CN111238337A - Step gauge calibration method and system capable of eliminating Abbe errors based on laser interference - Google Patents
Step gauge calibration method and system capable of eliminating Abbe errors based on laser interference Download PDFInfo
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- CN111238337A CN111238337A CN202010072403.2A CN202010072403A CN111238337A CN 111238337 A CN111238337 A CN 111238337A CN 202010072403 A CN202010072403 A CN 202010072403A CN 111238337 A CN111238337 A CN 111238337A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
Abstract
The invention mainly relates to the technical field of length measurement, and provides a step gauge calibration system capable of eliminating Abbe errors based on laser interference, which comprises: the method comprises the steps of forming 3 laser interference light paths of any triangular prism shape in space and a fourth laser interference light path which is arranged in the space and is parallel to the 3 laser interference light paths and used for wavelength compensation, reflecting a part of laser beams emitted by a laser to an interference mirror through a beam splitter to serve as a reference signal, projecting a part of laser beams to a reflector to be reflected and then placing the part of laser beams in the interference mirror to form a measurement signal, obtaining a displacement value of a measured step gauge, which eliminates Abbe errors, through the measurement signal and the reference signal and according to the measurement model when the measured step gauge is displaced, synthesizing the 3 laser light paths to the measurement model on a measured step gauge measurement line, and conveniently realizing the step gauge measurement precision of the laser interference method based on the Abbe principle no matter whether the step gauge is arranged at any position of a coordinate measuring machine measurement platform.
Description
Technical Field
The invention relates to the technical field of length measurement, in particular to a step gauge calibration method and system capable of eliminating Abbe errors based on laser interference.
Background
The step gauge is used as a universal length real object measuring instrument, and has the characteristics of high precision, good consistency and the like, so that the international bureau of measurement (BIPM) lists the step gauge in a key comparison project of international length measurement, and the step gauge becomes an important mark for measuring the capability of a national geometric calibration laboratory. The method is widely applied to precision calibration and magnitude transmission of high-precision instruments such as coordinate measuring machines, numerical control machines, light measuring instruments and the like.
Therefore, on the basis of a coordinate measuring machine, the national measurement institute (NMIJ for short) establishes a 4-path laser interference length measuring system to realize large displacement measurement, and acquires the micro displacement by acquiring the measuring head bias voltage of the coordinate measuring machine, thereby obtaining each dimension value of the measured step gauge. The measurement uncertainty that can be achieved by this device is (0.06+0.22L) μm. Finland national measurement institute (MIKES for short) adopts four light path laser interferometers based on the Abbe principle to realize high-precision displacement measurement, wherein one path of laser monitors and senses the displacement of a measuring head and is used for aiming, and other three paths of laser realize the displacement precision measurement after air refractive index compensation. The measurement uncertainty that can be achieved by this device is (0.064+0.088L) μm. On the basis of a coordinate measuring machine, the national measurement institute designs a seat measuring head based on an inductive displacement sensor, and realizes the measurement repeatability as low as 7 nm.
However, the three measurement systems are established on the basis of the three-dimensional coordinate measurement principle, and abbe errors are inevitably introduced. Therefore, on the basis of a nanometer comparator, the German national measurement institute aims at a measuring point on the end face of the step gauge by adding a Z-direction displacement table and a contact type measuring head, so that the nanometer-level measurement precision is realized. The measurement repeatability that the device can realize is superior to 7 nm. The system adopts a displacement measurement method based on the vacuum interference principle, has high precision, but has a more complex system structure and is difficult to realize.
Disclosure of Invention
Based on the technical problems in the prior art, the invention provides a step gauge calibration method and system capable of eliminating Abbe errors based on laser interference.
In a first aspect, the invention provides a step gauge calibration system capable of eliminating abbe errors based on laser interference, which specifically comprises a laser, an interference measurement unit, a measured step gauge and a data processing unit;
the interference measurement unit comprises a first laser interference light path, a second laser interference light path, a third laser interference light path and a fourth laser interference light path, wherein any triangular prism shape can be formed in space, a spectroscope, an interference mirror and a reflector are sequentially arranged on each laser interference light path along the optical axis direction, the spectroscope, the interference mirror and the reflector are fixedly arranged on a marble platform at the tail part of the coordinate measuring machine, the fourth laser interference light path is respectively parallel to the first laser interference light path, the second laser interference light path and the third laser interference light path, and the fourth laser interference light path comprises a wavelength compensation device arranged between the fourth interference mirror and a fourth etalon reflector and is used for compensating the wavelength of the first laser interference light path, the second laser interference light path and the third laser interference light path;
the step gauge to be measured is arranged in a prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, the step gauge to be measured is installed on a moving platform on the marble platform, and an autocollimator is arranged in the prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path and is used for measuring the pitch angle and the yaw angle of the moving platform;
the laser is used for transmitting laser beams, and some reflects to the interference mirror as reference beam behind the spectroscope, forms reference signal in the interference mirror, and some is thrown the speculum and is regarded as measuring beam, reference beam with measuring beam forms measuring signal along same axis income formation in the interference mirror, works as when surveyed pedometer takes place the displacement, data processing unit is used for passing through received measuring signal and reference signal and passes through the measurement model and can calculate by the displacement value of surveying the pedometer that has eliminated the abbe error, the measurement model is
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the o point is an initial coordinate point of the step gauge to be measured。
Preferably, the system further includes an environmental parameter compensation unit disposed in a prismatic space formed by the first laser interference light path, the second laser interference light path, and the third laser interference light path, and the environmental parameter compensation unit includes an air measurement sensor for monitoring air temperature, air humidity, and air pressure in the first, second, and third laser interference light paths.
Preferably, two ends of the step gauge to be measured are respectively provided with a material temperature sensor for measuring the temperature of the step gauge to be measured.
In a second aspect, the present invention further provides a calibration method for a step gauge capable of eliminating abbe errors based on laser interference, where the method includes:
arranging a first laser interference light path, a second laser interference light path and a third laser interference light path on a marble platform at the tail part of a coordinate measuring machine in an arbitrary triangular prism shape, and arranging a measured step gauge in an arbitrary space of the triangular prism shape formed by the first laser interference light path, the second laser interference light path and the third laser interference light path;
when the step gauge to be measured is located at the initial measurement position, resetting indicating values of interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the step gauge to be measured;
moving the step gauge to a target measuring position through a moving platform arranged on the marble platform, measuring a moving coordinate value of the step gauge in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, and calculating a displacement value of the step gauge with Abbe errors eliminated through a measuring model according to the moving coordinate value
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the point o is the initial coordinate point of the step gauge to be measured.
Preferably, when the step gauge to be measured is located at the initial measurement position, the indicating values of the interference mirrors in the first laser interference light path, the second laser interference light path, and the third laser interference light path and the step gauge to be measured are cleared, and then the method further includes:
and starting an environment parameter compensation unit, wherein the environment parameter compensation comprises air temperature, air pressure and air humidity parameters.
Preferably, the moving platform arranged on the marble platform moves the measured step gauge to a target measurement position, and measures a moving coordinate value of the measured step gauge in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path, and the third laser interference light path, and then the method further includes:
and correcting the movement coordinate value of the step gauge to be measured in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path through an environmental parameter compensation unit to obtain a corrected movement coordinate value.
Has the advantages that: the invention mainly provides a step gauge calibration system capable of eliminating Abbe errors based on laser interference, which comprises 3 laser interference light paths capable of forming any triangular prism shape in space, and a fourth laser interference light path which is arranged in the space and is parallel to the 3 laser interference light paths and used for wavelength compensation, wherein a part of laser beams emitted by the laser is reflected to the interference mirror through the beam splitter as a reference signal, a part of laser beams is projected to the reflector to be reflected and then enter the interference mirror to form a measurement signal, and when the step gauge to be measured is displaced, the displacement value of the step gauge to be measured, which eliminates Abbe error, is obtained by measuring signals and reference signals and calculating according to a measurement model, and 3 laser optical paths are synthesized to the measurement model on the measurement line of the step gauge to be measured, so that the measurement precision of the step gauge based on the Abbe principle can be conveniently realized no matter the step gauge is arranged at any position of a measurement platform of a coordinate measuring machine.
These and other aspects of the invention are apparent from and will be elucidated with reference to the embodiments described hereinafter.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a block diagram of a step gauge calibration system capable of eliminating abbe errors based on laser interference according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a step gauge calibration system capable of eliminating abbe errors based on laser interference according to an embodiment of the present invention;
fig. 3 is a schematic view of a measurement model in a step gauge calibration system capable of eliminating abbe errors based on laser interference according to an embodiment of the present invention;
fig. 4 is a schematic flowchart of a step gauge calibration method for eliminating abbe errors based on laser interference according to an embodiment of the present invention;
laser, laser head; pc is a data processing unit; air sensor: an air measurement sensor; bs: a beam splitter; temp sensor is material temperature sensor; step gauge is a step gauge to be measured; retro mirror; wavelength compensation etalon; autocollimator.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Embodiments of the present application will be described below with reference to the accompanying drawings, but the present invention is not limited thereto.
As shown in fig. 1 and fig. 2, a schematic structural diagram of a step gauge calibration system capable of eliminating abbe errors based on laser interference according to an embodiment of the present invention is provided, where the system specifically includes a laser, an interferometric measuring unit, and a data processing unit;
the interference measurement unit comprises a first laser interference light path, a second laser interference light path, a third laser interference light path and a fourth laser interference light path, wherein any triangular prism shape can be formed in space, each laser interference light path is sequentially provided with a 50% spectroscope, an interference mirror and a reflector along the direction of an optical axis, the spectroscope, the interference mirror and the reflector are fixedly arranged on a marble platform at the tail part of the coordinate measuring machine, the measured step gauge is arranged in a prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path and is arranged on a motion platform on the marble platform, the fourth laser interference light path is respectively parallel to the first laser interference light path, the second laser interference light path and the third laser interference light path, and the fourth laser interference light path comprises wavelength compensation etalon arranged between the fourth interference mirror and the fourth reflector, the wavelength compensation module is used for compensating the wavelengths of the first laser interference light path, the second laser interference light path and the third laser interference light path; an autocollimator is arranged in a prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path and is used for measuring the pitch angle and the yaw angle of the moving platform;
the laser is used for emitting laser beams, one part of the laser beams are reflected to the interference mirror through the beam splitter to serve as reference beams, reference signals are formed in the interference mirror, one part of the laser beams are projected to the reflector to serve as measuring beams, the reference beams and the measuring beams enter the interference mirror along the same axis to form measuring signals, when the measured step gauge is displaced, the data processing unit is used for calculating the displacement of the measured step gauge, wherein the Abbe errors of the measured step gauge are eliminated through the received measuring signals and the reference signals through a measuring modelA value, the measurement model is
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the point o is the initial coordinate point of the step gauge to be measured.
It should be noted that the calibration system of the step gauge capable of eliminating the abbe error based on the laser interference provided by the invention is based on the structure of the coordinate measuring machine, and the measured step gauge is fixedly arranged on the marble platform of the coordinate measuring machine and moves along with the marble platform. The marble platform is erected at the tail of the coordinate measuring machine, a laser is installed on the marble platform and used for emitting laser beams, 4 spectroscopes are installed behind a light outlet of the laser to form a first laser interference light path, a second laser interference light path, a third laser interference light path and a fourth laser interference light path, each laser interference light path is sequentially provided with 50% spectroscopes, interference mirrors and reflectors along the optical axis direction, and the marble platform comprises a first spectroscope, a second spectroscope, a third spectroscope and a fourth spectroscope, the first interference mirror, the second interference mirror, the third interference mirror and the fourth interference mirror, the first reflector, the second reflector, the third reflector and the fourth reflector.
4 reflectors are arranged on the marble platform to precisely measure the movement displacement of the marble platform; the fourth laser interference light path comprises a wavelength compensation etalon arranged between the fourth interference mirror and the fourth reflector and is used for compensating the wavelengths of the first laser interference light path, the second laser interference light path and the third laser interference light path.
Considering that the motion of the motion platform of the coordinate measuring machine in any motion axis direction always has errors in six degrees of freedom, for a one-dimensional size standard such as a step gauge, when the measured step gauge is placed along a certain motion axis direction of the coordinate measuring machine, the influence of the straightness errors and the rolling errors of the axis on the length measurement is basically negligible. The errors mainly come from length measurement errors in the direction of the motion axis, and errors caused by a pitch angle and a yaw angle.
FIG. 3 is a schematic view of a measurement model in a step gauge calibration system for eliminating Abbe errors based on laser interference according to an embodiment of the present invention, wherein β i is
At an angle to the Z axis, [ theta ] i
Angle to the Z axis, mirror P1(x1,y1,z1) Reflecting mirror P2(x2,y2,z1) Reflecting mirror P3(x3,y3,z1) Initial zero point o (x) of step gauge0,y0,z1)。
When the measured step gauge moves a certain distance, the moved reflector P is known1P1The vector distance of L1u1Reflecting mirror P2P2The vector distance of L2u2Optical lens P3P3The vector distance of L3u3。
Specifically, when the measured step gauge moves from the point o to the point o ', the distance of oo' is calculated by the measurement model. And resetting the indicating values of the interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the measured step gauge, and enabling the initial zero point of the measured step gauge, namely the coordinate of the measurement origin o to be (0,0,0), so that the coordinate value (x, y, z) of the o' point needs to be solved.
A mathematical model can be established based on the closed-loop vector principle as follows:
In the formula (I), the compound is shown in the specification,
represents OPiThe die of (1).
rewriting the formula (1) to r-ei-liui＝-e′iThe two ends are multiplied by respective transpositions to obtain
The above formula is unfolded
Further development is carried out as follows:
order to
Then there is
Wherein:
thus, it is possible to provide
Namely, it is
Gi-2li(xcosβi+ysinβi-ei)sinθi-2lizcosθi＝0 (6)
G is to beiBringing into availability:
is unfolded to obtain
Namely, it is
This is a system of non-linear equations for x, y and z, and the problem of positive position solution is solved using newton's iteration:
let the above formula be fi(x, y, z) is 0, and if x, y, and z are differentiated, then:
f′ix＝2x-2(lisinθi+ei)cosβi(9)
f′iy＝2y-2(lisinθi+ei)sinβi(10)
f′iz＝2z-2licosθi(11)
let t be (xyz), t(k)Is the kth approximation of the solution t, at t(k)Will function fi(t) Taylor expansion
Written in vector form, i.e.:
note the book
The k step is to solve the linear equation set
f′(t(k))Δt(k)＝-f(t(k)) (15)
Solve for Δ t(k). The specific method comprises the following steps:
to a plane have
Solve for Δ t(k)Then let t(k+1)＝t(k)+Δt(k)。
The MATLAB (a high-level technical computing language and interactive environment for algorithm development, data visualization, data analysis, and numerical computation) based solution steps are as follows:
(1) iterative initialization value x0＝(x0y0z0)T；
(2) Calculating the initial value f of the function according to the initial value0(x,y,z)；
(3) Calculating an initial sea plug matrix f'0(x)；
(4) According to the formula f' (x)(k))Δx(k)＝-f(x(k)) Calculate Δ x(0)；
(5) According to the formula x(k+1)＝x(k)+Δx(k)Calculate x(1)；
(6) And judging whether the iteration ending condition is met, if not, returning to the step 2 to start to continue the iteration. Such as satisfying an iteration condition. Then t at this time can be obtained, i.e.: t ═ xyz. The distance of OO' to be solved is then:
according to the different positions to be measured by the step gauge to be measured, the required length between each measuring surface and the zero surface of the step gauge to be measured can be measured and calculated, and the purpose of calibrating the step gauge is achieved.
The step gauge measuring principle meets the Abbe principle and is a basic condition for reducing measuring errors, and in a step gauge calibration system based on laser interference and capable of eliminating the Abbe errors, the invention designs a measuring model for synthesizing 3 laser light paths onto a measured step gauge measuring line, so that the step gauge measuring accuracy based on the Abbe principle can be realized conveniently no matter where the step gauge is arranged on a coordinate measuring machine measuring platform.
Preferably, the system further includes an environmental parameter compensation unit disposed in a prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, and includes an air measurement sensor, when the step gauge to be measured is located at the initial measurement position, the interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the indication value of the step gauge to be measured are cleared, then the environmental parameter compensation unit is started, the changes of air temperature, air humidity and air pressure in the first, second and third laser interference light paths are monitored, and the moving coordinate value of the step gauge to be measured in any space of a triangular prism shape formed by the first laser interference light path, the second laser interference light path and the third laser interference light path is corrected by the environmental parameter compensation unit, and obtaining the corrected moving coordinate value.
Preferably, material temperature sensors are arranged at two ends of the step gauge to be measured, the temperature of the step gauge is measured, and the moving distance length measurement value of the step gauge to be measured is converted into a length value under the condition of 20 ℃ according to the thermal expansion coefficient of the step gauge.
The embodiment of the invention also provides a step gauge calibration method capable of eliminating Abbe errors based on laser interference, and as shown in figure 4, the method comprises the following steps:
S1arranging a first laser interference light path, a second laser interference light path and a third laser interference light path on a marble platform at the tail part of a coordinate measuring machine in an arbitrary triangular prism shape, and arranging a measured step gauge in an arbitrary space of the triangular prism shape formed by the first laser interference light path, the second laser interference light path and the third laser interference light path;
S2in aWhen the step gauge to be measured is positioned at the initial measurement position, resetting indicating values of interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the step gauge to be measured;
S3moving the step gauge to a target measuring position through a moving platform arranged on the marble platform, measuring a moving coordinate value of the step gauge in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, and calculating a displacement value of the step gauge to be measured, which eliminates Abbe errors, through a measuring model according to the moving coordinate value
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the point o is the initial coordinate point of the step gauge to be measured.
Preferably, when the step gauge to be measured is located at the initial measurement position, the indicating values of the interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the step gauge to be measured are cleared, and then the method further includes:
and starting an environment parameter compensation unit, wherein the environment parameter compensation comprises air temperature, air pressure and air humidity parameters.
Preferably, the step gauge to be measured is moved to a target measurement position by a movement platform arranged on the marble platform, and a movement coordinate value of the step gauge to be measured in any space of a triangular prism shape formed by the first laser interference light path, the second laser interference light path and the third laser interference light path is measured, and then the method further includes:
and correcting the movement coordinate value of the step gauge to be measured in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path through an environmental parameter compensation unit to obtain a corrected movement coordinate value.
The step gauge calibration method capable of eliminating the abbe error based on the laser interference in the embodiment of the present invention is a step gauge calibration system capable of eliminating the abbe error based on the laser interference in the embodiment, and since the detailed description has been given to each functional module and unit of the step gauge calibration system capable of eliminating the abbe error based on the laser interference in the embodiment, no further description is given in the embodiment of the step gauge calibration method capable of eliminating the abbe error based on the laser interference.
The foregoing detailed description of the embodiments of the present invention has been presented for the purpose of illustrating the principles and implementations of the present invention, and the description of the embodiments is only provided to assist understanding of the core concepts of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (6)
1. A step gauge calibration system capable of eliminating Abbe errors based on laser interference is characterized by comprising a laser, an interference measurement unit, a measured step gauge and a data processing unit;
the interference measurement unit comprises a first laser interference light path, a second laser interference light path, a third laser interference light path and a fourth laser interference light path, wherein any triangular prism shape can be formed in space, a spectroscope, an interference mirror and a reflector are sequentially arranged on each laser interference light path along the optical axis direction, the spectroscope, the interference mirror and the reflector are fixedly arranged on a marble platform at the tail part of the coordinate measuring machine, the fourth laser interference light path is respectively parallel to the first laser interference light path, the second laser interference light path and the third laser interference light path, and the fourth laser interference light path comprises a wavelength compensation device arranged between the fourth interference mirror and a fourth etalon reflector and is used for compensating the wavelength of the first laser interference light path, the second laser interference light path and the third laser interference light path;
the step gauge to be measured is arranged in a prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, the step gauge to be measured is installed on a moving platform on the marble platform, and an autocollimator is arranged in the prismatic space formed by the first laser interference light path, the second laser interference light path and the third laser interference light path and is used for measuring the pitch angle and the yaw angle of the moving platform;
the laser is used for transmitting laser beams, and some reflects to the interference mirror as reference beam behind the spectroscope, forms reference signal in the interference mirror, and some is thrown the speculum and is regarded as measuring beam, reference beam with measuring beam forms measuring signal along same axis income formation in the interference mirror, works as when surveyed pedometer takes place the displacement, data processing unit is used for passing through received measuring signal and reference signal and passes through the measurement model and can calculate by the displacement value of surveying the pedometer that has eliminated the abbe error, the measurement model is
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the point o is the initial coordinate point of the step gauge to be measured.
2. The system for calibrating a step gauge capable of eliminating abbe errors based on laser interference as claimed in claim 1, further comprising an environmental parameter compensation unit disposed in the prismatic space formed by the first, second and third laser interference optical paths, comprising an air measurement sensor for monitoring air temperature, air humidity and air pressure in the first, second and third laser interference optical paths.
3. The calibration system of the step gauge capable of eliminating the Abbe error based on the laser interference according to claim 1 or 2, wherein a material temperature sensor is respectively arranged at two ends of the step gauge to be measured, and is used for measuring the temperature of the step gauge to be measured.
4. A step gauge calibration method capable of eliminating Abbe errors based on laser interference is characterized by comprising the following steps:
arranging a first laser interference light path, a second laser interference light path and a third laser interference light path on a marble platform at the tail part of a coordinate measuring machine in an arbitrary triangular prism shape, and arranging a measured step gauge in an arbitrary space of the triangular prism shape formed by the first laser interference light path, the second laser interference light path and the third laser interference light path;
when the step gauge to be measured is located at the initial measurement position, resetting indicating values of interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the step gauge to be measured;
moving the step gauge to a target measuring position through a moving platform arranged on the marble platform, measuring a moving coordinate value of the step gauge in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path, and calculating a displacement value of the step gauge with Abbe errors eliminated through a measuring model according to the moving coordinate value
oo 'is the displacement value of the step gauge to be measured, x, y and z are coordinate values of an x axis, a y axis and a z axis when the step gauge to be measured moves to a target coordinate point o', and the point o is the initial coordinate point of the step gauge to be measured.
5. The calibration method of a step gauge capable of eliminating abbe errors based on laser interference according to claim 4, wherein when the step gauge to be measured is located at the initial measurement position, the indication values of the interference mirrors in the first laser interference light path, the second laser interference light path and the third laser interference light path and the step gauge to be measured are cleared, and thereafter the calibration method further comprises:
and starting an environment parameter compensation unit, wherein the environment parameter compensation comprises air temperature, air pressure and air humidity parameters.
6. The calibration method of a step gauge capable of eliminating abbe error based on laser interference according to claim 5, wherein the step gauge to be measured is moved to a target measurement position by a motion platform provided on the marble platform, and a moving coordinate value of the step gauge to be measured in any space of a triangular prism formed by the first laser interference optical path, the second laser interference optical path and the third laser interference optical path is measured, and thereafter further comprising:
and correcting the movement coordinate value of the step gauge to be measured in any space of a triangular prism formed by the first laser interference light path, the second laser interference light path and the third laser interference light path through an environmental parameter compensation unit to obtain a corrected movement coordinate value.
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| CN111964772A (en) * | 2020-08-21 | 2020-11-20 | 天津大学 | Underwater sound velocity measuring instrument based on acousto-optic effect |
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| CN111964772A (en) * | 2020-08-21 | 2020-11-20 | 天津大学 | Underwater sound velocity measuring instrument based on acousto-optic effect |
| CN114485899A (en) * | 2021-12-27 | 2022-05-13 | 航天东方红卫星有限公司 | Satellite micro-vibration displacement measurement system and method |
| CN115542300A (en) * | 2022-11-24 | 2022-12-30 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Pose measurement method and system |
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