CN111510015B - Friction nano generator with friction layer double-sided microstructure and preparation method thereof - Google Patents
Friction nano generator with friction layer double-sided microstructure and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a friction nano generator with a friction layer double-sided microstructure and a preparation method thereof, and is characterized in that the surface of a first friction layer or a second friction layer of the friction nano generator is provided with a microstructure, and the interface between a first electrode layer and the first friction layer or between a second electrode layer and the second friction layer is provided with a microstructure; the first friction layer and the second friction layer are arranged opposite to each other, and under the action of external force, the first friction layer and the second friction layer rub against each other to generate electric energy between the first electrode layer and the second electrode layer; the preparation of the friction nano generator comprises the following steps: and etching microstructures on the electrode, the friction layer and the bonding interface. Compared with the prior art, the friction layer surface and the interface between the electrode layer and the friction layer have microstructures, can generate higher and more stable electric signal output under the action of external mechanical force, and has the advantages of simple and repeatable preparation process, adjustable size, low equipment requirement and low manufacturing cost.
Description
Technical Field
The invention relates to the technical field of friction nano power generation, in particular to a friction nano power generator with a friction layer double-sided microstructure and a preparation method thereof.
Background
Currently, most electronic devices are powered by batteries, and with the development of internet of things, the electronic devices are gradually miniaturized, multifunctional and mobile. There are many difficulties in using batteries, such as environmental pollution, and difficulty in recycling. Therefore, there is an urgent need to find a suitable energy source for electronic devices, and collecting energy from renewable natural environments is an effective way to alleviate energy crisis. A friction nano-generator (TENG) is an energy device that can convert mechanical energy into electrical energy, including but not limited to wind energy, human motion energy, ocean energy, mechanical energy triggering/vibration, and the like. The basic working mechanism of the portable electronic device is the coupling effect of friction electrification and static induction, and the portable electronic device has the advantages of high energy efficiency at low frequency, small volume, low cost, multiple working modes, multiple materials for selection, wide application field and the like, and can be applied to driving the wearable electronic device.
In the friction nano generator in the prior art, although a material with a high dielectric constant is doped in a dielectric layer, surface patterning is performed, and functional groups or ions are injected, so that the charge density and the transfer efficiency of the friction nano generator are improved. Most of the methods only improve the friction layer, but the electrical property of TENG can be improved, but the manufacturing process is complex, the cost is high, the large-scale industrial production can not be realized, and the electrical property is stable.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and design a friction nano-generator with a friction layer double-sided microstructure and a preparation method thereof, wherein an electrode layer and a friction layer interface are adopted, and the friction layer or the electrode layer is provided with the microstructure, so that the charge density and the transfer efficiency of the friction nano-generator are greatly improved, the output electric energy of the friction nano-generator is remarkably increased, the preparation process is simple and repeatable, the size is adjustable, the equipment requirement and the preparation cost are low, and under the action of an external mechanical force, a higher and more stable electric signal output can be generated, the micro-electronic device can be driven to work better, and the friction nano-generator has a good application prospect in the microelectronics field.
The purpose of the invention is realized in the following way: the friction nano generator with the friction layer double-sided microstructure comprises a first power generation component and a second power generation component, wherein the first power generation component consists of a first electrode layer and a first friction layer, and the second power generation component consists of a second electrode layer and a second friction layer; the upper surface and the lower surface of the first friction layer of the first power generation component are respectively provided with a microstructure, and the interface of the first electrode layer and the first friction layer is respectively provided with a microstructure; the first power generation component is an electrode layer and a friction layer which are used as the first electrode layer only; the first friction layer of the first power generation component and the second friction layer of the second power generation component can be divided into a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or a friction nano-generator in an independent layer mode according to the contact arrangement of the two friction layers.
The friction nano generator in the vertical contact-separation mode is characterized in that a first friction layer of a first power generation component and a second friction layer of a second power generation component are vertically arranged in a face-to-face contact mode, and when vertical external force is applied to the periodicity of a friction surface, the first friction layer and the second friction layer are periodically contacted and separated, so that alternating current signals are generated between the first electrode layer and the second electrode layer.
The friction nano generator in the horizontal sliding mode is characterized in that a first friction layer of a first power generation component and a second friction layer of a second power generation component are in face-to-face contact, and the friction nano generator is used as a periodic horizontal external force for a friction surface, and the first friction layer and the second friction layer slide relatively to generate friction charges, so that alternating current signals are generated between the first electrode layer and the second electrode layer.
The friction nano generator in the single electrode mode is characterized in that a first power generation component is composed of only a first friction layer, the first friction layer of the first power generation component and a second friction layer of the second power generation component are vertically and face to face contacted, the second electrode layer is grounded through an external load, and when the vertical external force is applied to the periodicity of the friction surface, the first friction layer and the second friction layer are periodically contacted and separated, and electrons flow between the ground and the second electrode layer through the external load, so that alternating current signals are generated.
The friction nanometer generator of independent layer mode, first power generation part is only two first electrode layers constitution, and the second power generation part sets up in first power generation part top, and the second friction layer is face-to-face contact setting with two first electrode layers respectively, as the periodic horizontal external force that is used for the friction surface for produce alternating current signal between left and right two first electrode layers.
The microstructure is a rough structure which is prepared by a chemical etching process and is 1-200 micrometers, 1 nanometer-1 micrometer or a combination of the two.
The preparation method of the friction nano generator with the friction layer double-sided microstructure is characterized by comprising the following steps of:
step 1: preparation of electrodes
Cutting a metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into a first electrode layer according to design requirements, and polishing the first electrode layer to prepare a second electrode layer of the second power generation component.
Step 2: preparation of microstructures on electrodes
And (3) carrying out chemical etching on the upper surface of the second electrode layer by using a microstructure of 1-200 micrometers, 1 nanometer-1 micrometer or a combination of the two, carrying out ultrasonic cleaning by using deionized water for 1-2 minutes after etching, and drying by using nitrogen to obtain the electrode layer with the microstructure on the surface.
Step 3: preparation of protective layer
And (2) at room temperature, placing the lower surface of the electrode layer with the microstructure on the surface, which is prepared in the step (2), on a prepolymer mixed by a high-molecular polymer and a curing agent, and then curing the electrode layer in an oven at 60-80 ℃ for 1-1.5 h to obtain the electrode protection layer.
Step 4: arrangement of friction layers
And (3) spin-coating a prepolymer mixed by a high-molecular polymer and a curing agent on the upper surface of the electrode layer with the microstructure on the surface of the step (3), wherein the obtained coating is a friction layer.
Step 5: pre-curing of friction layers
And (3) vacuumizing the friction layer prepared in the step (4) for 20-30 min, and treating the friction layer in an oven with the temperature of 60-80 ℃ for 20-25 min to obtain the pre-cured high polymer coating.
Step 6: preparation of Friction layer
And (3) attaching the microstructure of the other electrode layer prepared in the step (2) to the pre-cured friction layer in the step (5), pressing a weight with the mass of 1.5-2 KG, and curing the microstructure in an oven with the temperature of 60-80 ℃ for 1-1.5 h to obtain the cured friction layer.
Step 7: preparation of microstructures on Friction layer
And (3) etching the other electrode layer in the step (6) by adopting chemical corrosion, ultrasonically cleaning the electrode layer by deionized water for 1-2 min after the electrode layer is completely corroded, and drying the electrode layer by nitrogen to obtain the friction layer with the microstructure on the surface.
Step 8: preparation of a second Power generating component
And (3) stripping the electrode protection layer in the step (7) from the electrode layer with the microstructure on the surface to prepare the second power generation component or the first power generation component with the microstructure on the bonding interface, wherein the electrode layer with the microstructure on the surface is the second or the first electrode layer, and the friction layer with the microstructure on the surface is the second or the first friction layer.
Step 9: preparation of first power generating component
And attaching a first friction layer to the first electrode layer to form a first power generation component.
Step 10: preparation of friction nano generator
And (3) conducting wires and conductive adhesive tapes are used for conducting wires to the first electrode layer in the first power generation component and the second electrode layer in the second power generation component, so that the friction nano-generator with the double-layer structure is manufactured.
The chemical etching adopts hydrochloric acid, sulfuric acid, nitric acid, ferric chloride, potassium ferricyanide or oxalic acid solution.
The high molecular polymer is a polymer material which can be solidified by polydimethylsiloxane, polymethyl methacrylate, polyvinyl acetate, polyacrylamide or polyvinylidene fluoride.
The first friction layer and the second friction layer are all metal materials which can generate friction electrification effect, or polyimide, polyvinyl chloride, polydimethylsiloxane, polytetrafluoroethylene high polymer materials, wood, silk or paper, but the first friction layer and the second friction layer are made of different materials so as to ensure that the friction layers have different electron losing capacities.
Compared with the prior art, the invention has higher charge density and transfer efficiency, and the output electric energy is increased by hundreds of times, so that the invention has the advantages of simple and repeatable preparation process, adjustable size, low equipment requirement and preparation cost, higher and more stable electric signal output under the action of external mechanical force, better driving of micro electronic devices, and good application prospect in the field of microelectronics.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the operation mode of the present invention;
FIG. 3 is a schematic diagram of the operation of the present invention;
FIG. 4 is a flow chart of the preparation of the present invention;
fig. 5 is a schematic structural view of embodiment 1;
FIG. 6 is a graph of the test results of example 1;
FIG. 7 is a schematic diagram of the structure of embodiment 2;
FIG. 8 is a graph of the test results of example 2.
Detailed Description
Referring to fig. 1-2, the invention comprises a first power generation component I composed of a first electrode layer 11 and a first friction layer 16, and a second power generation component II composed of a second electrode layer 13 and a second friction layer 14, wherein a microstructure 15 is arranged on the interface of the second electrode layer 13 and the second friction layer 14; the surface of the second friction layer 14 is provided with a microstructure 15; the microstructure 15 is arranged on the interface of the first electrode layer 11 and the first friction layer 16; the surface of the first friction layer 16 is provided with a microstructure 15; the first friction layer 16 of the first power generation component I and the second friction layer 14 of the second power generation component II may be combined into a friction nano-generator in a separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode; the first friction layer 16 and the second friction layer 14 are disposed face to face, and an electric signal is generated between the first electrode layer 11 or the second electrode layer 13 during mutual friction; the first friction layer 16 and the second friction layer 14 are disposed to face each other, and an electric signal is generated between the first electrode layer 11 or the second electrode layer 13 during mutual friction.
Referring to fig. 1a, the surface of the second friction layer 14 has a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 has a microstructure 15.
Referring to fig. 1b, the first friction layer 16 in the first power generating component I has a microstructure 15 on its surface, the interface between the first electrode layer 11 and the first friction layer 16 has a microstructure 15, the second friction layer 14 in the second power generating component II has a microstructure 15 on its surface, and the interface between the second electrode layer 13 and the second friction layer 14 has a microstructure 15.
The first friction layer 16 of the first power generation component I and the second friction layer 14 of the second power generation component II of the present invention may be combined into a friction nano-generator of a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode, which specifically works as follows:
vertical contact-separation mode
Referring to fig. 2a, a friction nano generator in a vertical contact-separation mode having a microstructure on both sides of a friction layer, wherein the surface of a second friction layer 14 has a microstructure 15, and the interface between a second electrode layer 13 and the second friction layer 14 has the microstructure 15. The conductor material in the first power generation element I may serve as both the first electrode layer 11 and the first friction layer 16. The first friction layer 16 and the second friction layer 14 are disposed vertically in a face-to-face relationship, and the periodic mechanical force can be applied to periodically bring the first friction layer 16 into and out of contact with the second friction layer 14 to create a potential difference. Under the driving of the potential difference, electrons flow through the external load R to cancel the potential difference of the frictional charges, thereby generating an alternating current signal between the first electrode layer 11 and the second electrode layer 13.
(two) horizontal sliding mode
Referring to fig. 2b, the friction nano generator is in a horizontal sliding mode with a double-sided microstructure of the friction layer, the surface of the second friction layer 14 is provided with a microstructure 15, and the interface between the second electrode layer 14 and the second friction layer 13 is provided with a microstructure 15. The conductor material in the first power generation element I may serve as both the first electrode layer 11 and the first friction layer 16. The first friction layer 16 and the second friction layer 14 are disposed face to face, and the first friction layer 16 and the second friction layer 14 slide relatively under the drive of an external force parallel to the horizontal direction of the friction film, and frictional charge is generated by the electrification of sliding friction. The periodic variation of the contact area between the two friction surfaces results in a lateral separation of the charge centers, thereby creating a potential difference. Under the driving of the potential difference, electrons flow through the external load R to cancel the potential difference of the frictional charges, thereby generating an alternating current signal between the first electrode layer 11 and the second electrode layer 13.
(III) Single electrode mode
Referring to fig. 2c, the friction nano generator is a single-electrode mode friction nano generator with a friction layer double-sided microstructure, the surface of the second friction layer 14 is provided with a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 is provided with the microstructure 15. The first power generating component I in this mode of operation is only the first friction layer 16 (i.e. without the first electrode layer 11). The first friction layer 16 and the second friction layer 14 are vertically disposed face to face, and the second power generation layer 13 in the second power generation section II is grounded through the external load R. When an external force acts on the generator to enable the two friction layers to be in contact with each other, the two friction layers are oppositely charged, and when the external force is released and the two friction layers are separated, electrons flow from the second electrode layer 13 to the ground through an external load R to enable the second electrode layer 13 to be positively charged in order to balance the charges on the surface of the second friction layer 14. After the second friction layer 14 is in charge balance with the second electrode layer 13, electrons do not flow. When an external force is re-applied to the generator, the charge balance is broken and electrons flow from the ground to the second electrode layer 13 through the external load R, thereby generating an alternating current signal.
(IV) independent layer mode
Referring to fig. 2d, the friction nano generator is in an independent layer mode with a microstructure on both sides of the friction layer, the surface of the second friction layer 14 is provided with a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 is provided with a microstructure 15. The first power generating component I in this mode of operation is only two first electrode layers 11 (i.e. without the first friction layer 16). The second power generation component II is disposed above the first power generation component I, and the second friction layer 14 and the first electrode layer 11 are disposed vertically and face to face, and under the driving of an external force parallel to the horizontal direction of the friction film, the second friction layer 14 and the first electrode layer 11 slide relatively to generate friction charges. When the second friction layer 14 is fully overlapped with the left electrode of the first electrode layer 11, positive charges in all loops are attracted to the upper surface of the left electrode, and when the second friction layer 14 slides to the right, positive charges in the loops will flow from the left electrode to the right electrode of the first electrode layer 11 by the load R. When the second friction layer 14 is fully coincident with the right electrode of the first electrode layer 11, all positive charges will flow into the right electrode. When the second frictional layer 14 moves to the left electrode again, positive charges of the right electrode flow into the left electrode, thereby generating an alternating current signal between the left and right electrodes of the first electrode layer 11.
The operation of the vertical contact-separation mode friction nanomachine is described in further detail below:
referring to fig. 3 and a, the difference in electron withdrawing ability between the first friction layer 16 and the second friction layer 14 is due to the different materials, and thus the first friction layer 16 is exemplified herein as having a higher electron withdrawing ability than the second friction layer 14. When an external force acts on the generator, the two friction layers are in contact with each other, electrons flow from the second friction layer 14 to the first friction layer 16, so that the first friction layer 16 is negatively charged, the second friction layer 14 is positively charged, and the charge amount is the same, and no electric potential is generated between the two electrode layers because no electric charges are generated on the surfaces of the first electrode layer 11 and the second electrode layer 13.
Referring to fig. 3 and b, when the external force is released, the first friction layer 16 and the second friction layer 14 tend to return to their original positions due to the elasticity of the friction material, and during the separation process, the surface of the first electrode layer 11 and the surface of the second electrode layer 13 are respectively positively and negatively charged due to electrostatic induction, so that a potential difference is formed between the two electrodes, which drives electrons to flow from the first electrode layer 11 to the second electrode layer 13, and a forward transient current is generated.
Referring to fig. 3, c, when the first power generation element I and the second power generation element II are completely separated, charge accumulation reaches an equilibrium state, at which no current flows between the two electrode layers.
Referring to fig. 3 to d, when an external force is reloaded, since the two power generating components are close to each other, the first electrode layer 11 has a higher potential than the second electrode layer 13, so that electrons flow from the second electrode layer 13 to the first electrode layer 11, thereby generating a reverse instantaneous current. When the first friction layer 16 is in full contact with the second friction layer 14, all of the induced charge is neutralized, and no current flows between the two electrode layers (as shown in fig. 3 a).
Referring to fig. 4, the present invention takes the case that the surface of the second friction layer has a microstructure, and the interface between the second electrode layer and the second friction layer has a microstructure as an example, and the preparation method of the present invention is further described in detail, which comprises the following specific steps:
s1, cutting a metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into an electrode 11 (or an electrode of a first electrode layer) according to design requirements, and polishing the electrode to obtain a polished electrode 12.
S2, etching the polished electrode 12 obtained in the step S1 by adopting a chemical etching process; the obtained electrode was ultrasonically cleaned with deionized water for 1 to 2 minutes and dried with nitrogen gas, to obtain an electrode 13 having a microstructure 15 on the surface (i.e., a second electrode layer).
S3, mixing the high-molecular polymer with a curing agent at room temperature, placing the electrode 13 with the microstructure 15 on the surface obtained in the step S2 on the surface of the prepolymer mixed by the high-molecular polymer and the curing agent, placing the prepolymer into an oven with the temperature of 60-80 ℃ for 1-1.5 hours for complete curing treatment, taking the high-molecular polymer coating layer below the electrode 13 with the microstructure 15 on the surface as a protective electrode layer 14-1, and protecting the electrode from being etched in the subsequent chemical etching process.
And S4, spin-coating the prepolymer mixed by the high-molecular polymer prepolymer and the curing agent on the surface of the electrode 13 with the microstructure 15 on the surface, which is obtained in the step S3.
S5, carrying out vacuumizing treatment on the surface of the electrode 13 with the microstructure 15 on the surface, obtained in the step S4, attached with a high polymer coating for 20-30 min, so that no bubbles exist in the coating, and then putting the coating together in an oven with the temperature of 60-80 ℃ for 20-25 min for pre-curing treatment.
S6, covering the electrode 13 with the microstructure 15 on the surface obtained in the step S2 on the pre-cured high polymer coating obtained in the step S5, pressing the electrode 13 with the microstructure 15 on the surface by using a weight with the mass of 1.5-2 KG, and then putting the electrode 13 together into an oven with the temperature of 60-80 ℃ for 1-1.5 h to carry out complete curing treatment.
And S7, chemically etching the electrode 13 with the microstructure 15 on the surface covered on the completely cured high polymer coating until the electrode is completely etched, then ultrasonically cleaning the electrode with deionized water for 1-2 min, and drying the electrode with nitrogen to obtain the high polymer coating with the microstructure 15 on the surface as the second friction layer 14.
And S8, stripping the solidified protective electrode layer 14-1 below the electrode 13 with the microstructure 15 on the surface to obtain the second power generation component II with the microstructure 15 on the surface of the second friction layer 14 and the microstructure 15 at the interface of the second electrode layer 13 and the second friction layer 14.
S9, attaching the other electrode 11 (namely the first electrode layer) to the first friction layer 16 to form a first power generation component I, wherein the first friction layer 16 is made of any material capable of generating a friction electrification effect, such as: gold, silver, copper, iron metal materials, or polyimide, polyvinyl chloride, polydimethylsiloxane, polytetrafluoroethylene high polymer materials, and wood, silk, paper. However, the first friction layer 16 and the second friction layer 14 should be made of different materials to ensure that the friction layers have different electron-withdrawing capability.
S10, conducting wires and conductive adhesive tapes are used for conducting wires 17 to the first electrode layer 11 in the first power generation component I and the second electrode layer 13 in the second power generation component II, and the friction nano-generator 18 with the double-layer structure is manufactured.
The invention is further illustrated by the following specific examples of two perpendicular contact-separation modes of bilayer microstructures.
Example 1
Referring to fig. 5, in the first power generation element I, an aluminum plate is selected as both the first electrode layer 11 and the first friction layer 16; in the second power generation member II, an aluminum plate was used as the second electrode layer 13, and Polydimethylsiloxane (PDMS) was used as the second friction layer 14. The PDMS as the second friction layer 14 and the aluminum plate surface as the second electrode layer 13 each have a microstructure 15. An aluminum plate simultaneously serving as an electrode and a friction layer was disposed face-to-face with PDMS serving as the first electrode layer 11 and the second friction layer 14 to rub against each other. The electric signal is generated between the electrode layers of the two aluminum plates, the area of the whole friction nano generator is 3cm multiplied by 3cm, and the specific preparation is as follows:
s1, cutting three aluminum plates with the thickness of 3cm multiplied by 200 mu m, polishing two of the aluminum plates with 800-mesh sand paper, and polishing with 2000-mesh sand paper until the surface of the aluminum plate has no metallic luster, wherein the other aluminum plate is a first electrode layer 11 in the first power generation component I, and the electrode layer is also used as a first friction layer 16 in the first power generation component I.
S2, placing the two polished aluminum plates in a 3M hydrochloric acid solution in a fume hood respectively, and chemically reacting for 6min at room temperature until the surfaces of the aluminum plates are black but not etched. And respectively ultrasonically cleaning the etched aluminum plate with deionized water for 2min, and drying with nitrogen to obtain the aluminum plate with the micrometer structure 15 on the surface, wherein one of the aluminum plates is used for preparing the micrometer structure on the surface of the second friction layer 14 and the other aluminum plate is used for preparing the micrometer structure on the surface of the second friction layer 13.
S3, mixing and stirring the PDMS prepolymer and the curing agent (SYLGARD 184) according to the mass ratio of 10:1 for 5min at room temperature, fully mixing the prepolymer and the curing agent, and vacuumizing for 25min to exhaust bubbles in the mixture.
S4, pouring a proper amount of PDMS into a plastic culture dish, placing the aluminum plate with the micrometer structure 15 prepared in the step S2 on the surface of the PDMS, and then placing the aluminum plate into an oven with the temperature of 60 ℃ for curing for 1h, so that the layer of PDMS below the aluminum plate is completely cured, and the electrode in the subsequent chemical etching process is protected from being etched.
S5, rotating for 10S at 700rpm by using a spin coater, then rotating for 30S at 900rpm, and spin-coating the mixture of PDMS and the curing agent prepared in the step S3 on the surface of the aluminum plate in the step S4 to obtain a PDMS coating with the thickness of 100um and uniformity.
And S6, vacuumizing the PDMS coating prepared in the step S5 for 25min, putting the PDMS coating above the aluminum plate in a vacuum state, and then, putting the PDMS coating into an oven with the temperature of 60 ℃ for curing for 20min, wherein the PDMS coating above the aluminum plate is in a semi-cured state.
And S7, covering the surface of the PDMS coating in the semi-cured state of the step S6 on the other aluminum plate with the micrometer structure 15 obtained in the step S2, pressing the PDMS coating above the aluminum plate by using a weight with the mass of 2KG, and then placing the aluminum plate into an oven with the temperature of 60 ℃ for curing for 1h, wherein the PDMS coating between the two aluminum plates is in a fully cured state.
And S8, placing the product obtained in the step S7 into a 4M hydrochloric acid solution to perform chemical reaction in a fume hood for 20min, so that the aluminum plate covered on the PDMS coating is completely etched, and the aluminum plate under the PDMS coating is not etched. The PDMS coating with the upper layer completely etched off the aluminum plate was ultrasonically cleaned with deionized water for 2min and dried with nitrogen gas, resulting in a PDMS coating with a microstructure 15 as the second friction layer 14.
And S9, peeling the PDMS coating serving as a protective layer below the aluminum plate from the aluminum plate, wherein the obtained aluminum plate with the micrometer structure 15 is the second electrode layer 13, and forms a second power generation component II with the second friction layer 14.
S10, conducting wires and conductive adhesive tapes are used for conducting wires on the aluminum plates of the first electrode layer 11 and the second electrode layer 13, and the friction nano generator with the friction layer double-sided microstructure is manufactured, wherein the surface of the second friction layer 14 is provided with the microstructure 15, and the interface between the electrode and the friction layer is provided with the microstructure 15.
Referring to fig. 6, the friction nano generator prepared by the method is subjected to related performance test and analysis, and the friction nano generator with the structure can output 300V to 160V and relatively stable alternating voltage under the conditions of an external frequency of 4HZ and a mechanical force of 37N.
Example 2
Referring to fig. 7, in the first power generation element I, an aluminum plate is selected as both the first electrode layer 11 and the first friction layer 16; in the second power generation member II, an aluminum plate was used as the second electrode layer 13, and Polydimethylsiloxane (PDMS) was used as the second friction layer 14. The PDMS as the second friction layer 14 and the aluminum plate surface as the second electrode layer 13 each have a microstructure 15. An aluminum plate simultaneously serving as an electrode and a friction layer was disposed face-to-face with PDMS serving as the first electrode layer 11 and the second friction layer 14 to rub against each other. The electric signal is generated between the electrode layers of the two aluminum plates, the area of the whole friction nano generator is 3cm multiplied by 3cm, and the specific preparation is as follows:
s1, cutting three aluminum plates with the thickness of 3cm multiplied by 200 mu m, polishing two of the aluminum plates with 800-mesh sand paper, and polishing with 2000-mesh sand paper until the surface of the aluminum plate has no metallic luster, wherein the other aluminum plate is a first electrode layer 11 in the first power generation component I, and the electrode layer is also used as a first friction layer 16 in the first power generation component I.
S2, placing the two polished aluminum plates in a 3M hydrochloric acid solution in a fume hood respectively, and chemically reacting for 6min at room temperature until the surfaces of the aluminum plates are black but not etched. Respectively ultrasonically cleaning the etched aluminum plate with deionized water for 2min, drying with nitrogen, putting one aluminum plate with the micrometer structure 15 into a beaker containing 400ml of deionized water, and putting the beaker into a baking oven with the temperature of 100 ℃ to be boiled for 1h to obtain the aluminum plate with the micro-nano composite structure 15 on the surface; another aluminum plate having a microstructure 15 is used to prepare the microstructure of the surface of the second friction layer 14.
S3, mixing and stirring the PDMS prepolymer and the curing agent (SYLGARD 184) according to the mass ratio of 10:1 for 5min at room temperature, fully mixing the prepolymer and the curing agent, and vacuumizing for 25min to exhaust bubbles in the mixture.
S4, pouring a proper amount of PDMS into a plastic culture dish, placing the aluminum plate with the micrometer structure 15 prepared in the step S2 on the surface of the PDMS, and then placing the aluminum plate into an oven with the temperature of 60 ℃ for curing for 1h, so that the layer of PDMS below the aluminum plate is completely cured, and the electrode in the subsequent chemical etching process is protected from being etched.
S5, rotating for 10S at 700rpm by using a spin coater, then rotating for 30S at 900rpm, and spin-coating the mixture of PDMS and the curing agent prepared in the step S3 on the surface of the aluminum plate in the step S4 to obtain a PDMS coating with the thickness of 100um and uniformity.
And S6, vacuumizing the PDMS coating prepared in the step S5 for 25min, putting the PDMS coating above the aluminum plate in a vacuum state, and then, putting the PDMS coating into an oven with the temperature of 60 ℃ for curing for 20min, wherein the PDMS coating above the aluminum plate is in a semi-cured state.
And S7, covering the surface of the PDMS coating in the semi-cured state of the step S6 on the other aluminum plate with the micrometer structure 15 obtained in the step S2, pressing the PDMS coating above the aluminum plate by using a weight with the mass of 2KG, and then placing the aluminum plate into an oven with the temperature of 60 ℃ for curing for 1h, wherein the PDMS coating between the two aluminum plates is in a fully cured state.
And S8, placing the product obtained in the step S7 into a 4M hydrochloric acid solution to perform chemical reaction in a fume hood for 20min, so that the aluminum plate covered on the PDMS coating is completely etched, and the aluminum plate under the PDMS coating is not etched. The PDMS coating with the upper layer completely etched off the aluminum plate was ultrasonically cleaned with deionized water for 2min and dried with nitrogen gas, resulting in a PDMS coating with a microstructure 15 as the second friction layer 14.
And S9, peeling the PDMS coating serving as a protective layer below the aluminum plate from the aluminum plate, wherein the obtained aluminum plate with the micro-nano composite structure 15 is the second electrode layer 13, and forms a second power generation component II with the second friction layer 14.
S10, conducting wires and conductive adhesive tapes are used for conducting wires to the aluminum plates of the first electrode layer 11 and the second electrode layer 13, and the friction nano generator with the friction layer double-sided microstructure is manufactured, wherein the surface of the second friction layer 14 is provided with the microstructure 15, and the interface between the electrode and the friction layer is provided with the micro-nano composite structure 15.
Referring to fig. 8, the friction nano generator prepared by the method is subjected to related performance test and analysis, and the friction nano generator with the structure can output a relatively stable alternating voltage with the range of 380V to 200V under the conditions that the external frequency is 4HZ and the mechanical force is 37N.
The above embodiments are only preferred embodiments of the present invention, and the present invention is not limited to the above embodiments, but any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present invention are all within the scope of the claims of the present invention.
Claims (4)
1. The preparation method of the friction nano generator with the friction layer double-sided microstructure comprises the steps of forming a first power generation component by a first electrode layer and a first friction layer, forming a second power generation component by a second electrode layer and a second friction layer, wherein microstructures are arranged on the upper surface and the lower surface of the second friction layer of the second power generation component, and a microstructure is arranged on an interface where the second electrode layer is attached to the second friction layer; the upper surface and the lower surface of the first friction layer of the first power generation component are or is not provided with a microstructure, and the interface of the first electrode layer and the first friction layer is or is not provided with a microstructure; the first power generation component is either only a first electrode layer and also serves as a first friction layer; the first friction layer of the first power generation component and the second friction layer of the second power generation component are arranged in a contact manner according to the two friction layers and can be divided into a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode; the friction nano generator in the vertical contact-separation mode is characterized in that a first friction layer of a first power generation component and a second friction layer of a second power generation component are in vertical and face-to-face contact, and the first friction layer and the second friction layer are periodically contacted and separated when being used as vertical external force for periodically acting on a friction surface, so that alternating current signals are generated between the first electrode layer and the second electrode layer; the friction nano generator in the horizontal sliding mode is characterized in that a first friction layer of a first power generation component and a second friction layer of a second power generation component are in face-to-face contact, and the friction nano generator is used as a periodic horizontal external force for a friction surface, and the first friction layer and the second friction layer slide relatively to generate friction charges, so that alternating current signals are generated between a first electrode layer and a second electrode layer; the friction nano generator in the single electrode mode comprises a first power generation component and a second power generation component, wherein the first power generation component is composed of only a first friction layer, the first friction layer of the first power generation component and the second friction layer of the second power generation component are in vertical and face-to-face contact, the second electrode layer is grounded through an external load, and the first friction layer and the second friction layer are periodically contacted and separated when the vertical external force is applied to the friction surface, and electrons flow between the ground and the second electrode layer through the external load, so that alternating current signals are generated; the friction nano generator in the independent layer mode comprises a first power generation component and a second power generation component, wherein the first power generation component is composed of only two first electrode layers, the second power generation component is arranged above the first power generation component, the second friction layer is respectively in face-to-face contact with the two first electrode layers, and the second friction layer is used as a periodic horizontal external force applied to a friction surface to enable alternating current signals to be generated between the left and right first electrode layers; the microstructure is a rough structure prepared by a chemical etching process and having a thickness of 1-200 microns, 1 nanometer-1 micron or a composite of the two, and is characterized in that the specific preparation of the friction nano generator comprises the following steps:
step 1: preparation of electrodes
Cutting a metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into a first electrode layer of a first power generation component according to design requirements, and polishing the first electrode layer to prepare a second electrode layer of a second power generation component;
step 2: preparation of microstructures on electrodes
Carrying out chemical etching on the upper surface of the second electrode layer by 1-200 micrometers, 1 nanometer-1 micrometer or a microstructure compounded by the two, carrying out ultrasonic cleaning by deionized water for 1-2 minutes after etching, and drying by nitrogen to obtain the electrode layer with the microstructure on the surface;
step 3: preparation of protective layer
Placing the electrode layer with the microstructure on the surface prepared in the step 2 on a prepolymer mixed by a high-molecular polymer and a curing agent at room temperature, and then curing for 1-1.5 h in an oven with the temperature of 60-80 ℃ to obtain an electrode protection layer;
step 4: arrangement of friction layers
Spin-coating a prepolymer mixed by a high-molecular polymer and a curing agent on the upper surface of the electrode layer with the microstructure on the surface of the step 3, wherein the obtained coating is a friction layer;
step 5: pre-curing of friction layers
Vacuumizing the friction layer prepared in the step 4 for 20-30 min, and treating the friction layer in an oven with the temperature of 60-80 ℃ for 20-25 min to obtain a pre-cured high polymer coating;
step 6: preparation of Friction layer
Attaching the microstructure of the other electrode layer prepared in the step 2 onto the pre-cured friction layer prepared in the step 5, pressing a weight with the mass of 1.5-2 KG, and curing the microstructure in an oven with the temperature of 60-80 ℃ for 1-1.5 h to obtain a cured friction layer;
step 7: preparation of microstructures on Friction layer
Etching the other electrode layer in the step 6 by adopting chemical corrosion until the other electrode layer is completely corroded, ultrasonically cleaning the other electrode layer by deionized water for 1-2 min, and drying the other electrode layer by nitrogen to prepare a friction layer with a microstructure on the surface;
step 8: preparation of a second Power generating component
Stripping the electrode protection layer in the step 7 from the electrode layer with the microstructure on the surface to obtain a second power generation component with the microstructure on the bonding interface, wherein the electrode layer with the microstructure on the surface is the second electrode layer, and the friction layer with the microstructure on the surface is the second friction layer;
step 9: preparation of first power generating component
Attaching a first friction layer to the first electrode layer to form a first power generation component;
step 10: preparation of friction nano generator
And (3) conducting wires and conductive adhesive tapes are used for conducting wires to the first electrode layer in the first power generation component and the second electrode layer in the second power generation component, so that the friction nano-generator with the double-layer structure is manufactured.
2. The method for preparing the friction nano generator with the friction layer double-sided microstructure according to claim 1, wherein the chemical etching is hydrochloric acid, sulfuric acid, nitric acid, ferric chloride, potassium ferricyanide or oxalic acid solution.
3. The method for preparing a friction nano-generator with a friction layer double-sided microstructure according to claim 1, wherein the high molecular polymer is polydimethylsiloxane, polymethyl methacrylate, polyvinyl acetate, polyacrylamide or polyvinylidene fluoride curable polymer.
4. The method for preparing a friction nano-generator with a double-sided microstructure of a friction layer according to claim 1, wherein the first friction layer and the second friction layer are made of metal materials such as gold, silver, copper and iron which generate friction electrification effect, polyimide, polyvinyl chloride, polydimethylsiloxane and polytetrafluoroethylene high polymer materials, and the first friction layer and the second friction layer are made of different materials so as to ensure the difference of electron losing capability of the friction layers.
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| CN112134484B (en) * | 2020-09-24 | 2021-12-10 | 清华大学 | Contact separation type friction nano generator utilizing deformation of friction material |
| CN113197546B (en) * | 2021-04-22 | 2022-09-27 | 华中科技大学 | High-permeability friction nano sensor and preparation method thereof |
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