CN209820656U - Tactile and sliding sense sensor - Google Patents
Tactile and sliding sense sensor Download PDFInfo
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- CN209820656U CN209820656U CN201920898390.7U CN201920898390U CN209820656U CN 209820656 U CN209820656 U CN 209820656U CN 201920898390 U CN201920898390 U CN 201920898390U CN 209820656 U CN209820656 U CN 209820656U
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Abstract
The utility model provides a touch and slide sensation sensor, this touch and slide sensation sensor includes 5 layer structures, follows supreme down and is in proper order: the bottom surface of the organic polymer film is covered with a conductive material, the center of the organic polymer film is provided with a circular groove, organic materials of a hemispherical convex annular array with the radius equal to the depth of the groove are uniformly distributed in the groove, the organic polymer film is circular, the upper surface of the insulating film is provided with a plurality of piezoresistive films, and the circular truncated cone structure is formed. The tactile and sliding sensor can also measure the sliding direction and the sliding speed on the basis of identifying whether sliding occurs, can measure the space force acting on the sensor, does not need to perform complex post-processing on acquired data, and has low information feedback delay.
Description
Technical Field
The utility model relates to a sensor, especially a but simultaneous measurement space power and gliding sense of touch sensor.
Background
When some robots with manipulators are used for grasping objects, the relative motion between the manipulators and the contact surface of the held object needs to be monitored in real time so as to determine a proper gripping force value and grasp the objects on the premise of not damaging the objects. The tactile sensor is a device mainly used for detecting vertical pressure applied to the manipulator, the sliding sensor is a device mainly used for detecting sliding or pre-sliding between the manipulator and a held object, and the sensor with the functions of the two is called as a tactile and sliding sensor. The tactile and sliding sensor can help the robot successfully complete the soft grabbing task in a complex and multi-element environment.
Some existing manipulators need to use a single slip sensor and a single pressure sensor in a matched manner when grabbing, and the two sensors are not unified together, so that a larger area is occupied during integration; some tactile and slip sensors which combine the two sensors into the same device can identify whether sliding occurs, but cannot judge the sliding direction, measure the sliding speed or the shearing force of an object acting on the device, and the three parameters also have important significance in the soft grabbing process of the robot; some tactile and slip sensation sensors need a certain time to carry out post-processing on the acquired signals, and extract related tactile and slip sensation information from the acquired signals, so that certain time delay exists in the aspect of information feedback.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a main aim at remedies prior art not enough, provides a but simultaneous measurement space power and gliding sense of touch and slide sensor.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a tactile-slip sensor comprises 5 layers of structures which are tightly combined together, wherein according to the sequence from bottom to top, the 1 st layer is an organic polymer film with the bottom surface covered with a conductive material, the 2 nd layer is an organic material with a groove at the center, the opening of the groove faces the 1 st layer, a protrusion array with the height equal to the depth of the groove is uniformly distributed in the groove, the region of the 2 nd layer except the groove is tightly connected with the 1 st layer, the protrusion array in the groove is in contact with the surface of the 1 st layer and is separated when the sensor is subjected to shearing force, the 3 rd layer is an organic polymer film, the 4 th layer is an insulating film, a plurality of piezoresistive films are uniformly distributed on the upper surface of the insulating film, the 5 th layer is a circular truncated cone structure with the upper bottom surface smaller than the lower bottom surface, the 1 st layer and the 3 rd layer are electrets, and the geometric center of the upper surface of the organic material of the 2 nd layer, The geometric center of the organic polymer film on the 3 rd layer, the distribution center of the piezoresistive films on the 4 th layer and the circle center of the circular truncated cone structure on the 5 th layer are aligned.
Further:
the groove is a circular groove, and the 3 rd layer is a circular organic polymer film.
The diameter of the circular organic polymer film of the 3 rd layer is not more than that of the circular groove of the 2 nd layer.
The convex array is an array of any one structure or combination of multiple structures of a hemispherical convex structure, a pyramid convex structure, a cone convex structure, a prism convex structure, a circular truncated cone convex structure and a prismatic truncated cone convex structure.
The bulge array is a plurality of bulge arrays distributed annularly.
The thickness of the organic material of the 2 nd layer is greater than the height of the array of bumps and less than or equal to 3 times the height of the array of bumps.
The plurality of piezoresistive films are four piezoresistive films with equal areas.
The tactile sensor is provided with one or more of the following configurations:
the organic polymer film material of the layer 1 is FEP, PET or PTFE;
the conductive material of the 1 st layer is copper, silver or aluminum, and the thickness of the conductive material is 2-200 micrometers;
the organic material of the 2 nd layer is PDMS or ecoflex;
the organic polymer film material of the 3 rd layer is PET;
the material of the insulating film of the 4 th layer is PDMS or ecoflex;
the material of the piezoresistive film on the 4 th layer is laser-induced porous graphene or a carbon nano tube;
the piezoresistive region of the piezoresistive film of the 4 th layer is a serpentine-shaped pattern which is bent;
the material of the circular truncated cone structure of the 5 th layer is PDMS or ecoflex.
The utility model discloses following beneficial effect has:
the utility model provides a but simultaneous measurement space power and gliding sense of slipping sensor should touch the sense of slipping sensor including the 5 layers of structures that closely assemble together, wholly be a "seam" font structure, touch the sense of slipping sensor for current, the utility model discloses a touch the sense of slipping sensor and whether can discern and can also measure gliding direction and gliding speed on taking place gliding basis to can measure the space power that acts on the sensor, need not carry out more complicated aftertreatment to the acquisition data, information feedback time delay nature is low. The utility model discloses a preparation of touching and slipping sense sensor is got up simply, is suitable for industry large-scale production.
Drawings
Fig. 1 is a schematic two-dimensional cross-sectional view of a tactile and slide sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a tactile and slide sensor according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the force deformation of the tactile and slip sensation sensor according to an embodiment of the invention.
Detailed Description
The embodiments of the present invention will be described in detail below. It should be emphasized that the following description is merely exemplary in nature and is not intended to limit the scope of the invention or its application.
Referring to fig. 1 and 2, in an embodiment, a tactile and sliding sensor includes a 5-layer structure closely combined together, in which, in order from bottom to top, the 1 st layer is an organic polymer film 1 whose bottom surface is covered with a conductive material, the 2 nd layer is an organic material 2 whose center has a groove, an opening of the groove faces the 1 st layer and a protrusion array whose height is equal to the depth of the groove is uniformly distributed inside the groove, a region of the 2 nd layer except the groove is closely connected with the 1 st layer, the protrusion array inside the groove is in contact with the 1 st layer surface and is separated when the sensor is subjected to a shearing force, the 3 rd layer is an organic polymer film 3, the 4 th layer is an insulating film 4, a plurality of piezoresistive films are uniformly distributed on the upper surface of the insulating film 4, the 5 th layer is a circular truncated cone structure 5 whose upper bottom surface is smaller than the lower bottom surface, the layer 1 and the layer 3 are electrets, and the geometric center of the upper surface of the organic material of the layer 2, the geometric center of the organic polymer film of the layer 3, the distribution centers of the piezoresistive films of the layer 4 and the circle center of the circular truncated cone structure of the layer 5 are aligned.
In a preferred embodiment, the groove is a circular groove, and the layer 3 is a circular organic polymer film.
In a more preferred embodiment, the diameter of the circular organic polymer thin film of the 3 rd layer is not greater than the diameter of the circular groove of the 2 nd layer.
In a preferred embodiment, the protrusion array is an array of any one or a combination of a hemispherical protrusion structure, a pyramidal protrusion structure, a conical protrusion structure, a prismatic protrusion structure, a circular truncated cone protrusion structure and a truncated pyramid protrusion structure.
In a preferred embodiment, the array of projections is a multiple of an annularly distributed array of projections.
In a preferred embodiment, the thickness of the organic material of the 2 nd layer is greater than the height of the array of bumps and less than or equal to 3 times the height of the array of bumps.
In a preferred embodiment, the plurality of piezoresistive membranes is four piezoresistive membranes of equal area.
In a preferred embodiment, the tactile sensor is provided with one or more of the following configurations:
the organic polymer film material of the layer 1 is FEP, PET or PTFE;
the conductive material of the 1 st layer is copper, silver or aluminum, and the thickness of the conductive material is 2-200 micrometers;
the organic material of the 2 nd layer is PDMS or ecoflex;
the organic polymer film material of the 3 rd layer is PET;
the material of the insulating film of the 4 th layer is PDMS or ecoflex;
the material of the piezoresistive film on the 4 th layer is laser-induced porous graphene or a carbon nano tube;
the piezoresistive region of the piezoresistive film of the 4 th layer is in a serpentine pattern;
the material of the circular truncated cone structure of the 5 th layer is PDMS or ecoflex.
When a sliding object is in contact with the 5 th layer of circular truncated cone structure of the tactile and slip sensor, the circular truncated cone structure is laterally bent, as shown in fig. 3, because the protruding array in the groove of the 2 nd layer of structure is not adhered to the 1 st layer of structure, the film above the protruding array is deformed along with the lateral bending of the circular truncated cone structure, so that the distance between the electret materials of the 1 st layer and the 3 rd layer is changed, and induced charges are electrostatically induced in the conductive material on the bottom surface of the electret film of the 1 st layer. The current generated by the conductive material is measured by a test instrument, and the processor calculates the movement speed of the sliding object according to the peak value of the measured current signal. Preferably, since the groove in the layer 2 structure is circular, the groove has the same response to sliding in all directions, and the sliding direction has no influence on the peak value of the current signal, thereby reducing the complexity of subsequent data processing.
When a space force acts on the 5 th layer circular truncated cone structure of the tactile and sliding sensor, the resistance values of the plurality of piezoresistive films on the 4 th layer are changed. Due to the presence of the array of protrusions within the grooves of the layer 2 structure, the plurality of piezoresistive membranes have unequal amounts of deformation under tangential forces, resulting in their unequal amounts of resistance change. The resistance value change rate of each piezoresistive film is measured through a testing instrument, and the processor calculates the magnitude of the x, y and z three-axis components of the space force according to the measured resistance value change rate, so that the total magnitude and direction of the space force are obtained. When sliding occurs, an acting force is generated on the circular truncated cone, and the sliding direction of the sliding object can be calculated according to the measured resistance values of the 4 th-layer multiple piezoresistive films.
A method of making said tactile sensor comprising the steps of:
1) firstly, preparing two dies, wherein the upper surface of one die is of a groove structure, the inner bottom surface of a groove is provided with a boss, the height of the boss is smaller than the depth of the groove, the upper surface of the boss is provided with a small groove array which is uniformly distributed, and the depth of the small groove is equal to the height of the boss; the upper surface of the other die is of a circular truncated cone groove structure, wherein the diameter of a lower bottom surface circle of the circular truncated cone groove is smaller than that of an upper bottom surface circle of the circular truncated cone groove;
2) respectively manufacturing a 2 nd layer structure and a 5 th layer structure by using the two molds;
3) manufacturing a layer 4 structure with a piezoresistive film on the upper surface;
4) bonding the lower bottom surface of the 2 nd layer structure with the upper bottom surface of the 1 st layer structure with the conductive material adhered to the lower bottom surface;
5) manufacturing a 3 rd layer structure, aligning and bonding the 3 rd layer structure with the upper bottom surface of the structure manufactured in the step 4), and aligning and bonding the lower surface of the 4 th layer structure manufactured in the step 3) with the upper surface of the 3 rd layer structure and the part of the upper bottom surface of the 2 nd layer structure which is not shielded by the 3 rd layer structure;
6) manufacturing a lead on the piezoresistive film of the layer 4 structure, aligning the lower bottom surface of the layer 5 structure manufactured in the step 2) with the manufactured whole structure, and then bonding the lower bottom surface and the manufactured whole structure together.
The features, utilities, and manufacture of particular embodiments of the invention will be further described with reference to the accompanying drawings.
A particular embodiment of a tactile sensation sensor includes: including 5 layer structures, according to from the order up down, 1 st layer is a bottom surface cover conducting material's organic polymer film, 2 nd layer has a circular recess and the inside evenly distributed of recess is the organic material of the protruding annular array of hemisphere that the radius equals the groove depth for the center, 1 st, 2 the region except that circular recess of layer all zonulae occludens is in the same place, 3 rd layer is a centre of a circle and the circular organic polymer film of 2 nd layer organic material upper surface geometric centre coincidence, 4 th layer is an insulating film, and insulating film upper surface evenly distributed has four constant area piezoresistive films, 5 th layer is the round platform structure of centre of a circle and the coincidence of the circular organic polymer film centre of a circle of 3 rd layer. The materials used in the sensor are all flexible materials. The organic high molecular material of the layer 1 is screened from the material which can be converted into electret by a corona polarization method; the hemispherical convex structure on the 2 nd layer can also be replaced by a pyramid convex structure, a cone convex structure, a prism convex structure, a circular truncated cone convex structure, a prismatic truncated cone convex structure or random combination distribution of a plurality of different structures with the height equal to the depth of the circular groove; preferably, the thickness of the 2 nd layer of organic material is greater than the radius of the hemispherical convex and less than or equal to 3 times the radius of the hemispherical convex; wherein the organic polymer film of layer 3 is screened from a material that can be converted to electrets by corona polarization and has a relatively high surface energy; preferably, the diameter of the circular organic polymer film of the 3 rd layer is smaller than or equal to that of the circular groove in the 2 nd layer structure; wherein, the four piezoresistive films of the 4 th layer are not overlapped and the distribution centers of the four piezoresistive films are overlapped with the center of the circular organic polymer film of the 3 rd layer. The 5-layer structure is aligned in sequence and tightly combined together to form a tactile and sliding sensor which is of a herringbone structure, and the size is from micron level to centimeter level.
The sensor can measure the space force and the sliding at the same time, the sliding speed can be calculated by measuring the peak value of the short-circuit current generated by the electrostatic induction, and the magnitude and the direction of the space force acting on the sensor can be calculated by measuring the variation of the resistance values of the four piezoresistive electrodes. During measurement, when the sliding object is in contact with the circular truncated cone structure of the device, the circular truncated cone structure is bent laterally, the distance between the two layers of electret materials is changed, induced charges are induced in the conductive material on the bottom surface of the 1 st layer of electret film in an electrostatic induction mode, the conductive material is connected with a testing instrument, and the sliding speed of the sliding object can be calculated according to the peak value of a measured current signal. When static space force acts on the circular truncated cone structure of the device, the resistance values of the four piezoresistive films with equal areas change, and the magnitude of the three-axis components of x, y and z of the space force can be calculated by measuring the change rate of the resistance values of the four piezoresistive films, so that the total magnitude and direction of the space force can be obtained. The utility model discloses a whether touch and slide sense sensor can also measure gliding direction and gliding speed on can discerning taking place gliding basis to can measure the space power that acts on the sensor, need not carry out more complicated aftertreatment to acquireing data, information feedback time delay nature is low.
Preparation example:
in this embodiment, a tactile and sliding sensor capable of measuring a spatial force and a sliding simultaneously is manufactured by some devices, and the method specifically includes the following steps:
1) the laser three-dimensional printing method comprises the steps of firstly printing two dies through a laser 3D printer, wherein the upper surface of one die is of a rectangular groove structure, the inner bottom surface of a rectangular groove is provided with a circular boss structure, the circle center of the circular boss structure is coincident with the geometric center of the circular boss structure, the height of the circular boss is smaller than the depth of the rectangular groove, the upper surface of the circular boss is provided with a hemispherical groove annular array which is uniformly distributed, and the radius of the hemispherical groove is equal to the height of the circular boss. The upper surface of the other die is of a circular truncated cone groove structure, wherein the diameter of a lower bottom surface circle of the circular truncated cone groove is smaller than that of an upper bottom surface circle of the circular truncated cone groove. Cleaning the two molds with deionized water, and drying with nitrogen;
2) mixing a PDMS prepolymer and a curing agent on an electronic scale according to a ratio of 10:1, pouring the mixed PDMS into a mold after fully stirring, carrying out defoaming treatment for three times by using a vacuum pump so as to remove redundant air in the PDMS, putting the mold into an oven, baking for 1 hour and 30 minutes at 80 ℃, and taking two cured PDMS structures (a 2 nd layer structure and a 5 th layer structure) out of the mold;
3) an aluminum alloy die is processed by using a numerical control machine tool, the upper surface of the die is provided with a rectangular groove structure, the depth of the groove is 410 micrometers, and a layer of 50-thick DuPont Polyimide (PI) film is flatly pasted on the inner bottom surface of the rectangular groove by using 60-micrometer-thick double-sided adhesive tape. And cleaning the surface of the PI film by using absolute ethyl alcohol and deionized water. Placing the mold in CO2In the infrared laser engraving machine, the height of a laser transmitter is adjusted to enable the upper surface of the PI film to be just located at the focal position of a laser light path, the use power is 5W, and the scanning speed is 100 mm/s. Pouring PDMS mixed with n-hexane according to the mass ratio of 1:1 into an aluminum alloy mold, completely covering laser-induced graphene by the PDMS, and flattening the PDMS higher than the mold part by using a glass rod. Placing the aluminum alloy mold on a hot plate in a fume hood, standing for 8 hours at room temperature to allow PDMS to fully penetrate into the porous structure of the laser-induced graphene, heating for 1 hour and 30 minutes at 80 ℃ to fully cure the PDMS, and removing the PDMS from the surface of the PI film to obtain the PDMS film (layer 4 structure) with the LIG laser-induced graphene transferred.
4) And (3) bonding the lower bottom surface of the PDMS structure (the layer 2 structure) with the circular groove prepared in the step (2) with the upper bottom surface of the FEP film (the layer 1 structure) with the copper tape with the same area adhered to the lower bottom surface by using an annular double-sided adhesive tape.
5) Using CO2Cutting a round PET film by an infrared laser engraving machine, aligning and bonding the round PET film (the 3 rd layer structure) with the upper bottom surface of the structure manufactured in the step 4), and bonding the side, which is not exposed, of the LIG of the PDMS film (the 4 th layer structure) which is manufactured in the step 3) and is transferred with the LIGIs aligned with and bonded to the upper surface of the circular PET film (layer 3 structure) and the upper bottom surface of the PDMS structure having a circular groove (layer 2 structure) which is not covered by the PET film.
6) Uniformly coating silver paste at the LIG lead interface of the PDMS surface (the 4 th layer structure) on the side, exposed out of the LIG, of the manufactured structure in the step 5), inserting silver wires into the silver paste to serve as leads, putting the whole structure into an oven, baking for 40 minutes at 120 ℃ to fully cure the silver paste, pouring a layer of uncured PDMS on the PDMS surface on the side, exposed out of the LIG, using the layer of PDMS to align and bond the lower bottom surface of the round platform PDMS structure (the 5 th layer structure) manufactured in the step 2) with the manufactured whole structure, putting the round platform PDMS structure into the oven, and baking for 1 hour and 30 minutes at 80 ℃ to finish the manufacturing of the sensor.
The foregoing is a more detailed description of the present invention, taken in conjunction with the specific/preferred embodiments thereof, and it is not intended that the invention be limited to the specific embodiments shown and described. For those skilled in the art to which the invention pertains, a plurality of alternatives or modifications can be made to the described embodiments without departing from the concept of the invention, and these alternatives or modifications should be considered as belonging to the protection scope of the invention.
Claims (8)
1. A tactile and sliding sensor is characterized by comprising 5 layers of structures which are tightly combined together, wherein the 1 st layer is an organic polymer film with the bottom surface covered with a conductive material, the 2 nd layer is an organic material with a groove at the center, the opening of the groove faces the 1 st layer, a protrusion array with the height equal to the depth of the groove is uniformly distributed in the groove, the region of the 2 nd layer except the groove is tightly connected with the 1 st layer, the protrusion array in the groove is in contact with the surface of the 1 st layer and is separated when the sensor is subjected to shearing force, the 3 rd layer is an organic polymer film, the 4 th layer is an insulating film, a plurality of piezoresistive films are uniformly distributed on the upper surface of the insulating film, the 5 th layer is a circular truncated cone structure with the upper bottom surface smaller than the lower bottom surface, and the 1 st layer and the 3 rd layer are electrets, the geometric center of the upper surface of the organic material of the 2 nd layer, the geometric center of the organic polymer film of the 3 rd layer, the distribution center of the piezoresistive films of the 4 th layer and the circle center of the circular truncated cone structure of the 5 th layer are aligned.
2. The tactile sensor of claim 1, wherein the grooves are circular grooves and the layer 3 is a circular organic polymer film.
3. The tactile-slip sensor according to claim 2, wherein the diameter of the circular organic polymer thin film of the 3 rd layer is not larger than the diameter of the circular groove of the 2 nd layer.
4. The tactile-slip sensor according to any one of claims 1 to 3, wherein the array of protrusions is an array of any one or a combination of structures of a hemispherical protrusion structure, a pyramidal protrusion structure, a conical protrusion structure, a prismatic protrusion structure, a circular truncated cone protrusion structure, and a prismatic protrusion structure.
5. The tactile-slip sensor according to any one of claims 1 to 3, wherein the array of projections is a multiple annularly distributed array of projections.
6. The tactile slip sensor according to any one of claims 1 to 3, wherein the thickness of the organic material of the 2 nd layer is greater than the height of the array of projections and not greater than 3 times the height of the array of projections.
7. A tactile-slip sensor according to any of claims 1 to 3, wherein said plurality of piezoresistive membranes are four piezoresistive membranes of equal area.
8. A tactile sensor according to any of claims 1 to 3, wherein one or more of the following configurations are provided:
the organic polymer film material of the layer 1 is FEP, PET or PTFE;
the conductive material of the 1 st layer is copper, silver or aluminum, and the thickness of the conductive material is 2-200 micrometers;
the organic material of the 2 nd layer is PDMS or ecoflex;
the organic polymer film material of the 3 rd layer is PET;
the material of the insulating film of the 4 th layer is PDMS or ecoflex;
the material of the piezoresistive film on the 4 th layer is laser-induced porous graphene or a carbon nano tube;
the piezoresistive region of the piezoresistive film of the 4 th layer is a zigzag pattern;
the material of the circular truncated cone structure of the 5 th layer is PDMS or ecoflex.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108395A (en) * | 2019-06-14 | 2019-08-09 | 清华大学深圳研究生院 | A kind of tactile and slip sensor and preparation method thereof |
| CN117147040A (en) * | 2023-11-01 | 2023-12-01 | 中北大学 | Flexible conformal bionic whisker sensor |
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2019
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110108395A (en) * | 2019-06-14 | 2019-08-09 | 清华大学深圳研究生院 | A kind of tactile and slip sensor and preparation method thereof |
| CN110108395B (en) * | 2019-06-14 | 2024-01-16 | 清华大学深圳研究生院 | Touch and slide sensor and preparation method thereof |
| CN117147040A (en) * | 2023-11-01 | 2023-12-01 | 中北大学 | Flexible conformal bionic whisker sensor |
| CN117147040B (en) * | 2023-11-01 | 2024-01-26 | 中北大学 | Flexible conformal bionic whisker sensor |
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