CN107400925A - A kind of monocrystalline silicon growing furnace electrode lifting mechanism - Google Patents
A kind of monocrystalline silicon growing furnace electrode lifting mechanism Download PDFInfo
- Publication number
- CN107400925A CN107400925A CN201710651623.9A CN201710651623A CN107400925A CN 107400925 A CN107400925 A CN 107400925A CN 201710651623 A CN201710651623 A CN 201710651623A CN 107400925 A CN107400925 A CN 107400925A
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- Prior art keywords
- electrode
- auxiliary electrode
- auxiliary
- main
- growing furnace
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
Abstract
The present invention relates to single crystal furnace equipment technical field, specifically a kind of monocrystalline silicon growing furnace electrode lifting mechanism, including this six electrode units of the first main electrode on single crystal growing furnace furnace hearth plate, the first auxiliary electrode, the second main electrode, the second auxiliary electrode, the first auxiliary electrode and the second auxiliary electrode, wherein：First main electrode and the first auxiliary electrode link to form first pair of electrode group by the first connecting shaft, and first main electrode is connected the first side heater jointly with the first auxiliary electrode.The invention has the advantages that the side heater and bottom heater of thermal field can change and change with bushing position, temperature of thermal field is more balanced, is advantageous to crystal growth, the quality of lifting growth crystal bar.
Description
Technical field
The present invention relates to single crystal furnace equipment technical field, specifically a kind of monocrystalline silicon growing furnace electrode lifting mechanism.
Background technology
The main electrode and auxiliary electrode of existing main flow monocrystalline silicon growing furnace are all integrally fixed on furnace hearth plate, can not be lifted, therefore
The side heater being connected with main electrode, the bottom heater being connected with auxiliary electrode are all fixed.When length is brilliant, bushing position
It can be gradually increasing, be changed with heater locations, cause thermal field unbalanced, influence long brilliant and production crystal bar quality.
The content of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide one kind can operate respectively two groups of side heaters and
One bottom heater carries out the monocrystalline silicon growing furnace electrode lifting mechanism of independent-lifting heating.
In order to achieve the above object, the invention provides a kind of monocrystalline silicon growing furnace electrode lifting mechanism, including installed in
The first main electrode, the first auxiliary electrode, the second main electrode, the second auxiliary electrode, the first auxiliary electrode on single crystal growing furnace furnace hearth plate and
This six electrode units of second auxiliary electrode, wherein：
First main electrode and the first auxiliary electrode link to form first pair of electrode group by the first connecting shaft, first master
Electrode is connected the first side heater jointly with the first auxiliary electrode；
Second main electrode and the second auxiliary electrode link to form second pair of electrode group by the second connecting shaft, second master
Electrode is connected the second side heater jointly with the second auxiliary electrode；
First auxiliary electrode and the second auxiliary electrode form the 3rd pair of electrode group, first auxiliary electrode and by flexible shaft linkage
Two auxiliary electrode common contiguous base heaters；
First main electrode, the second main electrode, the first auxiliary electrode and the second auxiliary electrode are respectively communicated with power supply, and described first
Main electrode, the second main electrode and the first auxiliary electrode are provided with power unit；
Each electrode unit be respectively provided with a pedestal being arranged on single crystal growing furnace furnace hearth plate and line slideway, rise fall of electrodes frame,
Cable connection plate, lift, welding bellows, electrode, insulation sleeve, cooling water pipe and electrode sleeve, the pedestal are vertically pacified upwards
Line slideway is filled, rise fall of electrodes frame is arranged on the sliding block of the line slideway, and electrode sleeve is installed on the rise fall of electrodes frame, should
Insulation sleeve and electrode are sequentially provided with electrode sleeve, the axis line location of the electrode is provided with cooling water pipe, and the water pipe connects four-way
Joint, the bottom of the electrode are provided with cable connection plate, and the electrode positioning mechanism connects crane, the electrode positioning mechanism connecting welding
One end of bellows, the other end of the welding bellows are fixed on the single crystal growing furnace furnace hearth plate；
The power unit includes servo motor, decelerator and gear-box, and motor base is installed on the pedestal, described to watch
Motor is taken on the motor base, the servo motor is sequentially connected first shaft coupling, decelerator, second shaft coupling and gear
Case, the gear-box are fixedly connected with the pedestal.
The servo motor of power unit is connected to gear by first shaft coupling connection reducer, then by second shaft coupling
Case, the lift of electrode unit is finally transferred to, realizes the lifting of six electrode units.The first described main electrode and the second master
Electrode can lift, and realize that the side heater being connected with the two main electrodes can lift, first main electrode and second
Main electrode is controlled by servo motor, it is possible to achieve independent-lifting, also can synchronization lifting；Each main electrode is equipped with auxiliary electricity
Pole, to the stable backup electrode for lifting, also serving as main electrode in addition of Auxiliary support side heater, main electrode matches somebody with somebody what is fitted with it
Linked between auxiliary electrode with connecting shaft, realize synchronization lifting.When described the first side heater and the second side heater
For integral type structure when, the first described main electrode, the first auxiliary electrode, the second main electrode and the second auxiliary electrode are installed jointly
On the first side heater and the second side heater of integral type, drive jointly the integral type the first side heater and
Second side heater is lifted.Auxiliary electrode can lift, and realize that the bottom heater being connected with auxiliary electrode can lift, and two
Connected between individual auxiliary electrode by flexible pipe, synchronization lifting can be achieved.The first couple of first main electrode and the first auxiliary electrode composition
Electrode group is connected with the first side heater of thermal field, and first main electrode connects power supply as main electrode, and described first
Auxiliary electrode does not connect power supply, is lifted to Auxiliary support side heater is stable, also serve as main electricity in addition as auxiliary electrode
The backup electrode of pole, first main electrode are furnished with power unit, connecting shaft are used between the first main electrode and the first auxiliary electrode
Linkage, realizes synchronization lifting；Second sidepiece of the second pair of electrode group and thermal field of the second main electrode and the second auxiliary electrode composition
Heater is connected, and two main electrode connects power supply as main electrode, and second auxiliary electrode is as auxiliary electrode, no
Power supply is connected, to the stable backup electrode for lifting, also serving as main electrode in addition of Auxiliary support side heater, second master
Electrode is furnished with power unit, is linked between the second main electrode and the second auxiliary electrode with connecting shaft, realizes synchronization lifting；Described
3rd pair of electrode group of one auxiliary electrode and the second auxiliary electrode composition is connected with the bottom heater of thermal field, the first auxiliary electrode and the
Two auxiliary electrodes connect power supply as auxiliary electrode, wherein the first auxiliary electrode is furnished with power unit, the first auxiliary electrode and the second secondary electricity
Flexible shaft linkage is used between pole, realizes synchronization lifting.
Preferably, the first described side heater and the second side heater are integral type structure.The first described master
Electrode, the first auxiliary electrode, the second main electrode and the second auxiliary electrode be commonly mounted on integral type the first side heater and
On second side heater, the first side heater and the second side heater that drive the integral type jointly are lifted.
Preferably, described power unit also includes installing plate, and the installing plate is arranged on the side of pedestal, the deceleration
Device is fixed on the decelerator installing plate with motor base.
Preferably, described four-way connection is arranged on the bottom of the water pipe.
Preferably, fitting insulating panels between the upper end of described electrode sleeve and the upper end of electrode.
The invention has the advantages that the side heater and bottom heater of thermal field can change and become with bushing position
Change, temperature of thermal field is more balanced, is advantageous to crystal growth, the quality of lifting growth crystal bar.
Brief description of the drawings
Fig. 1 is the structural representation of embodiment 1；
Fig. 2 is the structural representation of electrode unit and power unit in embodiment 1；
Fig. 3 be in Fig. 2 A-A to schematic diagram；
Wherein：
99- single crystal growing furnace furnace hearth plate 100- the first main electrode the first auxiliary electrodes of 200-
300- the second main electrode 400- the second auxiliary electrode the first auxiliary electrodes of 500-
600- the second auxiliary electrode 12- the first connecting shaft the second connecting shafts of 34-
56- flexible axle 700- power unit 1- gear-boxes
2- second shaft coupling 3- installing plate 4- decelerators
5- first shaft coupling 6- motor base 7- servo motors
8- cable connection plate 9- rise fall of electrodes frame 10- line slideways
11- pedestal 12- lift 13- insulation boards
14- welding bellows 15- electrode 16- insulation sleeves
17- cooling water pipe 18- electrode sleeve 19- four-way connections
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
Embodiment 1：
A kind of monocrystalline silicon growing furnace electrode lifting mechanism as shown in FIG. 1 to 3, including installed in single crystal growing furnace furnace hearth plate 99
On the first main electrode 100, the first auxiliary electrode 200, the second main electrode 300, the second auxiliary electrode 400, the first auxiliary electrode
500 and second auxiliary electrode 600 this six electrode unit, wherein：
First main electrode 100 and the first auxiliary electrode 200 are linked by the first connecting shaft 12 forms first pair of electrode group, institute
State the first main electrode 100 and be connected the first side heater jointly with the first auxiliary electrode 200；
Second main electrode 300 and the second auxiliary electrode 400 are linked by the second connecting shaft 34 forms second pair of electrode group, institute
State the second main electrode 300 and be connected the second side heater jointly with the second auxiliary electrode 400；
First auxiliary electrode 500 and the second auxiliary electrode 600 are linked by flexible axle 56 forms the 3rd pair of electrode group, and described first is secondary
The common contiguous base heater of 500 and second auxiliary electrode of electrode 600；
First main electrode 100, the second main electrode 300, the first auxiliary electrode 500 and the second auxiliary electrode 600 are respectively communicated with
Power supply, first main electrode 100, the second main electrode 300 and the first auxiliary electrode 500 are provided with power unit 700；
Each electrode unit is respectively provided with the pedestal 11 and line slideway 10, electrode liter being arranged on single crystal growing furnace furnace hearth plate
Frame 9, cable connection plate 8, lift 12, welding bellows 14, electrode 15, insulation sleeve 16, cooling water pipe 17 and electrode sleeve 18 drop,
The upward right angle setting line slideway 10 of pedestal 11, rise fall of electrodes frame 9 is arranged on the sliding block of the line slideway 10, described
Electrode sleeve 18 is installed on rise fall of electrodes frame 9, insulation sleeve 16 and electrode 15 are sequentially provided with the electrode sleeve 18, the electrode 15
Axis line location is provided with cooling water pipe 17, and the water pipe 17 connects four-way connection 19, and the bottom of the electrode 15 is provided with cable connection plate
8, the rise fall of electrodes frame 9 connects lift 12, one end of the connecting welding bellows 14 of rise fall of electrodes frame 9, the welding ripple
The other end of line pipe 14 is fixed on the single crystal growing furnace furnace hearth plate 99；
The power unit 700 includes servo motor 7, decelerator 4 and gear-box 1, and motor is installed on the pedestal 11
Seat 6, the servo motor 7 be arranged on the motor base 6 on, the servo motor 7 be sequentially connected first shaft coupling 5, decelerator 4,
Second shaft coupling 2 and gear-box 1, the gear-box 1 are fixedly connected with the pedestal 11.
Described power unit 700 also includes installing plate 3, and the installing plate is arranged on the side of pedestal 11, the deceleration
Device 4 is fixed on the decelerator installing plate 3 with motor base 6.
Described four-way connection 19 is arranged on the bottom of the water pipe 17.
Fitting insulating panels 13 between the upper end of described electrode sleeve 18 and the upper end of electrode 15.
The preferred embodiment to the invention is illustrated above, but the invention be not limited to it is described
Embodiment, those skilled in the art can also make a variety of etc. on the premise of without prejudice to the invention spirit
Same modification or replacement, these equivalent modifications or replacement are all contained in the application claim limited range.
Claims (5)
- A kind of 1. monocrystalline silicon growing furnace electrode lifting mechanism, it is characterised in thatIncluding the first main electrode (100) on single crystal growing furnace furnace hearth plate (99), the first auxiliary electrode (200), the second main electricity This six electrode units of pole (300), the second auxiliary electrode (400), the first auxiliary electrode (500) and the second auxiliary electrode (600), its In：First main electrode (100) and the first auxiliary electrode (200) are linked by the first connecting shaft (12) forms first pair of electrode group, First main electrode (100) is connected the first side heater jointly with the first auxiliary electrode (200)；Second main electrode (300) and the second auxiliary electrode (400) are linked by the second connecting shaft (34) forms second pair of electrode group, Second main electrode (300) is connected the second side heater jointly with the second auxiliary electrode (400)；First auxiliary electrode (500) and the second auxiliary electrode (600) are linked by flexible axle (56) forms the 3rd pair of electrode group, and described first Auxiliary electrode (500) and the second auxiliary electrode (600) common contiguous base heater；First main electrode (100), the second main electrode (300), the first auxiliary electrode (500) and the second auxiliary electrode (600) are respectively Power supply is connected, first main electrode (100), the second main electrode (300) and the first auxiliary electrode (500) are provided with power unit (700)；Each electrode unit is respectively provided with the pedestal (11) and line slideway (10), rise fall of electrodes being arranged on single crystal growing furnace furnace hearth plate Frame (9), cable connection plate (8), lift (12), welding bellows (14), electrode (15), insulation sleeve (16), cooling water pipe (17) and electrode sleeve (18), right angle setting line slideway (10), rise fall of electrodes frame (9) are arranged on described the pedestal (11) upwards On the sliding block of line slideway (10), electrode sleeve (18) is installed on the rise fall of electrodes frame (9), is sequentially provided with the electrode sleeve (18) Insulation sleeve (16) and electrode (15), the axis line location of the electrode (15) are provided with cooling water pipe (17), water pipe (17) connection Four-way connection (19), the bottom of the electrode (15) are provided with cable connection plate (8), and the rise fall of electrodes frame (9) connects lift (12), one end of rise fall of electrodes frame (9) the connecting welding bellows (14), the other end of the welding bellows (14) are fixed on On the single crystal growing furnace furnace hearth plate (99)；The power unit (700) includes servo motor (7), decelerator (4) and gear-box (1), pacifies on the pedestal (11) Motor base (6) is filled, the servo motor (7) is arranged on the motor base (6), and the servo motor (7) is sequentially connected first Axle device (5), decelerator (4), second shaft coupling (2) and gear-box (1), the gear-box (1) and the fixed company of the pedestal (11) Connect.
- 2. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, it is characterised in that the first described sidepiece adds Hot device and the second side heater are integral type structure.
- 3. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, it is characterised in that described power unit (700) installing plate (3) is also included, the installing plate is arranged on the side of pedestal (11), the decelerator (4) and motor base (6) It is fixed on the decelerator installing plate (3).
- 4. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, it is characterised in that described four-way connection (19) it is arranged on the bottom of the water pipe (17).
- 5. monocrystalline silicon growing furnace electrode lifting mechanism according to claim 1, it is characterised in that described electrode sleeve (18) Upper end and electrode (15) upper end between fitting insulating panels (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710651623.9A CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710651623.9A CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN107400925A true CN107400925A (en) | 2017-11-28 |
| CN107400925B CN107400925B (en) | 2019-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710651623.9A Active CN107400925B (en) | 2017-08-02 | 2017-08-02 | A kind of monocrystalline silicon growing furnace electrode lifting mechanism |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109778235A (en) * | 2019-03-01 | 2019-05-21 | 国家电投集团远达环保工程有限公司重庆科技分公司 | A kind of cathode lifting device and aluminium cell equipment |
| CN111424315A (en) * | 2020-05-18 | 2020-07-17 | 西安奕斯伟硅片技术有限公司 | Single crystal furnace thermal field heater assembly and single crystal furnace |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203947180U (en) * | 2014-05-22 | 2014-11-19 | 海润光伏科技股份有限公司 | Polycrystalline furnace with portable thermal field well heater |
| CN205839183U (en) * | 2016-06-29 | 2016-12-28 | 安徽中科镭泰激光科技有限公司 | A kind of device preparing gem crystal |
-
2017
- 2017-08-02 CN CN201710651623.9A patent/CN107400925B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203947180U (en) * | 2014-05-22 | 2014-11-19 | 海润光伏科技股份有限公司 | Polycrystalline furnace with portable thermal field well heater |
| CN205839183U (en) * | 2016-06-29 | 2016-12-28 | 安徽中科镭泰激光科技有限公司 | A kind of device preparing gem crystal |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109778235A (en) * | 2019-03-01 | 2019-05-21 | 国家电投集团远达环保工程有限公司重庆科技分公司 | A kind of cathode lifting device and aluminium cell equipment |
| CN109778235B (en) * | 2019-03-01 | 2021-07-27 | 国家电投集团远达环保工程有限公司重庆科技分公司 | Anode lifting device and aluminum electrolysis cell equipment |
| CN111424315A (en) * | 2020-05-18 | 2020-07-17 | 西安奕斯伟硅片技术有限公司 | Single crystal furnace thermal field heater assembly and single crystal furnace |
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| Publication number | Publication date |
|---|---|
| CN107400925B (en) | 2019-07-12 |
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