CN107365152A - 一种热释电子陶瓷薄膜材料的制备方法 - Google Patents
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Abstract
本发明公开了一种热释电子陶瓷薄膜材料的制备方法,该工艺利用氩气气氛高温水蒸气处理高密度陶瓷薄膜衬底,利用二氧化硅、二氧化锰、钙钛矿、氧化铷、钛酸四丁酯石油醚、钛酸铅、聚甲基丙烯酸甲酯高温辊炼成热释表层,通过涂覆热释表层得到薄膜材料初制品,进而退火、红外烘烤得到热释电子陶瓷薄膜材料。制备而成的热释电子陶瓷薄膜材料,其制作工艺简单、热释效果好、对电流温度等变化灵敏,具有较好的应用前景。
Description
技术领域
本发明涉及薄膜材料技术领域,特别涉及到一种热释电子陶瓷薄膜材料的制备方法。
背景技术
近年来微型化趋势对电子陶瓷的发展有着重要的影响,电子陶瓷薄膜是目前研究的重点所在。由于受到电子陶瓷功能多样化和半导体芯片集成化及多功能元件和系统发展的促进,电子陶瓷材料集成技术以及对表面和界面现象的研究日趋重要,在微型化系统中尤其如此。
热释电体是通过产生电流对温度变化(或红外放射)做出反应,广泛用于消防报警,防盗报警和非致冷红外照相机。为了获得高灵敏度,必须有高的热释电系数和低的热容。此外,周围的热损失要尽量低。所以本研究致力于开发一种全新的热释电子陶瓷薄膜材料的制备工艺,期望能满足新兴的市场需求。
发明内容
为解决上述技术问题,本发明提供一种热释电子陶瓷薄膜材料的制备方法,该工艺利用氩气气氛高温水蒸气处理高密度陶瓷薄膜衬底,利用二氧化硅、二氧化锰、钙钛矿、氧化铷、钛酸四丁酯石油醚、钛酸铅、聚甲基丙烯酸甲酯高温辊炼成热释表层,通过涂覆热释表层得到薄膜材料初制品,进而退火、红外烘烤得到热释电子陶瓷薄膜材料。制备而成的热释电子陶瓷薄膜材料,其制作工艺简单、热释效果好、对电流温度等变化灵敏,具有较好的应用前景。
本发明的目的可以通过以下技术方案实现:
一种热释电子陶瓷薄膜材料的制备方法,包括以下步骤:
(1)将高密度陶瓷薄膜衬底置于氩气气氛中,同时用高温水蒸气喷洒表层,处理15-25min;
(2)将二氧化硅7份、二氧化锰3份、钙钛矿5份、氧化铷1份、钛酸四丁酯石油醚溶液7份混匀加入反应釜,800-900℃辊炼2-6h,然后以20℃/sec的速度降温至180-200℃,加入钛酸铅3份、聚甲基丙烯酸甲酯3份,搅拌均匀后保温备用;
(3)将步骤(2)的混合液涂覆在步骤(1)处理的高密度陶瓷薄膜衬底表层,然后在300-320℃热处理10-15min,得到薄膜材料初制品;
(4)将步骤(3)的薄膜材料初制品进行退火,然后用红外灯烘烤2h,即得成品。
优选地,所述步骤(1)中的高温水蒸气温度为650-700℃。
优选地,所述步骤(3)中的混合液涂覆层厚度为5-10μm。
优选地,所述步骤(4)中的退火温度为480-500℃,退火时间为5分钟。
优选地,所述步骤(4)中的红外灯波长为940nm。
本发明与现有技术相比,其有益效果为:
(1)本发明的热释电子陶瓷薄膜材料的制备方法利用氩气气氛高温水蒸气处理高密度陶瓷薄膜衬底,利用二氧化硅、二氧化锰、钙钛矿、氧化铷、钛酸四丁酯石油醚、钛酸铅、聚甲基丙烯酸甲酯高温辊炼成热释表层,通过涂覆热释表层得到薄膜材料初制品,进而退火、红外烘烤得到热释电子陶瓷薄膜材料。制备而成的热释电子陶瓷薄膜材料,其制作工艺简单、热释效果好、对电流温度等变化灵敏,具有较好的应用前景。
(2)本发明的热释电子陶瓷薄膜材料原料易得、工艺简单,适于大规模工业化运用,实用性强。
具体实施方式
下面结合具体实施例对发明的技术方案进行详细说明。
实施例1
(1)将高密度陶瓷薄膜衬底置于氩气气氛中,同时用高温水蒸气喷洒表层,处理15min,高温水蒸气温度为650℃;
(2)将二氧化硅7份、二氧化锰3份、钙钛矿5份、氧化铷1份、钛酸四丁酯石油醚溶液7份混匀加入反应釜,800℃辊炼2h,然后以20℃/sec的速度降温至180℃,加入钛酸铅3份、聚甲基丙烯酸甲酯3份,搅拌均匀后保温备用;
(3)将步骤(2)的混合液涂覆在步骤(1)处理的高密度陶瓷薄膜衬底表层,涂覆层厚度为5μm,然后在300℃热处理10min,得到薄膜材料初制品;
(4)将步骤(3)的薄膜材料初制品进行退火,退火温度为480℃,退火时间为5分钟,然后用红外灯烘烤2h,即得成品。
制得的热释电子陶瓷薄膜材料的性能测试结果如表1所示。
实施例2
(1)将高密度陶瓷薄膜衬底置于氩气气氛中,同时用高温水蒸气喷洒表层,处理25min,高温水蒸气温度为700℃;
(2)将二氧化硅7份、二氧化锰3份、钙钛矿5份、氧化铷1份、钛酸四丁酯石油醚溶液7份混匀加入反应釜, 900℃辊炼6h,然后以20℃/sec的速度降温至200℃,加入钛酸铅3份、聚甲基丙烯酸甲酯3份,搅拌均匀后保温备用;
(3)将步骤(2)的混合液涂覆在步骤(1)处理的高密度陶瓷薄膜衬底表层,涂覆层厚度为10μm,然后320℃热处理15min,得到薄膜材料初制品;
(4)将步骤(3)的薄膜材料初制品进行退火,退火温度为500℃,退火时间为5分钟,然后用红外灯烘烤2h,即得成品。
制得的热释电子陶瓷薄膜材料的性能测试结果如表1所示。
对比例1
(1)将高密度陶瓷薄膜衬底置于氩气气氛中,同时用高温水蒸气喷洒表层,处理25min,高温水蒸气温度为700℃;
(2)将二氧化硅7份、钙钛矿5份、氧化铷1份、钛酸四丁酯石油醚溶液7份混匀加入反应釜, 900℃辊炼6h,然后以20℃/sec的速度降温至200℃,加入聚甲基丙烯酸甲酯3份,搅拌均匀后保温备用;
(3)将步骤(2)的混合液涂覆在步骤(1)处理的高密度陶瓷薄膜衬底表层,涂覆层厚度为10μm,然后在320℃热处理15min,得到薄膜材料初制品;
(4)将步骤(3)的薄膜材料初制品进行退火,退火温度为500℃,退火时间为5分钟,然后用红外灯烘烤2h,即得成品。
制得的热释电子陶瓷薄膜材料的性能测试结果如表1所示。
将实施例1-2和对比例的制得的热释电子陶瓷薄膜材料及市售常见同类薄膜材料分别进行导热系数、光电流密度、光电效应这几项性能测试。
表1
导热系数(W/mK) | 光电流密度mA/cm | 光电效率% | |
实施例1 | 13.211 | 1.452 | 35.36 |
实施例2 | 12.569 | 1.495 | 37.50 |
对比例1 | 3.688 | 1.238 | 28.94 |
市售薄膜 | 3.046 | 1.345 | 31.08 |
本发明的热释电子陶瓷薄膜材料的制备方法利用氩气气氛高温水蒸气处理高密度陶瓷薄膜衬底,利用二氧化硅、二氧化锰、钙钛矿、氧化铷、钛酸四丁酯石油醚、钛酸铅、聚甲基丙烯酸甲酯高温辊炼成热释表层,通过涂覆热释表层得到薄膜材料初制品,进而退火、红外烘烤得到热释电子陶瓷薄膜材料。制备而成的热释电子陶瓷薄膜材料,其制作工艺简单、热释效果好、对电流温度等变化灵敏,具有较好的应用前景。本发明的热释电子陶瓷薄膜材料原料易得、工艺简单,适于大规模工业化运用,实用性强。
以上所述仅为本发明的实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。
Claims (5)
1.一种热释电子陶瓷薄膜材料的制备方法,其特征在于,包括以下步骤:
(1)将高密度陶瓷薄膜衬底置于氩气气氛中,同时用高温水蒸气喷洒表层,处理15-25min;
(2)将二氧化硅7份、二氧化锰3份、钙钛矿5份、氧化铷1份、钛酸四丁酯石油醚溶液7份混匀加入反应釜,800-900℃辊炼2-6h,然后以20℃/sec的速度降温至180-200℃,加入钛酸铅3份、聚甲基丙烯酸甲酯3份,搅拌均匀后保温备用;
(3)将步骤(2)的混合液涂覆在步骤(1)处理的高密度陶瓷薄膜衬底表层,然后在300-320℃热处理10-15min,得到薄膜材料初制品;
(4)将步骤(3)的薄膜材料初制品进行退火,然后用红外灯烘烤2h,即得成品。
2.根据权利要求1所述的一种热释电子陶瓷薄膜材料的制备方法,其特征在于,所述步骤(1)中的高温水蒸气温度为650-700℃。
3.根据权利要求1所述的一种热释电子陶瓷薄膜材料的制备方法,其特征在于,所述步骤(3)中的混合液涂覆层厚度为5-10μm。
4.根据权利要求1所述的一种热释电子陶瓷薄膜材料的制备方法,其特征在于,所述步骤(4)中的退火温度为480-500℃,退火时间为5分钟。
5.根据权利要求1所述的一种热释电子陶瓷薄膜材料的制备方法,其特征在于,所述步骤(4)中的红外灯波长为940nm。
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CN104716255A (zh) * | 2015-03-13 | 2015-06-17 | 电子科技大学 | 一种厚膜热释电敏感元及其制备方法 |
CN106589431A (zh) * | 2016-12-26 | 2017-04-26 | 清华大学深圳研究生院 | 一种热释电柔性复合膜及其制备方法 |
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