CN107478861A - One kind plays light type photonic crystal waveguide accelerometer - Google Patents
One kind plays light type photonic crystal waveguide accelerometer Download PDFInfo
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- CN107478861A CN107478861A CN201710502565.3A CN201710502565A CN107478861A CN 107478861 A CN107478861 A CN 107478861A CN 201710502565 A CN201710502565 A CN 201710502565A CN 107478861 A CN107478861 A CN 107478861A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0877—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using integrated interconnect structures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses one kind to play light type photonic crystal waveguide accelerometer, and the accelerometer includes input waveguide, output waveguide, Mach-Zahnder interference structure and micro- suspension beam structure；Extraneous acceleration change is experienced using micro- suspension beam structure；Using the change of Refractive Index of Material under slower rays enhancing photonic crystal waveguide technology enhancing stress and electric field action, detection accuracy is improved；By realizing modulation /demodulation light path with sensing the single-chip integration of light path from Electrooptic crystal material and piezoelectric.The accelerometer integrated level of the present invention is high, detection accuracy is high, has relatively low modulation half-wave voltage and higher limiting snesibility.
Description
Technical field
The invention belongs to integrated optics and field of sensing technologies, specifically a kind of photonic crystal waveguide based on elasto-optical effect
Mach-Zahnder interference formula accelerometer.
Background technology
Accelerometer has extensively as a kind of important measuring instrument in contemporary scientific research, the manufacturing etc.
Application.In recent years, the research of accelerometer achieves rapid progress, has widely applied in every field, as vibrating sensing,
Guidance system, brake system control, oil seismic exploration and feedback signal as active suspension control system etc..It is so far
Only, people realize all kinds of accelerometers using transfer principle, as capacitor type, compression resistance type, Hall effect type, magnetic resistance type,
Thermal transfer type and the accelerometer based on various optical effects.Compared to electricity accelerometer, optical accelerometer has precision
High, many advantages, such as anti-electromagnetic interference capability is strong.Optical accelerometer mainly measures detection mass using optical sensing
Caused displacement when being influenceed by extraneous acceleration, its main operational principle are to send lightwave signal by transmission light path by light source
Vibration detection point is reached, the ginseng such as the intensity of light wave, amplitude, phase will be made when the test point is influenceed by extraneous acceleration
Amount changes, and by carrying out corresponding detection and processing to the optical signal after modulation, realizes the purpose for detecting extraneous acceleration.
The rapidly development of integrated optics technique so that MEMS（MEMS, Micro Electronic
Mechanical System）Structure and micro-optical device are integrated into possibility, so as to form a kind of more advanced skill
Art --- MOEMS（MOEMS, Micro-Optical Electronic Mechanical System）, it is a kind of
The microsystems technology that micro-optics technology is combined with MEMS technology.MOEMS is a kind of optimal current performance, precision highest, known
Know closeness highest micro-system.MEMS introducing optical fields are being got the attention nearly ten years, and due to low-light
Introducing embodies MOEMS advance, high-tech and multifunctionality, therefore MOEMS is a following development of MEMS
Direction.Nearly ten years, with the rapidly development of integrated optics, semiconductor laser, fiber waveguide, lenticule, low-light grid, micro- interfere
Fast development is arrived, these technologies promote the rapid development of MOEMS technologies simultaneously.Relative to mems accelerometer, MOEMS adds
Speedometer has two prominent advantages；High-precision optical sensing feature is expected to make the measurement accuracy of micro-acceleration gauge to obtain pole
Quantum jump；Optical sensing naturally possesses anti-electromagnetic interference capability, is suitable for strong electromagnetic, the working environment of deep-etching.
But there is the problem of following three aspect in existing micro-acceleration gauge：
（1）Fail to realize modulation /demodulation with sensing the integrated of light path；Modulation /demodulation is in high-precision optical sensing must
Indispensable part, modulation /demodulation can suppress the interference signal beyond modulating frequency so as to realize the extraction of small-signal, adjust
System demodulation can also expand the range of detection by closed loop feedback control, and existing micro-acceleration gauge fails to realize modulation /demodulation
With sensing the integrated of light path, it is connected more using optical fiber with another modulation /demodulation device, such mode adds device
Volume, the integrated level and reliability for reducing device；
（2）Need the detectivity for further improving accelerometer, the volume for reducing device badly；
（3）Need the environmental suitability for further improving accelerometer badly.
The content of the invention
For overcome the deficiencies in the prior art, the purpose of the present invention is to propose to one kind to play light type photonic crystal waveguide acceleration
Meter, the performance advantage of MOEMS accelerometers is played, realize the minimizing, be integrated of accelerometer, high accuracy and high bandwidth.
The technical solution adopted by the present invention is：
One kind plays light type photonic crystal waveguide accelerometer, including input waveguide, output waveguide, Mach-Zahnder interference structure and micro-
Suspension beam structure；Mach-Zahnder interference structure includes input y branch waveguide, output end y branch waveguide, reference arm photonic crystal ripple
Lead, signal arm photonic crystal waveguide, and metal modulator electrode, input waveguide connection input y branch waveguide, input Y-branch
Two branch ends of waveguide connect reference arm photonic crystal waveguide and signal arm photonic crystal waveguide, reference arm photonic crystal ripple respectively
Lead two branch ends that output end y branch waveguide is connected with signal arm photonic crystal waveguide, output end y branch waveguide connection output wave
Lead；The reference arm and signal arm of described input y branch waveguide are isometric, the reference arm and signal arm of output end y branch waveguide
Isometric, described reference arm photonic crystal waveguide and signal arm photonic crystal waveguide is isometric；Mach-Zahnder interference structure is located at niobium
Sour crystalline lithium layer, lithium columbate crystal layer are followed successively by downwards silica interlayer, silicon base；Reference arm photonic crystal waveguide and signal
Arm photonic crystal waveguide is parallel to each other, and the both sides at waveguide both ends are provided with metal modulator electrode；Signal arm photonic crystal waveguide
The both sides at middle part are etched with spill through hole, form micro- suspension beam structure.
Described micro- suspension beam structure includes micro- overarm and mass, is etched by the both sides in the middle part of signal arm photonic crystal waveguide
Spill through hole is formed, and micro- overarm is parallel with signal arm photonic crystal waveguide, and mass is located at the positive middle part of micro- overarm, and protrudes and hang down
Directly in signal arm photonic crystal waveguide.
Described reference arm photonic crystal waveguide and signal arm photonic crystal waveguide is slower rays enhancing photonic crystal waveguide.
Described input waveguide, output waveguide, input y branch waveguide, output end y branch waveguide are ridge waveguide, by niobium
Sour crystalline lithium layer surface etches to be formed.
The present invention is advantageous in that：
1）The present invention, as optical medium is passed, is realized modulation and the single-chip integration of sensing light path, realized from lithium niobate electro-optic crystal
The minimizing, be high-precision of system, highly reliable and wide range；
2）The present invention realizes bullet light using photon crystal structure and electrooptic effect strengthens and realizes polarization using slower rays enhancing technology
Control, device size is reduced, further improves detection limit；
3）Present invention reference arm and signal arm in light path design is isometric, two-way interference light isocandela, improves the contrast of signal,
And parasitic interaction can further be suppressed using white light source；
4）Reference arm and signal arm of the present invention it is isometric and it is integrated on the same base, distance is in mm magnitudes, because temperature change causes
Two-arm phase difference change to have obtained great suppression.
Brief description of the drawings
Fig. 1 is a kind of overall structure diagram for playing light type photonic crystal waveguide accelerometer；
Fig. 2 is Fig. 1 top view；
Fig. 3 is micro- suspension beam structure schematic diagram；
Fig. 4 is accelerometer longitudinal cross-section material schematic diagram；
In figure：Silicon base 1, silica interlayer 2, lithium columbate crystal layer 3, input waveguide 4, output waveguide 5, input Y-branch
Waveguide 6, output end y branch waveguide 7, reference arm photonic crystal waveguide 8, signal arm photonic crystal waveguide 9, metal modulator electrode
10th, micro- overarm 11, mass 12, spill through hole 13.
Embodiment
The present invention operation principle be：Optical signals input waveguide enters Mach-Zahnder interference structure, optical transport to input
It is divided into two-beam at the y branch waveguide of end, is transmitted respectively in reference arm and signal arm, signal arm is experienced by micro- suspension beam structure
Extraneous acceleration change so that the optical transport phase in signal arm changes, and dual-beam is mutual at output end y branch waveguide
Superposition produces interference effect, is output to photo-detector and periphery detection circuit by output waveguide, measures light letter caused by acceleration
Number phase difference, realizes the measurement to acceleration.
Accelerometer of the present invention is changed using micro- suspension beam structure sensitive acceleration, when where accelerometer
In the presence of the acceleration of in-plane, micro- overarm in signal arm will produce displacement with mass, make in micro- suspension beam structure
Signal arm photonic crystal waveguide deforms upon, and Refractive Index of Material changes, and further influences the phase of optical transport in signal arm,
Cause the phase difference of signal arm and reference arm light signal, the measurement to acceleration is can be achieved with by the interferometry phase difference.
Accelerometer of the present invention, reference arm and signal arm have prepared slower rays enhancing photonic crystal waveguide, utilize
Photonic crystal waveguide technology strengthens the change of Refractive Index of Material under stress and electric field action, improves detection accuracy；When have electric field or
In the presence of person's electric field as caused by stress, the effect of electric field and light field is enhanced, and the modulation half-wave voltage of device is reduced with this, is carried
The limiting snesibility of high acceleration meter.
Accelerometer of the present invention, by from Electrooptic crystal material and combination photonic crystal waveguide technology, etching
Technology, realize micro- suspension beam structure, modulation /demodulation, sense the integrated of light path, make full use of integrated optics to develop new
Technology, farthest improve detection accuracy, integrated level and the reliability of system；Modem section can suppress ambient noise pair
The influence of sensing and the range for extending sensing；Reference arm is integrated in same substrate and isometric with signal arm, interferes two-way
Light isocandela, the contrast of signal is improved, while white light source interferometry can be realized, suppress parasitic interaction, improve detection
Precision；Being integrated in same substrate makes the distance of reference arm and signal arm in mm magnitudes, it is suppressed that the interference of temperature.
Technical solution of the present invention is further described below in conjunction with accompanying drawing.
A kind of photonic crystal waveguide Mach-Zahnder interference formula accelerometer based on elasto-optical effect proposed by the invention
Structure is as Figure 1-4.
Accelerometer includes input waveguide 4, output waveguide 5, Mach-Zahnder interference structure and micro- suspension beam structure；Mach Zeng De
Interference structure includes input y branch waveguide 6, output end y branch waveguide 9, reference arm photonic crystal waveguide 8, signal arm photon
Crystal waveguide 9, and metal modulator electrode 10.
Mach-Zahnder interference structure is respectively positioned on lithium columbate crystal layer 3, lithium columbate crystal layer 3 be followed successively by downwards silica every
Layer 2, silicon base 1.Input waveguide 4 connects input y branch waveguide 6, and two branch ends of input y branch waveguide 6 connect respectively
Reference arm photonic crystal waveguide 8 and signal arm photonic crystal waveguide 9, reference arm photonic crystal waveguide 8 and signal arm photonic crystal
Waveguide 9 connects two branch ends of output end y branch waveguide 7 respectively, and output end y branch waveguide 7 connects output waveguide 5；Incoming wave
It is ridge waveguide to lead 4, output waveguide 5, input y branch waveguide 6, output end y branch waveguide 7, is carved by the surface of lithium columbate crystal layer 3
Erosion is formed；Reference arm photonic crystal waveguide 8 and signal arm photonic crystal waveguide 9 are parallel to each other, and the both sides at waveguide both ends are respectively provided with
There is metal modulator electrode 10；Micro- suspension beam structure includes micro- overarm 11 and mass 12, by the middle part of signal arm photonic crystal waveguide 9
Both sides etching spill through hole 13 is formed；Micro- overarm 11 is parallel with signal arm photonic crystal waveguide 9, and mass 12 is positioned at micro- overarm 11
Positive middle part, and protrude perpendicular to signal arm photonic crystal waveguide 9.
The a kind of of the present invention plays light type photonic crystal waveguide accelerometer, and its optical signals input waveguide 4 entered Mach once
Moral interference structure, optical transport are divided into two-beam at input y branch waveguide 6, are transmitted respectively in reference arm and signal arm,
Signal arm experiences extraneous acceleration change by micro- suspension beam structure so that the optical transport phase in signal arm changes, defeated
Go out to hold dual-beam at y branch waveguide 7 to be overlapped mutually generation interference effect, exported by output waveguide 5, realize the survey to acceleration
Amount.
Embodiment
A kind of bullet light type photonic crystal waveguide accelerometer of the present invention, white light source such as SLD light sources or ASE light sources,
Its optical signals input waveguide 4 enters Mach-Zahnder interference structure, and optical transport is divided into two beams at input y branch waveguide 6
Light, transmitted respectively in reference arm and signal arm, signal arm experiences extraneous acceleration change by micro- suspension beam structure so that signal
Optical transport phase in arm changes, and dual-beam is overlapped mutually generation interference effect at output end y branch waveguide 7, by defeated
Go out waveguide 5 and be output to photo-detector and periphery detection circuit, optical signal phase caused by measurement acceleration is poor, realizes to acceleration
Measurement.
Accelerometer is changed using micro- suspension beam structure sensitive acceleration, when adding perpendicular to in-plane where accelerometer
In the presence of speed, micro- overarm 11 in signal arm will produce displacement with mass 12, make the signal arm light in micro- suspension beam structure
Sub- crystal waveguide 9 deforms upon, and Refractive Index of Material changes, and further influences the phase of optical transport in signal arm, causes letter
The phase difference of number arm and reference arm light signal, the measurement to acceleration is can be achieved with by the interferometry phase difference.
In the Mach-Zahnder interference structure of accelerometer, reference arm and signal arm have prepared slower rays enhancing photonic crystal ripple
Lead, be divided into reference arm photonic crystal waveguide 8 and signal arm photonic crystal waveguide 9, strengthen stress using photonic crystal waveguide technology
With the change of Refractive Index of Material under electric field action, detection accuracy is improved, in the presence of having electric field or the electric field as caused by stress,
The effect of electric field and light field is enhanced, and the modulation half-wave voltage of device is reduced with this, improves the limiting snesibility of accelerometer.Choosing
With silicon-based substrate and lithium niobate monocrystal thin-film material, ridge waveguide is prepared by photoetching, ICP or RIE lithographic techniques, passes through FIB
Etching prepares photonic crystal waveguide, and metal electrode is prepared by alignment, magnetron sputtering.Existing depth can be utilized from silicon-based substrate
Silicon etching technology realizes the processing of cantilever beam, can ensure that the excellent lithium niobate photon of processability is brilliant from lithium niobate monocrystal film
Bulk wave is led.
Accelerometer passes through from this high-quality Electrooptic crystal material of lithium columbate crystal and with reference to photonic crystal waveguide skill
Art, lithographic technique, realize micro- suspension beam structure, modulation /demodulation, sense the integrated of light path, make full use of integrated optics to send out
The new technology of exhibition, farthest improve detection accuracy, integrated level and the reliability of system；Modem section can suppress environment
Influence of the noise to sensing simultaneously extends the range of sensing；Reference arm is integrated in same substrate and isometric with signal arm, makes two
Road interference light isocandela, improves the contrast of signal, while can realize white light source interferometry, suppresses parasitic interaction, carries
High detection accuracy；Being integrated in same substrate makes the distance of reference arm and signal arm in mm magnitudes, it is suppressed that the interference of temperature.
Claims (4)
1. one kind plays light type photonic crystal waveguide accelerometer, it is characterised in that including input waveguide（4）, output waveguide（5）、
Mach-Zahnder interference structure and micro- suspension beam structure；Mach-Zahnder interference structure includes input y branch waveguide（6）, output end Y points
Branch waveguide（7）, reference arm photonic crystal waveguide（8）, signal arm photonic crystal waveguide（9）, and metal modulator electrode（10）, input
Waveguide（4）Connect input y branch waveguide（6）, input y branch waveguide（6）Two branch ends connect reference arm photon respectively
Crystal waveguide（8）With signal arm photonic crystal waveguide（9）, reference arm photonic crystal waveguide（8）With signal arm photonic crystal waveguide
（9）Connect output end y branch waveguide（7）Two branch ends, output end y branch waveguide（7）Connect output waveguide（5）；Described
Input y branch waveguide（6）Reference arm and signal arm it is isometric, output end y branch waveguide（7）Reference arm and signal arm etc.
Long, described reference arm photonic crystal waveguide（8）With signal arm photonic crystal waveguide（9）It is isometric；Mach-Zahnder interference structure bit
In lithium columbate crystal layer（3）, lithium columbate crystal layer（3）It is followed successively by silica interlayer downwards（2）, silicon base（1）；Reference arm light
Sub- crystal waveguide（8）With signal arm photonic crystal waveguide（9）It is parallel to each other, the both sides at waveguide both ends are provided with metal modulation electricity
Pole（10）；Signal arm photonic crystal waveguide（9）The both sides at middle part are etched with spill through hole（13）, form micro- suspension beam structure.
2. a kind of bullet light type photonic crystal waveguide accelerometer according to claim 1, it is characterised in that described is micro- outstanding
Girder construction includes micro- overarm（11）And mass（12）, by signal arm photonic crystal waveguide（9）The both sides etching spill at middle part is led to
Hole（13）Formed, micro- overarm（11）With signal arm photonic crystal waveguide（9）It is parallel, mass（12）Positioned at micro- overarm（11）Just
Middle part, and protrude perpendicular to signal arm photonic crystal waveguide（9）.
A kind of 3. bullet light type photonic crystal waveguide accelerometer according to claim 1, it is characterised in that described reference
Arm photonic crystal waveguide（8）With signal arm photonic crystal waveguide（9）It is slower rays enhancing photonic crystal waveguide.
A kind of 4. bullet light type photonic crystal waveguide accelerometer according to claim 1, it is characterised in that described input
Waveguide（4）, output waveguide（5）, input y branch waveguide（6）, output end y branch waveguide（7）For ridge waveguide, by lithium niobate crystal
Body layer（3）Surface etch is formed.
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| CN201710502565.3A CN107478861A (en) | 2017-06-27 | 2017-06-27 | One kind plays light type photonic crystal waveguide accelerometer |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108645405A (en) * | 2018-04-09 | 2018-10-12 | 浙江大学 | A kind of inertia sensing unit that optical gyroscope is merged with accelerometer height |
| CN109470885A (en) * | 2018-10-19 | 2019-03-15 | 浙江大学 | A kind of single-chip integration optics accelerometer |
| CN109946480A (en) * | 2019-03-06 | 2019-06-28 | 东南大学 | A kind of high-precision luminous power formula accelerometer based on zip mode photonic crystal micro-nano chamber |
| CN110133322A (en) * | 2019-05-13 | 2019-08-16 | 浙江大学 | Single-chip integration optics accelerometer based on electrooptic effect |
| CN110683506A (en) * | 2019-09-12 | 2020-01-14 | 山东大学 | MOEMS two-component acceleration sensor, measurement system and working method |
| CN111735987A (en) * | 2020-07-24 | 2020-10-02 | 中北大学 | Acceleration information closed-loop detection system based on magneto-optical rotation micro-optical accelerometer |
| CN111735988A (en) * | 2020-07-24 | 2020-10-02 | 中北大学 | Magnetic and thermal noise double-path differential suppression system based on magneto-optical rotation micro-optical accelerometer |
| CN111812867A (en) * | 2020-07-22 | 2020-10-23 | 清华大学 | Photonic crystal electro-optic modulator and manufacturing method thereof |
| CN114200162A (en) * | 2021-11-29 | 2022-03-18 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Micro-optical accelerometer |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108645405A (en) * | 2018-04-09 | 2018-10-12 | 浙江大学 | A kind of inertia sensing unit that optical gyroscope is merged with accelerometer height |
| CN109470885A (en) * | 2018-10-19 | 2019-03-15 | 浙江大学 | A kind of single-chip integration optics accelerometer |
| CN109470885B (en) * | 2018-10-19 | 2020-11-24 | 浙江大学 | Monolithic integrated optical accelerometer |
| CN109946480A (en) * | 2019-03-06 | 2019-06-28 | 东南大学 | A kind of high-precision luminous power formula accelerometer based on zip mode photonic crystal micro-nano chamber |
| CN109946480B (en) * | 2019-03-06 | 2020-08-14 | 东南大学 | High-precision photo-force accelerometer based on zipper type photonic crystal micro-nano cavity |
| CN110133322A (en) * | 2019-05-13 | 2019-08-16 | 浙江大学 | Single-chip integration optics accelerometer based on electrooptic effect |
| CN110683506A (en) * | 2019-09-12 | 2020-01-14 | 山东大学 | MOEMS two-component acceleration sensor, measurement system and working method |
| CN110683506B (en) * | 2019-09-12 | 2022-02-08 | 山东大学 | MOEMS two-component acceleration sensor, measurement system and working method |
| CN111812867A (en) * | 2020-07-22 | 2020-10-23 | 清华大学 | Photonic crystal electro-optic modulator and manufacturing method thereof |
| CN111812867B (en) * | 2020-07-22 | 2021-05-18 | 清华大学 | Photonic crystal electro-optic modulator and manufacturing method thereof |
| CN111735988A (en) * | 2020-07-24 | 2020-10-02 | 中北大学 | Magnetic and thermal noise double-path differential suppression system based on magneto-optical rotation micro-optical accelerometer |
| CN111735988B (en) * | 2020-07-24 | 2021-12-21 | 中北大学 | Magnetic and thermal noise double-path differential suppression system based on magneto-optical rotation micro-optical accelerometer |
| CN111735987B (en) * | 2020-07-24 | 2021-12-28 | 中北大学 | Acceleration information closed-loop detection system based on magneto-optical rotation micro-optical accelerometer |
| CN111735987A (en) * | 2020-07-24 | 2020-10-02 | 中北大学 | Acceleration information closed-loop detection system based on magneto-optical rotation micro-optical accelerometer |
| CN114200162A (en) * | 2021-11-29 | 2022-03-18 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Micro-optical accelerometer |
| CN114200162B (en) * | 2021-11-29 | 2024-05-24 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Micro-optical accelerometer |
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