CN107758942A - Ultrapure water production system - Google Patents
Ultrapure water production system Download PDFInfo
- Publication number
- CN107758942A CN107758942A CN201711155263.XA CN201711155263A CN107758942A CN 107758942 A CN107758942 A CN 107758942A CN 201711155263 A CN201711155263 A CN 201711155263A CN 107758942 A CN107758942 A CN 107758942A
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- CN
- China
- Prior art keywords
- filter
- pure water
- water
- reverse osmosis
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Abstract
The invention discloses a kind of ultrapure water production system, including raw water box, more medium filter, active carbon filter, accurate filter, first-stage reverse osmosis device, intermediate water tank, second level reverse osmosis apparatus, EDI electricity demineralizers, multistage resin column, bag type filter, pure water detection device and ultra-pure water detection means, raw water is through more medium filter and active carbon filter, remove various suspensions in water removal, microorganism and subparticle, then through two steps ro, the high filtering of precision is carried out to raw water, most afterwards through EDI electricity demineralizers, prepare the pure water for meeting resistivity requirement, pure water detection device and ultra-pure water detection means can test and analyze to the water quality in different disposal stage, then different processing is carried out.The present invention is by setting two steps ro to filter, multistage resin column, bag type filter, and EDI electricity demineralizer carries out multi-filtering, effectively eliminates excess ions and dissolved organic matter in water, improves the quality of ultra-pure water.
Description
Technical field
The present invention relates to a kind of ultrapure water production system, belong to technical field of water treatment equipment.
Background technology
Ultra-pure water is usually used in integrated circuit industry, for the cleaning of semiconductor source material, the preparation of lithography mask version, together
When ultra-pure water be also most commonly used material in laboratory, in Instrumental Analysis, high-purity analysis and during preparing chemical reagent, institute
The purity of the water used is extremely important, and excess ions and dissolved organic matter and impurity can interfere to experimental analysis in water,
Cause testing result inaccurate, preferable experimental result can not be obtained.At present, all there is experimental water system in most laboratory
Take difficult and cost high, and the excess ions that traditional process for preparing water often can not be thoroughly gone in water removal, it can not fully meet
The demand of experimental water.
The content of the invention
The technical problems to be solved by the invention are the defects of overcoming prior art, and the present invention provides a kind of ultra-pure water and prepared
System, using second level reverse osmosis apparatus, the ultra-pure water for meeting resistivity requirement can be prepared.
In order to solve the above technical problems, the present invention provides a kind of ultrapure water production system, including raw water box, multi-medium filtering
Device, active carbon filter, accurate filter, first-stage reverse osmosis device, intermediate water tank, second level reverse osmosis apparatus, EDI electricity desalinations
Device, multistage resin column, bag type filter, pure water detection device and ultra-pure water detection means；The raw water box and multimedium mistake
Filter is connected by raw water pump；The more medium filter is directly connected with active carbon filter by pipeline；The activated carbon
Filter is directly connected with accurate filter by pipeline；Accurate filter and the first-stage reverse osmosis device is connected by high-pressure pump
Connect；The first-stage reverse osmosis device is directly connected with intermediate water tank by pipeline；The intermediate water tank and second level reverse osmosis apparatus
Connected by two level high-pressure pump；The second level reverse osmosis apparatus is connected with EDI electricity demineralizers by booster pump；The EDI
Electric demineralizer is sequentially connected multistage resin column and bag type filter；The outlet of the bag type filter and one end of circulating valve connect
Connect, the outlet conduit of the other end connection EDI electricity demineralizers of circulating valve.
Scale inhibitor feeding device is set on pipeline between foregoing active carbon filter and accurate filter.
PH value adjusting devices are set on the pipeline between foregoing first-stage reverse osmosis device and intermediate water tank.
Foregoing bag type filter selects hydrophilic polypropylene filter membrane.
Foregoing pure water detection device is pure water sampling valve and the pure water sampling groove being attached thereto, and pure water sampling valve is arranged on
On pipeline before multistage resin column.
Foregoing ultra-pure water detection means is ultra-pure water sampling valve and the ultra-pure water sampling groove that is attached thereto, ultrapure water sampling
Valve is arranged on the pipeline after bag type filter.
The beneficial effect that the present invention is reached：
The present invention uses second level reverse osmosis apparatus, can prepare the ultra-pure water for meeting resistivity requirement, and pure water inspection is set on pipeline
Device and ultra-pure water detection means are surveyed, the water quality in different disposal stage can be tested and analyzed, then carry out different processing.
The present invention is by setting two steps ro to filter, multistage resin column, bag type filter, and EDI electricity demineralizer carries out multi task process,
Filtering, effectively eliminates excess ions and dissolved organic matter in water, improves the quality of ultra-pure water.
Brief description of the drawings
Fig. 1 is the ultrapure water production system structure chart of the present invention.
Embodiment
The invention will be further described below.Following examples are only used for the technical side for clearly illustrating the present invention
Case, and can not be limited the scope of the invention with this.
As shown in figure 1, the ultrapure water production system of the present invention includes raw water box 1, more medium filter 3, activated carbon filtering
Device 4, accurate filter 6, first-stage reverse osmosis device 8, intermediate water tank 10, second level reverse osmosis apparatus 12, EDI electricity demineralizers
14, multistage resin column 17, bag type filter 18, pure water detection device and ultra-pure water detection means.Specifically, running water enters original
Water tank 1, more medium filter 3 is pressed into by raw water pump 2, various suspensions, microorganism, Yi Jiqi in water removal are removed using medium
His subparticle, finally reduces water turbidity, then enters back into active carbon filter 4, reduces the contents of residual chlorine in water, goes in water removal
Peculiar smell, organic matter, colloid and irony, the water after thick step filtering enters accurate filter 6, and retention is more than 5 μm of particle,
To prevent large particulate matter from entering first-stage reverse osmosis device, large particulate matter may puncture first-stage reverse osmosis after high-pressure pump accelerates
Film, causes the situation of a large amount of leakage salt, while scratches the impeller of high-pressure pump.The effect of water after accurate filter 6 in high-pressure pump 7
Lower to enter first-stage reverse osmosis device 8, first-stage reverse osmosis device 8 carries out the high filtering of precision to raw water, and salt rejection rate can reach
More than 95%, water is continued to be pressurized subsequently into intermediate water tank 10, then by two level high-pressure pump 11, there is provided enough power passes through two
Level reverse osmosis membrane apparatus 12, filters to raw water, further improves salt rejection rate, EDI is then entered after booster pump 13 again
Electric demineralizer 14, set in EDI electricity demineralizer 14 according to deionized water purposes and system configuration, prepare and meet electricity
The pure water of resistance rate requirement.Pure water after EDI electricity demineralizers sequentially enters multistage resin column 17 and bag type filter 18, more
Grade resins post can further remove the metal ion in pure water.The outlet of bag type filter 18 connects with one end of circulating valve 21
Connect, the outlet conduit of the other end connection EDI electricity demineralizer 14 of circulating valve 21.
Further, scale inhibitor feeding device 5 is set on the pipeline between active carbon filter 4 and accurate filter 6,
Antisludging agent can be entered in the entrance pipe of accurate filter by scale inhibitor feeding device, and essence is entered after being mixed with Inlet fluid
In close filter, so as to ensure liquid enter accurate filter filter core position before be sufficiently mixed with antisludging agent, so as to by
Avoid the inorganic salts ingredients of slightly solubility in the cartridge surface precipitation of accurate filter or fouling, so as to effectively by impurity mistake
Prevented after filter outside filter core.
Further, pH value adjusting devices 9 are set on the pipeline between first-stage reverse osmosis device 8 and intermediate water tank 10,
PH value adjusting devices be used for adjust second level reverse osmosis apparatus water inlet pH values, by CO 2 be converted into HCO 3-, pass through two
Level reverse osmosis unit removal HCO 3-, reduce the contents of CO 2 so as to reach.
Further, bag type filter selects hydrophilic polypropylene（PP）Filter membrane.
Further, pure water detection device is pure water sampling valve 16 and the pure water sampling groove 15 being attached thereto, and pure water samples
Valve 16 is arranged on the pipeline before multistage resin column 17, opens pure water sampling valve, the pure water after EDI electricity desalinations can be entered
Water-filling quality detection.
Further, ultra-pure water detection means is ultra-pure water sampling valve 20 and the ultra-pure water sampling groove 19 being attached thereto, and is surpassed
Pure water sampling valve 20 is arranged on the pipeline after bag type filter 18, opens ultra-pure water sampling valve, can be to through more grade resins
Ultra-pure water after post and bag type filter processing carries out water quality detection.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, some improvement and deformation can also be made, these are improved and deformation
Also it should be regarded as protection scope of the present invention.
Claims (6)
1. ultrapure water production system, it is characterised in that including raw water box, more medium filter, active carbon filter, secondary filter
Device, first-stage reverse osmosis device, intermediate water tank, second level reverse osmosis apparatus, EDI electricity demineralizers, multistage resin column, bellows filtering
Device, pure water detection device and ultra-pure water detection means；The raw water box is connected with more medium filter by raw water pump；It is described more
Medium filter is directly connected with active carbon filter by pipeline；The active carbon filter and accurate filter directly pass through
Pipeline connects；The accurate filter is connected with first-stage reverse osmosis device by high-pressure pump；The first-stage reverse osmosis device is with
Between water tank directly connected by pipeline；The intermediate water tank is connected with second level reverse osmosis apparatus by two level high-pressure pump；Described two
Level reverse osmosis unit is connected with EDI electricity demineralizers by booster pump；The EDI electricity demineralizer is sequentially connected more grade resins
Post and bag type filter；The outlet of the bag type filter and one end of circulating valve connect, the other end connection EDI of circulating valve
The outlet conduit of electric demineralizer.
2. ultrapure water production system according to claim 1, it is characterised in that the active carbon filter and secondary filter
Scale inhibitor feeding device is set on pipeline between device.
3. ultrapure water production system according to claim 1, it is characterised in that the first-stage reverse osmosis device and middle water
PH value adjusting devices are set on the pipeline between case.
4. ultrapure water production system according to claim 1, it is characterised in that the bag type filter is gathered from hydrophily
Propylene filter membrane.
5. ultrapure water production system according to claim 1, it is characterised in that the pure water detection device samples for pure water
Valve and the pure water sampling groove being attached thereto, pure water sampling valve are arranged on the pipeline before multistage resin column.
6. ultrapure water production system according to claim 1, it is characterised in that the ultra-pure water detection means is ultra-pure water
Sampling valve and the ultra-pure water sampling groove being attached thereto, ultra-pure water sampling valve are arranged on the pipeline after bag type filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155263.XA CN107758942A (en) | 2017-11-20 | 2017-11-20 | Ultrapure water production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155263.XA CN107758942A (en) | 2017-11-20 | 2017-11-20 | Ultrapure water production system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107758942A true CN107758942A (en) | 2018-03-06 |
Family
ID=61279990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711155263.XA Withdrawn CN107758942A (en) | 2017-11-20 | 2017-11-20 | Ultrapure water production system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107758942A (en) |
-
2017
- 2017-11-20 CN CN201711155263.XA patent/CN107758942A/en not_active Withdrawn
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180306 |
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| WW01 | Invention patent application withdrawn after publication |