CN111735988B - Magnetic and thermal noise double-path differential suppression system based on magneto-optical rotation micro-optical accelerometer - Google Patents
Magnetic and thermal noise double-path differential suppression system based on magneto-optical rotation micro-optical accelerometer Download PDFInfo
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- CN111735988B CN111735988B CN202010721749.0A CN202010721749A CN111735988B CN 111735988 B CN111735988 B CN 111735988B CN 202010721749 A CN202010721749 A CN 202010721749A CN 111735988 B CN111735988 B CN 111735988B
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Abstract
The invention discloses a magneto-optical rotation micro-optical accelerometer-based magnetic and thermal noise two-way differential suppression system, which comprises a double-end fixedly-supported cantilever beam mass block structure (9), wherein a magnetic thin film (8) is embedded in a central mass block of the double-end fixedly-supported cantilever beam mass block structure (9), and the magnetic thin film structure is arranged in a Halbach manner; two glass substrates (7) are arranged above the double-end fixed cantilever beam mass block structure (9) in parallel, a magneto-optical crystal I (6 a) is deposited on the surface of one glass substrate (7), and a magneto-optical crystal II (6 b) is deposited on the surface of the other glass substrate (7). The invention adopts a two-way in-situ synchronous modulation-demodulation differential technology to realize common-mode rejection of temperature and magnetic noise, solves the technical problems of low rejection ratio and difficult integration of the traditional micro-optical accelerometer technology which relies on a temperature control system to suppress the temperature and noise technology, and provides technical support for the research of the high-efficiency temperature noise suppression technology.
Description
Technical Field
The invention relates to the technical field of micro-optical accelerometers, in particular to a magnetic and thermal noise double-path differential suppression system based on a magneto-optical rotation micro-optical accelerometer.
Background
The acceleration sensor is used as an inertial sensing device for measuring position and speed, and plays an important role in the fields of inertial navigation, space gravitational wave detection, satellite gravity gradient measurement, high-orbit satellite precise orbit determination and navigation, spacecraft microgravity environment monitoring and the like. The accelerometer is the eye of weapon equipment, determines the accuracy and the damage power of target striking, is also the brain core of satellites and spacecrafts, and can monitor the flight orbit in real time. Therefore, the performance of the acceleration sensor marks the national defense and military strength and is one of the core technologies for pursuing by countries in the world.
The micro optical acceleration sensing technology (MOEMS) combines the advantages of miniaturization, low cost and optical high-precision detection of the MEMS technology, and becomes one of the main directions of acceleration sensor development. In recent years, with the continuous development of a precise measurement technology of optical quantum, the detection precision of the optical rotation angle based on the faraday optical rotation effect is continuously improved, and a new measurement method is provided for the detection of the micro-optical sensing technology by the synthesis of a magneto-optical crystal with a high Verdet constant. The micro-optical accelerometer structure is subjected to noise such as temperature, vibration and the like, a temperature control system is usually adopted for noise suppression, but the requirement on temperature noise is more strict when acceleration measurement with higher precision is carried out, and the micro-optical accelerometer structure becomes one of key technical bottlenecks in micro-optical accelerometer development.
Disclosure of Invention
The invention provides a double-path in-situ synchronous modulation-demodulation differential technology for realizing a common mode suppression system for temperature and magnetic noise aiming at a magneto-induced rotation micro-optical accelerometer, and the system has a higher suppression effect compared with a traditional temperature control system.
The invention is realized by adopting the following technical scheme:
a magnetic and thermal noise double-path differential suppression system based on a magneto-optical rotation micro-optical accelerometer comprises a double-end fixedly-supported cantilever beam mass block structure, wherein a magnetic thin film is embedded in a central mass block of the double-end fixedly-supported cantilever beam mass block structure, and the magnetic thin film structure is arranged in a Halbach manner; two glass substrates are arranged above the mass block structure of the double-end fixedly-supported cantilever beam in parallel, a magneto-optic crystal I is deposited on the surface of one glass substrate, a magneto-optic crystal II is deposited on the surface of the other glass substrate, one end of each of the magneto-optic crystal I and the magneto-optic crystal II is connected with a Y waveguide beam splitter through an optical fiber I and an optical fiber II respectively, the incident end of the Y waveguide beam splitter is connected with a polarizer, a plano-convex mirror I is arranged in the incident light direction of the polarizer, and a laser is arranged in the incident light direction of the plano-convex mirror I.
The other ends of the magneto-optical crystal I and the magneto-optical crystal II are respectively connected with an elastic optical modulator I and an elastic optical modulator II through an optical fiber III and an optical fiber IV, a polarization analyzer I, a flat convex mirror II, a photoelectric detector I, a preamplifier I and a phase-locked amplifier I are sequentially arranged in the emergent light direction of the elastic optical modulator I, and a polarization analyzer II, a flat convex mirror III, a photoelectric detector II, a preamplifier II and a phase-locked amplifier II are sequentially arranged in the emergent light direction of the elastic optical modulator II.
When the magneto-optical crystal laser works, laser emitted by the laser passes through the flat convex mirror, then passes through the polarizer, further passes through the Y waveguide beam splitter to form two paths of light beams, and the two paths of light beams are connected into the two magneto-optical crystals through the optical fiber. When an acceleration signal is provided, the cantilever beam mass block structure and the magnetic film move, so that the magnetic field around the magnetic film changes, a Faraday optical rotation effect occurs in the detected magneto-optical crystal, and an optical rotation angle is generated. Through carrying out Halbach arrangement to the magnetic thin film structure, according to Halbach array structure characteristic for the magnetic field intensity of magnetic thin film structure one side is showing and is strengthening, and the opposite side is showing and weakens. Two magneto-optical crystals are used, wherein one magneto-optical crystal is used for sensing acceleration information right above the magnetic film and is used as an optical rotation angle measuring unit (a detection end); the other magneto-optical crystal is arranged at the edge of the accelerometer structure frame and is used as a noise measuring unit (a reference end) and is far away from the magnetic film. The magnetic film has little influence on the reference magneto-optical crystal, is only influenced by environmental magnetic noise and temperature noise, is used for measuring noise such as temperature, external magnetic field and the like, is used as a reference signal, and realizes high-efficiency inhibition on common-mode noise through synchronous difference. After being synchronously modulated by the elastic optical modulator, the two paths of emergent polarized light respectively enter the photoelectric detector after passing through the analyzer and the planoconvex lens. The photoelectric detector converts an optical signal into an electric signal, a preamplifier amplifies the signal, a phase-locked amplifier technology is used for processing to respectively obtain a reference signal optical rotation angle measured value and a detection signal optical rotation angle measured value, the two-way signal is subjected to differential processing, and finally, acceleration information is obtained by resolving and analyzing the Faraday optical rotation angle measured after the two-way difference.
The invention adopts the magneto-optical crystal and the magnetic film which are sensitive to temperature, provides a double-path synchronous locking temperature noise suppression system aiming at the accelerometer for efficiently suppressing magnetic noise and temperature noise, and has higher suppression effect compared with the traditional temperature control system.
The invention adopts a two-way in-situ synchronous modulation-demodulation differential technology to realize common-mode rejection of temperature and magnetic noise, solves the technical problems of low rejection ratio and difficult integration of the traditional micro-optical accelerometer technology which relies on a temperature control system to suppress the temperature and noise technology, and provides technical support for the research of the high-efficiency temperature noise suppression technology.
Drawings
Fig. 1 shows a schematic diagram of a noise suppression system based on a magneto-optical micro-optical accelerometer.
Fig. 2 shows a layout of an optical interconnect structure.
Fig. 3 shows a flow chart of noise suppression work based on a magneto-optical micro-optical accelerometer.
Figure 4 shows a process flow diagram for the fabrication of a dual clamped cantilever mass structure.
In the figure: 1-a laser, 2 a-a planoconvex lens I, 2 b-a planoconvex lens II, 2 c-a planoconvex lens III, 3-a polarizer, 4-Y waveguide beam splitter, 5-an optical fiber, 5 a-an optical fiber I, 5 b-an optical fiber II, 5 c-an optical fiber III, 5 d-an optical fiber IV, 6-a magneto-optical crystal, 6 a-a magneto-optical crystal I, 6 b-a magneto-optical crystal II, 7-a glass substrate, 8-a magnetic film, 9-a double-end fixed cantilever beam mass block structure, 10-a device for providing an acceleration signal, 11 a-a photoelastic modulator I, 11 b-a photoelastic modulator II, 12 a-an analyzer I, 12 b-an analyzer II, 13 a-a photoelectric detector I, 13 b-photoelectric detector II, 14 a-a preamplifier I, 14 b-preamplifier II, 15 a-phase-locked amplifier I, 15 b-phase-locked amplifier II.
Detailed Description
The following detailed description of specific embodiments of the invention refers to the accompanying drawings.
A magnetic and thermal noise two-way differential suppression system based on a magneto-optical rotation micro-optical accelerometer is used for suppressing magnetic noise and temperature noise of the surrounding environment and comprises: the laser comprises a laser, a plano-convex mirror, a polarizer, a Y waveguide beam splitter, an optical fiber, a magnetic film, a double-end fixed-branch cantilever beam mass block structure, a magneto-optical crystal, a glass substrate, an elastic optical modulator, an analyzer, a photoelectric detector, a preamplifier, a phase-locked amplifier and the like.
As shown in fig. 1, a magnetic thin film 8 is embedded in a central mass block of a double-end fixedly-supported cantilever beam mass block structure 9, and the magnetic thin film structure is arranged in a halbach manner; two glass substrates 7 are arranged above the double-end fixed cantilever mass block structure 9 in parallel, a magneto-optic crystal I6 a (serving as a detection end) is deposited on the surface of one glass substrate 7, a magneto-optic crystal II 6b (serving as a reference end) is deposited on the surface of the other glass substrate 7, one ends of the magneto-optic crystal I6 a and the magneto-optic crystal II 6b are connected with two emergent ends of the Y waveguide beam splitter 4 through an optical fiber I5 a and an optical fiber II 5b respectively, the incident end of the Y waveguide beam splitter 4 is connected with the polarizer 3, the incident light direction of the polarizer 3 is provided with a plano-convex mirror I2 a, and the incident light direction of the plano-convex mirror I2 a is provided with the laser 1.
As shown in FIG. 1, the other ends of the magneto-optical crystal I6 a and the magneto-optical crystal II 6b are respectively connected with an elastic optical modulator I11 a and an elastic optical modulator II 11b through an optical fiber III 5c and an optical fiber IV 5d, a polarization analyzer I12 a, a plano-convex mirror II 2b, a photoelectric detector I13 a, a preamplifier I14 a and a lock-in amplifier I15 a are sequentially arranged in the emergent light direction of the elastic optical modulator I11 a, and a polarization analyzer II 12b, a plano-convex mirror III 2c, a photoelectric detector II 13b, a preamplifier II 14b and a lock-in amplifier II 15b are sequentially arranged in the emergent light direction of the elastic optical modulator II 11 b.
For the magneto-optical crystal, when no external magnetic field exists, linearly polarized light is decomposed into two beams of polarized light of a left-handed circle and a right-handed circle in the magneto-optical crystal medium after being incident along the magneto-optical crystal medium, and the two beams of polarized light have the same transmission characteristic; when an external magnetic field exists, the magneto-optical crystal medium layer shows anisotropy, so that a left circularly polarized light part and a right circularly polarized light part in linearly polarized light do not have the same transmission characteristic when propagating in the anisotropic medium, and the vibration direction of emergent linearly polarized light is changed relative to incident linearly polarized light, so that the Faraday optical rotation angle is generated. Based on a magneto-optical rotation micro-optical accelerometer, a magnetic film is embedded into the surface of a mass block structure, when an acceleration signal is generated, the magnetic field of the magnetic film is induced to change, so that the linearly polarized light of a magneto-optical crystal is caused to generate an optical rotation effect, an optical rotation angle is generated, and the high-precision measurement of the acceleration signal is realized by measuring the optical rotation angle.
By carrying out Halbach arrangement on the magnetic thin film structure, the magnetic field intensity on one side of the magnetic thin film structure is obviously enhanced, and the magnetic field intensity on the other side of the magnetic thin film structure is obviously weakened. Two magneto-optical crystals are used, wherein one magneto-optical crystal is used for sensing acceleration information right above the magnetic film and is used as an optical rotation angle measuring unit (a detection end); the other magneto-optical crystal is arranged at the edge of the accelerometer structure frame and is used as a noise measuring unit (reference end) far away from the magnetic film, the magnetic film has small influence on the magneto-optical crystal and is used for measuring noise such as temperature, an external magnetic field and the like, and the magneto-optical crystal is used as a reference signal to realize efficient suppression of common-mode noise through synchronous difference.
The processing technology of the double-end fixed-support cantilever beam mass block structure is shown in figure 4, firstly, the NdFeB film is epitaxially grown on a silicon substrate, the front device is protected by adopting a method, and under a mask with proper layout on the back, the beam and mass block structure is formed and released from the back by a method combining wet etching and dry deep etching, and finally, the double-end fixed-support cantilever beam mass block structure is prepared.
The Y waveguide beam splitter forms two paths of light beams from the linearly polarized light and respectively passes through two magneto-optical crystal structures at the detection end and the reference end.
The optical fiber realizes the end face alignment connection of the magneto-optical crystal and the optical fiber by adopting an optical fiber end face coupling method.
The magneto-optical crystal is a YIG magneto-optical crystal, a YIG magneto-optical material film is grown on a glass substrate by adopting a chemical vapor deposition method, and a ridge magneto-optical crystal waveguide structure is prepared by utilizing a hard mask method. The glass substrate is placed over the cantilever mass structure.
The elastic light modulator receives the emergent polarized light through the optical fiber and receives the emergent polarized light by the photoelectric detector; the preamplifier receives the signal of the photoelectric detector, amplifies the signal and then accesses the phase-locked amplifier.
The method comprises the following specific steps:
(1) after laser generated by a laser 1 passes through a plano-convex mirror I2 a and a polarizer 3, linearly polarized light passes through a Y waveguide beam splitter 4, the end face alignment connection of a magneto-optical crystal structure and an optical fiber is realized by using an optical fiber end face coupling method, and two paths of light beams are formed and pass through two magneto-optical crystal structures of a detection end and a reference end respectively. One of the magneto-optical crystals is right above the magnetic film, and the other magneto-optical crystal is at the edge of the accelerometer structure frame (double-end fixed cantilever beam mass block structure).
(2) When an acceleration signal is provided, the cantilever beam mass block fixed on the rotary table and the magnetic film move to cause the change of the magnetic field around the magnetic film, so that the linear polarization light in the magneto-optical crystal is detected to generate a Faraday optical rotation effect and generate a Faraday optical rotation angle; the reference magneto-optical crystal is mainly affected by magnetic noise and temperature noise of the surrounding environment.
(3) And the two beams of emergent linear polarized light are respectively coupled into a photoelastic modulator (PEM) through optical fiber coupling for synchronous modulation, the light penetrating through the PEM passes through an analyzer and a planoconvex lens and is respectively detected by a photoelectric detector, the photoelectric detector converts an optical signal into an electrical signal, and the signal is amplified by a preamplifier. And then the signals are subjected to frequency discrimination processing by a phase-locked amplifier to realize signal locking, so that the sizes of the optical rotation angles are respectively measured, and the measured optical rotation angles are subjected to differential processing.
(4) And the measured Faraday optical rotation angle after the two-way difference is resolved and analyzed, so that high-precision acceleration information is obtained, and further the suppression of magnetic noise and temperature noise of the surrounding environment is realized.
In practice, the double-clamped cantilever mass structure 9 is positioned on the device 10 for providing an acceleration signal, so that a small axial gravitational acceleration can be provided. Laser emitted by the laser 1 passes through the plano-convex mirror I2 a, then passes through the polarizer 3, and then is connected into the magneto-optical crystal I6 a and the magneto-optical crystal II 6b through the Y waveguide beam splitter 4. When loaded with gravity acceleration, generatesAcceleration signals, namely the cantilever mass block structure 9 and the magnetic film 8 move, so that a magnetic field around the magnetic film 8 changes, a Faraday rotation effect occurs in the magneto-optical crystal, and an optical rotation angle is generated. Two beams of emergent polarized light are respectively emitted into an elastic light modulator I11 a and an elastic light modulator II 11B for modulation, the light passing through the elastic light modulator I11 a and the elastic light modulator II 11B respectively passes through a polarization analyzer I12 a, a polarization analyzer II 12B, a flat convex mirror II 2B and a flat convex mirror 2c and then enters a photoelectric detector for detecting I13 a and a photoelectric detector 13B, the photoelectric detector converts optical signals into electric signals, the electric signals are amplified by a preamplifier I14 a and a preamplifier II 14B, the optical rotation angle is obtained by technical processing of a phase-locked amplifier I15 a and a phase-locked amplifier II 15B, then the Faraday rotation angle measured after difference is resolved and analyzed in a double-path mode, and finally the size of a magnetic field B is obtained according to a formula theta = VBL of the optical rotation angle and the magnetic field, wherein V is a Verdet constant, and L is the propagation distance of the light in the crystal. When the acceleration signal causes the magnetic thin film magnetic field to change, according to the formula F = ma = kx, where k is the elastic coefficient of the cantilever beam, x is the elastic deformation of the cantilever beam, and the magnetic field B = xS, S is the gradient change slope of the magnetic field. And then based on the optical rotation angle and magnetic field formula, establishing a model for accelerometer range calculation, and obtaining a relational expression of acceleration and optical rotation angle:
and obtaining acceleration information through analysis and calculation.
In addition, the invention is characterized in that the measurement of the micro acceleration signal is helpful for improving the acceleration detection precision. In a specific experiment, acceleration information of 1 mug is detected, and the optical rotation angle 10 at the current stage is utilized-8The accuracy of the rad measurement is based on the equation of the angle of rotation with the magnetic field θ = VBL, where V is the verdet constant and L is the distance light travels in the magneto-optical crystal. The change of the magnetic field B is obtained by combining the physical parameters of the magneto-optical crystal used by the invention, namely the Verdet constant V and the length L of the magneto-optical crystal through the change of the optical rotation angle theta. And simultaneously, according to the gradient change slope of the magnetic field B = xS and S, obtaining the displacement x of the mass block under the acceleration information of 1 mug, and designing the double-end cantilever according to the indexThe beam mass block structure establishes a linear proportional relation between the rotation angle and the acceleration, so that the acceleration information is calculated through the detected rotation angle, and the detection of the acceleration sensor on the micro acceleration based on the Faraday rotation effect is realized.
In a word, the magnetic film adopts a Halbach arrangement structure, so that the magnetic field intensity of one side of the magnetic film microstructure is obviously enhanced, and the other side of the magnetic film microstructure is obviously weakened. Two magneto-optical crystals are used, one magneto-optical crystal is used as a detection end and positioned right above the magnetic film for sensing acceleration information, and the other magneto-optical crystal is used as a reference end and far away from the magnetic film for measuring noise such as temperature, an external magnetic field and the like. The integral sensing utilizes linearly polarized light to pass through a Y waveguide beam splitter to form two paths of light beams which respectively pass through magneto-optical crystal structures of a detection end and a reference end, and finally, two-path synchronous detection is carried out through photoelectric detection, detection of a rotating light angle is realized by utilizing a phase-locked amplification technology, and finally, differential processing is carried out on two paths of signals, so that the suppression of the temperature and the magnetic noise of the surrounding environment is realized.
The above are only specific embodiments of the present invention, but are not limited thereto. Any simple changes, equivalent substitutions or modifications made based on the present invention to solve substantially the same technical problems or achieve substantially the same technical effects are within the scope of the present invention.
Claims (1)
1. A magnetism, thermal noise double-circuit difference suppression system based on little optical accelerometer of magnetic rotation, its characterized in that: the double-end clamped cantilever beam mass block structure comprises a double-end clamped cantilever beam mass block structure (9), wherein a magnetic thin film (8) is embedded in a central mass block of the double-end clamped cantilever beam mass block structure (9), and the magnetic thin film adopts a Halbach arrangement structure; two glass substrates (7) are arranged above the double-end fixed cantilever beam mass block structure (9) in parallel, a magneto-optical crystal I (6 a) is deposited on the surface of one glass substrate (7), a magneto-optical crystal II (6 b) is deposited on the surface of the other glass substrate (7), one ends of the magneto-optical crystal I (6 a) and the magneto-optical crystal II (6 b) are respectively connected with a Y waveguide beam splitter (4) through an optical fiber I (5 a) and an optical fiber II (5 b), the incident end of the Y waveguide beam splitter (4) is connected with a polarizer (3), a plano-convex mirror I (2 a) is arranged in the incident light direction of the polarizer (3), and a laser (1) is arranged in the incident light direction of the plano-convex mirror I (2 a);
the other ends of the magneto-optical crystal I (6 a) and the magneto-optical crystal II (6 b) are connected with an elastic optical modulator I (11 a) and an elastic optical modulator II (11 b) through an optical fiber III (5 c) and an optical fiber IV (5 d), an analyzer I (12 a), a flat convex mirror II (2 b), a photoelectric detector I (13 a), a preamplifier I (14 a) and a phase-locked amplifier I (15 a) are sequentially arranged in the emergent light direction of the elastic optical modulator I (11 a), and an analyzer II (12 b), a flat convex mirror III (2 c), a photoelectric detector II (13 b), a preamplifier II (14 b) and a phase-locked amplifier II (15 b) are sequentially arranged in the emergent light direction of the elastic optical modulator II (11 b).
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| JP5926456B2 (en) * | 2012-06-06 | 2016-05-25 | ノースロップ グルマン システムズ コーポレーションＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ Ｓｙｓｔｅｍｓ Ｃｏｒｐｏｒａｔｉｏｎ | Optical accelerometer system |
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| CN104535191A (en) * | 2014-12-31 | 2015-04-22 | 中北大学 | Polarization spectral imaging measuring structure based on magnetic vortice light and AOTF |
| CN104820298A (en) * | 2015-04-17 | 2015-08-05 | 电子科技大学 | TM-TE magneto-optic modulator based on BiLuIG |
| CN107478861A (en) * | 2017-06-27 | 2017-12-15 | 浙江大学 | One kind plays light type photonic crystal waveguide accelerometer |
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