CN107479187A - A kind of two-dimentional quick beat speculum and its method of work - Google Patents
A kind of two-dimentional quick beat speculum and its method of work Download PDFInfo
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- CN107479187A CN107479187A CN201710903695.8A CN201710903695A CN107479187A CN 107479187 A CN107479187 A CN 107479187A CN 201710903695 A CN201710903695 A CN 201710903695A CN 107479187 A CN107479187 A CN 107479187A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- Optics & Photonics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
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Abstract
The invention discloses a kind of quick beat speculum of two dimension and its method of work, it is characterised in that including：Mirror support structure, the first flexible deflection mechanism, the second flexible deflection mechanism, sensing drive component, base and driving control system；It is used to mirror support structure be installed after the flexible deflection mechanism combination, sensing drive component is connected to control flexible deflection mechanism to perform beat action with driving control system, and base is used for fixed sensing drive component and flexible deflection mechanism.The advantage of the invention is that：Possesses the characteristics of assembling is simple, mechanism is compact, space availability ratio is high, stability is good, response is fast, small volume, in light weight, rigidity is high；Add the scope of output deflection angle so that speculum possesses larger beat scope；Measurement accuracy is high, occupies little space, and can measure beat output angle indirectly, possess higher deflection angle output accuracy；Improve Beam Control precision；With the higher linearity and resolution ratio.
Description
Technical field
The present invention relates to Beam Control technical field, more particularly to a kind of two-dimentional quick beat speculum and its work side
Method.
Background technology
Quick beat speculum is a kind of key componentses in modern optical electro-mechanical system, and its major function is by real-time
Adjust itself mirror angle realize the angle of light is pointed to, scanning and stably, be widely used in laser space communication,
Adaptive optics, composite shaft precision tracking, astronomical telescope, laser imaging radar, laser beam systems stabilisation, confocal microscope,
The fields such as laser scanning.For example, in laser space communication system, quick beat speculum is used to adjust light beam in real time
And control, it is ensured that the stabilization of laser communication link.In adaptive optics system, quick beat speculum is by constantly adjusting
Whole mirror angle adapts to the change of external condition, so as to being effectively improved hot spot image quality.In above-mentioned application system, in order to
Obtain good angle positioning and tracing control effect, often require that quick beat speculum have larger beat scope, compared with
High angular resolution, faster responding ability, deflection angle can automatic detection, without inter-axis coupling with interference the advantages that.
In general, the type of drive of quick beat speculum is different, and the control effect obtained is different.Such as,
Big scanning angle can be obtained using voice coil actuator, but precision is limited；And it can be obtained using piezoelectric high-precision
Control, but scanning angle is limited in scope.Some quick beat speculums easily cause because complicated in mechanical structure in the prior art
Coupled between two beat directions, and then influence Beam Control precision.Meanwhile the limitation of space structure to ensure simultaneously
The beat of wide-angle and the control of high-precision angle become very difficult.
Generally, the sensor of large volume is seldom integrated with inside quick beat speculum, carrys out automatic detection and defeated
Go out angular displacement information.Current technology is to increase some optical instruments in mirror outer, such as autocollimator or position sensing
Device PSD etc., direct measurement is carried out, but this way needs larger operating space, if being applied to other optics simultaneously
Also easily interference is produced in system with other operations.Need to develop the beat speculum that output angle can be measured voluntarily for this.
Patent No. " 201210434727.1 ", patent name are the Chinese invention of " a kind of two-dimensional rapid control reflector "
Patent uses the method for pasting foil gauge, indirectly measurement and angle displacement information, but the measuring method based on foil gauge is smart
Spend limited, also limit the deflection angle measurement accuracy of quick beat speculum.
Although accuracy in capacitance sensors is higher, such as Patent No. " 201110290112.1 ", patent name is " to be based on
Quick beat reflection disclosed in the Chinese invention patent of the micro- angular swing control reflecting mirror of high-frequency response two-dimensional of shaft flexible hinge "
Mirror, beat action is produced using driver both ends driving minute surface, this structure can not install high-precision electricity because being limited by space
Hold sensor.
The minute surface of some beat speculums is disposed vertically with driver driving direction, can be caused when temperature wide variation
Displacement perpendicular to minute surface direction, causes optical path distortion.
Patent No. " 201510254501.7 " patent name is " pivot is in the fast steering mirror of reflecting surface
Minute surface disclosed in the Chinese invention patent of controlling organization and method " is placed in parallel with driver driving direction, when the big model of temperature
The beat angular displacement of minute surface can be caused when enclosing change.
Therefore, a kind of quick beat speculum of bidimensional is designed, it is met that compact-sized, angle can automatic detection and defeated
Go out, beat scope is big, beat precision is high, is required without inter-axis coupling etc., become very necessary.
The content of the invention
The defects of present invention is directed to prior art, there is provided a kind of two-dimentional quick beat speculum and its method of work, energy
It is effective to solve the above-mentioned problems of the prior art.
In order to realize above goal of the invention, the technical scheme that the present invention takes is as follows：
A kind of quick beat speculum of two dimension, including mirror support structure 1；First flexible deflection mechanism 2；Second is flexible inclined
Swinging mechanism 3；Sense drive component 4；Base 5 and driving control system 6；The first flexible deflection mechanism 2 and second is flexible partially
Swinging mechanism 3 is used to install mirror support structure after combining, and sensing drive component 4 and driving control system 6 are connected to control the
One flexible 2 and second flexible deflection mechanism 3 of deflection mechanism performs beat action, and base 5 is used for fixed sensing drive component 4 and the
Two flexible deflection mechanisms 3.
Further, the described first flexible deflection mechanism 2 includes：X-direction support transverse slat 2-1, X-direction beat axle first support
Plate 2-21, X-direction beat the second fagging of axle 2-22, the flexible leaf spring 2-31 of X-direction first, X-direction second flexible leaf spring 2-32, X
Direction the first guide plate 2-41, the second guide plate of X-direction 2-42, X-direction the first input adapter 2-51 and the input of X-direction second connect
Head 2-52；
The X-direction support transverse slat 2-1 middle lower surfaces are provided with groove, X-direction the first guide plate 2-41 and X-direction second
It is all circular arc that guide plate 2-42 shapes are identical, X-direction support transverse slat 2-1 two respectively with the first guide plate of X-direction 2-41
With the second guide plate of an X-direction 2-42 connection, similar semicircular in shape is formed；
The flexible leaf spring 2-31 of X-direction first is identical with the flexible leaf spring 2-32 shapes of X-direction second, is all strip；X-direction
First flexible leaf spring 2-31 one end connection the first guide plate of X-direction 2-41 inner arc center, the other end and X-direction beat axle the
One fagging 2-21 connections, the flexible leaf spring 2-32 of X-direction second one end connect with the second guide plate of X-direction 2-42 inner arc center
Connect, the other end is connected with X-direction beat the second fagging of axle 2-22；Above-mentioned two faggings downward vertically, and two faggings and two
Shape is mutually symmetrical after root leaf spring connects respectively；
X-direction the first input adapter 2-51 and X-direction the second input adapter 2-52, is oriented to X-direction first respectively
Plate 2-41 connects with the second guide plate of X-direction 2-42 end, is mutually symmetrical.
Further, the described second flexible deflection mechanism 3 includes：Y-direction support transverse slat 3-1, Y-direction beat axle supporting plate
The flexible leaf spring 3-31 of 3-2, Y-direction first, the flexible leaf spring 3-32 of Y-direction second, the first guide plate of Y-direction 3-41, Y-direction second
Guide plate 3-42, Y-direction the first input adapter 3-51 and the second input adapter of Y-direction 3-52；
Upper surface is provided with groove, Y-direction the first guide plate 3-41 and Y-direction second in the middle part of the Y-direction support transverse slat 3-1
It is all circular arc that guide plate 3-42 shapes are identical, Y-direction support transverse slat 3-1 two respectively with the first guide plate of Y-direction 3-41
With the second guide plate of a Y-direction 3-42 connection, similar semicircular in shape is formed.
The flexible leaf spring 3-31 of Y-direction first and the flexible leaf spring 3-32 shapes of Y-direction second are all identical strip, and one end is divided
Inner arc center not with Y-direction the first guide plate 3-41 and the second guide plate of Y-direction 3-42 is connected, the other end respectively with Y-direction
Beat axle supporting plate 3-2 top left and right ends are connected.
Top plan view is cross after the first flexible deflection mechanism 2 combines with the second flexible deflection mechanism 3, the X
Direction support transverse slat 2-1 groove and Y-direction support transverse slat 3-1 groove shapes are agreed with, and are pasted by High-strength glue
Together, X-direction beat the first fagging of axle (2-21) of the described first flexible deflection mechanism 2 and X-direction beat the second fagging of axle
Space between (2-22) is used to insert and be glued the Y-direction beat axle supporting plate 3-2 of the second flexible deflection mechanism 3.
Further, the sensing drive component 4 includes：One center fixed block 4-1, four levers being uniformly distributed along the circumference
Amplifying type driving head 4-21,4-22,4-23,4-24, four telescopic driver 4-31,4-32,4-33,4- being uniformly distributed along the circumference
34th, four pretension block 4-4 being uniformly distributed along the circumference, the four pairs of capacitance sensors probe 4-51,4-52,4-53,4- being uniformly distributed along the circumference
54th, four pre-loading screw 4-6 being uniformly distributed along the circumference and other screwed holes.
Center fixed block 4-1 and lever amplification formula the driving head 4-21,4-22,4-23,4-24 are monolithic construction,
It is process by wire cutting technology integration.Center fixed block 4-1 center is provided with a through hole, a bolt there through
Second flexible deflection mechanism 3, center fixed block 4-1, base 5 are fixedly connected；Four uniform be for fixed screwed hole,
For center fixed block 4-1 and the base 5 of being connected.
Four lever amplifications formula driving head 4-21,4-22,4-23,4-24 has a central axis in paper
Screwed hole, for being fixedly connected with base 5；Four lever amplification formula driving head 4-21,4-22,4-23,4-24 output end has
Two symmetrical central shafts parallel to paper screwed hole, it is soft for being fixedly connected with the first flexible deflection mechanism 2 and second
The input adapter of property deflection mechanism 3；Each lever amplification formula driving head 4-21,4-22,4-23,4-24 is used for telescopic drive
Device 4-31,4-32,4-33, the 4-34 amount of elongating or shortening are amplified output, so as to promote the first flexible He of deflection mechanism 2
Second flexible deflection mechanism 3 moves.
Four telescopic drivers 4-31,4-32,4-33, it can extend or shorten after 4-34 power-up, for promoting
Lever amplification formula driving head 4-21,4-22,4-23,4-24 produces motion.
Four pretension block 4-4 and four pre-loading screw 4-6 work in coordination, for telescopic driver 4-31,4-32,
4-33,4-34 are fixed and pretension, telescopic driver 4-31,4-32,4-33,4-34 is had certain pretightning force.This is pre-
The size of clamp force can be ensured by calculating and adjusting central axis in the position of the screwed hole of paper.
Four pairs of capacitance sensors probe 4-51,4-52,4-53,4-54 is pasted onto lever amplification formula driving head 4-21,
Between 4-22,4-23,4-24 and center fixed block 4-1, for detecting the displacement variable of the position.Every a pair of capacitance sensors
Pop one's head in for the displacement variable for detecting an opening position.
Further, the screwed hole that is provided with the beat axle supporting plate 3-2 of the second flexible deflection mechanism 3 is used for and base 5
It is fixedly connected.
Bolt passes through center fixed block 4-1 central through hole, by the second flexible deflection mechanism 3, center fixed block 4-1 and bottom
Seat 5 is fixed together.
The upper surface of the top transverse slat of first flexible deflection mechanism 2 is fixed by High-strength glue and mirror support structure 1
Link together.
Further, described driving control system 6 includes：Four road D/A change-over circuits, four road power amplifier drive circuits, four
Road electric capacity modulate circuit, four road A/D change-over circuits, DSP digitial controllers.Four road D/A change-over circuits are used for the four of DSP outputs
Railway digital control signal is converted to four road analog control signals；The function of four road power amplifier drive circuits is to carry out work(to control signal
Rate is amplified, and drives four road telescopic drivers to elongate or shorten it；The first and third tunnel output difference of four road power amplifier drive circuits
It is connected with telescopic driver 4-31,4-33 of sensing drive component；Four road power amplifier drive circuits second, four tunnels output respectively and
Telescopic driver 4-32,4-34 of sensing drive component are connected；Sense 4-51,4-53 points of the capacitance sensor probe of drive component
The first and third tunnel input of the road electric capacity modulate circuits of Bie He tetra- is connected；Sense capacitance sensor probe 4-52,4-54 of drive component
It is connected respectively with second, the four tunnels input of four road electric capacity modulate circuits；
A kind of control method based on above-mentioned driving control system, including：The capacitance sensor of speculum body interior is visited
Head 4-51,4-52,4-53,4-54 detects the change of displacement, outputs this to four road electric capacity modulate circuits；Electric capacity conditioning electricity
Road be mainly used in receive come self capacitance sensor probe 4-51,4-52,4-53,4-54 small-signal and it is filtered and
Amplification, there is provided to four road A/D change-over circuits.Four railway digital signals are converted into by four road A/D change-over circuits again, input is extremely
DSP digitial controllers participate in control algolithm；The function of DSP digitial controllers is, by target deflection angle [θrx,θry] and measure
Actual deflection angle carries out error contrast, and realizes pid algorithm output control signal.Phase inverter is used to control signal being changed into size
The opposite signal of equal direction, then by four road D/A change-over circuits and four road power amplifier drive circuit outputs, for driving flexible drive
Dynamic device 4-33 makes its generation and telescopic driver 4-31 motions in opposite direction equal in magnitude, while for driving telescopic driver
4-34 makes it produce and telescopic driver 4-32 motions in opposite direction equal in magnitude.
A kind of beat method based on the quick beat speculum of above-mentioned two dimension, including following content：Realize along X-direction and
Along the beat of two dimensions of Y direction；Wherein, telescopic driver 4-31 and 4-33 is one group, for driving the fortune of Y-direction
It is dynamic, and then realize beat of the speculum along X-axis；Telescopic driver 4-32 and 4-34 are one group, for driving the motion of X-direction,
And then realize beat of the speculum along Y-axis.
Further, the size of four telescopic drivers is identical with performance, extends, is applying when applying positive voltage
Shorten during negative voltage.
Further, the deflection angle of X and Y both directions of the invention employs indirect method of measurement measure, it is necessary to enter to it
Rower is determined.First, the true of X-direction and Y-direction is gone out based on outside High-precision angle measuring instrument (such as autocollimator) direct measurement
Real deflection angle.Then, the true deflection angle of the capacitance sensor displacement sums that measure of probe 4-51 and 4-53 and X-direction into than
Example relation, proportionality coefficient Kx, i.e. X are to calibration coefficient；The displacement sum and Y that capacitance sensor probe 4-52 and 4-54 is measured
The proportional relation of true deflection angle in direction, proportionality coefficient Ky, i.e. Y-direction calibration coefficient.
A kind of start method based on the quick beat speculum of above-mentioned two dimension, including following content：
Beat of the speculum along X-axis acts implementation process：The first via of four road power amplifier drive circuits and the 3rd tunnel difference
The opposite drive signal of output size equal direction, just (negative) voltage, which are applied on driver 4-31, makes it extend (shortening) L1 length
Degree, negative (just) voltage, which is applied on driver 4-33, makes it shorten (elongation) L1 length, then passes through lever amplification formula driving head 4-
21 and 4-23, which amplifies and drives the second flexible deflection mechanism 3 to make the difference movable pendulum, to be moved, that is, realizes the beat around X-axis.
At the same time, beat action implementation process of the speculum along Y-axis is：Second tunnel of four road power amplifier drive circuits and
The opposite drive signal of four tunnels difference output size equal direction, just (negative) voltage, which is being applied on driver 4-32, makes its elongation
(shortening) L2 length, negative (just) voltage, which is applied on driver 4-34, makes it shorten (elongation) L2 length, then passes through lever amplification
Formula driving head 4-22 and 4-24, which amplify and drive the first flexible deflection mechanism 2 to make the difference movable pendulum, to be moved, that is, realizes the beat around Y-axis.
Compared with prior art the advantage of the invention is that：
1. the first flexible deflection mechanism, the second flexible deflection mechanism, lever amplification formula driving head use wire cutting technology
It is process, machining accuracy is higher, and assembling is simple.
2. the small stroke of telescopic driver can be amplified by lever amplification formula driving head, while flexible deflecting machine
The output quantity of lever amplification formula driving head has been carried out 2 times based on differential amplification principle and has amplified and be converted into angular displacement output by structure,
Therefore the scope of output deflection angle is considerably increased so that speculum possesses larger beat scope.
3. sensing drive component is internally provided with capacitance displacement sensor probe, measurement accuracy is high, occupies little space, can
Measurement beat output angle indirectly, coordinating with control system can make speculum possess higher deflection angle output accuracy.
4. the rotary shaft of two flexible deflection mechanisms of the present invention is mutually perpendicular to, the X-direction and Y-direction of drive component are sensed
Two groups of outputs also independently of each other, be independent of each other, therefore speculum can be made to realize two-dimensional quadrature beat and in two beat directions
On do not produce angle coupling, and then realize high-precision output angle, improve Beam Control precision.
5. the present invention is also equipped with, mechanism is compact, space availability ratio is high, stability is good, response is fast, small volume, in light weight, firm
Spend the characteristics of high.
6. make its long working life without frictional dissipation in beat motion, can be non-maintaining without lubrication.
7. under large-scale temperature change, each piezoelectric actuator can have certain stretch.In sensing drive component
X-direction (Y-direction) on have two telescopic drivers arranged in the direction, when temperature wide variation, the two are flexible
Caused displacement can cancel out each other driver in this direction, it is ensured that the change of temperature does not influence the deflection angle of speculum
Degree.This good temperature stability can ensure that beat speculum has the higher linearity and resolution ratio under closed loop conditions.
Brief description of the drawings
Fig. 1 is the stereogram of speculum of the embodiment of the present invention；
Fig. 2 is the exploded view of speculum of the embodiment of the present invention；
Fig. 3 is the structural representation of the first flexible deflection mechanism of the embodiment of the present invention；
Fig. 4 is the structural representation of the second flexible deflection mechanism of the embodiment of the present invention；
Fig. 5 is the structural representation that the embodiment of the present invention senses drive component；
Fig. 6 is the structural representation of driving control system of the embodiment of the present invention；
Fig. 7 is the beat action schematic diagram that the embodiment of the present invention senses drive component；
Fig. 8 is the input start direction schematic diagram of first, second flexible deflection mechanism of the embodiment of the present invention；
Fig. 9 is the action schematic diagram that first, second flexible deflection mechanism of the embodiment of the present invention exports deflection angle.
Embodiment
For the objects, technical solutions and advantages of the present invention are more clearly understood, develop simultaneously embodiment referring to the drawings, right
The present invention is described in further details.
As shown in Figure 1, 2, the quick beat speculum of a kind of two dimension, including mirror support structure 1；First flexible deflection mechanism
2；Second flexible deflection mechanism 3；Sense drive component 4；Base 5 and driving control system 6；
As shown in figure 3, the first flexible deflection mechanism 2 includes：X-direction support transverse slat 2-1, X-direction beat axle first
Fagging 2-21, X-direction beat the second fagging of axle 2-22, the flexible leaf spring 2-31 of X-direction first, the flexible leaf spring 2-32 of X-direction second,
The first guide plate of X-direction 2-41, the second guide plate of X-direction 2-42, X-direction the first input adapter 2-51 and X-direction second input
Joint 2-52；
The X-direction support transverse slat 2-1 middle lower surfaces are provided with groove, X-direction the first guide plate 2-41 and X-direction second
It is all circular arc that guide plate 2-42 shapes are identical, X-direction support transverse slat 2-1 two respectively with the first guide plate of X-direction 2-41
With the second guide plate of an X-direction 2-42 connection, similar semicircular in shape is formed；
The flexible leaf spring 2-31 of X-direction first is identical with the flexible leaf spring 2-32 shapes of X-direction second, is all strip；X-direction
First flexible leaf spring 2-31 one end connection the first guide plate of X-direction 2-41 inner arc center, the other end and X-direction beat axle the
One fagging 2-21 connections, the flexible leaf spring 2-32 of X-direction second one end connect with the second guide plate of X-direction 2-42 inner arc center
Connect, the other end is connected with X-direction beat the second fagging of axle 2-22；Above-mentioned two faggings downward vertically, and two faggings and two
Shape is mutually symmetrical after root leaf spring connects respectively；
X-direction the first input adapter 2-51 and X-direction the second input adapter 2-52, is oriented to X-direction first respectively
Plate 2-41 connects with the second guide plate of X-direction 2-42 end, is mutually symmetrical.
As shown in figure 4, the second flexible deflection mechanism 3 includes：Y-direction support transverse slat 3-1, the support of Y-direction beat axle
The flexible leaf spring 3-31 of plate 3-2, Y-direction first, the flexible leaf spring 3-32 of Y-direction second, the first guide plate of Y-direction 3-41, Y-direction
Two guide plate 3-42, Y-direction the first input adapter 3-51 and the second input adapter of Y-direction 3-52；
Upper surface is provided with groove, Y-direction the first guide plate 3-41 and Y-direction second in the middle part of the Y-direction support transverse slat 3-1
Identical guide plate 3-42 shapes are all circular arc, and Y-direction support transverse slat 3-1 two is respectively at the first guide plate of Y-direction 3-41
With the second guide plate of a Y-direction 3-42 connection, similar semicircular in shape is formed.
The flexible leaf spring 3-31 of Y-direction first and the flexible leaf spring 3-32 shapes of Y-direction second are all identical strip, and one end is divided
Inner arc center not with Y-direction the first guide plate 3-41 and the second guide plate of Y-direction 3-42 is connected, the other end respectively with Y-direction
Beat axle supporting plate 3-2 top left and right ends are connected.
Top plan view is cross after the first flexible deflection mechanism 2 combines with the second flexible deflection mechanism 3, the X
Direction support transverse slat 2-1 groove and Y-direction support transverse slat 3-1 groove shapes are agreed with, and are pasted by High-strength glue
Together, X-direction beat the first fagging of axle (2-21) of the described first flexible deflection mechanism 2 and X-direction beat the second fagging of axle
Space between (2-22) is used to insert and be glued the Y-direction beat axle supporting plate 3-2 of the second flexible deflection mechanism 3.
As shown in figure 5, the sensing drive component 4 includes：One center fixed block 4-1, four thick sticks being uniformly distributed along the circumference
Bar amplifying type driving head 4-21,4-22,4-23,4-24, four telescopic driver 4-31,4-32,4-33,4- being uniformly distributed along the circumference
34th, four pretension block 4-4 being uniformly distributed along the circumference, the four pairs of capacitance sensors probe 4-51,4-52,4-53,4- being uniformly distributed along the circumference
54th, four pre-loading screw 4-6 being uniformly distributed along the circumference and other screwed holes.
Center fixed block 4-1 and lever amplification formula the driving head 4-21,4-22,4-23,4-24 are monolithic construction,
It is process by wire cutting technology integration.Center fixed block 4-1 center is provided with a through hole, a bolt there through
Second flexible deflection mechanism 3, center fixed block 4-1, base 5 are fixedly connected；Four uniform be for fixed screwed hole,
For center fixed block 4-1 and the base 5 of being connected.
Four lever amplifications formula driving head 4-21,4-22,4-23,4-24 has a central axis in paper
Screwed hole, for being fixedly connected with base 5；Four lever amplification formula driving head 4-21,4-22,4-23,4-24, output end have
Two symmetrical central shafts parallel to paper screwed hole, it is soft for being fixedly connected with the first flexible deflection mechanism 2 and second
The input adapter of property deflection mechanism 3；Each lever amplification formula driving head 4-21,4-22,4-23,4-24 is respectively used to will be flexible
Driver 4-31,4-32,4-33, the 4-34 amount of elongating or shortening are amplified output, so as to promote the first flexible deflecting machine
2 and second flexible deflection mechanism 3 of structure moves.
It can extend or shorten after four telescopic drivers 4-31,4-32,4-33,4-34 power-up, be respectively used to
Each lever amplification formula driving head is promoted to move.
Four pretension block 4-4 and four pre-loading screw 4-6 work in coordination, for telescopic driver 4-31,4-32,
4-33,4-34 are fixed and pretension, telescopic driver 4-31,4-32,4-33,4-34 is had certain pretightning force.This is pre-
The size of clamp force can be ensured by calculating and adjusting central axis in the position of the screwed hole of paper.
Described four pairs of capacitance sensors probe 4-51,4-52,4-53,4-54 are respectively adhered on lever amplification formula driving head 4-
Between 21,4-22,4-23,4-24 and center fixed block 4-1, for detecting the displacement variable of the position.Every a pair of electric capacity passes
Sensor is popped one's head in for the displacement variable for detecting an opening position.
The screwed hole that is provided with the beat axle supporting plate 3-2 of second flexible deflection mechanism 3 is used to be fixedly connected with base.
Bolt passes through center fixed block 4-1 central through hole, by the second flexible deflection mechanism 3, center fixed block 4-1 and bottom
Seat 5 is fixed together.
The upper surface of the top transverse slat of first flexible deflection mechanism 2 is fixed by High-strength glue and mirror support structure 1
Link together.
As shown in fig. 6, described driving control system includes：Four road D/A change-over circuits, four road power amplifier drive circuits, four
Road electric capacity modulate circuit, four road A/D change-over circuits, DSP digitial controllers composition.Four road D/A change-over circuits are used to export DSP
Four railway digital control signals be converted to four road analog control signals；The function of four road power amplifier drive circuits is that control signal is entered
Row power amplification, and drive four road telescopic drivers to elongate or shorten it；The first and third tunnel output of four road power amplifier drive circuits
Telescopic driver 4-31,4-33 with sensing drive component are connected respectively；Second, the four tunnels output point of four road power amplifier drive circuits
Telescopic driver 4-32,4-34 not with sensing drive component are connected；Sense capacitance sensor probe 4-51,4- of drive component
53 are connected with the first and third tunnel input of four road electric capacity modulate circuits respectively；The capacitance sensor probe 4-52 of sensing drive component,
4-54 is connected with second, the four tunnels input of four road electric capacity modulate circuits respectively；
During present invention work, capacitance sensor probe 4-51,4-52,4-53,4-54 of speculum body interior are detected
The change of displacement, output this to four road capacitance signal modulate circuits.Capacitance signal modulate circuit is mainly used in receiving and come from
The small-signal of capacitance sensor probe is simultaneously filtered and amplified to it, there is provided gives A/D change-over circuits.Pass through four road A/D again
Change-over circuit is converted into four railway digital signals, inputs to DSP digitial controllers and participates in control algolithm.DSP digitial controllers
Function be, by target deflection angle [θrx,θry] and the progress error contrast of capacitance sensor output quantity, and realize that pid algorithm exports
Control signal.Phase inverter is used to control signal being changed into signal in opposite direction equal in magnitude, for driving telescopic driver 4-
33 make its generation and telescopic driver 4-31 motions in opposite direction equal in magnitude, while for driving telescopic driver 4-34 to make
It is produced and telescopic driver 4-32 motions in opposite direction equal in magnitude.
The realization of beat action of the present invention is as shown in Fig. 7,8,9, it is possible to achieve along X-direction and two along Y direction
The beat of dimension.Wherein, telescopic driver 4-31 and 4-33 is one group, for driving the motion of Y-direction, and then realizes speculum
Along the beat of X-axis；Telescopic driver 4-32 and 4-34 are one group, for driving the motion of X-direction, and then realize speculum along Y
The beat of axle.In addition, the size of this four telescopic drivers is identical with performance, extends, applying when applying positive voltage
Shorten during negative voltage.
The deflection angle of the X and Y both directions of the present invention employs the indirect method of measurement and determined, it is necessary to be demarcated to it.It is first
First, the true deflection angle of X-direction and Y-direction is gone out based on outside High-precision angle measuring instrument (such as autocollimator) direct measurement.
Then, the displacement sum relation proportional to the true deflection angle of X-direction that capacitance sensor probe 4-51 and 4-53 is measured, than
Example coefficient is Kx, i.e. X is to calibration coefficient；The capacitance sensor displacement sums that measure of probe 4-52 and 4-54 and Y-direction it is true
The real proportional relation of deflection angle, proportionality coefficient Ky, i.e. Y-direction calibration coefficient.
The start method of the present invention is as follows：
Beat of the speculum along X-axis acts implementation process：The first via of four road power amplifier drive circuits and the 3rd tunnel difference
The opposite drive signal of output size equal direction, just (negative) voltage, which are applied on driver 4-31, makes it extend (shortening) L1 length
Degree, negative (just) voltage, which is applied on driver 4-33, makes it shorten (elongation) L1 length, then passes through lever amplification formula driving head 4-
21 and 4-23, which amplifies and drives the second flexible deflection mechanism to make the difference movable pendulum, to be moved, that is, realizes the beat around X-axis.
At the same time, beat action implementation process of the speculum along Y-axis is：Second tunnel of four road power amplifier drive circuits and
The opposite drive signal of four tunnels difference output size equal direction, just (negative) voltage, which is being applied on driver 4-32, makes its elongation
(shortening) L2 length, negative (just) voltage, which is applied on driver 4-34, makes it shorten (elongation) L2 length, then passes through lever amplification
Formula driving head 4-22 and 4-24, which amplify and drive the first flexible deflection mechanism to make the difference movable pendulum, to be moved, that is, realizes the beat around Y-axis.
The present invention is in motion, although the leaf spring of the first and second flexible deflection mechanisms does beat and reversed dynamic simultaneously
Make, but the rotating shafts of two actions are mutually perpendicular to, therefore do not influence Y-direction displacement when X-axis rotates, the also not shadow when Y-axis rotates
X is rung to displacement, namely the beat action of both direction is decoupling., can be by adjusting telescopic driver from the point of view of motion process
Elongation adjust the deflection angle of speculum, the invention has bidimensional light beam beat control ability, can be where minute surface
The beat of Planar realization two-dimensional direction acts and without coupling, and without translation on the axial direction perpendicular to minute surface.
One of ordinary skill in the art will be appreciated that embodiment described here is to aid in reader and understands this hair
Bright implementation, it should be understood that protection scope of the present invention is not limited to such especially statement and embodiment.Ability
The those of ordinary skill in domain can be made according to these technical inspirations disclosed by the invention it is various do not depart from essence of the invention its
Its various specific deformations and combination, these deformations and combination are still within the scope of the present invention.
Claims (10)
- A kind of 1. quick beat speculum of two dimension, it is characterised in that including：Mirror support structure (1), the first flexible deflection mechanism (2), the second flexible deflection mechanism (3), sensing drive component (4), base (5) and driving control system (6)；Described first is flexible Deflection mechanism (2) is used to install mirror support structure after combining with the second flexible deflection mechanism (3), sensing drive component (4) with Driving control system (6) is connected to control the first flexible deflection mechanism (2) to move with the second flexible deflection mechanism (3) execution beat Make, base (5) is used for fixed sensing drive component (4) and the second flexible deflection mechanism (3).
- A kind of 2. quick beat speculum of two dimension according to claim 1, it is characterised in that：The first flexible deflecting machine Structure (2) includes：X-direction support transverse slat (2-1), X-direction beat the first fagging of axle (2-21), X-direction beat the second fagging of axle (2- 22), the first flexible leaf spring of X-direction (2-31), the second flexible leaf spring of X-direction (2-32), the guide plate of X-direction first (2-41), X side To the second guide plate (2-42), the input adapter of X-direction first (2-51) and the input adapter of X-direction second (2-52)；Described X-direction support transverse slat (2-1) middle lower surface is provided with groove, the guide plate of X-direction first (2-41) and X-direction second It is all circular arc that guide plate (2-42) shape is identical, two of X-direction support transverse slat (2-1) respectively with the guide plate of X-direction first One connection of (2-41) and the guide plate of X-direction second (2-42), forms similar semicircular in shape；The first flexible leaf spring of X-direction (2-31) is identical with X-direction the second flexible leaf spring (2-32) shape, is all strip；X-direction The inner arc center of one end connection guide plate of X-direction first (2-41) of first flexible leaf spring (2-31), the other end and X-direction beat The fagging of axle first (2-21) connects, and one end of the second flexible leaf spring of X-direction (2-32) is interior with the guide plate of X-direction second (2-42) Arc center connects, and the other end is connected with X-direction beat the second fagging of axle (2-22)；Above-mentioned two faggings downward vertically, and two Shape is mutually symmetrical after root fagging and two leaf springs connect respectively；The input adapter of X-direction first (2-51) and the input adapter of X-direction second (2-52), are oriented to X-direction first respectively Plate (2-41) connects with the end of the guide plate of X-direction second (2-42), is mutually symmetrical.
- A kind of 3. quick beat speculum of two dimension according to claim 2, it is characterised in that：The second flexible deflecting machine Structure (3) includes：Y-direction support transverse slat (3-1), Y-direction beat axle supporting plate (3-2), the first flexible leaf spring of Y-direction (3-31), Y The second flexible leaf spring of direction (3-32), the guide plate of Y-direction first (3-41), the guide plate of Y-direction second (3-42), Y-direction first Input adapter (3-51) and the input adapter of Y-direction second (3-52)；Upper surface is provided with groove, the guide plate of Y-direction first (3-41) and Y-direction second in the middle part of the Y-direction support transverse slat (3-1) It is all circular arc that guide plate (3-42) shape is identical, two of Y-direction support transverse slat (3-1) respectively with the guide plate of Y-direction first One connection of (3-41) and the guide plate of Y-direction second (3-42), forms similar semicircular in shape；The first flexible leaf spring of Y-direction (3-31) identical with Y-direction the second flexible leaf spring (3-32) shape is all strip, and one end is divided Inner arc center not with the guide plate of Y-direction first (3-41) and the guide plate of Y-direction second (3-42) is connected, the other end respectively with Y The top left and right ends of direction beat axle supporting plate (3-2) are connected；Top plan view is cross after the first flexible deflection mechanism (2) is combined with the second flexible deflection mechanism (3), the X The groove shapes of the groove of direction support transverse slat (2-1) and Y-direction support transverse slat (3-1) are agreed with, and pass through High-strength glue It is pasted together, X-direction beat the first fagging of axle (2-21) and X-direction beat axle of the first flexible deflection mechanism (2) Space between two faggings (2-22) is used to insert and be glued the Y-direction beat axle supporting plate (3- of the second flexible deflection mechanism (3) 2)。
- A kind of 4. quick beat speculum of two dimension according to claim 3, it is characterised in that：The sensing drive component (4) include：One center fixed block (4-1), four lever amplification formula driving heads being uniformly distributed along the circumference (4-21,4-22,4-23, 4-24), four telescopic drivers (4-31,4-32,4-33,4-34) being uniformly distributed along the circumference, four pretension blocks being uniformly distributed along the circumference (4-4), four to be uniformly distributed along the circumference couple capacitance sensor probe (4-51,4-52,4-53,4-54), four to be uniformly distributed along the circumference are pre- Tight screw (4-6) and other screwed holes；The center fixed block (4-1) and lever amplification formula driving head (4-21,4-22,4-23,4-24) are monolithic construction, It is process by wire cutting technology integration；The center of center fixed block (4-1) is provided with a through hole, thus a bolt is worn Cross and be fixedly connected with the second flexible deflection mechanism (3), center fixed block (4-1), base (5)；It is to be used to fix that four uniform Screwed hole, for center fixed block (4-1) and the base (5) of being connected；Four lever amplification formulas driving head (4-21,4-22,4-23,4-24) has a central axis in the spiral shell of paper Pit, for being fixedly connected with base (5)；The output end of four lever amplification formula driving heads (4-21,4-22,4-23,4-24) is all There is screwed hole of two symmetrical central shafts parallel to paper, for being fixedly connected with the first flexible deflection mechanism (2) and The input adapter of two flexible deflection mechanisms (3)；Each lever amplification formula driving head (4-21,4-22,4-23,4-24) is used to divide The amount of elongating or shortening of telescopic driver (4-31,4-32,4-33,4-34) output is not amplified, so as to promote first Flexible deflection mechanism (2) and the second flexible deflection mechanism (3) motion；It can extend or shorten after four telescopic drivers (4-31,4-32,4-33,4-34) power-up, it is every for promoting Individual lever amplification formula driving head (4-21,4-22,4-23,4-24) motion；Four pretension blocks (4-4) and four pre-loading screws (4-6) are worked in coordination, for telescopic driver (4-31,4- 32,4-33,4-34) it is fixed and pretension, make telescopic driver (4-31,4-32,4-33,4-34) that there is certain pretension Power, the size of the pretightning force can be ensured by calculating and adjusting central axis in the position of the screwed hole of paper；Four pairs of capacitance sensors probe (4-51,4-52,4-53,4-54) is respectively adhered on lever amplification formula driving head (4- 21,4-22,4-23,4-24) between center fixed block (4-1), for detecting the displacement variable of the position；Every a pair of electric capacity Sensor probe is used for the displacement variable for detecting an opening position.
- A kind of 5. quick beat speculum of two dimension according to claim 4, it is characterised in that：Second flexible deflection mechanism (3) screwed hole that is provided with beat axle supporting plate (3-2) is used to be fixedly connected with base (5)；Bolt pass through center fixed block (4-1) central through hole, by the second flexible deflection mechanism (3), center fixed block (4-1) and Base (5) is fixed together；The upper surface of the top transverse slat of first flexible deflection mechanism (2) is fixed by High-strength glue and mirror support structure 1 to be connected It is connected together.
- A kind of 6. quick beat speculum of two dimension according to claim 5, it is characterised in that：Described driving control system (6) include：Four road D/A change-over circuits, four road power amplifier drive circuits, four road electric capacity modulate circuits, four road A/D change-over circuits and DSP digitial controllers；Four road D/A change-over circuits are used to four railway digital control signals of DSP outputs being converted to the simulation control of four tunnels Signal processed；The function of four road power amplifier drive circuits is that power amplification is carried out to control signal, and drives four road telescopic drivers to make It is elongated or shortened；First and third tunnel of four road power amplifier drive circuits exports the telescopic driver (4- with sensing drive component respectively 31st, 4-33) it is connected；Second, four tunnels of four road power amplifier drive circuits export the telescopic driver (4- with sensing drive component respectively 32nd, 4-34) it is connected；Sense drive component capacitance sensor probe (4-51,4-53) respectively with four road electric capacity modulate circuits The input of first and third tunnel is connected；The capacitance sensor probe (4-52,4-54) for sensing drive component is electric with four road electric capacity conditionings respectively Second, the four tunnels input on road is connected.
- A kind of 7. drive control method of the quick beat speculum of two dimension according to claim 6, it is characterised in that：Reflection The capacitance sensor probe (4-51,4-52,4-53,4-54) of mirror body interior detects the change of displacement, outputs this to Four road electric capacity modulate circuits；Electric capacity modulate circuit is mainly used in receiving to come self capacitance sensor probe (4-51,4-52,4-53,4- 54) small-signal is simultaneously filtered and amplified to it, there is provided to four road A/D change-over circuits；Pass through four road A/D change-over circuits again Four railway digital signals are converted into, inputs to DSP digitial controllers and participates in control algolithm；The function of DSP digitial controllers is, By target deflection angle [θrx,θry] with the actual deflection angle that measures error contrast is carried out, and realize pid algorithm output control signal； Phase inverter is used to control signal being changed into signal in opposite direction equal in magnitude, then by four road D/A change-over circuits and four road work( Drive circuit output is put, for driving telescopic driver (4-33) it is produced and telescopic driver (4-31) direction equal in magnitude Opposite motion, while for driving telescopic driver (4-34) it is produced and telescopic driver (4-32) direction equal in magnitude Opposite motion.
- A kind of 8. beat method of the quick beat speculum of two dimension according to claim 6, it is characterised in that：Including as follows Content：Realize the beat of two dimensions along X-direction and along Y direction；Wherein, telescopic driver (4-31) and telescopic drive Device (4-33) is one group, for driving the motion of Y-direction, and then realizes beat of the speculum along X-axis；Telescopic driver (4-32) It is one group with telescopic driver (4-34), for driving the motion of X-direction, and then realizes beat of the speculum along Y-axis, four are stretched The size of contracting driver is identical with performance, is extended when applying positive voltage, shortens when applying negative voltage.
- 9. beat method according to claim 8, it is characterised in that：The deflection angle of X and Y both directions employs indirect survey Amount method is determined, it is necessary to be demarcated to it；First, X-direction and Y side are gone out based on outside High-precision angle measuring instrument direct measurement To true deflection angle；Then, capacitance sensor probe (4-51) and (4-53) the displacement sum that measures and X-direction is true The proportional relation of deflection angle, proportionality coefficient Kx, i.e. X are to calibration coefficient；Capacitance sensor probe (4-52) and (4-54) measures Displacement sum relation proportional to the true deflection angle of Y-direction, proportionality coefficient Ky, i.e. Y-direction calibration coefficient.
- 10. the start method of the quick beat speculum of a kind of two dimension according to claim 6, it is characterised in that including as follows Content：Beat of the speculum along X-axis acts implementation process：The first via of four road power amplifier drive circuits and the 3rd tunnel export respectively Drive signal in opposite direction equal in magnitude, positive or negative voltage, which is applied on driver (4-31), makes it elongate or shorten L1 length Degree, negative or positive voltage, which is applied on driver (4-33), to be shortened it or extends L1 length, then passes through lever amplification formula driving head (4-21) and (4-23), which amplifies and drive the second flexible deflection mechanism (3) to make the difference movable pendulum, to be moved, that is, realizes the beat around X-axis；At the same time, beat action implementation process of the speculum along Y-axis is：The second road and the 4th tunnel of four road power amplifier drive circuits The opposite drive signal of output size equal direction respectively, positive or negative voltage, which is applied on driver (4-32), makes it extend or contract Short L2 length, negative or positive voltage, which is applied on driver (4-34), to be shortened it or extends L2 length, then passes through lever amplification formula Driving head (4-22) and (4-24), which amplify and drive the first flexible deflection mechanism (2) to make the difference movable pendulum, to be moved, that is, is realized around the inclined of Y-axis Pendulum.
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| CN114526419A (en) * | 2022-01-12 | 2022-05-24 | 山东大学 | Single-degree-of-freedom deflection platform |
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| CN108088373A (en) * | 2017-12-25 | 2018-05-29 | 北京航空航天大学 | Photoelectric nacelle is surely as flyback integrated control unit and measuring method |
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| JP2021531485A (en) * | 2019-06-01 | 2021-11-18 | エーエーシー オプティックス ソリューションズ ピーティーイー リミテッド | Lens prism module |
| JP7060698B2 (en) | 2019-06-01 | 2022-04-26 | エーエーシー オプティックス ソリューションズ ピーティーイー リミテッド | Lens prism module |
| CN112666859A (en) * | 2020-12-14 | 2021-04-16 | 武汉华中天纬测控有限公司 | High-precision two-dimensional quick reflector device |
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| CN114526419A (en) * | 2022-01-12 | 2022-05-24 | 山东大学 | Single-degree-of-freedom deflection platform |
| CN114526419B (en) * | 2022-01-12 | 2022-11-25 | 山东大学 | Single-degree-of-freedom deflection platform |
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