CN107482103A - A kind of preparation method of the flip LED white chip of wafer-level package - Google Patents

A kind of preparation method of the flip LED white chip of wafer-level package Download PDF

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Publication number
CN107482103A
CN107482103A CN201710712974.6A CN201710712974A CN107482103A CN 107482103 A CN107482103 A CN 107482103A CN 201710712974 A CN201710712974 A CN 201710712974A CN 107482103 A CN107482103 A CN 107482103A
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China
Prior art keywords
chip
flip
wafer
pressing
preparation
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Application number
CN201710712974.6A
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Chinese (zh)
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CN107482103B (en
Inventor
邹军
姜楠
石明明
李杨
杨波波
李文博
房永征
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NINGBO LONGER LIGHTING Co.,Ltd.
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ZHEJIANG EMITTING OPTOELECTRONIC TECHNOLOGY Co Ltd
Shanghai Institute of Technology
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Priority to CN201710712974.6A priority Critical patent/CN107482103B/en
Publication of CN107482103A publication Critical patent/CN107482103A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • H01L33/505Wavelength conversion elements characterised by the shape, e.g. plate or foil
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Device Packages (AREA)

Abstract

The invention discloses a kind of preparation method of the flip LED white chip of wafer-level package, including process for pressing, curing process, cutting technique, characterization processes, the preparation method avoids fluorescent material sedimentation, so that the lot stability of flip LED white chip is high, colour temperature is consistent, and controllable upper surface packaging film thickness adjusts the optical properties such as uniformity of luminance, colour temperature, colour rendering index with side packaging film thickness.

Description

A kind of preparation method of the flip LED white chip of wafer-level package
Technical field
The present invention relates to LED chip preparation field, more particularly to a kind of system of the flip LED white chip of wafer-level package Preparation Method.
Background technology
Light source is as a kind of novel green lighting source for light emitting diode (Light Emitting Diode), with it without dirt The features such as dye, long-life, low-loss, photochromic pure, vibration resistance, is widely used in the world.Wafer-level package LED is because having the characteristics such as small encapsulation volume, perfect heat-dissipating, luminous uniform, long lifespan wide concerned and with its using flexible The characteristics of high, turns into industry new lover in recent years.
Fluorescence membrane has excitation-emission efficiency high, by thermostabilization, mechanical strength compared to fluorescent material, and packaging technology is simple etc. Advantage, it is highly suitable as the packaging body instead of filling glue and is adapted to a large amount of productions.Have tried to fluorescence membrane to falling Cartridge chip carries out wafer-level package:The bear of Guangzhou Hongli Tronic Co., Ltd. is firm etc. to have developed a kind of wafer-level package side Method (" wafer-level package LED forming methods and wafer-level package LED ", number of patent application:201511013222.8), this method Though reached the effect of wafer-level package complex process, and to be bonded in technique on chip coarse for packaging body, unstable. The faithful and honest Zheng Min up to Trade Co., Ltd. in Xiamen have developed a kind of chip-scale packaging method of positive cartridge chip, and (" formal dress chip-scale is white Light LED filament light source and its method for packing ", number of patent application:20161072532.7), equally use the method for fitting still Positive cartridge chip has very big inferior position relative to flip-chip performance, it is encapsulated also pretty troublesome, and is not suitable for for making chip-scale Encapsulation.The method that Tan Xiao China of Tianjin moral high chemical conversion new material limited company et al. employs press mold prepares film, (chip-scale The preparation method of the flip LED white chip of encapsulation, number of patent application:201510245273.7) but largely used solidification Adhesive tape, make the increase of technique destabilizing factor.It is not suitable for batch into production.Presently disclosed document and patent are sealed on chip-scale The quick-reading flow sheets of dress, elaboration is not made to performance, we are improved in addition regarding to the issue above, and prepare high-performance Wafer-level package LED.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of preparation side of the flip LED white chip of wafer-level package Method, the preparation method avoid fluorescent material sedimentation, so that the lot stability of flip LED white chip is high, colour temperature is consistent, And controllable upper surface packaging film thickness adjusts uniformity of luminance, colour temperature, colour rendering index with side packaging film thickness Etc. optical property.
To solve the above problems, the technical scheme is that:
A kind of preparation method of the flip LED white chip of wafer-level package, including process for pressing, curing process, cutting Technique, characterization processes, wherein:
Process for pressing comprises the following steps,
S1:Flip-chip is placed on die bond steel plate;
S2:The die bond steel plate for being placed with the flip-chip is placed on to the upper surface of the lower template of pressing machine, and Padded is placed below the lower template;
S3:Ready-made fluorescence membrane in advance is fitted in the lower surface of the cope plate of the pressing machine;
S4:Start the pressing machine, begun to warm up inside the pressing machine, is heated to after the fluorescence membrane starts softening The internal temperature of the pressing machine is set to be maintained at the temperature more than 30 minutes that the fluorescence membrane starts softening again;
S5:The cope plate starts to push, and the cope plate presses with the lower template;
S6:It after pressing 5~10 minutes, can mold after the fluorescence membrane reaches Surface hardened layer, and will press The die bond steel plate for being placed with the flip-chip takes out;
Curing process comprises the following steps,
S7:The die bond steel plate for being placed with the flip-chip pressed in step S6 is put into baking box to be toasted Solidification;
Cutting technique comprises the following steps,
S8:Accurately drawn with the cutter of scribing machine and different-thickness-by the flip-chip being cured in step S7 Cut, obtain regulation lateral thickness-single chip level encapsulation LED;
Characterization processes comprise the following steps,
S9:The encapsulation of single chip level described in step S8 LED is subjected to sampling observation test, exact p-value result on integrating sphere After meeting customer requirement, shipment is packed.
In an embodiment of the present invention, also include between the step S4 and the step S5:
Vacuumize:Make to start to vacuumize inside the pressing machine, the vacuum vacuumized is -95~-100Kpa scopes It is described to vacuumize stopping when interior.
In an embodiment of the present invention, the baking-curing temperature of baking box described in the step S7 is 150 DEG C~180 DEG C, Baking time is 3~3.5 hours.
In an embodiment of the present invention, in the step S5, the pressure of the pressing is 20-30Kgf/cm2
In the present invention, the fluorescence membrane is mixed by one or more heat conductive silica gels and one or more fluorescent material Membranaceous fluorophor.
In the present invention, the flip LED chips are the disposable type with pilework, any photochromic LED chip.
The present invention makes it have the following advantages that and actively imitate compared with prior art due to using above technical scheme Fruit:
(1) technical scheme of fluorescent material is substituted with fluorescence membrane, has excitation-emission efficiency high, physical and chemical performance steady The series of advantages such as calmly, high homogeneity, thermal conductivity are high, aftertreatment technology is simple, overcome the stability of fluorescent powder packaging poor, easy The problems such as aging.
(2) it is simple using inverted structure LED chip die bond technique, good heat dissipation.
(3) present invention can control top capsulation fluorescence membrane thickness, Ke Yitong using the method for padded height of control The thickness for crossing control cutting tool controls side fluorescence membrane package thickness, the top fluorescence membrane package thickness of arranging in pairs or groups different It can reach different Luminescence Uniformity, colour temperature, aobvious finger and photochromic requirement from side fluorescence membrane package thickness, meet actual Living environment is to luminous requirement.
(4) the flip LED encapsulating structure of the wafer-level package is simple, and its manufacture craft is simple, avoids in original technique Mixed glue and gluing process, improve production efficiency, yield rate and production cost are greatly lowered, and are adapted to large-scale industrialization life Production.
Brief description of the drawings
Fig. 1 is the schematic diagram of process for pressing in the present invention.
Fig. 2 is the schematic diagram of cutting technique in the present invention.
Fig. 3 is the schematic diagram of encapsulating structure in the present invention.
The light distribution curve of Fig. 4 SMIS chip size package flip LED white chips of the present invention.
The side fluorescence membrane thickness of 11 top surface fluorescence membrane package thickness of 1- fluorescence membranes 12
2- flip LED chips
3- die bond steel plates
4- cope plates
5- lower templates
Padded of 6-
7- cutter
Embodiment
Flip LED white light core below in conjunction with the drawings and specific embodiments to a kind of wafer-level package proposed by the present invention The preparation method of piece is described in further detail.According to following explanation and claims, advantages and features of the invention will more It is clear.It should be noted that accompanying drawing uses using very simplified form and non-accurately ratio, only to convenient, apparent Ground aids in illustrating the purpose of the embodiment of the present invention.
Referring to Fig. 1, Fig. 2, Fig. 3, a kind of preparation method of the flip LED white chip of wafer-level package, including pressing work Skill, curing process, cutting technique, characterization processes, specifically include following steps:
S1:Flip-chip 2 is placed on die bond steel plate 3;
It is simple using inverted structure LED chip die bond technique in the present embodiment, good heat dissipation.
S2:The die bond steel plate 3 for being placed with flip-chip 2 is placed on to the upper surface of the lower template 5 of pressing machine, and in lower template Padded 6 is placed below 5;
In specific implementation process, using the method for padded 6 height of control top capsulation fluorescence membrane can be controlled thick Degree 11.
S3:Ready-made fluorescence membrane 1 in advance is fitted in the lower surface of the cope plate 4 of pressing machine;
In the present embodiment, the technical scheme of fluorescent material is substituted with fluorescence membrane, there is excitation-emission efficiency high, physical chemistry The series of advantages such as stable performance, high homogeneity, thermal conductivity are high, aftertreatment technology is simple, overcome the stabilization of fluorescent powder packaging The problems such as property is poor, easy to aging.Fluorescence membrane 1 is mixed by one or more heat conductive silica gels and one or more fluorescent material Membranaceous fluorophor.
S4:Start pressing machine, begun to warm up inside pressing machine, be heated to make pressing machine again after fluorescence membrane 1 starts softening Internal temperature be maintained at the temperature more than 30 minutes that fluorescence membrane 1 starts softening;
S5:Cope plate 4 starts to push, and cope plate 4 presses with lower template 5;
S6:After pressing 5~10 minutes, it can be molded after fluorescence membrane 1 reaches Surface hardened layer, and the placement that will have been pressed The die bond steel plate 3 for having flip-chip 2 takes out;
S7:The die bond steel plate 3 for being placed with flip-chip 2 pressed in step S6 is put into baking box and carries out baking-curing;
S8:The flip-chip 2 being cured in step S7 is subjected to accurate cutting-up with the cutter 7 of scribing machine and different-thickness, Obtain the single chip level encapsulation LED of regulation lateral thickness 12;
In specific implementation process, by controlling the thickness of cutting tool 7 side fluorescence membrane encapsulation can be controlled thick Degree 12.It should be noted that using very thin cutting tool, the minor variations of control cutting distance can also take identical effect to Fruit, it can also be cut using wire cutting machine.
Referring to Fig. 4, wafer-level package LED prepared by the present invention has the distribution curve flux of the shape of a saddle, and Luminescence Uniformity is high, hair Angular is wide.When top capsulation fluorescence membrane thickness and side encapsulate fluorescence membrane thickness proportion close to 2:It can be obtained not when 1 With color temperature value relatively uniform under angle.The top fluorescence membrane package thickness 11 for arranging in pairs or groups different and the encapsulation of side fluorescence membrane are thick Degree 12 can reach different Luminescence Uniformity, colour temperature, aobvious finger and photochromic requirement.Meet that real life environments will to luminous Ask.
S9:Single chip level encapsulation LED in step S8 is subjected to sampling observation test on integrating sphere, exact p-value result meets After customer requirement, shipment is packed.
The flip LED encapsulating structure of the present embodiment SMIS chip size package is simple, and its manufacture craft is simple, avoids original work Glue and gluing process are mixed in skill, improves production efficiency, yield rate and production cost is greatly lowered, is adapted to large-scale industrialization Production.
In one embodiment, also include between step S4 and step S5:
Vacuumize:Make to start to vacuumize inside pressing machine, the vacuum vacuumized is in the range of -95~-100Kpa When, vacuumize stopping.Vacuum section is in the preferred section of experimental determination, can ensure fluorescence membrane 1 and flip LED core There is no bubble between piece 2.
In one embodiment, the baking-curing temperature of baking box is 150 DEG C~180 DEG C in step S7, baking time 3 ~3.5 hours.
In one embodiment, in step S5, the pressure of pressing is 20-30Kgf/cm2
Embodiments of the present invention are explained in detail above in conjunction with accompanying drawing, but the present invention is not limited to above-mentioned implementation Mode.Even if to the present invention, various changes can be made, if these changes belong to the model of the claims in the present invention and its equivalent technologies Within enclosing, then still fall among protection scope of the present invention.

Claims (4)

1. the preparation method of the flip LED white chip of a kind of wafer-level package, it is characterised in that including process for pressing, solidification Technique, cutting technique, characterization processes, wherein:
Process for pressing comprises the following steps,
S1:Flip-chip (2) is placed on die bond steel plate (3);
S2:The die bond steel plate (3) for being placed with the flip-chip (2) is placed on to the upper surface of the lower template (5) of pressing machine, And padded (6) are placed below the lower template (5);
S3:The lower surface that ready-made fluorescence membrane (1) is fitted in the cope plate (4) of the pressing machine will be shifted to an earlier date;
S4:Start the pressing machine, begun to warm up inside the pressing machine, is heated to after the fluorescence membrane (1) starts softening The internal temperature of the pressing machine is set to be maintained at the temperature more than 30 minutes of the fluorescence membrane (1) softening again;
S5:The cope plate (4) starts to push, and the cope plate (4) presses with the lower template (5);
S6:Pressing 5~10 minutes, the fluorescence membrane (1) molds after reaching Surface hardened layer, and being placed with for having pressed is described The die bond steel plate (3) of flip-chip (2) is taken out;
Curing process comprises the following steps,
S7:The die bond steel plate (3) for being placed with the flip-chip (2) pressed in step S6 is put into baking box to be dried Roasting solidification;
Cutting technique comprises the following steps,
S8:The flip-chip (2) being cured in step S7 is accurately drawn with the cutter of scribing machine and different-thickness (7) Cut, obtain the single chip level encapsulation LED of regulation lateral thickness (12);
Characterization processes comprise the following steps,
S9:The encapsulation of single chip level described in step S8 LED is subjected to sampling observation test on integrating sphere, exact p-value result meets After customer requirement, shipment is packed.
A kind of 2. preparation method of the flip LED white chip of wafer-level package as claimed in claim 1, it is characterised in that Also include between the step S4 and the step S5:
Vacuumize:Make to vacuumize inside the pressing machine, it is described when the vacuum vacuumized is in the range of -95~-100Kpa Vacuumize stopping.
A kind of 3. preparation method of the flip LED white chip of wafer-level package as claimed in claim 1, it is characterised in that The baking-curing temperature of baking box described in the step S7 is 150 DEG C~180 DEG C, and baking time is 3~3.5 hours.
A kind of 4. preparation method of the flip LED white chip of wafer-level package as claimed in claim 1, it is characterised in that In the step S5, the pressure of the pressing is 20-30Kgf/cm2
CN201710712974.6A 2017-08-18 2017-08-18 A kind of preparation method of the flip LED white chip of wafer-level package Active CN107482103B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108400217A (en) * 2018-01-22 2018-08-14 东莞中之光电股份有限公司 A kind of high efficiency LED chip flip-chip packaged method
CN108417699A (en) * 2018-05-18 2018-08-17 深圳市德彩光电有限公司 The plastic package die of LED light source
CN108807649A (en) * 2018-06-13 2018-11-13 深圳市德彩光电有限公司 A kind of LED light source plastic package method
CN111029451A (en) * 2018-10-09 2020-04-17 合肥彩虹蓝光科技有限公司 LED packaging method
CN112186088A (en) * 2020-09-30 2021-01-05 深圳Tcl新技术有限公司 Laminating equipment and LED packaging process

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101150152A (en) * 2006-08-09 2008-03-26 刘胜 A making method for white LED chip
CN103050609A (en) * 2012-07-17 2013-04-17 上海祥羚光电科技发展有限公司 Preparation method of white chip for LED (Light Emitting Diode)
CN105280781A (en) * 2015-10-30 2016-01-27 晶科电子(广州)有限公司 Flip white-light LED device and manufacturing method thereof
CN106531870A (en) * 2015-09-11 2017-03-22 晶元光电股份有限公司 Light emitting device and method for manufacturing the same
CN106531867A (en) * 2016-12-21 2017-03-22 福建昌达光电有限公司 Vertical structured chip having multiple color blocks independently emitting light and manufacturing method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101150152A (en) * 2006-08-09 2008-03-26 刘胜 A making method for white LED chip
CN103050609A (en) * 2012-07-17 2013-04-17 上海祥羚光电科技发展有限公司 Preparation method of white chip for LED (Light Emitting Diode)
CN106531870A (en) * 2015-09-11 2017-03-22 晶元光电股份有限公司 Light emitting device and method for manufacturing the same
CN105280781A (en) * 2015-10-30 2016-01-27 晶科电子(广州)有限公司 Flip white-light LED device and manufacturing method thereof
CN106531867A (en) * 2016-12-21 2017-03-22 福建昌达光电有限公司 Vertical structured chip having multiple color blocks independently emitting light and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108400217A (en) * 2018-01-22 2018-08-14 东莞中之光电股份有限公司 A kind of high efficiency LED chip flip-chip packaged method
CN108417699A (en) * 2018-05-18 2018-08-17 深圳市德彩光电有限公司 The plastic package die of LED light source
CN108807649A (en) * 2018-06-13 2018-11-13 深圳市德彩光电有限公司 A kind of LED light source plastic package method
CN111029451A (en) * 2018-10-09 2020-04-17 合肥彩虹蓝光科技有限公司 LED packaging method
CN112186088A (en) * 2020-09-30 2021-01-05 深圳Tcl新技术有限公司 Laminating equipment and LED packaging process

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Effective date of registration: 20210323

Address after: 315301 No. 299, Zongan Road, Zonghan street, Cixi City, Ningbo City, Zhejiang Province

Patentee after: NINGBO LONGER LIGHTING Co.,Ltd.

Address before: 200235 Caobao Road, Xuhui District, Shanghai, No. 120-121

Patentee before: SHANGHAI INSTITUTE OF TECHNOLOGY

Patentee before: Zhejiang Emitting Optoelectronic Technology Co.,Ltd.

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