CN107591352B - Load port and substrate transport system including load port - Google Patents

Load port and substrate transport system including load port Download PDF

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Publication number
CN107591352B
CN107591352B CN201710547109.0A CN201710547109A CN107591352B CN 107591352 B CN107591352 B CN 107591352B CN 201710547109 A CN201710547109 A CN 201710547109A CN 107591352 B CN107591352 B CN 107591352B
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China
Prior art keywords
load port
container
door
unit
foup
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CN201710547109.0A
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CN107591352A (en
Inventor
夏目光夫
谷山育志
吉川雅顺
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Sinfonia Technology Co Ltd
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Sinfonia Technology Co Ltd
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Priority to CN202310983662.4A priority Critical patent/CN116978843A/en
Publication of CN107591352A publication Critical patent/CN107591352A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Abstract

The invention provides a load port and a substrate conveying system including the load port, which can avoid collision of a container with a door and the like when the container rotates even if the delivery position of the container with the load port without a rotating mechanism is matched with the load port without the rotating mechanism. The load port (4) comprises: a base (20) having an opening; a door (21) provided on the base for opening and closing the opening; a frame provided so as to protrude forward from the base in a front-rear direction orthogonal to the base and supporting the tray; a rotation mechanism that rotates the placement coil about a vertical axis; and a moving mechanism for moving at least one of the door and the mounting plate away from the other after the FOUP is mounted on the mounting plate by the OHT and before or during rotation of the mounting plate by the rotating mechanism. Since the FOUP is relatively distant from the door section or the like, collision with the door section or the like can be avoided when the FOUP rotates.

Description

Load port and substrate transport system including load port
Technical Field
The present invention relates to a load port including a rotation mechanism that rotates a container that accommodates a substrate, and a substrate transfer system including the load port.
Background
Conventionally, there is known a device such as a load port for placing a container such as a FOUP (Front-Opening Unified Pod) for accommodating a substrate such as a semiconductor wafer and for inputting and outputting the substrate between the container and a transfer chamber provided with a transfer unit for transferring the substrate. The load port and the transfer chamber together form a substrate transfer system such as EFEM (Equipment Front End Module).
In general, the container is placed on the loading port with a cover provided on a side surface of the container and a door provided on the loading port for opening and closing the cover facing each other, but the container may not be placed in such an orientation. For example, in a case where a container stocker in a factory does not have a rotating mechanism for rotating the container, the container may be placed on the loading port in a state of being oriented opposite to usual. In such a case, it is necessary to rotate the container so that the lid of the container faces the door, and patent documents 1 to 3 disclose loading ports including a rotating unit for realizing this function.
The load port described in patent document 1 includes: a carrying part for carrying the container, a moving mechanism for moving the carrying part and a rotating mechanism for rotating the moving mechanism. The placement unit is movable between a delivery position, in which the container is delivered between the placement unit and a mobile loader (that is, a mobile loader traveling on the ground) including a fork unit, and a door opening/closing position, in which the lid of the container is opened and closed together with the door. The rotating mechanism rotates the container together with the mounting portion, so that the lid of the container faces the door. Wherein the rotational position for rotating the container is located between the delivery position and the door opening and closing position.
Patent documents 2 and 3 also disclose a load port having a rotation mechanism for rotating a container, as in patent document 1, but in the load ports described in patent documents 2 and 3, the rotation position for rotating the container and the delivery position for delivering the container to and from a device or the like for delivering the container to the load port are the same position.
On the other hand, as a conveying means for conveying containers in a factory such as a semiconductor factory, an unmanned conveying vehicle such as OHT (Overhead Hoist Transfer) which travels along a preset track is known. In a factory where such a transfer unit is disposed, when a load port having a rotation mechanism and a load port having no rotation mechanism (hereinafter, generally referred to as a load port) are mixed, it is required that container delivery positions of the two load ports be disposed along a track of the transfer unit in order to improve transfer efficiency. The distance between the travel rail of the transport unit and the wall surface of the transport chamber on which the load port is disposed is already defined by a standard, for example, in the case of OHT, the distance is set to be about 243mm in plan view according to SEMI standard regardless of the size of the substrate.
Prior art literature
Patent (S)Literature
Patent document 1: japanese patent application laid-open No. 2013-219159
Patent document 2: japanese patent No. 4168724
Patent document 3: japanese patent No. 4816637
Disclosure of Invention
Problems to be solved by the invention
In the case where the delivery position is located sufficiently far from the door opening/closing position without the necessity of delivering the container by an unmanned vehicle such as an OHT, as in the loading ports described in patent documents 1 to 3, the rotational position of the container can be set to the same position as or closer to the door opening/closing position than the delivery position. However, according to the above standard, if the delivery position is set to a position close to the door opening/closing position, the container collides with the wall surface around the door or door when rotated in terms of the size of the loading ports. Therefore, there is a problem that: these delivery positions of the loading ports having the rotation mechanism and delivery positions of the loading ports having no rotation mechanism cannot be arranged along the track of the same transport unit, and transport efficiency of the container is lowered.
The present invention aims to prevent collision of a container with a door or the like when the container rotates, even when a delivery position of a loading port having a rotation mechanism for delivering the container from a transport unit to a placement unit and a delivery position of a loading port not having the rotation mechanism are arranged along a track of the same transport unit.
Solution for solving the problem
The load port according to claim 1 includes a placement portion on which a container for accommodating a substrate is placed, and when the placement portion is located at a delivery position at which the container can be delivered to and from a transport unit that travels along a preset track and transports the container, the container is delivered between the load port and the transport unit, the load port further includes: a base configured to stand and having an opening; a door portion provided on the base for opening and closing the opening portion; a frame provided so as to protrude forward from the base in a front-rear direction orthogonal to the base and supporting the placement portion; a rotation mechanism that rotates the placement unit about a vertical axis; and a moving mechanism that moves at least one of the door portion and the mounting portion away from the other after the container is mounted on the mounting portion by the conveying means and before or during rotation of the mounting portion by the rotating mechanism.
In the loading port having the rotating mechanism, after the container is placed on the placement portion by the conveying unit, and before or during the rotation of the placement portion by the rotating mechanism, the distance between the door portion and the placement portion in the front-rear direction is relatively increased. Therefore, even when the delivery position of the loading port having the rotation mechanism for delivering the container from the transport unit to the placement unit and the delivery position of the loading port having no rotation mechanism are arranged along the same track of the transport unit, collision of the container with the door and the base can be avoided when the container rotates.
In the loading port according to claim 2, the moving mechanism moves the placement unit in the front-rear direction from a delivery position where the container is delivered to the placement unit from the delivery unit, and moves the placement unit to a position ahead of the delivery position after the container is placed on the placement unit located at the delivery position by the delivery unit and before or during rotation of the placement unit by the rotating mechanism.
After the container is placed on the placement unit, and before the placement unit is rotated by the rotating unit or simultaneously with the rotation, the placement unit is moved to a position forward of the delivery position by the moving mechanism, so that collision of the container with the door and the base can be avoided when the container is rotated. Here, since the air on the loading port side is less likely to enter the rear space through the opening than when the door is retracted, there is less concern about contamination of the rear space.
In the loading port according to claim 3, the moving mechanism moves the placement unit to a rotational position forward of the delivery position, and then the rotating mechanism rotates the placement unit.
The container is rotated by the rotating mechanism after the placement portion is moved to the rotating position forward of the delivery position by the moving mechanism, and therefore collision between the container and the door and between the container and the base can be further reliably prevented when the container is rotated.
In the loading port according to claim 4, the moving mechanism moves the mounting portion to the rotational position by projecting the mounting portion further forward than the frame.
In the present invention, since the mounting portion is merely projected to the rotational position, the frame does not need to be projected to the rotational position, and the size of the frame in the front-rear direction can be made compact, so that the installation area of the loading port can be reduced.
On the basis of the 4 th invention, the load port of the 5 th invention is characterized in that the load port further comprises: a detection unit that detects an obstacle located in front of the frame; and a control unit that restricts movement of the placement unit to the rotational position when the detection unit detects the obstacle.
The present invention can prevent the placement portion and the container from protruding forward from the frame when a person or the like passes nearby, and thus can ensure safety.
The loading port according to claim 6 is characterized in that the moving mechanism has a movable portion that supports the rotating mechanism from below and is movable in the front-rear direction, the mounting portion is supported from below by the rotating mechanism, a nozzle for gas injection or discharge is supported by the movable portion, the nozzle is capable of being lifted and lowered between a connection position to be connected to a nozzle insertion port formed in a bottom surface of the container mounted on the mounting portion and a separation position to be separated from the nozzle insertion port from below.
In the present invention, the rotating mechanism is supported by the movable portion of the moving mechanism, and the mounting portion is supported by the rotating mechanism, so that only the mounting portion rotates by the rotating mechanism, and the nozzle for gas injection or discharge provided on the upper surface of the movable portion of the moving mechanism does not rotate. Thus, the placement portion can be rotated without being hindered by the pipe for gas injection or discharge connected to the nozzle.
In the loading port according to claim 7, before or during the movement of the mounting portion to the door opening/closing position by the movement mechanism, the nozzle is moved to the connection position, the gas is started to be injected into or discharged from the container through the nozzle, and the lid provided on the side surface of the container and the door portion can be opened and closed at the door opening/closing position.
Since the nozzle for gas injection or discharge is provided on the upper surface of the movable portion, the relative position between the nozzle and the mounting portion in the front-rear direction does not change during the movement of the mounting portion by the movement mechanism. Therefore, the injection of the gas into the container or the discharge of the gas from the container can be started before or during the movement of the mounting portion to the door opening/closing position. Thus, the gas injection can be completed earlier than the gas injection is started after the movement of the mounting portion is completed, and the time required for opening and closing the door can be shortened.
The substrate transport system according to claim 8 is characterized in that the substrate transport system includes: a 1 st load port which is a load port according to any one of the 1 st to 7 th aspects; a 2 nd loading port having the loading portion and not having the rotation mechanism; and a transfer chamber having a transfer unit for inputting and outputting the substrate to and from the container, wherein the transfer position of the placement unit of the 1 st load port and the transfer position of the placement unit of the 2 nd load port are arranged along the track of the transfer unit.
The transfer positions selected by the loading units of the 1 st loading port having the rotation mechanism and the 2 nd loading port having no rotation mechanism are arranged along the travel track of the same transport unit. Thus, the containers can be transferred to and from each loading port by using the same transfer unit.
Drawings
Fig. 1 (a) is a schematic plan view of a semiconductor device including a load port according to the present embodiment and its periphery, and fig. 1 (b) is a front view thereof.
Fig. 2 is a perspective view of a load port.
FIG. 3 is a right side view of a load port.
Fig. 4 is a right side view showing the positions of the mounting trays, wherein (a) shows the intermediate position, (b) shows the front position, and (c) shows the rear position.
Fig. 5 is a right side view showing the elevation of the nozzle, in which (a) shows the state where the nozzle is located at the separated position and (b) shows the state where the nozzle is located at the connected position.
Fig. 6 is an enlarged view of fig. 1 (a).
FIG. 7 is a flow chart of the actions of a load port.
Fig. 8 is a plan view showing the operation of the load port.
Fig. 9 is a right side view showing the action of loading ports.
Fig. 10 is a perspective view of a load port according to a modification.
FIG. 11 is a right side view of a load port.
Fig. 12 is a plan view showing the operation of the load port.
Fig. 13 is a top view of another variation of an EFEM.
Description of the reference numerals
3. 3b, EFEM; 4. 4a, 5, load port; 6. 6b, a conveying chamber; 7. a conveying robot; 10. 11, 29, control means; 20. 20a, a base; 21. 21a, a door part; 22. a frame; 23. a carrying tray; 24. a rotation mechanism; 25. a moving mechanism; 26. a sensor; 29. a control device; 30. 30a, an opening; 31. 31a, a door; 39. 40, nozzle through holes; 47. a movable part; 55. an injection nozzle; 56. a discharge nozzle; 60. a moving mechanism; 300. a FOUP; 400. OHT; 401. and a guide rail.
Detailed Description
Next, an embodiment of the present invention will be described with reference to fig. 1 to 8. As shown in fig. 1, the direction in which the plurality of load ports 4 and 5 are arranged is the left-right direction. The direction orthogonal to the left-right direction and in which the loading ports 4 and 5 face the transfer chamber 6 is the front-rear direction. In the front-rear direction, the loading ports 4, 5 are forward, and the transfer chamber 6 is rearward.
(outline structure of semiconductor device and periphery including load port)
Fig. 1 is a schematic view of a semiconductor manufacturing apparatus 1 installed in a semiconductor factory and its periphery. As shown in fig. 1 (a), the semiconductor manufacturing apparatus 1 includes a substrate processing apparatus 2 that processes a substrate such as a wafer, and an EFEM 3 (substrate transfer system in the present invention) that transfers the substrate to and from the substrate processing apparatus 2. The semiconductor manufacturing apparatus 1 performs the following series of operations. First, the EFEM 3 receives a FOUP 300 (container in the present invention) for accommodating a substrate from an OHT 400 (transport unit in the present invention) or the like described later. Next, the EFEM 3 takes out the substrate from the FOUP 300 and delivers the substrate to the substrate processing apparatus 2. The substrate processing apparatus 2 processes the substrate received from the EFEM 3 and returns the substrate to the EFEM 3. The EFEM 3 returns the substrate to the FOUP 300. Thereafter, the FOUP 300 is transported by the OHT 400 or the like.
The substrate processing apparatus 2 includes a substrate processing mechanism not shown and a control apparatus 10. The control device 10 controls a substrate processing mechanism, performs processing of a substrate, and transfers and receives a substrate to and from the EFEM 3, and communicates with a host computer 200 or the like, which is a host computer.
The EFEM 3 includes one load port 4 (load port and load port 1 in the present invention), two load ports 5 (load port 2 in the present invention), a transfer chamber 6, a transfer robot 7 (transfer unit in the present invention), and a control device 11. The load port 4 and the load port 5 are largely different from each other in the presence or absence of a rotation mechanism 24 described later. That is, the load port 4 has a rotation mechanism 24, and the load port 5 does not have a rotation mechanism 24.
The loading ports 4 and 5 are arranged in the left-right direction so that the rear ends thereof are along a partition wall 8 on the front side of a conveyance chamber 6 described later. The FOUP 300 is placed on the load ports 4 and 5. In addition, the FOUP 300 is transported within the factory using the OHT 400. As shown in fig. 1 (a) and (b), the OHT 400 is an unmanned vehicle that travels along a rail 401 (a rail in the present invention) provided in a ceiling in a factory in advance and accesses the load ports 4 and 5 from above. The OHT 400 hands over the FOUP 300 to either the load port 4 or the load port 5 based on instructions issued by the host 200.
The conveyance chamber 6 constitutes a conveyance space 9 that is partitioned from the outside by a partition wall 8. The distance L in the front-rear direction between the guide rail 401 and the partition wall 8 on the front side of the transport chamber 6 is, for example, about 243mm defined by SEMI standards.
The transfer robot 7 is provided in the transfer chamber 6, and transfers and receives substrates between the FOUP 300 placed on the load ports 4 and 5 and the substrate processing apparatus 2. The control device 11 performs communication with the control device 10 of the substrate processing apparatus 2, the control device 29 of the load port 4, the host computer 200, and the like, in addition to the control of the transfer robot 7.
(Structure of load port)
Next, the structure of the load port 4 will be described. The direction shown in fig. 2 is the front-rear, left-right, up-down direction.
As shown in fig. 2, 3 and 5, the load port 4 includes a base 20, a door 21, a frame 22, a mounting plate 23 (mounting portion in the present invention), a rotation mechanism 24, a movement mechanism 25, a nitrogen purge unit 27, a control device 29 (control unit in the present invention), and the like.
The base 20 is a flat plate-like portion having a substantially rectangular front view. The base 20 is disposed to stand so as to constitute a part of the partition wall 8 of the conveyance chamber 6. An opening 30 having a substantially rectangular front view is formed in an upper portion of the base 20. The opening 30 has a size through which the cover 301 provided on the side surface of the FOUP 300 can pass from front to rear.
The door portion 21 has a door 31 and a door arm 32. The door 31 is a substantially rectangular flat plate-like member and has a size capable of closing the opening 30 from the rear. The door 31 has an adsorption portion 33 that adsorbs the lid 301 of the FOUP 300, and a key 34 that opens and closes a lock of the lid 301. The door arm 32 is a member attached to the rear of the door 31 and supporting the door 31 from below. The door arm 32 is connected to the door moving unit 35. The door moving portion 35 is provided at the rear of the base 20, and moves the door 31 and the door arm 32 in the front-rear direction and the up-down direction.
The frame 22 is a portion protruding forward from the base 20. The frame 22 is generally rectangular in plan view and has a larger area than the FOUP 300. In addition, a sensor 26 (detection unit in the present invention) is provided on the front surface of the frame 22. The sensor 26 is, for example, an optical sensor having a light emitting portion and a light receiving portion. The light emitting unit emits light to the front of the frame 22, and when an obstacle exists in front of the frame 22, the light receiving unit detects the light reflected by the obstacle and sends a detection signal to the control device 29.
The mounting plate 23 is a member having a substantially rectangular shape in plan view, and has an area where the FOUP 300 can be stably mounted. As will be described later, the mounting tray 23 is supported by the frame 22 from below by the rotating mechanism 24 and the moving mechanism 25.
Three positioning pins 36, 37, 38 are provided on the upper surface of the mounting plate 23. The positioning pins 36, 37, 38 are configured to: when the FOUP 300 is placed in a standard orientation described below, the three holes, not shown, provided in the bottom surface of the FOUP 300 are engaged with each other. The orientation of the mounting plate 23 in fig. 2 and 3 is an orientation in which the lid 301 of the FOUP 300 faces the door 31. That is, when the positioning pins 36 and 37 are positioned substantially in the front-rear direction and the positioning pins 38 are positioned forward of the positioning pins 36 and 37, the lid 301 of the FOUP 300 faces the door 31. The orientation of the mounting tray 23 is referred to as a standard orientation.
Further, two nozzle passing holes 39, 40 are formed in the mounting plate 23 so as to pass through from the upper surface to the lower surface of the mounting plate 23. These nozzle passing holes 39, 40 are configured to: when the mounting tray 23 is oriented in the standard direction, the injection nozzle 55 and the discharge nozzle 56, which will be described later, can be passed through.
As shown in fig. 3, the rotation mechanism 24 has a motor 41 and a shaft 42. The motor 41 may be, for example, a rotary pneumatic motor. The motor 41 is supported by a movable portion 47 of the moving mechanism 25 described later. The shaft 42 is attached to the upper portion of the motor 41 and the lower portion of the mounting plate 23 so as to extend in the vertical direction, and supports the mounting plate 23 from below to transmit the rotational power of the motor 41 to the mounting plate 23. The motor 41 of the rotating mechanism 24 having the above-described structure rotates the shaft 42, and the mounting plate 23 rotates about the vertical axis.
As shown in fig. 2 to 4, the moving mechanism 25 includes an actuator cylinder 45, a transmission portion 46, a movable portion 47, a slide rail 48, and a rail assembly 49. For example, a three-position cylinder in which the piston rod 50 constituting the cylinder 45 can take three positions can be used as the cylinder 45. The cylinder 45 is provided in the frame 22 so that the piston rod 50 moves in the front-rear direction. The transmission portion 46 is mounted to an end portion of the piston rod 50 and a lower portion of the movable portion 47, and is provided to transmit power of the cylinder 45 to the movable portion 47. The movable portion 47 is connected to an upper portion of the transmission portion 46, and is provided to move in the front-rear direction. The movable portion 47 supports the motor 41 of the rotation mechanism 24 from below. The slide rail 48 is mounted on a lower portion of the movable portion 47 in the front-rear direction. The rail assembly 49 is fixed to the upper surface of the frame 22, and supports the slide rail 48 so as to be movable forward and backward from below.
By pushing the piston rod 50 in the front-rear direction by the cylinder 45 of the moving mechanism 25 having the above-described structure, as shown in fig. 4, the placement tray 23 can be moved between three positions in the front-rear direction. In a state where the load ports 4 are arranged as shown in fig. 1, as shown in fig. 4 (a), when the mounting tray 23 is located at a position intermediate in the front-rear direction, the mounting tray 23 is located directly below the guide rail 401. That is, the loading tray 23 can transfer the FOUP 300 by using the OHT 400. The above-described position of the mounting tray 23 is referred to as a delivery position.
When the mounting plate 23 is positioned forward of the delivery position as shown in fig. 4 (b), the mounting plate 23 is rotated by a rotation mechanism 24 as will be described later. This forward position is referred to as a rotational position. As shown in fig. 4 (c), when the mounting tray 23 is located rearward of the transfer position, the lid 301 of the FOUP 300 on the mounting tray 23 approaches the door 21, and the lid 301 is opened and closed together with the door 21. This rearward position is referred to as a door open/close position.
As shown in fig. 5, the load port 4 includes a nitrogen purge unit 27 for injecting and discharging nitrogen gas into and from the FOUP 300. The nitrogen purge unit 27 has: a gas supply unit 51 for supplying nitrogen gas; an exhaust unit 52 for exhausting air pre-filled in the FOUP 300; pipes 53, 54; injection nozzle 55 and discharge nozzle 56 (nozzles in the present invention); motors 57, 58.
The injection nozzle 55 is provided so as to protrude upward from the upper surface of the movable portion 47 of the moving mechanism 25, and is disposed so as to be capable of passing through the nozzle passage hole 39 when the mounting tray 23 is oriented in the standard direction. The injection nozzle 55 is connected to the pipe 53 and can be lifted up and down by a motor 57. The piping 53 is connected to the gas supply unit 51. Similarly, the discharge nozzle 56 is disposed so as to pass through the nozzle passage hole 40 when the mounting tray 23 is oriented in a standard direction, is connected to the pipe 54, and is lifted up and down by the motor 58. The pipe 54 is connected to the exhaust unit 52.
As shown in fig. 5a, when the injection nozzle 55 and the discharge nozzle 56 are lowered to the limit, the upper ends of the injection nozzle 55 and the discharge nozzle 56 are positioned below the mounting tray 23 (separated position). As shown in fig. 5 b, when the injection nozzle 55 and the discharge nozzle 56 rise to the limit, the upper ends of the injection nozzle 55 and the discharge nozzle 56 are connected to the nozzle insertion openings 302 and 303 on the bottom surface of the FOUP 300, respectively (connection positions).
The control 29 comprises CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory) etc. The controller 29 controls each mechanism of the load port 4 by the CPU in accordance with a program stored in the ROM, and communicates with the controller 11, the host 200, and the like of the EFEM 3.
Next, the load port 5 will be described. The structure of the load port 5 is substantially the same as that of the load port 4, and as described, differs from that of the load port 4 in that the rotation mechanism 24 is not provided. That is, in the load port 5, the foup 300 is placed on the mounting tray 23 with the lid 301 facing the door 31. The loading tray 23 of the loading port 5 is directly supported by the moving mechanism 25. The loading tray 23 of the loading port 5 is not moved to the rotation position, but is moved between the delivery position and the door opening/closing position. The transfer position and the door opening/closing position of the loading tray 23 are the same in the front-rear direction for the loading port 4 and the loading port 5.
(action step of loading port)
Next, the operation steps of the load port 4 provided in the EFEM 3 as shown in fig. 6 will be described with reference to fig. 6 to 9.
Fig. 7 is a flowchart of the action of the load port 4. First, in a state where the FOUP 300 is not mounted on the mounting tray 23, the control device 29 of the load port 4 communicates with the host computer 200 to acquire information of the FOUP 300 to be transferred by the OHT 400 (S101). The information of the FOUP 300 includes information about the orientation of the FOUP 300 when the FOUP is mounted on the mounting tray 23. When the cover 301 of the FOUP 300 is to be placed in the direction facing the door 31 of the load port 4, information indicating the standard direction is transmitted from the host computer 200, and when the cover 301 is to be placed in the direction opposite to the standard direction, information indicating the opposite direction is transmitted from the host computer 200.
Next, the control device 29 determines whether the direction in which the FOUP 300 is placed on the placement tray 23 is the normal direction or the reverse direction based on the information acquired from the host computer 200 (S102). First, a case will be described in which the FOUP 300 is placed on the mounting tray 23 in the opposite direction.
When the mounting plate 23 is disposed in the standard orientation, the control device 29 drives the motor 41 of the rotation mechanism 24 to rotate the mounting plate 23 to mount the FOUP 300 in the opposite orientation. When the mounting tray 23 is initially disposed in the opposite direction, the control device 29 does not rotate the mounting tray 23. When the mounting tray 23 is located at a position other than the delivery position, the control device 29 operates the cylinder 45 of the moving mechanism 25 to move the mounting tray 23 to the delivery position. When the tray 23 is initially located at the delivery position, the controller 29 does not move the tray 23. That is, the control device 29 stands by with the mounting tray 23 in the position and orientation shown in fig. 8 (a) (S103).
At this time, as shown in fig. 6, the loading tray 23 of the loading port 4 is arranged along the guide rail 401 in a plan view, and the FOUP 300 can be loaded by the OHT 400. In the same manner, the transfer position of the loading tray of the loading port 5 is also arranged along the guide rail 401 in a plan view.
Next, as shown in fig. 8 (b) and 9 (a), the FOUP 300 is placed on the mounting plate 23 by the OHT 400 (S104). Thereafter, as shown in fig. 8 (c), the control device 29 operates the cylinder 45 of the moving mechanism 25 to move the tray 23 to a rotational position forward of the delivery position, and moves the tray 23 away from the door 31 (S105). As shown in fig. 8 (c) and 9 (b), the mounting plate 23 protrudes forward from the frame 22 in a state where the mounting plate 23 is located at the rotational position.
In addition, although not shown, when an obstacle exists in front of the frame 22, the sensor 26 detects the obstacle in advance and sends a detection signal to the control device 29. The control device 29 that receives the detection signal does not send a control signal or the like to the actuator cylinder 45, for example, and restricts the movement of the mounting plate 23 to the rotational position. Therefore, the mounting tray 23 and the FOUP 300 can be prevented from protruding forward from the frame 22 when a person or the like passes nearby, and safety can be ensured.
Next, as shown in fig. 8 (d), (e) and 9 (c), the control device 29 drives the motor 41 of the rotating mechanism 24 to rotate the mounting plate 180 ° (S106). Here, when the FOUP 300 rotates in a state where the loading tray 23 is located at the transfer position, the FOUP 300 collides with the door 31 or the susceptor 20 of the load port 4, but since the FOUP 300 rotates when the loading tray 23 is located at the rotation position forward of the transfer position, the FOUP 300 rotates without colliding with the door 31 or the susceptor 20. That is, even when the transfer position of the loading tray 23 of the load port 4 and the transfer position of the loading tray 23 of the load port 5 are arranged along the guide rail 401 of the same OHT 400, collision with the door 31 and the susceptor 20 during rotation of the FOUP 300 can be avoided. In the present embodiment, the air on the load port 4 side is less likely to enter the conveyance space 9 through the opening 30 than the case where the door 21a is retracted as in the modified example described later, and therefore there is less concern about contamination of the conveyance space 9.
Further, since the rotation mechanism 24 is supported by the movable portion 47 of the movement mechanism 25 and the mounting tray 23 is supported by the rotation mechanism 24, only the mounting tray 23 and the FOUP 300 are rotated by the rotation mechanism 24. That is, the injection nozzle 55 and the discharge nozzle 56 provided on the upper surface of the movable portion 47 do not rotate. Thus, the mounting plate 23 can be rotated without interfering with the operation of the rotation mechanism 24 by the pipes 53 and 54.
Next, the control device 29 drives the motors 57 and 58 of the nitrogen purge unit 27 to raise the injection nozzle 55 and the discharge nozzle 56 to the connection positions, and connects the nozzle insertion openings 302 and 303 at the bottom of the FOUP 300. Then, the control device 29 controls the gas supply unit 51 and the gas discharge unit 52, and starts nitrogen gas injection and gas discharge into the FOUP 300 through the injection nozzle 55 and the discharge nozzle 56 (S107). As shown in fig. 9 (a) and (b), in a state in which the mounting tray 23 is disposed in the opposite direction, the positions of the injection nozzle 55 and the discharge nozzle 56 in the front-rear direction do not coincide with the positions of the nozzle passing holes 39 and 40 in the front-rear direction, and therefore the injection nozzle 55 and the discharge nozzle 56 cannot be connected to the FOUP 300. As shown in fig. 9 (c), the loading tray 23 is arranged in a standard orientation, so that the injection nozzle 55 and the discharge nozzle 56 can be connected to the FOUP 300.
Next, as shown in fig. 8 (f), the control device 29 operates the cylinder 45 to move the mounting tray 23 to the rear door opening/closing position (S108). Then, the control device 29 stops the operations of the gas supply unit 51 and the gas discharge unit 52, drives the motors 57 and 58, and lowers the injection nozzle 55 and the discharge nozzle 56 to the separated positions (S109). Further, since the injection and discharge of the gas are started earlier than the movement of the mounting plate 23 to the door opening/closing position, the injection of the nitrogen gas can be completed earlier than the injection of the nitrogen gas or the like started after the movement of the mounting plate 23 is completed, and the time until the door opening/closing operation described later can be shortened.
Subsequently, the load port 4 performs a door opening/closing operation (S110). That is, the control device 29 unlocks the lid 301 of the FOUP 300 by the key 34 of the door 31, and the adsorbing portion 33 of the door 31 adsorbs and holds the lid 301. Then, the control device 29 operates the door moving unit 35 to move the door 31 and the cover 301 rearward, and lowers the door 31 and the cover 301. Thereafter, the controller 11 of the EFEM 3 operates the transfer robot 7 to take out the substrate from the FOUP 300 and deliver the substrate to the substrate processing apparatus 2, and take out the processed substrate from the substrate processing apparatus 2 and return the substrate to the FOUP 300. After all the necessary substrate processing is completed, the control device 29 operates the door moving unit 35, lifts the door 31 and the cover 301, advances the cover 301, returns the FOUP 300, locks the cover 301 with the key 34, and releases the suction of the cover 301 to the suction unit 33.
Thereafter, the control device 29 transmits information indicating the completion of the substrate processing to the host computer 200. The control device 29 controls the movement and rotation of the FOUP 300 in accordance with instructions from the host 200. That is, when the FOUP 300 is transported away by the OHT 400 in a state in which it is to be kept in the normal orientation, the control device 29 controls the movement mechanism 25 to move the mounting plate 23 to the delivery position while keeping the orientation. When the FOUP 300 is to be transported away by the OHT 400 in the opposite direction, the controller 29 temporarily moves the platen 23 to the rotational position by the movement mechanism 25. Then, the controller 29 turns the mounting tray 23 by the rotation mechanism 24, and then controls the movement mechanism 25 to move the mounting tray 23 to the delivery position. Finally, the FOUP 300 is transported away by the OHT 400 that has received the instruction from the host 200 (S111).
Returning to step S102, a description will be given of a case where the FOUP 300 is to be placed in the standard orientation. When the mounting tray 23 is disposed in the opposite direction, the control device 29 rotates the mounting tray 23 in the normal direction (see fig. 2) by the rotation mechanism 24. When the tray 23 is disposed at a position other than the delivery position, the controller 29 moves the tray 23 to the delivery position by the movement mechanism 25. That is, the control device 29 stands by with the mounting tray 23 oriented in the standard direction and positioned at the delivery position (S121). The FOUP 300 is placed on the mounting plate 23 in the standard orientation by the OHT 400 (S122). In this case, the control device 29 does not move the mounting plate 23 to the rotational position or rotate the mounting plate 23, and starts the gas injection and gas discharge in step S107. Thereafter, the control device 29 performs the same operation as in the case where the FOUP 300 is placed in the opposite direction.
As described above, even when the loading port 4 is provided with the transfer position along the guide rail 401 in a plan view, the FOUP 300 can be prevented from colliding with the door 31 and the susceptor 20 when the FOUP 300 rotates. Therefore, in the EFEM 3, the transfer position of the loading tray 23 of the loading port 4 and the transfer position of the loading tray 23 of the loading port 5 having no rotation mechanism 24 are arranged along the same rail 401. Thus, the same OHT 400 can be used for the load ports 4 and 5 to transfer the FOUP 300.
In addition, in a state where the loading tray 23 of the loading port 4 is located at the rotational position, the loading tray 23 protrudes forward from the frame 22. That is, the frame 22 does not need to protrude to the rotational position in the front-rear direction, and the size of the frame 22 in the front-rear direction becomes compact. Thus, the installation area of the load port 4 can be reduced to the same extent as the load port 5.
Next, a modification of the above embodiment will be described. The same reference numerals are given to the portions having the same configuration as in the above embodiment, and the description thereof will be omitted as appropriate.
(1) As shown in fig. 10 to 12, the loading port 4a may have a moving mechanism 60 for moving the door 21a away from the mounting tray 23. Hereinafter, the description will be made specifically.
As shown in fig. 10 and 11, the door portion 21a further includes rotation plates 61 and 62. The opening 30a of the base 20a is wider than the door 31a of the door 21a in the vertical direction, and the upper portion of the opening 30a is closed by the rotation plate 61 and the lower portion is closed by the rotation plate 62. The rotation plates 61 and 62 are supported rotatably about respective axes in the left-right direction. An upper portion of the rotation plate 61 and a lower portion of the rotation plate 62 are supported by the base 20a, respectively.
The moving mechanism 60 includes a door moving portion 35a that moves the door arm 32a of the door portion 21a in the front-rear direction and the up-down direction, a motor 63 connected to the rotating plate 61, and a motor 64 connected to the rotating plate 62. The motors 63 and 64 rotate the rotation plates 61 and 62 between a closed position (fig. 10 a) where the opening 30a is closed and an open position (fig. 10 b) where the opening 30a is open, respectively. As shown in fig. 10 (b), the rotation plates 61, 62 are moved to the open position by being rotated rearward.
Fig. 12 is a plan view showing an operation of the load port 4a when the FOUP 300 is placed in the opposite direction. First, the process from the control device 29 to the time when the loading tray 23 is set to the opposite orientation and is standing by at the transfer position ((a) of fig. 12) to the time when the FOUP 300 is set to the opposite orientation and is loaded on the loading tray 23 ((b) of fig. 12) is the same as that of the above-described embodiment.
Next, as shown in fig. 12 (c), the control device 29 controls the moving mechanism 60 to retract the door 31a and rotate the rotating plates 61 and 62 rearward. That is, in this modification, the door portion 21a is relatively separated from the mounting tray 23 by rotating the rotating plates 61, 62 rearward. Next, as shown in fig. 12 (d) and (e), the control device 29 controls the rotation mechanism 24 to rotate the mounting plate 23. In this modification, the loading tray 23 rotates without moving from the delivery position, but as shown in fig. 12 (d), collision of the FOUP 300 with the door 31a and the susceptor 20a can be avoided when the FOUP 300 rotates. The controller 29 may control the movement mechanism 25a to move the mounting tray 23 to the rotational position, control the movement mechanism 60 to retract the door 31a, and the like.
After the rotation of the mounting tray 23 is completed, as shown in fig. 12 (f), the control device 29 controls the movement mechanism 60 to advance the door 31a and move the pivoting plates 61 and 62 to the closed position. The controller 29 controls the moving mechanism 25a to move the mounting tray 23 to the door opening/closing position. The subsequent operations of the load port 4a are the same as those of the embodiment.
(2) The rotation mechanism 24 may rotate the mounting plate 23 by not only 180 ° but also 90 °. In the case of the EFEM 3b shown in FIG. 13, two load ports 5 are provided along the wall of the front side of the transfer chamber 6b, and the load port 4 is provided along the wall of the left side of the transfer chamber 6 b. In this case, the load port 4 stands by with the mounting plate 23 rotated 90 ° from the normal orientation, and can transfer the FOUP 300 to and from the OHT 400. Then, after the FOUP 300 is placed on the mounting plate 23 by the OHT 400, the control device 29 rotates the mounting plate 23 by 90 ° by the rotating mechanism 24 by moving the mounting plate 23 to the rotating position by the moving mechanism 25.
(3) Other configurations of the load port 4 can be changed as appropriate. For example, the loading port 4 may not have the nitrogen purge unit 27, and there may be no operation steps of gas injection and gas discharge. The size of the frame 22 in the front-rear direction may be increased to such an extent that the tray 23 does not protrude forward from the frame 22 even when it is positioned at the rotation position. The mounting portion on which the FOUP 300 is mounted is not limited to the mounting tray 23. For example, as described in patent document 2 (japanese patent No. 4168724), a member having a triangular shape in plan view may be used as long as the FOUP 300 can be mounted thereon.
The structure of the rotation mechanism 24 is not limited to the present embodiment, and the placement tray 23 may be rotatable about the vertical axis. The configuration of the moving mechanism 25 is not limited to the present embodiment, and the tray 23 may be moved between three positions in the front-rear direction. The sensor 26 may be, for example, an ultrasonic detector.
(4) The rotation mechanism 24 may start rotating the mounting plate 23 before the movement mechanism 25 moves the mounting plate 23 to the rotation position. That is, the movement mechanism 25 may move the mounting plate 23 forward while the rotation mechanism 24 is rotating the mounting plate 23 at a timing when the FOUP 300 does not collide with the door 31 and the base 20.
(5) The controller 29 of the load port 4 is not necessarily incorporated in the load port 4, and the controller 10 of the substrate processing apparatus 2 or the controller 11 of the EFEM 3 may be used for controlling the load port 4.
(6) Other structures can be changed as appropriate. For example, the number of load ports 4, 5 in the EFEM 3 is not limited to three. In addition, the load ports 5 may be replaced with the load ports 4. The gas injected into the FOUP 300 may be an inert gas other than nitrogen. The container for accommodating the substrate is not limited to the FOUP 300, and may be FOSB (Front Opening Shipping Box) for transporting the substrate between factories, for example. The transfer system including the load ports 4, 5 and the transfer chamber 6 is not limited to the EFEM 3, and may be, for example, a sorter that inputs and outputs substrates between a plurality of containers. The conveying unit that conveys the substrate is not limited to the conveying robot 7. The transport unit for transporting the container is not limited to the OHT 400, and may be any transport unit that transports the container along a track provided in advance. The distance L in the front-rear direction between the rail and the partition wall 8 on the front side of the conveyance chamber 6 is not limited to about 243 mm.

Claims (6)

1. A load port comprising a loading part for loading a container for accommodating a substrate, and delivering the container between the loading part and a conveying unit for conveying the container along a preset track,
the load port further includes:
a base configured to stand and having an opening;
a door portion provided on the base for opening and closing the opening portion;
a frame provided so as to protrude forward from the base in a front-rear direction orthogonal to the base and supporting the placement portion;
a rotation mechanism that rotates the placement unit about a vertical axis;
a moving mechanism that moves the container away from the door after the container is placed on the placement unit by the conveying means and before or during rotation of the placement unit by the rotating mechanism; and
the control part is used for controlling the control part to control the control part,
the control unit moves the placement unit from a delivery position where the container is received from the conveying unit to a separation position forward of the delivery position, and then moves the placement unit to a door opening/closing position rearward of the delivery position, in which the door is separated from the container and the placement unit is rotated, and in which a cover provided on a side surface of the container is opened and closed together with the door.
2. The load port of claim 1, wherein the load port is configured to,
the moving mechanism moves the placement portion to the separated position by projecting the placement portion forward of the frame.
3. The load port of claim 2, wherein the load port is configured to,
the load port further includes:
a detection unit that detects an obstacle located in front of the frame; and
and a control unit that restricts movement of the placement unit to the separation position when the detection unit detects the obstacle.
4. The load port according to any of the claims 1 to 3, characterized in that,
the moving mechanism has a movable portion supporting the rotating mechanism from below and movable in the front-rear direction,
the placement portion is supported from below by the rotating mechanism,
the nozzle for gas injection or discharge is supported by the movable portion, and is movable up and down between a connection position to be connected to a nozzle insertion port formed in a bottom surface of the container mounted on the mounting portion and a nozzle separation position to be separated downward from the nozzle insertion port.
5. The load port of claim 4, wherein the load port is configured to,
before or during the movement of the mounting portion to the door opening/closing position by the movement mechanism, the nozzle is moved to the connection position, and gas injection into or gas discharge from the container is started through the nozzle.
6. A substrate conveying system is characterized in that,
the substrate conveying system includes:
a 1 st load port, which is the load port of any one of claims 1-5;
a 2 nd loading port having the loading portion and not having the rotation mechanism; and
a transport chamber having a transport unit for inputting and outputting the substrate to and from the container,
the transfer position of the placement portion of the 1 st load port and the transfer position of the placement portion of the 2 nd load port are arranged along the track of the transport unit.
CN201710547109.0A 2016-07-08 2017-07-06 Load port and substrate transport system including load port Active CN107591352B (en)

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JP6882656B2 (en) 2021-06-02
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KR20220097367A (en) 2022-07-07
TW202234565A (en) 2022-09-01
TW201804556A (en) 2018-02-01
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JP2018006705A (en) 2018-01-11
KR20180006312A (en) 2018-01-17

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