CN107623459B - Friction nanometer power generator frictional layer surface roughening agrees with the preparation method of structure - Google Patents
Friction nanometer power generator frictional layer surface roughening agrees with the preparation method of structure Download PDFInfo
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Abstract
The invention belongs to the microcosmic surface process fields of material, agree with structure and preparation method thereof for friction nanometer power generator friction material surface to be roughened more particularly to one kind, the method utilizes simple sand paper template, PDMS is spun to sand paper rough surface, is made after removing with the PDMS film with sand paper pattern complementary patterns surface；On the other hand the lesser copper film of thickness is directly deposited by the method for thermal evaporation plated film to coated abrasive surface, to prepare the shaggy copper friction material for being carved with sand paper pattern again.Using positive/negative electric two frictions layer material of friction nanometer power generator prepared by the present invention, there is the surface with sand paper pattern complementary patterns；The another surface with sand paper topographical pattern.Importantly, prepared by the template using same size, the size of surface topography pattern is nearly identical, and shape complementation can agree with completely, so that the real contact area in friction process is bigger.
Description
Technical field
The invention belongs to the microcosmic surface process fields of material, and in particular to friction nanometer power generator is thick with friction layer surface
Roughening agrees with the preparation method of structure.
Background technique
Friction nanometer power generator, due to light, low in cost, preparation process is simple, stability is good, energy conversion effect
The a series of advantage such as the service life of rate height and overlength, before power field and mobile electronic device have a wide range of applications
Scape.The working principle of friction nanometer power generator is based on triboelectrification and electrostatic induction, and wherein frictional layer is most important composition
Part mainly generates electrostatic charge using triboelectrification.For the layer material that rubs, the contact surface to rub every time is being separate
Afterwards, the quantity of electric charge and real contact area of unit area transfer, largely determines output voltage, the electricity of triboelectricity
The electric properties such as stream and power.
As mobile electronic device is towards the development of miniaturization, higher and higher to power requirement: energy density is higher,
Power-on time is longer.For friction nanometer power generator, it is necessary to which output power namely the unit area that it is significantly increased turn
The quantity of electric charge of shifting.The surface of friction material is roughened, the reality in friction process can be largely improved
Contact area, so that friction nanometer power generator unit area or unit bodies in the case where total area perhaps constancy of volume
Long-pending output power significantly improves, the final extensive use realized in power field and mobile electronic device field.
Currently, the optimization and modification of friction nanometer power generator, including the following aspects: first, surface roughening, that is, exist
Surface forms various patterns or the micro-nano structures such as triangular pyramidal, pyramid, bar shaped and cylinder；Second, improving unit plane
The quantity of electric charge of product transfer, including the superior friction material of frictional behaviour, surface injection charge, chemical treatment, introducing is selected to have
Ji Wu functional group；Thirdly, design special construction, including lattice structure, rotating circular disk structure and roller frame etc., improve electronics
Transfer efficiency；Four, optimize capacitance structure；Fifth, constructing the series and parallel structure of multiple friction nanometer power generators, space benefit is improved
With rate, so that unit area/volume output power be significantly increased.
In many optimizations of friction nanometer power generator and method of modifying, other than this method of surface roughening, remaining
The smaller scope of application of a few class methods is confined to certain several or even certain material or structure, can not be generalized to entire friction
In material system.Only surface roughening, this method have general applicability；And after surface roughening, to friction
The performance boost of nano generator is clearly.
It is carried out in roughened technology in friction material surface, technology more commonly used at present includes nano impression, soft or hard
Photoetching and laser ablation etc..For example, CN106301063A discloses a kind of two-sided wearable friction nanometer power generator and its system
Preparation Method, the friction nanometer power generator include: to stack gradually first high molecular polymer film layer of distribution, and rub electrode layer
And second high molecular polymer friction film layer, human body and are greatly connected as second electrode, two layers of friction film is all
It is to be formed by high molecular polymer flexible, nanostructure is all modified on outer surface；The flexible macromolecule polymer thin
Film layer may be worn on human body, with human skin phase mutual friction；It is described friction electrode layer be friction nanometer power generator voltage and
Electric current output electrode.CN105958858A discloses a kind of double-layer wave shape hybridized nanometer generator, including several be flat on is rubbed
The structural unit on wiping source surface forms, and includes to be fixed in the substrate of upper, middle and lower in each structural unit and is coated with electrode
The friction element and upper lower coil that plastic foil is formed with the wave flexible plastic sheet for being coated with electrode are formed with intermediate permanent magnet
Electromagnetic unit；Intermediate substrate in extraneous effect of vibration, friction generator vibrates up and down so that friction polarity spectrum is larger
Contact surface area increases and reduces, thus has output of pulse signal, and passes through the magnetic flux of upper lower coil in electromagnetic generator
It changes, thus also has output of pulse signal.
Although, can be in the pattern of friction material surface acquisition periodic arrangement, these methods using these technologies
Preparation is required with figuratum mask plate.On the one hand, the later period of the production of complicated mask plate, the transfer of pattern and mask plate
The processes such as removal are cumbersome, time-consuming and laborious, and cost is also higher, can not be used to be prepared on a large scale with figuratum friction material；Separately
On the one hand, these methods usually prepare figure on the surface of some friction material, or in two friction material surface structures
Figure is built, but the figure correlation of the two friction material surfaces is not strong, so that the figure of two friction material surfaces can not
Agree with completely, real contact area is caused not reach maximum value.And the simple template such as directly adopt low-cost sand paper,
Two friction surfaces generate the sand paper pattern that can agree with completely and sand paper complementation pattern respectively, it will be able to avoid these problems.
Summary of the invention
In view of the problems existing in the prior art, the purpose of the present invention is intended for friction material system in friction nanometer power generator
The problems such as standby at high cost, time-consuming and process is cumbersome, suitable same size template is selected, in the positive/negative of two phase mutual friction
Electric frictional layer material surface generates the micro-nano structure agreed with completely.
Dimethyl silicone polymer (PDMS) is that a kind of flexibility is fabulous, transparency is high, resistance to corrosion is strong, hydrophobic
Organosilicon polymer, while there is excellent frictional behaviour, it is suitable as negative electricity friction material；Copper is that the excellent positive electricity of one kind rubs
Wipe material.In view of the above feature and special construction of the invention, both materials are used as triboelectricity layer by the present invention, are had good
Good electric property.
The purpose of the present invention is what is be achieved through the following technical solutions, that is, simple sand paper template is utilized, PDMS is spun to
Sand paper rough surface is made after removing with the PDMS film with sand paper pattern complementary patterns surface；On the other hand by thickness compared with
Small copper film is directly deposited by the method for thermal evaporation plated film to coated abrasive surface, to prepare the surface for being carved with sand paper pattern again
Coarse copper friction material.
A kind of roughened preparation method for agreeing with structure of friction nanometer power generator frictional layer material surface, comprising:
(1) negative electricity friction layer material is coated in template, and is removed, to prepare picture on surface and template pattern
Complementary negative electricity frictional layer；
(2) method for using film, by the lesser positive electricity friction layer material of thickness, directly vapor deposition arrives same size template
Surface, to be prepared with the positive electricity frictional layer of template pattern；
(3) surface is answered and is carved with the positive electricity for being carved with template pattern with the negative electricity frictional layer of template pattern complementary graph, again and rubs
Layer, electrode, lead, buffer layer and support construction etc. are wiped, friction nanometer power generator is assembled into；So that the friction nanometer is sent out
Two friction surfaces of motor have the surface texture agreed with.
The coating method, including spin coating, casting, scraper and spraying etc. of the negative electricity friction layer material；Positive electricity frictional layer material
The physical vapour deposition (PVD)s such as the coating method of material, including evaporation coating, sputter coating or even atomic layer deposition.
The template is the simple template such as sand paper, frosted glass and CD or even dry etching, wet etching, laser ablation
With the fine template of the methods of photoetching preparation.
The negative electricity friction material, including polytetrafluoroethylene (PTFE) (PTFE), dimethyl silicone polymer (PDMS), poly- methyl-prop
E pioic acid methyl ester (PMMA), Kynoar (PVDF) and polyvinyl acetate (PVA) etc.；The positive electricity friction material, including
The conductive materials such as graphite, graphene, copper, silver, gold, tin indium oxide (ITO), fluorine-doped tin oxide (FTO), metal and alloy.
The characteristic size of the surface micro-nano structure of step (1) described template is 200 μm~1nm.
Step (2) positive electricity friction layer material with a thickness of 100~1000nm, step (3) the negative electricity frictional layer material
Material with a thickness of 20~500 μm.
Aforementioned schemes are the schemes that chances on by many experiments, and bring unexpected effect.Wherein, it bears and rubs
The selection gist for wiping material, is the electronegativity for needing to consider material, selects the very high common used material of triboelectric properties.And size
Selection gist be that, using common template, the accessible nano-scale in surface, including simple template and fine template, size are got over
Small triboelectric properties are higher.Positive friction layer material needs to meet conductive；In addition, thickness is smaller to rub under the premise of well conducting
Wipe electrical property it is higher, therefore positive electricity friction layer material with a thickness of 100~1000nm.Negative friction layer material is limited to polymer sheet
The property of body, to guarantee that induction charging and thickness are the smaller the better；But remove for convenience, it to be at least more than 20 μm, therefore
Negative electricity rub layer material with a thickness of 20~500 μm.
It is preferred that specifically steps are as follows:
Step (1):
Sand paper is cut into 3cm × 3cm by (1a), is then cleaned by ultrasonic sand paper with alcohol, is finally dried spare；
(1b) prepares PDMS solution: first raw material prepolymer A and the crosslinking agent B 10:1 in mass ratio for preparing of PDMS is weighed,
Then it is placed on 15~60min of stirring on magnetic stirring apparatus, so that two kinds of ingredients are sufficiently mixed uniformly；
The material model of PDMS is Dowcorning Sylgard 184.Since polymer P DMS can not keep liquid for a long time
State, overlong time can solidify lead to not using.Storage method is usually that two kinds of ingredients in PDMS are separated to individually storage, i.e.,
Two components of prepolymer A and crosslinking agent B；The two, which is mixed, when in use to use.So the prepolymer A and crosslinking
The material of agent B is respectively two kinds of ingredients in PDMS, and weight ratio is preferably 10:1.
Wherein, if the ratio of crosslinking agent B is very few, will lead to PDMS can not forming and hardening and be in a liquid state；The ratio of crosslinking agent B
Example is excessive, will lead to PDMS and excessively solidifies and loses flexibility, will lead to triboelectric properties and is greatly reduced.
Uniformly mixed PDMS solution is put into vacuum deaerator plant by (1c), removes the bubble in mixed solution.It is sharp again
With spin coater, PDMS solution is spun on spare sand paper, then by the sand paper that spin coating has PDMS be put into 80~250 DEG C plus
In thermal station, cooling is removed after heating 15~60min, is finally removed PDMS with tweezers, to prepare surface and sand paper pattern is mutual
The PDMS film of complement case；
Step (2):
(2a) first pre-processes metallic copper target: being polished away the oxide layer on copper surface with sand paper, then uses ethyl alcohol
15min is cleaned, is finally putting on the evaporation boat of thermal evaporation filming equipment；
(2b) will be placed on the sample substrate platform of thermal evaporation coating chamber again by the sand paper substrate of step (1a) processing, right
Vacuum chamber is vacuumized, and vacuum degree is up to 4.0 × 10-4~2.0 × 10-4Pa；
(2c) slowly adjusts voltage, is increased to 165-200V, makes copper target material is heated to melt, beats after starting evaporation coating 3min
Substrate shutter is opened, by copper direct evaporation coating to sand paper substrate, after showing 300~1000nm of coating film thickness, opens substrate gear
Plate slowly reduces voltage and turns off plated film power supply；Sand paper substrate is taken out, is placed in glove box and stores, obtain and be carved with sand paper shape again
The copper friction material of looks rough surface；
Step (3):
Four springs are sticked on four angles of support glass with glue, then by the glass side of ito glass with two-sided
On the glass of sticker support at one piece, then PDMS is placed directly against on ITO；Simultaneously, the sand paper for being coated with copper is attached to another
Block supports on glass, is finally connected two pieces of support glass faces with glue, two leads is drawn on ITO and copper facing, with regard to group
Friction nanometer power generator is dressed up: support construction-buffer layer-electrode-positive electricity frictional layer-negative electricity frictional layer-electrode-buffer layer-
Support construction.
Another object of the present invention is to provide a kind of friction nanometer power generator roughened contracts of frictional layer material surface
Structure is closed, the structure of agreeing with is prepared by preparation method above-mentioned.
The structure of the friction nanometer power generator are as follows: support construction-buffer layer-electrode-positive electricity frictional layer-negative electricity friction
Layer-electrode-buffer layer-support construction.
Compared with the prior art, the beneficial effects of the invention include:
(1) friction surface of friction material is usually smoother, so that the real contact area in friction process has
Limit.Therefore, various technologies are generallyd use on the surface of friction material, prepare various figures or micro-nano structure；These
Method can improve the real contact area in friction process to a certain extent.But these methods are usually in some friction
The surface of material prepares figure；Or figure is constructed in two friction material surfaces, and the figure of the two friction material surfaces
Correlation is not strong, so that the figure of two friction material surfaces can not agree with completely, real contact area is caused not reach most
Big value.
(2) using positive/negative electric two frictions layer material of friction nanometer power generator prepared by the present invention, due to use
It is same size template, thus prepared thick film layers have the surface with sand paper pattern complementary patterns after removing；And
Another layer film of preparation, the surface with sand paper topographical pattern.Importantly, prepared by the template using same size, table
The size of face topographical pattern is nearly identical, and shape complementation can agree with completely, so that the reality in friction process
Border contact area is bigger.
Detailed description of the invention
Fig. 1, friction nanometer power generator the preparation flow schematic diagram of the double surface roughenings of friction layer material；
Fig. 2, rubbed layer material SEM pattern using the copper positive electricity prepared by 10000 mesh sand paper templates with sand paper pattern
Figure；
Fig. 3, rubbed layer material using PDMS negative electricity complementary with coated abrasive surface pattern prepared by 10000 mesh sand paper templates
SEM shape appearance figure；
Fig. 4, using friction nanometer power generator prepared by the present invention electric property and its compare: (4a) voltage performance survey
Determine schematic diagram, (4b) charge character measures schematic diagram.
Specific embodiment
In order to fully understand technical problem of the invention, technical solution, feature and effect, the present invention will be carried out below detailed
It describes in detail bright.
The present invention is the template using same specification, and generating respectively on the surface of positive/negative electric two frictions layer material can be complete
The template pattern and die plate pattern complementation pattern agreed with entirely, so that real contact area is big in the friction nanometer power generator course of work
Big to improve, prepared friction nanometer power generator performance is stablized.
The technical solution of the present invention is not limited to the following list, further includes between each specific embodiment
Any combination.
Embodiment 1
Preparation flow schematic diagram referring to Fig.1, a kind of friction nanometer power generator roughened contract of frictional layer material surface
Close the preparation method of structure, comprising:
Step (1):
The sand paper of 10000 mesh is first cut into 3cm × 3cm by step (1a), is then cleaned by ultrasonic sand paper with alcohol, most
After dry it is spare；
Step (1b) first prepares PDMS solution: PDMS is first prepared into raw material prepolymer A and crosslinking agent B in mass ratio 10:
1 weighs, and is then placed on 15~60min of stirring on magnetic stirring apparatus and two kinds of ingredients are sufficiently mixed uniformly；
Uniformly mixed PDMS solution is put into vacuum deaerator plant by step (1c), removes the bubble in mixed solution.
Spin-coating method is recycled, PDMS solution is spun on spare sand paper, the sand paper that spin coating has PDMS is then put into 80~250 DEG C
Warm table on, heat 15~60min after remove cooling, finally PDMS is removed with tweezers, be just made have and sand paper shape
The PDMS film on looks complementary patterns surface；
Step (2):
Step (2a) first pre-processes metallic copper target: being polished away the oxide layer on copper surface with sand paper, is then used
Ethyl alcohol cleans 15min, is finally putting on the evaporation boat of thermal evaporation filming equipment.
Step (2b) will be placed in the sample substrate platform of thermal evaporation coating chamber by the sand paper substrate of step (1a) processing again
On, vacuum chamber is vacuumized, vacuum degree is up to 4.0 × 10-4~2.0 × 10-4Pa；
Step (2c) slowly adjusts voltage, is increased to 165-200V, makes copper target material is heated to melt, starts evaporation coating
Substrate shutter is opened after 3min, by copper direct evaporation coating to sand paper substrate, after showing coating film thickness 300nm, opens substrate
Baffle slowly reduces voltage and turns off plated film power supply.Sand paper substrate is taken out, is placed in glove box and stores, obtain and be carved with sand paper again
The copper friction material of pattern rough surface.
Step (3):
Four springs are sticked on four angles of support glass with glue, then by the glass side of ito glass with two-sided
On the glass of sticker support at one piece, then PDMS is placed directly against on ITO；Simultaneously, the sand paper for being coated with copper is attached to another
Block supports on glass, is finally connected two pieces of support glass faces with glue, two leads is drawn on ITO and copper facing, with regard to group
Dressed up friction nanometer power generator: (positive electricity rubs glass (support construction)-double-sided adhesive (cushioning layer material)-for copper facing for copper facing (electrode)-
Wipe material)-PDMS (negative electricity friction material)-electrode (ito glass)-cushioning layer material (double-sided adhesive)-glass (support construction).
Using copper friction material (as shown in Figure 2) prepared by the present invention, there is sand paper topographical pattern；It is prepared using the present invention
PDMS friction material (as shown in Figure 3), have sand paper pattern complementary patterns.It can agree with completely in the two friction process, with
Untreated template, copper-sand paper, PDMS- sand paper are compared, so that electric property greatly promotes (as shown in figure 4, (4a) voltage performance
Measure schematic diagram, (4b) charge character measures schematic diagram), method preparation process of the present invention is simple, it is low in cost, can be with
For being mass produced.
Embodiment 2
Unlike example 1, the sand paper mesh number for only changing the step (1a) is 12000 mesh, other steps remain unchanged.By
Bigger in sand paper mesh number, structure size is smaller, and friction nanometer power generator output performance is more preferably.
Embodiment 3
Unlike example 1, the sand paper template for changing the step (1a) is the silicon template of photoetching, other steps are kept not
Become.With Lithographic template pattern character size is reduced, device performance is better.(whether fine silicon template or easy sand
Paper matrix plate, as long as the size on surface is smaller, performance is better)
Embodiment 4
Unlike example 1, changing the step (1a) is that sand paper is cut into 3cm × 5cm, other steps remain unchanged.It can
Output power to find device is directly proportional with device area, but the output energy of unit area is constant.
Embodiment 5
Unlike example 1, the negative electricity friction layer material for changing the step (1b) is polytetrafluoroethylene (PTFE), other steps are kept
It is constant.It can be found that it is directed to different material systems, friction nanometer power generator device prepared by the method using this patent
Can, compared to the performance for the electric nano generator of friction for not using patented method preparation, it is obviously improved.
Embodiment 6
Unlike example 1, (1c) is changed the step as spraying, other steps remain unchanged.It can be found that being only film-made
Method is different, and surface texture does not change clearly, influences on performance little.
Embodiment 7
Unlike example 1, the target for changing the step (2a) is metallic silver target, other steps remain unchanged.Due to
It is that different conductive materials is used as positive friction material, performance has slight difference；But use positive friction prepared by the patent
Material, when compared to not using the standby positive friction material of the patent system, device performance is more preferably.
Embodiment 8
Unlike example 1, the thermal evaporation coating method of step (2a) is changed into physical vaporous deposition plated film；Other
Step remains unchanged.Different due to being film mode, surface texture does not have significant change, influences on performance little.
Embodiment 9
Unlike example 1, the coating film thickness for changing the step (2b) is 1000 μm, other steps remain unchanged.Due to
Only film thickness slightly has difference, and surface texture does not change significantly, influences on performance little.
Embodiment 10
Unlike example 1, the ito glass for changing the step (2c) is FTO glass, other steps remain unchanged.Due to
The material for being used merely as conductive electrode is different, other primary structures and material are constant, the influence not apparent to performance.
Embodiment 11
Unlike example 1, the structure of the friction nanometer power generator of (3) is changed the step are as follows: double-sided adhesive (buffer layer material
Material)-copper facing (electrode)-copper facing (positive electricity friction material)-PDMS (negative electricity friction material)-electrode (ito glass)-cushioning layer material
(double-sided adhesive), other steps remain unchanged.It is other crucial in friction generator due to being only omitted support construction (glass)
Structure does not change, and has not significant impact to performance.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. the preparation method that friction nanometer power generator frictional layer surface roughening agrees with structure characterized by comprising
(1) negative electricity friction layer material is coated in template, and is removed, so that it is complementary with template pattern to prepare picture on surface
Negative electricity frictional layer；
(2) method for using film, by the lesser positive electricity friction layer material of thickness, the directly table of vapor deposition to same size template
Face, to be prepared with the positive electricity frictional layer of template pattern；
(3) surface is answered be carved with the positive electricity frictional layer for being carved with template pattern with the negative electricity frictional layer of template pattern complementary graph, again,
Electrode, lead, buffer layer and support construction, are assembled into friction nanometer power generator；So that the friction nanometer power generator
Two friction surfaces have the surface texture agreed with.
2. preparation method according to claim 1, it is characterised in that: negative electricity rubs the coating method of layer material, including spin coating, pours
Note, scraper and spraying；The coating method of positive electricity friction layer material, the physical vapour deposition (PVD) including evaporation coating, sputter coating are
To atomic layer deposition.
3. according to claim 1 or the preparation method of claim 2, it is characterised in that: the template is sand paper, frosted glass and light
The simple template or even dry etching of disk, wet etching, laser ablation and photoetching method preparation fine template.
4. according to claim 1 or the preparation method of claim 2, it is characterised in that: the negative electricity friction material, including it is poly-
Tetrafluoroethene (PTFE), dimethyl silicone polymer (PDMS), polymethyl methacrylate (PMMA), Kynoar (PVDF) and
Polyvinyl acetate (PVA)；The positive electricity friction material, including graphite, graphene, copper, silver, gold, tin indium oxide (ITO),
The conductive material of fluorine-doped tin oxide (FTO) and alloy.
5. according to claim 1 or the preparation method of claim 2, it is characterised in that: the surface micro-nano of step (1) described template
The characteristic size of structure is 200 μm~1nm.
6. according to claim 1 or the preparation method of claim 2, it is characterised in that: step (2) positive electricity rubs layer material
With a thickness of 100~1000nm, step (3) the negative electricity friction layer material with a thickness of 20~500 μm.
7. according to claim 1 or preparation method as claimed in claim 2, it is characterised in that: the friction nanometer power generator
Structure are as follows: support construction-buffer layer-electrode-positive electricity frictional layer-negative electricity frictional layer-electrode-buffer layer-support construction.
8. preparation method according to claim 1, it is characterised in that: include:
Step (1):
Sand paper is cut into 3cm × 3cm by (1a), is then cleaned by ultrasonic sand paper with alcohol, is finally dried spare；
(1b) prepares PDMS solution: first weighing raw material prepolymer A and the crosslinking agent B 10:1 in mass ratio for preparing of PDMS, then
It is placed on 15~60min of stirring on magnetic stirring apparatus, so that two kinds of ingredients are sufficiently mixed uniformly；
Uniformly mixed PDMS solution is put into vacuum deaerator plant by (1c), removes the bubble in mixed solution, recycles rotation
PDMS solution is spun on spare sand paper by painting machine, then the sand paper that spin coating has PDMS is put into 80~250 DEG C of warm table
On, cooling is removed after heating 15~60min, is finally removed PDMS with tweezers, to prepare surface and sand paper pattern complementation map
The PDMS film of case；
Step (2):
(2a) first pre-processes metallic copper target: being polished away the oxide layer on copper surface with sand paper, is then cleaned with ethyl alcohol
15min is finally putting on the evaporation boat of thermal evaporation filming equipment；
(2b) will be placed on the sample substrate platform of thermal evaporation coating chamber again by the sand paper substrate of step 1 processing, to vacuum chamber
It is vacuumized, vacuum degree is up to 4.0 × 10-4~2.0 × 10-4Pa；
(2c) slowly adjusts voltage, is increased to 165-200V, makes copper target material is heated to melt, and opens lining after starting evaporation coating 3min
Bottom baffle after showing 300~1000nm of coating film thickness, is opened on copper direct evaporation coating to sand paper substrate substrate shutter, is delayed
The slow voltage that reduces turns off plated film power supply；Sand paper substrate is taken out, is placed in glove box and stores, obtains that be carved with sand paper pattern again coarse
The copper friction material on surface；
Step (3):
Four springs are sticked on four angles of support glass with glue, then by the glass side double faced adhesive tape of ito glass
On the glass of the support at one piece, then PDMS is placed directly against on ITO；Simultaneously, the sand paper for being coated with copper is attached to another piece of branch
It supports on glass, is finally connected two pieces of support glass faces with glue, two leads are drawn on ITO and copper facing, are just assembled into
Friction nanometer power generator: support construction-buffer layer-electrode-positive electricity frictional layer-negative electricity frictional layer-electrode-buffer layer-support
Structure.
9. preparation method according to claim 8, it is characterised in that: the prepolymer A and the material of crosslinking agent B are respectively
Two kinds of ingredients in PDMS, weight ratio 10:1.
10. friction nanometer power generator frictional layer surface roughening agrees with structure, it is characterised in that: the structure of agreeing with passes through power
Benefit requires 1-9 described in any item preparation methods to be prepared.
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| CN113310608A (en) * | 2021-05-26 | 2021-08-27 | 东南大学 | Self-powered robot skin sensor and preparation method thereof |
| CN117126582A (en) * | 2023-09-08 | 2023-11-28 | 北京科技大学 | Preparation method of reinforced magnetic conductive wear-resistant epoxy resin composite coating |
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