CN107478178B - Bidirectional alignment laser centering adjustment device and centering method - Google Patents

Bidirectional alignment laser centering adjustment device and centering method Download PDF

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CN107478178B
CN107478178B CN201710877538.4A CN201710877538A CN107478178B CN 107478178 B CN107478178 B CN 107478178B CN 201710877538 A CN201710877538 A CN 201710877538A CN 107478178 B CN107478178 B CN 107478178B
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laser
micro
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motion
fixed
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CN107478178A (en
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唐晨
张茂云
曹国华
丁红昌
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Changchun University of Science and Technology
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Changchun University of Science and Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

Abstract

The invention relates to a bidirectional alignment laser centering adjustment device and a centering method, and belongs to the field of laser centering. The diameter measurement rear wing is fixedly connected with the fixed laser receiving cylinder, the fixed foot support is fixed on the fixed laser receiving cylinder, and the turnover laser macro-micro adjustment box is fixedly connected with the fixed laser receiving cylinder. The invention has the advantages that macro-micro combined adjustment is carried out on the laser, the laser is driven by utilizing the stick-slip inertia principle, and a laser linear equation is obtained through calculation and is used for a bidirectional centering shaft system, so that the centering precision is higher.

Description

Bidirectional alignment laser centering adjustment device and centering method
Technical Field
The invention relates to the field of laser centering, in particular to a high-precision laser centering device and a centering method for centering a center shaft and a shaft.
Background
In industrial production, a driving shaft is often used for driving a driven shaft to transmit torque, power is output, a shafting is used as a key component for transmitting torque and outputting power, and the device plays an important role in the running process of a unit. The quality of shafting centering quality can directly influence the running condition of equipment, and is also a key index of equipment use safety and service life. For a high-speed rotating shafting, the high-precision centering result can better reduce unit vibration, reduce friction and damage between equipment and improve operation efficiency.
In the existing shafting centering method, a dial indicator method is often adopted, but the centering effect is poor and the centering precision is not enough due to the defects of complex operation, large manual calculation amount, high requirements on technicians and the like; because the laser centering method has the advantages of high centering precision, high centering efficiency, good centering effect and the like, the laser centering method is adopted for centering in common use in recent years.
However, in the conventional laser centering method based on the laser centering device and the method, the laser centering device is often sleeved on a shaft system by adopting a chain, so that the laser is manually adjusted, the clamping error caused by the laser centering device is not adjusted in the later period of too coarse operation, the requirement of high precision is not met, the centering effect is poor, the requirement of the laser path emitted by the laser and the centering shaft level is hardly ensured by fixing the laser with the chain, and meanwhile, due to the limitation of space, the centering result precision is poor, and the centering process is relatively complicated.
Disclosure of Invention
The invention provides a bidirectional alignment laser centering adjustment device and a centering method, which are used for solving the problems of poor precision of a centering result and relatively complicated centering process existing at present.
The technical scheme adopted by the invention is as follows:
the bidirectional alignment laser centering adjusting device consists of a fixed foot support, a diameter measurement rear wing, a fixed laser receiving cylinder and a turnover laser macro-micro adjusting box, wherein the diameter measurement rear wing is fixedly connected with the fixed laser receiving cylinder, the fixed foot support is fixed on the fixed laser receiving cylinder, and the turnover laser macro-micro adjusting box is fixedly connected with the fixed laser receiving cylinder.
The fixed foot support comprises four fixed feet and four movable feet, the four fixed feet are cylindrical, the upper ends of the four fixed feet are hollow, the bottom ends of the four fixed feet are fixed on the circumferential inclined surfaces of the fixed foot support discs, movable feet are packaged in the fixed feet, the movable feet are cylindrical rod-shaped, the tail end of each cylindrical rod of each movable foot is transversely provided with a fixed claw, the fixed claws are cylindrical, rubber damage-preventing sleeves are sleeved outside the fixed claws, the movable feet are packaged in the fixed feet, the four movable feet can move along the directions of the fixed feet, and the four fixed claws can stretch through the four movable feet and are clamped and fixed on driving shafts with different diameters.
The diameter measurement rear wing consists of a rotating shaft sleeve, a horizontal adjusting guide rail, a vertical adjusting guide rail and two pairs of high-precision CCD measurement receivers; the rotating shaft sleeve is two hollow semi-cylindrical shaft sleeves which are connected and arranged on the connecting column through bolts, so that the connection between the diameter measurement rear wing and the fixed laser receiving cylinder is realized; horizontal adjusting guide rails are symmetrically arranged on two sides of the rotating shaft sleeve, and square rails are arranged on the symmetrical positions of the side walls of the horizontal adjusting guide rails; the vertical adjusting guide rail is similar to the horizontal adjusting guide rail, a square guide rail is arranged at the symmetrical position of the side wall, meanwhile, a sliding foot I which can be provided with the horizontal adjusting guide rail and can move along the direction of the horizontal guide rail is also arranged on the bottom plane of the vertical adjusting guide rail, the sliding foot I is an L-shaped boss, and the sliding foot I is symmetrically arranged in the horizontal direction of the bottom plane of the vertical adjusting guide rail; the high-precision CCD measuring and receiving instrument is a pair of LED parallel light emitting and receiving devices, the bottom of the high-precision CCD measuring and receiving instrument is connected with a sliding support, and a sliding foot II is also arranged on the bottom surface below the sliding support and can move in the vertical adjusting guide rail.
The fixed laser receiving cylinder consists of a fixed foot support disc, a connecting column, a laser receiving box, a PSD laser receiver and a rotating bracket; one end surface of the fixed foot support disc is a circumferential inclined surface, the fixed foot support is fixed on the fixed foot support disc, and the other end surface of the fixed foot support disc is a vertical cylindrical surface and is connected with a connecting column; the laser receiving box is a cylindrical box body, the PSD laser receiver is fixedly arranged at the front end of the laser receiving box, and the PSD laser receiver receives laser emitted by the laser emitter to generate position information; the rotating support is two symmetrical rectangular supports, the rotating support is arranged in front of the PSD laser receiver, the front end of the rotating support is semicircular, rotating center shafts are symmetrically arranged at the center positions of the front parts of the two supports, and the turnover laser adjusting box is arranged on the rotating support.
The turnover laser macro-micro adjustment box consists of a laser emitter, a micro-laser box, a bearing box, a stick-slip inertial micro-motion platform, a Y-direction macro-motion adjustment box and an X-direction macro-motion adjustment box, wherein the micro-laser box is a hollow box body, no front side end face is arranged, and a two-dimensional piezoelectric micro-motion platform is arranged on the rear side end face; the stick-slip inertial micro-motion platform is formed by connecting a flexible micro-motion device and a pre-tightening driving device.
The two-dimensional piezoelectric micro-motion platform consists of an X-direction piezoelectric ceramic driver, a Y-direction piezoelectric ceramic driver, a flexible amplifying mechanism, an X-direction micro-motion workbench, a Y-direction micro-motion workbench and a fixed frame; the flexible amplifying mechanism is a straight-plate type flexible hinge; the X-direction micro-motion workbench and the Y-direction micro-motion workbench are connected in series for working.
The bearing box is a hollow box body, the front side end face is provided with a circular laser hole, the upper top surface and the lower top surface are not completely closed, the transverse top surface with the size of 3/4 is provided with a friction-free baffle plate, the left end and the right end of the upper top surface and the lower top surface are respectively connected with a side surface friction-free baffle plate, the side surface friction-free baffle plates also do not completely seal the side surfaces, and polytetrafluoroethylene coatings are coated on the inner surfaces of the top surface friction-free baffle plates and the side surface friction-free baffle plates, so that friction can be effectively reduced; y-direction square guide rails are symmetrically arranged outside the vertical side wall of the whole bearing box, and can be installed in the Y-direction sliding rail of the Y-direction macro-movement adjusting box.
The flexible micro-motion device consists of a supporting plate, a double parallel plate amplifying hinge, a flexible micro-motion platform and a piezoelectric stack; the supporting plate is rectangular; the double parallel plate amplifying hinges are respectively arranged at the front end and the rear end of the flexible micro-motion platform, so that the displacement stroke can be effectively amplified; the flexible micro-motion platform is arranged at the central position of the supporting plate, and the whole flexible micro-motion platform is arranged on the inner side wall of the bearing box through screws at four right-angle positions of the supporting plate; the pre-tightening driving device comprises a parallelogram flexible hinge, a piezoelectric stack and a pre-tightening screw; the piezoelectric stack is packaged in the parallelogram flexible hinge through a pre-tightening screw; the top surface of the upper part of the parallelogram flexible hinge is provided with a pre-tightening contact which is tightly attached to the micro-motion laser box, and when the piezoelectric stack in the pre-tightening contact is electrified, the micro-motion laser box can be pre-tightened effectively, so that the realization of stick-slip inertia is facilitated; the pre-tightening driving device is connected to the micro-motion workbench of the flexible micro-motion platform through screws.
The Y-direction macro motion adjusting box is a four-side frame square box, Y-direction sliding tracks are symmetrically arranged in two vertical side walls, two screw holes are respectively arranged on the upper horizontal top surface and the lower horizontal top surface, vertical adjusting screws are arranged on the upper horizontal top surface and the lower horizontal top surface, X-direction square guide rails are symmetrically arranged in the middle of the outer sides of the upper horizontal top surface and the lower horizontal top surface, and the X-direction square guide rails can be installed in the X-direction sliding tracks of the X-direction macro motion adjusting box; the X-direction macro-movement adjusting box is also a square box with four frames, X-direction sliding tracks are symmetrically arranged on the inner sides of the upper horizontal side wall and the lower horizontal side wall, two screw holes are respectively arranged on the two vertical side walls, horizontal adjusting screws are arranged, and rotating center holes are arranged at the outer center symmetrical positions of the two vertical side walls; the rotating center hole is matched with a rotating center shaft on the rotating bracket; the laser transmitter, the micro-motion laser box, the bearing box, the Y-direction macro-motion adjusting box and the X-direction macro-motion adjusting box are sequentially distributed outwards from the inner center of the reversible laser adjusting box; the tail part of the laser transmitter is arranged on a Y-direction micro-motion workbench of the two-dimensional micro-motion platform; the micro-motion laser box is integrally packaged in the bearing box.
A centering method based on a bidirectional alignment laser centering adjustment device comprises the following steps:
Step one: the laser centering adjusting device for bidirectional alignment realizes simultaneous grasping and loosening of the fixed claws by controlling the movable leg in the fixed leg to stretch, is arranged on a driving shaft in a certain range, is used for checking whether the device is firmly arranged and is used for checking whether the device is horizontally arranged by a horizontal quadrant;
step two: the diameter measuring rear wing is arranged on a connecting column of a fixed laser receiving cylinder, LED parallel light which is not scattered is emitted by a high-precision CCD measuring instrument at one end of two groups of high-precision CCD measuring receivers on the connecting column, the other end of the high-precision CCD measuring receiver receives the LED parallel light, one part of the LED parallel light irradiates on a shaft, the other part of the LED parallel light is directly received by the high-precision CCD receiving instrument, edge detection is carried out on a bright and dark area on the CCD, and the diameter d of a driving shaft is determined through calculation 1 The whole diameter measuring rear wing can be rotated by rotating the rotating shaft sleeve to carry out multiple diameter measurement, and finally, the average value of the diameter measuring rear wing is taken to calculate the output axle center O 1 The position of the PSD laser receiver is set up by taking the horizontal direction of the plane at the front end of the PSD laser receiver as an X axis, the vertical direction as a Y axis and the direction perpendicular to the plane of the PSD laser receiver as a Z axis, and a first space rectangular coordinate system is established to generate a space position coordinate O relative to the first space rectangular coordinate system 1 (x 1 ,y 1 ,z 1 )；
Step three: by rotating the turnover laser macro-micro adjusting box, the laser path horizontally irradiates the PSD laser receiver, the laser path at the moment is set as a first laser path, and the laser starting point is set as a first laser emission pointThe point is that the first laser path is idealized into a first laser straight line L1, the point of the first laser path irradiated onto the PSD laser receiver is marked as A, the first laser emission point is marked as B, and the position coordinate of the point A formed by the laser path irradiated onto the PSD laser receiver relative to a first space rectangular coordinate system is (x) 2 ,y 2 0), the position coordinate of the first laser emission point B relative to the first space rectangular coordinate system is (x) 3 ,y 3 ,z 3 ) Judging whether the first laser path is horizontal or not, and determining whether the first laser path is horizontal or not by the point A (x 2 ,y 2 ,0)、B(x 3 ,y 3 ,z 3 ) Calculating to obtain a first laser linear direction vector
Figure BDA0001417007710000041
Figure BDA0001417007710000042
If x 3 -x 2 Not equal to 0 or y 3 -y 2 Not equal to 0, judging that the first laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount required by the first laser light path, and setting the X-direction angle adjustment amount required by the first laser light path as theta 1 The required angle adjustment quantity in Y direction is theta 2 The projection of the first laser line L1 on the plane perpendicular to the Y axis and parallel to the XOZ plane at the point B and the projection on the plane perpendicular to the Y axis and parallel to the YOZ plane at the point B are respectively made to obtain:
Figure BDA0001417007710000043
Figure BDA0001417007710000044
From theta 1 、θ 2 Correspondingly adjusting the bidirectional variable laser emission device to enable the bidirectional variable laser emission device to be horizontal;
the first laser path level is adjusted to set the point of the first laser path that impinges on the PSD laser receiver 1034 as C, the coordinates of which should be(x 3 ,y 3 0), C point coordinates and axis coordinates O 1 (x 1 ,y 1 ,z 1 ) Comparing, calculating and outputting the deviation between the first laser path and the position of the axle center and giving out the adjustment quantity delta X 1 、△Y 1 ：
△X 1 ＝x 3 -x 1 (1-4)
△Y 1 ＝y 3 -y 1 (1-5)
The Y-direction macro-movement adjusting box and the X-direction macro-movement adjusting box are respectively adjusted through a vertical adjusting screw and a horizontal adjusting screw, so that a laser path emitted by a laser emitter is basically aligned with the axis coordinate, and the position coordinate D (X) of the first laser path irradiated on the PSD laser receiver at the moment is output again 4 ,y 4 0), generates a slight deviation and gives an adjustment quantity DeltaX 2 、△Y 2 ：
△X 2 ＝x 4 -x 1 (1-6)
△Y 2 ＝y 4 -y 1 (1-7)
And then, driving the micro-motion laser box by using feedback adjustment, performing X, Y-direction displacement driving on the two-dimensional piezoelectric micro-motion platform, introducing electric signals with different sizes into the X-direction piezoelectric ceramic driver and the Y-direction piezoelectric ceramic driver according to the micro-deviation value, further realizing high-precision displacement adjustment on the two-dimensional piezoelectric micro-motion platform with different sizes until the formed deviation value is within an allowable error range, and recording a first laser linear equation L1 at the moment:
Figure BDA0001417007710000051
Recording a first laser linear equation L1 at the moment;
step four: rotating the reversible laser macro-micro adjustment box to 180 DEG 。 Establishing a second space rectangular coordinate system by taking the horizontal direction of the plane at the front end of the PSD target as an X axis, the vertical direction as a Y axis and the direction vertical to the plane of the PSD target as a Z axis in the opposite direction, and setting a laser light path at the moment as a second laser light pathThe starting point of the laser is a second laser emission point, the second laser path is idealized into a second laser straight line L2, the point of the second laser path irradiated to the PSD target is marked as E, the second laser emission point is marked as F, and the position coordinate of the point E formed by the laser path irradiated to the PSD target relative to a second space rectangular coordinate system is (x) 5 ,y 5 0), the position coordinate of the second laser emission point F with respect to the second space rectangular coordinate system is (x) 6 ,y 6 ,z 6 ) Firstly, judging whether a second laser path emitted by a laser emitter irradiates the PSD target horizontally, and obtaining a direction vector of a second laser straight line by a point E and a point F
Figure BDA0001417007710000052
Figure BDA0001417007710000053
If x 6 -x 5 Not equal to 0 or y 6 -y 5 Not equal to 0, judging that the second laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount of the second laser light path, and setting the X-direction required angle adjustment amount as theta 3 The required angle adjustment quantity in Y direction is theta 4 The projection of the first laser line L2 on the plane where the F point is perpendicular to the Y axis and parallel to the XOZ plane and the projection of the F point on the plane where the F point is perpendicular to the Y axis and parallel to the YOZ plane are respectively made, and it is possible to obtain:
Figure BDA0001417007710000054
Figure BDA0001417007710000055
from theta 3 、θ 4 Correspondingly adjusting the bidirectional variable laser emission device to enable the bidirectional variable laser emission device to be horizontal;
adjusting the level of the second laser path, recording the point of the second laser path irradiated on the PSD target as G, which is right angle relative to the second spaceThe position coordinates of the coordinate system should be (x) 6 ,y 6 0), compare point G with point O 1 Calculating and outputting the deviation of the second laser path and the position of the axle center of the driving shaft and giving out an adjustment quantity delta X 3 、△Y 3 ：
△X 3 ＝x 6 -x 1 (1-12)
△Y 3 ＝y 6 -y 1 (1-13)
And then the Y-direction macro-movement adjusting box and the X-direction macro-movement adjusting box are respectively adjusted through a vertical adjusting screw and a horizontal adjusting screw, so that a laser light path emitted by the laser emitter is basically aligned with the axis coordinate O 1 And outputs again the position coordinates H (x) of the second laser beam path irradiated on the PSD target at this time 7 ,y 7 0), generating a minute deviation and giving an adjustment amount
△X 4 、△Y 4 ：
△X 4 ＝x 7 -x 1 (1-14)
△Y 4 ＝y 7 -y 1 (1-15)
Then, the micro-motion laser box is driven by feedback adjustment, X, Y-direction displacement driving is carried out on the two-dimensional piezoelectric micro-motion platform, electric signals with different sizes are introduced into the X-direction piezoelectric ceramic driver and the Y-direction piezoelectric ceramic driver according to the micro-deviation value, and further high-precision displacement adjustment of the two-dimensional piezoelectric micro-motion platform with different sizes is achieved until the formed deviation value is within an allowable error range, and a second laser linear equation L2 at the moment is recorded;
Figure BDA0001417007710000061
Step five: in order to determine that the second laser light path is accurately centered with the first laser light path, at the moment, driving the stick-slip inertial micro-motion platform, wherein the stick-slip inertial micro-motion platform consists of a flexible micro-motion device and a pre-tightening driving device; simultaneously introducing sawtooth waves with the same period into the pre-tightening driving device and the flexible micro-motion device, wherein the second piezoelectric stack of the pre-tightening driving device stretches and deforms, the parallelogram flexible hinge deforms along with the elongation, the micro-motion laser box is pre-tightened in the vertical direction, the implementation of stick-slip inertia is facilitated, and meanwhile, certain displacement output is carried out in the horizontal direction; the flexible micro-motion platform transversely moves to drive the pre-tightening driving device to finish displacement output, at the moment, the starting point of the second laser light path advances for a certain distance, the position coordinates of the starting point of the second laser light path and a second laser linear equation L2 are determined again, the comparison is carried out with L1, and the second laser linear equation L2 corresponding to the second laser light path at the moment is repeatedly adjusted until the second laser linear equation L1 is met; based on the second laser path, the device can be used for subsequent shafting centering work.
The invention has the advantages that:
(1) The invention adopts a bidirectional alignment mode, firstly, a first laser light path and the self axis are aligned with high precision, and are idealized into a straight line, so that a first laser straight line equation is formed, then the laser light path is reversed, the axis is aligned reversely, and a second laser light path is ideally converted into a straight line, so that a second laser straight line equation is generated as an alignment reference; the centering mode of the bidirectional centering utilizes the axle center to perform centering, thereby avoiding the problem of space limitation faced by the rotation of the outer sleeve on the axle; meanwhile, the mounting work performed after the self axis is aligned solves the defect of large error caused by manual axis alignment of the driving shaft in the prior art, so that the centering accuracy is higher and the centering effect is better.
(2) The utilization of the stick-slip inertial micro-motion platform makes the laser light path ideal into a straight line, is favorable for calculating a laser straight line equation, has little influence on the existing laser light path due to small driving displacement, is favorable for capturing points due to relatively obvious displacement movement and simple driving mode, generates coordinates, is accurate and quick, and ensures the accuracy of self-shafting centering and the reliability of a centering reference light path.
(3) After macro-movement adjustment is performed through the horizontal calibration screw and the vertical calibration screw, micro-displacement adjustment is performed by utilizing the two-dimensional piezoelectric micro-movement platform, when the required adjustment amount is generated, electric signals with corresponding sizes can be respectively fed into the X-direction piezoelectric driver and the Y-direction piezoelectric driver through feedback adjustment automatic control, the degree of automation is high, the operation is simple and convenient, and errors are almost derived from machinery; meanwhile, the micro-motion platform formed by the piezoelectric driver and the like has small displacement feeding and high precision, so that the requirement of centering effect is met.
(4) The whole device is arranged on the driving shaft and the opposite center shaft in a mode of opening and closing the fastening claws of the fixed foot support, so that the installation and the disassembly are better and simpler, and the four claws utilized by the device are opened and closed, so that the installation is better, firmer, more reliable, simpler and quicker; and is suitable for the shafting with a certain diameter range, and has stronger universality.
(5) The high-precision CCD measurement receiving device has the advantages of high response speed, high precision and long service life due to the optical characteristics; meanwhile, the shaft system diameters of different sizes can be measured as the device is arranged on the horizontal adjusting guide rail and the vertical adjusting guide rail, and the accuracy is improved through multiple measurements.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a stationary foot in accordance with the present invention;
FIG. 3 is a schematic view of the structure of the diameter-measuring rear wing in the present invention;
FIG. 4 is a schematic view of a stationary laser receiving cartridge according to the present invention;
FIG. 5 is a schematic diagram of a reversible laser macro-micro adjustment box structure in the present invention;
FIG. 6 is a schematic diagram of a connection structure of a reversible laser macro-micro adjustment box according to the present invention;
FIG. 7 is a cross-sectional view of a reversible laser macro-adjustment cartridge of the present invention;
FIG. 8a is a schematic view of a micro-motion laser cartridge according to the present invention;
FIG. 8b isbase:Sub>A cross-sectional view A-A of FIG. 8base:Sub>A;
FIG. 9 is a schematic view of the structure of the carrying case of the present invention;
FIG. 10 is a schematic diagram of a stick-slip inertial micro platform according to the present invention;
FIG. 11 is a diagram of the angular adjustment process of the first laser path in the present invention;
FIG. 12 is a diagram of a process for adjusting the position of a first laser path in the present invention;
FIG. 13 is a diagram of the process of adjusting the angle of the second laser path in the present invention;
FIG. 14 is a precision alignment process of a first laser path and two laser paths in the present invention;
reference numerals illustrate:
bidirectional alignment laser centering adjustment device-1, PSD target-2, driving shaft-3, LED parallel light-4, laser light path-5, fixed foot support-101, diameter measurement rear wing-102, fixed laser receiving cylinder-103, turnover laser macro-micro adjustment box-104, fixed foot-1011, movable foot-1012, rotating shaft sleeve-1021, horizontal adjustment guide rail-1022, vertical adjustment guide rail-1023, high-precision CCD receiver-1024, fixed bolt-1025, fixed foot support disc-1031, connecting column-1032, laser receiving box-1033, PSD laser receiver-1034, rotating support-1035, laser emitter-1041, micro-motion laser box-1042, bearing box-1043, stick-slip inertial micro-motion platform-1044, Y-direction macro-motion adjustment box-1045X-direction macro motion adjusting box-1046, vertical adjusting screw-1047, horizontal adjusting screw-1048, fixing claw-10121, horizontal square guide rail-10221, vertical square guide rail-10231, high-precision CCD measuring instrument-10241, high-precision CCD receiver-10242, sliding bracket-10243, rotation center shaft-10351, two-dimensional piezoelectric micro motion platform-10421, circular laser hole-10431, top surface friction-free baffle-10432, side surface friction-free baffle-10433, Y-direction square guide rail-10434, flexible micro motion device-10441, pre-tightening driving device-10442, Y-direction sliding rail-10451, X-direction square guide rail-10452, X-direction sliding rail-10461, rotation center hole-10462, sliding foot I-102311, sliding foot II-102411, X-direction piezoelectric ceramic driver-104211, Y-direction piezoelectric ceramic driver-104212, flexible amplifying mechanism-104213, X-direction micro-motion workbench-104214, Y-direction micro-motion workbench-104215, fixed frame-104216, supporting plate-104411, double-parallel plate amplifying hinge-104412, flexible micro-motion platform-104413, first piezoelectric stack-104414, parallelogram flexible hinge-104421, second piezoelectric stack-104422, pre-tightening screw-104423, pre-tightening contact-104424.
Detailed Description
The bidirectional alignment laser centering adjustment device consists of a fixed leg, a diameter measurement rear wing, a fixed laser receiving cylinder and a turnover laser macro-micro adjustment box, wherein the diameter measurement rear wing 102 is fixedly connected with the fixed laser receiving cylinder 103, the fixed leg 101 is fixed on the fixed laser receiving cylinder 103, and the turnover laser macro-micro adjustment box 104 is fixedly connected with the fixed laser receiving cylinder 103.
As shown in fig. 1 and 2, the fixed leg 101 is composed of four fixed legs 1011 and four movable legs 1012; the diameter measurement rear wing 102 is connected with the fixed laser receiving cylinder 103 through a rotating shaft sleeve 1021, and the high-precision CCD measuring receiver 1024 is regulated by a horizontal regulating guide rail 1022 and a vertical regulating guide rail 1023 arranged on the fixed laser receiving cylinder, so that the diameter measurement rear wing 102 can measure the diameter of the driving shaft 3; the rear part of the fixed laser receiving cylinder 103 is provided with a fixed foot supporting disc 1031, one side end surface is a circumferential inclined surface, the fixed foot supporting 101 is fixed on the fixed foot supporting disc, the other side is a vertical cylindrical surface and is provided with a connecting column 1032, the connecting column 1032 is a section of cylinder, one end of the connecting column is fixed on the vertical cylindrical surface of the fixed foot supporting disc 1031, the other end of the connecting column is connected with a laser receiving box 1033, the center part of the front end of the laser receiving box 1033 is provided with a PSD laser receiver 1034, and meanwhile, the edge symmetrical part of the laser receiving box 1033 is also provided with a rotating bracket 1035, so that the turnover laser macro-micro adjustment box 104 can be installed; the reversible laser macro-micro adjustment box 104 is composed of a laser emitter 1041, a micro-motion laser box 1042, a bearing box 1043, a stick-slip inertial micro platform 1044, a Y-direction macro-motion adjustment box 1045 and an X-direction macro-motion adjustment box 1046, which are sequentially distributed and installed from the center to the outer layer.
As shown in fig. 2, the fixed leg 101 is composed of four fixed legs 1011 and four movable legs 1012, the four fixed legs 1011 are a section of cylinder, the upper end is hollow, the bottom end is fixed on the circumferential inclined plane of the fixed leg disc 1031, each fixed leg 1011 is internally packaged with a movable leg 1012, the movable leg 1012 is in a cylindrical rod shape, the tail end of the cylindrical rod of each movable leg 1012 is transversely provided with a fixed claw 10121, the fixed claws 10121 are cylindrical, the outside is sleeved with a rubber damage-proof sleeve, the movable legs 1012 are packaged in the fixed legs 1011, the four movable legs 1012 can move along the direction of the fixed legs 1011, and the four fixed claws 10121 can stretch through the four movable legs 1012 and are clamped and fixed on the driving shafts 3 with different diameters.
As shown in fig. 1 and 3, the diameter measuring rear wing 102 is composed of a rotating shaft sleeve 1021, a horizontal adjusting guide rail 1022, a vertical adjusting guide rail 1023 and two pairs of high-precision CCD measuring receivers 1024; the rotating shaft sleeve 1021 is two hollow semi-cylindrical shaft sleeves, and is installed on the connecting column 1032 through bolt connection, so that the connection between the diameter measurement rear wing 102 and the fixed laser receiving cylinder 103 is realized; horizontal adjusting guide rails 1022 are symmetrically arranged on two sides of the rotating shaft sleeve 1021, and horizontal square rails 10221 are arranged on the symmetrical positions of the side walls of the horizontal adjusting guide rails 1022; the vertical adjusting guide rail 1023 is similar to the horizontal adjusting guide rail 1022, a vertical square rail 10231 is arranged at the symmetrical position of the side wall, a sliding foot I102311 which can be installed in the horizontal adjusting guide rail 1022 and can move along the horizontal guide rail 1022 is also arranged on the bottom plane of the vertical adjusting guide rail 1023, the sliding foot I102311 is an L-shaped boss, and the horizontal direction of the bottom plane of the vertical adjusting guide rail 1023 is symmetrically arranged; the high-precision CCD measuring and receiving instrument 1024 is a pair of LED parallel light emitting and receiving devices, the bottom of the high-precision CCD measuring and receiving instrument is connected with a sliding bracket 10243, a sliding foot II 102411 is also arranged on the bottom surface below the sliding bracket 10243, and the sliding foot II 102411 can move in the vertical adjusting guide rail 1023.
As shown in fig. 4, the fixed laser receiving cylinder 103 is composed of a fixed foot disc 1031, a connecting post 1032, a laser receiving box 1033, a psd laser receiver 1034 and a rotating bracket 1035; one end surface of the fixed foot support disc 1031 is a circumferential inclined surface, the fixed foot support 101 is fixed on the fixed foot support disc, and the other end surface of the fixed foot support disc is a vertical cylindrical surface and is connected with the connecting column 1032; the laser receiving box 1033 is a cylindrical box body, the PSD laser receiver 1034 is fixedly arranged at the front end, and the PSD laser receiver 1034 receives the emitted laser to generate position information; the rotating support 1035 is two symmetrical rectangular supports, which are arranged in front of the PSD laser receiver 1034, the front end is semi-circular arc, and the center positions of the front parts of the two supports are symmetrically provided with a rotating center shaft 10351, on which the turnover laser adjusting box 104 is arranged.
As shown in fig. 5, 6 and 7, the reversible laser macro-micro adjustment box 104 is composed of a laser emitter 1041, a micro-motion laser box 1042, a housing box 1043, a stick-slip inertial micro-motion platform 1044, a y-direction macro-motion adjustment box 1045 and an X-direction macro-motion adjustment box 1046, wherein the micro-motion laser box 1042 is a hollow box body, no front side end face is provided, and a rear side end face is provided with a two-dimensional piezoelectric micro-motion platform 10421; the stick-slip inertial micro-motion platform 1044 is formed by connecting a flexible micro-motion device 10441 and a pre-tightening driving device 10442.
As shown in fig. 5, 8a and 8b, the two-dimensional piezoelectric micro-motion platform 10421 is composed of an X-directional piezoelectric ceramic driver 104211, a y-directional piezoelectric ceramic driver 104212, a flexible amplifying mechanism 104213, an X-directional micro-motion workbench 104214, a y-directional micro-motion workbench 104215 and a fixed frame 104216; the flexible amplifying mechanism 104213 is a straight-plate flexible hinge; the X-direction micro-motion stage 104214 works in series with the Y-direction micro-motion stage 104215.
As shown in fig. 9, the carrying case 1043 is a hollow case, the front end surface is provided with a circular laser hole 10431, the upper and lower top surfaces are not completely closed, a top surface frictionless baffle 10432 with a size of 3/4 of the transverse direction is provided, two side surface frictionless baffles 10433 are respectively connected to the left and right ends of the upper and lower top surfaces, the side surface frictionless baffles 10433 also do not completely close the side surfaces, and polytetrafluoroethylene coatings are coated on the inner surfaces of the top surface frictionless baffle 10432 and the side surface frictionless baffles 10433, so that friction can be effectively reduced; y-direction square guide rails 10434 are symmetrically arranged outside the vertical side walls of the whole containing box 1043, and the Y-direction square guide rails 10434 can be installed in the Y-direction sliding rails 10451 of the Y-direction macro adjustment box 1045.
As shown in fig. 10, the flexible micro-motion device 10441 is composed of a support plate 104411, a double-parallel-plate amplifying hinge 104412, a flexible micro-motion platform 104413 and a first piezoelectric stack 104414; the supporting plate 104411 is rectangular; the double parallel plate amplifying hinges 104412 are respectively arranged at the front end and the rear end of the flexible micro platform 104413, so that the displacement stroke can be effectively amplified; the flexible micro-motion platform 104413 is arranged at the central position of the supporting plate 104411, and the whole flexible micro-motion platform 104413 is arranged on the inner side wall of the bearing box 1043 through screws at four right-angle positions of the supporting plate 104411; the pre-tightening driving device 10442 comprises a parallelogram flexible hinge 104421, a second piezoelectric stack 104422 and a pre-tightening screw; the second piezoelectric stack 104422 is encapsulated in the parallelogram flexible hinge 104421 by a pre-tightening screw 104423; the top surface of the upper part of the parallelogram flexible hinge 104421 is provided with a pre-tightening contact 104424, the pre-tightening contact 104424 is tightly attached to the micro-motion laser box 1042, and when the second piezoelectric stack 104422 is electrified, the micro-motion laser box 1042 can be pre-tightened effectively, which is beneficial to the realization of stick-slip inertia; the pre-tightening driving device 10442 is connected to the flexible micro-motion platform 104413 of the flexible micro-motion device 10441 through a screw.
As shown in fig. 5, 6 and 7, the Y-direction macro motion adjusting box 1045 is a square box with four frames, Y-direction sliding rails 10451 are symmetrically arranged in two vertical side walls, two screw holes are respectively arranged on the upper and lower horizontal top surfaces, vertical calibrating screws 1047 are arranged, X-direction square guide rails 10452 are symmetrically arranged in the middle of the outer sides of the upper and lower horizontal top surfaces, and the X-direction square guide rails 10452 can be installed in the X-direction sliding rails 10461 of the X-direction macro motion adjusting box 1046; the X-direction macro motion adjusting box 1046 is also a square box with four frames, the inner sides of the upper and lower horizontal side walls are symmetrically provided with X-direction sliding rails 10461, the two vertical side walls are respectively provided with two screw holes, horizontal calibration screws 1048 are arranged, and the outer center symmetrical positions of the two vertical side walls are provided with rotation center holes 10462; the rotation center hole 10462 is installed in cooperation with the rotation center shaft 10351 of the rotation support 1035; the laser emitter 1041, the micro-motion laser box 1042, the housing box 1043, the y-direction macro-motion adjusting box 1045 and the X-direction macro-motion adjusting box 1046 are sequentially distributed outwards from the inner center of the reversible laser adjusting box 104; the tail part of the laser emitter 1041 is arranged on a Y-direction micro-motion workbench 104215 of the two-dimensional micro-motion platform 10421; the micro-laser casing 1042 is integrally enclosed in the housing casing 1043.
The center alignment is performed by taking the axis of the driving shaft 3 as a reference and adopting good linearity of laser, the axis is aligned rapidly and precisely by the diameter measurement of the rear wing 102, the reversible laser macro-micro adjustment box 104 is used for realizing bidirectional use of one laser emitter, and the high alignment of the shaft system of the mechanical driving shaft is ensured, so that the alignment precision is improved, and the damage to the machine is reduced.
A centering method based on a bidirectional alignment laser centering adjustment device comprises the following steps:
step one: as shown in fig. 1 and 12, a bidirectional alignment laser centering adjustment device 1 based on a driving shaft is realized by controlling a movable leg 1012 of a fixed leg 101 to stretch, so as to grasp and relax a fixed claw 10121, the device is mounted on a driving shaft 3 with a certain range, whether the device is firmly mounted is checked, and a level quadrant is used for checking whether the device is mounted horizontally.
Step two: the diameter measuring rear wing 102 is arranged on a connecting post 1032 of a fixed laser receiving cylinder 103, LED parallel light 4 which is not scattered is emitted by a high-precision CCD measuring instrument 10241 at one end of two groups of high-precision CCD measuring receivers 1024 on the connecting post, the LED parallel light 4 is received by a high-precision CCD receiving instrument 10422 at the other end, one part of the LED parallel light 4 irradiates on a shaft, the other part is directly received by the high-precision CCD receiving instrument 10422, the edge detection is carried out on the bright and dark area on the CCD, and the diameter d of the driving shaft 3 is determined by calculation 1 The whole diameter measuring rear wing 102 can be rotated by rotating the rotating shaft sleeve 1021 to perform multiple diameter measurement, and finally the average value is taken to calculate the output axle center O 1 The position of the PSD laser receiver 1034 is established by taking the horizontal direction of the plane at the front end of the PSD laser receiver 1034 as an X axis, the vertical direction as a Y axis and the direction of the plane vertical to the PSD laser receiver 1034 as a Z axis, and a first space rectangular coordinate system is generated, and a space position coordinate O relative to the first space rectangular coordinate system is generated 1 (x 1 ,y 1 ,z 1 )；
Step three: as shown in fig. 11, by rotating the reversible laser macro/micro adjustment box 104, the laser path is horizontally irradiated onto the PSD laser receiver 1034, and the laser path at this time is set as a first laser path, and the laser start point is set as a first laser pathThe emission point is a point where the first laser path is idealized as a first laser straight line L1, the point where the first laser path irradiates the PSD laser receiver 1034 is denoted as a, the first laser emission point is denoted as B, and the position coordinate of the point a formed by the laser path irradiating the PSD laser receiver 1034 with respect to the first space rectangular coordinate system is (x) 2 ,y 2 0), the position coordinate of the first laser emission point B relative to the first space rectangular coordinate system is (x) 3 ,y 3 ,z 3 ) Judging whether the first laser path is horizontal or not, and determining whether the first laser path is horizontal or not by the point A (x 2 ,y 2 ,0)、B(x 3 ,y 3 ,z 3 ) Calculating to obtain a first laser linear direction vector
Figure BDA0001417007710000121
Figure BDA0001417007710000122
If x 3 -x 2 Not equal to 0 or y 3 -y 2 Not equal to 0, judging that the first laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount required by the first laser light path, and setting the X-direction angle adjustment amount required by the first laser light path as theta 1 The required angle adjustment quantity in Y direction is theta 2 The projection of the first laser line L1 on the plane perpendicular to the Y axis and parallel to the XOZ plane at the point B and the projection on the plane perpendicular to the Y axis and parallel to the YOZ plane at the point B are respectively made to obtain:
Figure BDA0001417007710000123
Figure BDA0001417007710000124
from theta 1 、θ 2 The bidirectional variable laser emitting device is correspondingly adjusted to be horizontal.
As shown in fig. 12, the first laser beam path is adjusted to be horizontal, and the PSD laser receiver 10 is irradiated with the first laser beam path34 is C, the coordinates of which should be (x 3 ,y 3 0), C point coordinates and axis coordinates O 1 (x 1 ,y 1 ,z 1 ) Comparing, calculating and outputting the deviation between the first laser path and the position of the axle center and giving out the adjustment quantity delta X 1 、△Y 1 ：
△X 1 ＝x 3 -x 1 (1-4)
△Y 1 ＝y 3 -y 1 (1-5)
The Y-direction macro motion adjustment box 1045 and the X-direction macro motion adjustment box 1046 are respectively adjusted by a vertical calibration screw 1047 and a horizontal calibration screw 1048, so that the laser path emitted by the laser emitter 1041 is basically aligned with the axis coordinate, and the position coordinate D (X) of the first laser path irradiated on the PSD laser receiver 1034 is output again 4 ,y 4 0), generates a slight deviation and gives an adjustment quantity DeltaX 2 、△Y 2 ：
△X 2 ＝x 4 -x 1 (1-6)
△Y 2 ＝y 4 -y 1 (1-7)
And then, driving the micro-motion laser box 1042 by feedback adjustment, performing X, Y-direction displacement driving on the two-dimensional piezoelectric micro-motion platform 10421, introducing electric signals with different magnitudes into the X-direction piezoelectric ceramic driver 104211 and the Y-direction piezoelectric ceramic driver 104212 according to the micro-deviation value, further realizing high-precision displacement adjustment on the two-dimensional piezoelectric micro-motion platform 10421 with different magnitudes until the formed deviation value is within an allowable error range, and recording a first laser linear equation L1 at the moment:
Figure BDA0001417007710000131
the first laser straight line equation L1 at this time is recorded.
Step four: as shown in fig. 13, the reversible laser macro-micro adjustment boxes 104 to 180 are rotated 。 In the opposite direction, the horizontal direction of the plane at the front end of the PSD target 2 is taken as the X axis, the vertical direction is taken as the Y axis, and the PSD target 2 is positionedThe direction of the plane is Z axis, a second space rectangular coordinate system is established, the laser light path at the moment is set as a second laser light path, the laser starting point is a second laser emission point, the second laser light path is idealized into a second laser straight line L2, the point of the second laser light path irradiated onto the PSD target 2 is recorded as E, the second laser emission point is F, and the position coordinate of the point E formed by the laser light path irradiated onto the PSD target 2 relative to the second space rectangular coordinate system at the moment is (x) 5 ,y 5 0), the position coordinate of the second laser emission point F with respect to the second space rectangular coordinate system is (x) 6 ,y 6 ,z 6 ) Firstly, judging whether a second laser path emitted by the laser emitter 1041 irradiates the PSD target 2 horizontally, and obtaining a direction vector of a second laser line from a point E and a point F
Figure BDA0001417007710000132
Figure BDA0001417007710000133
If x 6 -x 5 Not equal to 0 or y 6 -y 5 Not equal to 0, judging that the second laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount of the second laser light path, and setting the X-direction required angle adjustment amount as theta 3 The required angle adjustment quantity in Y direction is theta 4 The projection of the first laser line L2 on the plane where the F point is perpendicular to the Y axis and parallel to the XOZ plane and the projection of the F point on the plane where the F point is perpendicular to the Y axis and parallel to the YOZ plane are respectively made, and it is possible to obtain:
Figure BDA0001417007710000134
Figure BDA0001417007710000135
from theta 3 、θ 4 The bidirectional variable laser emitting device is correspondingly adjusted to be horizontal.
As shown in FIG. 14The second laser path level is adjusted, and the point of the second laser path irradiated onto the PSD target 2 is denoted as G, and the position coordinate thereof with respect to the second space rectangular coordinate system is denoted as (x) 6 ,y 6 0), compare point G with point O 1 Calculating and outputting the deviation of the second laser path and the position of the axle center of the driving shaft and giving out an adjustment quantity delta X 3 、△Y 3 ：
△X 3 ＝x 6 -x 1 (1-12)
△Y 3 ＝y 6 -y 1 (1-13)
And then the Y-direction macro motion adjusting box 1045 and the X-direction macro motion adjusting box 1046 are respectively adjusted by a vertical adjusting screw 1047 and a horizontal adjusting screw 1048, so that the laser path emitted by the laser emitter 1041 is basically aligned with the axis coordinate O 1 And outputs again the position coordinates H (x) of the second laser beam path irradiated on the PSD target 2 at this time 7 ,y 7 0), generates a slight deviation and gives an adjustment quantity DeltaX 4 、△Y 4 ：
△X 4 ＝x 7 -x 1 (1-14)
△Y 4 ＝y 7 -y 1 (1-15)
And then the micro-motion laser box is driven by feedback adjustment, the two-dimensional piezoelectric micro-motion platform 10421 is driven by displacement in the X, Y direction, electric signals with different sizes are fed into the X-direction piezoelectric ceramic driver 104211 and the Y-direction piezoelectric ceramic driver 104212 according to the micro-deviation value, so that high-precision displacement adjustment of the two-dimensional piezoelectric micro-motion platform 10421 with different sizes is realized, the formed deviation value is within an allowable error range, and a second laser linear equation L2 at the moment is recorded.
Figure BDA0001417007710000141
Step five: in order to determine that the second laser light path is accurately centered with the first laser light path, at this time, driving the stick-slip inertial micro platform 1044, where the stick-slip inertial micro platform 1044 is composed of a flexible micro device 10441 and a pre-tightening driving device 10442; the pretightening driving device 10442 and the flexible micro-motion device 10442 are simultaneously fed with sawtooth waves with the same period, the second piezoelectric stack 104422 of the pretightening driving device 10442 is stretched and deformed, the parallelogram flexible hinge 104421 is deformed along with the elongation, the micro-motion laser box 1042 is pretightened in the vertical direction, the implementation of stick-slip inertia is facilitated, and meanwhile, certain displacement output is carried out in the horizontal direction; because of the lateral movement of the flexible micro-motion platform 104413, the pre-tightening driving device 10442 is driven to complete displacement output, at this moment, the starting point of the second laser light path advances for a certain distance, the position coordinates of the starting point of the second laser light path and the second laser linear equation L2 are determined again, the comparison is performed with L1, and the adjustment is repeated until the second laser linear equation L2 corresponding to the second laser light path at this moment meets the laser linear equation L1; based on the second laser path, the device can be used for subsequent shafting centering work.
Specifically, the micro-motion laser box 1042 is driven by feedback adjustment, the two-dimensional micro-motion piezoelectric platform 10421 is driven by displacement in X, Y direction, electric signals with different magnitudes are introduced into the X, Y-direction piezoelectric ceramic drivers 104211, 104212 according to the micro-deviation value, so as to realize high-precision displacement adjustment of the two-dimensional micro-motion platform 10421 with different magnitudes, the deviation value is Δd, and the longitudinal deformation amount of the piezoelectric ceramic is γ, if
γ＝γ-2(ζt 2 +ε) (2-1) wherein ζ and ε are ideal parameters of deformation between plates.
Since the piezoelectric charge is received and is indistinguishable from its electrical displacement, the relationship between the charge Q and the electrical displacement D is
Q= - ≡Dds (2-2) s is the area of the electrode surface of the piezoelectric element, the piezoelectric constant is ds, the piezoelectric is simplified into a capacitor, that is, the upper and lower planes are simplified into two polar plates of the capacitor, the relation between the voltage U between the piezoelectric and the electric field E generated by the piezoelectric accords with the general equation
Figure BDA0001417007710000151
The voltage generated by the piezoelectric sensor is integrated on the polar plate by the distance to obtain the voltage generated by the piezoelectric sensor:
U＝-∫Edz (2-3)
then the piezoelectric is related to the stress of the piezoelectric by the external excitation signal and the free capacitance of the piezoelectric by the formulas (2-2) and (2-3), the piezoelectric generates certain displacement when receiving the external excitation signal, and the charge can be obtained by performing triple integration on the piezoelectric equation:
Figure BDA0001417007710000152
The charge is differentiated in time to obtain piezoelectric input current, and the formula (2-4) is:
Figure BDA0001417007710000153
wherein the method comprises the steps of
Figure BDA0001417007710000154
For average stress +.>
Figure BDA0001417007710000155
Is a free capacitance.
Simplifying the step (2-4), and changing the step from the time domain to a function in a complex domain, so that the Laplace transformation of the external excitation signal of the input system is as follows:
I(S)＝d m ST(S)-C m V(S) (2-6)
the exciting signal is input to the piezoelectric ceramic to cause the piezoelectric ceramic to generate displacement, and after the angle deviation of the laser light path is adjusted to finish the large displacement adjustment, the final parallelism displacement deviation of the device is corrected to achieve the required precision.

Claims (10)

1. A bidirectional alignment laser centering adjusting device is characterized in that: the device consists of a fixed foot support, a diameter measurement rear wing, a fixed laser receiving cylinder and a turnover laser macro-micro adjustment box, wherein the diameter measurement rear wing is fixedly connected with the fixed laser receiving cylinder;
the fixed foot support consists of four fixed feet and four movable feet; the diameter measurement rear wing is connected with the fixed laser receiving cylinder through a rotating shaft sleeve, and a high-precision CCD measurement receiver is adjusted by a horizontal adjusting guide rail and a vertical adjusting guide rail arranged on the diameter measurement rear wing so as to realize the diameter measurement of the driving shaft by the diameter measurement rear wing; the rear part of the fixed laser receiving cylinder is provided with a fixed foot support disc, one side end surface is a circumferential inclined surface, the fixed foot support is fixed on the fixed foot support disc, the other side is a vertical cylindrical surface and is provided with a connecting column, one end of the connecting column is a section of cylinder, the other end of the connecting column is fixed on the vertical cylindrical surface of the fixed foot support disc, the other end of the connecting column is connected with a laser receiving box, the central part of the front end of the laser receiving box is provided with a PSD laser receiver, and meanwhile, the edge symmetrical part of the laser receiving box is also provided with a rotating bracket which can be used for installing the turnover laser macro-micro adjustment box; the turnover laser macro-micro adjusting box consists of a laser emitter, a micro-laser box, a bearing box, a stick-slip inertial micro platform, a Y-direction macro-motion adjusting box and an X-direction macro-motion adjusting box, which are sequentially distributed and installed from the center to the outer layer.
2. The bi-directional alignment laser centering adjustment device of claim 1, wherein: the fixed foot support constitute by four fixed feet and four movable feet, four fixed feet be one section cylinder, the upper end is cavity, the bottom mounting is in on the circumference inclined plane of fixed foot support disc, the inside encapsulation of every fixed foot has the movable foot, the movable foot be the cylinder shaft-like, at every the cylinder pole tail end of movable foot, transversely be equipped with the fixed jaw, the fixed jaw is cylindric, the outside cover has rubber loss prevention cover, the movable foot encapsulation in the fixed foot, just four movable feet can be along the fixed foot place orientation removal, four fixed jaws can stretch out and draw back through four movable feet, the centre gripping is fixed on the driving shaft that the diameter is different.
3. The bi-directional alignment laser centering adjustment device of claim 1, wherein: the diameter measurement rear wing consists of a rotating shaft sleeve, a horizontal adjustment guide rail, a vertical adjustment guide rail and two pairs of high-precision CCD measurement receivers; the rotating shaft sleeve is two hollow semi-cylindrical shaft sleeves which are connected and arranged on the connecting column through bolts, so that the connection between the diameter measurement rear wing and the fixed laser receiving cylinder is realized; horizontal adjusting guide rails are symmetrically arranged on two sides of the rotating shaft sleeve, and square rails are arranged on the symmetrical positions of the side walls of the horizontal adjusting guide rails; the vertical adjusting guide rail is similar to the horizontal adjusting guide rail, a square guide rail is arranged at the symmetrical position of the side wall, meanwhile, a sliding foot I which can be provided with the horizontal adjusting guide rail and can move along the direction of the horizontal guide rail is also arranged on the bottom plane of the vertical adjusting guide rail, the sliding foot I is an L-shaped boss, and the sliding foot I is symmetrically arranged in the horizontal direction of the bottom plane of the vertical adjusting guide rail; the high-precision CCD measuring and receiving instrument is a pair of LED parallel light emitting and receiving devices, the bottom of the high-precision CCD measuring and receiving instrument is connected with a sliding support, and a sliding foot II is also arranged on the bottom surface below the sliding support and can move in the vertical adjusting guide rail.
4. The bi-directional alignment laser centering adjustment device of claim 1, wherein: the fixed laser receiving cylinder consists of a fixed foot disc, a connecting column, a laser receiving box, a PSD laser receiver and a rotating bracket; one end surface of the fixed foot support disc is a circumferential inclined surface, the fixed foot support is fixed on the fixed foot support disc, and the other end surface of the fixed foot support disc is a vertical cylindrical surface and is connected with a connecting column; the laser receiving box is a cylindrical box body, the PSD laser receiver is fixedly arranged at the front end of the laser receiving box, and the PSD laser receiver receives laser emitted by the laser emitter to generate position information; the rotating support is two symmetrical rectangular supports, the rotating support is arranged in front of the PSD laser receiver, the front end of the rotating support is semicircular, rotating center shafts are symmetrically arranged at the center positions of the front parts of the two supports, and the turnover laser adjusting box is arranged on the rotating support.
5. The bi-directional alignment laser centering adjustment device of claim 1, wherein: the turnover laser macro-micro adjustment box consists of a laser emitter, a micro-laser box, a bearing box, a stick-slip inertial micro-motion platform, a Y-direction macro-motion adjustment box and an X-direction macro-motion adjustment box, wherein the micro-laser box is a hollow box body, no front side end face is arranged, and a two-dimensional piezoelectric micro-motion platform is arranged on the rear side end face; the stick-slip inertial micro-motion platform is formed by connecting a flexible micro-motion device and a pre-tightening driving device.
6. The bi-directional alignment laser centering adjustment device of claim 5, wherein: the two-dimensional piezoelectric micro-motion platform consists of an X-direction piezoelectric ceramic driver, a Y-direction piezoelectric ceramic driver, a flexible amplifying mechanism, an X-direction micro-motion workbench, a Y-direction micro-motion workbench and a fixed frame; the flexible amplifying mechanism is a straight-plate type flexible hinge; the X-direction micro-motion workbench and the Y-direction micro-motion workbench are connected in series for working.
7. The bi-directional alignment laser centering adjustment device of claim 5, wherein: the bearing box is a hollow box body, the front side end face is provided with a circular laser hole, the upper top surface and the lower top surface are not completely closed, the top surface with the size of 3/4 of the transverse top surface is provided with a friction-free baffle plate, the left end and the right end of the upper top surface and the lower top surface are respectively connected with a side surface friction-free baffle plate, the side surface friction-free baffle plates also do not completely seal the side surfaces, and polytetrafluoroethylene coatings are coated on the inner surfaces of the top surface friction-free baffle plates and the side surface friction-free baffle plates, so that friction can be effectively reduced; y-direction square guide rails are symmetrically arranged outside the vertical side wall of the whole bearing box, and can be installed in the Y-direction sliding rail of the Y-direction macro-movement adjusting box.
8. The bi-directional alignment laser centering adjustment device of claim 5, wherein: the flexible micro-motion device consists of a supporting plate, a double-parallel plate amplifying hinge, a flexible micro-motion platform and a piezoelectric stack; the supporting plate is rectangular; the double parallel plate amplifying hinges are respectively arranged at the front end and the rear end of the flexible micro-motion platform, so that the displacement stroke can be effectively amplified; the flexible micro-motion platform is arranged at the central position of the supporting plate, and the whole flexible micro-motion platform is arranged on the inner side wall of the bearing box through screws at four right-angle positions of the supporting plate; the pre-tightening driving device comprises a parallelogram flexible hinge, a piezoelectric stack and a pre-tightening screw; the piezoelectric stack is packaged in the parallelogram flexible hinge through a pre-tightening screw; the top surface of the upper part of the parallelogram flexible hinge is provided with a pre-tightening contact which is tightly attached to the micro-motion laser box, and when the piezoelectric stack in the pre-tightening contact is electrified, the micro-motion laser box can be pre-tightened effectively, so that the realization of stick-slip inertia is facilitated; the pre-tightening driving device is connected to the micro-motion workbench of the flexible micro-motion platform through screws.
9. The bi-directional alignment laser centering adjustment device of claim 5, wherein: the Y-direction macro motion adjusting box is a square box with four frames, Y-direction sliding tracks are symmetrically arranged in two vertical side walls, two screw holes are respectively arranged on the upper horizontal top surface and the lower horizontal top surface, vertical calibrating screws are arranged on the upper horizontal top surface and the lower horizontal top surface, X-direction square guide rails are symmetrically arranged in the middle of the outer sides of the upper horizontal top surface and the lower horizontal top surface, and the X-direction square guide rails can be installed in the X-direction sliding tracks of the X-direction macro motion adjusting box; the X-direction macro-movement adjusting box is also a square box with four frames, X-direction sliding tracks are symmetrically arranged on the inner sides of the upper horizontal side wall and the lower horizontal side wall, two screw holes are respectively arranged on the two vertical side walls, horizontal adjusting screws are arranged, and rotating center holes are arranged at the outer center symmetrical positions of the two vertical side walls; the rotating center hole is matched with a rotating center shaft on the rotating bracket; the laser transmitter, the micro-motion laser box, the bearing box, the Y-direction macro-motion adjusting box and the X-direction macro-motion adjusting box are sequentially distributed outwards from the inner center of the reversible laser adjusting box; the tail part of the laser transmitter is arranged on a Y-direction micro-motion workbench of the two-dimensional piezoelectric micro-motion platform; the micro-motion laser box is integrally packaged in the bearing box.
10. A centering method using the bidirectional alignment laser centering adjustment device as claimed in claim 1, comprising the steps of:
step one: the laser centering adjusting device for bidirectional alignment realizes simultaneous grasping and loosening of the fixed claws by controlling the movable leg in the fixed leg to stretch, is arranged on a driving shaft in a certain range, is used for checking whether the device is firmly arranged and is used for checking whether the device is horizontally arranged by a horizontal quadrant;
step two: the diameter measuring rear wing is arranged on a connecting column of a fixed laser receiving cylinder, LED parallel light which is not scattered is emitted by a high-precision CCD measuring instrument at one end of two groups of high-precision CCD measuring receivers on the connecting column, the other end of the high-precision CCD measuring receiver receives the LED parallel light, one part of the LED parallel light irradiates on a shaft, the other part of the LED parallel light is directly received by the high-precision CCD receiving instrument, edge detection is carried out on a bright and dark area on the CCD, and the diameter d of a driving shaft is determined through calculation 1 The whole diameter measuring rear wing can be rotated by rotating the rotating shaft sleeve to carry out multiple diameter measurement, and finally, the average value of the diameter measuring rear wing is taken to calculate the output axle center O 1 The position of the PSD laser receiver is set up by taking the horizontal direction of the plane at the front end of the PSD laser receiver as an X axis, the vertical direction as a Y axis and the direction perpendicular to the plane of the PSD laser receiver as a Z axis, and a first space rectangular coordinate system is established to generate a space position coordinate O relative to the first space rectangular coordinate system 1 (x 1 ,y 1 ,z 1 )；
Step three: by rotating the reversible laser macro-micro adjustment box, the laser light path is horizontally irradiated onto the PSD laser receiver, the laser light path at the moment is set to be a first laser light path, the laser starting point is a first laser emission point, the first laser light path is idealized into a first laser straight line L1, the point of the first laser light path irradiated onto the PSD laser receiver is recorded as A, the first laser emission point is recorded as B, and the position coordinate of the point A formed by the laser light path irradiated onto the PSD laser receiver relative to a first space rectangular coordinate system is (x) 2 ,y 2 0), the position coordinate of the first laser emission point B relative to the first space rectangular coordinate system is (x) 3 ,y 3 ,z 3 ) Judging whether the first laser path is horizontal or not, and determining whether the first laser path is horizontal or not by the point A (x 2 ,y 2 ,0)、B(x 3 ,y 3 ,z 3 ) Calculating to obtain a first laser linear direction vector
Figure QLYQS_1
Figure QLYQS_2
If x 3 -x 2 Not equal to 0 or y 3 -y 2 Not equal to 0, judging that the first laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount required by the first laser light path, and setting the X-direction angle adjustment amount required by the first laser light path as theta 1 The required angle adjustment quantity in Y direction is theta 2 The projection of the first laser line L1 on the plane perpendicular to the Y axis and parallel to the XOZ plane at the point B and the projection on the plane perpendicular to the Y axis and parallel to the YOZ plane at the point B are respectively made to obtain:
Figure QLYQS_3
Figure QLYQS_4
From theta 1 、θ 2 Correspondingly adjusting the bidirectional variable laser emission device to enable the bidirectional variable laser emission device to be horizontal;
the first laser path level is adjusted to set the point at which the first laser path impinges on the PSD laser receiver 1034 as C, and its coordinates should be (x) 3 ,y 3 0), C point coordinates and axis coordinates O 1 (x 1 ,y 1 ,z 1 ) Comparing, calculating and outputting the deviation between the first laser path and the position of the axle center and giving out the adjustment quantity delta X 1 、△Y 1 ：
△X 1 ＝x 3 -x 1 (1-4)
△Y 1 ＝y 3 -y 1 (1-5)
And then the Y-direction macro-movement adjusting box and the X-direction macro-movement adjusting box are respectively adjusted through a vertical adjusting screw and a horizontal adjusting screw, so that the laser path emitted by the laser emitter is realizedThe axis coordinate is basically centered, and the position coordinate D (x) of the first laser path irradiated on the PSD laser receiver is output again 4 ,y 4 0), generates a slight deviation and gives an adjustment quantity DeltaX 2 、△Y 2 ：
△X 2 ＝x 4 -x 1 (1-6)
△Y 2 ＝y 4 -y 1 (1-7)
And then, utilizing feedback to adjust and drive the micro-motion laser box, carrying out X, Y-direction displacement driving on the two-dimensional piezoelectric micro-motion platform, introducing electric signals with different sizes into the X-direction piezoelectric ceramic driver and the Y-direction piezoelectric ceramic driver according to the micro-deviation value, further realizing high-precision displacement adjustment on the two-dimensional piezoelectric micro-motion platform with different sizes until the formed deviation value is within an allowable error range, and recording a first laser linear equation L1 at the moment:
Figure QLYQS_5
Recording a first laser linear equation L1 at the moment;
step four: rotating the reversible laser macro-micro adjustment box to 180 degrees to the opposite direction, taking the horizontal direction of the plane at the front end of the PSD target as an X axis, taking the vertical direction as a Y axis, taking the direction vertical to the plane of the PSD target as a Z axis, establishing a second space rectangular coordinate system, taking a laser light path at the moment as a second laser light path, taking a laser starting point as a second laser emission point, idealizing the second laser light path as a second laser straight line L2, recording the point of the second laser light path irradiated onto the PSD target as E, taking the second laser emission point as F, and taking the position coordinate of the point E formed by irradiating the laser light path onto the PSD target relative to the second space rectangular coordinate system as (X) 5 ,y 5 0), the position coordinate of the second laser emission point F with respect to the second space rectangular coordinate system is (x) 6 ,y 6 ,z 6 ) Firstly, judging whether a second laser path emitted by a laser emitter irradiates the PSD target horizontally, and obtaining a direction vector of a second laser straight line by a point E and a point F
Figure QLYQS_6
Figure QLYQS_7
If x 6 -x 5 Not equal to 0 or y 6 -y 5 Not equal to 0, judging that the second laser light path is not horizontal to the Z axis, at the moment, respectively calculating the X-direction angle adjustment amount and the Y-direction angle adjustment amount of the second laser light path, and setting the X-direction required angle adjustment amount as theta 3 The required angle adjustment quantity in Y direction is theta 4 The projection of the first laser line L2 on the plane where the F point is perpendicular to the Y axis and parallel to the XOZ plane and the projection of the F point on the plane where the F point is perpendicular to the Y axis and parallel to the YOZ plane are respectively made, and it is possible to obtain:
Figure QLYQS_8
Figure QLYQS_9
from theta 3 、θ 4 Correspondingly adjusting the bidirectional variable laser emission device to enable the bidirectional variable laser emission device to be horizontal;
adjusting the level of the second laser path, and recording the point of the second laser path irradiated on the PSD target as G, wherein the position coordinate of the point relative to the second space rectangular coordinate system is (x) 6 ,y 6 0), compare point G with point O 1 Calculating and outputting the deviation of the second laser path and the position of the axle center of the driving shaft and giving out an adjustment quantity delta X 3 、△Y 3 ：
△X 3 ＝x 6 -x 1 (1-12)
△Y 3 ＝y 6 -y 1 (1-13)
And then the Y-direction macro-movement adjusting box and the X-direction macro-movement adjusting box are respectively adjusted by a vertical adjusting screw and a horizontal adjusting screw, so that the laser path emitted by the laser emitter is basically centeredAxis co-ordinates O 1 And outputs again the position coordinates H (x) of the second laser beam path irradiated on the PSD target at this time 7 ,y 7 0), generates a slight deviation and gives an adjustment quantity DeltaX 4 、△Y 4 ：
△X 4 ＝x 7 -x 1 (1-14)
△Y 4 ＝y 7 -y 1 (1-15)
Then, the micro-motion laser box is driven by feedback adjustment, X, Y-direction displacement driving is carried out on the two-dimensional piezoelectric micro-motion platform, electric signals with different sizes are introduced into the X-direction piezoelectric ceramic driver and the Y-direction piezoelectric ceramic driver according to the micro-deviation value, and further high-precision displacement adjustment of the two-dimensional piezoelectric micro-motion platform with different sizes is achieved until the formed deviation value is within an allowable error range, and a second laser linear equation L2 at the moment is recorded;
Figure QLYQS_10
Step five: in order to determine that the second laser light path is accurately centered with the first laser light path, at the moment, driving the stick-slip inertial micro-motion platform, wherein the stick-slip inertial micro-motion platform consists of a flexible micro-motion device and a pre-tightening driving device; simultaneously introducing sawtooth waves with the same period into the pre-tightening driving device and the flexible micro-motion device, wherein the second piezoelectric stack of the pre-tightening driving device stretches and deforms, the parallelogram flexible hinge deforms along with the elongation, the micro-motion laser box is pre-tightened in the vertical direction, the implementation of stick-slip inertia is facilitated, and meanwhile, certain displacement output is carried out in the horizontal direction; the flexible micro-motion platform transversely moves to drive the pre-tightening driving device to finish displacement output, at the moment, the starting point of the second laser light path advances for a certain distance, the position coordinates of the starting point of the second laser light path and a second laser linear equation L2 are determined again, the comparison is carried out with L1, and the second laser linear equation L2 corresponding to the second laser light path at the moment is repeatedly adjusted until the second laser linear equation L1 is met; based on the second laser path, the device can be used for subsequent shafting centering work.
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