity, glass synthesis when and during glass non-synthetic, there occurs purge gas
, also can be inverse to pipe arrangement upstream side from reaction vessel 11 or device 12 of removing the evil to gas in the case of the exception that pressure reduces
Stream, diffusion occurs and is suppressed.Thereby, it is possible to suppress the deterioration of pipe arrangement or MFC 15.
In addition, when having a power failure, because MFC turns into full-gear, therefore the flow of sweep gas of big flow is crossed.Therefore, such as
Fruit has a power failure for a long time, then the gas of purge gas supply unit lacks and can not purged, and the loss of gas becomes more, cost
Increase.In addition, in the case of purge gas and the supply source identical of the driving gas of air type operation valve, cause due to purging
The shortage of gas and the driving of air type operation valve can not be carried out.
On the other hand, according to glass synthesis fluid supply apparatus 1, purge gas supply line L2 is provided with flow throttling
Valve 18, therefore by the regulation of flow throttle valve 18, the purge gas flow supplied when having a power failure can be suppressed.Thereby, it is possible to
Save purge gas, in addition, can be to restoring electricity when the reduction of purging pressure suppress.
More than, in detail and the present invention is described with reference to specific embodiment, but for those skilled in the art
For member, it is clear that various changes or amendment can be carried out on the premise of spirit of the invention, scope is not departed from.It is in addition, above-mentioned
The quantity of the component parts of explanation, position, shape etc. are not limited to above-mentioned embodiment, can be changed to be adapted for carrying out this hair
Bright quantity, position, shape etc..
Claims (4)
1. a kind of glass synthesis fluid supply apparatus, it has：
Corrosive fluid supply line, it supplies corrosive fluid to reaction vessel；And
Volume control device, it is arranged at the corrosive fluid supply line,
In the path of the corrosive fluid of the volume control device is flowed through, upper compared with the volume control device
Swim the corrosive fluid supply line of side and the corrosive fluid in downstream supplies compared with the volume control device
Line, the air type operation valve operated by magnetic valve is respectively arranged with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and the stream
The amount control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
2. a kind of glass synthesis fluid supply apparatus, it has：
Purge gas supply line, it supplies purge gas to reaction vessel；And
Volume control device, it is arranged at the purge gas supply line,
In the path of the purge gas of the volume control device is flowed through, in the upstream compared with the volume control device
The purge gas supply line of side and compared with the volume control device downstream the purge gas supply line, respectively
The air type operation valve that magnetic valve is operated is provided with,
The air type operation valve is entirely closed type,
The air type operation valve in the downstream compared with the volume control device is arranged on, is had than being arranged on and the stream
The amount control device operating pressure high compared to the operating pressure of the air type operation valve of upstream side.
3. a kind of glass synthesis fluid supply apparatus, it has：
Corrosive fluid supply line, it supplies corrosive fluid；
Purge gas supply line, it supplies purge gas；
Bus bar, it is the purge gas supply line and the corrosive fluid supply line confluxes and formed；
Volume control device, it is arranged at the bus bar；
Reaction vessel line, it holds from the bus bar branch in downstream compared with the volume control device and orientating reaction
Device；And
Discharge gas line, it is from the bus bar branch in downstream compared with the volume control device and towards removing the evil dress
Put,
In the corrosive fluid supply line, the purge gas supply line, the reaction vessel line and the discharge gas line,
The air type operation valve operated by magnetic valve is respectively arranged with,
It is arranged at the magnetic valve of the air type operation valve of the purge gas supply line and is arranged at the discharge gas
The magnetic valve of the air type operation valve of line is open type,
It is arranged at the magnetic valve of the air type operation valve of the corrosive fluid supply line and is arranged at the reaction and holds
The magnetic valve of the air type operation valve of device line is closed type,
The air type operation valve of the reaction vessel line is arranged at, is had than being arranged at the corrosive fluid supply line
The high operating pressure of the operating pressure of the air type operation valve,
The air type operation valve of the discharge gas line is arranged at, there is the institute than being arranged at the purge gas supply line
State the high operating pressure of the operating pressure of air type operation valve.
4. the glass synthesis fluid supply apparatus according to Claims 2 or 3, wherein,
The purge gas supply line is provided with flow throttle valve.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-172613 | 2016-09-05 | ||
| JP2016172613A JP6683077B2 (en) | 2016-09-05 | 2016-09-05 | Fluid supply device for glass synthesis |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107795546A true CN107795546A (en) | 2018-03-13 |
| CN107795546B CN107795546B (en) | 2020-09-15 |
Family
ID=61531581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710756151.3A Expired - Fee Related CN107795546B (en) | 2016-09-05 | 2017-08-29 | Fluid supply device for glass synthesis |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6683077B2 (en) |
| CN (1) | CN107795546B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283504A (en) * | 1996-02-15 | 1997-10-31 | Fujikin:Kk | Feed of mixed gas, mixed gas feeding device and semiconductor manufacturing device provided with these |
| CN1501440A (en) * | 2002-11-15 | 2004-06-02 | ��ʽ���������Ƽ� | Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto |
| JP2009146939A (en) * | 2007-12-11 | 2009-07-02 | Taiyo Nippon Sanso Corp | Apparatus for manufacturing compound thin-film semiconductor, and device and method of supplying ammonia gas |
| CN102192400A (en) * | 2010-03-03 | 2011-09-21 | 中外炉工业株式会社 | High-pressure dry air supply system |
| JP2014131946A (en) * | 2013-01-04 | 2014-07-17 | Sumitomo Electric Ind Ltd | Fluid supply apparatus for synthesizing glass |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61254242A (en) * | 1985-05-01 | 1986-11-12 | Sumitomo Electric Ind Ltd | Apparatus for supplying stock material |
| JPS6340739A (en) * | 1986-08-06 | 1988-02-22 | Sumitomo Electric Ind Ltd | Method and apparatus for calibrating mass flow rate controller |
| JPS6483665A (en) * | 1987-09-25 | 1989-03-29 | Furukawa Electric Co Ltd | Liquid raw material evaporating device |
| JP3515894B2 (en) * | 1997-12-16 | 2004-04-05 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP2003212554A (en) * | 2002-01-24 | 2003-07-30 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing fine glass particle deposit |
| JP2003277072A (en) * | 2002-03-25 | 2003-10-02 | Sumitomo Electric Ind Ltd | Cycle purge method for flow controller |
| JP2009102207A (en) * | 2007-10-25 | 2009-05-14 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing fine glass particle deposit |
-
2016
- 2016-09-05 JP JP2016172613A patent/JP6683077B2/en not_active Expired - Fee Related
-
2017
- 2017-08-29 CN CN201710756151.3A patent/CN107795546B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283504A (en) * | 1996-02-15 | 1997-10-31 | Fujikin:Kk | Feed of mixed gas, mixed gas feeding device and semiconductor manufacturing device provided with these |
| CN1501440A (en) * | 2002-11-15 | 2004-06-02 | ��ʽ���������Ƽ� | Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto |
| JP2009146939A (en) * | 2007-12-11 | 2009-07-02 | Taiyo Nippon Sanso Corp | Apparatus for manufacturing compound thin-film semiconductor, and device and method of supplying ammonia gas |
| CN102192400A (en) * | 2010-03-03 | 2011-09-21 | 中外炉工业株式会社 | High-pressure dry air supply system |
| JP2014131946A (en) * | 2013-01-04 | 2014-07-17 | Sumitomo Electric Ind Ltd | Fluid supply apparatus for synthesizing glass |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107795546B (en) | 2020-09-15 |
| JP6683077B2 (en) | 2020-04-15 |
| JP2018039679A (en) | 2018-03-15 |
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