CN107597673A - A kind of cleaning assembly of substrate cleaning apparatus - Google Patents
A kind of cleaning assembly of substrate cleaning apparatus Download PDFInfo
- Publication number
- CN107597673A CN107597673A CN201710845155.9A CN201710845155A CN107597673A CN 107597673 A CN107597673 A CN 107597673A CN 201710845155 A CN201710845155 A CN 201710845155A CN 107597673 A CN107597673 A CN 107597673A
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- CN
- China
- Prior art keywords
- spray head
- blowing mouth
- cleaning apparatus
- water pump
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The present invention relates to cleaning technique field, more particularly to a kind of cleaning assembly of substrate cleaning apparatus.Including being arranged on the spray head of surface, blowing mouth in frame, spray head is connected by water pump with water tank, and blowing mouth is connected with blower fan.The cleaning assembly and its manufacture method of a kind of substrate cleaning apparatus of the present invention, by carrying out pre-treatment to blowing mouth and spray head, so as to improve its corrosion resistance, then extend the service life of cleaning assembly.
Description
Technical field
The present invention relates to cleaning technique field, more particularly to a kind of cleaning assembly of substrate cleaning apparatus.
Background technology
, it is necessary to be cleaned to glass substrate in display panel manufacturing process, existing cleaning method is usually to spray water
Shower, but water droplet residual is had after shower on the glass substrate, deficient manufacturing procedure is easily caused, or pollute again.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of substrate cleaning apparatus, can lift cleaning efficiency, prevent water
Drop residual.Meanwhile present invention also offers a kind of cleaning assembly of substrate cleaning apparatus and its manufacture method.
In order to solve the above technical problems, the technical solution adopted by the present invention is：A kind of substrate cleaning apparatus, including：Frame,
In the frame multiple parallel intervals arrangement transfer roller, the conveyer belt on the transfer roller, located at the biography
Send the baseplate carrier taken, the spray head above the conveyer belt in the frame, in the frame
Blowing mouth above the conveyer belt, the water pump being connected with the spray head, the water tank being connected with the water pump, with it is described
The connected blower fan of blowing mouth and on the conveyer belt with the spray head and blowing mouth respectively corresponding first grating and
Second grating；The spray head is arranged at intervals with the blowing mouth.
The blowing mouth is obliquely installed relative to the vertical direction.
The spray head is connected by a vertical connecting tube with the water pump, and the spray head can surround the connection
Pipe rotates.
A kind of cleaning assembly of substrate cleaning apparatus, including the spray head of surface, blowing mouth in frame are arranged on, spray
Leaching head is connected by water pump with water tank, and blowing mouth is connected with blower fan.
A kind of manufacture method of the cleaning assembly of substrate cleaning apparatus, step are as follows：
1), structure and process respectively
Cleaning assembly, including be arranged on the spray head of surface, blowing mouth, spray head in frame and pass through water pump and water tank
It is connected, blowing mouth is connected with blower fan；
Spray head, the material of blowing mouth are SUS304 stainless steels, and water pump, water tank and blower fan are prepared by prior art；
2), pre-treatment
Spray head, blowing mouth are placed in tank liquor and soaked at least 10 minutes, is placed in vacuum drying chamber and dries after taking-up；
Bath solution constituents are：3.5 parts of fire retardant, 2.5 parts of curing agent, 12 parts of petroleum ether, 22 parts of saturated hydroxy polyester resin, cypress
Sub- 0.5 part of benevolence ester；
3), follow-up assembled formation
Spray head is fixed by connection and water pump installation first, then water pump connected with water tank, finally by air outlet and
Blower fan connects.
Advantage for present invention is with effect：
1) a kind of, substrate cleaning apparatus of the invention, including：Frame, multiple parallel intervals row in the frame
The transfer roller of row, the conveyer belt on the transfer roller, the baseplate carrier on the conveyer belt, in the frame
The spray head above the conveyer belt, the blowing mouth above the conveyer belt in the frame and institute
The water tank that state the connected water pump of spray head, is connected with the water pump, the blower fan being connected with the blowing mouth and located at the biography
Send and take corresponding with the spray head and blowing mouth difference the first grating and the second grating；The spray head and the blowing mouth
It is arranged at intervals, cleaning efficiency can be lifted, prevent water droplet from remaining.
2), the cleaning assembly and its manufacture method of a kind of substrate cleaning apparatus of the invention, by blowing mouth and spray
Head carries out pre-treatment, so as to improve its corrosion resistance, then extends the service life of cleaning assembly.
Brief description of the drawings
The invention will be further described below in conjunction with the accompanying drawings：
Fig. 1 is a kind of structure chart of substrate cleaning apparatus of the present invention；
In figure：Frame 1, transfer roller 2, conveyer belt 3, baseplate carrier 4, spray head 5, blowing mouth 6, water pump 7, water tank 8, blower fan
9th, the first grating 10, the second grating 11.
Embodiment
Embodiment 1
Referring to Fig. 1, the present invention provides a kind of substrate cleaning apparatus, including：It is frame 1, multiple in the frame 1
Transfer roller 2, the conveyer belt 3 on the transfer roller 2, the baseplate carrier on the conveyer belt 3 of parallel interval arrangement
4th, the spray head 5 above the conveyer belt 3 in the frame 1, be located at the transmission in the frame 1
Blowing mouth 6 with 3 tops, the water pump 7 being connected with the spray head 5, the water tank 8 being connected with the water pump 7 and the blowing mouth
6 connected blower fans 9 and first grating 10 corresponding with the spray head 5 and the difference of blowing mouth 6 on the conveyer belt 3
With the second grating 11；The spray head 5 is arranged at intervals with the blowing mouth 6.
Specifically, the blowing mouth 6 is obliquely installed relative to the vertical direction.
Specifically, the spray head 5 is connected by a vertical connecting tube with the water pump 7, and the spray head 5 can enclose
Rotated around the connecting tube.
Specifically, the course of work of substrate cleaning apparatus of the invention is：Substrate to be cleaned is positioned over baseplate carrier 4
On, conveyer belt 3 drives baseplate carrier 4 to move, when the first grating 10 detects baseplate carrier 4, conveyer belt stop motion, and spray head
5 pairs of substrates carry out cleaning showers, and after the completion of spray, conveyer belt continues to move, when the second grating 11 detects baseplate carrier 4,
Conveyer belt stop motion, blowing mouth are dried to substrate, blow away the water droplet and pollutant remained on substrate, after the completion of blowing, transmission
Band continues to move to lower discharge position, can lift cleaning efficiency, prevent water droplet from remaining.
Embodiment 2
A kind of manufacture method of the cleaning assembly of substrate cleaning apparatus, step are as follows：
1), structure and process respectively
Cleaning assembly, including be arranged on the spray head of surface, blowing mouth, spray head in frame and pass through water pump and water tank
It is connected, blowing mouth is connected with blower fan；
Spray head, the material of blowing mouth are SUS304 stainless steels, and water pump, water tank and blower fan are prepared by prior art；
2), pre-treatment
Spray head, blowing mouth are placed in tank liquor and soaked at least 10 minutes, is placed in vacuum drying chamber and dries after taking-up；
Bath solution constituents are：3.5 parts of fire retardant, 2.5 parts of curing agent, 12 parts of petroleum ether, 22 parts of saturated hydroxy polyester resin, cypress
Sub- 0.5 part of benevolence ester；
3), follow-up assembled formation
Spray head is fixed by connection and water pump installation first, then water pump connected with water tank, finally by air outlet and
Blower fan connects.
The present invention is not limited to above-described embodiment, and embodiment is exemplary, it is intended to for explaining the present invention, and can not
It is interpreted as limitation of the present invention.
Claims (1)
- A kind of 1. cleaning assembly of substrate cleaning apparatus, it is characterised in that including be arranged on the spray head of surface in frame, Blowing mouth, spray head are connected by water pump with water tank, and blowing mouth is connected with blower fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710845155.9A CN107597673A (en) | 2017-09-19 | 2017-09-19 | A kind of cleaning assembly of substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710845155.9A CN107597673A (en) | 2017-09-19 | 2017-09-19 | A kind of cleaning assembly of substrate cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107597673A true CN107597673A (en) | 2018-01-19 |
Family
ID=61061043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710845155.9A Pending CN107597673A (en) | 2017-09-19 | 2017-09-19 | A kind of cleaning assembly of substrate cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107597673A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112934848A (en) * | 2021-01-29 | 2021-06-11 | 沈发明 | Dust cleaning equipment for semiconductor preparation |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5445171A (en) * | 1992-09-25 | 1995-08-29 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor cleaning apparatus and wafer cassette |
| CN202067842U (en) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Equipment for cleaning OLED (organic light emitting diode) glass substrate |
| CN205289117U (en) * | 2015-12-29 | 2016-06-08 | 郑州旭飞光电科技有限公司 | Glass substrate's ultrasonic cleaning device |
| CN105728381A (en) * | 2016-04-19 | 2016-07-06 | 太原风华信息装备股份有限公司 | Full-automatic cleaning machine for liquid crystal glass substrates |
-
2017
- 2017-09-19 CN CN201710845155.9A patent/CN107597673A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5445171A (en) * | 1992-09-25 | 1995-08-29 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor cleaning apparatus and wafer cassette |
| CN202067842U (en) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Equipment for cleaning OLED (organic light emitting diode) glass substrate |
| CN205289117U (en) * | 2015-12-29 | 2016-06-08 | 郑州旭飞光电科技有限公司 | Glass substrate's ultrasonic cleaning device |
| CN105728381A (en) * | 2016-04-19 | 2016-07-06 | 太原风华信息装备股份有限公司 | Full-automatic cleaning machine for liquid crystal glass substrates |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112934848A (en) * | 2021-01-29 | 2021-06-11 | 沈发明 | Dust cleaning equipment for semiconductor preparation |
| CN112934848B (en) * | 2021-01-29 | 2022-10-11 | 芜湖米格半导体检测有限公司 | Dust cleaning equipment for semiconductor preparation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180119 |
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| RJ01 | Rejection of invention patent application after publication |