CN107515449A - A kind of multi-channel high-speed rate optical module structure and processing method - Google Patents
A kind of multi-channel high-speed rate optical module structure and processing method Download PDFInfo
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- CN107515449A CN107515449A CN201710890857.9A CN201710890857A CN107515449A CN 107515449 A CN107515449 A CN 107515449A CN 201710890857 A CN201710890857 A CN 201710890857A CN 107515449 A CN107515449 A CN 107515449A
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- wave multiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4246—Bidirectionally operating package structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
Abstract
The present invention relates to optical module technical field, there is provided a kind of multi-channel high-speed rate optical module structure and processing method.Wherein PLC includes waveguide 11 and waveguide 12 connects wave multiplexer 11；Waveguide 13 and waveguide 14 connect wave multiplexer 12；The wave multiplexer 11 and wave multiplexer 12 connect wave multiplexer 13 by waveguide 21 and waveguide 22 respectively；Monitoring waveguide 31 is also drawn in the waveguide 11；Monitoring waveguide 32 is also drawn in the waveguide 21；Monitoring waveguide 33 is also drawn in the waveguide 22；Monitoring waveguide 34 is also drawn in the waveguide 14.The invention provides waveguide layout scheme, so that photo-detector and laser are arranged on PLC both sides in a manner of opposite end and become possibility, the existing intrinsic thinking that photo-detector is fixed on to laser exiting surface behind is overcome, improves radio frequency effect when higher than 25G speed.
Description
【Technical field】
The present invention relates to optical module technical field, more particularly to a kind of multi-channel high-speed rate optical module structure and processing side
Method.
【Background technology】
The drastically development of the particularly data center of data communication in recent years, market needs big quantity high performance, inexpensive light
Module.High-performance refers mainly to high-speed and the miniaturization of optical module；It is inexpensive then including material cost, technique is simple, can make
Property made etc..4 light path 100G (25Gx4) modules of commercialization progress into volume production just now at present, and the demand in market and standardization refer to again
The optical module higher to speed such as such as 200G, 400G.On the other hand, miniaturization of the in the market to module has harsher want
Ask.For example, QSFP-DD module encapsulation standard, is exactly (long under conditions of current QSFP28 (100Gbps) is same wide and high
Degree is temporarily uncertain), speed will increase by 2 times (200Gbps) or even 4 times (400Gbps).
Realize that 200G and 400G substantially there are two kinds of structures：
1) 4 light path：
A) 4x (25Gx2)=200G, wherein, it is encoded to PAM4；
B) 4x50G=200G, wherein, it is encoded to NRZ；
C) 4x (50Gx2)=400G, wherein, it is encoded to PAM4；
2) 8 light path：
A) 8x25G=200G；Wherein, it is encoded to NRZ；
B) 8x (25Gx2)=400G, wherein, it is encoded to PAM4；
C) 8x (50Gx2)=800G, wherein, it is encoded to PAM4；
From constructing for upper, directly 4x50G=200G, NRZ, or 4x (50Gx2) are risen in every road 25G of 4 light paths
=400G, PAM4 are the simplest.But it is extremely difficult that the baud rate of optical device is carried to 50G from 25G, or already close to thing
Manage the limit (such as directly modulation system laser).On the other hand, PAM4 modulation needs the more preferable optical device of the linearity.These because
Element adds the cost of optical device, and the higher optical module of the speed such as current 200G, 400G it is also difficult to achieve.
In addition, in general optical module is intended to band photo-detector, to keep good automated power control (Auto-Power
Control, it is abbreviated as：APC) function.Conventional method is that detector is placed directly in the rear side of laser.But higher than 25G speed
During rate, in order to realize good radio frequency effect, it is desirable to which the line of driver and laser is as far as possible short.Traditional photo-detector is put
Method turns into problem (wiring for influenceing radio frequency line).
【The content of the invention】
The technical problem to be solved in the present invention be as where be higher than 25G speed when, in order to realize more preferable radio frequency effect,
On the premise of needing the line of driver and laser distance as far as possible short, there is provided one kind improves light channel structure.
Further technical problems to be solved of the invention are to overcome in the prior art to lack using 25G lasers to realize
The solution of 200G or 400G optical module, specifically how 8 tunnel individual laser packages are being encapsulated into standard as QSFP-DD
The inside provides feasible resolving ideas.
The present invention adopts the following technical scheme that：
In a first aspect, the invention provides a kind of multi-channel high-speed rate optical module structure, including at least one transmitter unit,
Wherein, transmitter unit include laser 1, laser 2, laser 3, laser 4, wave multiplexer 11, wave multiplexer 12, wave multiplexer 13,
Photo-detector 21, photo-detector 22, photo-detector 23 and photo-detector 24, specifically：
The laser 1 connects wave multiplexer 11 by waveguide 1-1 with waveguide 1-2 respectively with laser 2；Wherein, relative
In in horizontal direction, the wave multiplexer 11 is located at the lower section of the laser 1 and the top of wave multiplexer 12；
The laser 3 connects wave multiplexer 12 by waveguide 1-3 with waveguide 1-4 respectively with laser 4；Wherein, relative
In in horizontal direction, the wave multiplexer 12 is located at the top of the laser 4 and the lower section of wave multiplexer 11；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
Wherein, the waveguide 1-1 is coupled into before wave multiplexer 11, draws monitoring waveguide 3-1；The waveguide 2-1 is being coupled
Before entering wave multiplexer 13, monitoring waveguide 3-2 is also drawn；The waveguide 2-2 draws monitoring waveguide before wave multiplexer 13 is coupled into
3-3；The waveguide 1-4 draws monitoring waveguide 3-4 before wave multiplexer 12 is coupled into；Also, the monitoring waveguide 3-1, monitoring
Waveguide 3-2, monitoring waveguide 3-3 and monitoring waveguide 3-4 light-emitting window couple photo-detector 21, photo-detector 22, optical detection respectively
Device 23 and photo-detector 24.
Preferably, each waveguide is specially SiO 2 waveguide, is refractive index identical covering outside sandwich layer, relative index of refraction
Difference is 0.013.
Preferably, the interval between laser 1, laser 2, laser 3 and laser 4 is more than or equal to 1mm, also, uses
In carrying each waveguide, each wave multiplexer, and the laser 1, laser 2, laser 3 and laser 4 PLC substrates width
Less than or equal to 6mm.
Preferably, the transmitter unit quantity is 2, and described transmitter unit is arranged on pcb board by mode side by side,
And it is encapsulated in QSFP-DD.
Preferably, the back side of the pcb board is additionally provided with receiving terminal optical fiber, array waveguide grating, photo-detector and across resistance
Amplifier, specifically：
The trans-impedance amplifier and photo-detector are respectively welded at the back side of the pcb board, one end quilt of receiving terminal optical fiber
The light inlet side of array waveguide grating is arranged on, also, light is completed in the light-emitting window side of the array waveguide grating with photo-detector
The back side of the pcb board is fixed under conditions of the coupling of road.
Second aspect, the invention provides the preparation method of PLC in multi-channel high-speed rate optical module a kind of, the PLC of making
For in multi-channel high-speed rate optical module structure as described in relation to the first aspect, the preparation method to include：
Waveguide base-material is grown on wafer so that waveguide base-material thickness reaches default waveguide institute setting parameter；Wherein, it is described
Waveguide base-material includes waveguide under-clad layer；
Coat photoresist, and make by lithography waveguide 1-1, waveguide 1-2, waveguide 2-1, waveguide 2-2, go out fiber waveguide 3-0, monitoring ripple
Lead 3-1, monitoring waveguide 3-2 and monitoring waveguide 3-3 figures；Wherein, in waveguide 1-1, waveguide 1-2 and waveguide 2-1 intersection's light
Carve the figure of wave multiplexer 11；The figure of wave multiplexer 12 is made by lithography in waveguide 1-3, waveguide 1-4 and waveguide 2-2 intersection；In waveguide
2-1, waveguide 2-2 and go out fiber waveguide 3-0 intersection and make the figure of wave multiplexer 13 by lithography；
After each waveguide pattern is washed out using developer solution, corrode for making each waveguide in wafer using corrosive liquid
Figure；
Photoresist, the top covering of continued growth waveguide are removed, and completes PLC making.
Preferably, the waveguide 1-1 and monitoring waveguide 3-1 junction, light splitting 5-10% is obtained according to monitoring waveguide 3-1
Proportionality design；The waveguide 2-1 and monitoring waveguide 3-2 junction, light splitting 5-10% ratio is obtained according to monitoring waveguide 3-2
Example design；The waveguide 2-2 and monitoring waveguide 3-3 junction, the ratio that light splitting 5-10% is obtained according to monitoring waveguide 3-3 are set
Meter；The waveguide 1-4 and monitoring waveguide 3-4 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-4.
Preferably, the PLC is located at waveguide 1-1, waveguide 1-2, waveguide 1-3 and waveguide 1-4 light inlet side and made respectively
There is the face-down bonding base of corresponding laser 1, laser 2, laser 3 and laser 4.
The third aspect, present invention also offers a kind of multi-channel high-speed rate optical module structure, including at least one transmitting are single
Member, wherein, transmitter unit includes laser 1, laser 2, laser 3, laser 4, wave multiplexer 11, wave multiplexer 12, wave multiplexer
13rd, photo-detector 21, photo-detector 22, photo-detector 23 and photo-detector 24, specifically：
The laser 1 connects wave multiplexer 11 by waveguide 1-1 with waveguide 1-2 respectively with laser 2；Wherein, relative
In in horizontal direction, the wave multiplexer 11 is between the laser 1 and laser 2；
The laser 3 connects wave multiplexer 12 by waveguide 1-3 with waveguide 1-4 respectively with laser 4；Wherein, relative
In in horizontal direction, the wave multiplexer 12 is between the laser 3 and laser 4；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
The waveguide 1-1 and waveguide 1-2 draw monitoring waveguide 3-1 and monitoring ripple respectively before wave multiplexer 11 is coupled into
Lead 3-2；The waveguide 1-3 and waveguide 1-4 draw monitoring waveguide 3-3 and monitoring waveguide respectively before wave multiplexer 12 is coupled into
3-4；Wherein, monitor waveguide 3-2 and monitor the lower section that waveguide 3-3 is located at other each waveguides in PLC vertical direction；
The monitoring waveguide 3-1, the light-emitting window for monitoring waveguide 3-2, monitoring waveguide 3-3 and monitoring waveguide 3-4 couple respectively
Photo-detector 21, photo-detector 22, photo-detector 23 and photo-detector 24.
Preferably, each waveguide is specially SiO 2 waveguide, is refractive index identical covering outside sandwich layer, relative index of refraction
Difference is 0.013.
Preferably, the interval between laser 1, laser 2, laser 3 and laser 4 is more than or equal to 1mm, also, uses
In carrying each waveguide, each wave multiplexer, and the laser 1, laser 2, laser 3 and laser 4 PLC substrates width
Less than or equal to 6mm.
Preferably, the transmitter unit quantity is 2, and described transmitter unit is arranged on pcb board by mode side by side,
And it is encapsulated in QSFP-DD.
Fourth aspect, present invention also offers the preparation method of PLC in multi-channel high-speed rate optical module a kind of, making
PLC is used in the multi-channel high-speed rate optical module structure as described in the third aspect, and the preparation method includes：
Waveguide base-material is grown on wafer so that waveguide base-material thickness reaches default first layer waveguide institute setting parameter；Its
In, the waveguide base-material includes waveguide under-clad layer；
Photoresist is coated, and makes monitoring waveguide 3-2 and monitoring waveguide 3-3 figures by lithography；Each ripple is washed out using developer solution
After leading figure, corrode for making monitoring waveguide 3-2 and monitoring waveguide 3-3 figure in wafer using corrosive liquid；Remove
Photoresist, grow top covering on accordingly monitoring waveguide 3-2 and monitoring waveguide 3-3 figure；
And when top covering material thickness reaches default second layer waveguide present position, pass through above-mentioned growth-photoetching side
Formula, complete waveguide 1-1, waveguide 1-2, waveguide 2-1, waveguide 2-2, the making for going out fiber waveguide 3-0, monitoring waveguide 3-1；Wherein, exist
Waveguide 1-1, waveguide 1-2 and waveguide 2-1 intersection, which make, wave multiplexer 11；In waveguide 1-3, waveguide 1-4 and waveguide 2-2 friendship
Making has wave multiplexer 12 at remittance；There is wave multiplexer 13 in waveguide 2-1, waveguide 2-2 and the intersection's making for going out fiber waveguide 3-0；And
Growth removes photoresist, continued growth top covering material after completing each waveguide, and completes PLC making.
Preferably, the waveguide 1-1 and monitoring waveguide 3-1 junction, light splitting 5-10% is obtained according to monitoring waveguide 3-1
Proportionality design；The waveguide 1-2 and monitoring waveguide 3-2 junction, light splitting 5-10% ratio is obtained according to monitoring waveguide 3-2
Example design；The waveguide 1-3 and monitoring waveguide 3-3 junction, the ratio that light splitting 5-10% is obtained according to monitoring waveguide 3-3 are set
Meter；The waveguide 1-4 and monitoring waveguide 3-4 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-4.
Preferably, the PLC is located at waveguide 1-1, waveguide 1-2, waveguide 1-3 and waveguide 1-4 light inlet side and made respectively
There is the face-down bonding base of corresponding laser 1, laser 2, laser 3 and laser 4.
5th aspect, present invention also offers a kind of PLC applied to multi-channel high-speed rate optical module, including：
Waveguide 1-1 connects wave multiplexer 11 with waveguide 1-2；Wherein, on relative to horizontal direction, the wave multiplexer 11 is located at
The lower section of the waveguide 1-1 light inlets and the top of wave multiplexer 12；
Waveguide 1-3 connects wave multiplexer 12 with waveguide 1-4；Wherein, on relative to horizontal direction, the wave multiplexer 12 is located at
The top of the waveguide 1-4 light inlets and the lower section of wave multiplexer 11；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
Wherein, the waveguide 1-1 is coupled into before wave multiplexer 11, draws monitoring waveguide 3-1；The waveguide 2-1 is being coupled
Before entering wave multiplexer 13, monitoring waveguide 3-2 is also drawn；The waveguide 2-2 draws monitoring waveguide before wave multiplexer 13 is coupled into
3-3；The waveguide 1-4 draws monitoring waveguide 3-4 before wave multiplexer 12 is coupled into.
Compared with prior art, the beneficial effects of the present invention are：
The invention provides two kinds of alternative waveguide layout schemes so that photo-detector and laser are in a manner of opposite end
Being arranged on PLC both sides becomes possibility, overcomes the laser exiting surface that is fixed on photo-detector used in the prior art and carries on the back
Intrinsic thinking afterwards, improve when higher than 25G speed, realize more preferable radio frequency effect.
By the present invention in that with Planar Lightwave Circuit Technology, optical device and light path are integrated with semiconductor approach so that 8 light paths
It is put into QSFP-DD and is encapsulated into possibility.Further, the size in currently preferred implementation also for laser,
Interval, PLC substrate widths etc. is set to give a set of feasible parameter configuration.
【Brief description of the drawings】
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of transmitter unit in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention；
Fig. 2 is a kind of schematic diagram of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention；
Fig. 3 is the signal of optical detection structure in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Fig. 4 is the signal of optical detection structure in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Fig. 5 is a kind of multi-channel high-speed rate optical module structure signal with transmission-receiving function provided in an embodiment of the present invention
Figure；
Fig. 6 is the top view of receiving module in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention；
Fig. 7 is the front view of receiving module in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention；
Fig. 8 is a kind of looking up for multi-channel high-speed rate optical module structure with transmission-receiving function provided in an embodiment of the present invention
Figure；
Fig. 9 be it is provided in an embodiment of the present invention pcb board is encapsulated into QSFP-DD optical modules after effect diagram；
Figure 10 be it is provided in an embodiment of the present invention pcb board is encapsulated into QSFP-DD optical modules after effect diagram；
Figure 11 is a kind of photo-detector LD1 peripheral circuit structural representations provided in an embodiment of the present invention；
Figure 12 is a kind of photo-detector LD1+LD2 peripheral circuit structural representations provided in an embodiment of the present invention；
Figure 13 is the signal of transmitter unit in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Figure 14 is PLC preparation method flows in a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Figure 15 is a kind of PLC structural representations of welding base provided in an embodiment of the present invention；
Figure 16 is the signal of transmitter unit in also a kind of multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Figure 17 is the PLC structural representations of another welding base provided in an embodiment of the present invention；
Figure 18 is PLC preparation method flows in another multi-channel high-speed rate optical module structure provided in an embodiment of the present invention
Figure；
Figure 19 is a kind of PLC structural representations provided in an embodiment of the present invention.
【Embodiment】
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
In the description of the invention, term " interior ", " outer ", " longitudinal direction ", " transverse direction ", " on ", " under ", " top ", " bottom " etc. refer to
The orientation or position relationship shown be based on orientation shown in the drawings or position relationship, be for only for ease of the description present invention rather than
It is required that the present invention must be with specific azimuth configuration and operation, therefore it is not construed as limitation of the present invention.
The structure that various embodiments of the present invention are proposed is applied to including but not limited to QSFP-DD, OSFP, CFP, SFP-DD etc.
Packing forms.
In addition, as long as technical characteristic involved in each embodiment of invention described below is each other not
Conflict can is formed to be mutually combined.
Embodiment 1:
The embodiment of the present invention 1 provides a kind of multi-channel high-speed rate optical module structure, as shown in figure 1, including at least one
Transmitter unit, wherein, transmitter unit include laser 1, laser 2, laser 3, laser 4, wave multiplexer 11, wave multiplexer 12,
Wave multiplexer 13, photo-detector 21, photo-detector 22, photo-detector 23 and photo-detector 24, specifically：
The laser 1 connects wave multiplexer 11 by waveguide 1-1 with waveguide 1-2 respectively with laser 2；Wherein, relative
In in horizontal direction, the wave multiplexer 11 is located at the lower section of the laser 1 and the top of wave multiplexer 12；
The laser 3 connects wave multiplexer 12 by waveguide 1-3 with waveguide 1-4 respectively with laser 4；Wherein, relative
In in horizontal direction, the wave multiplexer 12 is located at the top of the laser 4 and the lower section of wave multiplexer 11；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
Wherein, the waveguide 1-1 is coupled into before wave multiplexer 11, draws monitoring waveguide 3-1；The waveguide 2-1 is being coupled
Before entering wave multiplexer 13, monitoring waveguide 3-2 is also drawn；The waveguide 2-2 draws monitoring waveguide before wave multiplexer 13 is coupled into
3-3；The waveguide 1-4 draws monitoring waveguide 3-4 before wave multiplexer 12 is coupled into；Also, the monitoring waveguide 3-1, monitoring
Waveguide 3-2, monitoring waveguide 3-3 and monitoring waveguide 3-4 light-emitting window couple photo-detector 21, photo-detector 22, optical detection respectively
Device 23 and photo-detector 24.
The embodiments of the invention provide a kind of waveguide layout scheme so that photo-detector and laser are set in a manner of opposite end
In planar optical waveguide, (Planar Light wave Circuit, are abbreviated as：PLC) both sides become possibility, overcome existing skill
What is used in art is fixed on photo-detector the intrinsic thinking of laser exiting surface behind, improves when higher than 25G speed, real
Now more preferable radio frequency effect.Also, the embodiment of the present invention is by being cleverly laid out combination and detection method so that each waveguide is in
In the case of same plane, remain able to avoid the Insertion Loss that halved belt comes between waveguide, ensure that the precision of detection.
The fiber waveguide solution that the embodiment of the present invention is provided, it can ensure that each waveguide and wave multiplexer are same in PLC
Thickness area, so as to be further ensured that the manufacturing cycle of corresponding transmitter unit and manufacturing cost.
By the present invention in that with Planar Lightwave Circuit Technology, optical device and light path are integrated with semiconductor approach so that 8 light paths
It is put into QSFP-DD and is encapsulated into possibility.By the structure of embodiment 1 be applied to 8 light paths be put into QSFP-DD encapsulation when, LD1
(LD1 is laser 1 as shown in fig. 1, in other laser sequence numbers and Fig. 1 label corresponding relation the like), LD2, LD3 and
LD4 is 25G lasers, and the interval of each laser is more than or equal to 1mm, also, for carrying each waveguide, each wave multiplexer, Yi Jisuo
The width for stating LD1, LD2, LD3 and LD4 PLC substrates is less than or equal to 6mm.As shown in Fig. 2 wherein the quantity of transmitter unit is 2
It is individual, therefore, when coding uses NRZ, 2x (25Gx4)=200G transmission rate can be obtained.Adjusted when by the speed of each laser
It is whole when being 50G, it just can obtain the optical module of 400G transmission rates；In addition, when using PAM4 codings, 25G can also be passed through
Laser obtains 400G transmission rate.Wherein, PLCA is PLC Assembly abbreviation, shows laser etc. by upside-down mounting
It is welded to the later PLC optical assemblies of PLC.LDD1 (Laser Diode Driver) and LDD2 is the laser driver of 4 passages.
In embodiments of the present invention due to the limitation of transverse width, PLC side can not put optical detection in transmitter unit
Device, then photo-detector be put into the opposite side relative with laser.Because the signal of photo-detector is direct current signal (luminous power),
It is placed into the problem of will not causing electric signal quality relative to the opposite end of laser in PLC.
When entering photo-detector using side, so simply by photo-detector, (Photo Diode, are abbreviated as：PD) it is placed on PLC
On side can (as shown in Figure 3), spacing is about in 5-10 microns；Photo-detector can also be entered using face, but need to add a branch
Photo-detector is fixed into the form (shown in Fig. 4) that can receive light from side by frame (stand).
In embodiments of the present invention, each waveguide is SiO 2 waveguide, is refractive index identical covering outside sandwich layer, relatively
Refringence is 0.013, and the size of waveguide includes but is not limited to 4.4 μm of 3.3 μ m.
Structure described in the embodiment of the present invention 1 can apply to the optical module with single emission function, can also apply
In the optical module with transmission-receiving function.Next, it will be specifically described how higher for size requirement in similar QSFP-DD
Encapsulation standard in integrate transceiver module.
As shown in figure 5, a kind of optical module structure of transmission-receiving function integral type is additionally provided with reference to the embodiment of the present invention, its
In, the back side of the pcb board be additionally provided with receiving terminal optical fiber, array waveguide grating (Arrayed Waveguide Grating,
It is abbreviated as：AWG), (Trans-Impedance Amplifier, are abbreviated as photo-detector PD and trans-impedance amplifier：TIA), specifically
's：
The trans-impedance amplifier and photo-detector are respectively welded at the back side of the pcb board, one end quilt of receiving terminal optical fiber
The light inlet side of array waveguide grating is arranged on, also, light is completed in the light-emitting window side of the array waveguide grating with photo-detector
The back side of the pcb board is fixed under conditions of the coupling of road.
The receiving side of the present invention equally uses planar optical waveguide PLC technology.Wherein Optical Demultiplexing function can use be based on
PLC array waveguide grating AWG, directional coupler (Directional Coupler) or Mach Zehnder interference (Mach-
Zehnder interferometer, are abbreviated as：MZI) coupler.In order to describe conveniently, the embodiment of the present invention is come by taking AWG as an example
Illustrate.As shown in Figure 6 and Figure 7, AWG is first by the 4 tunnel Optical Demultiplexings received from optical fiber to different wave length, in addition in AWG
Light extraction end make about 45 degree of chamfering, light is turn 90 degrees downwards；Couple directly to detector array (Photo Diode
Array, it is abbreviated as：PDA photosurface).The electrode of detector is bonded to TIA IC (as shown in Figure 7) by gold thread.
As shown in figure 8, the effect that the light-receiving structure for the embodiment of the present invention is proposed is put into after QSFP-DD encapsulation is shown
It is intended to, wherein, PCB top surfaces shown in Fig. 8 PCB reverse side and Fig. 2, which form one, has transmission-receiving function, can be applied to QSFP-DD
The mainboard structure of encapsulation (as shown in Figure 9 and Figure 10, is illustrated for the effect after the pcb board is encapsulated into QSFP-DD optical modules
Figure).
As shown in figure 1,5-10% is divided to monitoring waveguide 3-1 from waveguide 1-1, for monitoring LD1 luminous power；From waveguide
2-1 light splitting 5-10% can monitor LD1 and LD2 total optical power to waveguide 3-2 is monitored.Pass through simple subtraction on circuit
(can be realized by MCU, addition and subtraction circuit directly can also be built by power integrated chip to realize), it is possible to
Monitor LD2 luminous power.Its principle is as follows：
Model as shown in figure 11 samples the monitoring signal from photo-detector.V1 is LD1 sampling voltage, with LD1's
Luminous power is directly proportional；Similarly, V be LD1+LD2 sampling voltage, (as shown in figure 12) directly proportional to LD1+LD2 luminous power.
Assuming that R is identical, it is clear that LD2 sampling voltage is V2=V-V1.The like complete LD3 and LD4 luminous powers monitoring, then this
The monitoring waveguide of inventive embodiments forms the light power that can monitor all lasers.
As shown in figure 13, be structure described in the embodiment of the present invention another manifestation mode, wherein, monitoring waveguide 3-2 and
Waveguide 1-2 is arranged on the relatively parallel position of same level.For waveguiding structure more as shown in Figure 1, due to LD1
Waveguide with LD2 is no longer symmetrical, therefore, the deviation that luminous power is detected in PD21 and PD22 can be brought, specifically used
When need to be beforehand with debugging efforts, be to do weighting processing from each luminous power for detecting of monitoring waveguide.
Wherein, test process is specifically described as triggering LD1 and LD4 work first, and keeps LD2 and LD3 to be in and stop work
Make state, now, the power parameter value detected by PD21, PD22, PD23 and PD24 is compared, due to, PD21 and
PD22 is the LD1 performance numbers that detection obtains, and therefore, can obtain respective weighted value by both parameter value calculations；And
PD23 and PD24 is the LD4 performance numbers that detection obtains, and therefore, can obtain respective weighting by both parameter value calculations
Value.Preferably, it can be tested by being repeated several times, obtain the PLC and cover weighting value changes in laser band limits
Curve, and according to real work situation, adjust by the respective weight value of PD21, PD22, PD23 and PD24 parameter value got,
And the final performance number that each laser is accurately calculated.
Embodiment 2:
After a kind of multi-channel high-speed rate optical module structure as described in Example 1 is provided, the embodiment of the present invention is then
It is to lay particular emphasis on how to complete the making of PLC unit used in embodiment 1 to deploy, as shown in figure 14, the making side
Method includes：
In step 201, waveguide base-material is grown on wafer so that waveguide base-material thickness reaches the set ginseng of default waveguide
Number；Wherein, the waveguide base-material includes waveguide under-clad layer.
In step 202, photoresist is coated, and makes waveguide 1-1, waveguide 1-2 by lithography, waveguide 2-1, waveguide 2-2, go out light wave
Lead 3-0, monitoring waveguide 3-1, monitoring waveguide 3-2 and monitoring waveguide 3-3 figures；Wherein, in waveguide 1-1, waveguide 1-2 and waveguide 2-
1 intersection makes the figure of wave multiplexer 11 by lithography；Wave multiplexer 12 is made by lithography in waveguide 1-3, waveguide 1-4 and waveguide 2-2 intersection
Figure；The figure of wave multiplexer 13 is made by lithography in waveguide 2-1, waveguide 2-2 and the intersection for going out fiber waveguide 3-0.
In step 203, after each waveguide pattern is washed out using developer solution, corroded using corrosive liquid in wafer and use
In the figure for making each waveguide.
In step 204, photoresist, the top covering of continued growth waveguide are removed, and completes PLC making.
Wherein, each waveguide is specially SiO 2 waveguide, is refractive index identical covering outside sandwich layer, refractive index contrast
For 0.013.The size of waveguide includes but is not limited to 4.4 μm of 3.3 μ m.
The embodiments of the invention provide in a kind of multi-channel high-speed rate optical module structure applied to described in embodiment 1
The preparation method of PLC unit, except in addition to being applied to that after embodiment 1 beneficial effect described in embodiment 1 can be obtained, due to this
Inventive embodiments specify that the relative position on the vertical plane of each waveguide in embodiment 1 (i.e. on same vertical plane, relatively
In the position for sinking to the bottom same depth) so that the processing and fabricating efficiency and yield rate of the PLC has a necessary guarantee, also, because
The simplification of manufacturing procedure also reduces the cost of manufacture of multi-channel high-speed rate optical module structure as described in Example 1.
With reference to the embodiment of the present invention, one group of optional parameter also is provided to be related to the waveguide light-splitting accounting of light splitting region,
Such as：The waveguide 1-1 and monitoring waveguide 3-1 junction, the ratio that light splitting 5-10% is obtained according to monitoring waveguide 3-1 are set
Meter；The waveguide 2-1 and monitoring waveguide 3-2 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-2；
The waveguide 2-2 and monitoring waveguide 3-3 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-3；It is described
Waveguide 1-4 and monitoring waveguide 3-4 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-4.
In order to further improve the integrated level of transmitter unit in embodiment 1, made on PLC for each laser of face-down bonding
The pedestal of device is optimal solution, can not only reduce the cost shared by a coupled lens, and can avoid the coupling
Close occupancy spatially caused by lens.Referring to first patent, (patent No. " 201610326883.4 ", patent name are
" a kind of Planar Optical Waveguide Structures and its coupled structure and coupling process "), as shown in figure 15, the PLC is located at waveguide 1-1, ripple
The light inlet side for leading 1-2, waveguide 1-3 and waveguide 1-4 has made corresponding laser 1, laser 2, laser 3 and laser respectively
4 face-down bonding base.
In embodiments of the present invention, due to made in PLC wave multiplexer 11 and optical splitter (such as：Waveguide 1-1 and monitoring ripple
Lead at 3-1 coupling interfaces) belong to prior art, the present invention claimed relative position and making during being its preparation method
Opportunity, therefore, its make details will not be repeated here.
Embodiment 3:
Providing a kind of multi-channel high-speed rate optical module structure as described in Example 1 and the correspondence described in embodiment 2
After the PLC used in embodiment 1 corresponding manufacture method, the embodiment of the present invention is from alternative scheme angle, there is provided another
Multi-channel high-speed rate optical module structure.The embodiment that compares 1, the structure that the embodiment of the present invention is proposed can be correspondingly improved PLC
The manufacturing cost of unit, still, a kind of optional implementation of can yet be regarded as.(wherein Figure 17 is to scheme as shown in Figure 16 and Figure 17
It is located at the partial sectional view of the front view of LD4 sides Kan XiangLD1 sides on 16), including at least one transmitter unit, wherein, transmitting is single
Member include laser 1, laser 2, laser 3, laser 4, wave multiplexer 11, wave multiplexer 12, wave multiplexer 13, photo-detector 21,
Photo-detector 22, photo-detector 23 and photo-detector 24, specifically：
The laser 1 connects wave multiplexer 11 by waveguide 1-1 with waveguide 1-2 respectively with laser 2；Wherein, relative
In in horizontal direction, the wave multiplexer 11 is between the laser 1 and laser 2；
The laser 3 connects wave multiplexer 12 by waveguide 1-3 with waveguide 1-4 respectively with laser 4；Wherein, relative
In in horizontal direction, the wave multiplexer 12 is between the laser 3 and laser 4；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
The waveguide 1-1 and waveguide 1-2 draw monitoring waveguide 3-1 and monitoring ripple respectively before wave multiplexer 11 is coupled into
Lead 3-2；The waveguide 1-3 and waveguide 1-4 draw monitoring waveguide 3-3 and monitoring waveguide respectively before wave multiplexer 12 is coupled into
3-4；Wherein, monitor waveguide 3-2 and monitor the lower section that waveguide 3-3 is located at other each waveguides in PLC vertical direction；
The monitoring waveguide 3-1, the light-emitting window for monitoring waveguide 3-2, monitoring waveguide 3-3 and monitoring waveguide 3-4 couple respectively
Photo-detector 21, photo-detector 22, photo-detector 23 and photo-detector 24.
The embodiments of the invention provide a kind of waveguide layout scheme so that photo-detector and laser are set in a manner of opposite end
Become possibility in PLC both sides, overcome use in the prior art photo-detector is fixed on to laser exiting surface behind
Intrinsic thinking, improve when higher than 25G speed, realize more preferable radio frequency effect.Also, the embodiment of the present invention passes through cleverly
Layout combines and detection method so that in the case that each waveguide is in same plane, remains able to halved belt between control waveguide
The Insertion Loss come within a preset range, ensure that the precision of detection.
Because the embodiment of the present invention and embodiment 1 have only adjusted in the layout of waveguide, other side is similar to waveguide
Parameter, the material selection of waveguide, and suitable for topology layout under emission and reception module etc., may be referred to the institute of embodiment 1
The content of elaboration, will not be repeated here.
Embodiment 4:
It is corresponding to additionally provide the making side of PLC in multi-channel high-speed rate optical module a kind of with embodiment 3, the embodiment of the present invention
Method, the PLC of making are used in the multi-channel high-speed rate optical module structure described in embodiment 3, as shown in figure 18, the preparation method
Including：
In step 301, waveguide base-material is grown on wafer so that waveguide base-material thickness reaches default first layer waveguide
Institute's setting parameter；Wherein, the waveguide base-material includes waveguide under-clad layer.
In step 302, photoresist is coated, and makes monitoring waveguide 3-2 and monitoring waveguide 3-3 figures by lithography；Use development
After liquid washes out each waveguide pattern, corrode to be used for make monitoring waveguide 3-2 and monitoring waveguide 3-3 in wafer using corrosive liquid
Figure, remove photoresist, in accordingly monitoring waveguide 3-2 and monitor and grow top covering on waveguide 3-3 figure.
In step 303, when top covering material thickness reaches default second layer waveguide present position, above-mentioned life is passed through
Length-photolithographicallpatterned (i.e. step 301-302 processes), complete waveguide 1-1, waveguide 1-2, waveguide 2-1, waveguide 2-2, go out fiber waveguide 3-
0th, waveguide 3-1 making is monitored；Wherein, there is wave multiplexer 11 in waveguide 1-1, waveguide 1-2 and waveguide 2-1 intersection's making；
Waveguide 1-3, waveguide 1-4 and waveguide 2-2 intersection, which make, wave multiplexer 12；In waveguide 2-1, waveguide 2-2 and go out fiber waveguide 3-0
Intersection make have wave multiplexer 13；
In step 304, and after each waveguide is completed in growth photoresist, continued growth top covering material are removed, and completed
PLC making.
With reference to the embodiment of the present invention, one group of optional parameter also is provided to be related to the waveguide light-splitting accounting of light splitting region,
Such as：The waveguide 1-1 and monitoring waveguide 3-1 junction, the ratio that light splitting 5-10% is obtained according to monitoring waveguide 3-1 are set
Meter；The waveguide 1-2 and monitoring waveguide 3-2 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-2；
The waveguide 1-3 and monitoring waveguide 3-3 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-3；It is described
Waveguide 1-4 and monitoring waveguide 3-4 junction, light splitting 5-10% Proportionality design is obtained according to monitoring waveguide 3-4.
In order to further improve the integrated level of transmitter unit in embodiment 1, made on PLC for each laser of face-down bonding
The pedestal of device is optimal solution, can not only reduce the cost shared by a coupled lens, and can avoid the coupling
Close occupancy spatially caused by lens.Referring to first patent, (patent No. " 201610326883.4 ", patent name are
" a kind of Planar Optical Waveguide Structures and its coupled structure and coupling process "), as shown in figure 15, the PLC is located at waveguide 1-1, ripple
The light inlet side for leading 1-2, waveguide 1-3 and waveguide 1-4 has made corresponding laser 1, laser 2, laser 3 and laser respectively
4 face-down bonding base.
In embodiments of the present invention, due to made in PLC wave multiplexer 11 and optical splitter (such as：Waveguide 1-1 and monitoring ripple
Lead at 3-1 coupling interfaces) belong to prior art, the present invention claimed relative position and making during being its preparation method
Opportunity, therefore, its make details will not be repeated here.
Embodiment 5:
According to the manufacture method for the PLC for being applied to multi-channel high-speed rate optical module described in embodiment 2, the embodiment of the present invention carries
Corresponding PLC structures have been supplied, as shown in figure 19, including：
Waveguide 1-1 connects wave multiplexer 11 with waveguide 1-2；Wherein, on relative to horizontal direction, the wave multiplexer 11 is located at
The lower section of the waveguide 1-1 light inlets and the top of wave multiplexer 12；
Waveguide 1-3 connects wave multiplexer 12 with waveguide 1-4；Wherein, on relative to horizontal direction, the wave multiplexer 12 is located at
The top of the waveguide 1-4 light inlets and the lower section of wave multiplexer 11；
The wave multiplexer 11 connects wave multiplexer 13 by waveguide 2-1 with waveguide 2-2 respectively with wave multiplexer 12；The wave multiplexer
13 between the wave multiplexer 11 and wave multiplexer 12；
Wherein, the waveguide 1-1 is coupled into before wave multiplexer 11, draws monitoring waveguide 3-1；The waveguide 2-1 is being coupled
Before entering wave multiplexer 13, monitoring waveguide 3-2 is also drawn；The waveguide 2-2 draws monitoring waveguide before wave multiplexer 13 is coupled into
3-3；The waveguide 1-4 draws monitoring waveguide 3-4 before wave multiplexer 12 is coupled into.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should be included in the scope of the protection.
Claims (16)
- A kind of 1. multi-channel high-speed rate optical module structure, it is characterised in that including at least one transmitter unit, wherein, transmitting is single Member includes laser (1), laser (2), laser (3), laser (4), wave multiplexer (11), wave multiplexer (12), wave multiplexer (13), photo-detector (21), photo-detector (22), photo-detector (23) and photo-detector (24), specifically：The laser (1) and laser (2) connect wave multiplexer (11) by waveguide (1-1) and waveguide (1-2) respectively；Wherein, On relative to horizontal direction, the wave multiplexer (11) is located at the lower section of the laser (1) and the top of wave multiplexer (12)；The laser (3) and laser (4) connect wave multiplexer (12) by waveguide (1-3) and waveguide (1-4) respectively；Wherein, On relative to horizontal direction, the wave multiplexer (12) is located at the top of the laser (4) and the lower section of wave multiplexer (11)；The wave multiplexer (11) and wave multiplexer (12) connect wave multiplexer (13) by waveguide (2-1) and waveguide (2-2) respectively；It is described Wave multiplexer (13) is between the wave multiplexer (11) and wave multiplexer (12)；Wherein, the waveguide (1-1) is coupled into before wave multiplexer (11), draws monitoring waveguide (3-1)；The waveguide (2-1) exists It is coupled into before wave multiplexer (13), also draws monitoring waveguide (3-2)；The waveguide (2-2) before wave multiplexer (13) is coupled into, Draw monitoring waveguide (3-3)；The waveguide (1-4) draws monitoring waveguide (3-4) before wave multiplexer (12) is coupled into；Also, The monitoring waveguide (3-1), the light-emitting window for monitoring waveguide (3-2), monitoring waveguide (3-3) and monitoring waveguide (3-4) couple respectively Photo-detector (21), photo-detector (22), photo-detector (23) and photo-detector (24).
- 2. multi-channel high-speed rate optical module structure according to claim 1, it is characterised in that each waveguide is specially titanium dioxide Silicon waveguide, is refractive index identical covering outside sandwich layer, refractive index contrast 0.013.
- 3. multi-channel high-speed rate optical module structure according to claim 1, it is characterised in that laser (1), laser (2), the interval between laser (3) and laser (4) is more than or equal to 1mm, also, for carrying each waveguide, each wave multiplexer, with And the laser (1), laser (2), the width of PLC substrates of laser (3) and laser (4) are less than or equal to 6mm.
- 4. multi-channel high-speed rate optical module structure according to claim 3, it is characterised in that the transmitter unit quantity is 2, described transmitter unit is arranged on pcb board by mode side by side, and is encapsulated in QSFP-DD.
- 5. multi-channel high-speed rate optical module structure according to claim 4, it is characterised in that the back side of the pcb board is also Receiving terminal optical fiber, array waveguide grating, photo-detector and trans-impedance amplifier are provided with, specifically：The trans-impedance amplifier and photo-detector are respectively welded at the back side of the pcb board, and one end of receiving terminal optical fiber is set In the light inlet side of array waveguide grating, also, light path coupling is completed in the light-emitting window side of the array waveguide grating with photo-detector The back side of the pcb board is fixed under conditions of conjunction.
- 6. PLC preparation method in a kind of multi-channel high-speed rate optical module, it is characterised in that the PLC of making is used for right such as will Ask in any described multi-channel high-speed rate optical module structures of 1-5, the preparation method includes：Waveguide base-material is grown on wafer so that waveguide base-material thickness reaches default waveguide institute setting parameter；Wherein, the waveguide Base-material includes waveguide under-clad layer；Coat photoresist, and make by lithography waveguide (1-1), waveguide (1-2), waveguide (2-1), waveguide (2-2), go out fiber waveguide (3-0), Monitor waveguide (3-1), monitoring waveguide (3-2) and monitoring waveguide (3-3) figure；Wherein, in waveguide (1-1), waveguide (1-2) and ripple The intersection for leading (2-1) makes wave multiplexer (11) figure by lithography；In the intersection of waveguide (1-3), waveguide (1-4) and waveguide (2-2) Make wave multiplexer (12) figure by lithography；In waveguide (2-1), waveguide (2-2) and go out the intersection of fiber waveguide (3-0) and make wave multiplexer by lithography (13) figure；After each waveguide pattern is washed out using developer solution, corrode the figure for making each waveguide in wafer using corrosive liquid Shape；Photoresist, the top covering of continued growth waveguide are removed, and completes PLC making.
- 7. PLC preparation method in multi-channel high-speed rate optical module according to claim 6, it is characterised in that the ripple (1-1) is led with monitoring the junction of waveguide (3-1), light splitting 5-10% Proportionality design is obtained according to monitoring waveguide (3-1)；It is described The junction of waveguide (2-1) and monitoring waveguide (3-2), light splitting 5-10% Proportionality design is obtained according to monitoring waveguide (3-2)；Institute Waveguide (2-2) is stated with monitoring the junction of waveguide (3-3), light splitting 5-10% Proportionality design is obtained according to monitoring waveguide (3-3)； The waveguide (1-4) and the junction of monitoring waveguide (3-4), the ratio that light splitting 5-10% is obtained according to monitoring waveguide (3-4) are set Meter.
- 8. PLC preparation method in the multi-channel high-speed rate optical module according to claim 6 or 7, it is characterised in that described The light inlet side that PLC is located at waveguide (1-1), waveguide (1-2), waveguide (1-3) and waveguide (1-4) has made corresponding laser respectively (1), the face-down bonding base of laser (2), laser (3) and laser (4).
- A kind of 9. multi-channel high-speed rate optical module structure, it is characterised in that including at least one transmitter unit, wherein, transmitting is single Member includes laser (1), laser (2), laser (3), laser (4), wave multiplexer (11), wave multiplexer (12), wave multiplexer (13), photo-detector (21), photo-detector (22), photo-detector (23) and photo-detector (24), specifically：The laser (1) and laser (2) connect wave multiplexer (11) by waveguide (1-1) and waveguide (1-2) respectively；Wherein, On relative to horizontal direction, the wave multiplexer (11) is between the laser (1) and laser (2)；The laser (3) and laser (4) connect wave multiplexer (12) by waveguide (1-3) and waveguide (1-4) respectively；Wherein, On relative to horizontal direction, the wave multiplexer (12) is between the laser (3) and laser (4)；The wave multiplexer (11) and wave multiplexer (12) connect wave multiplexer (13) by waveguide (2-1) and waveguide (2-2) respectively；It is described Wave multiplexer (13) is between the wave multiplexer (11) and wave multiplexer (12)；The waveguide (1-1) and waveguide (1-2) draw monitoring waveguide (3-1) and prison respectively before wave multiplexer (11) is coupled into Control waveguide (3-2)；The waveguide (1-3) and waveguide (1-4) draw monitoring waveguide respectively before wave multiplexer (12) is coupled into (3-3) and monitoring waveguide (3-4)；Wherein, waveguide (3-2) and monitoring waveguide (3-3) are monitored in PLC vertical direction positioned at other The lower section of each waveguide；The monitoring waveguide (3-1), monitoring waveguide (3-2), monitoring waveguide (3-3) and the light-emitting window difference for monitoring waveguide (3-4) Couple photo-detector (21), photo-detector (22), photo-detector (23) and photo-detector (24).
- 10. multi-channel high-speed rate optical module structure according to claim 9, it is characterised in that each waveguide is specially dioxy SiClx waveguide, is refractive index identical covering outside sandwich layer, refractive index contrast 0.013.
- 11. multi-channel high-speed rate optical module structure according to claim 9, it is characterised in that laser (1), laser (2), the interval between laser (3) and laser (4) is more than or equal to 1mm, also, for carrying each waveguide, each wave multiplexer, with And the laser (1), laser (2), the width of PLC substrates of laser (3) and laser (4) are less than or equal to 6mm.
- 12. multi-channel high-speed rate optical module structure according to claim 11, it is characterised in that the transmitter unit quantity For 2, described transmitter unit is arranged on pcb board by mode side by side, and is encapsulated in QSFP-DD.
- 13. PLC preparation method in a kind of multi-channel high-speed rate optical module, it is characterised in that the PLC of making is used for right such as will Ask in any described multi-channel high-speed rate optical module structures of 8-11, the preparation method includes：Waveguide base-material is grown on wafer so that waveguide base-material thickness reaches default first layer waveguide institute setting parameter；Wherein, institute Stating waveguide base-material includes waveguide under-clad layer；Photoresist is coated, and makes monitoring waveguide (3-2) and monitoring waveguide (3-3) figure by lithography；Each ripple is washed out using developer solution After leading figure, corrode to be used for make monitoring waveguide (3-2) and monitor the figure of waveguide (3-3) in wafer using corrosive liquid；Photoresist is removed, grows top covering on the accordingly figure of monitoring waveguide (3-2) and monitoring waveguide (3-3)；And when top covering material thickness reaches default second layer waveguide present position, it is complete by above-mentioned growth-photolithographicallpatterned Into waveguide (1-1), waveguide (1-2), waveguide (2-1), waveguide (2-2), the making for going out fiber waveguide (3-0), monitoring waveguide (3-1)； Wherein, there is wave multiplexer (11) in intersection's making of waveguide (1-1), waveguide (1-2) and waveguide (2-1)；In waveguide (1-3), ripple The intersection's making for leading (1-4) and waveguide (2-2) has wave multiplexer (12)；In waveguide (2-1), waveguide (2-2) and go out fiber waveguide (3- 0) intersection, which makes, wave multiplexer (13)；And photoresist, continued growth top covering material are removed after each waveguide is completed in growth, and complete PLC making.
- 14. PLC preparation method in multi-channel high-speed rate optical module according to claim 13, it is characterised in that described The junction of waveguide (1-1) and monitoring waveguide (3-1), light splitting 5-10% Proportionality design is obtained according to monitoring waveguide (3-1)；Institute Waveguide (1-2) is stated with monitoring the junction of waveguide (3-2), light splitting 5-10% Proportionality design is obtained according to monitoring waveguide (3-2)； The waveguide (1-3) and the junction of monitoring waveguide (3-3), the ratio that light splitting 5-10% is obtained according to monitoring waveguide (3-3) are set Meter；The waveguide (1-4) and the junction of monitoring waveguide (3-4), light splitting 5-10% ratio is obtained according to monitoring waveguide (3-4) Design.
- 15. PLC preparation method in the multi-channel high-speed rate optical module according to claim 13 or 14, it is characterised in that The light inlet side that the PLC is located at waveguide (1-1), waveguide (1-2), waveguide (1-3) and waveguide (1-4) has made to stress respectively Light device (1), laser (2), the face-down bonding base of laser (3) and laser (4).
- A kind of 16. PLC applied to multi-channel high-speed rate optical module, it is characterised in that including：Waveguide (1-1) and waveguide (1-2) connection wave multiplexer (11)；Wherein, on relative to horizontal direction, the wave multiplexer (11) Positioned at the lower section of the waveguide (1-1) light inlet and the top of wave multiplexer (12)；Waveguide (1-3) and waveguide (1-4) connection wave multiplexer (12)；Wherein, on relative to horizontal direction, the wave multiplexer (12) Positioned at the top of the waveguide (1-4) light inlet and the lower section of wave multiplexer (11)；The wave multiplexer (11) and wave multiplexer (12) connect wave multiplexer (13) by waveguide (2-1) and waveguide (2-2) respectively；It is described Wave multiplexer (13) is between the wave multiplexer (11) and wave multiplexer (12)；Wherein, the waveguide (1-1) is coupled into before wave multiplexer (11), draws monitoring waveguide (3-1)；The waveguide (2-1) exists It is coupled into before wave multiplexer (13), also draws monitoring waveguide (3-2)；The waveguide (2-2) before wave multiplexer (13) is coupled into, Draw monitoring waveguide (3-3)；The waveguide (1-4) draws monitoring waveguide (3-4) before wave multiplexer (12) is coupled into.
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| CN108508547A (en) * | 2018-03-27 | 2018-09-07 | 西安奇芯光电科技有限公司 | A kind of COMBO PON optical assemblies based on passive PLC optical waveguide techniques |
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| CN108873159B (en) * | 2018-06-19 | 2021-01-01 | 武汉电信器件有限公司 | Integrated device for erbium-doped fiber amplifier |
| CN113625401A (en) * | 2021-06-29 | 2021-11-09 | 武汉联特科技股份有限公司 | SFP-DD optical module with straight pull unlocking structure |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019061897A1 (en) | 2019-04-04 |
| CN107515449B (en) | 2019-07-26 |
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