CN107515449B - A kind of multi-channel high-speed rate optical module structure and processing method - Google Patents

A kind of multi-channel high-speed rate optical module structure and processing method Download PDF

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Publication number
CN107515449B
CN107515449B CN201710890857.9A CN201710890857A CN107515449B CN 107515449 B CN107515449 B CN 107515449B CN 201710890857 A CN201710890857 A CN 201710890857A CN 107515449 B CN107515449 B CN 107515449B
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China
Prior art keywords
waveguide
wave multiplexer
monitoring
laser
4th
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CN201710890857.9A
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Chinese (zh)
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CN107515449A (en
Inventor
陈奔
封建胜
周天红
高万超
张玓
周日凯
付永安
孙莉萍
张军
余向红
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武汉电信器件有限公司
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4246Bidirectionally operating package structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/10Light guides of the optical waveguide type
    • G02B6/12Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035Materials
    • G02B2006/12038Glass (SiO2 based materials)

Abstract

The present invention relates to optical module technical field, a kind of multi-channel high-speed rate optical module structure and processing method are provided.Wherein PLC includes that first wave guide 1-1 connects the first wave multiplexer 11 with second waveguide 1-2;Third waveguide 1-3 and the 4th the second wave multiplexer of waveguide 1-4 connection 12;First wave multiplexer 11 connects third wave multiplexer 13 by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12;The first monitoring waveguide 3-1 is also drawn on the first wave guide 1-1;The second monitoring waveguide 3-2 is also drawn on the 5th waveguide 2-1;Third monitoring waveguide 3-3 is also drawn on the 6th waveguide 2-2;The 4th monitoring waveguide 3-4 is also drawn on the 4th waveguide 1-4.The present invention provides waveguide layout schemes, so that the two sides PLC are arranged in a manner of opposite end and become possibility for optical detector and laser, the existing intrinsic thinking that optical detector is fixed on to laser light-emitting surface behind is overcome, the radio frequency effect when being higher than 25G rate is improved.

Description

A kind of multi-channel high-speed rate optical module structure and processing method

[technical field]

The present invention relates to optical module technical fields, more particularly to a kind of multi-channel high-speed rate optical module structure and processing side Method.

[background technique]

The sharply development of data communication especially data center in recent years, market need big quantity high performance, inexpensive light Module.High-performance refers mainly to the high-speed and miniaturization of optical module;Inexpensive then include material cost, simple process can make Property made etc..4 optical path 100G (25Gx4) modules of commercialization progress into volume production just now at present, and the demand in market and standardization refer to again To such as 200G, the higher optical module of the rates such as 400G.On the other hand, there is harsher want to the miniaturization of module in the market It asks.For example, the module of QSFP-DD encapsulates standard, it is exactly (long under conditions of current QSFP28 (100Gbps) is same wide and high Degree is temporarily uncertain), rate will increase by 2 times (200Gbps) or even 4 times (400Gbps).

Realizing 200G and 400G, substantially there are two types of structures:

1) 4 optical path:

A) 4x (25Gx2)=200G, wherein be encoded to PAM4;

B) 4x50G=200G, wherein be encoded to NRZ;

C) 4x (50Gx2)=400G, wherein be encoded to PAM4;

2) 8 optical path:

A) 8x25G=200G;Wherein, it is encoded to NRZ;

B) 8x (25Gx2)=400G, wherein be encoded to PAM4;

C) 8x (50Gx2)=800G, wherein be encoded to PAM4;

For structurally, 4x50G=200G, NRZ or 4x (50Gx2) directly is risen in every road 25G of 4 optical paths =400G, PAM4 are the simplest.However it is very difficult that the baud rate of optical device, which is mentioned from 25G to 50G, or already close to object Manage the limit (such as directly modulation system laser).On the other hand, PAM4 modulation needs the better optical device of the linearity.These because Element increases the cost of optical device, and the higher optical module of the rates such as current 200G, 400G it is also difficult to achieve.

In addition, general optical module is intended to band optical detector, to keep good automated power control (Auto-Power Control writes a Chinese character in simplified form are as follows: APC) function.Conventional method is the rear side that detector is placed directly in laser.But it is being higher than 25G speed When rate, in order to realize good radio frequency effect, it is desirable to which the line of driver and laser is short as far as possible.Traditional optical detector is put Method becomes problem (wiring for influencing radio frequency line).

[summary of the invention]

When the technical problem to be solved by the present invention is to as where higher than 25G rate, in order to realize better radio frequency effect, Under the premise of needing the line of driver and laser distance short as far as possible, a kind of improvement light channel structure is provided.

The further technical problems to be solved of the present invention are to overcome to lack in the prior art using 25G laser to realize Specifically how 8 tunnel individual laser packages are encapsulated standard as the QSFP-DD by the solution of the optical module of 200G or 400G The inside provides feasible resolving ideas.

The present invention adopts the following technical scheme:

In a first aspect, the present invention provides a kind of multi-channel high-speed rate optical module structure, including at least one transmitting unit, Wherein, transmitting unit includes first laser device 1, second laser 2, third laser 3, the 4th laser 4, the first wave multiplexer 11, the second wave multiplexer 12, third wave multiplexer 13, the first optical detector 21, the second optical detector 22, third optical detector 23 and Four optical detectors 24, specific:

The first laser device 1 connects first with second waveguide 1-2 by first wave guide 1-1 respectively with second laser 2 Wave multiplexer 11;Wherein, on relative to horizontal direction, first wave multiplexer 11 be located at the first laser device 1 lower section and The top of second wave multiplexer 12;

The third laser 3 connects second by third waveguide 1-3 and the 4th waveguide 1-4 respectively with the 4th laser 4 Wave multiplexer 12;Wherein, on relative to horizontal direction, second wave multiplexer 12 be located at the 4th laser 4 top and The lower section of first wave multiplexer 11;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

Wherein, the first wave guide 1-1 is coupled into before the first wave multiplexer 11, draws the first monitoring waveguide 3-1;Described Five waveguide 2-1 also draw the second monitoring waveguide 3-2 before being coupled into third wave multiplexer 13;The 6th waveguide 2-2 is being coupled Before entering third wave multiplexer 13, draws third and monitor waveguide 3-3;The 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, draw the 4th monitoring waveguide 3-4;Also, the first monitoring waveguide 3-1, the second monitoring waveguide 3-2, third monitor waveguide The light-emitting window of the monitoring of 3-3 and the 4th waveguide 3-4 couples the first optical detector 21, the second optical detector 22, third optical detection respectively Device 23 and the 4th optical detector 24.

Preferably, each waveguide is specially SiO 2 waveguide, is the identical covering of refractive index, relative index of refraction outside sandwich layer Difference is 0.013.

Preferably, the interval between first laser device 1, second laser 2, third laser 3 and the 4th laser 4 is greater than Equal to 1mm, also, for carrying each waveguide, each wave multiplexer and the first laser device 1, second laser 2, third laser The width of the PLC substrate of device 3 and the 4th laser 4 is less than or equal to 6mm.

Preferably, the transmitting unit quantity is 2, and the transmitting unit is arranged on pcb board by mode side by side, And it is encapsulated in QSFP-DD.

Preferably, the back side of the pcb board is additionally provided with receiving end optical fiber, array waveguide grating, optical detector and across resistance Amplifier, specific:

The trans-impedance amplifier and optical detector are respectively welded at the back side of the pcb board, one end quilt of receiving end optical fiber The light inlet side of array waveguide grating is set, also, the light-emitting window side of the array waveguide grating and optical detector complete light The back side of the pcb board is fixed under conditions of the coupling of road.

Second aspect, the present invention provides the production method of PLC in multi-channel high-speed rate optical module a kind of, the PLC of production For in multi-channel high-speed rate optical module structure as described in relation to the first aspect, the production method to include:

Waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches preset waveguide institute setting parameter;Wherein, described Waveguide base-material includes waveguide under-clad layer;

Photoresist is coated, and makes first wave guide 1-1 by lithography, second waveguide 1-2, the 5th waveguide 2-1, the 6th waveguide 2-2, go out Optical waveguide 3-0, the first monitoring waveguide 3-1, the second monitoring waveguide 3-2 and third monitor waveguide 3-3 figure;Wherein, in first wave The intersection for leading 1-1, second waveguide 1-2 and the 5th waveguide 2-1 makes 11 figure of the first wave multiplexer by lithography;In third waveguide 1-3, The intersection of four waveguide 1-4 and the 6th waveguide 2-2 makes 12 figure of the second wave multiplexer by lithography;In the 5th waveguide 2-1, the 6th waveguide 2- 2 and the intersection of optical waveguide 3-0 makes 13 figure of third wave multiplexer by lithography out;

After washing out each waveguide pattern using developer solution, corroded in wafer using corrosive liquid out for making each waveguide Figure;

Photoresist, the top covering of continued growth waveguide are removed, and completes the production of PLC.

Preferably, the junction of the monitoring of the first wave guide 1-1 and first waveguide 3-1 is obtained according to the first monitoring waveguide 3-1 The Proportionality design of 5-10% must be divided;The junction of the monitoring of the 5th waveguide 2-1 and second waveguide 3-2, according to the second monitoring Waveguide 3-2 obtains the Proportionality design of light splitting 5-10%;The junction of the 6th waveguide 2-2 and third monitoring waveguide 3-3, according to Third monitors the Proportionality design that waveguide 3-3 obtains light splitting 5-10%;The company of the monitoring of the 4th waveguide 1-4 and the 4th waveguide 3-4 Place is met, the Proportionality design of light splitting 5-10% is obtained according to the 4th monitoring waveguide 3-4.

Preferably, the PLC is located at first wave guide 1-1, second waveguide 1-2, third waveguide 1-3 and the 4th waveguide 1-4 Light inlet side makes the upside-down mounting for having corresponding first laser device 1, second laser 2, third laser 3 and the 4th laser 4 respectively Weld pedestal.

The third aspect, the present invention also provides a kind of multi-channel high-speed rate optical module structures, including at least one transmitting is single Member, wherein transmitting unit includes first laser device 1, second laser 2, third laser 3, the 4th laser 4, the first multiplex Device 11, the second wave multiplexer 12, third wave multiplexer 13, the first optical detector 21, the second optical detector 22,23 and of third optical detector 4th optical detector 24, specific:

The first laser device 1 connects first with second waveguide 1-2 by first wave guide 1-1 respectively with second laser 2 Wave multiplexer 11;Wherein, on relative to horizontal direction, first wave multiplexer 11 is located at the first laser device 1 and second and swashs Between light device 2;

The third laser 3 connects second by third waveguide 1-3 and the 4th waveguide 1-4 respectively with the 4th laser 4 Wave multiplexer 12;Wherein, on relative to horizontal direction, second wave multiplexer 12 is located at the third laser 3 and the 4th and swashs Between light device 4;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

The first wave guide 1-1 and second waveguide 1-2 draws the first monitoring before being coupled into the first wave multiplexer 11 respectively The monitoring of waveguide 3-1 and second waveguide 3-2;The third waveguide 1-3 and the 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, the third monitoring of monitoring waveguide 3-3 and the 4th waveguide 3-4 is drawn respectively;Wherein, the second monitoring waveguide 3-2 and third monitor wave Lead the lower section that 3-3 is located at other each waveguides in PLC vertical direction;

The first monitoring waveguide 3-1, the second monitoring waveguide 3-2, the third monitoring of monitoring waveguide 3-3 and the 4th waveguide 3-4 Light-emitting window couple the first optical detector 21, the second optical detector 22, third optical detector 23 and the 4th optical detector 24 respectively.

Preferably, each waveguide is specially SiO 2 waveguide, is the identical covering of refractive index, relative index of refraction outside sandwich layer Difference is 0.013.

Preferably, the interval between first laser device 1, second laser 2, third laser 3 and the 4th laser 4 is greater than Equal to 1mm, also, for carrying each waveguide, each wave multiplexer and the first laser device 1, second laser 2, third laser The width of the PLC substrate of device 3 and the 4th laser 4 is less than or equal to 6mm.

Preferably, the transmitting unit quantity is 2, and the transmitting unit is arranged on pcb board by mode side by side, And it is encapsulated in QSFP-DD.

Fourth aspect, the present invention also provides the production method of PLC in multi-channel high-speed rate optical module a kind of, production PLC is in the multi-channel high-speed rate optical module structure as described in the third aspect, the production method to include:

Waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches preset first layer waveguide institute setting parameter;Its In, the waveguide base-material includes waveguide under-clad layer;

Photoresist is coated, and makes the second monitoring waveguide 3-2 and third monitoring waveguide 3-3 figure by lithography;It is clear using developer solution After washing out each waveguide pattern, corroded in wafer using corrosive liquid out for making the second monitoring waveguide 3-2 and third monitoring wave Lead the figure of 3-3;Photoresist is removed, is wrapped in growth on the figure of corresponding second monitoring waveguide 3-2 and third monitoring waveguide 3-3 Layer;

And when top covering material thickness reaches preset second layer waveguide present position, pass through above-mentioned growth-photoetching side Formula completes first wave guide 1-1, second waveguide 1-2, the 5th waveguide 2-1, the 6th waveguide 2-2, goes out optical waveguide 3-0, the first monitoring wave Lead the production of 3-1;Wherein, there is the first multiplex in intersection's production of first wave guide 1-1, second waveguide 1-2 and the 5th waveguide 2-1 Device 11;There is the second wave multiplexer 12 in intersection's production of third waveguide 1-3, the 4th waveguide 1-4 and the 6th waveguide 2-2;The 5th Intersection's production of waveguide 2-1, the 6th waveguide 2-2 and out optical waveguide 3-0 have third wave multiplexer 13;And each waveguide is completed in growth After remove photoresist, continued growth top covering material, and complete the production of PLC.

Preferably, the junction of the monitoring of the first wave guide 1-1 and first waveguide 3-1 is obtained according to the first monitoring waveguide 3-1 The Proportionality design of 5-10% must be divided;The junction of the monitoring of the second waveguide 1-2 and second waveguide 3-2, according to the second monitoring Waveguide 3-2 obtains the Proportionality design of light splitting 5-10%;The junction of the third waveguide 1-3 and third monitoring waveguide 3-3, according to Third monitors the Proportionality design that waveguide 3-3 obtains light splitting 5-10%;The company of the monitoring of the 4th waveguide 1-4 and the 4th waveguide 3-4 Place is met, the Proportionality design of light splitting 5-10% is obtained according to the 4th monitoring waveguide 3-4.

Preferably, the PLC is located at first wave guide 1-1, second waveguide 1-2, third waveguide 1-3 and the 4th waveguide 1-4 Light inlet side makes the upside-down mounting for having corresponding first laser device 1, second laser 2, third laser 3 and the 4th laser 4 respectively Weld pedestal.

5th aspect, the present invention also provides a kind of PLC applied to multi-channel high-speed rate optical module, comprising:

First wave guide 1-1 connects the first wave multiplexer 11 with second waveguide 1-2;Wherein, described on relative to horizontal direction First wave multiplexer 11 is located at the lower section of the first wave guide 1-1 light inlet and the top of the second wave multiplexer 12;

Third waveguide 1-3 and the 4th the second wave multiplexer of waveguide 1-4 connection 12;Wherein, described on relative to horizontal direction Second wave multiplexer 12 is located at the top of the 4th waveguide 1-4 light inlet and the lower section of the first wave multiplexer 11;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

Wherein, the first wave guide 1-1 is coupled into before the first wave multiplexer 11, draws the first monitoring waveguide 3-1;Described Five waveguide 2-1 also draw the second monitoring waveguide 3-2 before being coupled into third wave multiplexer 13;The 6th waveguide 2-2 is being coupled Before entering third wave multiplexer 13, draws third and monitor waveguide 3-3;The 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, draw the 4th monitoring waveguide 3-4.

Compared with prior art, the beneficial effects of the present invention are:

The present invention provides two kinds of alternative waveguide layout schemes, so that optical detector and laser are in a manner of opposite end Being arranged becomes possibility in the two sides PLC, overcomes the laser light-emitting surface that is fixed on optical detector used in the prior art and carries on the back Intrinsic thinking afterwards improves when being higher than 25G rate, realizes better radio frequency effect.

By the present invention in that optical device and optical path are integrated with semiconductor approach with Planar Lightwave Circuit Technology, so that 8 optical paths It is put into QSFP-DD and is encapsulated into possibility.Further, in currently preferred implementation also for the size of laser, Setting interval, PLC substrate width etc. give a set of feasible parameter configuration.

[Detailed description of the invention]

In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with Other attached drawings are obtained according to these attached drawings.

Fig. 1 is the schematic diagram of transmitting unit in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention;

Fig. 2 is a kind of schematic diagram of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention;

Fig. 3 is the signal of optical detection structure in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Fig. 4 is the signal of optical detection structure in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Fig. 5 is a kind of multi-channel high-speed rate optical module structure signal with transmission-receiving function provided in an embodiment of the present invention Figure;

Fig. 6 is the top view of receiving module in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention;

Fig. 7 is the main view of receiving module in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention;

Fig. 8 is a kind of looking up for multi-channel high-speed rate optical module structure with transmission-receiving function provided in an embodiment of the present invention Figure;

Fig. 9 be it is provided in an embodiment of the present invention pcb board is encapsulated into QSFP-DD optical module after effect diagram;

Figure 10 be it is provided in an embodiment of the present invention pcb board is encapsulated into QSFP-DD optical module after effect diagram;

Figure 11 is a kind of optical detector LD1 peripheral circuit structural schematic diagram provided in an embodiment of the present invention;

Figure 12 is a kind of optical detector LD1+LD2 peripheral circuit structural schematic diagram provided in an embodiment of the present invention;

Figure 13 is the signal of transmitting unit in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Figure 14 is PLC production method process in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Figure 15 is a kind of PLC structural schematic diagram of welding pedestal provided in an embodiment of the present invention;

Figure 16 is the signal of transmitting unit in also a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Figure 17 is the PLC structural schematic diagram of another welding pedestal provided in an embodiment of the present invention;

Figure 18 is PLC production method process in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention Figure;

Figure 19 is a kind of PLC structural schematic diagram provided in an embodiment of the present invention.

[specific embodiment]

In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.

In the description of the present invention, term "inner", "outside", " longitudinal direction ", " transverse direction ", "upper", "lower", "top", "bottom" etc. refer to The orientation or positional relationship shown be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the present invention rather than It is required that the present invention must be constructed and operated in a specific orientation, therefore it is not construed as limitation of the present invention.

The structure that various embodiments of the present invention are proposed is suitable for including but is not limited to QSFP-DD, OSFP, CFP, SFP-DD etc. Packing forms.

In addition, as long as technical characteristic involved in the various embodiments of the present invention described below is each other not Constituting conflict can be combined with each other.

Embodiment 1:

The embodiment of the present invention 1 provides a kind of multi-channel high-speed rate optical module structure, as shown in Figure 1, including at least one Transmitting unit, wherein transmitting unit includes first laser device 1, second laser 2, third laser 3, the 4th laser 4, One wave multiplexer 11, the second wave multiplexer 12, third wave multiplexer 13, the first optical detector 21, the second optical detector 22, third optical detection Device 23 and the 4th optical detector 24, specific:

The first laser device 1 connects first with second waveguide 1-2 by first wave guide 1-1 respectively with second laser 2 Wave multiplexer 11;Wherein, on relative to horizontal direction, first wave multiplexer 11 be located at the first laser device 1 lower section and The top of second wave multiplexer 12;

The third laser 3 connects second by third waveguide 1-3 and the 4th waveguide 1-4 respectively with the 4th laser 4 Wave multiplexer 12;Wherein, on relative to horizontal direction, second wave multiplexer 12 be located at the 4th laser 4 top and The lower section of first wave multiplexer 11;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

Wherein, the first wave guide 1-1 is coupled into before the first wave multiplexer 11, draws the first monitoring waveguide 3-1;Described Five waveguide 2-1 also draw the second monitoring waveguide 3-2 before being coupled into third wave multiplexer 13;The 6th waveguide 2-2 is being coupled Before entering third wave multiplexer 13, draws third and monitor waveguide 3-3;The 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, draw the 4th monitoring waveguide 3-4;Also, the first monitoring waveguide 3-1, the second monitoring waveguide 3-2, third monitor waveguide The light-emitting window of the monitoring of 3-3 and the 4th waveguide 3-4 couples the first optical detector 21, the second optical detector 22, third optical detection respectively Device 23 and the 4th optical detector 24.

The embodiment of the invention provides a kind of waveguide layout schemes, so that optical detector and laser are arranged in a manner of opposite end Become possibility in the two sides planar optical waveguide (Planar Light wave Circuit, write a Chinese character in simplified form are as follows: PLC), overcomes existing skill What is used in art is fixed on optical detector the intrinsic thinking of laser light-emitting surface behind, improves when being higher than 25G rate, real Now better radio frequency effect.Also, the embodiment of the present invention is combined by cleverly layout and detection method, so that each waveguide is in In the case where same plane, it still is able to avoid to intersect bring Insertion Loss between waveguide, ensure that the precision of detection.

Optical waveguide solution provided by the embodiment of the present invention can guarantee that each waveguide and wave multiplexer are same in PLC Thickness area, so as to be further ensured that manufacturing cycle and the manufacturing cost of corresponding transmitting unit.

By the present invention in that optical device and optical path are integrated with semiconductor approach with Planar Lightwave Circuit Technology, so that 8 optical paths It is put into QSFP-DD and is encapsulated into possibility.By the structure of embodiment 1 be applied to 8 optical paths be put into QSFP-DD encapsulation when, LD1 (in LD1, that is, first laser device 1 as shown in fig. 1, other laser serial numbers and Fig. 1 label corresponding relationship and so on), LD2, LD3 and LD4 is 25G laser, and the interval of each laser is more than or equal to 1mm, also, for carrying each waveguide, each wave multiplexer, with And the width of the PLC substrate of described LD1, LD2, LD3 and LD4 is less than or equal to 6mm.As shown in Fig. 2, the wherein quantity of transmitting unit It is 2, therefore, when coding is using NRZ, can get the transmission rate of 2x (25Gx4)=200G.When by the rate of each laser When being adjusted to 50G, the optical module of 400G transmission rate just can be obtained;In addition, can also pass through when using PAM4 coding The transmission rate of 25G laser acquisition 400G.Wherein, PLCA is the abbreviation of PLC Assembly, show laser etc. by Upside-down mounting is welded to the later PLC optical assembly of PLC.LDD1 (Laser Diode Driver) and LDD2 is the laser driving in 4 channels Device.

In embodiments of the present invention due to the limitation of transverse width, the side of PLC cannot put optical detection in transmitting unit Device, then optical detector is put into the other side opposite with laser.Because the signal of optical detector is direct current signal (optical power), It is placed into the problem of not will cause electric signal quality relative to the opposite end of laser in PLC.

When using side entering light detector, optical detector (Photo Diode, writes a Chinese character in simplified form are as follows: PD) is simply placed on PLC in this way On side can (as shown in Figure 3), spacing is about at 5-10 microns;Face entering light detector can also be used, but needs to add a branch Optical detector is fixed into the form (shown in Fig. 4) that can receive light from side by frame (stand).

In embodiments of the present invention, each waveguide is SiO 2 waveguide, is the identical covering of refractive index outside sandwich layer, relatively Refringence is 0.013, and the size of waveguide includes but is not limited to 4.4 μm of 3.3 μ m.

Structure described in the embodiment of the present invention 1 can be applied to the optical module with single emission function, can also apply In the optical module with transmission-receiving function.Next, will be specifically described how more demanding for size in similar QSFP-DD Encapsulation standard in integrate transceiver module.

As shown in figure 5, in conjunction with the embodiment of the invention also provides a kind of optical module structure of transmission-receiving function integral type, In, the back side of the pcb board be additionally provided with receiving end optical fiber, array waveguide grating (Arrayed Waveguide Grating, Write a Chinese character in simplified form are as follows: AWG), optical detector PD and trans-impedance amplifier (Trans-Impedance Amplifier, writes a Chinese character in simplified form are as follows: TIA), specifically :

The trans-impedance amplifier and optical detector are respectively welded at the back side of the pcb board, one end quilt of receiving end optical fiber The light inlet side of array waveguide grating is set, also, the light-emitting window side of the array waveguide grating and optical detector complete light The back side of the pcb board is fixed under conditions of the coupling of road.

Receiving side of the invention equally uses planar optical waveguide PLC technology.Wherein Optical Demultiplexing function, which can be used, is based on Array waveguide grating AWG, directional coupler (Directional Coupler) or the Mach Zehnder interference (Mach- of PLC Zehnder interferometer, writes a Chinese character in simplified form are as follows: MZI) coupler.In order to describe conveniently, the embodiment of the present invention is come by taking AWG as an example It is illustrated.As shown in Figure 6 and Figure 7, AWG is first by the 4 tunnel Optical Demultiplexings received from optical fiber to different wave length, in addition in AWG The light end that goes out be made into about 45 degree of chamfering, light is turn 90 degrees downwards;Couple directly to detector array (Photo Diode Array writes a Chinese character in simplified form are as follows: PDA) photosurface.The electrode of detector is bonded to TIA IC (as shown in Figure 7) by gold thread.

As shown in figure 8, the effect that the light-receiving structure to be proposed the embodiment of the present invention is put into after QSFP-DD encapsulation is shown It is intended to, wherein the top surface PCB shown in the PCB reverse side and Fig. 2 of Fig. 8, which constitutes one, has transmission-receiving function, can be applied to QSFP-DD The mainboard structure of encapsulation (as shown in Figure 9 and Figure 10, is illustrated for the effect after the pcb board is encapsulated into QSFP-DD optical module Figure).

As shown in Figure 1, waveguide 3-1 is monitored from first wave guide 1-1 light splitting 5-10% to first, for monitoring the light function of LD1 Rate;Waveguide 3-2 is monitored from the 5th waveguide 2-1 light splitting 5-10% to second, the total optical power of LD1 and LD2 can be monitored.In circuit It is upper (to be realized by MCU by simple subtraction, plus and minus calculation electricity directly can also be built by power integrated chip Road is realized), so that it may monitor the optical power of LD2.The principle is as follows:

Model as shown in figure 11 samples the monitoring signal from optical detector.V1 is the sampling voltage of LD1, with LD1's Optical power is directly proportional;Similarly, V is the sampling voltage of LD1+LD2, directly proportional to the optical power of LD1+LD2 (as shown in figure 12). Assuming that R is identical, it is clear that the sampling voltage of LD2 is V2=V-V1.And so on complete LD3 and LD4 optical power monitoring, then this The monitoring waveguide of inventive embodiments constitutes the light power that can monitor all lasers.

It as shown in figure 13, is another manifestation mode of structure described in the embodiment of the present invention, wherein the second monitoring waveguide 3- 2 the relatively parallel position of same level is arranged in second waveguide 1-2.For waveguiding structure more as shown in Figure 1, Due to the waveguide of LD1 and LD2 be no longer it is symmetrical, the deviation for detecting optical power in PD21 and PD22 can be brought, had Body using when need to be beforehand with debugging efforts, to do weighting processing from each optical power for detecting of monitoring waveguide.

Wherein, test process is specifically described as triggering LD1 and LD4 work first, and keeps LD2 and LD3 to be in and stop work Make state, at this point, be compared by the power parameter value that PD21, PD22, PD23 and PD24 are detected, due to, PD21 and PD22 is therefore the LD1 performance number that detection obtains can obtain respective weighted value by the parameter value calculation of the two;And PD23 and PD24 is therefore the LD4 performance number that detection obtains can obtain respective weighting by the parameter value calculation of the two Value.Preferably, it can be tested by being repeated several times, obtain the weighted value variation in the covered laser band limits of the PLC Curve, and according to real work situation, the respective weight value by PD21, PD22, PD23 and PD24 parameter value got is adjusted, And the performance number of each laser is finally accurately calculated.

Embodiment 2:

After providing a kind of multi-channel high-speed rate optical module structure as described in Example 1, the embodiment of the present invention is then It is to lay particular emphasis on the production for how completing PLC unit used in embodiment 1 to be unfolded, as shown in figure 14, the production side Method includes:

In step 201, waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches the set ginseng of preset waveguide Number;Wherein, the waveguide base-material includes waveguide under-clad layer.

In step 202, photoresist is coated, and makes first wave guide 1-1, second waveguide 1-2, the 5th waveguide 2-1, the by lithography Six waveguide 2-2, go out optical waveguide 3-0, the first monitoring waveguide 3-1, the second monitoring waveguide 3-2 and third monitoring waveguide 3-3 figure;Its In, 11 figure of the first wave multiplexer is made by lithography in the intersection of first wave guide 1-1, second waveguide 1-2 and the 5th waveguide 2-1;? The intersection of three waveguide 1-3, the 4th waveguide 1-4 and the 6th waveguide 2-2 make 12 figure of the second wave multiplexer by lithography;In the 5th waveguide 2- 1, the 6th waveguide 2-2 and intersection of optical waveguide 3-0 makes 13 figure of third wave multiplexer by lithography out.

In step 203, after washing out each waveguide pattern using developer solution, corroded in wafer using corrosive liquid and used out In the figure for making each waveguide.

In step 204, photoresist, the top covering of continued growth waveguide are removed, and completes the production of PLC.

Wherein, each waveguide is specially SiO 2 waveguide, is the identical covering of refractive index, relative fefractive index difference outside sandwich layer It is 0.013.The size of waveguide includes but is not limited to 4.4 μm of 3.3 μ m.

The embodiment of the invention provides a kind of applied in multi-channel high-speed rate optical module structure described in embodiment 1 The production method of PLC unit, other than it can obtain beneficial effect described in embodiment 1 after being applied to embodiment 1, due to this Inventive embodiments specify that the relative position on the vertical plane of each waveguide in embodiment 1 (is located on same vertical plane, relatively In the position for sinking to the bottom same depth) so that the processing and fabricating efficiency and yield rate of the PLC have a necessary guarantee, also, because The simplification of manufacturing procedure also reduces the cost of manufacture of multi-channel high-speed rate optical module structure as described in Example 1.

In conjunction with the embodiment of the present invention, one group of optional parameter also is provided to be related to the waveguide light-splitting accounting of light splitting region, Such as: the junction of the monitoring of the first wave guide 1-1 and first waveguide 3-1 obtains light splitting 5- according to the first monitoring waveguide 3-1 10% Proportionality design;The junction of the monitoring of the 5th waveguide 2-1 and second waveguide 3-2 is obtained according to the second monitoring waveguide 3-2 The Proportionality design of 5-10% must be divided;The junction of the 6th waveguide 2-2 and third monitoring waveguide 3-3, monitor according to third Waveguide 3-3 obtains the Proportionality design of light splitting 5-10%;The junction of the monitoring of the 4th waveguide 1-4 and the 4th waveguide 3-4, according to 4th monitoring waveguide 3-4 obtains the Proportionality design of light splitting 5-10%.

In order to further increase the integrated level of transmitting unit in embodiment 1, production is used for each laser of face-down bonding on PLC The pedestal of device is optimal solution, can not only reduce the occupied cost of a coupled lens, but also can be to avoid the coupling Close occupancy spatially brought by lens.Can refer to first patent, (patent No. " 201610326883.4 ", patent name are " a kind of Planar Optical Waveguide Structures and its coupled structure and coupling process "), as shown in figure 15, the PLC is located at first wave guide 1- 1, the light inlet side of second waveguide 1-2, third waveguide 1-3 and the 4th waveguide 1-4 make respectively corresponding first laser device 1, The face-down bonding pedestal of dual-laser device 2, third laser 3 and the 4th laser 4.

In embodiments of the present invention, due to made in PLC the first wave multiplexer 11 and optical splitter (such as: first wave guide 1-1 At the first monitoring waveguide 3-1 coupling interface) belong to the prior art, the claimed phase during being its production method of the present invention To the opportunity of position and production, therefore, details are not described herein for production details.

Embodiment 3:

Providing a kind of multi-channel high-speed rate optical module structure as described in Example 1 and correspondence as described in example 2 After the correspondence manufacturing method of PLC used in embodiment 1, the embodiment of the present invention provides another kind from alternative scheme angle Multi-channel high-speed rate optical module structure.The embodiment that compares 1, the structure that the embodiment of the present invention is proposed can be correspondingly improved PLC The manufacturing cost of unit, still, a kind of optional implementation of can yet be regarded as.(wherein Figure 17 is to scheme as shown in Figure 16 and Figure 17 It is located at the partial sectional view of the main view of the side the LD4 side Kan XiangLD1 on 16), including at least one transmitting unit, wherein transmitting is single Member includes first laser device 1, second laser 2, third laser 3, the 4th laser 4, the first wave multiplexer 11, the second wave multiplexer 12, third wave multiplexer 13, the first optical detector 21, the second optical detector 22, third optical detector 23 and the 4th optical detector 24, It is specific:

The first laser device 1 connects first with second waveguide 1-2 by first wave guide 1-1 respectively with second laser 2 Wave multiplexer 11;Wherein, on relative to horizontal direction, first wave multiplexer 11 is located at the first laser device 1 and second and swashs Between light device 2;

The third laser 3 connects second by third waveguide 1-3 and the 4th waveguide 1-4 respectively with the 4th laser 4 Wave multiplexer 12;Wherein, on relative to horizontal direction, second wave multiplexer 12 is located at the third laser 3 and the 4th and swashs Between light device 4;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

The first wave guide 1-1 and second waveguide 1-2 draws the first monitoring before being coupled into the first wave multiplexer 11 respectively The monitoring of waveguide 3-1 and second waveguide 3-2;The third waveguide 1-3 and the 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, the third monitoring of monitoring waveguide 3-3 and the 4th waveguide 3-4 is drawn respectively;Wherein, the second monitoring waveguide 3-2 and third monitor wave Lead the lower section that 3-3 is located at other each waveguides in PLC vertical direction;

The first monitoring waveguide 3-1, the second monitoring waveguide 3-2, the third monitoring of monitoring waveguide 3-3 and the 4th waveguide 3-4 Light-emitting window couple the first optical detector 21, the second optical detector 22, third optical detector 23 and the 4th optical detector 24 respectively.

The embodiment of the invention provides a kind of waveguide layout schemes, so that optical detector and laser are arranged in a manner of opposite end In the two sides PLC become possibility, overcome use in the prior art optical detector is fixed on to laser light-emitting surface behind Intrinsic thinking improves when being higher than 25G rate, realizes better radio frequency effect.Also, the embodiment of the present invention is by cleverly Layout combines and detection method, so that still being able to halved belt between control waveguide in the case that each waveguide is in same plane The Insertion Loss come within a preset range, ensure that the precision of detection.

Since the embodiment of the present invention and embodiment 1 are only adjusted in the layout of waveguide, other aspects are similar to waveguide Parameter, waveguide material selection can be with 1 institute of reference implementation example and suitable for the topology layout etc. under emission and reception module The content of elaboration, details are not described herein.

Embodiment 4:

Corresponding and embodiment 3, the embodiment of the invention also provides the production sides of PLC in multi-channel high-speed rate optical module a kind of The PLC of method, production is used in multi-channel high-speed rate optical module structure described in embodiment 3, as shown in figure 18, the production method Include:

In step 301, waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches preset first layer waveguide Institute's setting parameter;Wherein, the waveguide base-material includes waveguide under-clad layer.

In step 302, photoresist is coated, and makes the second monitoring waveguide 3-2 and third monitoring waveguide 3-3 figure by lithography; After washing out each waveguide pattern using developer solution, corroded in wafer using corrosive liquid out for making the second monitoring waveguide 3-2 With the figure of third monitoring waveguide 3-3, photoresist is removed, in the figure of corresponding second monitoring waveguide 3-2 and third monitoring waveguide 3-3 Top covering is grown in shape.

In step 303, when top covering material thickness reaches preset second layer waveguide present position, pass through above-mentioned life Length-photolithographicallpatterned (i.e. step 301-302 process) completes first wave guide 1-1, second waveguide 1-2, the 5th waveguide 2-1, the 6th wave The production led 2-2, go out optical waveguide 3-0, the first monitoring waveguide 3-1;Wherein, in first wave guide 1-1, second waveguide 1-2 and the 5th Intersection's production of waveguide 2-1 has the first wave multiplexer 11;In the friendship of third waveguide 1-3, the 4th waveguide 1-4 and the 6th waveguide 2-2 Production has the second wave multiplexer 12 at remittance;Have the in the 5th waveguide 2-1, the 6th waveguide 2-2 and out intersection's production of optical waveguide 3-0 Three wave multiplexers 13;

In step 304, and after each waveguide is completed in growth photoresist, continued growth top covering material are removed, and completed The production of PLC.

In conjunction with the embodiment of the present invention, one group of optional parameter also is provided to be related to the waveguide light-splitting accounting of light splitting region, Such as: the junction of the monitoring of the first wave guide 1-1 and first waveguide 3-1 obtains light splitting 5- according to the first monitoring waveguide 3-1 10% Proportionality design;The junction of the monitoring of the second waveguide 1-2 and second waveguide 3-2 is obtained according to the second monitoring waveguide 3-2 The Proportionality design of 5-10% must be divided;The junction of the third waveguide 1-3 and third monitoring waveguide 3-3, monitor according to third Waveguide 3-3 obtains the Proportionality design of light splitting 5-10%;The junction of the monitoring of the 4th waveguide 1-4 and the 4th waveguide 3-4, according to 4th monitoring waveguide 3-4 obtains the Proportionality design of light splitting 5-10%.

In order to further increase the integrated level of transmitting unit in embodiment 1, production is used for each laser of face-down bonding on PLC The pedestal of device is optimal solution, can not only reduce the occupied cost of a coupled lens, but also can be to avoid the coupling Close occupancy spatially brought by lens.Can refer to first patent, (patent No. " 201610326883.4 ", patent name are " a kind of Planar Optical Waveguide Structures and its coupled structure and coupling process "), as shown in figure 15, the PLC is located at first wave guide 1- 1, the light inlet side of second waveguide 1-2, third waveguide 1-3 and the 4th waveguide 1-4 make respectively corresponding first laser device 1, The face-down bonding pedestal of dual-laser device 2, third laser 3 and the 4th laser 4.

In embodiments of the present invention, due to made in PLC the first wave multiplexer 11 and optical splitter (such as: first wave guide 1-1 At the first monitoring waveguide 3-1 coupling interface) belong to the prior art, the claimed phase during being its production method of the present invention To the opportunity of position and production, therefore, details are not described herein for production details.

Embodiment 5:

According to the manufacturing method for the PLC for being applied to multi-channel high-speed rate optical module described in embodiment 2, the embodiment of the present invention is mentioned Corresponding PLC structure is supplied, as shown in figure 19, comprising:

First wave guide 1-1 connects the first wave multiplexer 11 with second waveguide 1-2;Wherein, described on relative to horizontal direction First wave multiplexer 11 is located at the lower section of the first wave guide 1-1 light inlet and the top of the second wave multiplexer 12;

Third waveguide 1-3 and the 4th the second wave multiplexer of waveguide 1-4 connection 12;Wherein, described on relative to horizontal direction Second wave multiplexer 12 is located at the top of the 4th waveguide 1-4 light inlet and the lower section of the first wave multiplexer 11;

First wave multiplexer 11 connects by the 5th waveguide 2-1 and the 6th waveguide 2-2 respectively with the second wave multiplexer 12 Three wave multiplexers 13;The third wave multiplexer 13 is between first wave multiplexer 11 and the second wave multiplexer 12;

Wherein, the first wave guide 1-1 is coupled into before the first wave multiplexer 11, draws the first monitoring waveguide 3-1;Described Five waveguide 2-1 also draw the second monitoring waveguide 3-2 before being coupled into third wave multiplexer 13;The 6th waveguide 2-2 is being coupled Before entering third wave multiplexer 13, draws third and monitor waveguide 3-3;The 4th waveguide 1-4 be coupled into the second wave multiplexer 12 it Before, draw the 4th monitoring waveguide 3-4.

The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.

Claims (16)

1. a kind of multi-channel high-speed rate optical module structure, which is characterized in that including at least one transmitting unit, wherein transmitting is single Member include first laser device (1), second laser (2), third laser (3), the 4th laser (4), the first wave multiplexer (11), Second wave multiplexer (12), third wave multiplexer (13), the first optical detector (21), the second optical detector (22), third optical detector (23) and the 4th optical detector (24), specific:
The first laser device (1) and second laser (2) are connected by first wave guide (1-1) and second waveguide (1-2) respectively First wave multiplexer (11);Wherein, on relative to horizontal direction, first wave multiplexer (11) is located at the first laser device (1) top of lower section and the second wave multiplexer (12);
The third laser (3) and the 4th laser (4) are connected by third waveguide (1-3) and the 4th waveguide (1-4) respectively Second wave multiplexer (12);Wherein, on relative to horizontal direction, second wave multiplexer (12) is located at the 4th laser (4) lower section of top and the first wave multiplexer (11);
First wave multiplexer (11) and the second wave multiplexer (12) are connected by the 5th waveguide (2-1) and the 6th waveguide (2-2) respectively Connect third wave multiplexer (13);The third wave multiplexer (13) be located at first wave multiplexer (11) and the second wave multiplexer (12) it Between;
Wherein, the first wave guide (1-1) is coupled into before the first wave multiplexer (11), draws the first monitoring waveguide (3-1);It is described 5th waveguide (2-1) also draws the second monitoring waveguide (3-2) before being coupled into third wave multiplexer (13);6th waveguide (2-2) draws third monitoring waveguide (3-3) before being coupled into third wave multiplexer (13);4th waveguide (1-4) is coupling Before entering the second wave multiplexer (12), the 4th monitoring waveguide (3-4) is drawn;Also, first monitoring waveguide (3-1), the second prison The light-emitting window of control waveguide (3-2), third monitoring waveguide (3-3) and the 4th monitoring waveguide (3-4) couples the first optical detector respectively (21), the second optical detector (22), third optical detector (23) and the 4th optical detector (24).
2. multi-channel high-speed rate optical module structure according to claim 1, which is characterized in that each waveguide is specially titanium dioxide Silicon waveguide, sandwich layer are outside the identical covering of refractive index, relative fefractive index difference 0.013.
3. multi-channel high-speed rate optical module structure according to claim 1, which is characterized in that first laser device (1), second Interval between laser (2), third laser (3) and the 4th laser (4) is more than or equal to 1mm, also, for carrying each wave It leads, each wave multiplexer and the first laser device (1), second laser (2), third laser (3) and the 4th laser (4) PLC substrate width be less than or equal to 6mm.
4. multi-channel high-speed rate optical module structure according to claim 3, which is characterized in that the transmitting unit quantity is 2, the transmitting unit is arranged on pcb board by mode side by side, and is encapsulated in QSFP-DD.
5. multi-channel high-speed rate optical module structure according to claim 4, which is characterized in that the back side of the pcb board is also It is provided with receiving end optical fiber, array waveguide grating, optical detector and trans-impedance amplifier, specific:
The trans-impedance amplifier and optical detector are respectively welded at the back side of the pcb board, and one end of receiving end optical fiber is set In the light inlet side of array waveguide grating, also, the light-emitting window side of the array waveguide grating and optical detector complete optical path coupling The back side of the pcb board is fixed under conditions of conjunction.
6. the production method of PLC in a kind of multi-channel high-speed rate optical module, which is characterized in that the PLC of production is used to want such as right It asks in any multi-channel high-speed rate optical module structure of 1-5, the production method includes:
Waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches preset waveguide institute setting parameter;Wherein, the waveguide Base-material includes waveguide under-clad layer;
Photoresist is coated, and makes first wave guide (1-1), second waveguide (1-2), the 5th waveguide (2-1), the 6th waveguide (2- by lithography 2), go out optical waveguide (3-0), the first monitoring waveguide (3-1), the second monitoring waveguide (3-2) and third and monitor waveguide (3-3) figure; Wherein, the first wave multiplexer (11) are made by lithography in the intersection of first wave guide (1-1), second waveguide (1-2) and the 5th waveguide (2-1) Figure;The second wave multiplexer (12) are made by lithography in the intersection of third waveguide (1-3), the 4th waveguide (1-4) and the 6th waveguide (2-2) Figure;In the 5th waveguide (2-1), the 6th waveguide (2-2) and out the intersection of optical waveguide (3-0) makes third wave multiplexer (13) by lithography Figure;
After washing out each waveguide pattern using developer solution, corroded in wafer using corrosive liquid out for making the figure of each waveguide Shape;
Photoresist, the top covering of continued growth waveguide are removed, and completes the production of PLC.
7. the production method of PLC in multi-channel high-speed rate optical module according to claim 6, which is characterized in that described The junction of one waveguide (1-1) and the first monitoring waveguide (3-1) obtains light splitting 5-10%'s according to the first monitoring waveguide (3-1) Proportionality design;The junction of 5th waveguide (2-1) and the second monitoring waveguide (3-2) is obtained according to the second monitoring waveguide (3-2) The Proportionality design of 5-10% must be divided;The junction of 6th waveguide (2-2) and third monitoring waveguide (3-3), according to third Monitor the Proportionality design that waveguide (3-3) obtains light splitting 5-10%;4th waveguide (1-4) and the 4th monitoring waveguide (3-4) Junction obtains the Proportionality design of light splitting 5-10% according to the 4th monitoring waveguide (3-4).
8. the production method of PLC in multi-channel high-speed rate optical module according to claim 6 or 7, which is characterized in that described PLC is located at first wave guide (1-1), second waveguide (1-2), third waveguide (1-3) and the light inlet side of the 4th waveguide (1-4) difference Production have corresponding first laser device (1), second laser (2), third laser (3) and the 4th laser (4) face-down bonding Pedestal.
9. a kind of multi-channel high-speed rate optical module structure, which is characterized in that including at least one transmitting unit, wherein transmitting is single Member include first laser device (1), second laser (2), third laser (3), the 4th laser (4), the first wave multiplexer (11), Second wave multiplexer (12), third wave multiplexer (13), the first optical detector (21), the second optical detector (22), third optical detector (23) and the 4th optical detector (24), specific:
The first laser device (1) and second laser (2) are connected by first wave guide (1-1) and second waveguide (1-2) respectively First wave multiplexer (11);Wherein, on relative to horizontal direction, first wave multiplexer (11) is located at the first laser device (1) between second laser (2);
The third laser (3) and the 4th laser (4) are connected by third waveguide (1-3) and the 4th waveguide (1-4) respectively Second wave multiplexer (12);Wherein, on relative to horizontal direction, second wave multiplexer (12) is located at the third laser (3) between the 4th laser (4);
First wave multiplexer (11) and the second wave multiplexer (12) are connected by the 5th waveguide (2-1) and the 6th waveguide (2-2) respectively Connect third wave multiplexer (13);The third wave multiplexer (13) be located at first wave multiplexer (11) and the second wave multiplexer (12) it Between;
The first wave guide (1-1) and second waveguide (1-2) draw the first prison before being coupled into the first wave multiplexer (11) respectively Control waveguide (3-1) and the second monitoring waveguide (3-2);The third waveguide (1-3) and the 4th waveguide (1-4) are being coupled into wave multiplexer (12) before, third monitoring waveguide (3-3) and the 4th monitoring waveguide (3-4) are drawn respectively;Wherein, the second monitoring waveguide (3-2) It is located at the lower section of other each waveguides in PLC vertical direction with third monitoring waveguide (3-3);
First monitoring waveguide (3-1), the second monitoring waveguide (3-2), third monitoring waveguide (3-3) and the 4th monitoring waveguide The light-emitting window of (3-4) couples the first optical detector (21), the second optical detector (22), third optical detector (23) and the 4th respectively Optical detector (24).
10. multi-channel high-speed rate optical module structure according to claim 9, which is characterized in that each waveguide is specially dioxy SiClx waveguide, sandwich layer are outside the identical covering of refractive index, relative fefractive index difference 0.013.
11. multi-channel high-speed rate optical module structure according to claim 9, which is characterized in that first laser device (1), Interval between dual-laser device (2), third laser (3) and the 4th laser (4) is more than or equal to 1mm, also, each for carrying Waveguide, each wave multiplexer and the first laser device (1), second laser (2), third laser (3) and the 4th laser (4) width of PLC substrate is less than or equal to 6mm.
12. multi-channel high-speed rate optical module structure according to claim 11, which is characterized in that the transmitting unit quantity It is 2, the transmitting unit is arranged on pcb board by mode side by side, and is encapsulated in QSFP-DD.
13. the production method of PLC in a kind of multi-channel high-speed rate optical module, which is characterized in that the PLC of production is used to want such as right It asks in any multi-channel high-speed rate optical module structure of 9-11, the production method includes:
Waveguide base-material is grown on wafer, so that waveguide base-material thickness reaches preset first layer waveguide institute setting parameter;Wherein, institute Stating waveguide base-material includes waveguide under-clad layer;
Photoresist is coated, and makes the second monitoring waveguide (3-2) and third monitoring waveguide (3-3) figure by lithography;It is clear using developer solution After washing out each waveguide pattern, corroded in wafer using corrosive liquid out for making the second monitoring waveguide (3-2) and third monitoring The figure of waveguide (3-3);
Photoresist is removed, grows top covering on the figure of corresponding second monitoring waveguide (3-2) and third monitoring waveguide (3-3);
It is complete by above-mentioned growth-photolithographicallpatterned and when top covering material thickness reaches preset second layer waveguide present position At first wave guide (1-1), second waveguide (1-2), the 5th waveguide (2-1), the 6th waveguide (2-2), go out optical waveguide (3-0), first Monitor the production of waveguide (3-1);Wherein, in the intersection of first wave guide (1-1), second waveguide (1-2) and the 5th waveguide (2-1) Production has the first wave multiplexer (11);It is made in the intersection of third waveguide (1-3), the 4th waveguide (1-4) and the 6th waveguide (2-2) There are the second wave multiplexer (12);The 5th waveguide (2-1), the 6th waveguide (2-2) and out intersection's production of optical waveguide (3-0) have the Three wave multiplexers (13);
And photoresist, continued growth top covering material are removed after each waveguide is completed in growth, and complete the production of PLC.
14. the production method of PLC in multi-channel high-speed rate optical module according to claim 13, which is characterized in that described The junction of first wave guide (1-1) and the first monitoring waveguide (3-1) obtains light splitting 5-10% according to the first monitoring waveguide (3-1) Proportionality design;The junction of the second waveguide (1-2) and the second monitoring waveguide (3-2), by second according to monitoring waveguide (3-2) Obtain the Proportionality design of light splitting 5-10%;The junction of the third waveguide (1-3) and third monitoring waveguide (3-3), according to the Three monitoring waveguide (3-3) obtain the Proportionality design of light splitting 5-10%;4th waveguide (1-4) and the 4th monitoring waveguide (3-4) Junction, according to the 4th monitoring waveguide (3-4) obtain light splitting 5-10% Proportionality design.
15. according to claim 1 in multi-channel high-speed rate optical module described in 3 or 14 PLC production method, which is characterized in that The PLC be located at first wave guide (1-1), second waveguide (1-2), third waveguide (1-3) and the 4th waveguide (1-4) light inlet side Production has the upside-down mounting of corresponding first laser device (1), second laser (2), third laser (3) and the 4th laser (4) respectively Weld pedestal.
16. a kind of PLC applied to multi-channel high-speed rate optical module characterized by comprising
First wave guide (1-1) and second waveguide (1-2) connection the first wave multiplexer (11);Wherein, on relative to horizontal direction, institute It states the first wave multiplexer (11) and is located at the lower section of the first wave guide (1-1) light inlet and the top of the second wave multiplexer (12);
Third waveguide (1-3) and the 4th waveguide (1-4) connection the second wave multiplexer (12);Wherein, on relative to horizontal direction, institute It states the second wave multiplexer (12) and is located at the top of the 4th waveguide (1-4) light inlet and the lower section of the first wave multiplexer (11);
First wave multiplexer (11) and the second wave multiplexer (12) are connected by the 5th waveguide (2-1) and the 6th waveguide (2-2) respectively Connect third wave multiplexer (13);The third wave multiplexer (13) be located at first wave multiplexer (11) and the second wave multiplexer (12) it Between;
Wherein, the first wave guide (1-1) is coupled into before the first wave multiplexer (11), draws the first monitoring waveguide (3-1);It is described 5th waveguide (2-1) also draws the second monitoring waveguide (3-2) before being coupled into third wave multiplexer (13);6th waveguide (2-2) draws third monitoring waveguide (3-3) before being coupled into third wave multiplexer (13);4th waveguide (1-4) is coupling Before entering the second wave multiplexer (12), the 4th monitoring waveguide (3-4) is drawn.
CN201710890857.9A 2017-09-27 2017-09-27 A kind of multi-channel high-speed rate optical module structure and processing method CN107515449B (en)

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CN201710890857.9A CN107515449B (en) 2017-09-27 2017-09-27 A kind of multi-channel high-speed rate optical module structure and processing method
PCT/CN2017/118325 WO2019061897A1 (en) 2017-09-27 2017-12-25 Multi-channel high-speed optical module structure and machining method

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