CN107354441A - 一种纳米复合锆铝硅氮化物刀具涂层及其制备方法 - Google Patents

一种纳米复合锆铝硅氮化物刀具涂层及其制备方法 Download PDF

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CN107354441A
CN107354441A CN201710555848.4A CN201710555848A CN107354441A CN 107354441 A CN107354441 A CN 107354441A CN 201710555848 A CN201710555848 A CN 201710555848A CN 107354441 A CN107354441 A CN 107354441A
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silicon nitride
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zirconium aluminum
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徐爱娇
赵先锐
许辉
张梦贤
方航
方一航
薛双喜
霍颜秋
曹振雨
冯尚申
吴建波
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Taizhou University
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    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications

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Abstract

本发明属于金属表面涂层技术领域，公开了一种在WC/CO硬质合金基体上沉积纳米复合锆铝硅氮化物涂层及其制备方法。本发明所述的锆铝硅氮化物涂层分为两层，一层为Zr/ZrN打底层，厚度为100～400纳米；一层为纳米复合锆铝硅氮化物涂层，厚度为2.8～3.4微米；涂层总厚度为2.9～3.8微米。本发明所述的涂层采用磁控溅射技术沉积。涂层中含有锆、铝、硅和氮四种元素，涂层显微硬度达到36.2GPa，耐高温氧化温度可达1180℃。通过本发明制备的硬质合金刀具可实现对高硬度的金属材料进行高速干切削。

Description

一种纳米复合锆铝硅氮化物刀具涂层及其制备方法
技术领域
本发明属于金属表面涂层技术领域，涉及一种采用非平衡磁控溅射技术沉积的纳米复合锆铝硅氮化物刀具涂层及其制备方法。
背景技术
自世纪年代以来,随着现代工业的进步和金属切削工艺的发展,尤其是高速切削、硬切削和干切削工艺的出现,对金属切削刀具提出了越来越高的要求,近几十年应市场需求发展起来的材料表面改性技术,即切削刀具表面涂层技术得到了飞速的发展,无论是理论研究还是生产应用都取得了丰硕的成果,涂层材料的研制和材料的表面改性成为当代材料科学中最活跃的研究领域之一,而过渡族金属氮化物涂层因其具有的硬度和抗磨损性能优势,被广泛用作切削和成型工具表面改性。
氮化物通常具有很高的硬度和强度、低摩擦系数、好的抗氧化性能和热稳定性、高抗热震性能,在需要减少摩擦和磨损的领域如刀具、模具等行业将有着重要用途,尤其是过渡族金属氮化物常被用作刀具表面强化材料,以提高基体材料的表面性能。开发可用于刀具表面强化的新材料以获得更加优异的金属切削刀具，一直是金属切削工艺不变的目标。
发明内容
本发明的目的在于提供一种在硬质合金刀具表面涂覆了一层纳米复合锆铝硅氮化物的刀具涂层及其制备方法。本发明的具体技术方案如下所述。
本发明提供一种纳米复合锆铝硅氮化物刀具涂层，其配方为：锆30～60at.％，铝5～30at.％，硅5～20at.％，氮20～50at.％。用本配方制成的锆铝硅氮化物涂层，其各成分含量之和应为100％。
上述涂层是在硬质合金基体上先沉积一层Zr/ZrN打底层，厚度为100～400纳米；然后才沉积纳米复合锆铝硅氮化物涂层，厚度为2.8～3.4微米；涂层总厚度为2.9～3.8微米。
上述硬质合金基体可以为WC/CO硬质合金刀具。
本发明还提供上述纳米复合锆铝硅氮化物涂层的制备方法，所述方法包括如下步骤：
(1)基体预处理工艺：将预镀刀具放入盛有浓度为95％的酒精的超声波清洗机中清洗5min，接着将取出的刀具烘干。
(2)沉积Zr/ZrN打底层：将清洗后的刀具均匀的固定在工件架上，装入磁控溅射镀膜机中，调节工件架转速为10-165r/min。抽至本底真空5×10-4Pa，通入Ar气调节腔体气压至0.1-0.5Pa，同时打开加热器升温至350-450℃。对基体施加400-600V负偏压，溅射基体600-800s,溅射功率5-7kw。随后降低基体负偏压至280-320V，通入N2，调节腔体气压至1-3Pa，温度升高至450-550℃。使锆靶通电，功率固定为200W，沉积Zr/ZrN打底层600-800s。
(3)沉积纳米复合锆铝硅氮化物涂层：然后使硅靶和铝靶通电，通过调节硅靶和铝靶的功率沉积不同原子百分比含量的锆铝硅氮化物涂层，沉积时间240-300min。沉积结束后使刀具随炉冷却至150℃以下取出。
本发明所使用的基底为WC/CO硬质合金刀具，基体表面涂层为锆铝硅氮化物硬质涂层。涂层显微硬度达到36.2GPa，耐高温氧化温度可达1180℃。
本发明可通过改变涂层中各元素组分的含量调节涂层的显微结构、硬度和抗高温氧化的性能，可以适应不同的切削环境和加工条件。
本发明的有益效果是：使用本发明所述涂层涂覆的刀具，切削速度和使用寿命可大幅度提高；通过调节涂层的显微结构，可适用于各种不同的切削环境和加工条件。
附图说明
图1为本发明所述涂层的结构示意图；
图中，1为基体，2为Zr/ZrN打底层，3为纳米复合锆铝硅氮化物涂层。
具体实施方式
为了更好的说明本发明的技术方案，下面用具体实施例来进行进一步的说明。
实施例1
本实施例是在WC/CO硬质合金刀具基体上沉积锆铝硅氮化物涂层，涂层分为两层，一层为Zr/ZrN打底层，厚度为100～400纳米；一层为纳米复合锆铝硅氮化物涂层，厚度为2.8～3.4微米；涂层总厚度为2.9～3.8微米。
本发明所述涂层配方分别如下：
锆30at.％，铝16at.％，硅18at.％，氮36at.％
锆36at.％，铝15at.％，硅20at.％，氮29at.％
锆42at.％，铝30at.％，硅5at.％，氮23at.％
锆55at.％，铝5at.％，硅20at.％，氮20at.％
锆60at.％，铝5at.％，硅5at.％，氮30at.％
锆32at.％，铝7at.％，硅11at.％，氮50at.％
本实施例中纳米复合锆铝铬氮化物涂层的制备方法包括如下步骤：
(1)基体预处理工艺：将预镀刀具放入盛有浓度为95％的酒精的超声波清洗机中清洗5min，接着将取出的刀具烘干。
(2)沉积Zr/ZrN打底层：将清洗后的刀具均匀的固定在工件架上，装入磁控溅射镀膜机中，调节工件架转速为10-165r/min。抽至本底真空5×10-4Pa，通入Ar气调节腔体气压至0.1-0.5Pa，同时打开加热器升温至350-450℃。对基体施加400-600V负偏压，溅射基体600-800s,溅射功率5-7kw。随后降低基体负偏压至280-320V，通入N2，调节腔体气压至1-3Pa，温度升高至450-550℃。使锆靶通电，功率固定为200W，沉积Zr/ZrN打底层600-800s。
(3)沉积纳米复合锆铝硅氮化物涂层：然后使硅靶和铝靶通电，通过调节硅靶和铝靶的功率沉积不同原子百分比含量的锆铝硅氮化物涂层，沉积时间240-300min。沉积结束后使刀具随炉冷却至150℃以下取出。
实施例2
在YG8硬质合金立铣刀表面沉积本发明所述的纳米复合锆铝硅氮化物涂层，与在相同硬质合金立铣刀表面沉积氮化锆硬质涂层以及未涂层刀具各取三支，进行刀具寿命与耐磨性测试。寿命测试条件为：刀具为Φ5mm 4刃立铣刀,被切工件为4Cr5MoSiV(58HRC),干铣削,顺铣,切削速度为350m/min，每齿切削量为0.05mm/Z，径向进给量为0.20mm，轴向进给量为2mm。
测试结果表明：在相同的实验条件下，用本发明所述的纳米复合锆铝硅氮化物涂覆的刀具铣削长度达到了960m，涂覆氮化锆涂层的刀具铣削长度为520m，未涂层刀具铣削长度仅有230m。本发明所述的纳米复合锆铝硅氮化物涂覆的刀具寿命被大幅提高。
耐磨性测试条件为：刀具为Φ5mm 4刃立铣刀,被切工件为4Cr5MoSiV(58HRC),干铣削,顺铣,切削速度为350m/min，每齿切削量为0.05mm/Z，径向进给量为0.20mm，轴向进给量为2mm，铣削长度为80m。
测试结果表明：用本发明所述的纳米复合锆铝硅氮化物涂覆的刀具刀面磨损值为0.16mm，涂覆氮化锆涂层的刀具刀面磨损值为0.38mm，未涂层刀具刀面磨损值为0.86mm。本发明所述的纳米复合锆铝硅氮化物涂覆的刀具耐磨性被大幅提高。

Claims (6)

1.一种纳米复合锆铝硅氮化物刀具涂层，其特征在于，所述涂层的配方为：锆30～60at.％，铝5～30at.％，硅5～20at.％，氮20～50at.％，各成分含量之和应为100％。
2.根据权利要求1所述的刀具涂层，其特征在于，所述涂层是在硬质合金基体上先沉积一层Zr/ZrN打底层，厚度为100～400纳米；然后才沉积纳米复合锆铝硅氮化物涂层，厚度为2.8～3.4微米；涂层总厚度为2.9～3.8微米。
3.根据权利要求2所述的刀具涂层，其特征在于，所述硬质合金基体可以为WC/CO硬质合金刀具。
4.一种如权利要求1-3中任一项所述的纳米复合锆铝硅氮化物刀具涂层的制备方法，其特征在于，所述方法包括以下步骤：
(1)基体预处理工艺；
(2)沉积Zr/ZrN打底层：将清洗后的刀具均匀的固定在工件架上，装入磁控溅射镀膜机中，抽至本底真空，通入Ar气调节腔体气压至0.1-0.5Pa，同时打开加热器升温至350-450℃，对基体施加400-600V负偏压，溅射基体600-800s,溅射功率5-7kw；随后降低基体负偏压至280-320V，通入N2，调节腔体气压至1-3Pa，温度升高至450-550℃，使锆靶通电，功率固定为200W，沉积Zr/ZrN打底层600-800s；
(3)沉积纳米复合锆铝硅氮化物涂层：然后使硅靶和铝靶通电，通过调节硅靶和铝靶的功率沉积不同原子百分比含量的锆铝硅氮化物涂层，沉积时间240-300min，沉积结束后使刀具随炉冷却至150℃以下取出。
5.根据权利要求4所述的制备方法，其特征在于，所述基体预处理工艺为：将预镀刀具放入盛有浓度为95％的酒精的超声波清洗机中清洗5min，接着将取出的刀具烘干。
6.根据权利要求4所述的制备方法，其特征在于，步骤(2)中，工件架转速为10-165r/min，抽至本底真空5×10-4Pa，通入Ar气调节腔体气压至0.1-0.5Pa。
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