CN107400925B - A kind of monocrystalline silicon growing furnace electrode lifting mechanism - Google Patents
A kind of monocrystalline silicon growing furnace electrode lifting mechanism Download PDFInfo
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- CN107400925B CN107400925B CN201710651623.9A CN201710651623A CN107400925B CN 107400925 B CN107400925 B CN 107400925B CN 201710651623 A CN201710651623 A CN 201710651623A CN 107400925 B CN107400925 B CN 107400925B
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- electrode
- auxiliary electrode
- auxiliary
- main
- growing furnace
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Abstract
The present invention relates to single crystal furnace equipment technical fields, specifically a kind of monocrystalline silicon growing furnace electrode lifting mechanism, including the first main electrode, the first auxiliary electrode, the second main electrode, the second auxiliary electrode, the first auxiliary electrode and the second auxiliary electrode this six electrode units being mounted on single crystal growing furnace furnace hearth plate, wherein: the first main electrode and the first auxiliary electrode link to form first pair of electrode group by the first connecting shaft, and first main electrode connect the first side heater with the first auxiliary electrode jointly.The invention has the advantages that the side heater and bottom heater of thermal field can change with bushing position and be changed, temperature of thermal field is more balanced, is conducive to crystal growth, promotes the quality of growth crystal bar.
Description
Technical field
The present invention relates to single crystal furnace equipment technical field, specifically a kind of monocrystalline silicon growing furnace electrode lifting mechanism.
Background technique
The main electrode and auxiliary electrode of existing mainstream monocrystalline silicon growing furnace are fixed on furnace hearth plate, can not be gone up and down, therefore
The side heater being connected with main electrode, the bottom heater being connected with auxiliary electrode are fixed.When long brilliant, bushing position
It can be gradually increasing, change with heater locations, cause thermal field unbalanced, influence long brilliant and production crystal bar quality.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide one kind can operate respectively two groups of side heaters and
The monocrystalline silicon growing furnace electrode lifting mechanism of one bottom heater progress independent-lifting heating.
In order to achieve the above object, the present invention provides a kind of monocrystalline silicon growing furnace electrode lifting mechanisms, including are mounted on
The first main electrode, the first auxiliary electrode, the second main electrode, the second auxiliary electrode, the first auxiliary electrode on single crystal growing furnace furnace hearth plate and
This six electrode units of second auxiliary electrode, in which:
First main electrode and the first auxiliary electrode link to form first pair of electrode group by the first connecting shaft, and described first is main
Electrode connect the first side heater with the first auxiliary electrode jointly；
Second main electrode and the second auxiliary electrode link to form second pair of electrode group by the second connecting shaft, and described second is main
Electrode connect the second side heater with the second auxiliary electrode jointly；
First auxiliary electrode and the second auxiliary electrode form third to electrode group by flexible shaft linkage, first auxiliary electrode and the
Two auxiliary electrode common contiguous base heaters；
First main electrode, the second main electrode, the first auxiliary electrode and the second auxiliary electrode are respectively communicated with power supply, and described first
Main electrode, the second main electrode and the first auxiliary electrode are provided with power unit；
Each electrode unit all have the pedestal that one is mounted on single crystal growing furnace furnace hearth plate and linear guide, rise fall of electrodes frame,
Cable connection plate, elevator, welding bellows, electrode, insulation sleeve, cooling water pipe and electrode sleeve, the pedestal are vertically pacified upwards
Linear guide is filled, rise fall of electrodes frame is mounted on the sliding block of the linear guide, installs electrode sleeve on the rise fall of electrodes frame, should
Insulation sleeve and electrode are successively arranged in electrode sleeve, the axis line location of the electrode is equipped with cooling water pipe, and the water pipe is connected to four-way
Connector, the bottom of the electrode are equipped with cable connection plate, and the electrode positioning mechanism connects crane, the electrode positioning mechanism connecting welding
One end of bellows, the other end of the welding bellows are fixed on the single crystal growing furnace furnace hearth plate；
The power unit includes servo motor, retarder and gear-box, and motor base is installed on the pedestal, described to watch
It takes motor to be mounted on the motor base, the servo motor is sequentially connected first shaft coupling, retarder, second shaft coupling and gear
Case, the gear-box are fixedly connected with the pedestal.
The servo motor of power unit connects retarder by first shaft coupling, then is connected to gear by second shaft coupling
Case is finally transferred to the elevator of electrode unit, realizes the lifting of six electrode units.First main electrode and the second master
Electrode can be gone up and down, and realize that the side heater being connected with the two main electrodes can be gone up and down, first main electrode and second
Main electrode is controlled by servo motor, and independent-lifting may be implemented, can also synchronization lifting；Each main electrode is equipped with auxiliary electricity
Pole, to Auxiliary support side heater stablize go up and down, in addition also be used as the backup electrode of main electrode, main electrode and its with fit
It is linked between auxiliary electrode with connecting shaft, realizes synchronization lifting.When first side heater and the second side heater
When being an integral structure, first main electrode, the first auxiliary electrode, the second main electrode and the second auxiliary electrode are installed jointly
On the first side heater and the second side heater of integral type, drive jointly the integral type the first side heater and
Second side heater is gone up and down.Auxiliary electrode can be gone up and down, and realize that the bottom heater being connected with auxiliary electrode can be gone up and down, and two
It is connected by hose, it can be achieved that synchronization lifting between a auxiliary electrode.First pair of first main electrode and the first auxiliary electrode composition
Electrode group is connected with the first side heater of thermal field, and first main electrode is connected to power supply as main electrode, and described first
Auxiliary electrode is not connected to power supply as auxiliary electrode, stablizes to Auxiliary support side heater and goes up and down, and is in addition also used as main electricity
The backup electrode of pole, first main electrode are furnished with power unit, use connecting shaft between the first main electrode and the first auxiliary electrode
Synchronization lifting is realized in linkage；Second side of the second pair of electrode group and thermal field of the second main electrode and the second auxiliary electrode composition
Heater is connected, and two main electrode is connected to power supply, second auxiliary electrode is as auxiliary electrode, no as main electrode
It is connected to power supply, stablizes to Auxiliary support side heater and goes up and down, it is in addition also main as the backup electrode of main electrode, described second
Electrode is furnished with power unit, is linked between the second main electrode and the second auxiliary electrode with connecting shaft, realizes synchronization lifting；Described
The third of one auxiliary electrode and the second auxiliary electrode composition is connected to electrode group with the bottom heater of thermal field, the first auxiliary electrode and the
Two auxiliary electrodes are connected to power supply as auxiliary electrode, wherein the first auxiliary electrode is furnished with power unit, the first auxiliary electrode and the second secondary electricity
Flexible shaft linkage is used between pole, realizes synchronization lifting.
Preferably, first side heater and the second side heater are an integral structure.Described first is main
Electrode, the first auxiliary electrode, the second main electrode and the second auxiliary electrode be commonly mounted on integral type the first side heater and
On second side heater, the first side heater of the integral type and the second side heater is driven to be gone up and down jointly.
Preferably, the power unit further includes mounting plate, and the side of pedestal, the deceleration is arranged in the mounting plate
Device and motor base are fixed on a mounting board.
Preferably, the bottom of the water pipe is arranged in the four-way connection.
Preferably, fitting insulating panels between the upper end of the electrode sleeve and the upper end of electrode.
The invention has the advantages that the side heater and bottom heater of thermal field can change with bushing position and be become
Change, temperature of thermal field is more balanced, is conducive to crystal growth, promotes the quality of growth crystal bar.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment 1；
Fig. 2 is the structural schematic diagram of electrode unit and power unit in embodiment 1；
Fig. 3 is schematic diagram in A-A direction in Fig. 2；
Wherein:
99- single crystal growing furnace furnace hearth plate 100- the first main electrode the first auxiliary electrode of 200-
300- the second main electrode 400- the second auxiliary electrode the first auxiliary electrode of 500-
600- the second auxiliary electrode 32- the first connecting shaft the second connecting shaft of 34-
56- flexible axle 700- power unit 1- gear-box
2- second shaft coupling 3- mounting plate 4- retarder
5- first shaft coupling 6- motor base 7- servo motor
8- cable connection plate 9- rise fall of electrodes frame 10- linear guide
11- pedestal 12- elevator 13- insulation board
14- welding bellows 15- electrode 16- insulation sleeve
17- cooling water pipe 18- electrode sleeve 19- four-way connection
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
Embodiment 1:
A kind of monocrystalline silicon growing furnace electrode lifting mechanism as shown in FIG. 1 to 3, including it is mounted on single crystal growing furnace furnace hearth plate 99
On the first main electrode 100, the first auxiliary electrode 200, the second main electrode 300, the second auxiliary electrode 400, the first auxiliary electrode
500 and second auxiliary electrode 600 this six electrode unit, in which:
First main electrode 100 and the first auxiliary electrode 200 pass through the first connecting shaft 32 linkage first pair of electrode group of formation, institute
It states the first main electrode 100 and connect the first side heater jointly with the first auxiliary electrode 200；
Second main electrode 300 and the second auxiliary electrode 400 pass through the second connecting shaft 34 linkage second pair of electrode group of formation, institute
It states the second main electrode 300 and connect the second side heater jointly with the second auxiliary electrode 400；
First auxiliary electrode 500 and the second auxiliary electrode 600 are linked by flexible axle 56 forms third to electrode group, first pair
600 common contiguous base heater of electrode 500 and the second auxiliary electrode；
First main electrode 100, the second main electrode 300, the first auxiliary electrode 500 and the second auxiliary electrode 600 are respectively communicated with
Power supply, first main electrode 100, the second main electrode 300 and the first auxiliary electrode 500 are provided with power unit 700；
Each electrode unit all has the pedestal 11 that one is mounted on single crystal growing furnace furnace hearth plate and linear guide 10, electrode liter
Frame 9, cable connection plate 8, elevator 12, welding bellows 14, electrode 15, insulation sleeve 16, cooling water pipe 17 and electrode sleeve 18 drop,
The upward right angle setting linear guide 10 of the pedestal 11, rise fall of electrodes frame 9 is mounted on the sliding block of the linear guide 10, described
Electrode sleeve 18 is installed on rise fall of electrodes frame 9, is successively arranged insulation sleeve 16 and electrode 15 in the electrode sleeve 18, the electrode 15
Axis line location is equipped with cooling water pipe 17, and the water pipe 17 is connected to four-way connection 19, and the bottom of the electrode 15 is equipped with cable connection plate
8, the rise fall of electrodes frame 9 connects elevator 12, one end of the 9 connecting welding bellows 14 of rise fall of electrodes frame, the welding wave
The other end of line pipe 14 is fixed on the single crystal growing furnace furnace hearth plate 99；
The power unit 700 includes servo motor 7, retarder 4 and gear-box 1, installs motor on the pedestal 11
Seat 6, the servo motor 7 is mounted on the motor base 6, the servo motor 7 be sequentially connected first shaft coupling 5, retarder 4,
Second shaft coupling 2 and gear-box 1, the gear-box 1 are fixedly connected with the pedestal 11.
The power unit 700 further includes mounting plate 3, and the side of pedestal 11, the deceleration is arranged in the mounting plate
Device 4 and motor base 6 are fixed on mounting plate 3.
The bottom of the water pipe 17 is arranged in the four-way connection 19.
Fitting insulating panels 13 between the upper end of the electrode sleeve 18 and the upper end of electrode 15.
The preferred embodiment of the present invention has been described in detail above, but the invention be not limited to it is described
Embodiment, those skilled in the art can also make various etc. on the premise of not violating the inventive spirit of the present invention
Same variation or replacement, these equivalent modifications or replacement are all included in the scope defined by the claims of the present application.
Claims (5)
1. a kind of monocrystalline silicon growing furnace electrode lifting mechanism, which is characterized in that
Including be mounted on single crystal growing furnace furnace hearth plate (99) the first main electrode (100), the first auxiliary electrode (200), the second main electricity
This six electrode units of pole (300), the second auxiliary electrode (400), the first auxiliary electrode (500) and the second auxiliary electrode (600),
In:
First main electrode (100) and the first auxiliary electrode (200) are linked by the first connecting shaft (32) forms first pair of electrode group,
First main electrode (100) connect the first side heater jointly with the first auxiliary electrode (200)；
Second main electrode (300) and the second auxiliary electrode (400) are linked by the second connecting shaft (34) forms second pair of electrode group,
Second main electrode (300) connect the second side heater jointly with the second auxiliary electrode (400)；
First auxiliary electrode (500) and the second auxiliary electrode (600) form third to electrode group by flexible axle (56) linkage, and described first
Auxiliary electrode (500) and the second auxiliary electrode (600) common contiguous base heater；
First main electrode (100), the second main electrode (300), the first auxiliary electrode (500) and the second auxiliary electrode (600) are respectively
It is connected to power supply, first main electrode (100), the second main electrode (300) and the first auxiliary electrode (500) are provided with power unit
(700)；
Each electrode unit all has the pedestal (11) and linear guide (10), rise fall of electrodes that one is mounted on single crystal growing furnace furnace hearth plate
Frame (9), cable connection plate (8), elevator (12), welding bellows (14), electrode (15), insulation sleeve (16), cooling water pipe
(17) and electrode sleeve (18), right angle setting linear guide (10), rise fall of electrodes frame (9) are mounted on described the pedestal (11) upwards
On the sliding block of linear guide (10), electrode sleeve (18) are installed on the rise fall of electrodes frame (9), are successively arranged in the electrode sleeve (18)
The axis line location of insulation sleeve (16) and electrode (15), the electrode (15) is equipped with cooling water pipe (17), water pipe (17) connection
The bottom of four-way connection (19), the electrode (15) is equipped with cable connection plate (8), and the rise fall of electrodes frame (9) connects elevator
(12), the other end of one end of rise fall of electrodes frame (9) the connecting welding bellows (14), the welding bellows (14) is fixed on
On the single crystal growing furnace furnace hearth plate (99)；
The power unit (700) includes servo motor (7), retarder (4) and gear-box (1), is pacified on the pedestal (11)
It fills motor base (6), the servo motor (7) is mounted on the motor base (6), and the servo motor (7) is sequentially connected first
Axis device (5), retarder (4), second shaft coupling (2) and gear-box (1), the gear-box (1) and the pedestal (11) fixed company
It connects.
2. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, which is characterized in that first side adds
Hot device and the second side heater are an integral structure.
3. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, which is characterized in that the power unit
It (700) further include mounting plate (3), the mounting plate is arranged in the side of pedestal (11), the retarder (4) and motor base (6)
It is fixed on mounting plate (3).
4. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, which is characterized in that the four-way connection
(19) it is arranged in the bottom of the water pipe (17).
5. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, which is characterized in that the electrode sleeve (18)
Upper end and electrode (15) upper end between fitting insulating panels (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710651623.9A CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710651623.9A CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN107400925A CN107400925A (en) | 2017-11-28 |
| CN107400925B true CN107400925B (en) | 2019-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710651623.9A Active CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109778235B (en) * | 2019-03-01 | 2021-07-27 | 国家电投集团远达环保工程有限公司重庆科技分公司 | Anode lifting device and aluminum electrolysis cell equipment |
| CN111424315B (en) * | 2020-05-18 | 2021-11-23 | 西安奕斯伟材料科技有限公司 | Single crystal furnace thermal field heater assembly and single crystal furnace |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203947180U (en) * | 2014-05-22 | 2014-11-19 | 海润光伏科技股份有限公司 | Polycrystalline furnace with portable thermal field well heater |
| CN205839183U (en) * | 2016-06-29 | 2016-12-28 | 安徽中科镭泰激光科技有限公司 | A kind of device preparing gem crystal |
-
2017
- 2017-08-02 CN CN201710651623.9A patent/CN107400925B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203947180U (en) * | 2014-05-22 | 2014-11-19 | 海润光伏科技股份有限公司 | Polycrystalline furnace with portable thermal field well heater |
| CN205839183U (en) * | 2016-06-29 | 2016-12-28 | 安徽中科镭泰激光科技有限公司 | A kind of device preparing gem crystal |
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| CN107400925A (en) | 2017-11-28 |
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