CN113310608A - Self-powered robot skin sensor and preparation method thereof - Google Patents
Self-powered robot skin sensor and preparation method thereof Download PDFInfo
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- CN113310608A CN113310608A CN202110576401.1A CN202110576401A CN113310608A CN 113310608 A CN113310608 A CN 113310608A CN 202110576401 A CN202110576401 A CN 202110576401A CN 113310608 A CN113310608 A CN 113310608A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Abstract
The invention discloses a self-powered robot skin sensor and a preparation method thereof, wherein the sensor comprises a surface packaging layer, an upper negative-polarity friction material layer, an elastic medium layer, a lower positive-polarity friction material layer and a series resistor; the elastic medium layer is located between the upper negative polarity friction material layer and the lower positive polarity friction material layer and is of a grid structure, the upper surface of the upper negative polarity friction material layer is provided with an upper layer of strip-shaped electrodes, and the lower surface of the lower positive polarity friction material layer is provided with a lower layer of strip-shaped electrodes. The pressure sensing sensor has the characteristic of self-energy supply, and can output an electric signal under the condition of no power supply; the composite film with the surface structure is adopted, so that the transfer of charges in the friction process is increased, and the output performance of the device is greatly improved; the restriction on the material of the pressed object is also eliminated; the structure of the transverse and longitudinal electrodes is designed, and two paths of electric signals can be generated by one-time pressing.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a self-powered robot skin sensor and a preparation method thereof.
Background
The flexible electron is the research direction of comparing the fiery heat in recent years, and for traditional electron, flexible electron has bigger flexibility, can adapt to different operational environment to a certain extent, satisfies the deformation requirement of equipment. The friction nano generator can convert mechanical energy applied from the outside into electric energy based on a friction electrification principle and an electrostatic induction principle, so that the self-energy supply of the sensor can be realized, meanwhile, the friction nano generator can be prepared into a flexible device, and huge application prospects are shown in the fields of energy collection, wearable equipment and the like. With the continuous and deep research on the friction nano-generator, more and more high-performance friction nano-generators come out, and meanwhile, the application of the friction nano-generator is also continuous and abundant.
It is naturally recalled that the advent of the tribo nanogenerator provides a new solution for the skin pressure sensing of robots. Because the friction nanometer generator can convert external mechanical energy into a measurable electric signal, the friction nanometer generator can be used as a flexible sensor to be configured on the surface of the robot to sense pressure, when the robot interacts with the outside, the robot can generate a corresponding electric signal, and the robot can sense the outside contact through signal processing. Meanwhile, the flexible transparent sensor can be manufactured, the skin-like function can be achieved well along with the configuration of the robot epidermis, and moreover, the sensor based on the friction nano generator can realize self-energy supply when the sensor is in contact sensing with the outside, so that the requirement on system energy supply is reduced.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention aims to provide the self-powered robot skin sensor capable of sensing the pressure applied to any object.
The technical scheme is as follows: the invention provides a self-powered robot skin sensor which comprises a surface packaging layer, an upper negative-polarity friction material layer, an elastic medium layer, a lower positive-polarity friction material layer and a series resistor, wherein the surface packaging layer is used for packaging the upper negative-polarity friction material layer, the elastic medium layer, the lower positive-polarity friction material layer and the series resistor, protecting the internal friction material layer and isolating external interference; the elastic medium layer is located between the upper negative polarity friction material layer and the lower positive polarity friction material layer and is of a grid structure, the upper surface of the upper negative polarity friction material layer is provided with an upper layer of strip-shaped electrodes, and the lower surface of the lower positive polarity friction material layer is provided with a lower layer of strip-shaped electrodes.
The upper layer bar-shaped electrode is a plurality of electrodes parallel to each other, the lower layer bar-shaped electrode is also a plurality of electrodes parallel to each other, the number of the upper layer bar-shaped electrode and the number of the lower layer bar-shaped electrode are equal, the directions of the upper layer bar-shaped electrode and the lower layer bar-shaped electrode are mutually perpendicular, and each upper layer bar-shaped electrode and each lower layer bar-shaped electrode are respectively led out through a copper wire and are respectively connected with the series resistor and then are grounded. The resistance value of the series resistor is 100 MOmega. The number of the series resistors is equal to the sum of the number of the upper layer strip-shaped electrodes and the number of the lower layer strip-shaped electrodes.
The intersection points of the projections of the upper layer strip-shaped electrode and the lower layer strip-shaped electrode on the elastic medium layer are both positioned in the grids of the elastic medium layer. The upper negative friction material layer passes through the grid holes of the elastic medium layer under the action of pressure and is in contact with the lower positive friction material layer.
The surface packaging layer is made of one or more of polyethylene glycol terephthalate, a polyvinyl alcohol thin layer, silicon rubber, rubber or polyimide. Preferably, the surface encapsulation layer is polyethylene terephthalate.
The upper negative friction material layer is a polydimethylsiloxane and polytetrafluoroethylene composite film with a rough surface structure.
The lower positive friction material layer is made of one or more of polyamide, polyimide or polyethylene terephthalate in a compounding mode, and preferably, the lower positive friction material layer is a polyamide film.
The upper layer strip-shaped electrode and the lower layer strip-shaped electrode are made of one or more of gold, silver, copper and aluminum, and preferably, the upper layer strip-shaped electrode and the lower layer strip-shaped electrode are made of gold.
The elastic medium layer is a transparent double-sided adhesive tape with a certain thickness.
The invention discloses a preparation method of a self-powered robot skin sensor, which comprises the following steps:
a. preparing an upper negative friction material layer and an upper strip electrode: 3g of polydimethylsiloxane was poured into a beaker, and 0.3g of a curing agent, 0.3g of polytetrafluoroethylene powder, 3 drops of n-hexane, and stirred with a glass rod for 5 minutes. Removing bubbles by using a vacuum drying oven, spin-coating the pure mixed solution on the surface of the sand paper at the rotating speed of 250rpm for 2 minutes, heating and curing for 1-2 hours at the temperature of 60-85 ℃ in a vacuum environment, and peeling to obtain an upper-layer negative-polarity composite film with a rough structure on the lower surface, wherein the size of the upper-layer negative-polarity composite film is 5cm multiplied by 5 cm; the sand paper is 150-300 meshes.
Fixing a mask template with a strip-shaped structure on the smooth surface of the upper-layer negative-polarity friction material layer, and plating an upper-layer strip-shaped electrode on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology. Vacuum pressure less than 7.5 × 10-4KPa。
b. Preparing a lower positive-polarity friction material layer and a lower strip-shaped electrode: drawing a mask template with a strip-shaped structure, cutting a polyamide film with the width of 0.3cm multiplied by 5cm multiplied by 50 mu m, fixing the mask template with the strip-shaped structure on the surface of the lower positive polarity friction material layer, namely the surface of the polyamide film, and plating a lower strip-shaped electrode on the surface of the lower positive polarity friction material layer by utilizing a vacuum evaporation technology. Vacuum pressure less than 7.5 × 10-4KPa。
c. Preparing a latticed elastic medium layer: drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 30-60W, the engraving speed is 10-55 mm/s, and the engraving precision is 500 ppi; the laser engraving process is repeated for 3-12 times.
d. Preparation of the functional layer: the elastic medium layer is fixed between the upper negative-polarity friction material layer and the lower positive-polarity friction material layer, the upper strip-shaped electrode is located on the upper surface of the upper negative-polarity friction material layer, the lower strip-shaped electrode is located on the lower surface of the lower positive-polarity friction material layer, and the intersection point of the projections of the upper strip-shaped electrode and the lower strip-shaped electrode on the elastic medium layer is located in the grid of the elastic medium layer.
e. Preparing a self-powered flexible pressure sensing sensor: and leading out each upper layer strip electrode and each lower layer strip electrode by using a copper wire, connecting each wire in series with a 100M omega resistor to be grounded, and packaging the device by using a packaging layer to obtain the self-powered flexible pressure sensing sensor.
The working principle is as follows: the invention relates to a self-powered robot skin sensor based on a triboelectric principle, wherein when the sensor is applied with pressure from the outside, an upper layer negative-polarity friction material layer is deformed and passes through a grid of an elastic medium layer to be in contact friction with a lower layer positive-polarity friction material layer, negative charges are accumulated on the surface of the upper layer negative-polarity friction material layer due to the triboelectric principle, positive charges are accumulated on the surface of the lower layer positive-polarity friction material layer, the elastic medium layer is deformed and restored after pressure is removed, and charge flow is generated between a film back electrode and the ground due to the electrostatic induction principle, so that voltage signals can be measured at two ends of a resistor. Meanwhile, the output generated by the device is increased along with the increase of the pressing pressure, the pressing pressure can be roughly measured, and the position of the pressing point can be determined by combining the electric signals on the upper and lower layer strip-shaped electrode electrodes which are transversely and longitudinally arranged.
Has the advantages that: compared with the prior art, the invention has the following remarkable characteristics: the pressure sensing sensor has the characteristic of self-energy supply, and can output an electric signal under the condition of no power supply; the composite film with the surface structure is adopted, so that the transfer of charges in the friction process is increased, and the output performance of the device is greatly improved; meanwhile, the structure of the device is designed, and two layers of friction materials are placed in the device, so that the limitation on the material for pressing the object is eliminated, and the pressure applied by any object can be sensed; the structure of the transverse and longitudinal electrodes is designed, two paths of electric signals can be generated by one-time pressing, the size of pressing pressure can be measured, and pressing points can be determined; the self-powered flexible pressure sensing sensor is simple in preparation process, low in preparation cost, short in preparation period and easy for large-scale production; the self-powered flexible sensor has potential application value in the fields of pressure sensing and robot electronic skin.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a scanning electron microscope image of the upper negative friction material layer of the present invention.
Fig. 3 is a pressure-voltage response graph of the present invention.
Wherein: 1. a surface encapsulation layer; 2. an upper layer of negative polarity friction material layer; 3. an elastic medium layer; 4. a lower positive friction material layer; 21. an upper layer of strip-shaped electrodes; 41. and a lower layer strip electrode.
Detailed Description
As shown in fig. 1, the self-powered robot skin sensor provided by the invention comprises a surface packaging layer 1, an upper negative-polarity friction material layer 2, an elastic medium layer 3, a lower positive-polarity friction material layer 4 and a series resistor, wherein the surface packaging layer 1 is used for packaging the upper negative-polarity friction material layer 2, the elastic medium layer 3, the lower positive-polarity friction material layer 4 and the series resistor, protecting an internal friction material layer and isolating external interference; the elastic medium layer 3 is located between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the elastic medium layer 3 is of a grid structure, the upper surface of the upper-layer negative-polarity friction material layer 2 is provided with an upper-layer strip electrode 21, and the lower surface of the lower-layer positive-polarity friction material layer 4 is provided with a lower-layer strip electrode 41.
The upper layer strip-shaped electrodes 21 are a plurality of electrodes parallel to each other, the lower layer strip-shaped electrodes 41 are also a plurality of electrodes parallel to each other, the number of the upper layer strip-shaped electrodes 21 is equal to that of the lower layer strip-shaped electrodes 41, the directions of the upper layer strip-shaped electrodes 21 and the lower layer strip-shaped electrodes 41 are perpendicular to each other, and each upper layer strip-shaped electrode 21 and each lower layer strip-shaped electrode 41 are respectively led out through a copper wire and are respectively connected with a series resistor and then are grounded. The resistance value of the series resistor is 100 MOmega. The number of series resistances is equal to the sum of the numbers of the upper layer stripe electrodes 21 and the lower layer stripe electrodes 41.
The intersection points of the projections of the upper layer strip-shaped electrode 21 and the lower layer strip-shaped electrode 41 on the elastic medium layer 3 are all positioned in the grid of the elastic medium layer 3. The upper negative friction material layer 2 passes through the grid holes of the elastic medium layer 3 under the action of pressure to be in contact with the lower positive friction material layer.
Example 1
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 3g of polydimethylsiloxane was poured into a beaker, and 0.3g of a curing agent, 0.3g of polytetrafluoroethylene powder, 3 drops of n-hexane, and stirred with a glass rod for 5 minutes. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 250rpm for 2 minutes, heating and curing at 60 deg.C for 2 hours in vacuum environment, and stripping to obtain negative composite film with rough structure on the lower surface, wherein the size is 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology. The upper layer strip-shaped electrode 21 is a plurality of electrodes which are parallel to each other.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting off a commercial polyamide film with the width and the length of 0.3cm multiplied by 5cm multiplied by 50 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology. The upper layer strip-shaped electrode 21 and the lower layer strip-shaped electrode 41 are made of gold.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 30W, the engraving speed is 10mm/s, and the engraving precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using copper wires, connecting each copper wire in series with a 100M omega resistor to be grounded, and packaging the device by using polyethylene terephthalate to obtain the self-powered flexible pressure sensing sensor.
Example 2
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 3g of polydimethylsiloxane was poured into a beaker, and 0.3g of a curing agent, 0.6g of polytetrafluoroethylene powder, 6 drops of n-hexane and stirred with a glass rod for 5 minutes. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 500rpm for 1 min, heating and curing at 80 deg.C for 1.5 hr, and stripping to obtain negative composite film with rough structure on the lower surface and size of 4cm × 4 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting a commercial polyamide film with the width and the length of 0.3cm multiplied by 4cm multiplied by 50 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1.5mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 60W, the speed is 10mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using copper wires, connecting each copper wire in series with a resistor of 200M omega to be grounded, and packaging the device by using polyethylene glycol terephthalate to obtain the self-powered flexible pressure sensing sensor.
Example 3
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 5g of polydimethylsiloxane was poured into a beaker, 0.3g of curing agent, 0.3g of polytetrafluoroethylene powder, 8 drops of n-hexane and stirred for 5 minutes with a glass rod. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 100rpm for 3 min, heating and curing at 85 deg.C for 1 hr, and peeling to obtain negative composite film with rough structure on the lower surface and size of 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting a commercial polyamide film with the width and the length of 0.3cm multiplied by 5cm multiplied by 30 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 0.5mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 80W, the speed is 40mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a 50M omega resistor to be grounded, and packaging the device by using a polyvinyl alcohol thin layer to obtain the self-powered flexible pressure sensing sensor.
Example 4
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 2g of polydimethylsiloxane was poured into a beaker, 0.6g of curing agent, 0.6g of polytetrafluoroethylene powder, 2 drops of n-hexane and stirred for 5 minutes with a glass rod. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 500rpm for 1 min, heating and curing at 40 deg.C for 3 hr, and peeling to obtain negative composite film with rough structure on the lower surface and size of 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting off a commercial polyamide film with the width and the length of 0.3cm multiplied by 5cm multiplied by 50 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 0.8mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 45W, the speed is 40mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a 300M omega resistor to be grounded, and packaging the device by using polyethylene terephthalate to obtain the self-powered flexible pressure sensing sensor.
Example 5
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 4g of polydimethylsiloxane was poured into a beaker, and 0.45g of the curing agent, 1g of polytetrafluoroethylene powder, 3 drops of n-hexane and stirred with a glass rod for 5 minutes. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 50rpm for 4 min, heating and curing at 90 deg.C for 0.5 hr, and stripping to obtain negative composite film with rough structure on the lower surface and size of 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting off a commercial polyamide film with the width and the length of 0.3cm multiplied by 5cm multiplied by 50 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 0.3mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 10W, the speed is 30mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a resistor of 150 MOmega to be grounded, and packaging the device by using polyethylene glycol terephthalate to obtain the self-powered flexible pressure sensing sensor.
Example 6
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 5g of polydimethylsiloxane was poured into a beaker, 0.5g of curing agent, 1g of polytetrafluoroethylene powder, 10 drops of n-hexane were added, and the mixture was stirred with a glass rod for 3 minutes. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 250rpm for 3 minutes, heating and curing at 70 deg.C for 1.5 hr, and stripping to obtain negative composite film with rough structure on the lower surface, wherein the size is 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting off a commercial polyamide film with the width and the length of 0.2cm multiplied by 5cm multiplied by 20 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1.5mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 60W, the speed is 10mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a resistor of 10M omega to be grounded, and packaging the device by using polyethylene terephthalate to obtain the self-powered flexible pressure sensing sensor.
Example 7
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 4g of polydimethylsiloxane was poured into a beaker, and 0.4g of the curing agent, 1g of polytetrafluoroethylene powder, 8 drops of n-hexane and stirred with a glass rod for 5 minutes. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 500rpm for 0.5 min, heating and curing at 60 deg.C for 3 hr, and stripping to obtain negative composite film with rough structure on the lower surface and size of 3cm × 3 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting a commercial polyamide film with the width and the length of 0.3cm multiplied by 3cm multiplied by 50 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 50W, the engraving speed is 30mm/s, and the engraving precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a 70M omega resistor to be grounded, and packaging the device by using polyethylene terephthalate to obtain the self-powered flexible pressure sensing sensor.
SEM observation is performed on the upper negative friction material layer 2 having the surface roughness structure prepared in example 7, as shown in fig. 2, it can be seen from the figure that the upper negative friction material layer 2 has an uneven structure on the surface, which is a surface structure of sandpaper, and the roughness of the thin film is increased, and white dot-like objects on the surface of the thin film are doped polytetrafluoroethylene particles, and through doping, the electronegativity of the thin film is increased, and the amount of charge transfer can be effectively increased.
The pressure-voltage response graph of the device is shown in fig. 3, the fixed pressing frequency is 2Hz, the pressure is changed, and the voltage at two ends of the resistor is measured.
Example 8
A preparation method of a self-powered robot skin sensor comprises the following steps:
a. preparation of the upper negative-polarity friction material layer 2 and the upper strip-shaped electrode 21: 6g of polydimethylsiloxane was poured into a beaker, 0.6g of curing agent, 1g of polytetrafluoroethylene powder, 10 drops of n-hexane and stirred for 5 minutes with a glass rod. Removing bubbles, spin-coating the mixed solution on the surface of sand paper at 200rpm for 2.5 min, heating and curing at 80 deg.C for 1.5 hr, and stripping to obtain negative composite film with rough structure on the lower surface and size of 5cm × 5 cm.
Fixing the mask template on the smooth surface of the upper-layer negative-polarity friction material layer 2, and plating an upper-layer strip-shaped electrode 21 on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology.
b. Preparation of the lower positive-polarity friction material layer 4 and the lower strip-shaped electrodes 41: drawing a mask template with a strip-shaped structure, cutting a commercial polyamide film with the width and the length of 0.2cm multiplied by 5cm multiplied by 40 mu m, fixing the mask template on the surface of the lower positive polarity friction material layer 4, namely the surface of the polyamide film, and plating a lower strip-shaped electrode 41 on the surface of the lower positive polarity friction material layer 4 by utilizing a vacuum evaporation technology.
c. Preparing a latticed elastic medium layer 3: and drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape with the thickness of 1.5mm, and engraving a grid hollow shape by using a laser engraving machine, wherein the engraving power is 60W, the speed is 30mm/s, and the precision is 500 ppi.
d. Preparation of the functional layer: the elastic medium layer 3 is fixed between the upper-layer negative-polarity friction material layer 2 and the lower-layer positive-polarity friction material layer 4, the upper-layer strip-shaped electrode 21 is located on the upper surface of the upper-layer negative-polarity friction material layer 2, the lower-layer strip-shaped electrode 41 is located on the lower surface of the lower-layer positive-polarity friction material layer 4, and the intersection point of the projections of the upper-layer strip-shaped electrode 21 and the lower-layer strip-shaped electrode 41 on the elastic medium layer 3 is located in the grid of the elastic medium layer 3.
e. Preparing a self-powered robot skin sensor: and leading out each upper layer strip electrode 21 and each lower layer strip electrode 41 by using a copper wire, connecting each wire in series with a resistor of 150 MOmega to be grounded, and packaging a device by using silicon rubber to obtain the self-powered flexible pressure sensing sensor.
Claims (10)
1. A self-powered robot skin sensor is characterized by comprising a surface packaging layer, an upper negative-polarity friction material layer, an elastic medium layer, a lower positive-polarity friction material layer and a series resistor;
the surface packaging layer is used for packaging the upper negative-polarity friction material layer, the elastic medium layer, the lower positive-polarity friction material layer and the series resistor, the elastic medium layer is located between the upper negative-polarity friction material layer and the lower positive-polarity friction material layer, the elastic medium layer is of a grid structure, the upper surface of the upper negative-polarity friction material layer is provided with an upper strip electrode, and the lower surface of the lower positive-polarity friction material layer is provided with a lower strip electrode;
the upper layer strip-shaped electrode is a plurality of electrodes which are parallel to each other, the lower layer strip-shaped electrode is a plurality of electrodes which are parallel to each other, the number of the upper layer strip-shaped electrode is equal to that of the lower layer strip-shaped electrode, and each upper layer strip-shaped electrode and each lower layer strip-shaped electrode are respectively led out through a lead and are respectively connected with a series resistor and then are grounded;
the intersection points of the projections of the upper layer strip-shaped electrode and the lower layer strip-shaped electrode on the elastic medium layer are both positioned in the grids of the elastic medium layer.
2. The self-powered robotic skin sensor of claim 1, wherein the upper layer strip electrodes are oriented perpendicular to the lower layer strip electrodes.
3. The self-powered robot skin sensor of claim 1, wherein the surface packaging layer is made of one or more of polyethylene terephthalate, polyvinyl alcohol thin layer, silicon rubber, rubber or polyimide.
4. The self-powered robot skin sensor of claim 1, wherein the upper negative friction material layer is a composite film of polydimethylsiloxane and polytetrafluoroethylene with a rough surface structure.
5. The self-powered robotic skin sensor of claim 1, wherein the lower positive friction material layer is a composite of one or more of polyamide, polyimide, or polyethylene terephthalate.
6. The self-powered robot skin sensor of claim 1, wherein the upper and lower strip electrodes are one or more of gold, silver, copper, and aluminum.
7. The self-powered robotic skin sensor of claim 1, wherein the elastic medium layer is a transparent double-sided tape.
8. The method for preparing the self-powered robot skin sensor according to claim 1, comprising the following steps:
a. preparing an upper negative friction material layer and an upper strip electrode: pouring polydimethylsiloxane into a beaker, adding a curing agent, polytetrafluoroethylene powder and n-hexane, and stirring with a glass rod; removing bubbles by using a drying oven, spin-coating the pure mixed solution on the surface of sand paper, heating and curing for 1-2 hours at the temperature of 60-85 ℃ in a vacuum environment, and stripping to obtain an upper-layer negative-polarity composite film with a rough structure on the lower surface;
fixing a mask template on the smooth surface of the upper-layer negative-polarity friction material layer, and plating an upper-layer strip electrode on the smooth surface of the upper-layer negative-polarity composite film by using a vacuum evaporation technology;
b. preparing a lower positive-polarity friction material layer and a lower strip-shaped electrode: drawing a mask template with a strip-shaped structure, fixing the mask template on the surface of the lower positive friction material layer, namely the surface of the polyamide film, and plating a lower strip-shaped electrode on the surface of the lower positive friction material layer by using a vacuum evaporation technology;
c. preparing a latticed elastic medium layer: drawing a mask template with a grid-shaped structure, covering the mask template on a transparent adhesive tape, and engraving a grid hollow shape by using laser;
d. preparation of the functional layer: fixing an elastic medium layer between an upper negative-polarity friction material layer and a lower positive-polarity friction material layer to ensure that an upper-layer strip electrode is positioned on the upper surface of the upper negative-polarity friction material layer, a lower-layer strip electrode is positioned on the lower surface of the lower positive-polarity friction material layer, and the intersection point of the projections of the upper-layer strip electrode and the lower-layer strip electrode on the elastic medium layer is positioned in a grid of the elastic medium layer;
e. and leading out each upper layer strip electrode and each lower layer strip electrode by using copper wires, connecting each wire in series with a series resistor, then grounding, and packaging the device by using a packaging layer to obtain the sensor.
9. The method for preparing the self-powered robot skin sensor according to claim 8, wherein the method comprises the following steps: the carving power in the step (c) is 30-60W, the speed is 10-55 mm/s, and the precision is 500 ppi.
10. The method for preparing the self-powered robot skin sensor according to claim 8, wherein the method comprises the following steps: in the step (a), 3g of polydimethylsiloxane was poured into a beaker, 0.3g of a curing agent, 0.3g of polytetrafluoroethylene powder, and 3 drops of n-hexane were added, a glass rod was stirred for 5 minutes, air bubbles were removed using a vacuum drying oven, the neat mixed solution was spin-coated on the surface of sandpaper at 250rpm for 2 minutes, and then heat-cured.
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