CN1073522A - The laser longitudinal mode splitting angular transducer - Google Patents
The laser longitudinal mode splitting angular transducer Download PDFInfo
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- CN1073522A CN1073522A CN 91111507 CN91111507A CN1073522A CN 1073522 A CN1073522 A CN 1073522A CN 91111507 CN91111507 CN 91111507 CN 91111507 A CN91111507 A CN 91111507A CN 1073522 A CN1073522 A CN 1073522A
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- laser
- angle
- frequency
- crystalline quartz
- angular transducer
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Abstract
The laser longitudinal mode splitting angular transducer, belong to the precise angle field of measuring technique, the present invention utilizes the crystalline quartz element that inserts in the laser instrument, make laser instrument output comprise the laser beam of two kinds of frequencies, the crystalline quartz rotation produces birefringence effect, two kinds of frequency-splittings are changed thereupon, utilize reception, conversion process, obtain the rotation angle value of quartz element this frequency-splitting.The present invention is made up of laser angle sensing head, laser frequency stabilization device and signal processing unit etc.The angle-measuring equipment that is made of the present invention has advantages such as measuring speed is fast, highly sensitive, cost is low.
Description
The invention belongs to the Technology of Precision Measurement and the device of angle.
The angle-measuring equipment that the precision measurement of angle at present adopts grating, inductosyn, code-disc, the first-class technological means of mechanical dividing to constitute usually, through the years of researches development, these angle-measuring equipments have reached the second-time measuring accuracy limit, further improve quite difficulty of precision, and these measurement mechanism prices are all relatively more expensive, the manufacture difficulty height, bulky, widespread use is subjected to certain limitation.
The present invention is intended to utilize the laser longitudinal mode splitting principle, invents a kind of novel high-precision angle sensor, and makes it have fast, the cheap characteristics of measuring speed.
The present invention is made up of laser angle sensing head, laser frequency stabilization device and signal processing unit.Said laser angle sensing head comprise exocoel He-Ne laser instrument, and light path in this laser resonant cavity on the crystalline quartz element, the Laser Power Devices that have turning axle placed constitute; Said signal processing unit is made up of polarizer, photodetector, frequency meter, microcomputer.
Principle of work of the present invention is as follows:
Laserresonator produces the laser beam of certain frequency under the driving of Laser Power Devices, the laser frequency stabilization device keeps the frequency stabilization of this laser beam constant, when the quartz crystal unit in being placed on resonator cavity rotates with the turning axle that is fixed together with it, the crystallographic axis C resonant cavity axis angle of cut [θ] of crystalline quartz element also changes thereupon, because the birefringence effect of quartz crystal unit, laser longitudinal module divides, resonator cavity output comprises the light beam of two kinds of frequency differences and cross polarization, these two kinds of light frequency differences change with angle [θ] is different, be that frequency difference value and angle [θ] have relation one to one, comprise when this bundle (polarization direction of the optical direction of this polarizer and two kinds of frequencies of light all presss from both sides 45) behind the polarizer of light beam by signal processing unit of two kinds of frequencies and cross polarization, form photo-beat frequently, photo-beat changes into sinusoidal electric signals after being received by photodetector frequently, send into frequency meter, calculate the frequency (photo-beat frequently) of this sinusoidal signal, the processing through microcomputer is converted into the angle that the crystalline quartz element rotates around axis frequently to photo-beat again.When above-mentioned crystalline quartz element and measured object are connected as a single entity, when rotating synchronously with measured object, the anglec of rotation of measured crystalline quartz element is tested angle.
The present invention has simple in structure, and measuring speed is fast, and is highly sensitive, advantages such as applied range.
Brief Description Of Drawings:
Fig. 1 is a kind of example structure synoptic diagram of the present invention
Fig. 2 is an another kind of example structure synoptic diagram of the present invention
A kind of embodiment provided by the invention describes each ingredient in detail as shown in Figure 1 in conjunction with the accompanying drawings.
Present embodiment is made up of laser angle sensing head (201), laser frequency stabilization device (202) and signal processing unit (203) three parts.Wherein laser angle sensing head (201) is not by Laser Power Devices (drawing among the figure), and half exocoel He-Ne laser tube (5) inserts crystalline quartz element (4) wherein, laser tube bracing frame compositions such as (7).He-Ne laser tube one end that has catoptron (6) directly is fixed on laser tube bracing frame one sidewall, another sidewall of bracing frame is fixed a piezoelectric ceramic ring (2), another catoptron (3) be fixed on that ceramic ring (2) is gone up and with laser tube axis normal centering, crystalline quartz element (4) is a bar shaped spherical shell, its surfaces externally and internally all plates with high antireflection film, the centre of sphere of surfaces externally and internally overlaps, and fixedlys connected the axes intersect of the turning axle (0) that is integral with it.The axis of turning axle (0) and the axis normal of laser tube.
Laser frequency stabilization device (202) adopts the isocandela frequency stabilization system of commercialization, by partially reflecting mirror (17), and half-reflecting half mirror (11), polarizer (12), (14), compare photodetector (13), (15) and driving circuit (16) is formed.The laser that penetrates from the laser angle detecting head mirror (17) that is reflected is reflected to semi-transparent semi-permeable mirror (11), transmitted light through (11) arrives polarizer (12), arrive polarizer (14) by the reflected light of (11), the placement that is orthogonal of the logical optical axis of polarizer (12), (14).(what be detected the device reception is the light intensity of different polarization direction light to the two-beam of process polarizer (12), (14) by photodetector (13), (15) reception respectively, express as figure mid point and arrow) change into electric signal and deliver in comparison and the driving circuit (16) relatively, comparative result change into voltage signal go to drive piezoelectric ceramic ring (2) to elongate or shorten to keep two laser frequencies be symmetry with the centre frequency of laser medium, thereby realize the frequency stabilization purpose.
The signal processing unit of present embodiment (203) is made up of polarizer (8), photodetector (9), frequency meter (10) and microcomputer (18).The light beam of permeation parts catoptron forms photo-beat through polarizer (8) back on travel path.Photodetector (9) becomes sinusoidal electric signals to photo-beat.Frequency meter (10) is counted out the frequency of bat, and microcomputer (18) is converted into this beat frequency the corner [θ] of the quartzy spherical shell of bar shaped.
The another kind of laser angle sensor construction synoptic diagram that accompanying drawing 2 provides for the present invention.With the laser angle sensor construction difference in the foregoing description be shape, modes of emplacement and the sense of rotation of crystalline quartz element.Other parts all can adopt the structure of first example.The crystalline quartz element is the flat board (41) that one two surface all is coated with anti-reflection film in this example.The turning axle of this dull and stereotyped normal (AB) and dull and stereotyped and flat board in the same way, dull and stereotyped crystallographic axis (C) has an angle (θ) (θ ≠ 0) with its normal (AB), and this flat board is placed on and makes its normal (AB) and the axis that swashs the pipe resonator cavity (ψ) at angle in the laserresonator.When crystalline quartz flat board (41) when rotating with its normal (AB) turning axle in the same way, the angle theta of the axis (also being laser beam) of this dull and stereotyped crystallographic axis (C) and laserresonator also changes thereupon, causes the change of light frequency difference of two kinds of compositions of the polarization direction quadrature of laser output.The change of this difference on the frequency is corresponding one by one with the dull and stereotyped anglec of rotation of crystalline quartz.Obtain angle value through conversion of signals and processing.
The present invention has following characteristics: one, measuring speed is fast, because angle measurement of the present invention utilizes photo-beat frequency (frequency of longitudinal mode splitting) only relevant with the angle of laser axis with crystalline quartz element crystallographic axis, the speed that takes measurement of an angle only is decided by the speed of crystalline quartz rotating shaft, and rotating shaft does not generally have the restriction of rotary speed, and the rotary speed of existing grating inductosyn all has certain limitation; Its two, the precision height. For example, when crystalline quartz element crystallographic axis and laser beam angle equal 45 °, this quartz element thickness is 3mm, and its clever essence can reach 10-5The magnitude of second is far above the ultimate precision of existing angle-measuring method.
Claims (3)
1, laser longitudinal mode splitting angular transducer, it is characterized in that being formed by laser angle sensing head, laser frequency stabilization device and signal processing unit, said laser angle sensing head comprises the He-Ne laser instrument of exocoel and is placed on the interior crystalline quartz element that has turning axle of this laser resonant cavity, Laser Power Devices constitute, and said signal processing unit is made up of polarizer, photodetector, frequency meter, microcomputer.
2, angular transducer as claimed in claim 1 is characterized in that said crystalline quartz element is a bar shaped spherical shell, and its surfaces externally and internally all plates with high antireflection film, the axes intersect of the turning axle that the centre of sphere of its surfaces externally and internally overlaps and fixes with it and links into an integrated entity.
3, angular transducer as claimed in claim 1, it is characterized in that said crystalline quartz element is the flat board that one two surface all is coated with anti-reflection film, the turning axle of this dull and stereotyped normal and flat board in the same way, the crystallographic axis that this is dull and stereotyped and its normal have an angle (θ) (θ ≠ 0), this flat board is placed in the said laserresonator, and the axis that makes its normal and this resonator cavity is (ψ) at angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91111507 CN1073522A (en) | 1991-12-12 | 1991-12-12 | The laser longitudinal mode splitting angular transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91111507 CN1073522A (en) | 1991-12-12 | 1991-12-12 | The laser longitudinal mode splitting angular transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1073522A true CN1073522A (en) | 1993-06-23 |
Family
ID=4910681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91111507 Pending CN1073522A (en) | 1991-12-12 | 1991-12-12 | The laser longitudinal mode splitting angular transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1073522A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253389A (en) * | 2011-04-21 | 2011-11-23 | 清华大学 | He-Ne laser birefringent outer cavity feedback displacement measurement system |
| CN110631514A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect |
-
1991
- 1991-12-12 CN CN 91111507 patent/CN1073522A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102253389A (en) * | 2011-04-21 | 2011-11-23 | 清华大学 | He-Ne laser birefringent outer cavity feedback displacement measurement system |
| CN110631514A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect |
| CN110631511A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | Right-angle prism type angle sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| CN110631511B (en) * | 2018-05-18 | 2021-01-05 | 安徽大学 | Right-angle prism type angle sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |