CN107695529B - A kind of method and apparatus for making deep trouth on aluminium alloy using laser - Google Patents

A kind of method and apparatus for making deep trouth on aluminium alloy using laser Download PDF

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Publication number
CN107695529B
CN107695529B CN201710882237.0A CN201710882237A CN107695529B CN 107695529 B CN107695529 B CN 107695529B CN 201710882237 A CN201710882237 A CN 201710882237A CN 107695529 B CN107695529 B CN 107695529B
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laser
deep trouth
side wall
engraving
depth
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CN107695529A (en
Inventor
王艺
范醉风
向军
洪剑锋
吕春林
温延台
陈克胜
吴烈
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

Abstract

Embodiment of the present invention is related to field of laser processing, discloses a kind of method for making deep trouth on aluminium alloy using laser, comprising: gets the first depth value by the thickness of measurement assembling object;Waist beam is carried out to the first laser beam of laser transmitting to expand to form second laser beam, then the second laser beam is focused, the second laser beam hot spot after focusing is made to be greater than the depth of focus of the first laser beam less than the hot spot and depth of focus length of the first laser beam;Laser engraving depth is the deep trouth of first depth value on the aluminium alloy, wherein the deep trouth is that layering is carved at least twice;Laser reconditioning all is carried out to the side wall of the deep trouth after each engraving, so that the angle of the deep trouth side wall and the aluminum alloy surface tends to right angle.By the above-mentioned means, embodiment of the present invention can substantially increase speed and efficiency than existing engraving process.

Description

A kind of method and apparatus for making deep trouth on aluminium alloy using laser
Technical field
Embodiment of the present invention is related to field of laser processing, and deep trouth is made on aluminium alloy using laser more particularly to a kind of Method and apparatus.
Background technique
As the competition of consumer electronics market is more and more fierce, each manufacturer is to the appearance of electronic product, light degree, durable etc. It is required that higher and higher.And light aluminum alloy materials become the optimal selection of electronic product casing instantly.Production firm will be LOGO is on aluminum alloy casing and usually has several ways, inlays LOGO etc. after silk-screen, laser surface mark, laser carving deeply.And The effect that LOGO is inlayed after laser carving deeply has more three-dimensional sense, and LOGO material is alternative more, some high-end electronic product warps It often will use this mode.
And inlayed after laser deeply carving in LOGO application, within the edge technical requirements LOGO right angle is less than 98 degree, Cai Nengda To LOGO and right angle perfect combination, assembling interference will be will cause greater than 98 degree, be unable to satisfy the requirement of this technique.Existing laser exists The technique that depth is beaten on aluminium alloy is the labeled slots that depth is directly carved out using traditional equipment.Due to laser beam The characteristic of focusing is can not to undercut edge right angle close to 90 degree of LOGO slot, and can bore with the difference of font position The direction of degree also can be different, are with the different and changed of laser light incident angle, and taper can increase with the increase of depth, The to sum up interference of factor cannot realize this technique very well.
Summary of the invention
Embodiment of the present invention a kind of makes deep trouth using laser mainly solving the technical problems that providing on aluminium alloy Method is able to solve the problem of can not undercuting edge right angle close to 90 degree of deep trouths.
In order to solve the above technical problems, the technical solution that embodiment of the present invention uses is: providing a kind of using sharp The method that light makes deep trouth on aluminium alloy, comprising: the first depth value is got by the thickness of measurement assembling object;Laser is sent out The first laser beam penetrated carries out waist beam and expands to form second laser beam, is then focused the second laser beam, makes to focus The second laser beam hot spot afterwards is less than the hot spot of the first laser beam and depth of focus length is greater than the first laser beam Depth of focus length;On the aluminium alloy laser engraving depth be first depth value deep trouth, wherein the deep trouth be to Few two secondary clearings are carved;Laser reconditioning all is carried out to the side wall of the deep trouth after each engraving, so that the deep trouth The angle of side wall and the aluminum alloy surface tends to right angle.
Preferably, laser reconditioning all is carried out to the side wall of the deep trouth after each engraving, so that the deep trouth side wall It include: to obtain the depth after carrying out laser depth engraving every time with the particular content that the angle of the aluminum alloy surface tends to right angle Angle of the groove sidewall relative to the aluminum alloy surface;Measure the depth value of presently described deep trouth;Calculate the deep groove side The back gauge on wall bottom edge;The laser engraving parameter is adjusted according to the back gauge, so that the second laser beam is accurately from described The lowermost end of deep trouth side wall starts finishing engraving.
Preferably, the particular content of the back gauge for calculating deep trouth side wall bottom edge include: according to calculation formula into Row calculates every time to the back gauge on deep trouth side wall bottom edge after deep trouth depth engraving, calculation formula are as follows: L=tana*h, In, L is the back gauge, and h is the depth value of current deep trouth, and a is that the deep trouth side wall is opposite after each laser carries out depth engraving In the angle of the aluminum alloy surface.
Preferably, after the step of thickness by measurement assembling object gets the first depth value, the method is also It include: the designated position for getting the deep trouth to be carved;According to the designated position, the route of laser irradiation is cooked up.
Preferably, the method also includes: burr is removed to the bottom of the deep trouth.
Preferably, processing is focused to the laser beam using the focus lamp of 254 camera lenses;The laser is infrared sharp Light device.
In order to solve the above technical problems, another technical solution that embodiment of the present invention uses is: providing a kind of utilization The equipment that laser makes deep trouth on aluminium alloy, comprising: laser, beam expanding lens, galvanometer system, focus lamp, control system and work Make platform;The control system includes control module, acquisition module, planning module and computing module, and the control module is used for It controls the laser engraving and controls the galvanometer system, the acquisition module is used for collecting data information, the planning mould Block is for planning that laser beam transmission route, the computing module are used to calculate the back gauge on deep trouth side wall bottom edge.
Preferably, the control module is all connected with the laser and galvanometer system, the acquisition module and the rule Draw module connection.
Preferably, the focus lamp uses 254 camera lenses;The laser is infrared laser.
The beneficial effect of embodiment of the present invention is: being in contrast to the prior art, embodiment of the present invention provides one The method that kind makes deep trouth using laser on aluminium alloy expands the processing of waist beam by carrying out laser beam, then by the laser Beam is focused into depth of focus length and the small laser of hot spot, and hot spot is small to increase laser beam energy density, while in aluminum alloy surface Repeatedly layering engraving forms a complete deep trouth, all carries out deep trouth side wall finishing after each engraving, makes deep trouth side wall and aluminium The angle of alloy surface tends to right angle, and this angle, which can be very good that object will be assembled, to be mounted in deep trouth, this engraving deep trouth Method substantially increases speed and efficiency than existing engraving process.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these Attached drawing obtains other attached drawings.
Fig. 1 is the flow chart for the method for making deep trouth on aluminium alloy using laser that the embodiment of the present invention one provides;
Fig. 2 is that deep trouth side wall is modified in the method for making deep trouth on aluminium alloy using laser of the offer of the embodiment of the present invention one Flow chart;
Fig. 3 is the flow chart of the method provided by Embodiment 2 of the present invention for making deep trouth on aluminium alloy using laser;
Fig. 4 is the flow chart for the method for making deep trouth on aluminium alloy using laser that the embodiment of the present invention three provides;
Fig. 5 is the schematic diagram provided by the invention for beating deep tank apparatus on aluminium alloy using laser.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
It should be noted that each feature in the embodiment of the present invention can be combined with each other, in this hair if do not conflicted Within bright protection scope.In addition, though having carried out functional module division in schematic device, shows patrol in flow charts Sequence is collected, but in some cases, it can be shown in the sequence execution in the module division being different from device or flow chart The step of out or describing.
Refering to fig. 1, Fig. 1 is the process for the method for making deep trouth on aluminium alloy using laser that the embodiment of the present invention one provides Figure, the method for making deep trouth on aluminium alloy using laser that embodiment of the present invention provides, comprising:
11: the first depth value is got by the thickness of measurement assembling object;
The deep trouth carved in the embodiment of the present invention is in order to inlay assembling object, so the depth of deep trouth is wanted to assemble In object is embedded in, first depth value is exactly the thickness for assembling the thickness of object or being slightly less than assembling object, for example, it is desired in aluminium Some logo is inlayed on alloy, then needs first to measure the thickness of this logo, can accommodate this logo further according to this thickness engraving Deep trouth, the depth of deep trouth can be slightly less than the thickness of this logo, and such logo can protrude from deep trouth so more after inlaying Add beauty, it should be noted that first depth value is depth of the aluminum alloy surface to deep trouth bottommost.
12: waist beam being carried out to the first laser beam of laser transmitting and expands to form second laser beam, then by described second Laser beam is focused, and the second laser beam hot spot after making focusing is less than the hot spot of the first laser beam and depth of focus is long Degree is greater than the depth of focus length of the first laser beam;
In embodiments of the present invention, the focus lamp of use is the focus lamp of 254 camera lenses, and this focus lamp can make after focusing Laser depth of focus is long, and depth carve when can make deep trouth side wall and aluminum alloy surface angle compared with the angle that other focus lamps generate Spend it is small, due to this camera lens generate hot spot it is larger because the characteristic of focus lamp is focal beam spot diameter and launching spot diameter It is inversely proportional, so being cooperated therewith using beam expanding lens, is expanded light beam using beam expanding lens, focus lamp can just make light beam The very little that focuses of hot spot, the energy density of such hot spot will be very big.
13: on the aluminium alloy laser engraving depth be first depth value deep trouth, wherein the deep trouth be to Few two secondary clearings are carved;
14: laser reconditioning all being carried out to the side wall of the deep trouth after each engraving, so that the deep trouth side wall and institute The angle for stating aluminum alloy surface tends to right angle;
It is not disposably to carve to complete to deep trouth using laser engraving deep trouth, and is divided into and is repeatedly carved, and Be that every engraving once repairs the side wall of a deep trouth, for example, can first to deep trouth carry out the depth of the first depth value of half into Row engraving, then finishing deep trouth side wall is carried out, the depth for then carrying out the first depth value of remaining half is carved, then is carried out Modify deep trouth side wall;Or the first depth value can also be divided into and deep trouth being carved three times, and every engraving is once to deep trouth Side wall finishing it is primary.
Since it is desired that the deep trouth of engraving is not one but multiple, in this case, aluminium alloy can be preferably controlled The consistency of depth between upper slot and slot, since aluminum alloy materials are heated effects, if directly carved deep trouth complete Depth, aluminum alloy materials are in heating status, and the temperature raising of aluminum alloy materials can also change to the absorptivity of laser, this When carve second deep trouth again, deep trouth is inevitable inconsistent with the depth of deep trouth before.And a slot is divided into repeatedly This mode of engraving can be avoided heat from excessively concentrating, reached energy absorption by thermal balance by be allowed aluminium alloy with rapid dispersion energy It is balanced.
Since the side wall of the deep trouth using laser engraving and the angle of aluminum alloy surface are larger, it is complete object can not will to be assembled in this way Whole is mounted in deep trouth, so also needing to modify the side wall of deep trouth, it is generally the case that in deep trouth side wall and aluminium alloy When the angle on surface is between 90 degree to 98 degree, assembling object can be made to realize that perfection is bonded with deep trouth, reach and most preferably inlay.In reality It applies in example, to the finishing of deep trouth side wall nor disposable finishing is complete, and is divided into multiple finishing, so when carrying out repairing side wall The laser of very strong energy is not needed, finishing side wall in this way would not cause corner burr very serious, while the place of deburring in this way Residual miscellaneous accumulation is not had, and shading can be more smooth, improves work efficiency simultaneously;If disposable after deep trouth has all been carved Side wall is modified, since the deep trouth side wall for needing to modify is more, it is necessary to which the stronger laser of energy, laser energy is too strong to will lead to side There is very deep very serious burr in angle, carries out the depth and the first depth value deviation that can make deep trouth when deburring to shading again in this way It is larger, cause deep trouth engraving failure.
In embodiments of the present invention, by by laser beam carry out expand waist beam processing, then by the laser beam focus at Depth of focus length and the small laser of hot spot, hot spot is small to increase laser beam energy density, while being repeatedly layered in aluminum alloy surface Engraving forms a complete deep trouth, all carries out deep trouth side wall finishing after each engraving, makes deep trouth side wall and aluminum alloy surface Angle tend to right angle, this angle, which can be very good that object will be assembled, to be mounted in deep trouth, and the method for this engraving deep trouth is than existing Some engraving processes substantially increase speed and efficiency.
Referring to Fig. 2, Fig. 2 be the embodiment of the present invention one provide the method for making deep trouth on aluminium alloy using laser in repair The flow chart of whole deep trouth side wall, step 14 include:
141: obtaining angle of the deep trouth side wall relative to the aluminum alloy surface after carrying out laser depth engraving every time;
142: measuring the depth value of presently described deep trouth;
143: calculating the back gauge on deep trouth side wall bottom edge;
144: the laser engraving parameter being adjusted according to the back gauge, so that the second laser beam is accurately to the depth The lowermost end of groove sidewall starts engraving finishing;
Calculate according to calculation formula the back gauge on deep trouth side wall bottom edge after engraving every time, calculation formula are as follows:
L=tana*h, wherein L is the back gauge, and h is the depth value of current deep trouth, and a is that each laser carries out depth carving Angle of the deep trouth side wall relative to the aluminum alloy surface after quarter.
It should be noted that this formula is got according to the formula proving of trigonometric function.
Because the parameter being arranged when laser carries out depth engraving is to be not suitable for set the parameter that deep trouth side wall is modified It sets, so can determine the position that laser will modify side wall, that is, institute by the back gauge for calculating deep trouth side wall bottom edge The position of deep trouth side wall least significant end is stated, the parameter of laser engraving is then adjusted, makes the second laser beam accurately from the depth The lowermost end of groove sidewall starts finishing engraving, without making laser irradiation cause failure in the other positions of deep trouth.And to deep trouth The range of side wall finishing does not limit, as long as the angle of deep trouth side wall and aluminum alloy surface is made to tend to right angle.
In embodiments of the present invention, by calculating the back gauge on current deep trouth side wall bottom edge, the laser can be determined to institute The position that deep trouth side wall carries out finishing engraving is stated, can prevent cause error because parameter is not applicable in this way.
Referring to Fig. 3, Fig. 3 is the stream of the method provided by Embodiment 2 of the present invention for making deep trouth on aluminium alloy using laser Cheng Tu, wherein the step 11- step 14 of step 11- step 14 and embodiment one kind is identical, is no longer repeated one by one herein.Into One step, after step 11 the method also includes:
15: getting the designated position of the deep trouth to be carved;
The designated position for first getting deep trouth is to prevent during laser engraving accidentally to other portions of aluminium alloy Position is destroyed.
16: according to the designated position, cooking up the route of laser irradiation;
The route is route of the laser to laser beam irradiation between the deep trouth for needing to carve.
In embodiments of the present invention, pass through the road of laser beam irradiation between the position and laser of the deep trouth carved to needs Line, which carries out planning, can quickly make laser direct irradiation on the position for the deep trouth for needing to carve, and can also prevent laser from shining The destruction that deviation causes aluminium alloy is penetrated, not only improved work efficiency but also reduced error.
Referring to Fig. 4, Fig. 4 is the stream for the method for making deep trouth on aluminium alloy using laser that the embodiment of the present invention three provides Cheng Tu, wherein the step 11- step 16 of step 11- step 16 and embodiment one kind is identical, is no longer repeated one by one herein.Into One step, the method also includes:
17: burr is removed to the bottom of the deep trouth;
The bottom of the deep trouth of engraving can generate burr, and out-of-flatness goes flash removed that can guarantee that deep trouth bottom is smooth.
Referring to Fig. 5, Fig. 5 is the schematic diagram provided by the invention for beating deep tank apparatus on aluminium alloy using laser, utilize The equipment that laser makes deep trouth on aluminium alloy includes: laser 1, for providing light source for laser processing of materials;Beam expanding lens 2 is used Expand in the light that issues laser source, improves the transmission characteristic of laser so that it preferably converges to laser on material, expand It is 1-8 times adjustable that mirror, which expands multiple,;Galvanometer system 3, including X galvanometer and Y galvanometer, by scan module and optical reflecting lens group It closes, specifies laser according to control software is given for carrying out gauche form movement using scan module drive optical mirror slip Position carries out telltale mark;Focus lamp 4, for making laser facula consistency of the laser beam in each flat focus to point;Control System (not shown) processed, the control system include control module, acquisition module, planning module and computing module, the control For module for controlling the laser engraving and controlling the galvanometer system, the acquisition module is used for collecting data information, institute Planning module is stated for planning that laser beam transmission route, the computing module are used to calculate the back gauge on deep trouth side wall bottom edge; Workbench 5 laser machines the place placed when mark for metal works.
The beam expander 2, galvanometer system 3 and focus lamp 4 are all set in swashing between the laser 1 and workbench 5 On propagation path of light;
The beam expanding lens 2 carries out the laser beam that the laser 1 emits to expand adjustment, and galvanometer system 3 carries out deflection fortune The laser beam after moving and expanding is reflected on the designated position for needing the aluminium alloy carved, and the laser beam is by poly- When burnt mirror 4, the laser beam is focused by the focus lamp 4 makes the hot spot of light beam become smaller.
The camera lens of focus lamp 4 is using 254 camera lenses, and the laser beam depth of focus after 245 lens focus is long, but 245 camera lenses Focal beam spot is larger, so in embodiments of the present invention, increasing beam expanding lens 2, to obtain smaller hot spot, increases laser beam Energy density.
Specifically, the control module of the control system is all connected with the laser and galvanometer system, it is described to adopt Collection module is connect with the planning module, and the computing module is connect with the control module;Acquisition module gets aluminium first Alloy surface needs to carve the designated position of deep trouth, and the designated position is sent to planning module, and planning module is to laser The distance between device and designated position carry out planning transmission route, the X galvanometer of control module galvanometer system and Y vibration after planning is good Mirror carries out polarization movement, so that laser beam can be irradiated to the designated position on aluminium alloy along the route of planning, due to this hair Bright embodiment is needed to the mode modified to deep trouth side wall has been carved every time, so computing module is needed to deep trouth side wall bottom The back gauge on side is calculated, and the parameter of readjustment laser engraving after the back gauge on deep trouth side wall bottom edge is obtained, so that described swash Light accurately carries out finishing engraving to the deep trouth side wall.
Wherein, laser 1 is infrared optical fiber laser, impulse wave a length of 1055nm-1075nm, pulsewidth 100- 140ns, mean power 50W, and infrared laser absorbs more preferably metal material, and processing efficiency is higher.
X galvanometer and Y galvanometer are all made of the digital galvanometer of l i ght i ng II 14mm of CTI, and such galvanometer precision is high, 160 ranges for multiplying 160mm are made a call under 254 camera lenses, DA change-over panel is 24 resolution ratio, and 24 resolution ratio is 9.5nm, and general General galvanometer DA change-over panel is 16 resolution ratio, and with making a call to 160 ranges for multiplying 160 under 254 camera lenses, its resolution ratio is 2.38um, 24 galvanometer precision are high it is obvious that more difficult compared with general galvanometer the problems such as mark line segment dislocation occur, then In addition humidity drift is small, the repeatable accuracy and positioning accuracy of galvanometer more can guarantee.
In embodiments of the present invention, by by laser beam carry out expand waist beam processing, then by the laser beam focus at Depth of focus length and the small laser of hot spot, hot spot is small to increase laser beam energy density, while being repeatedly layered in aluminum alloy surface Engraving forms a complete deep trouth, all carries out deep trouth side wall finishing after each engraving, makes deep trouth side wall and aluminum alloy surface Angle tend to right angle, this angle, which can be very good that object will be assembled, to be mounted in deep trouth, and the method for this engraving deep trouth is than existing Some engraving processes substantially increase speed and efficiency.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other Technical field is included within the scope of the present invention.

Claims (8)

1. a kind of method for making deep trouth on aluminium alloy using laser characterized by comprising
The first depth value is got by the thickness of measurement assembling object;
To laser transmitting first laser beam carry out waist beam expand to form second laser beam, then by the second laser beam into Line focusing makes the second laser beam hot spot after focusing be greater than institute less than the hot spot and depth of focus length of the first laser beam State the depth of focus length of first laser beam;
Laser engraving depth is the deep trouth of first depth value on the aluminium alloy, wherein the deep trouth is at least twice Layering is carved;
Laser reconditioning all is carried out to the side wall of the deep trouth after each engraving, so that the deep trouth side wall and the aluminium alloy The angle on surface tends to right angle;
Laser reconditioning all is carried out to the side wall of the deep trouth after each engraving, so that the deep trouth side wall and the aluminium alloy The particular content that the angle on surface tends to right angle includes:
Angle of the deep trouth side wall relative to the aluminum alloy surface is obtained after carrying out laser depth engraving every time;
Measure the depth value of presently described deep trouth;
Calculate the back gauge on deep trouth side wall bottom edge;
The laser engraving parameter is adjusted according to the back gauge, so that the second laser beam is accurately from the deep trouth side wall Lowermost end starts engraving finishing.
2. the method according to claim 1, wherein the tool of the back gauge for calculating deep trouth side wall bottom edge Hold in vivo and includes:
It is calculated every time according to calculation formula to the back gauge on deep trouth side wall bottom edge after deep trouth depth engraving, is calculated public Formula are as follows:
L=tana*h, wherein L is the back gauge, and h is the depth value of current deep trouth, and a is after each laser carries out depth engraving Angle of the deep trouth side wall relative to the aluminum alloy surface.
3. according to the method described in claim 2, it is characterized in that, the thickness by measurement assembling object gets first deeply After the step of angle value, the method also includes:
Get the designated position of the deep trouth to be carved;
According to the designated position, the route of laser irradiation is cooked up.
4. according to the method described in claim 3, it is characterized in that, the method also includes:
Burr is removed to the bottom of the deep trouth.
5. the method according to claim 1, wherein
Processing is focused to the laser beam using the focus lamp of 254 camera lenses;
The laser is infrared laser.
6. a kind of swashed with corresponding utilize of the method for deep trouth of being beaten on aluminium alloy using laser of claim 1-5 any one The equipment that light makes deep trouth on aluminium alloy characterized by comprising laser, beam expanding lens, galvanometer system, focus lamp, control system System and workbench;
The control system includes control module, acquisition module, planning module and computing module, and the control module is for controlling The galvanometer system is carved and controlled to the laser, and the acquisition module is used for collecting data information, and the planning module is used In planning laser beam transmission route, the computing module is used to calculate the back gauge on deep trouth side wall bottom edge.
7. equipment according to claim 6, which is characterized in that
The control module is all connected with the laser and galvanometer system, and the acquisition module is connect with the planning module.
8. equipment according to claim 7, which is characterized in that
The focus lamp uses 254 camera lenses;
The laser is infrared laser.
CN201710882237.0A 2017-09-26 2017-09-26 A kind of method and apparatus for making deep trouth on aluminium alloy using laser Active CN107695529B (en)

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CN108672922B (en) * 2018-05-02 2024-03-19 海目星激光科技集团股份有限公司 Laser engraving device and method
CN108436276B (en) * 2018-06-25 2020-11-13 广东工业大学 Laser impact imprinting method and device

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JP2006269507A (en) * 2005-03-22 2006-10-05 Disco Abrasive Syst Ltd Groove formation method for forming groove on wafer by applying laser beams
CN104607808A (en) * 2014-12-11 2015-05-13 西北工业大学 Method for machining micro holes in ceramic matrix composite through femtosecond lasers
CN105458515A (en) * 2014-09-11 2016-04-06 大族激光科技产业集团股份有限公司 Sapphire laser grooving device and grooving method thereof

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Publication number Priority date Publication date Assignee Title
JP2000071086A (en) * 1998-08-31 2000-03-07 Yasuoka:Kk Method and device for shape processing by laser light
JP2006269507A (en) * 2005-03-22 2006-10-05 Disco Abrasive Syst Ltd Groove formation method for forming groove on wafer by applying laser beams
CN105458515A (en) * 2014-09-11 2016-04-06 大族激光科技产业集团股份有限公司 Sapphire laser grooving device and grooving method thereof
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