CN107675129A - For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method - Google Patents

For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method Download PDF

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Publication number
CN107675129A
CN107675129A CN201710886635.XA CN201710886635A CN107675129A CN 107675129 A CN107675129 A CN 107675129A CN 201710886635 A CN201710886635 A CN 201710886635A CN 107675129 A CN107675129 A CN 107675129A
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CN
China
Prior art keywords
component
functional layer
composite coating
transition zone
abrasion resistance
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Withdrawn
Application number
CN201710886635.XA
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Chinese (zh)
Inventor
周小玉
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Changzhou Fuliedeliding Automation Technology Co Ltd
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Changzhou Fuliedeliding Automation Technology Co Ltd
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Priority to CN201710886635.XA priority Critical patent/CN107675129A/en
Publication of CN107675129A publication Critical patent/CN107675129A/en
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses one kind to be used for component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method, and its composite coating includes transition zone and functional layer, and transition zone is prepared by chromium, titanium or nickel simple metal and between functional layer and workpiece surface.The preparation method of composite coating, is comprised the following steps that：1. workpiece it is cleaned and dry after, be placed in the vacuum chamber of non-balance magnetically controlled sputter filming equipment；2. vacuum pressure is set to 3 × 10 3Pa；Temperature is set to 200 DEG C ~ 500 DEG C and is incubated 30 minutes；Insulation carries out plasma clean to workpiece simultaneously；3. be passed through argon gas prepares transition zone using non-balance magnetically controlled sputter method；4. argon gas is used to be passed through nitrogen reacting gas as working gas and prepare functional layer；5. workpiece furnace cooling is within 100 DEG C, taking-up.The present invention uses composite material surface design method, using double-layer structure (transition zone, functional layer) come for improving component of machine surface property.

Description

For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method
Technical field
The present invention relates to it is a kind of apply the component of machine surface with wear-resisting, corrosion-resistant requirement composite coating and its Preparation method.Using the composite coating, can improve with steel, non-ferrous metal, cast iron etc. as the wear-resisting of the piece surface of material Damage, decay resistance.
Background technology
The parts formed with metal material processings such as steel, non-ferrous metal, cast irons, it is industrial equipment, instrument, mould Chief component.With economic development and the continuous progress of technology, to the surface property of various components of machine（It is especially resistance to Burn into abrasion resistance properties）It is required that also more and more higher.Hard chrome, Ni are traditionally coated with piece surface using electro-deposition method, or adopted Piece surface is handled with surface heat-treatment process, these method parts meet the performance requirement of part, but deposit Following the shortcomings that：
1. seriously polluted, the pollution especially caused by electrodeposition technology；
2. easily failed under severe service condition, such as in piston rod, piston ring part, under hard chromium high load condition easily Ftracture, come off.
3. complicated service condition can not be adapted to, such as：Under high temperature oxidizing conditions, high capacity, under the superposition occasion such as corrosion-resistant, pass The hard chrome of system is coated with, Surface heat-treatent can not often meet to require.
For these reasons, find that cost is relatively low, functional characteristics is prominent, strong adaptability and environment friendly and pollution-free surface treatment Method is always the striving direction of scientific research and industrial quarters.
The content of the invention
The defects of to overcome prior art, it is an object of the invention to provide one kind to utilize non-balance magnetically controlled sputter method, Preparation has corrosion-resistant, anti abrasive composite coating, for improving component of machine surface property.The present invention uses composite Surface design method, using double-layer structure（Transition zone, functional layer）To meet to use needs.
The present invention solves technical problem and adopted the following technical scheme that：
For component of machine surface abrasion resistance damage, corrosion resistant composite coating, the composite coating includes transition zone and work( Ergosphere, the transition zone is between the functional layer and component of machine surface.
The transition zone is by Cr（Chromium）、Ti（Titanium）Or Ni（Nickel）It is prepared by simple metal.The functional layer is carbide（MC）, nitrogen Compound（MN）Or carbonitride（MNC）, M therein is selected from Al（Aluminium）Or transition metal Ti（Titanium）、Zr（Zirconium）、Mo（Molybdenum）.
The thickness of the transition zone is between 0.5 μm ~ 5 μm.The thickness of the functional layer is between 0.5 μm ~ 10 μm.
Comprised the following steps that for component of machine surface abrasion resistance damage, the preparation method of corrosion resistant composite coating：
1. component of machine through deoiling, it is anti-dandruff after, after ultrasonic wave cleans and dries, be placed in non-balance magnetically controlled sputter filming equipment Vacuum chamber in；
2. opening the vacuum system of non-balance magnetically controlled sputter equipment, the vacuum in vacuum chamber is extracted into 3 × 10-3Pa；By machinery zero Part is heated to 200 DEG C~500 DEG C and is incubated 30 minutes；In insulating process, while it is clear to carry out plasma to component of machine Wash；
3. use argon gas to prepare transition zone using non-balance magnetically controlled sputter method as working gas, according to workpiece military service feature, The thickness of transition zone is prepared between 0.5 μm ~ 5 μm；
4. argon gas is used to be passed through reacting gas as working gas and prepare functional layer, according to workpiece military service feature, the thickness of functional layer Degree is prepared between 0.5 μm ~ 10 μm；The reacting gas is nitrogen or acetylene；
5. component of machine furnace cooling is within 100 DEG C, taking-up.
Compared with the prior art, beneficial effects of the present invention are embodied in：
Nitride, carbide, carbonitride and the metallic substrates adhesion prepared due to physical vapour deposition (PVD) is poor, therefore considers to make Transition zone is used as by the use of the metallic film that good combination performance is respectively provided with component of machine metal material, functional layer film material. On the one hand transition zone can improve the overall combination with component of machine surface of film layer, on the other hand can also improve machinery zero The decay resistance of part.
The region of direct and external environment contact, performance requirement tend to be various when functional layer is on active service as component of machine Change.Therefore, with reference to the good mechanical property of magnesium-yttrium-transition metal compound and decay resistance, according to different use environments, use Carbide（MC）, nitride（MN）Or carbonitride（MNC）As film material.Here M is selected from Al（Aluminium）Or Cr（Chromium）、 Ti（Titanium）、Mo（Molybdenum）、Zr（Zirconium）Deng transition metal.
The preparation of composite coating of the present invention uses physical vapour deposition (PVD)（PVD）Non-balance magnetically controlled sputter method in technology. In preparation process, parts overall " immersing " are in plasma glow discharge region, it is possible to achieve to the plasma of parts Body cleans, and can improve the consistency of film.Further, since " low temperature ", " high speed " feature that magnetically controlled sputter method is intrinsic, this The involved composite coating of invention and preparation method do not interfere with the original mechanical property of parts itself.
Fig. 1 is the sectional structure chart of the present invention.
Label in figure：1 component of machine, 2 transition zones, 3 functional layers.
Below by way of embodiment, the invention will be further described.
With reference to Fig. 1, of the invention is used for component of machine surface abrasion resistance damage, corrosion resistant composite coating, and it includes transition Layer 2 and functional layer 3, the transition zone 2 are located between functional layer 3 and the surface of component of machine 1.
Embodiment 1：Substitute application of the electro-deposition hard chromium in hydraulic stem, hydraulic stem through deoiling, it is anti-dandruff after using super Sound wave cleaning device cleaned to hydraulic stem, dry after, be placed on the work rest in non-balance magnetically controlled sputter vacuum installation → vacuum system works and will be extracted into 3 × 10 in vacuum chamber body-3Pa → hydraulic pressure rod member is heated to 200 DEG C and is incubated 0.5 small When, argon gas is cleaned → be passed through to insulation using plasma clean is further to rod member simultaneously, and vacuum chamber pressure regulation to 0.5 ~ 1Pa, utilize unbalanced magnetron sputtering（Use Cr（Chromium）As target）Deposit Cr（Chromium）1 μm of film → be passed through nitrogen and argon gas, Vacuum chamber pressure keeps constant, using non-balance magnetically controlled sputter, in Ar：N2=2：About 6 μm of CrN films → stopping is coated with the conditions of 1 Plated film, by the furnace cooling of hydraulic pressure rod member within 100 DEG C, take out.Wherein Cr（Chromium）Film is transition zone, CrN（Chromium nitride）It is thin Film is functional layer.
Embodiment 2：Surface heat treatment technics is substituted in diel（Drift）In application：Drift through deoiling, it is anti-dandruff after After drift is cleaned using ultrasonic cleaning equipment, drying, the workpiece that is placed in non-balance magnetically controlled sputter vacuum installation On frame → vacuum system work and 3 × 10 will be extracted into vacuum chamber body-3Pa → drift is heated to 200 DEG C and is incubated 0.5 small When, argon gas is cleaned → be passed through to insulation using plasma clean is further to drift simultaneously, and vacuum chamber pressure regulation to 0.5 ~ 1Pa, Cr is deposited using unbalanced magnetron sputtering（Chromium）0.5 μm of film → be passed through nitrogen and argon gas, vacuum chamber pressure keeps constant, Utilize non-balance magnetically controlled sputter（Using Al and Cr targets）, in Ar：N2=2：About 4 μm of AlCrN films → stopping is coated with the conditions of 1 Plated film, by drift furnace cooling within 100 DEG C, take out.Wherein Cr（Chromium）Film is transition zone, AlCrN（Aluminium nitride chromium）It is thin Film is functional layer.

Claims (6)

1. for component of machine surface abrasion resistance damage, corrosion resistant composite coating, it is characterised in that the composite coating included Layer and functional layer are crossed, the transition zone is between the functional layer and component of machine surface.
2. according to claim 1 be used for component of machine surface abrasion resistance damage, corrosion resistant composite coating, it is characterised in that The transition zone is prepared by chromium, titanium or nickel simple metal.
3. according to claim 1 be used for component of machine surface abrasion resistance damage, corrosion resistant composite coating, it is characterised in that The functional layer is that carbide MC, nitride MN or carbonitride MNC, M therein are selected from aluminium or transition metals Ti, zirconium, molybdenum.
4. according to claim 2 be used for component of machine surface abrasion resistance damage, corrosion resistant composite coating, it is characterised in that The thickness of the transition zone is between 0.5 μm ~ 5 μm.
5. according to claim 3 be used for component of machine surface abrasion resistance damage, corrosion resistant composite coating, it is characterised in that The thickness of the functional layer is between 0.5 μm ~ 10 μm.
6. the component of machine surface abrasion resistance that is used in a kind of claim 1-6 described in any claim damages, is corrosion resistant multiple Close the preparation method of coating, it is characterised in that comprise the following steps that：
1. component of machine through deoiling, it is anti-dandruff after, after ultrasonic wave cleans and dries, be placed in non-balance magnetically controlled sputter plated film and set In standby vacuum chamber；
2. opening the vacuum system of non-balance magnetically controlled sputter equipment, the vacuum in vacuum chamber is extracted into 3 × 10-3Pa；By machinery zero Part is heated to 200 DEG C~500 DEG C and is incubated 30 minutes；In insulating process, while it is clear to carry out plasma to component of machine Wash；
3. argon gas is used to prepare transition zone as working gas using non-balance magnetically controlled sputter method, be on active service according to workpiece special Point, the thickness of transition zone are prepared between 0.5 μm ~ 5 μm；
4. using argon gas as working gas, it is passed through reacting gas and prepares functional layer, according to workpiece military service feature, functional layer Thickness is prepared between 0.5 μm ~ 10 μm；The reacting gas is nitrogen or acetylene；
5. component of machine furnace cooling is within 100 DEG C, taking-up.
CN201710886635.XA 2017-09-27 2017-09-27 For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method Withdrawn CN107675129A (en)

Priority Applications (1)

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CN201710886635.XA CN107675129A (en) 2017-09-27 2017-09-27 For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710886635.XA CN107675129A (en) 2017-09-27 2017-09-27 For component of machine surface abrasion resistance damage, corrosion resistant composite coating and preparation method

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CN107675129A true CN107675129A (en) 2018-02-09

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Country Status (1)

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Application publication date: 20180209

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