CN107717231A - The devices and methods therefor of Ceramic manufacturing is carried out using jointed fiber laser - Google Patents
The devices and methods therefor of Ceramic manufacturing is carried out using jointed fiber laser Download PDFInfo
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- CN107717231A CN107717231A CN201711167289.6A CN201711167289A CN107717231A CN 107717231 A CN107717231 A CN 107717231A CN 201711167289 A CN201711167289 A CN 201711167289A CN 107717231 A CN107717231 A CN 107717231A
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- ceramic substrate
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- 239000000919 ceramic Substances 0.000 title claims abstract description 107
- 239000000835 fiber Substances 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 239000013307 optical fiber Substances 0.000 claims abstract description 17
- 230000007423 decrease Effects 0.000 claims description 10
- 238000009826 distribution Methods 0.000 claims description 10
- 238000007493 shaping process Methods 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000012423 maintenance Methods 0.000 claims 1
- 238000007664 blowing Methods 0.000 description 4
- 238000005553 drilling Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- YTCQFLFGFXZUSN-BAQGIRSFSA-N microline Chemical compound OC12OC3(C)COC2(O)C(C(/Cl)=C/C)=CC(=O)C21C3C2 YTCQFLFGFXZUSN-BAQGIRSFSA-N 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000004814 ceramic processing Methods 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
Abstract
The invention discloses a kind of devices and methods therefor that Ceramic manufacturing is carried out using jointed fiber laser, the device includes jointed fiber laser, optical-fiber laser collimater, spatial light modulator, light focalizer, the workbench for placing ceramic substrate and XY axle mobile stations；The jointed fiber laser, optical-fiber laser collimater, spatial light modulator and light focalizer three are sequentially connected and connect, the workbench is located at the underface of light focalizer, the upper surface of ceramic substrate is arranged at the focal position of light focalizer, the workbench is fixed in XY axle mobile stations, and the XY axles mobile station drives work stage to do position movement or track movement；The optical rotator waved to light is installed in the smooth focalizer.The invention enables the accuracy and speed of Ceramic manufacturing to be all improved, and has not only saved cost but also has improved efficiency.
Description
Technical field
The present invention relates to ceramic laser processing to include drilling and ruling field, more particularly to one kind uses jointed fiber
Laser carries out the devices and methods therefor of Ceramic manufacturing.
Background technology
For ceramic substrate because of its good insulating properties and heat dispersion, turning into wiring board of LED and high cooling requirements etc. should
Heat-radiating substrate.The hard crisp characteristic of ceramics causes it to be difficult to, and conventional method has mechanical processing, and efficiency is low, crushes tight
Weight, cost is high, and precision is difficult to control；Laser type is processed, and typically uses psec infrared laser or carbon dioxide laser, the former valency
Lattice are expensive and power is not high, cause it is both costly and inefficient, the latter because after focusing hot spot it is too thick can not carry out it is fine plus
Work.But because laser technology has a clear superiority in field of ceramic processing, how with the strange high optical fiber of cheap and power
Laser carries out ceramic microfabrication into the problem for being badly in need of capturing.
The ceramic substrate thickness of laser drill is from 0.1mm to 1mm at present, in the ceramic base thick more than or equal to 0.5mm
Taper hole is easily formed when the pore less than or equal to 100 microns is bored on piece.Conventional method carries out Ceramic manufacturing using continous way laser
Belong to hot-working, it is auxiliary with the blowing and cooling of high-speed gas after the place heating melting that the laser beam of high-energy will be reached, from
And form groove and hole.But the material slag that the high-energy ablation that another question is laser is formed remains in processing district
Domain, has had a strong impact on the shape of groove and micropore, the process of subsequent treatment residue pass can more be caused further infringement from
And " chipping " is formed, " taper hole ", frangible etc. the consequence for not meeting processing request.
Picosecond laser has the tens of very high peak pulse power, typically continuous laser or pulse laser due to it
Even hundred times so that it can carry out cold working to ceramic substrate, can obtain preferable cutting edge, and more vertical
Pass, have obvious advantage in Ceramic manufacturing.Simply its fancy price limits it and is further widely applied.
Jointed fiber laser generally has very high mean power, is obtained in " roughing " fields such as cutting sheet metals
The heart answers hand, will be this hair for how to allow it be applied to " trickle processing " fields such as ceramic capillary as picosecond laser
It is bright to solve the problems, such as.
The content of the invention
For weak point present in above-mentioned technology, present invention offer is a kind of to be added using jointed fiber laser progress ceramics
The devices and methods therefor of work so that the accuracy and speed of Ceramic manufacturing is all improved, and has not only been saved cost but also has been improved efficiency.
To achieve the above object, the present invention provides a kind of device that Ceramic manufacturing is carried out using jointed fiber laser, including
Jointed fiber laser, optical-fiber laser collimater, spatial light modulator, light focalizer, the workbench for placing ceramic substrate
With XY axle mobile stations；The jointed fiber laser, optical-fiber laser collimater, spatial light modulator and light focalizer three are successively
It is connected, the workbench is located at the underface of light focalizer, and the upper surface of ceramic substrate is arranged at the focus position of light focalizer
Put, the workbench is fixed in XY axle mobile stations, and the XY axles mobile station drives work stage to do position movement or track shifting
It is dynamic；The optical rotator waved to light is installed in the smooth focalizer；
The light beam for the continuous diffusion that the jointed fiber laser is sent becomes directional light after optical-fiber laser collimater, then
It is changed into the variable pulsed light of waveform via continuous light after spatial light modulator；Pulsed light is focused it onto by light light focalizer to be located at
On the ceramic substrate of work stage；The optical rotator being integrated with light focalizer makes then by slight and continuous 360 degree are waved
Obtain the circular trace that the focal beam spot on ceramic substrate forms 360 degree on a ceramic substrate；Laser adds in the engineering for walk track
Work goes out the micropore of circle；Ceramic substrate is then moved to next by the XY axles mobile station of carrying workpiece after capillary processing at completion one
Place carries out another time processing, or walks out different tracks by XY axle moving belts part of starting building, and laser is realized not on a ceramic substrate
The line of similar shape.
Wherein, the optical rotator is made up of speculum and three piezoelectric ceramics；Speculum is fixed on three piezoelectric ceramics
On, and three piezoelectric ceramics are placed for 120 degree of distributions behind in speculum；Every piezoelectric ceramics distinguishes a variable voltage band.
Wherein, the smooth focalizer is telecentric lens, is installed on the light direction of speculum.
Wherein, the spatial light modulator built-in controller and pulse-pattern generator, caused by pulse-pattern generator
Pass through after pulse voltage wave shaping and light is modulated by controller driving spatial light modulator.
Wherein, the jointed fiber laser is the infrared jointed fiber laser of single mode, and the top of the work stage fills
Equipped with the high-speed compressed air for blowing to micropore and position of ruling.
To realize above-mentioned purpose, the present invention also provides a kind of method that Ceramic manufacturing is carried out using jointed fiber laser,
The light beam for the continuous diffusion that jointed fiber laser is sent becomes directional light after optical-fiber laser collimater, then via space
Continuous light is changed into the variable pulsed light of waveform after optical modulator；Pulsed light is focused it onto positioned at work stage by light light focalizer
On ceramic substrate；The optical rotator being integrated with light focalizer is then by slight and continuous 360 degree are waved so that ceramic base
Focal beam spot on piece forms 360 degree of circular trace on a ceramic substrate；Laser processes circle in the engineering for walk track
Micropore；The XY axles mobile station for carrying workpiece then completes that ceramic substrate is moved into next place's progress separately after capillary processing at one
Time processing, or different tracks is walked out by XY axle moving belts part of starting building, laser is realized of different shapes on a ceramic substrate
Line.
Wherein, the method for the spatial light modulator modulation light is：Used pulse voltage waveform, it is normal pulse
Waveform is adjusted to flank by shaping and remains former high, and middle part is eased up drastically to decline, and rear portion maintains the height after declining
And the shape of normal termination when pulse stops；The light pulse that the shape modulation comes out has smaller focus spot.
Wherein, the light pulse wavefront end after the adjustment is apparently higher than rear end, therebetween to tend to be flat after dramatic decrease
It is slow.
Wherein, the continuous swing of the piezoelectric ceramics of the optical rotator, it is the voltage on be added in piezoelectric ceramics to connect
Continuous sine wave, and the voltage-phase of three piezoelectric ceramics is different, 120 degree of differing distribution；So that it is fixed on piezoelectric ceramics
Reflecting optics are continuously waved with the up and down motion of three piezoelectric ceramics, and laser beam is done after the speculum reflection waved
Go out circular motion, the amplitude that track diameter is moved up and down by piezoelectric ceramics determines.
The beneficial effects of the invention are as follows：Compared with prior art, it is provided by the invention to be made pottery using jointed fiber laser
The devices and methods therefor of porcelain processing, the device include jointed fiber laser, optical-fiber laser collimater, spatial light modulator, light
Focalizer, workbench and XY axle mobile stations, method are that the continuous light for sending continuous wave laser becomes pulsed light after ovennodulation,
And the shape of pulsed light caused by adjustment space optical modulator, makes the Energy distribution of light pulse be more suitable for ceramic substrate
Micro hole drilling and microscopic score lines.The micropore and micro-line that light pulse after being adjusted processes on a ceramic substrate have chi
It is very little smaller, the characteristics of cliff is more straight, there is lower cost and bigger power plus continuous wave laser so that Ceramic manufacturing
Accuracy and speed be all improved, not only saved cost but also improved efficiency.
Brief description of the drawings
Fig. 1 is the schematic diagram for the device for carrying out Ceramic manufacturing in the present invention using jointed fiber laser；
Fig. 2 is modulating pulse wave shape schematic diagram in the present invention.
Embodiment
In order to more clearly state the present invention, the present invention is further described below in conjunction with the accompanying drawings.
Refer to Fig. 1-2, the device provided by the invention that Ceramic manufacturing is carried out using jointed fiber laser, including continuous light
Fibre laser 101, optical-fiber laser collimater 102, spatial light modulator 103, light focalizer 105, for placing ceramic substrate
Workbench 107 and XY axles mobile station 106；The jointed fiber laser, optical-fiber laser collimater, spatial light modulator and light gather
Burnt device three, which is sequentially connected, to be connect, and the workbench is located at the underface of light focalizer, and the upper surface of ceramic substrate is arranged at light and gathered
The focal position of burnt device, the workbench are fixed in XY axle mobile stations, and the XY axles mobile station drives work stage to do position shifting
The movement of dynamic or track；The optical rotator 108 waved to light is installed in the smooth focalizer；XY axle mobile stations, use
Movement between Kong Yukong is realized, and track movement during line.
The light beam for the continuous diffusion that the jointed fiber laser is sent becomes parallel after optical-fiber laser collimater
Light, then it is changed into the variable pulsed light 201 of waveform via continuous light after spatial light modulator；Pulsed light is gathered by light light focalizer
Jiao is on the ceramic substrate of work stage；The optical rotator being integrated with light focalizer is then by slight and continuous 360
Degree waves so that the focal beam spot on ceramic substrate forms 360 degree of circular trace on a ceramic substrate；Laser is walking track
The micropore of circle is processed in engineering；The XY axles mobile station for carrying workpiece then is completed to move ceramic substrate after capillary processing at one
Move next place and carry out another time processing, or different tracks is walked out by XY axle moving belts part of starting building, laser is in ceramic substrate
On realize line of different shapes.
In the present embodiment, the optical rotator is made up of speculum and three piezoelectric ceramics；Speculum is fixed on three
On piezoelectric ceramics, and three piezoelectric ceramics are placed for 120 degree of distributions behind in speculum；Every piezoelectric ceramics difference one is variable
Voltage band.The smooth focalizer is telecentric lens, is installed on the light direction of speculum.The spatial light modulator is built-in to be controlled
Device and pulse-pattern generator, pass through after pulse voltage wave shaping caused by pulse-pattern generator and adjusted by controller driving spatial light
Device processed is modulated to light.The jointed fiber laser is the infrared jointed fiber laser of single mode, and the work stage is upper
Side is equipped with the high-speed compressed air for blowing to micropore and position of ruling.
To realize above-mentioned purpose, the present invention also provides a kind of method that Ceramic manufacturing is carried out using jointed fiber laser,
The light beam for the continuous diffusion that jointed fiber laser is sent becomes directional light after optical-fiber laser collimater, then via space
Continuous light is changed into the variable pulsed light of waveform after optical modulator；Pulsed light is focused it onto positioned at work stage by light light focalizer
On ceramic substrate；The optical rotator being integrated with light focalizer is then by slight and continuous 360 degree are waved so that ceramic base
Focal beam spot on piece forms 360 degree of circular trace on a ceramic substrate；Laser processes circle in the engineering for walk track
Micropore；The XY axles mobile station for carrying workpiece then completes that ceramic substrate is moved into next place's progress separately after capillary processing at one
Time processing, or different tracks is walked out by XY axle moving belts part of starting building, laser is realized of different shapes on a ceramic substrate
Line.
In the present embodiment, the method for the spatial light modulator modulation light is：Used pulse voltage waveform, for just
Normal impulse waveform is adjusted to flank by shaping and remains former high, and middle part is eased up drastically to decline, and rear portion maintains to decline
The shape of normal termination when height and pulse afterwards stops；The light pulse that the shape modulation comes out has smaller focus light
Spot.Light pulse wavefront end 202 after the adjustment is apparently higher than light pulse ripple rear end 203, therebetween to become after dramatic decrease
In gentle.The voltage wave that its controller is sent is applied on its internal grating by spatial light modulator, passes through grating
Continuous Light Modulation into pulsed light wave, light wave of different shapes is modulated by different voltage waves by optical gate effect.Controller
Required voltage wave is occurred by waveform and reshaper produces.Waveform occurs and reshaper is responsible for producing impulse waveform and changed
Into required shape.
In the present embodiment, the continuous swing of the piezoelectric ceramics of the optical rotator, is on be added in piezoelectric ceramics
Voltage is continuous sine wave, and the voltage-phase of three piezoelectric ceramics is different, 120 degree of differing distribution；So that it is fixed on piezoelectricity
Reflecting optics on ceramics continuously wave with the up and down motion of three piezoelectric ceramics, and laser beam passes through the speculum waved
Circular motion is made after reflection, the amplitude that track diameter is moved up and down by piezoelectric ceramics determines.
Compared to the situation of prior art, it is provided by the invention using jointed fiber laser carry out Ceramic manufacturing device and
Its method, the device include jointed fiber laser, optical-fiber laser collimater, spatial light modulator, light focalizer, workbench and
XY axle mobile stations, method are that the continuous light for sending continuous wave laser becomes pulsed light, and adjustment space light after ovennodulation
The shape of pulsed light caused by modulator, the Energy distribution of light pulse is set to be more suitable for the micro hole drilling of ceramic substrate and micro-
Thin line.The micropore and micro-line that light pulse after being adjusted processes on a ceramic substrate have smaller, and cliff is more
The characteristics of straight, there is lower cost and bigger power plus continuous wave laser so that the accuracy and speed of Ceramic manufacturing
All it is improved, has not only saved cost but also improved efficiency.
To realize 100 microns of capillary processing and the processing of 30 microns of micro-line, while solve to melt residue excessively and remain
The problem of, present invention uses the method for the pulse modulation technique of adjustable waveform, it is characterised in that continuous light 200 is modulated into tool
There are the pulsed light of " spike-abrupt slope-buffering " shape, so shaped pulsed light wave, its range of energy distribution is in a pulse
In cycle, the process of energy experience " highest-plunge-gentle ", it is then high-energy to act on the other effect of ceramic substrate time-division
The part high-temperature digestion that will rapidly drill of part, the energy of dramatic decrease allow the part melted temperature rapidly
Decline to a certain extent, follow-up gentle process is then to maintain the regular hour, waits that the high-speed compressed air for blowing to the position will
Blown down from original position the part of dissolving.
As the optimal case of the above method, can be processed on the ceramic substrate of 0.5 millimeters thick less than 100 microns
The ratio between circular micropore, upper and lower surface Circularhole diameter can reach more than 90%.Otch residue residual greatly reduces simultaneously.To take into account
The perpendicularity of micropore, the length of process time, modulation waveform can be adjusted and be shaped such that the distribution of optical pulse energy can be simultaneous
Gu Weikong perpendicularity can also accelerate the time of processing simultaneously within the specific limits.
Disclosed above is only several specific embodiments of the present invention, but the present invention is not limited to this, any ability
What the technical staff in domain can think change should all fall into protection scope of the present invention.
Claims (9)
1. a kind of device that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that including jointed fiber laser, light
Fine laser aligner, spatial light modulator, light focalizer, the workbench for placing ceramic substrate and XY axle mobile stations；It is described
Jointed fiber laser, optical-fiber laser collimater, spatial light modulator and light focalizer three are sequentially connected and connect, the workbench
Positioned at the underface of light focalizer, the upper surface of ceramic substrate is arranged at the focal position of light focalizer, and the workbench is fixed
In XY axle mobile stations, the XY axles mobile station drives work stage to do position movement or track movement；In the smooth focalizer
The optical rotator waved to light is installed；
The light beam for the continuous diffusion that the jointed fiber laser is sent becomes directional light after optical-fiber laser collimater, then
It is changed into the variable pulsed light of waveform via continuous light after spatial light modulator；Pulsed light is focused it onto by light light focalizer to be located at
On the ceramic substrate of work stage；The optical rotator being integrated with light focalizer makes then by slight and continuous 360 degree are waved
Obtain the circular trace that the focal beam spot on ceramic substrate forms 360 degree on a ceramic substrate；Laser adds in the engineering for walk track
Work goes out the micropore of circle；Ceramic substrate is then moved to next by the XY axles mobile station of carrying workpiece after capillary processing at completion one
Place carries out another time processing, or walks out different tracks by XY axle moving belts part of starting building, and laser is realized not on a ceramic substrate
The line of similar shape.
2. the device according to claim 1 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the light
Circulator is made up of speculum and three piezoelectric ceramics；Speculum is fixed on three piezoelectric ceramics, and three piezoelectric ceramics exist
Speculum is placed for 120 degree of distributions behind；Every piezoelectric ceramics distinguishes a variable voltage band.
3. the device according to claim 2 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the light
Focalizer is telecentric lens, is installed on the light direction of speculum.
4. the device according to claim 1 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the sky
Between optical modulator built-in controller and pulse-pattern generator, after pulse voltage wave shaping caused by pulse-pattern generator pass through by
Controller driving spatial light modulator is modulated to light.
5. the device according to claim 1 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the company
Continuous optical fiber laser is the infrared jointed fiber laser of single mode, and is equipped with above the work stage and blows to micropore and line portion
The high-speed compressed air of position.
A kind of 6. method that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that jointed fiber laser is sent
The light beam continuously spread becomes directional light after optical-fiber laser collimater, then is changed into via continuous light after spatial light modulator
The variable pulsed light of waveform；Pulsed light is focused it onto on the ceramic substrate of work stage by light light focalizer；Focused on light
The optical rotator that device is integrated is then by slight and continuous 360 degree are waved so that the focal beam spot on ceramic substrate is being made pottery
360 degree of circular trace is formed on ceramic chip；Laser processes the micropore of circle in the engineering for walk track；Carry the XY of workpiece
Axle mobile station then completes that ceramic substrate is moved into the another time processing of next place's progress after capillary processing at one, or by XY axles
Moving belt part of starting building walks out different tracks, and laser realizes line of different shapes on a ceramic substrate.
7. the method according to claim 6 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the sky
Between the method for light modulator modulates light be：Used pulse voltage waveform, it is adjusted to for normal impulse waveform by shaping
Flank remains former high, and middle part is eased up drastically to decline, and the height and pulse after the maintenance decline of rear portion are normal when stopping
The shape of termination；The light pulse that the shape modulation comes out has smaller focus spot.
8. the device according to claim 1 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the tune
Light pulse wavefront end after whole is apparently higher than rear end, therebetween to be tended towards stability after dramatic decrease.
9. the method according to claim 6 that Ceramic manufacturing is carried out using jointed fiber laser, it is characterised in that the light
The continuous swing of the piezoelectric ceramics of circulator, it is continuous sine wave to be the voltage on be added in piezoelectric ceramics, and three are pressed
The voltage-phase of electroceramics is different, 120 degree of differing distribution；So that the reflecting optics being fixed on piezoelectric ceramics are with three piezoelectricity
Ceramics up and down motion and continuously wave, laser beam through waving speculum reflection after make circular motion, track
The amplitude that diameter is moved up and down by piezoelectric ceramics determines.
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| CN108515270A (en) * | 2018-03-13 | 2018-09-11 | 武汉吉事达科技股份有限公司 | A kind of process of ceramic material laser scribing |
| CN110076450A (en) * | 2019-05-10 | 2019-08-02 | 华中科技大学 | Double light beam laser processing optical system |
| CN110836869A (en) * | 2018-08-17 | 2020-02-25 | 中国科学院西安光学精密机械研究所 | All-fiber high-speed optical coherence tomography scanning device |
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| CN108515270A (en) * | 2018-03-13 | 2018-09-11 | 武汉吉事达科技股份有限公司 | A kind of process of ceramic material laser scribing |
| CN110836869A (en) * | 2018-08-17 | 2020-02-25 | 中国科学院西安光学精密机械研究所 | All-fiber high-speed optical coherence tomography scanning device |
| CN110076450A (en) * | 2019-05-10 | 2019-08-02 | 华中科技大学 | Double light beam laser processing optical system |
| CN112872594A (en) * | 2020-12-25 | 2021-06-01 | 武汉理工大学 | Surface treatment method for preparing deep sea anticorrosive material at high speed by femtosecond laser |
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