CN107356227A - 2 D photoelectric horizontal inclination angle measuring device - Google Patents
2 D photoelectric horizontal inclination angle measuring device Download PDFInfo
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- CN107356227A CN107356227A CN201710623084.8A CN201710623084A CN107356227A CN 107356227 A CN107356227 A CN 107356227A CN 201710623084 A CN201710623084 A CN 201710623084A CN 107356227 A CN107356227 A CN 107356227A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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Abstract
The present invention relates to laser measuring technique field, to propose 2 D photoelectric level inclination e measurement technology scheme, measurement is reduced into not, improve measurement accuracy, the present invention, 2 D photoelectric horizontal inclination angle measuring device, by laser, laser power stabilization control system, laser temperature drift compensating system, laser positions trimming bolt, cube speculum, cube polarization spectroscope, quarter-wave wave plate, wave plate rotary mounting seat, oil tank and the liquid inside oil tank, the light absorbent of liquid bottom in oil tank, lens sleeve, condenser lens, position sensitive detector, height adjusting switchover part, pole, optical autocollimating system, black hair side extinction paper, four road I V change-over circuits, the reverse scaling circuit composition in four tunnels.Present invention is mainly applied to 2 D photoelectric level inclination to measure occasion.
Description
Technical field
The present invention relates to laser measuring technique field, specifically, is related to 2 D photoelectric horizontal inclination angle measuring device.
Background technology
Two-dimensional level inclination measuring system is in building construction, bridge construction, machine-building, instrument of surveying and mapping, navigation aviation, control
Suffer from being widely applied in the fields such as engineering processed, robot, automation；With Digital Electronic Technique and the hair of laser technology
Exhibition, photoelectric measurement method have been widely used in field of precision measurement, and horizontal inclination angle measuring device is also therewith gradually from initial
Air-bubble level develop to photoelectricity digital display level-meter direction.
On the one hand, two-dimensional level dip measuring device can be divided into from principle bubble type, optical profile type, condenser type, inductance type,
Electromagnetic type, mechanical and MEMS formulas etc..Bubble type horizontal inclination angle measuring device is often referred to air-bubble level, and its resolving power is by water
The radius of curvature size of quasi- inside pipe wall determines that radius of curvature is bigger, and resolving power is higher；Radius of curvature is smaller, and resolving power is lower；Light
Formula angle measurement mode high resolution, measurement are accurate, but need to design accurate complicated optical texture, and cost is high and often needs artificial
Intervene and complete measurement；Measurement by capacitance result less stable, measurement range are smaller；Inductance type measurement scope is larger and precision compared with
Height, but the energy input that its complicated needs is higher；Electromagnetic type measurement accuracy is high, speed is fast, but its required circuit is complicated；Machine
Tool formula cost is relatively low, but its bulky and measurement poor real；Horizontal inclination angle measuring device based on MEMS sensor has
The characteristics of reaction speed is fast, small volume, strong environmental suitability, but its drift is big, measurement accuracy is low.
On the other hand, the 3DFAMILY- researched and developed jointly for Taiwan Zhi Tai groups and Taiwan Univ.'s Precision Measurement Laboratory
LM400 type twin shaft optical-electrical level-meters, reachable ± 100 " of its measurement range, resolving power 0.1 ", repeatability ± 1 ", device uses light
The principle that auto-collimation principle and light beam are reflected by different medium on its surface.Because liquid is at the earth's surface by gravity
Remain horizontal, when change of pitch angle occurs for device relative level, light beam from air inject liquid surface when can be in its table
Face produces refraction and plane mirror of the directive installed in device bottom surface occurs reflection and change optical path direction, is injected by liquid surface
Air reflects again, by photoelectric sensor sensing facula position change, and is converted into two-dimensional level change of pitch angle.This device
Optical autocollimating principle is used so that the relatively simple equipment miniaturization, integrated of being easy to of light path；Use four-quadrant photo detector
Degree of precision can be achieved；The price common people, it is easy to receive.But meanwhile this device causes to work as device by using liquid refracting principle
When change of pitch angle occurs for relative level, the change of pitch angle received by four-quadrant photoelectric sensor is less than the actual inclination angle of device and become
Change, so as to reduce measurement accuracy in principle, improve late detection cost and difficulty.
Another further aspect, the measurement and compensation of Abbe error in the medium-and-large-sized machine tool error measurement of high-end equipment manufacturing are directed to,
While needing to improve angle-measurement accuracy, angle measurement data is uploaded to host computer and is handled and carries out angular error
By the controller of error compensator direct interpolation to multi-form (TXYZ, XTYZ, XYTZ, XYZT) lathe to improve after computing
Its machining accuracy.At present, in the market dip measuring device rare supporting data processing software, error compensator and error compensation
Software.
By the solution known in the art for being used to overcome the technical problem.
Therefore, a kind of 2 D photoelectric horizontal inclination angle measuring device is shown, the device by combine optical autocollimating principle with
And liquid surface principle of reflection can pass through level inclination to be measured change after 2 times of optical autocollimating system is amplified by photoelectric sensor
Facula position change is sensed, improves measurement device precision, and be directed to different type (TXYZ, XTYZ, XYTZ, XYZT) large scale computer
Bed, there is provided a kind of integrated inclination data storage, data processing and can direct-connected controller of digital controlled machine tool be applied to heavy duty machine tools Abbe
The error compensator and error compensation software of error compensation.
The content of the invention
For overcome the deficiencies in the prior art, it is contemplated that：
(1) provide a kind of based on the measurement of the 2 D photoelectric level inclination of optical autocollimating principle and liquid surface principle of reflection
The overall plan design of device, overcome existing level inclination detecting device is complicated, with high costs, drift is big, precision is low etc.
Shortcoming.
(2) a kind of method that replacement refraction is reflected by liquid surface is provided, to improve liquid level dip measuring device
Accuracy of detection.
(3) a kind of mechanical structure is provided, to ensure that whole horizontal inclination angle measuring device relative level inclination angle is as to be measured
Inclination angle.
(4) provide a kind of storage of integrated data, data processing and can direct-connected controller of digital controlled machine tool be applied to heavy duty machine tools
The error compensator of Abbe error compensation and supporting error compensation software application system, so as to improve machine finish.
To reach the object of the invention, the technical solution adopted by the present invention is 2 D photoelectric horizontal inclination angle measuring device, by swashing
Light device, laser power stabilization control system, laser temperature drift compensating system, laser positions trimming bolt, cube
Speculum, cube polarization spectroscope, quarter-wave wave plate, wave plate rotary mounting seat, oil tank and the liquid inside oil tank
Body, the light absorbent of liquid bottom in oil tank, lens sleeve, condenser lens, position sensitive detector, height adjusting switchover
Part, pole, optical autocollimating system, black hair side extinction paper, four road I-V change-over circuits, the reverse scaling circuit group in four tunnels
Into, wherein：
Laser power stabilization control system and laser temperature drift compensating system automatically control to laser, carry
High laser stability and optical quality；
Laser sends laser and changes optical path direction by cube speculum, makes its vertical directive bottom oil tank.And
It is the mutually perpendicular two-beam in polarization direction that laser is divided by cube polarization spectroscope immediately below cube speculum,
The polarised light that wherein polarization direction is S is reflected as without the light splitting surface used up in cube polarization spectroscope, directive device inwall,
The black hair side extinction paper being secured on device inwall absorbs；
Laser positions can be adjusted by laser positions trimming bolt, and it is quick to ensure that spot center is irradiated to position as far as possible
Feel center sensor, increase level inclination measurement range；
Polarization direction is four that P polarised light is located at by cube polarization spectroscope directive immediately below cube polarization spectroscope
/ mono- wavelength wave plate is simultaneously reflected by quarter-wave wave plate, a part of light as measuring beam in liquid surface,
After producing 2 times of change of pitch angle.Again by quarter-wave wave plate, its phase is set to occur 90.Skew, polarization direction is become by P
After S.Cube polarization spectroscope is returned to, after its light splitting surface reflects；Directive be located at position sensitive detector and cube partially
The condenser lens to shake between spectroscope, after being focused by condenser lens to measuring beam, is placed on condenser lens focal plane
Position sensitive detector received；
Condenser lens is fixed in lens sleeve, and lens sleeve is threadably secured mode and is mounted on standing on the right side of it
On square polarization spectroscope；
Another part light reflects in liquid surface, the liquid injected inside oil tank, by oil tank internal liquid bottom
Light absorbent is absorbed, and avoids it from being connect again by position sensitive detector in bounce back air after tank bottom reflects
Receive；
Oil tank internal liquid bottom light absorbent plays absorption, decrease, elimination to this beam refraction light, avoids it to measurement
Light beam forms interference；
Oil tank is fixed on device pedestal by fastening bolt；
Height adjusting switchover part and pole are used to connect cube polarization spectroscope, quarter-wave wave plate and device bottom
Seat, and play a part of adjusting spot size on pasta, perpendicular to being installed on base, height adjusting switchover part is installed on pole
On pole, height adjustment can be carried out on pole by locking mechanism；
Position sensitive detector can be put according to hot spot position of centre of gravity difference through four road I-V change-over circuits, the reverse ratio in four tunnels
The big tunnel photo-signal of circuit output four.
Also include A/D change-over circuits, arm processor, upper computer software, error compensator；The reverse scaling electricity in four tunnels
The signal of road output is amplified to photo-signal through A/D change-over circuits, ARM microprocessor, gathers, handled；Host computer is soft
Part is handled angle-data, and Abbe error compensator is communicated with machine tool controller is incorporated into lathe control by angular error
Device processed carries out error compensation to lathe.
In ARM, facula position is calculated by following double-side type PSD facula positions calculation formula, and be converted to level inclination
Information；
Wherein Ix1、Ix2、Iy1、Iy2The respectively road output current signals of PSD tetra-, Lx、LyFor the direction length of side of PSD photosurfaces two,
X, y is hot spot position of centre of gravity.
The features of the present invention and beneficial effect are：
(1) existing air-bubble level resolving power is overcome to determine that radius of curvature is small by the radius of curvature size of level inside pipe wall,
The shortcomings that Measurement Resolution is low；The accurate complicated optics knot of design required for overcoming precision optics formula level inclination metering system
Structure, cost height and normal the shortcomings that needing manual intervention to complete measurement；Overcome capacitance level measurement of dip angle mode measurement result steady
Qualitative poor, the less shortcoming of measurement range；Overcome inductance type level inclination metering system is complicated to need higher energy
The shortcomings that input；The shortcomings that overcoming circuit structure complexity needed for electromagnetic type level inclination metering system；Mechanical level is overcome to incline
Angular measurement mode it is bulky and measurement poor real the shortcomings that；The horizontal inclination angle measuring device based on MEMS sensor is overcome to float
Move the shortcomings that big, measurement accuracy is low, there is provided a kind of two-dimensional level of combination optical autocollimating principle and liquid surface principle of reflection
Dip measuring device.
(2) overcome causes photoelectric sensor sensing angle change to be less than actual angle to be measured based on liquid refracting principle becomes
Change so that detection difficulty increases, the fundamental problems that accuracy of detection declines, there is provided a kind of reflected by using liquid surface replaces
The measuring method of refraction.
(3) existing most horizontal inclination angle measuring devices are overcome the application aspect the defects of, there is provided a kind of integrated data storage,
Data processing and can direct-connected controller of digital controlled machine tool be applied to the error compensator and supporting soft of heavy duty machine tools Abbe error compensation
Part system.
Brief description of the drawings：
Fig. 1 shows 2 D photoelectric horizontal inclination angle measuring device entirety topological diagram of the present invention.
Fig. 2 shows 2 D photoelectric horizontal inclination angle measuring device mechanical construction drawing of the present invention.
In figure：1 is laser, and 2 be laser power stabilization control system, and 3 be laser temperature drift compensating system, 4
It is cube speculum for laser positions trimming bolt, 5,6 be cube polarization spectroscope (PBS), and 7 be quarter-wave
(1/4 λ) wave plate, 8 be wave plate rotary mounting seat, and 9 be oil tank, and 10 be bottom light absorbent, and 11 be lens sleeve, and 12 be focusing
Lens, 13 be position sensitive detector (PSD), and 14 be height adjusting switchover part, and 15 be pole, and 16 be outer wall, 17 be optics from
Colimated light system, 18 be black hair side extinction paper, and 19 be four road I-V change-over circuits, and 20 be the reverse scaling circuit in four tunnels, 21
It is ARM microprocessor for A/D change-over circuits, 22,23 be upper computer software, and 24 be Abbe error compensator, and 25 be Machine-Tool Control
Device.
Embodiment
To overcome the shortcomings of traditional inclination angle detection method and technology, present invention is primarily aimed at provide one kind to be based on optics certainly
The 2 D photoelectric horizontal inclination angle measuring device of principle and liquid surface principle of reflection is collimated, mainly solving the technical problems that：
(1) existing air-bubble level resolving power is overcome to determine that radius of curvature is small by the radius of curvature size of level inside pipe wall,
The shortcomings that Measurement Resolution is low；The accurate complicated optics knot of design required for overcoming precision optics formula level inclination metering system
Structure, cost height and normal the shortcomings that needing manual intervention to complete measurement；Overcome capacitance level measurement of dip angle mode measurement result steady
Qualitative poor, the less shortcoming of measurement range；Overcome inductance type level inclination metering system is complicated to need higher energy
The shortcomings that input；The shortcomings that overcoming circuit structure complexity needed for electromagnetic type level inclination metering system；Mechanical level is overcome to incline
Angular measurement mode it is bulky and measurement poor real the shortcomings that；The horizontal inclination angle measuring device based on MEMS sensor is overcome to float
Move the shortcomings that big, measurement accuracy is low, there is provided a kind of two-dimensional level of combination optical autocollimating principle and liquid surface principle of reflection
Dip measuring device.
(2) overcome causes photoelectric sensor sensing angle change to be less than actual angle to be measured based on liquid refracting principle becomes
Change so that detection difficulty increases, the fundamental problems that accuracy of detection declines, there is provided a kind of reflected by using liquid surface replaces
The measuring method of refraction.
(3) existing most horizontal inclination angle measuring devices are overcome the application aspect the defects of, there is provided a kind of integrated data storage,
Data processing and can direct-connected controller of digital controlled machine tool be applied to the error compensator and supporting of heavy duty machine tools Abbe error compensation
Software application system.
To reach above-mentioned target, the present invention adopts the technical scheme that, anti-based on optical autocollimating principle and liquid surface
The 2 D photoelectric horizontal inclination angle measuring device that principle is combined is penetrated, as shown in figure 1, device includes：
Laser 1, laser power stabilization control system 2, laser temperature drift compensating system 3, laser positions are micro-
Adjust bolt 4, cube speculum 5, cube polarization spectroscope (PBS) 6, quarter-wave (1/4 λ) wave plate 7, wave plate rotation peace
Fill seat 8, oil tank 9, bottom light absorbent 10, lens sleeve 11, condenser lens 12, position sensitive detector (PSD) 13, height
Adjusting switchover part 14, pole 15, outer wall 16, optical autocollimating system 17, black hair side extinction paper 18, four road I-V change-over circuits
19, the reverse scaling circuit 20 in four tunnels, A/D change-over circuits 21, ARM microprocessor 22, upper computer software 23, Abbe error benefit
Device 24 is repaid, machine tool controller 25 forms.
Further, drifted about by the laser power stabilization control system 2 in device side wall and laser temperature
Compensation system 3 automatically controls to laser 1, improves laser stability and optical quality；
Further, laser 1 sends laser and passes through optical autocollimating system 17, passes through the internal liquid surface of oil tank 9 and reflects
Change in location sensing is carried out by position sensitive detector (PSD) 13；
Further, light beam is reflected while silicone oil surface is reflected, and reflected light is retained as measuring beam,
Refraction light is absorbed by silicone oil bottom light absorbent 10 in oil tank 9, avoids refracted portion light beam from being penetrated by the bottom reflection of oil tank 9
Go out liquid level causes hot spot aliasing to form signal interference, lowering apparatus precision, so as to put forward by the reception of position sensitive detector (PSD) 13
High instrument signal to noise ratio；
Further, fixed position sensitive sensor (PSD) 13 is on the axis of outer wall 16, and is finely tuned by laser positions
Bolt 4 and height adjusting switchover part 14 coordinate regulation, make spot center try one's best in the centre bit of position sensitive detector (PSD) 13
Put, to expand measurement range；
Further, position sensitive detector (PSD) 13 is photoelectric sensitive device, by black hair side extinction paper 18 to device
Inwall carries out extinction processing, and reducing ambient light location sensitive sensor (PSD) 13 output noise electric current influences；
Further, four road I-V change-over circuits 19, the reverse scaling circuit 20 in four tunnels, A/D change-over circuits 21, ARM are passed through
The output current signal of position sensitive detector (PSD) 13 is carried out electric current-electricity by (Acorn RISC Machine) microprocessor 22
The processing such as pressure conversion, amplification, collection, are converted into data signal；
Further, upper computer software 23 can realize the display of measurement of dip angle, storage, data processing, error calculation to be compensated
Etc. function；
Further, error to be compensated is arrived machine tool controller 25 by Abbe error compensator 24 by the method compensation of interpolation
In, to improve heavy duty machine tools machining accuracy.
The present invention is further described with instantiation below in conjunction with the accompanying drawings.
For overcome the deficiencies in the prior art, the present invention provides a kind of former based on optical autocollimating principle and liquid surface reflection
The 2 D photoelectric horizontal inclination angle measuring device of reason, main technical problems to be solved have：
(1) existing air-bubble level resolving power is overcome to determine that radius of curvature is small by the radius of curvature size of level inside pipe wall,
The shortcomings that Measurement Resolution is low；The accurate complicated optics knot of design required for overcoming precision optics formula level inclination metering system
Structure, cost height and normal the shortcomings that needing manual intervention to complete measurement；Overcome capacitance level measurement of dip angle mode measurement result steady
Qualitative poor, the less shortcoming of measurement range；Overcome inductance type level inclination metering system is complicated to need higher energy
The shortcomings that input；The shortcomings that overcoming circuit structure complexity needed for electromagnetic type level inclination metering system；Mechanical level is overcome to incline
Angular measurement mode it is bulky and measurement poor real the shortcomings that；The horizontal inclination angle measuring device based on MEMS sensor is overcome to float
Move the shortcomings that big, measurement accuracy is low, there is provided a kind of two-dimensional level of combination optical autocollimating principle and liquid surface principle of reflection
Dip measuring device.
(2) overcome causes photoelectric sensor sensing angle change to be less than actual angle to be measured based on liquid refracting principle becomes
Change so that detection difficulty increases, the fundamental problems that accuracy of detection declines, there is provided a kind of reflected by using liquid surface replaces
The measuring method of refraction.
(3) existing most horizontal inclination angle measuring devices are overcome the application aspect the defects of, there is provided a kind of integrated data storage,
Data processing and can direct-connected controller of digital controlled machine tool be applied to heavy duty machine tools Abbe error compensation correlated error compensator and supporting
Software systems.
What the present invention was realized in：
In the present invention, using First Sensor company DL16-7 double-side types PSD as photoelectric receiving transducer, quilt is sensed
Signal intensity is surveyed, and calculates angle.
The present invention will be further described with reference to the accompanying drawings and examples.
In the present invention, measured and filled based on the 2 D photoelectric level inclination of optical autocollimating principle and liquid surface principle of reflection
Put as shown in figure 1, mainly by laser 1, laser power stabilization control system 2, laser temperature drift compensating system 3, swash
Light device fine position bolt 4, cube speculum 5, cube polarization spectroscope (PBS) 6, quarter-wave (1/4 λ) wave plate 7,
Wave plate rotary mounting seat 8, oil tank 9, bottom light absorbent 10, lens sleeve 11, condenser lens 12, position sensitive detector
(PSD) 13, height adjusting switchover part 14, pole 15, outer wall 16, optical autocollimating system 17, black hair side extinction paper 18, four
Road I-V change-over circuits 19, the reverse scaling circuit 20 in four tunnels, A/D change-over circuits 21, ARM microprocessor 22, upper computer software
23, Abbe error compensator 24, machine tool controller 25 forms.
Further, liquid is placed in bottom of device oil tank 9 using optics silicone oil, and there is optics silicone oil larger motion to glue
Degree, nonhygroscopic, corrosion-free, physiological inertia is strong, and chemical stability is good；
Further, carry out power stability to laser 1 by laser power stabilization control system 2 to automatically control, pass through
Laser temperature drift compensating system 3 is controlled to the temperature drift of laser 1, to improve laser transmission power stability and light
Spot quality；
Further, laser 1 is launched 633nm wavelength lasers and changed by cube speculum 5 perpendicular to device outer wall
Optical path direction makes its vertical directive bottom of device；
Further, laser light splitting is inclined by cube polarization spectroscope (PBS) 6 immediately below cube speculum 5
Shake the mutually perpendicular two-beam in direction, light splitting surface of the polarised light in a cube polarization spectroscope (PBS) 6 that wherein polarization direction is S
Reflected, directive is pasted onto the black hair side extinction paper 18 on device inwall, and it is inhaled by black hair side extinction paper 18
Receive, prevent its generation environment light inside locking device, PSD output signals are interfered；
Further, the polarised light that another part polarization direction is P by a cube polarization spectroscope (PBS) 6, directive four/
One wavelength (1/4 λ) wave plate 7；
Further, by polarised light directive that the polarization direction of quarter-wave (1/4 λ) wave plate 7 is P positioned at four/
Oil tank 9 immediately below one wavelength (1/4 λ) wave plate 7, a portion light reflect on silicone oil surface, and another part passes through silicon
Fry dried food ingredients life refraction；
Further, the light beam reflected produces 2 times of change of pitch angle on silicone oil surface, again by quarter-wave
(1/4 λ) wave plate 7, cause its phase that 90 ° of skews occur, polarization direction is changed into S from P；
Further, when returning to cube polarization spectroscope (PBS) 6, after light splitting surface reflects, directive condenser lens 12,
Hot spot is focused on after convergence on the position sensitive detector (PSD) 13 being placed on the focal plane of condenser lens 12, as measurement light
Spot is received；
Further, condenser lens 12 is fixed in lens sleeve 11, and lens sleeve 11 is threadably secured the horizontal peace of mode
On a cube polarization spectroscope (PBS) 6；
Further, the light beam that another part reflects on silicone oil surface, silicone oil is injected, by positioned at the inside silicone oil of oil tank 9
Bottom light absorbent 10 is absorbed, and prevents it to be refracted into again in air by position sensitive detector by the bottom reflection of oil tank 9
(PSD) 13 receive, so as to avoid hot spot aliazing effect measurement accuracy；
Further, laser positions can be adjusted according to laser positions trimming bolt 4, ensure spot center as far as possible
The center of position sensitive detector (PSD) 13 is irradiated to, increases level inclination measurement range；
Further, height adjusting switchover part 14 and pole 15 are used to connect cube polarization spectroscope (PBS) 6, a quarter
Wavelength (1/4 λ) wave plate 7 and device pedestal, and play a part of adjusting facular height.The vertical means of pole 15 are in device pedestal
On, height adjusting switchover part 14 is installed on pole 15, height adjustment can be carried out on pole 15 by locking mechanism；
Further, position sensitive detector (PSD) 13 exports four road photoelectric currents, is converted to through four road I-V change-over circuits 19
Voltage signal；
Further, four road voltage signals are further amplified through the reverse scaling circuit 20 in four tunnels；
Further, A/D change-over circuits 21 are controlled to be acquired four road voltage signals by ARM microprocessor 22；
Further, facula position is calculated by following double-side type PSD facula positions calculation formula, and is converted to level inclination letter
Breath；
Wherein Ix1、Ix2、Iy1、Iy2The respectively road output current signals of PSD tetra-, Lx、LyFor the direction length of side of PSD photosurfaces two,
X, y is hot spot position of centre of gravity；
Further, upper computer software 23 can realize the display of measurement of dip angle, storage, data processing, error calculation to be compensated
Etc. function；
Further, error to be compensated is arrived by machine tool controller by the method compensation of interpolation by Abbe error compensator 24
In 25, to improve heavy duty machine tools machining accuracy.
Claims (3)
1. a kind of 2 D photoelectric horizontal inclination angle measuring device, it is characterized in that, by laser, laser power stabilization control system,
Laser temperature drift compensating system, laser positions trimming bolt, cube speculum, cube polarization spectroscope, four/
One wavelength wave plate, wave plate rotary mounting seat, oil tank and the liquid inside oil tank, the extinction material of liquid bottom in oil tank
Material, lens sleeve, condenser lens, position sensitive detector, height adjusting switchover part, pole, optical autocollimating system, black hair
Face extinction paper, four road I-V change-over circuits, the reverse scaling circuit composition in four tunnels, wherein：
Laser power stabilization control system and laser temperature drift compensating system automatically control to laser, improve and swash
Light device stability and optical quality；
Laser sends laser and changes optical path direction by cube speculum, makes its vertical directive bottom oil tank.And install
It is the mutually perpendicular two-beam in polarization direction that laser is divided by cube polarization spectroscope immediately below cube speculum, wherein
The polarised light that polarization direction is S is reflected as without the light splitting surface used up in cube polarization spectroscope, directive device inwall, is glued
The black hair side extinction paper being attached on device inwall absorbs；
Laser positions can be adjusted by laser positions trimming bolt, ensure that spot center is irradiated to position sensing biography as far as possible
Sensor center, increase level inclination measurement range；
Polarization direction be P polarised light by cube polarization spectroscope directive be located at immediately below cube polarization spectroscope four/
One wavelength wave plate is simultaneously reflected by quarter-wave wave plate, a part of light as measuring beam in liquid surface, produces 2
After times change of pitch angle.Again by quarter-wave wave plate, its phase is set to occur 90。Skew, after polarization direction is changed into S from P.
Cube polarization spectroscope is returned to, after its light splitting surface reflects；Directive is located at position sensitive detector and cube polarization spectro
Condenser lens between mirror, after being focused by condenser lens to measuring beam, the position that is placed on condenser lens focal plane
Sensitive sensor is received；
Condenser lens is fixed in lens sleeve, lens sleeve be threadably secured mode be mounted on the right side of it cube partially
Shake on spectroscope；
Another part light reflects in liquid surface, the liquid injected inside oil tank, by the extinction of oil tank internal liquid bottom
Material is absorbed, and avoids it from being received again by position sensitive detector in bounce back air after tank bottom reflects；
Oil tank internal liquid bottom light absorbent plays absorption, decrease, elimination to this beam refraction light, avoids it from forming measuring beam
Interference；
Oil tank is fixed on device pedestal by fastening bolt；
Height adjusting switchover part and pole are used to connect cube polarization spectroscope, quarter-wave wave plate and device pedestal, and
Play a part of adjusting spot size on pasta, for pole perpendicular to being installed on base, height adjusting switchover part is installed on pole
On, height adjustment can be carried out on pole by locking mechanism；
Position sensitive detector can be according to hot spot position of centre of gravity difference through the reverse scaling electricity in four road I-V change-over circuits, four tunnels
Road exports four tunnel photo-signals.
2. 2 D photoelectric horizontal inclination angle measuring device as claimed in claim 1, it is characterized in that, in addition to A/D change-over circuits,
Arm processor, upper computer software, error compensator；The signal of four tunnels reverse scaling circuit output through A/D change-over circuits,
ARM microprocessor is amplified to photo-signal, gathers, handled；Upper computer software is handled angle-data, and Abbe misses
Poor compensator is communicated with machine tool controller is incorporated into machine tool controller to lathe progress error compensation by angular error.
3. 2 D photoelectric horizontal inclination angle measuring device as claimed in claim 1, it is characterized in that, in ARM, by following double-side types
PSD facula positions calculation formula calculates facula position, and is converted to level inclination information；
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1
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Wherein Ix1, Ix2, Iy1, Iy2 are respectively the road output current signals of PSD tetra-, and Lx, Ly are the direction length of side of PSD photosurfaces two,
X, y is hot spot position of centre of gravity.
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| CN108871278A (en) * | 2018-08-19 | 2018-11-23 | 天津大学 | A kind of reflective twin shaft optical-electrical level-meter of liquid surface and method |
| CN109470182A (en) * | 2018-11-27 | 2019-03-15 | 中国航发长春控制科技有限公司 | A kind of avigation piece superhigh precision end face plane degree detection imaging device and detection method |
| CN110208167A (en) * | 2019-06-19 | 2019-09-06 | 天津大学 | A kind of lubricant oil metal wear particle detection device that can distinguish bubble and detection method |
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| CN107356227B (en) | 2020-04-17 |
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