CN107768479B - Sheet bearing jig - Google Patents
Sheet bearing jig Download PDFInfo
- Publication number
- CN107768479B CN107768479B CN201610695811.7A CN201610695811A CN107768479B CN 107768479 B CN107768479 B CN 107768479B CN 201610695811 A CN201610695811 A CN 201610695811A CN 107768479 B CN107768479 B CN 107768479B
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- CN
- China
- Prior art keywords
- rod
- bearing
- group
- sheet
- stop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000002955 isolation Methods 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052710 silicon Inorganic materials 0.000 abstract description 10
- 239000010703 silicon Substances 0.000 abstract description 10
- 238000004140 cleaning Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 8
- 239000003153 chemical reaction reagent Substances 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000001788 irregular Effects 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packages (AREA)
Abstract
The invention discloses a sheet bearing jig which comprises a bearing frame and a cover body matched with the bearing frame, wherein the bearing frame comprises at least one bearing rod and at least one supporting rod pair, the bearing rod bears a sheet from the bottom, the at least one supporting rod pair supports the sheet from two sides of the sheet, and the cover body and the bearing rod are oppositely arranged. The sheet bearing jig solves the problems that the existing flower basket bearing silicon wafer is unstable and easy to collide and the cleaning or processing effect is easy to be influenced by adhesion. The sheet bearing jig comprises the bearing frame and the cover body which are matched with each other, and the sheets are limited between the bearing frame and the cover body from all directions, so that unnecessary collision of the sheets is reduced and even avoided; and the bearing frame is provided with a stop component which is matched with the limit component of the cover body, so that adjacent sheets can be spaced from each other and have enough clearance, and thus, the reagent treatment or cleaning effect is ensured.
Description
Technical Field
The invention belongs to the technical field of bearing devices, and particularly relates to a sheet bearing jig.
Background
With the continuous development of world economy, the demand of modern construction for high-efficiency energy is continuously increased. Photovoltaic power generation is increasingly valued by countries in the world and is vigorously developed as a green energy source and a main energy source for sustainable development of human beings. The cell taking the silicon wafer as the main body is the mainstream product in the field of solar cells, and the flower basket is needed for cleaning before the silicon wafer is delivered and for alkali corrosion, texturing and cleaning procedures of the cell manufacturing process. The flower basket carries several, tens or more silicon wafers at a time and makes a flow between the reagent tank and the pure water tank. Thus, batch processing of silicon wafers is realized.
However, since the silicon wafer is small in thickness and light in weight, the silicon wafer is easily floated from the flower basket when a general flower basket is placed in a reagent tank or a pure water tank, and fragments are easily increased due to collision in the floating process. Moreover, the silicon wafers are adsorbed and adhered to each other, which also affects the treatment or cleaning effect of the reagent.
Disclosure of Invention
The invention aims to provide a sheet bearing jig, which solves the problems that the existing flower basket bearing silicon wafer is unstable and easy to collide and the cleaning or processing effect is easy to be influenced by adhesion.
The invention adopts a technical scheme that: the sheet bearing jig comprises a bearing frame and a cover body matched with the bearing frame, the bearing frame comprises at least one bearing rod and at least one supporting rod pair, the bearing rod bears the sheet from the bottom, the at least one supporting rod pair supports the sheet from two sides of the sheet, and the cover body and the bearing rod are arranged oppositely.
The present invention is also characterized in that,
the bearing frame is provided with a stop component, and the cover body is provided with a limit component corresponding to the stop component.
The cover body comprises two matching rods and at least one isolating rod connected between the two matching rods, the matching rods are matched with the bearing frame, and the limiting assembly is arranged on the at least one isolating rod.
The isolation rod is provided with a plurality ofly, and the isolation rod is equidistant between two cooperation poles.
The limiting assembly comprises at least one limiting group, the at least one limiting group corresponds to the at least one isolating rod, each limiting group comprises a plurality of limiting pieces, and each limiting piece extends from the isolating rod corresponding to the limiting group to the direction close to the bearing rod.
Along the direction that the spacer bar is to being close to the carrier bar, the cross-sectional area of locating part reduces.
The supporting rod pair comprises a first supporting rod and a second supporting rod which are oppositely arranged on two sides of the bearing rod, the stopping component comprises a first stopping group and a second stopping group which are corresponding to each other, the first stopping group is arranged on the first supporting rod, the second stopping group is arranged on the second supporting rod, and the first stopping group and the second stopping group are both corresponding to the limiting component.
First backstop group includes the first stop part that a plurality of intervals set up, and second backstop group includes quantity and the equal and a plurality of second stop parts that first backstop group corresponds in position, and first stop part all extends to the direction of second bracing piece from first bracing piece, and second stop part all extends to the direction of first bracing piece from the second bracing piece.
The cross-sectional area of the first stop piece is reduced from the first support rod to the second support rod; the cross-sectional area of the second stopper decreases in a direction from the second support bar toward the first support bar.
The invention has the beneficial effects that: the sheet bearing jig solves the problems that the existing flower basket bearing silicon wafer is unstable and easy to collide and the cleaning or processing effect is easy to be influenced by adhesion. The sheet bearing jig comprises the bearing frame and the cover body which are matched with each other, and the sheets are limited between the bearing frame and the cover body from all directions, so that unnecessary collision of the sheets is reduced and even avoided; and the bearing frame is provided with a stop component which is matched with the limit component of the cover body, so that adjacent sheets can be spaced from each other and have enough clearance, and thus, the reagent treatment or cleaning effect is ensured.
Drawings
FIG. 1 is a schematic exploded view of a sheet carrying fixture according to the present invention;
fig. 2 is a schematic view of an assembled state of the sheet carrying jig of the present invention.
In the figure, 10, a sheet carrying jig, 1, a carrying frame, 11, a carrier plate, 12, a carrying rod, 13, a support rod pair, 14, a stop assembly, 140, a first stop group, 141, a first stop, 15, a first support rod, 16, a second support rod, 2, a cover body, 21, a matching rod, 22, an isolation rod, 23, a limit assembly, 24, a limit group and 25, limit members.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The structure of the sheet carrying jig 10 provided by the invention is shown in fig. 1 and 2, and is used for simultaneously carrying a plurality of sheets. The sheet carrying jig 10 comprises a carrier 1 and a cover 2 which are fitted to each other.
The carrier 1 comprises two carrier plates 11, at least one carrier bar 12, at least one pair of support bars 13 and a stop assembly 14. The two carrier plates 11 are arranged opposite to each other. At least one carrier bar 12 and at least one pair of support bars 13 are mounted between two carrier plates 11. The carrier bar 12 carries the sheet from the bottom. At least one pair of support bars 13 supports the sheet from both sides of the sheet. In this embodiment, there is one carrier bar 12 and two pairs of support bars 13. Two pairs of support bars 13 are disposed in sequence above the carrier bar 12, and each pair of support bars 13 includes a first support bar 15 and a second support bar 16 disposed opposite to each other on both sides of the carrier bar 12. Stop assembly 14 includes corresponding first stop set 140 and second stop set (not shown). The first stopping set 140 is disposed on the first supporting rod 15, and the second stopping set is disposed on the second supporting rod 16. The first stopping group 140 includes a plurality of first stoppers 141 arranged at intervals. The second stop group includes a plurality of second stops corresponding in number and position to the first stop group 140. The plurality of first stoppers 141 each extend from the first support rod 15 in a direction toward the second support rod 16. The plurality of second stoppers each extend from the second support bar 16 in the direction of the first support bar 15. The sectional area of the first stopper 141 is reduced in a direction from the first support rod 15 toward the second support rod 16. In this embodiment, the first stopper 141 is a substantially trapezoidal cylinder, but the first stopper 141 may also be a circular truncated cone or other irregular shapes. The cross-sectional area of the second stop decreases from the second support bar 16 in the direction of the first support bar 15. In this way, the first stopper 141 and the second stopper of the carrier 1 can be reduced from colliding with the sheet, and the first stopper 141 and the second stopper can also play a role of guiding the movement of the sheet into the carrier 1.
The cover 2 is disposed opposite to the support rod 12. The cover 2 includes two engagement bars 21, at least one spacer bar 22, and a stop assembly 23. The engagement lever 21 engages with the carriage 1. Each engaging bar 21 is arranged adjacent to one carrier plate 11 of the loading ledge 1. Each engagement bar 21 is carried by a pair of support bars 13 of the carrier 1. Specifically, the engagement bar 21 is carried between a set of the first support bar 15 and the second support bar 16 remote from the carrier bar 12. At least one spacer bar 22 is connected between the two engagement bars 21 at a position corresponding to between the first support bar 15 and the second support bar 16 and opposite to the carrier bar 12. In this embodiment, the two spacer bars 22 are provided at equal intervals between the first support bar 15 and the second support bar 16. The spacing assembly 23 is disposed on the at least one isolation rod 22 and corresponds to the stopping assembly 14. Specifically, the limiting assembly 23 includes at least one limiting set 24, each limiting set 24 includes a plurality of limiting members 25, and each limiting member 25 extends from the isolation rod 22 to a direction close to the carrier rod 12. The cross-sectional area of the stopper 25 decreases in a direction toward the carrier rod 12 along the spacer rod 22. In this embodiment, the limiting member 25 has a substantially conical shape. Of course, the limiting member 25 may also be a truncated cone or other irregular shape. So, can reduce the colliding with of locating part 25 to the sheet of lid 2 to, locating part 25 can also play the effect of drainage to reagent or pure water. In this embodiment, the limit assembly 23 includes two limit groups 24 corresponding to the spacer rod 22.
By using the sheet bearing jig 10 of the technical scheme, the following steps can be adopted:
first, a plurality of sheets are placed into the carrier 1, either manually or using special equipment. The bottom of each sheet is supported by a carrier bar 12, and both sides of each sheet are supported by two pairs of support bars 13 arranged up and down. Specifically, one side of the sheet is supported by a first support bar 15 near one side of the carrier bar 12 and a first support bar 15 far from the carrier bar 12, and the other side is supported by a second support bar 16 near one side of the carrier bar 12 and a second support bar 16 far from the carrier bar 12. Two adjacent sheets are separated by a first stop 141 of the first stop group 140 and a corresponding second stop of the second stop group.
Then, lid body 2 is opposed to carrier bar 12, and lid body 2 is fitted to carrier 1. The limiting assembly 23 corresponds to the stopping assembly 14, and the two engaging rods 21 of the cover 2 are respectively carried on the end portions of the supporting rod pairs 13 close to the two carrier plates 11. Specifically, the limiting set 24 corresponds to the first stopping set 140 and the second stopping set, and the plurality of limiting members 25 separate the plurality of sheets at an end away from the carrier bar 12.
The sheet bearing jig 10 comprises the bearing frame 1 and the cover body 2 which are matched with each other, and the sheets are limited between the bearing frame 1 and the cover body 2 from all directions, so that unnecessary collision of the sheets is reduced or even avoided. Further, the carrier 1 has the stopper members 14, and the stopper members 23 of the cover 2 are engaged with each other, so that the adjacent sheets are spaced apart from each other with a sufficient gap, thereby ensuring the effect of reagent treatment or pure water washing.
Claims (4)
1. The sheet material bearing jig is characterized by comprising a bearing frame (1) and a cover body (2) matched with the bearing frame (1), wherein the bearing frame (1) comprises at least one bearing rod (12) and at least one supporting rod pair (13), the bearing rod (12) bears the sheet material from the bottom, the at least one supporting rod pair (13) supports the sheet material from two sides of the sheet material, and the cover body (2) is arranged opposite to the bearing rod (12);
the bearing frame (1) is provided with a stop component (14), and the cover body (2) is provided with a limit component (23) corresponding to the stop component (14);
the cover body (2) comprises two matching rods (21) and at least one isolating rod (22) connected between the two matching rods (21), the matching rods (21) are matched with the bearing frame (1), and the limiting assembly (23) is arranged on the at least one isolating rod (22);
the limiting assembly (23) comprises at least one limiting group (24), the at least one limiting group (24) corresponds to the at least one isolating rod (22), each limiting group (24) comprises a plurality of limiting pieces (25), and each limiting piece (25) extends from the isolating rod (22) corresponding to the limiting group (24) to the direction close to the bearing rod (12);
the cross-sectional area of the limiting piece (25) is reduced along the direction of the isolating rod (22) to approach the bearing rod (12);
the isolation rods (22) are arranged in a plurality, and the isolation rods (22) are arranged between the two matching rods (21) at equal intervals.
2. The sheet carrying jig according to claim 1, wherein the pair of support rods (13) comprises a first support rod (15) and a second support rod (16) which are oppositely arranged at two sides of the carrying rod (12), the stop assembly (14) comprises a corresponding first stop group (140) and a corresponding second stop group, the first stop group (140) is arranged at the first support rod (15), the second stop group is arranged at the second support rod (16), and the first stop group (140) and the second stop group are both corresponding to the limiting assembly (23).
3. The sheet carrying jig according to claim 2, wherein the first stopping group (140) comprises a plurality of first stopping members (141) arranged at intervals, the second stopping group comprises a plurality of second stopping members corresponding to the first stopping group in number and position, the first stopping members (141) extend from the first supporting rod (15) to the direction of the second supporting rod (16), and the second stopping members extend from the second supporting rod (16) to the direction of the first supporting rod (15).
4. The sheet carrying jig according to claim 3, wherein the cross-sectional area of the first stopper (141) decreases in a direction from the first support bar (15) to the second support bar (16); the cross-sectional area of the second stop decreases from the second support bar (16) in the direction of the first support bar (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610695811.7A CN107768479B (en) | 2016-08-19 | 2016-08-19 | Sheet bearing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610695811.7A CN107768479B (en) | 2016-08-19 | 2016-08-19 | Sheet bearing jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107768479A CN107768479A (en) | 2018-03-06 |
| CN107768479B true CN107768479B (en) | 2021-01-05 |
Family
ID=61262071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610695811.7A Active CN107768479B (en) | 2016-08-19 | 2016-08-19 | Sheet bearing jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107768479B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020706A (en) * | 2019-10-16 | 2020-04-17 | 晋能光伏技术有限责任公司 | Single crystal alkali texturing sheet box |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2833883Y (en) * | 2005-11-08 | 2006-11-01 | 深圳市捷佳创精密设备有限公司 | Silicon wafer basket |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201430157Y (en) * | 2009-07-05 | 2010-03-24 | 深圳市明鑫高分子技术有限公司 | Silicon crystal carrying device |
| CN202189765U (en) * | 2011-07-22 | 2012-04-11 | 江阴市爱多光伏科技有限公司 | Silicon wafer carrying device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4300205A1 (en) * | 1993-01-07 | 1994-07-14 | Deutsche Bundespost Telekom | Mounting for substrates in cassette form |
| KR20110090101A (en) * | 2010-02-02 | 2011-08-10 | (주)상아프론테크 | Cassette for receiving thin plate |
-
2016
- 2016-08-19 CN CN201610695811.7A patent/CN107768479B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2833883Y (en) * | 2005-11-08 | 2006-11-01 | 深圳市捷佳创精密设备有限公司 | Silicon wafer basket |
| CN200967049Y (en) * | 2006-10-31 | 2007-10-31 | 北京七星华创电子股份有限公司 | Bracket specially for cleaning solar battery silicon wafers |
| CN201430157Y (en) * | 2009-07-05 | 2010-03-24 | 深圳市明鑫高分子技术有限公司 | Silicon crystal carrying device |
| CN202189765U (en) * | 2011-07-22 | 2012-04-11 | 江阴市爱多光伏科技有限公司 | Silicon wafer carrying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107768479A (en) | 2018-03-06 |
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