CN107425041A - Touch display panel, device and manufacturing method - Google Patents

Touch display panel, device and manufacturing method Download PDF

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Publication number
CN107425041A
CN107425041A CN201710624567.XA CN201710624567A CN107425041A CN 107425041 A CN107425041 A CN 107425041A CN 201710624567 A CN201710624567 A CN 201710624567A CN 107425041 A CN107425041 A CN 107425041A
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Prior art keywords
touch
electrode
display panel
light
substrate
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CN201710624567.XA
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CN107425041B (en
Inventor
谢亮
杨康
曾洋
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Shanghai Tianma Microelectronics Co Ltd
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Shanghai Tianma Microelectronics Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/40OLEDs integrated with touch screens
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)
  • Image Input (AREA)

Abstract

The embodiment of the invention provides a touch display panel, a device and a manufacturing method, wherein the touch display panel comprises: the light-emitting unit array substrate comprises a substrate and a plurality of light-emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction are crossed; the packaging substrate is positioned on one side of the light-emitting units away from the substrate; the fingerprint identification unit is positioned on one side of the packaging substrate close to the light-emitting unit array substrate; the fingerprint identification unit comprises a thin film transistor and a shading layer; the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of the channel region of the thin film transistor on the packaging substrate; and the touch electrode is formed by grid-shaped metal wires and arranged on the same layer with the light shielding layer. The invention simplifies the process of the touch display panel and thins the touch display panel.

Description

Touch display panel, device and manufacturing method
Technical Field
The invention relates to the technical field of display, in particular to a touch display panel, a touch display device and a manufacturing method.
Background
An OLED (Organic Light Emitting Diode) display is a self-luminous display, and compared with an LCD (liquid crystal display), the OLED display does not need a backlight source, so that the OLED display is thinner and lighter, and has the advantages of high brightness, low power consumption, wide viewing angle, high response speed, wide use temperature range, and the like, and is increasingly applied to various high-performance display fields.
On the other hand, fingerprints are unique for every person. With the development of science and technology, a variety of display devices with fingerprint identification functions appear in the market, such as mobile phones, tablet computers, intelligent wearable devices and the like. Therefore, before the user operates the display device with the fingerprint identification function, the user only needs to touch the fingerprint identification unit of the display device with a finger to carry out authority identification, and the authority identification process is simplified.
However, the touch display panel integrating the touch function and the fingerprint recognition function is often thicker, and a process for manufacturing the touch electrode and a process for manufacturing the fingerprint sensor are required to be added on the basis of the existing display panel.
Disclosure of Invention
The invention provides a touch display panel, a touch display device and a manufacturing method, which are used for simplifying the process of the touch display panel and thinning the touch display panel.
In a first aspect, an embodiment of the present invention provides a touch display panel, including:
the light-emitting unit array substrate comprises a substrate and a plurality of light-emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction intersect;
the packaging substrate is positioned on one side, away from the substrate, of the plurality of light-emitting units;
the fingerprint identification unit is positioned on one side of the packaging substrate close to the light-emitting unit array substrate; the fingerprint identification unit comprises a thin film transistor and a shading layer; the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of the channel region of the thin film transistor on the packaging substrate;
and the touch electrode is formed by grid-shaped metal wires and arranged on the same layer with the light shielding layer.
In a second aspect, an embodiment of the present invention provides a display device, including the touch display panel of the first aspect.
In a third aspect, an embodiment of the present invention further provides a method for manufacturing the touch display panel in the first aspect, including:
providing a packaging substrate;
forming a light shielding layer, a touch electrode and a thin film transistor of a fingerprint identification unit on the packaging substrate, wherein the light shielding layer and the touch electrode are arranged on the same layer, and the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of a channel region of the thin film transistor on the packaging substrate;
forming a light emitting unit array substrate; the light emitting unit array substrate comprises a substrate and a plurality of light emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction intersect;
and packaging one side of the packaging substrate, on which the light shielding layer, the touch electrode and the thin film transistor of the fingerprint identification unit are formed, and one side of the light emitting unit array substrate, on which the plurality of light emitting units are formed.
The touch display panel comprises a light emitting array substrate and a packaging substrate, wherein the light emitting array substrate comprises a substrate and a plurality of light emitting units arranged on the substrate in a matrix manner, the touch display panel also comprises at least one fingerprint identification unit used for fingerprint detection, the fingerprint identification unit is positioned on one side, close to the light emitting unit array substrate, of the packaging substrate, the fingerprint identification unit comprises a thin film transistor and a light shielding layer used for shielding a channel region of the thin film transistor, the light shielding layer blocks light from irradiating the channel region of the thin film transistor, and the influence of a photogenerated carrier on the thin film transistor of the fingerprint identification unit is prevented, a touch electrode of the touch display panel is formed by latticed metal wiring and is arranged on the same layer with the light shielding layer, so that the process thinning process of simplifying the touch display panel and the.
Drawings
Fig. 1a is a schematic top view of a touch display panel according to an embodiment of the present invention;
FIG. 1b is an enlarged view of the structure taken along the area S1 in FIG. 1 a;
FIG. 1c is a schematic cross-sectional view along AA' of FIG. 1 b;
fig. 1d is a schematic cross-sectional structure diagram of another touch display panel according to an embodiment of the invention;
fig. 2 is a schematic top view of another touch display panel according to an embodiment of the present invention;
fig. 3 is a schematic top view of another touch display panel according to an embodiment of the present invention;
fig. 4 is a schematic top view of another touch display panel according to an embodiment of the present invention;
fig. 5 is a schematic cross-sectional view illustrating another touch display panel according to an embodiment of the invention;
fig. 6 is a schematic cross-sectional structure view of another touch display panel according to an embodiment of the invention;
fig. 7 is a schematic structural diagram of a display device according to an embodiment of the present invention;
fig. 8a to 8b are schematic diagrams illustrating a manufacturing process of a partial structure of a touch display panel according to an embodiment of the invention;
fig. 9a to 9c are schematic diagrams illustrating a manufacturing process of a partial structure of another touch display panel according to an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 1a is a schematic top view structure diagram of a touch display panel according to an embodiment of the present invention, fig. 1b is an enlarged structure diagram along an area S1 in fig. 1a, and fig. 1c is a schematic cross-sectional structure diagram along an AA' in fig. 1b, which are combined with fig. 1a to fig. 1c, and the touch display panel according to the embodiment of the present invention includes a light emitting unit array substrate 10, a package substrate 20, at least one fingerprint identification unit 30, and a touch electrode 40. The light emitting unit array substrate 10 includes a substrate 11 and a plurality of light emitting units 12 located on one side of the substrate 11, wherein the plurality of light emitting units 12 are arranged in an array along a first direction and a second direction parallel to a plane of the substrate 11, and the first direction and the second direction are crossed. The package substrate 20 is located at a side of the plurality of light emitting units 12 (not shown in fig. 1 c) facing away from the substrate 11. The at least one fingerprint identification unit 30 is located on one side of the package substrate 20 close to the light emitting unit array substrate 10, the fingerprint identification unit 30 includes a thin film transistor 36 and a light shielding layer 37, a vertical projection of the light shielding layer 37 on the package substrate 20 covers a vertical projection of a channel region (not shown in fig. 1 c) of the thin film transistor 36 on the package substrate 20, that is, the light shielding layer 37 and the thin film transistor 36 are arranged in a one-to-one correspondence, and blocks external light from irradiating into the channel region of the thin film transistor 36. In a direction in which the thin film transistor 36 is away from the package substrate 20, the thin film transistor 36 includes an active layer 361 (including a channel region of the thin film transistor), a gate insulating layer 362, a gate electrode 363, a source electrode 364, and a drain electrode 365 (the source electrode and the drain electrode are also referred to as a source drain electrode) in this order, and the light shielding layer 37 is located between the thin film transistor 36 and the package substrate 20. The thin film transistor shown in fig. 1c is a top-gate thin film transistor, and may be a bottom-gate thin film transistor in other embodiments. The touch electrode 40 is formed by a grid-shaped metal trace and is disposed on the same layer as the light shielding layer 37 of the fingerprint identification unit 30.
The touch display panel provided by the embodiment of the invention comprises a light emitting array substrate and a packaging substrate, wherein the light emitting array substrate comprises a substrate and a plurality of light emitting units arranged on the substrate in a matrix manner, the touch display panel also comprises at least one fingerprint identification unit for fingerprint detection, the fingerprint identification unit is positioned on one side of the packaging substrate close to the light emitting unit array substrate, the fingerprint identification unit comprises a thin film transistor and a light shielding layer for shielding a channel region of the thin film transistor, the light shielding layer blocks light from irradiating the channel region of the thin film transistor, the influence of a photo-generated carrier on the thin film transistor of the fingerprint identification unit is prevented, a touch electrode of the touch display panel is formed by grid-shaped metal routing, the touch electrode is set to be grid-shaped metal routing, on one hand, the impedance of the touch electrode can be reduced, the touch sensitivity is improved, on the, the grid-shaped metal wires have good ductility, and the bending resistance of the touch electrode can be further improved. And the touch electrode and the shading layer are arranged on the same layer, and the touch electrode and the shading layer can be formed in the same process by adopting the same material, so that the process of the touch display panel is simplified, and the touch display panel is thinner.
Fig. 1d is a schematic cross-sectional structure view of another touch display panel provided in an embodiment of the present invention, and is different from fig. 1c, in that the thin film transistor in fig. 1d is a thin film transistor with a bottom-gate structure, as shown in fig. 1d, along a direction in which the thin film transistor 36 is away from the package substrate 20, the thin film transistor 36 sequentially includes a gate electrode 363, a gate insulating layer 362, an active layer 361 (including a channel region of the thin film transistor), a source electrode 364, and a drain electrode 365 (the source electrode and the drain electrode are also referred to as a source drain electrode), and the light shielding layer 37 is located on a side of the active. The light-shielding layer 37 may be located between the active layer 361 and the source/drain of the thin film transistor 36 as shown in fig. 1d, or may be located at any position of the source/drain of the thin film transistor 36 away from the active layer 361, as long as the light-shielding layer 37 can block light from irradiating the channel region of the thin film transistor 36.
Optionally, the fingerprint identification unit 30 further includes a photodiode D and a storage capacitor C, the fingerprint identification unit 30 sequentially includes a common electrode 34, a second electrode 33, a PIN junction 32 and a first electrode 31 along a direction away from the substrate 11, the second electrode 33, the first electrode 31 and the PIN junction 32 form the photodiode D, the common electrode 34 is electrically connected to the first electrode 31, and the second electrode 33 and the common electrode 34 form the storage capacitor C. The second electrode 33 may be an anode of the photodiode D, the second electrode 33 may also be a first plate of the storage capacitor C, the first electrode 31 may be a cathode of the photodiode D, and the common electrode 34 may be a second plate of the storage capacitor. The fingerprint identification unit 30 may further include a bridge electrode 35, and the second electrode 33 is electrically connected to the drain electrode 365 of the thin film transistor 36 through the bridge electrode 35. It is understood that the source and drain electrodes of the thin film transistor may be used interchangeably. The first electrode 31 may be formed of an Indium Tin Oxide (ITO) material to form a transparent electrode, and the reflected light reflected by the finger fingerprint passes through the transparent electrode and then is irradiated onto the PIN junction 32, and the PIN junction 32 has a photosensitive characteristic and has a unidirectional conductivity. In the absence of light, the PIN junction 32 has a small saturation reverse leakage current, i.e., dark current, at which the photodiode D is turned off. When exposed to light, the saturation reverse leakage current of the PIN junction 32 increases substantially, forming a photocurrent.
Optionally, the touch display panel includes an opening region 101 and a non-opening region 102, each light emitting unit 12 includes a plurality of sub-pixel light emitting regions, and in fig. 1b, one light emitting unit 12 is exemplarily configured to include 3 sub-pixel light emitting regions, which may be a red sub-pixel light emitting region, a green sub-pixel light emitting region, and a blue sub-pixel light emitting region, and it should be understood that the embodiment of the present invention is not limited thereto. The opening region 101 is a region where the light emitting region of the sub-pixel is located, and the touch electrode 40 and/or the fingerprint identification unit 30 may be located in the non-opening region 102. In fig. 1b, the touch electrode 40 and the fingerprint identification unit 30 are exemplarily disposed in the non-opening region 102, so as to avoid reducing the opening ratio of the touch display panel and ensure that the touch display panel has sufficient light emitting brightness.
Optionally, the ratio of the overlapping area of the vertical projection of the latticed metal traces of the touch electrode 40 on the package substrate 20 to the vertical projection of the fingerprint identification unit 30 on the package substrate 20 to the area of the vertical projection of the fingerprint identification unit 30 on the package substrate 20 is less than 10%, which ensures that the latticed metal traces constituting the touch electrode 40 are disposed away from the fingerprint identification unit 30 as much as possible, so that the light reflected by the touch body has sufficient light intensity when reaching the fingerprint identification unit 30, thereby ensuring the accuracy of fingerprint identification.
Fig. 2 is a schematic top view structure diagram of another touch display panel according to an embodiment of the present invention, and different from fig. 1a, fig. 1a shows a specific distribution of grid-shaped metal traces constituting touch electrodes in the touch display panel, and fig. 2 shows an overall distribution of the touch electrodes, as shown in fig. 2, a touch electrode 40 includes a plurality of touch sensing electrodes 42 and a plurality of touch driving electrodes 41, the plurality of touch sensing electrodes 42 adjacent to each other in a same column (X direction) are connected, the plurality of touch driving electrodes 41 adjacent to each other in a same row (Y direction) are disconnected from each other, and the plurality of touch driving electrodes 41 in the same row (Y direction) are connected through a bridge structure 43. The touch driving electrodes 41 may be used for receiving touch driving signals, and the touch sensing electrodes 42 may be used for generating touch sensing signals. Mutual capacitance (coupling capacitance) can be formed at the adjacent places of the touch sensing electrode 42 and the touch driving electrode 41, when a human body contacts the display panel, a capacitance connected in series with the mutual capacitance is formed between the finger and the capacitive screen due to the grounding of the human body, and further the capacitance detected by the touch sensing electrode 42 is reduced and a corresponding touch sensing signal can be generated, so that a specific touch occurrence position can be determined through corresponding conversion. It is understood that, in an embodiment, the touch sensing electrodes may further include a plurality of touch sensing electrodes and a plurality of touch driving electrodes, adjacent touch driving electrodes in the same column are connected, adjacent touch sensing electrodes in the same row are disconnected from each other, and the touch sensing electrodes in the same row are connected through a bridge structure.
Alternatively, referring to fig. 1c, fig. 1d and fig. 2, the bridge-spanning structure may be disposed on the same layer as the source/drain or the gate of the thin film transistor, so that the bridge-spanning structure and the source/drain or the gate of the thin film transistor are formed in the same process using the same material, so as to further simplify the process of forming the touch display panel.
Alternatively, referring to fig. 1 a-2, the touch display panel includes touch sensing units 60, and the touch sensing units 60 are periodically arranged to form the touch electrode structure shown in fig. 2. In the embodiment of the present invention, the light emitting units 12 are arranged in one-to-one correspondence with the fingerprint identification unit 30, the distance (also referred to as pitch) between the geometric centers of two adjacent light emitting units 12 is p, the touch sensing unit 60 is a rectangle (shown by a dashed line frame in fig. 2), two right-angle sides of the rectangle respectively extend along the row direction (Y direction) and the column direction (X direction), the side lengths are a and b, a is greater than or equal to 3.5mm and less than or equal to 5.5mm, b is greater than or equal to 3.5mm and less than or equal to 5.5mm, the rectangle overlaps with the two touch sensing electrodes and the two touch driving electrodes, each side of the rectangle passes through the center of one touch sensing electrode or one touch driving electrode, and covers N light emitting units (not shown in fig. 2):for example, if a 5.5-inch touch display panel is taken as an example, and the distance p between the geometric centers of two adjacent light-emitting units 12 is 63.25 μm, N satisfies: 3062 and N is not less than 7561. When 3062 is less than or equal toWhen N is less than or equal to 7561, the size of the touch sensing unit (i.e., the size of the touch sensing electrode and the size of the touch driving electrode) is proper, if the size of the touch sensing unit is too small, too many touch electrode lines need to be arranged, and the redundant touch electrode lines widen the frame of the touch display panel; if the size of the touch sensing unit is too large, the detection of the touch position cannot be accurately realized, and the touch sensitivity of the touch display panel is reduced.
Fig. 3 is a schematic top view of another touch display panel according to an embodiment of the present invention, which is different from the same-layer mutual capacitance type touch display panel shown in fig. 2, in which fig. 3 shows a different-layer mutual capacitance type touch display panel, and as shown in fig. 3, the touch electrode 40 includes a plurality of touch sensing electrodes 41, that is, the plurality of touch sensing electrodes 41 are formed by grid-shaped metal traces and are disposed in the same layer as the light shielding layer in the fingerprint identification unit. The touch display panel further includes a plurality of touch driving electrodes 42 disposed in a different layer from the plurality of touch sensing electrodes 41, and the plurality of touch sensing electrodes 41 and the plurality of touch driving electrodes 42 are crossed in an insulated manner.
Specifically, the touch sensing electrodes 41 may be arranged along the X direction and extend along the Y direction, the touch driving electrodes 42 may be arranged along the Y direction and extend along the X direction, the X direction intersects the Y direction, and the touch sensing electrodes 41 are insulated from the touch driving electrodes 42. A mutual capacitance (coupling capacitance) may be formed where the touch sensing electrode 41 and the touch driving electrode 42 intersect, so as to enable detection of a touch position according to a variation amount of the coupling capacitance. It is understood that, in an embodiment, the touch electrode may further include a plurality of touch driving electrodes, the touch driving electrodes are disposed on the same layer as the light shielding layer in the fingerprint identification unit, the touch display panel further includes a plurality of touch sensing electrodes disposed on a different layer from the plurality of touch driving electrodes, and the plurality of touch sensing electrodes are cross-insulated from the plurality of touch driving electrodes.
Fig. 4 is a schematic top view of another touch display panel according to an embodiment of the present invention, which is different from the mutual capacitance type touch display panel shown in fig. 2 and 3 in that the touch display panel shown in fig. 4 is a self-capacitance type touch display panel, and as shown in fig. 4, the touch electrode 40 includes a plurality of self-capacitance type touch electrode blocks 400 located on the same layer, and the self-capacitance type touch electrode blocks 400 are arranged in an array. Each touch electrode block 400 forms a capacitor with, for example, a zero potential point ground, and when a finger touches or approaches the display panel, the capacitance value at the touch position increases, and thus, when performing touch detection, the position of the touch point can be determined by detecting the change in the corresponding capacitance value.
Optionally, referring to fig. 1a to 4, the touch display panel further includes a touch electrode line 50, and the touch electrode line 50 is electrically connected to the touch electrode 40. Specifically, in the self-contained touch display panel, the touch electrode line may be electrically connected to the touch electrode block; in the mutual capacitance type touch display panel, the touch electrode lines may be electrically connected to the touch driving electrodes and the touch sensing electrodes. The touch electrode line 50 may be disposed in the same layer as the gate electrode 363 of the thin film transistor 36, the source electrode 364 of the thin film transistor 36, the drain electrode 365 of the thin film transistor 36, the light shielding layer 37 or the common electrode 34, so as to further simplify the process of forming the touch display panel.
Fig. 5 is a schematic cross-sectional structure view of another touch display panel according to an embodiment of the present invention, as shown in fig. 5, a light emitting unit 12 is used as a light source of a fingerprint identification unit 30, and light emitted by the light emitting unit 12 (the direction of the arrow in the figure indicates the light propagation direction) is reflected by a touch subject (i.e., a finger fingerprint) to form reflected light to enter the fingerprint identification unit 30 for fingerprint identification.
Fig. 6 is a schematic cross-sectional structure view of another touch display panel according to an embodiment of the present invention, as shown in fig. 6, the touch display panel further includes a fingerprint identification light source 70, the fingerprint identification light source 70 is located on a side surface of the substrate 11 away from the fingerprint identification unit 30, and light emitted by the fingerprint identification light source 70 (a direction of an arrow in the figure indicates a light propagation direction) is reflected by a touch subject (i.e., a finger fingerprint) to form reflected light to enter the fingerprint identification unit 30 for performing fingerprint identification.
On the basis of the foregoing embodiments, optionally, when performing fingerprint identification and touch position detection operations, the touch electrode and the fingerprint identification unit are driven to work simultaneously, so as to reduce the time occupied by the fingerprint identification and touch position detection operations. Or, the touch control electrode and the fingerprint identification unit can be driven to work in a time-sharing manner when fingerprint identification and touch control position detection operations are performed. The fingerprint recognition and touch position detection operations may be set according to specific products, which is not limited in the present invention.
Fig. 7 is a schematic structural diagram of a display device according to an embodiment of the present invention, and as shown in fig. 7, a display device 100 according to an embodiment of the present invention includes a touch display panel according to any embodiment of the present invention, which may be a mobile phone as shown in fig. 7, or a computer, a television, an intelligent wearable device, and the like, and this embodiment is not particularly limited thereto.
The embodiment of the invention also provides a manufacturing method of the touch display panel, which is used for manufacturing the touch display panel and comprises the following steps:
providing a packaging substrate;
forming a light shielding layer, a touch electrode and a thin film transistor of a fingerprint identification unit on a packaging substrate, wherein the light shielding layer and the touch electrode are arranged on the same layer, and the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of a channel region of the thin film transistor on the packaging substrate;
forming a light emitting unit array substrate; the light-emitting unit array substrate comprises a substrate and a plurality of light-emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction are crossed;
and packaging one side of the thin film transistor on which the light shielding layer, the touch electrode and the fingerprint identification unit are formed on the packaging substrate and one side of the light emitting unit array substrate on which the plurality of light emitting units are formed.
In the manufacturing method of the touch display panel provided by the embodiment of the invention, the touch electrode of the touch display panel is formed by the latticed metal wires, and the touch electrode is set as the latticed metal wires, so that on one hand, the impedance of the touch electrode can be reduced, and the touch sensitivity can be improved, on the other hand, because the touch electrode is the latticed metal wires, the ductility of the latticed metal wires is good, and the bending resistance of the touch electrode can be further improved. And the touch electrode and the shading layer are arranged on the same layer, and the touch electrode and the shading layer can be formed in the same process by adopting the same material, so that the process of the touch display panel is simplified, and the touch display panel is thinner.
Fig. 8a to 8b are schematic diagrams illustrating a manufacturing process of a partial structure of a touch display panel according to an embodiment of the present invention, and referring to fig. 8a to 8b, the step of forming a light shielding layer, a touch electrode, and a thin film transistor of a fingerprint identification unit on a package substrate may include:
forming a light-shielding layer 37 and a touch electrode 40 on the package substrate 20;
an active layer 361, a gate insulating layer 362, a gate electrode 363, and a source electrode 364 and a drain electrode 365 (the source electrode and the drain electrode are collectively referred to as a source drain electrode) of the thin film transistor 36 are formed in this order.
Fig. 9a to 9c are schematic diagrams illustrating a manufacturing process of a partial structure of another touch display panel according to an embodiment of the present invention, and referring to fig. 9a to 9c, the step of forming a light shielding layer, a touch electrode, and a thin film transistor of a fingerprint identification unit on a package substrate may include:
a gate electrode 363, a gate insulating layer 362, and an active layer 361 of the thin film transistor 36 are formed in this order on the package substrate 20;
forming a light shielding layer 37 and a touch electrode 40;
source 364 and drain 365 (collectively referred to as source and drain) of thin-film transistor 36 are formed.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (19)

1. A touch display panel, comprising:
the light-emitting unit array substrate comprises a substrate and a plurality of light-emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction intersect;
the packaging substrate is positioned on one side, away from the substrate, of the plurality of light-emitting units;
the fingerprint identification unit is positioned on one side of the packaging substrate close to the light-emitting unit array substrate; the fingerprint identification unit comprises a thin film transistor and a shading layer; the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of the channel region of the thin film transistor on the packaging substrate;
and the touch electrode is formed by grid-shaped metal wires and arranged on the same layer with the light shielding layer.
2. The touch display panel of claim 1,
the touch display panel comprises an opening region and a non-opening region, each light-emitting unit comprises a plurality of sub-pixel light-emitting regions, and the opening region is a region where the sub-pixel light-emitting regions are located; the touch electrode and/or the fingerprint identification unit are/is positioned in the non-opening area.
3. The touch display panel according to claim 1, wherein a ratio of an overlapping area of a vertical projection of the latticed metal traces on the package substrate to a vertical projection of the fingerprint identification unit on the package substrate to an area of a vertical projection of the fingerprint identification unit on the package substrate is less than 10%.
4. The touch display panel according to claim 1, wherein the touch electrodes comprise a plurality of touch sensing electrodes and a plurality of touch driving electrodes;
the adjacent touch sensing electrodes in the same column are connected; the adjacent touch driving electrodes in the same row are mutually disconnected, and the touch driving electrodes in the same row are connected through a bridge-crossing structure; or,
the adjacent touch drive electrodes in the same column are connected; the adjacent touch sensing electrodes in the same row are disconnected from each other, and the touch sensing electrodes in the same row are connected through a bridge-crossing structure.
5. The touch display panel according to claim 4, wherein the bridge structure is disposed on the same layer as a source/drain or a gate of the thin film transistor.
6. The touch display panel according to claim 4, wherein the touch display panel includes touch sensing units, the light emitting units correspond to the fingerprint identification units one by one, the distance between the geometric centers of two adjacent light emitting units is p, the touch sensing units are rectangles, two right-angle sides of each rectangle extend along the row direction and the column direction respectively, the side lengths are a and b, a is greater than or equal to 3.5mm and less than or equal to 5.5mm, b is greater than or equal to 3.5mm and less than or equal to 5.5mm, the rectangle overlaps the two touch sensing electrodes and the two touch driving electrodes, each side of the rectangle passes through the center of one touch sensing electrode or one touch driving electrode, and the rectangle covers N light emitting units, where N satisfies:
7. the touch display panel according to claim 1, wherein the touch electrode comprises a plurality of touch sensing electrodes, and the touch display panel further comprises a plurality of touch driving electrodes disposed in a different layer from the plurality of touch sensing electrodes; or,
the touch control electrode comprises a plurality of touch control driving electrodes, and the touch control display panel further comprises a plurality of touch control sensing electrodes which are arranged in a different layer with the plurality of touch control driving electrodes;
the touch sensing electrodes are insulated and crossed with the touch driving electrodes.
8. The touch display panel according to claim 1, wherein the touch electrode comprises a plurality of self-capacitance touch electrode blocks located on the same layer, and the plurality of self-capacitance touch electrode blocks are arranged in an array.
9. The touch display panel according to claim 1, wherein the thin film transistor comprises an active layer, a gate insulating layer, a gate electrode, and a source drain electrode in this order along a direction in which the thin film transistor is away from the package substrate;
the light shielding layer is located between the thin film transistor and the packaging substrate.
10. The touch display panel according to claim 1, wherein the thin film transistor comprises a gate electrode, a gate insulating layer, an active layer and a source drain electrode in sequence along a direction in which the thin film transistor is away from the package substrate;
the light shielding layer is located on one side, far away from the packaging substrate, of the active layer.
11. The touch display panel according to claim 1, wherein the light emitting unit serves as a light source of the fingerprint identification unit;
the light emitted by the light-emitting unit is reflected by the touch main body to form reflected light which is incident to the fingerprint identification unit so as to carry out fingerprint identification.
12. The touch display panel according to claim 1, further comprising a fingerprint identification light source located on a side of the substrate away from the fingerprint identification unit;
the light emitted by the fingerprint identification light source is reflected by the touch main body to form reflected light to enter the fingerprint identification unit so as to carry out fingerprint identification.
13. The touch display panel according to claim 1, wherein the fingerprint identification unit further comprises a photodiode and a storage capacitor, and the fingerprint identification unit sequentially comprises a common electrode, a second electrode, a PIN junction and a first electrode along a direction away from the substrate base plate; the second electrode, the first electrode and the PIN structure form the photosensitive diode; the common electrode is electrically connected with the first electrode, and the second electrode and the common electrode form the storage capacitor.
14. The touch display panel according to claim 13, further comprising a touch electrode line, the touch electrode line being disposed in the same layer as the gate of the thin film transistor, the source and drain of the thin film transistor, the light shielding layer, or the common electrode.
15. The touch display panel of claim 1,
when fingerprint identification and touch position detection operations are carried out, the touch electrode and the fingerprint identification unit are driven to work simultaneously; or,
when fingerprint identification and touch position detection operations are carried out, the touch electrode and the fingerprint identification unit are driven to work in a time-sharing mode.
16. A display device comprising the touch display panel according to any one of claims 1 to 15.
17. A method of manufacturing the touch display panel according to any one of claims 1 to 15, comprising:
providing a packaging substrate;
forming a light shielding layer, a touch electrode and a thin film transistor of a fingerprint identification unit on the packaging substrate, wherein the light shielding layer and the touch electrode are arranged on the same layer, and the vertical projection of the light shielding layer on the packaging substrate covers the vertical projection of a channel region of the thin film transistor on the packaging substrate;
forming a light emitting unit array substrate; the light emitting unit array substrate comprises a substrate and a plurality of light emitting units positioned on one side of the substrate; the plurality of light-emitting units are arranged in an array along a first direction and a second direction which are parallel to the plane of the substrate base plate; the first direction and the second direction intersect;
and packaging one side of the packaging substrate, on which the light shielding layer, the touch electrode and the thin film transistor of the fingerprint identification unit are formed, and one side of the light emitting unit array substrate, on which the plurality of light emitting units are formed.
18. The method of claim 17, wherein forming a light shielding layer, a touch electrode, and a thin film transistor of a fingerprint identification unit on the package substrate comprises:
forming the light shielding layer and the touch electrode on the packaging substrate;
and sequentially forming an active layer, a gate insulating layer, a gate and a source drain of the thin film transistor.
19. The method of claim 17, wherein forming a light shielding layer, a touch electrode, and a thin film transistor of a fingerprint identification unit on the package substrate comprises:
sequentially forming a gate electrode, a gate insulating layer and an active layer of the thin film transistor on the package substrate;
forming the light shielding layer and the touch electrode;
and forming a source drain electrode of the thin film transistor.
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