CN107405648B - 一种包括声学窗口层的cmut阵列 - Google Patents

一种包括声学窗口层的cmut阵列 Download PDF

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Publication number
CN107405648B
CN107405648B CN201680013262.9A CN201680013262A CN107405648B CN 107405648 B CN107405648 B CN 107405648B CN 201680013262 A CN201680013262 A CN 201680013262A CN 107405648 B CN107405648 B CN 107405648B
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China
Prior art keywords
layer
acoustic
particles
ultrasound array
cmut
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Expired - Fee Related
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CN201680013262.9A
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English (en)
Chinese (zh)
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CN107405648A (zh
Inventor
L·J·A·M·贝克尔斯
F·J·G·哈肯斯
P·迪克森
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/02Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521Constructional features

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
CN201680013262.9A 2015-03-03 2016-02-23 一种包括声学窗口层的cmut阵列 Expired - Fee Related CN107405648B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15157276 2015-03-03
EP15157276.5 2015-03-03
PCT/EP2016/053799 WO2016139087A1 (en) 2015-03-03 2016-02-23 A cmut array comprising an acoustic window layer

Publications (2)

Publication Number Publication Date
CN107405648A CN107405648A (zh) 2017-11-28
CN107405648B true CN107405648B (zh) 2021-08-10

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CN201680013262.9A Expired - Fee Related CN107405648B (zh) 2015-03-03 2016-02-23 一种包括声学窗口层的cmut阵列

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Country Link
US (1) US11358174B2 (enExample)
EP (1) EP3265244A1 (enExample)
JP (1) JP2018512766A (enExample)
CN (1) CN107405648B (enExample)
WO (1) WO2016139087A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108430651B (zh) * 2015-12-18 2020-09-01 皇家飞利浦有限公司 用于超声阵列的声学透镜
WO2018041658A2 (en) * 2016-08-30 2018-03-08 Koninklijke Philips N.V. Imaging device with ultrasound transducer array
RU2742967C2 (ru) * 2016-11-15 2021-02-12 Конинклейке Филипс Н.В. Формирование контакта ультразвукового устройства
RU2756022C2 (ru) * 2016-11-22 2021-09-24 Конинклейке Филипс Н.В. Ультразвуковое устройство и акустический компонент для использования в таком устройстве
WO2018100015A1 (en) * 2016-12-01 2018-06-07 Koninklijke Philips N.V. Cmut probe, system and method
WO2019173694A1 (en) 2018-03-09 2019-09-12 Butterfly Network, Inc. Ultrasound transducer devices and methods for fabricating ultrasound transducer devices
EP3590437A1 (en) * 2018-07-02 2020-01-08 Koninklijke Philips N.V. Acoustically transparent window for intraluminal ultrasound imaging device
WO2023220042A1 (en) * 2022-05-09 2023-11-16 Bfly Operations, Inc. Acoustic windows with limited acoustic attenuation for ultrasound probes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328697B1 (en) * 2000-06-15 2001-12-11 Atl Ultrasound, Inc. Capacitive micromachined ultrasonic transducers with improved capacitive response
CN1527414A (zh) * 2003-03-06 2004-09-08 ͨ�õ�����˾ 使用显微机械加工的超声换能器的镶嵌式阵列
CN101513352A (zh) * 2008-02-18 2009-08-26 株式会社东芝 二维阵列超声波探头
CN104226577A (zh) * 2013-03-15 2014-12-24 富士胶片索诺声公司 用于微加工的超声换能器的声学镜片

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2585944B1 (fr) * 1985-08-12 1988-07-08 Alvar Electronic Sa Sonde a ultrasons implantable et son pro cede de fabrication
EP0239999B1 (en) 1986-04-02 1993-10-13 Matsushita Electric Industrial Co., Ltd. Ultrasonic probe having an ultrasonic propagation medium
JPS62233149A (ja) 1986-04-02 1987-10-13 松下電器産業株式会社 超音波探触子
EP0256438A1 (de) * 1986-08-18 1988-02-24 Siemens Aktiengesellschaft Sensor für die Erfassung von Stosswellenimpulsen
US5318035A (en) * 1991-12-02 1994-06-07 Nitto Denko Corporation Crosslinked molding, sound medium using it and ultrasonic coupler
US5423220A (en) * 1993-01-29 1995-06-13 Parallel Design Ultrasonic transducer array and manufacturing method thereof
IT1264623B1 (it) * 1993-06-16 1996-10-04 Enichem Spa (co) polimero vinil aromatico rinforzato con gomma
US5355048A (en) * 1993-07-21 1994-10-11 Fsi International, Inc. Megasonic transducer for cleaning substrate surfaces
JP2000001652A (ja) * 1998-06-12 2000-01-07 Tomoegawa Paper Co Ltd 接着テープ
DE60138247D1 (de) * 2000-07-13 2009-05-20 Panasonic Corp Akustische Linse und zugehöriges Herstellungsverfahren
JP3655860B2 (ja) * 2001-09-27 2005-06-02 アロカ株式会社 超音波探触子
JP2003169806A (ja) * 2001-12-05 2003-06-17 Olympus Optical Co Ltd 超音波探触子
US6599249B1 (en) * 2002-02-14 2003-07-29 Koninklijke Philips Electronics N.V. Intraoperative ultrasound probe with an integrated acoustic standoff
US6831876B1 (en) * 2003-07-09 2004-12-14 Goodrich Corporation Acoustic window
US20050113700A1 (en) * 2003-11-26 2005-05-26 Koji Yanagihara Ultrasonic probe
US7588540B2 (en) * 2005-04-08 2009-09-15 Vermon Ultrasonic probe for scanning a volume
US7658967B2 (en) * 2005-08-25 2010-02-09 Pittsburgh Glass Works, Llc Methods for applying sound dampening and/or aesthetic coatings and articles made thereby
WO2007046180A1 (ja) * 2005-10-18 2007-04-26 Hitachi, Ltd. 超音波トランスデューサ、超音波探触子および超音波撮像装置
US7750536B2 (en) 2006-03-02 2010-07-06 Visualsonics Inc. High frequency ultrasonic transducer and matching layer comprising cyanoacrylate
US7902294B2 (en) * 2008-03-28 2011-03-08 General Electric Company Silicone rubber compositions comprising bismuth oxide and articles made therefrom
KR20110137576A (ko) * 2010-06-17 2011-12-23 삼성전기주식회사 투명전극용 전도성 고분자 조성물 및 이를 이용한 터치패널
JP5881582B2 (ja) * 2012-02-07 2016-03-09 富士フイルム株式会社 超音波探触子の製造方法
US9221077B2 (en) 2012-05-09 2015-12-29 Kolo Technologies, Inc. CMUT assembly with acoustic window
US9655252B2 (en) * 2012-06-01 2017-05-16 Suzhou Nuofei Nano Science And Technology Co., Ltd. Low haze transparent conductive electrodes and method of making the same
US20150321026A1 (en) * 2012-06-07 2015-11-12 Ulthera, Inc. Devices and methods for ultrasound focal depth control
KR20140070005A (ko) * 2012-11-30 2014-06-10 코닝정밀소재 주식회사 투명 도전성 기재 및 이를 포함하는 터치 패널
JP6011369B2 (ja) 2013-01-30 2016-10-19 日本ゼオン株式会社 音響媒体
JP6149425B2 (ja) * 2013-03-01 2017-06-21 コニカミノルタ株式会社 超音波探触子の製造方法
CN204017181U (zh) * 2013-03-08 2014-12-17 奥赛拉公司 美学成像与处理系统、多焦点处理系统和执行美容过程的系统
WO2015095721A1 (en) * 2013-12-20 2015-06-25 Fujifilm Sonosite, Inc. High frequency ultrasound transducers
KR102465947B1 (ko) * 2014-04-18 2022-11-10 얼테라, 인크 밴드 트랜스듀서 초음파 치료
US10572707B2 (en) * 2016-02-09 2020-02-25 Synaptics Incorporated Transparent fingerprint sensor pattern
KR20230149878A (ko) * 2016-08-16 2023-10-27 얼테라, 인크 이미징 오정렬을 감소시키도록 구성된 초음파 이미징 시스템, 초음파 이미징 모듈 및 이미징 오정렬을 감소시키는 방법
TW202529848A (zh) * 2018-01-26 2025-08-01 美商奧賽拉公司 用於多個維度中的同時多聚焦超音治療的系統和方法
WO2019164836A1 (en) * 2018-02-20 2019-08-29 Ulthera, Inc. Systems and methods for combined cosmetic treatment of cellulite with ultrasound

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328697B1 (en) * 2000-06-15 2001-12-11 Atl Ultrasound, Inc. Capacitive micromachined ultrasonic transducers with improved capacitive response
CN1527414A (zh) * 2003-03-06 2004-09-08 ͨ�õ�����˾ 使用显微机械加工的超声换能器的镶嵌式阵列
CN101513352A (zh) * 2008-02-18 2009-08-26 株式会社东芝 二维阵列超声波探头
CN104226577A (zh) * 2013-03-15 2014-12-24 富士胶片索诺声公司 用于微加工的超声换能器的声学镜片

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JP2018512766A (ja) 2018-05-17
WO2016139087A1 (en) 2016-09-09
EP3265244A1 (en) 2018-01-10
US11358174B2 (en) 2022-06-14
US20180065148A1 (en) 2018-03-08
CN107405648A (zh) 2017-11-28

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