CN111020706A - Single crystal alkali texturing sheet box - Google Patents

Single crystal alkali texturing sheet box Download PDF

Info

Publication number
CN111020706A
CN111020706A CN201910984272.2A CN201910984272A CN111020706A CN 111020706 A CN111020706 A CN 111020706A CN 201910984272 A CN201910984272 A CN 201910984272A CN 111020706 A CN111020706 A CN 111020706A
Authority
CN
China
Prior art keywords
silicon wafer
correspondingly
single crystal
wafer fixing
fixing columns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910984272.2A
Other languages
Chinese (zh)
Inventor
张娟
李高非
王继磊
白星亮
黄金
白焱辉
冯乐
贾慧君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jinneng Photovoltaic Technology Co Ltd
Original Assignee
Jinneng Photovoltaic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jinneng Photovoltaic Technology Co Ltd filed Critical Jinneng Photovoltaic Technology Co Ltd
Priority to CN201910984272.2A priority Critical patent/CN111020706A/en
Publication of CN111020706A publication Critical patent/CN111020706A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a single crystal alkali texturing sheet box, wherein two side plates are arranged oppositely at intervals and are parallel to each other; the silicon wafer fixing columns are divided into two groups, each group is provided with two silicon wafer fixing columns, the two silicon wafer fixing columns are perpendicular to the side plates and are connected between the two side plates in parallel at intervals; a plurality of first teeth are uniformly fixed on each silicon wafer fixing column along the length direction at intervals, a clamping groove is defined by two adjacent first teeth, a plurality of silicon wafer placing areas are defined by the clamping grooves on the four silicon wafer fixing columns in a one-to-one correspondence manner, and a silicon wafer is correspondingly inserted into each silicon wafer placing area; the two pressing strips are parallel to the silicon wafer fixing columns, the two pressing strips are correspondingly positioned above the two groups of silicon wafer fixing columns one by one, and the two ends of each pressing strip are respectively correspondingly detachably connected with the side end parts of the side plates; the two pressing strips are respectively and correspondingly pressed at the chamfer angles at the two sides of the silicon wafer in the silicon wafer placing area. The invention discloses a single crystal alkali texturing wafer box, which can avoid influencing the appearance and performance of the main part of a silicon wafer and can avoid polluting liquid medicine and a groove body.

Description

Single crystal alkali texturing sheet box
Technical Field
The invention relates to the technical field of single crystal alkali texturing, in particular to a wafer box for single crystal alkali texturing.
Background
The single crystal alkali texturing mainly utilizes alkali to generate anisotropic corrosion with silicon at a certain temperature, and the single crystal alkali texturing in the industry is generally realized by using a 200pcs/run tank type cleaning machine.
In the process of texturing with single crystal alkali, a large amount of hydrogen can be generated in the reaction process of alkali and silicon, the hydrogen can be attached to the surface of a silicon wafer, and even if additives are added for assisting defoaming, the silicon wafer still can leave a wafer box clamping groove under the influence of surface potential energy to generate the phenomena of wafer floating or lamination.
Therefore, in the single crystal texturing process in the industry at present, a pressure bar/pressing strip matched with the wafer box is used for fixing the silicon wafer, so that the phenomena of wafer floating and lamination are prevented. The pressure bar with the caliper can completely avoid the phenomena of sheet floating and lamination, but the pressure bar with the caliper needs to be pressed at the middle position of the silicon wafer, so that the caliper print is generated at the central position of the silicon wafer, and the quality and the appearance of a product are seriously influenced; the other is a caliper-free pressure bar, the suede appearance of the pressure bar is not abnormal, but the lamination proportion is higher.
The material of the pressure lever is determined according to the actual cleaning process, the general outer layer is made of PFA/PVDF/PP/PTFE and the like, and a metal rod or a carbon fiber rod and the like are wrapped in the pressure lever to be used as mechanical strength support, but the pressure lever is easy to crack in the long-term use process, and the material used as the mechanical support in the middle can pollute liquid medicine and a groove body, so that the silicon wafer is polluted in the cleaning process; in addition, the pressing strips are made of the same pressing rod, the inner layer and the outer layer of the pressing strips are made of PFA (Polytetrafluoroethylene)/PVDF (polyvinylidene fluoride)/PP (polypropylene)/PTFE) materials, and the middle of the pressing strips and the pressing rods are free of strength supports, so that the pressing strips and the pressing rods are soft in material, and can contact with a silicon wafer due to deformation in the using process, so that the texture of the silicon wafer is abnormal and uneven, and the.
Disclosure of Invention
The invention aims to solve at least one of the technical problems in the prior art to a certain extent, not only can avoid influencing the appearance and the performance of the main part of the silicon wafer, but also can avoid polluting the liquid medicine and the tank body.
In order to achieve the purpose, the invention adopts the following technical scheme:
a single crystal alkaline texturing cassette comprising:
the two side plates are arranged oppositely at intervals and are parallel to each other;
the silicon wafer fixing columns are divided into two groups, each group is provided with two silicon wafer fixing columns, and the two silicon wafer fixing columns are perpendicular to the side plates and are connected between the two side plates in parallel at intervals;
a plurality of first teeth are uniformly fixed on each silicon wafer fixing column along the length direction at intervals, a clamping groove is defined by two adjacent first teeth, a plurality of silicon wafer placing areas are defined by the clamping grooves on the four silicon wafer fixing columns in a one-to-one correspondence manner, and a silicon wafer is correspondingly inserted into each silicon wafer placing area;
the two pressing strips are parallel to the silicon wafer fixing columns, the two pressing strips are correspondingly positioned above the two groups of silicon wafer fixing columns one by one, and two ends of each pressing strip are respectively correspondingly detachably connected with the side end parts of the side plates; the two pressing strips are correspondingly pressed at the chamfers at the two sides of the silicon wafer in the silicon wafer mounting area respectively, a plurality of second teeth are uniformly fixed on each pressing strip, and the second teeth are in contact with the chamfers at the two sides of the silicon wafer.
According to the invention, a plurality of silicon wafer mounting areas are defined by the clamping grooves on the four silicon wafer fixing columns in a one-to-one correspondence manner, the silicon wafers are fixed in the silicon wafer mounting areas, and the two pressing strips are respectively pressed at the chamfers at the two sides of the silicon wafers, so that tooth marks are left only at the chamfers of the silicon wafers, the appearance and the performance of the main part of the silicon wafers are not influenced, and the accuracy of test data is facilitated; meanwhile, the silicon wafer is loaded through the silicon wafer fixing columns, so that the acting force of the pressing strip on the silicon wafer can be shared by the silicon wafer fixing columns, and supports such as metal rods do not need to be arranged in the pressing strip, so that the service life of the pressing strip can be prolonged, and the problem that the supports such as the metal rods pollute liquid medicine and a groove body due to the breakage of the pressing strip can be avoided.
Preferably, the pressing strip is made of PFA, PVDF, PP or PTFE materials, so that the problem that the metal bar support pollutes the liquid medicine and the grass tank body due to breakage of the pressing strip can be solved.
Preferably, both sides of each side plate are respectively provided with a limiting groove, both ends of each pressing strip are threaded ends, both ends of each pressing strip correspondingly penetrate through the limiting grooves and are in matched connection with the threaded ends through nuts, and meanwhile, the outer diameters of the nuts are larger than the diameter of the notches of the limiting grooves.
According to the invention, the two ends of the pressing strip are set to be the threaded ends, so that the two ends of the pressing strip can be correspondingly connected with the nut after passing through the limiting grooves, thereby not only realizing a detachable connection mode between the pressing strip and the side plate, facilitating the arrangement of a silicon wafer in a silicon wafer arrangement area before the side plate is not connected with the pressing strip, but also ensuring the connection stability between the pressing strip and the side plate after the pressing strip is connected with the side plate.
Preferably, both sides of each side plate are respectively provided with a limiting groove, both ends of each pressing strip are respectively provided with a positioning through hole, both ends of each pressing strip correspondingly penetrate through the limiting grooves and are connected with the positioning through holes in a matching manner through positioning pins, and meanwhile, the length of each positioning pin is larger than the diameter of a notch of each limiting groove.
According to the silicon wafer placing device, the two ends of the pressing strip are provided with the positioning through holes, so that the two ends of the pressing strip can be correspondingly connected with the positioning pins after passing through the limiting grooves, a detachable connection mode between the pressing strip and the side plate can be realized, a silicon wafer can be conveniently placed in the silicon wafer placing area before the side plate is not connected with the pressing strip, and after the pressing strip is connected with the side plate, the connection stability between the pressing strip and the side plate can be ensured, and meanwhile, the operation is rapid and convenient.
Preferably, the second teeth correspond to the first teeth one to one.
Preferably, two ends of the silicon wafer fixing column are correspondingly and fixedly connected with the side plate.
Preferably, the two ends of the silicon wafer fixing column are correspondingly and integrally connected with the side plate, so that the stability of connection between the silicon wafer fixing column and the side plate can be further improved, and the silicon wafer fixing column and the side plate are prevented from being broken.
Compared with the prior art, the technical scheme provided by the invention has the advantages that the following technical effects can be realized:
the pressing strips are arranged on the two sides of the side plate, so that the pressing strips can be respectively pressed at the chamfer angle of the silicon wafer, tooth marks can be left only at the chamfer angle of the silicon wafer, the appearance and the performance of the main part of the silicon wafer cannot be influenced, and the accuracy of test data is facilitated; meanwhile, the silicon wafer is loaded through the silicon wafer fixing columns, so that the acting force of the pressing strip on the silicon wafer can be shared by the silicon wafer fixing columns, and supports such as metal rods do not need to be arranged in the pressing strip, so that the service life of the pressing strip can be prolonged, and the problem that the supports such as the metal rods pollute liquid medicine and a groove body due to the breakage of the pressing strip can be avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a view showing an overall structure of a wafer cassette for single crystal alkali texturing according to the present invention;
FIG. 2 is an enlarged view of FIG. 1;
FIG. 3 is an enlarged view of the bead of the present invention;
FIG. 4 is an enlarged view of the silicon wafer fixing posts of the present invention.
Wherein, 1 is a side plate, 2 is a silicon wafer fixing column, and 21 is a first tooth; 3, pressing strips; 31 is a second tooth; 30 is a threaded end; 12 is a nut; 11 is a limit groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a single crystal alkali texturing sheet box, which comprises:
the side plates 1 are arranged at intervals and oppositely, and are parallel to each other;
the silicon wafer fixing columns 2 are divided into two groups, the number of each group is two, the silicon wafer fixing columns are perpendicular to the side plates 1 and are connected between the two side plates 1 at intervals in parallel;
a plurality of first teeth 21 are uniformly fixed on each silicon wafer fixing column 2 at intervals along the length direction of the silicon wafer fixing column, a clamping groove is defined by two adjacent first teeth 21, a plurality of silicon wafer placing areas are defined by the clamping grooves on the four silicon wafer fixing columns 2 in a one-to-one correspondence manner, and a silicon wafer is correspondingly inserted into each silicon wafer placing area;
the two press strips 3 are parallel to the silicon wafer fixing columns 2, the two press strips 3 are correspondingly positioned above the two groups of silicon wafer fixing columns 2 one by one, and two ends of each press strip 3 are respectively correspondingly detachably connected with the side end parts of the side plates 1; the two pressing strips 3 are correspondingly pressed at the chamfers at the two sides of the silicon wafer in the silicon wafer placing area respectively, a plurality of second teeth 31 are uniformly fixed on each pressing strip 3, and the second teeth 31 are contacted with the chamfers at the two sides of the silicon wafer.
In order to further optimize the technical scheme, the pressing strip 3 is made of PFA, PVDF, PP or PTFE materials.
In order to further optimize the technical scheme, the two sides of each side plate 1 are respectively provided with a limiting groove 11, the two ends of each pressing strip 3 are both threaded ends 30, the two ends of each pressing strip 3 correspondingly penetrate through the limiting grooves 11 and are connected with the threaded ends 30 in a matched mode through nuts 12, and meanwhile the outer diameter of each nut 12 is larger than the diameter of a notch of each limiting groove 11.
In order to further optimize the technical scheme, the two sides of each side plate 1 are respectively provided with a limiting groove 11, the two ends of each pressing strip 3 are respectively provided with a positioning through hole, the two ends of each pressing strip 3 correspondingly penetrate through the limiting grooves 11 and are connected with the positioning through holes in a matching mode through positioning pins, and meanwhile the length of each positioning pin is larger than the diameter of a notch of each limiting groove 11.
In order to further optimize the above solution, the second teeth 31 correspond to the first teeth 21 one to one.
In order to further optimize the technical scheme, two ends of the silicon wafer fixing column 2 are correspondingly and fixedly connected with the side plate 1.
In order to further optimize the technical scheme, two ends of the silicon wafer fixing column 2 are correspondingly and integrally connected with the side plate 1
Example (b):
firstly, forming a silicon wafer mounting area: the two side plates 1 are arranged at intervals and oppositely and are parallel to each other, the number of the silicon wafer fixing columns 2 in each group is two, the two groups of the silicon wafer fixing columns are perpendicular to the side plates 1 and are connected between the two side plates 1 at intervals in parallel, a plurality of first teeth 21 are uniformly fixed on each silicon wafer fixing column 2 at intervals along the length direction of the silicon wafer fixing column, a clamping groove is defined by every two adjacent first teeth 21, and a plurality of silicon wafer placing areas are defined by the clamping grooves on the four silicon wafer fixing columns 2 in a one-to-one correspondence manner;
secondly, before the press strip 3 is connected with the side plate 1, a silicon wafer is firstly inserted into a corresponding silicon wafer mounting area;
finally, the two pressing strips 3 are parallel to the silicon wafer fixing columns 2, the pressing strips 3 are correspondingly positioned above the two groups of silicon wafer fixing columns 2 one by one, and two ends of the pressing strips are respectively correspondingly detachably connected with the side end parts of the side plates 1;
the two pressing strips 3 are respectively and correspondingly pressed at the chamfers at the two sides of the silicon wafer, a plurality of second teeth 31 are uniformly fixed on each pressing strip 3, and the second teeth 31 are contacted with the chamfers at the two sides of the silicon wafer.
Wherein, the batten 3 is made of PFA, PVDF, PP or PTFE material, and does not contain a metal rod for supporting;
limiting grooves 11 are formed in two sides of each side plate 1 respectively, two ends of each pressing strip 3 are threaded ends 30, two ends of each pressing strip 3 correspondingly penetrate through the limiting grooves 11 and are connected with the threaded ends 30 in a matched mode through nuts 12, and meanwhile the outer diameter of each nut 12 is larger than the diameter of a notch of each limiting groove 11.
The pressing strips 3 are arranged on the two sides of the side plate 1, so that the pressing strips 3 can be respectively pressed at the chamfer angle of the silicon wafer, and therefore, only tooth marks are left at the chamfer angle of the silicon wafer, the appearance and the performance of the main part of the silicon wafer are not influenced, and the accuracy of test data is facilitated; meanwhile, the silicon wafer is loaded through the silicon wafer fixing columns 2, so that the silicon wafer fixing columns 2 can share the acting force of the pressing strip 3 on the silicon wafer, and supports such as metal rods do not need to be arranged in the pressing strip 3, so that the service life of the pressing strip 3 can be prolonged, and the problem that the supports such as the metal rods pollute liquid medicine and a groove body due to fracture of the pressing strip 3 can be avoided.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (7)

1. A single crystal alkaline texturing cassette comprising:
the side plates (1) are arranged oppositely at intervals and are parallel to each other;
the silicon wafer fixing columns (2) are divided into two groups, the number of each group is two, the two groups are perpendicular to the side plates (1) and are connected between the two side plates (1) in parallel at intervals;
a plurality of first teeth (21) are uniformly fixed on each silicon wafer fixing column (2) at intervals along the length direction of the silicon wafer fixing column, a clamping groove is defined by two adjacent first teeth (21), a plurality of silicon wafer mounting areas are defined by the clamping grooves on the four silicon wafer fixing columns (2) in a one-to-one correspondence manner, and a silicon wafer is correspondingly inserted into each silicon wafer mounting area;
the two press strips (3) are parallel to the silicon wafer fixing columns (2), the press strips (3) are correspondingly positioned above the two groups of silicon wafer fixing columns (2) one by one, and two ends of each press strip are respectively correspondingly detachably connected with the side end parts of the side plates (1); the two pressing strips (3) are correspondingly pressed at the chamfers at the two sides of the silicon wafer in the silicon wafer mounting area respectively, a plurality of second teeth (31) are uniformly fixed on each pressing strip (3), and the second teeth (31) are in contact with the chamfers at the two sides of the silicon wafer.
2. A single crystal alkali texturing cartridge according to claim 1 wherein the bead (3) is made of PFA, PVDF, PP or PTFE.
3. The single crystal alkali texturing cassette of claim 1, wherein two sides of each side plate (1) are respectively provided with a limiting groove (11), two ends of each pressing strip (3) are both threaded ends (30), two ends of each pressing strip (3) correspondingly penetrate through the limiting grooves (11) and are in matched connection with the threaded ends (30) through nuts (12), and the outer diameter of each nut (12) is larger than the diameter of the notch of each limiting groove (11).
4. The single crystal alkali texturing cassette of claim 1, wherein two sides of each side plate (1) are respectively provided with a limiting groove (11), two ends of each pressing strip (3) are respectively provided with a positioning through hole, two ends of each pressing strip (3) correspondingly penetrate through the limiting grooves (11) and are in matched connection with the positioning through holes through positioning pins, and the length of each positioning pin is greater than the diameter of a notch of each limiting groove (11).
5. A single crystal soda texturing cartridge according to claim 1, wherein said second teeth (31) correspond one-to-one to said first teeth (21).
6. The cassette for single crystal alkaline texturing according to claim 1, wherein two ends of the silicon wafer fixing column (2) are correspondingly and fixedly connected with the side plate (1).
7. A single crystal alkali texturing cassette according to claim 5, wherein both ends of the silicon wafer fixing post (2) are integrally connected with the side plate (1) correspondingly.
CN201910984272.2A 2019-10-16 2019-10-16 Single crystal alkali texturing sheet box Pending CN111020706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910984272.2A CN111020706A (en) 2019-10-16 2019-10-16 Single crystal alkali texturing sheet box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910984272.2A CN111020706A (en) 2019-10-16 2019-10-16 Single crystal alkali texturing sheet box

Publications (1)

Publication Number Publication Date
CN111020706A true CN111020706A (en) 2020-04-17

Family

ID=70200910

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910984272.2A Pending CN111020706A (en) 2019-10-16 2019-10-16 Single crystal alkali texturing sheet box

Country Status (1)

Country Link
CN (1) CN111020706A (en)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN200967049Y (en) * 2006-10-31 2007-10-31 北京七星华创电子股份有限公司 Bracket specially for cleaning solar battery silicon wafers
CN201708141U (en) * 2010-06-22 2011-01-12 北京市塑料研究所 Silicon slice bearing flower basket
CN107768479A (en) * 2016-08-19 2018-03-06 隆基绿能科技股份有限公司 Sheet material bearing fixture
CN207149539U (en) * 2017-09-15 2018-03-27 韩华新能源(启东)有限公司 A kind of silicon chip cleaning gaily decorated basket
CN207676893U (en) * 2017-12-14 2018-07-31 苏州阿特斯阳光电力科技有限公司 A kind of big gaily decorated basket
CN207765470U (en) * 2017-11-17 2018-08-24 太极能源科技(昆山)有限公司 A kind of slot type silicon wafer wool making board carrier
CN207800574U (en) * 2018-02-08 2018-08-31 无锡市索克赛斯科技有限公司 Ultra-fine formula gaily decorated basket compression bar
CN208028032U (en) * 2017-11-17 2018-10-30 太极能源科技(昆山)有限公司 A kind of making herbs into wool carrier of single crystal battery piece
CN208655675U (en) * 2018-09-07 2019-03-26 盐城阿特斯协鑫阳光电力科技有限公司 A kind of one texture-etching side gaily decorated basket
CN109524335A (en) * 2018-10-23 2019-03-26 上海神舟新能源发展有限公司 A kind of wet-method etching gaily decorated basket compression bar
CN109768007A (en) * 2019-01-14 2019-05-17 江西展宇新能源股份有限公司 A kind of gaily decorated basket device for placing silicon wafer

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN200967049Y (en) * 2006-10-31 2007-10-31 北京七星华创电子股份有限公司 Bracket specially for cleaning solar battery silicon wafers
CN201708141U (en) * 2010-06-22 2011-01-12 北京市塑料研究所 Silicon slice bearing flower basket
CN107768479A (en) * 2016-08-19 2018-03-06 隆基绿能科技股份有限公司 Sheet material bearing fixture
CN207149539U (en) * 2017-09-15 2018-03-27 韩华新能源(启东)有限公司 A kind of silicon chip cleaning gaily decorated basket
CN207765470U (en) * 2017-11-17 2018-08-24 太极能源科技(昆山)有限公司 A kind of slot type silicon wafer wool making board carrier
CN208028032U (en) * 2017-11-17 2018-10-30 太极能源科技(昆山)有限公司 A kind of making herbs into wool carrier of single crystal battery piece
CN207676893U (en) * 2017-12-14 2018-07-31 苏州阿特斯阳光电力科技有限公司 A kind of big gaily decorated basket
CN207800574U (en) * 2018-02-08 2018-08-31 无锡市索克赛斯科技有限公司 Ultra-fine formula gaily decorated basket compression bar
CN208655675U (en) * 2018-09-07 2019-03-26 盐城阿特斯协鑫阳光电力科技有限公司 A kind of one texture-etching side gaily decorated basket
CN109524335A (en) * 2018-10-23 2019-03-26 上海神舟新能源发展有限公司 A kind of wet-method etching gaily decorated basket compression bar
CN109768007A (en) * 2019-01-14 2019-05-17 江西展宇新能源股份有限公司 A kind of gaily decorated basket device for placing silicon wafer

Similar Documents

Publication Publication Date Title
CN111129386B (en) Foam type selection method for battery module and battery module
KR20190000208U (en) Silicon wafer mounting device
CN203429243U (en) Coated clamp for fixing head of optical fiber
CN111020706A (en) Single crystal alkali texturing sheet box
CN211661200U (en) Wire cutting clamp for thin-wall calandria
KR20130073417A (en) Probe unit for testing a display panel
CN217005677U (en) Eddy current displacement sensor mounting bracket
CN216161777U (en) Continuous pressurization tool for battery cell pole
CN214445836U (en) Test sample preparation frock
CN210474827U (en) Combinable cleaning clamp
CN112558362B (en) Display panel, preparation method thereof and display device
CN211677870U (en) Test-tube rack for endocrinology department
CN202259213U (en) Corrosion carrier suitable for wafers of different sizes
CN209132089U (en) A kind of fixation device for metal material tube sheet and the test of heat exchanger tube pulling-out force
CN214818200U (en) Lower stuck point replacer for graphite boat
CN214837794U (en) High-precision mirror surface shaft
CN214603200U (en) Clamping tool for machining thin-wall parts
CN213986428U (en) Test tube fixing device for drug sensitivity detection
CN210458409U (en) Flexible board support frame
CN218297824U (en) Small-size heavy H-shaped steel Z-direction tensile test auxiliary device
CN103487320A (en) Bolt tension test fixture
CN209918480U (en) Optical lens piece anchor clamps
CN204853168U (en) Tool is fixed to LED lamp plate
CN102201358B (en) Device and method for characterizing substrate surface property
CN221073557U (en) Positioning correction device for steel plate wall installation

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20200417

RJ01 Rejection of invention patent application after publication