CN107356227B - Two-dimensional photoelectric horizontal dip angle measuring device - Google Patents
Two-dimensional photoelectric horizontal dip angle measuring device Download PDFInfo
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- CN107356227B CN107356227B CN201710623084.8A CN201710623084A CN107356227B CN 107356227 B CN107356227 B CN 107356227B CN 201710623084 A CN201710623084 A CN 201710623084A CN 107356227 B CN107356227 B CN 107356227B
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Abstract
The invention relates to the technical field of laser measurement, and provides a technical scheme for measuring a two-dimensional photoelectric horizontal inclination angle, which can reduce the measurement cost and improve the measurement precision. The invention is mainly applied to the two-dimensional photoelectric horizontal dip angle measurement occasion.
Description
Technical Field
The invention relates to the technical field of laser measurement, in particular to a two-dimensional photoelectric horizontal inclination angle measuring device.
Background
The two-dimensional horizontal dip angle measuring system is widely applied to the fields of house construction, bridge construction, mechanical manufacturing, surveying and mapping instruments, navigation and aviation, control engineering, robots, automation and the like; with the development of digital electronic technology and laser technology, the photoelectric measurement method has been widely applied to the field of precision measurement, and the horizontal inclination angle measurement device has gradually developed from the original bubble level to the photoelectric digital display level.
On the other hand, the two-dimensional horizontal tilt angle measuring device can be classified into a bubble type, an optical type, a capacitive type, an inductive type, an electromagnetic type, a mechanical type, an MEMS type, and the like in principle. The bubble type horizontal inclination angle measuring device is generally referred to as a bubble level meter, the resolution is determined by the curvature radius of the inner wall of a leveling pipe, and the larger the curvature radius is, the higher the resolution is; the smaller the radius of curvature, the lower the resolution; the optical angle measurement mode has high resolution and accurate measurement, but needs to design a precise and complex optical structure, has high cost and often needs manual intervention to complete the measurement; the stability of the capacitance measurement result is poor, and the measurement range is small; the inductance type measurement range is large, the accuracy is high, but the structure is complex and high energy input is required; the electromagnetic type has high measurement precision and high speed, but the required circuit is complex; the mechanical type cost is lower, but the volume is huge and the measurement real-time performance is poor; the horizontal inclination angle measuring device based on the MEMS sensor has the characteristics of high reaction speed, small volume and strong environmental adaptability, but has large drift and low measurement precision.
On the other hand, for a 3DFAMILY-LM400 type double-shaft photoelectric level meter which is jointly developed by Taiwan Zhitai group and Taiwan university precision measurement laboratory, the measurement range can reach +/-100 ', the resolution is 0.1 ', the repeatability is +/-1 ', and the device adopts the principle of optical auto-collimation and the principle that light beams are refracted on the surfaces of the light beams through different media. Because the liquid is always kept horizontal on the earth surface by gravity, when the inclination angle of the device changes relative to the horizontal plane, light beams are refracted on the surface of the liquid when being emitted into the surface of the liquid from air and are emitted to a plane reflector arranged on the bottom surface of the device to be reflected so as to change the direction of a light path, the light beams are emitted into the air from the surface of the liquid to be refracted again, the position change of light spots is sensed by a photoelectric sensor, and the two-dimensional horizontal inclination angle change is converted. The device uses the optical auto-collimation principle to ensure that the light path is simpler and the device is easy to miniaturize and integrate; higher accuracy can be achieved using a four quadrant photodetector; the price is civilian and easy to accept. Meanwhile, the device uses the liquid refraction principle, so that when the inclination angle of the device changes relative to the horizontal plane, the inclination angle change received by the four-quadrant photoelectric sensor is smaller than the actual inclination angle change of the device, the measurement precision is reduced in principle, and the later detection cost and difficulty are improved.
On the other hand, for the measurement and compensation of abbe errors in the error measurement of large and medium-sized machine tools manufactured by high-end equipment, the angle measurement precision needs to be improved, meanwhile, angle measurement data are uploaded to an upper computer for processing, the angle errors are calculated and then directly interpolated to controllers of machine tools in different forms (TXYZ, XTYZ, XYTZ and XYZT) through error compensators so as to improve the machining precision of the machine tools. At present, the tilt angle measuring device on the market is provided with less matched data processing software, error compensators and error compensation software.
Solutions for overcoming this technical problem are known from the prior art.
Therefore, the two-dimensional photoelectric horizontal inclination angle measuring device is shown, the device can sense the change of the position of a light spot by a photoelectric sensor after the change of the horizontal inclination angle to be measured is amplified by 2 times through an optical auto-collimation system by combining an optical auto-collimation principle and a liquid surface reflection principle, the measurement precision of the device is improved, and an error compensator integrating inclination angle data storage and data processing and being directly connected with a numerical control machine controller and applied to Abbe error compensation of a large machine tool and error compensation software are provided for the large machine tools of different types (TXYZ, XTYZ, XYTZ and XYZT).
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to:
(1) the integral scheme design of the two-dimensional photoelectric horizontal inclination angle measuring device based on the optical auto-collimation principle and the liquid surface reflection principle is provided, and the defects of complex structure, high cost, large drift, low precision and the like of the conventional horizontal inclination angle detecting device are overcome.
(2) A method for replacing refraction by liquid surface reflection is provided to improve the detection accuracy of the liquid horizontal inclination angle measuring device.
(3) A mechanical structure is provided to ensure that the inclination angle of the whole horizontal inclination angle measuring device relative to the horizontal plane is the inclination angle to be measured.
(4) The error compensator integrating data storage and data processing and capable of being directly connected with the numerical control machine controller is applied to Abbe error compensation of a large-scale machine tool and a matched error compensation software application system, so that the machining precision of the machine tool is improved.
In order to achieve the purpose of the invention, the two-dimensional photoelectric horizontal inclination angle measuring device comprises a laser, a laser power stability control system, a laser temperature drift compensation system, a laser position fine adjustment bolt, a cube reflector, a cube polarization spectroscope, a quarter-wavelength wave plate, a wave plate rotating installation seat, an oil tank, liquid positioned in the oil tank, a light absorption material positioned at the bottom of the liquid in the oil tank, a lens sleeve, a focusing lens, a position sensitive sensor, a height adjustment adapter, a support rod, an optical auto-collimation system, black rough surface light absorption paper, a four-way I-V conversion circuit and a four-way reverse proportion amplifying circuit, wherein:
the laser power stability control system and the laser temperature drift compensation system automatically control the laser, so that the stability of the laser and the quality of light spots are improved;
the laser emitted by the laser changes the direction of the light path through the cubic reflector, so that the laser vertically emits to the bottom oil tank. The cubic polarization spectroscope arranged right below the cubic reflector splits the laser into two beams of light with mutually vertical polarization directions, wherein the polarized light with the polarization direction S is used as useless light to be reflected on the splitting surface of the cubic polarization spectroscope, and is emitted to the inner wall of the device and absorbed by black matte surface light-absorbing paper pasted on the inner wall of the device;
the position of the laser can be adjusted by a laser position fine adjustment bolt, so that the center of a light spot is ensured to irradiate the center of the position sensitive sensor to the greatest extent, and the horizontal dip angle measurement range is enlarged;
the polarized light with the polarization direction P is emitted to a quarter-wave plate right below the cubic polarization spectroscope through the cubic polarization spectroscope and passes through the quarter-wave plate, and a part of light is reflected on the liquid surface as measuring light beams to generate 2 times of inclination angle change. Again through a quarter wave plate, its phase is brought to 90. After shifting, the polarization direction changes from P to S. Returning to the cubic polarization spectroscope, and reflecting on the light splitting surface of the cubic polarization spectroscope; the light beam is emitted to a focusing lens between the position sensitive sensor and the cubic polarizing beam splitter, and after being focused by the focusing lens, the light beam is received by the position sensitive sensor arranged on the focal plane of the focusing lens;
the focusing lens is fixed in the lens sleeve, and the lens sleeve is arranged on the cubic polarizing beam splitter on the right side of the lens sleeve in a threaded fixing mode;
the other part of light is refracted at the surface of the liquid, is emitted into the liquid in the oil tank and is absorbed by the light absorption material at the bottom of the liquid in the oil tank, so that the light is prevented from being reflected at the bottom of the oil tank and then refracted back to the air again to be received by the position sensitive sensor;
the light absorption material at the bottom of the liquid in the oil tank absorbs, weakens and eliminates the refracted light beam, so that the interference of the refracted light beam on the measuring light beam is avoided;
the oil tank is fixed on the device base through a fastening bolt;
the height adjusting adapter and the support rod are used for connecting the cubic polarization spectroscope, the quarter-wave plate and the device base and have the function of adjusting the size of light spots on an oil surface, the support rod is vertically arranged on the base, the height adjusting adapter is arranged on the support rod, and the height of the support rod can be adjusted through the locking structure;
the position sensitive sensor can output four paths of photocurrent signals through four paths of I-V conversion circuits and four paths of reverse proportional amplifying circuits according to different gravity center positions of light spots.
The system also comprises an A/D conversion circuit, an ARM processor, upper computer software and an error compensator; the signals output by the four reverse proportional amplifying circuits are amplified, collected and processed by the A/D conversion circuit and the ARM microprocessor; and the upper computer software processes the angle data, and the Abbe error compensator communicates with the machine tool controller to interpolate the angle error to the machine tool controller to compensate the error of the machine tool.
In ARM, calculating the light spot position by the following double-sided PSD light spot position calculation formula, and converting the light spot position into horizontal inclination angle information;
wherein Ix1、Ix2、Iy1、Iy2Respectively, PSD four output current signals, Lx、LyThe side lengths of two directions of the PSD photosensitive surface are shown, and x and y are the positions of the centers of gravity of the light spots.
The invention has the characteristics and beneficial effects that:
(1) the defects that the resolving power of the existing bubble level meter is determined by the size of the curvature radius of the inner wall of the leveling pipe, the curvature radius is small and the measurement resolution is low are overcome; the defects that a precise and complex optical structure needs to be designed, the cost is high and manual intervention is often needed to complete measurement in a precise optical horizontal inclination angle measurement mode are overcome; the defects of poor stability and small measurement range of a measurement result in a capacitive horizontal inclination angle measurement mode are overcome; the defect that an inductive horizontal dip angle measurement mode is complex in structure and high in energy input is needed is overcome; the defect of complex circuit structure required by an electromagnetic horizontal inclination angle measuring mode is overcome; the defects of large size and poor measurement real-time performance of a mechanical horizontal inclination angle measurement mode are overcome; the two-dimensional horizontal inclination angle measuring device based on the MEMS sensor overcomes the defects of large drift and low measuring precision of the horizontal inclination angle measuring device based on the MEMS sensor, and combines the optical auto-collimation principle and the liquid surface reflection principle.
(2) The principle problems that the detection difficulty is increased and the detection precision is reduced due to the fact that the sensing angle change of a photoelectric sensor is smaller than the actual angle change to be detected based on the liquid refraction principle are solved, and the liquid surface reflection measurement method is adopted to replace refraction.
(3) The device overcomes the defects of most existing horizontal inclination angle measuring devices in the application aspect, and provides an error compensator which integrates data storage and data processing and can be directly connected with a numerical control machine controller to be applied to large-scale machine Abbe error compensation and a matched software system.
Description of the drawings:
FIG. 1 shows the overall topology of the two-dimensional photoelectric horizontal inclination angle measuring device of the invention.
Fig. 2 shows a mechanical structure diagram of the two-dimensional photoelectric horizontal inclination angle measuring device of the invention.
In the figure: the device comprises a laser 1, a laser power stability control system 2, a laser temperature drift compensation system 3, a laser position fine adjustment bolt 4, a cubic reflector 5, a cubic Polarization Beam Splitter (PBS)6, a quarter-wave (1/4 lambda) plate 7, a wave plate rotation mounting seat 8, an oil tank 9, a bottom light absorption material 10, a lens sleeve 11, a focusing lens 12, a position sensitive sensor (PSD)13, a height adjustment adapter 14, a support rod 15, an outer wall 16, an optical auto-collimation system 17, black rough surface light absorption paper 18, a four-way I-V conversion circuit 19, a four-way reverse proportion amplification circuit 20, an A/D conversion circuit 21, an ARM microprocessor 22, upper computer software 23, an Abbe error compensator 24 and a machine tool controller 25.
Detailed Description
In order to overcome the defects of the traditional inclination angle detection method technology, the invention mainly aims to provide a two-dimensional photoelectric horizontal inclination angle measuring device based on the optical auto-collimation principle and the liquid surface reflection principle, and mainly solves the technical problems that:
(1) the defects that the resolving power of the existing bubble level meter is determined by the size of the curvature radius of the inner wall of the leveling pipe, the curvature radius is small and the measurement resolution is low are overcome; the defects that a precise and complex optical structure needs to be designed, the cost is high and manual intervention is often needed to complete measurement in a precise optical horizontal inclination angle measurement mode are overcome; the defects of poor stability and small measurement range of a measurement result in a capacitive horizontal inclination angle measurement mode are overcome; the defect that an inductive horizontal dip angle measurement mode is complex in structure and high in energy input is needed is overcome; the defect of complex circuit structure required by an electromagnetic horizontal inclination angle measuring mode is overcome; the defects of large size and poor measurement real-time performance of a mechanical horizontal inclination angle measurement mode are overcome; the two-dimensional horizontal inclination angle measuring device based on the MEMS sensor overcomes the defects of large drift and low measuring precision of the horizontal inclination angle measuring device based on the MEMS sensor, and combines the optical auto-collimation principle and the liquid surface reflection principle.
(2) The principle problems that the detection difficulty is increased and the detection precision is reduced due to the fact that the sensing angle change of a photoelectric sensor is smaller than the actual angle change to be detected based on the liquid refraction principle are solved, and the liquid surface reflection measurement method is adopted to replace refraction.
(3) The error compensator integrates data storage and data processing and can be directly connected with a numerical control machine controller to be applied to Abbe error compensation of a large-scale machine tool and a matched software application system.
In order to achieve the above object, the present invention adopts a technical solution that a two-dimensional photoelectric horizontal tilt angle measuring device based on a combination of an optical auto-collimation principle and a liquid surface reflection principle, as shown in fig. 1, comprises:
the device comprises a laser 1, a laser power stability control system 2, a laser temperature drift compensation system 3, a laser position fine adjustment bolt 4, a cubic reflector 5, a cubic Polarization Beam Splitter (PBS)6, a quarter-wave (1/4 lambda) plate 7, a wave plate rotating mounting seat 8, an oil tank 9, a bottom light absorption material 10, a lens sleeve 11, a focusing lens 12, a position sensitive sensor (PSD)13, a height adjusting adapter 14, a support rod 15, an outer wall 16, an optical auto-collimation system 17, black rough surface light absorption paper 18, a four-way I-V conversion circuit 19, a four-way reverse proportion amplification circuit 20, an A/D conversion circuit 21, an ARM microprocessor 22, upper computer software 23, an Abbe error compensator 24 and a machine tool controller 25.
Further, the laser 1 is automatically controlled through a laser power stability control system 2 and a laser temperature drift compensation system 3 which are arranged on the side wall of the device, so that the stability of the laser and the quality of light spots are improved;
further, laser emitted by the laser 1 passes through an optical auto-collimation system 17, is reflected by the surface of the liquid in the oil tank 9, and is subjected to position change sensing by a position sensitive sensor (PSD) 13;
furthermore, the light beam is reflected and refracted at the same time when being reflected on the surface of the silicon oil, the reflected light is reserved as a measuring light beam, the refracted light is absorbed by a light absorption material 10 at the bottom of the silicon oil in the oil tank 9, the phenomenon that the refracted light beam is received by a position sensitive sensor (PSD)13 through the reflected liquid surface on the bottom surface of the oil tank 9 to cause light spot aliasing and form signal interference is avoided, the precision of the instrument is reduced, and the signal-to-noise ratio of the instrument;
further, a fixed position sensitive sensor (PSD)13 is arranged on an axial line of an outer wall 16 and is matched and adjusted through a laser position fine adjustment bolt 4 and a height adjustment adapter 14, so that the center of a light spot is located at the center of the position sensitive sensor (PSD)13 as far as possible, and the measurement range is expanded;
further, the position sensitive sensor (PSD)13 is a photoelectric sensitive device, and the black matte surface light absorption paper 18 is used for carrying out light absorption treatment on the inner wall of the device, so that the influence of ambient light on the noise current output by the position sensitive sensor (PSD)13 is reduced;
further, the current signal output by the position sensitive sensor (PSD)13 is processed by current-voltage conversion, amplification, acquisition and the like through a four-way I-V conversion circuit 19, a four-way reverse proportional amplification circuit 20, an A/D conversion circuit 21 and an ARM (Acorn RISC machine) microprocessor 22, and is converted into a digital signal;
further, the upper computer software 23 can realize the functions of displaying, storing, processing data, calculating errors to be compensated and the like of the inclination angle measurement;
further, the abbe error compensator 24 compensates the error to be compensated to the machine tool controller 25 by an interpolation method, so as to improve the machining accuracy of the large machine tool.
The present invention will be described in further detail with reference to the accompanying drawings and specific examples.
In order to overcome the defects of the prior art, the invention provides a two-dimensional photoelectric horizontal inclination angle measuring device based on an optical auto-collimation principle and a liquid surface reflection principle, which mainly solves the technical problems that:
(1) the defects that the resolving power of the existing bubble level meter is determined by the size of the curvature radius of the inner wall of the leveling pipe, the curvature radius is small and the measurement resolution is low are overcome; the defects that a precise and complex optical structure needs to be designed, the cost is high and manual intervention is often needed to complete measurement in a precise optical horizontal inclination angle measurement mode are overcome; the defects of poor stability and small measurement range of a measurement result in a capacitive horizontal inclination angle measurement mode are overcome; the defect that an inductive horizontal dip angle measurement mode is complex in structure and high in energy input is needed is overcome; the defect of complex circuit structure required by an electromagnetic horizontal inclination angle measuring mode is overcome; the defects of large size and poor measurement real-time performance of a mechanical horizontal inclination angle measurement mode are overcome; the two-dimensional horizontal inclination angle measuring device based on the MEMS sensor overcomes the defects of large drift and low measuring precision of the horizontal inclination angle measuring device based on the MEMS sensor, and combines the optical auto-collimation principle and the liquid surface reflection principle.
(2) The principle problems that the detection difficulty is increased and the detection precision is reduced due to the fact that the sensing angle change of a photoelectric sensor is smaller than the actual angle change to be detected based on the liquid refraction principle are solved, and the liquid surface reflection measurement method is adopted to replace refraction.
(3) The device overcomes the defects of most existing horizontal inclination angle measuring devices in the application aspect, and provides a large-scale machine tool Abbe error compensation related error compensator and a matched software system which integrate data storage and data processing and can be directly connected with a numerical control machine tool controller.
The invention is realized by the following steps:
in the invention, a First Sensor company DL16-7 double-sided PSD is used as a photoelectric receiving Sensor to sense the change of a detected signal and calculate an angle.
The invention is further illustrated with reference to the following figures and examples.
In the invention, a two-dimensional photoelectric horizontal inclination angle measuring device based on an optical auto-collimation principle and a liquid surface reflection principle is shown in figure 1 and mainly comprises a laser 1, a laser power stability control system 2, a laser temperature drift compensation system 3, a laser position fine adjustment bolt 4, a cubic reflector 5, a cubic Polarization Beam Splitter (PBS)6, a quarter wavelength (1/4 lambda) wave plate 7, a wave plate rotating installation seat 8, an oil tank 9, a bottom light absorption material 10, a lens sleeve 11, a focusing lens 12, a position sensitive sensor (PSD)13, a height adjustment adapter 14, a support rod 15, an outer wall 16, an optical auto-collimation system 17, black rough surface light absorption paper 18, a four-way I-V conversion circuit 19, a four-way reverse proportion amplification circuit 20, an A/D conversion circuit 21, an ARM 22, upper computer software 23 and an Abbe error compensator 24, a machine tool controller 25.
Furthermore, the liquid is placed in an oil tank 9 at the bottom of the device by adopting optical silicone oil, and the optical silicone oil has high kinematic viscosity, no moisture absorption, no corrosion, strong physiological inertia and good chemical stability;
further, the power stability of the laser 1 is automatically controlled through the laser power stability control system 2, and the temperature drift of the laser 1 is controlled through the laser temperature drift compensation system 3, so that the stability of the emitting power of the laser and the quality of light spots are improved;
further, the laser 1 is vertical to the outer wall of the device, and emits laser with 633nm wavelength, and the direction of the light path is changed by the cubic reflector 5 so that the laser vertically emits to the bottom of the device;
further, a cubic Polarization Beam Splitter (PBS)6 installed right below the cubic reflector 5 splits the laser into two beams of light with polarization directions perpendicular to each other, wherein the polarized light with the polarization direction S is reflected on a splitting surface of the cubic Polarization Beam Splitter (PBS)6, and is emitted to black matte surface light-absorbing paper 18 adhered to the inner wall of the device, and is absorbed by the black matte surface light-absorbing paper 18, so that the ambient light generated in the closed device is prevented from interfering with a PSD output signal;
further, the other part of the polarized light with the polarization direction P passes through a cubic Polarization Beam Splitter (PBS)6 and is emitted to a quarter-wave (1/4 λ) plate 7;
further, the polarized light with the polarization direction P passing through the quarter-wave (1/4 λ) plate 7 is emitted to the oil tank 9 directly below the quarter-wave (1/4 λ) plate 7, wherein a part of the light is reflected on the surface of the silicone oil, and the other part of the light is refracted by passing through the silicone oil;
further, the reflected light beam generates 2 times inclination angle change on the surface of the silicon oil, and passes through the quarter-wave plate (1/4 lambda) 7 again, so that the phase of the light beam is shifted by 90 degrees, and the polarization direction is changed from P to S;
further, when returning to the cubic Polarization Beam Splitter (PBS)6, after being reflected on the splitting surface, the light is emitted to the focusing lens 12, and after being converged, the light spot is focused on a position sensitive sensor (PSD)13 arranged on the focal plane of the focusing lens 12 and received as a measurement light spot;
further, a focusing lens 12 is fixed in a lens sleeve 11, and the lens sleeve 11 is horizontally installed on a cubic Polarization Beam Splitter (PBS)6 in a thread fixing mode;
furthermore, the other part of the light beams refracted on the surface of the silicon oil are emitted into the silicon oil and absorbed by a light absorption material 10 at the bottom of the silicon oil in the oil tank 9, so that the light beams are prevented from being reflected by the bottom surface of the oil tank 9 and refracted into the air again to be received by a position sensitive sensor (PSD)13, and the measuring precision is prevented from being influenced by the aliasing of light spots;
further, the position of the laser can be adjusted according to the laser position fine adjustment bolt 4, the center of a light spot is ensured to irradiate the center of a position sensitive sensor (PSD)13 as much as possible, and the horizontal dip angle measurement range is enlarged;
further, the height adjusting adapter 14 and the support rod 15 are used for connecting the cubic Polarization Beam Splitter (PBS)6, the quarter-wave (1/4 λ) plate 7 and the device base, and play a role in adjusting the height of the light spot. The supporting rod 15 is vertically arranged on the device base, the height adjusting adapter piece 14 is arranged on the supporting rod 15, and the height of the supporting rod 15 can be adjusted through the locking structure;
further, a position sensitive sensor (PSD)13 outputs four paths of photocurrent, which is converted into a voltage signal by a four-path I-V conversion circuit 19;
further, the four voltage signals are further amplified by the four inverse proportional amplifying circuits 20;
further, the ARM microprocessor 22 controls the A/D conversion circuit 21 to collect four paths of voltage signals;
further, the light spot position is calculated by the following double-sided PSD light spot position calculation formula and converted into horizontal inclination angle information;
wherein Ix1、Ix2、Iy1、Iy2Respectively, PSD four output current signals, Lx、LyThe side lengths of two directions of a PSD photosensitive surface are shown, and x and y are the gravity center positions of light spots;
further, the upper computer software 23 can realize the functions of displaying, storing, processing data, calculating errors to be compensated and the like of the inclination angle measurement;
further, the abbe error compensator 24 compensates the error to be compensated to the machine tool controller 25 by an interpolation method, so as to improve the machining precision of the large machine tool.
Claims (3)
1. The utility model provides a two-dimentional photoelectricity horizontal inclination measuring device, characterized by, mainly by the laser instrument, laser instrument power stable control system, laser instrument temperature drift compensation system, laser instrument position trimming bolt, the cube speculum of cube, cube polarization spectroscope, the quarter wave plate, the rotatory mount pad of wave plate, the oil tank and the liquid that is located the oil tank inside, the extinction material that is located the liquid bottom in the oil tank, the lens sleeve, focusing lens, the position sensitive sensor, height adjustment adaptor, branch, optics auto-collimation system, black matte extinction paper, four ways I-V converting circuit, four ways reverse proportion amplifier circuit constitute, wherein:
the laser power stability control system and the laser temperature drift compensation system automatically control the laser, so that the stability of the laser and the quality of light spots are improved;
the laser device emits laser, the direction of a light path of the laser is changed through the cubic reflector, the laser is enabled to vertically emit to the bottom oil tank, the cubic polarization spectroscope arranged right below the cubic reflector splits the laser into two beams of light with mutually vertical polarization directions, wherein the polarized light with the polarization direction S is used as useless light to be reflected on a splitting surface of the cubic polarization spectroscope, emitted to the inner wall of the device and absorbed by black rough surface light absorption paper pasted on the inner wall of the device;
the position of the laser can be adjusted by a laser position fine adjustment bolt, so that the center of a light spot is ensured to irradiate the center of the position sensitive sensor to the greatest extent, and the horizontal dip angle measurement range is enlarged;
the polarized light with the polarization direction P is emitted to a quarter-wave plate right below the cubic polarization spectroscope through the cubic polarization spectroscope and passes through the quarter-wave plate, a part of light is reflected on the liquid surface as a measuring light beam, generates 2-time inclination angle change, then passes through the quarter-wave plate again, enables the phase to generate 90-degree deviation, changes the polarization direction from P to S, returns to the cubic polarization spectroscope, and is reflected on the light splitting surface; the light beam is emitted to a focusing lens between the position sensitive sensor and the cubic polarizing beam splitter, and after being focused by the focusing lens, the light beam is received by the position sensitive sensor arranged on the focal plane of the focusing lens;
the focusing lens is fixed in the lens sleeve, and the lens sleeve is arranged on the cubic polarizing beam splitter on the right side of the lens sleeve in a threaded fixing mode;
the other part of light is refracted at the surface of the liquid, is emitted into the liquid in the oil tank and is absorbed by the light absorption material at the bottom of the liquid in the oil tank, so that the light is prevented from being reflected at the bottom of the oil tank and then refracted back to the air again to be received by the position sensitive sensor; the light absorption material at the bottom of the liquid in the oil tank absorbs, weakens and eliminates the refracted light beam, so that the interference of the refracted light beam on the measuring light beam is avoided;
the oil tank is fixed on the device base through a fastening bolt;
the height adjusting adapter and the support rod are used for connecting the cubic polarization spectroscope, the quarter-wave plate and the device base and have the function of adjusting the size of light spots on an oil surface, the support rod is vertically arranged on the base, the height adjusting adapter is arranged on the support rod, and the height of the support rod can be adjusted through the locking structure;
the position sensitive sensor can output four paths of photocurrent signals through four paths of I-V conversion circuits and four paths of reverse proportional amplifying circuits according to different gravity center positions of light spots.
2. The two-dimensional photoelectric horizontal inclination angle measuring device according to claim 1, wherein an a/D conversion circuit, an ARM processor, upper computer software, and an error compensator are additionally provided; the signals output by the four reverse proportional amplifying circuits are amplified, collected and processed by the A/D conversion circuit and the ARM processor; the upper computer software processes the angle data, and the error compensator communicates with the machine tool controller to interpolate the angle error to the machine tool controller for error compensation.
3. The two-dimensional photoelectric horizontal tilt angle measuring device according to claim 2, wherein in the ARM processor, the light spot position is calculated by the following double-sided PSD light spot position calculation formula and converted into horizontal tilt angle information;
ix1, Ix2, Iy1 and Iy2 are PSD four-way output current signals respectively, Lx and Ly are the side lengths of two directions of a PSD photosensitive surface, and x and y are the positions of the centers of gravity of light spots.
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