CN110631514A - Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect - Google Patents

Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect Download PDF

Info

Publication number
CN110631514A
CN110631514A CN201910941460.7A CN201910941460A CN110631514A CN 110631514 A CN110631514 A CN 110631514A CN 201910941460 A CN201910941460 A CN 201910941460A CN 110631514 A CN110631514 A CN 110631514A
Authority
CN
China
Prior art keywords
laser
angle
self
mode
longitudinal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910941460.7A
Other languages
Chinese (zh)
Other versions
CN110631514B (en
Inventor
吕亮
王晨辰
杨波
陈由泽
毕铁柱
周俊峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui University
Original Assignee
Anhui University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui University filed Critical Anhui University
Priority to CN201910941460.7A priority Critical patent/CN110631514B/en
Publication of CN110631514A publication Critical patent/CN110631514A/en
Application granted granted Critical
Publication of CN110631514B publication Critical patent/CN110631514B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

The device comprises a multi-longitudinal-mode laser, a sensing unit, a vibration target, a sliding device, a beam splitter, a photoelectric detector, a signal preprocessing unit and a signal processing unit; the sensing unit comprises a turntable and a pentagonal prism, one of five angles of the pentagonal prism is a right angle, the pentagonal prism is horizontally placed on the turntable, and the intersection line of the side surfaces where the two right-angle sides of the pentagonal prism are located is located at the circle center of the turntable. The device has the advantages of simple structure, small volume and low cost, can realize non-contact real-time high-precision measurement, the sensing unit is a passive optical sensor, the power supply is not required, the light path of the testing device is a single light path, the environmental interference is small, the structure is simple, and the light path is convenient to adjust.

Description

Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect
The application is divisional application with application number 201810481300.4, application date 2018, 5, 18 and invention name 'angle sensing measuring device and method based on multi-longitudinal mode self-mixing effect'.
Technical Field
The invention relates to the technical field of optical measurement, in particular to a pentagonal prism type angle sensing measurement device and method based on a multi-longitudinal mode self-mixing effect.
Background
The angle measurement technology is an important component of the metering technology, and with the continuous development of the scientific technology, the angle measurement technology is widely applied to the technical fields of optical-mechanical-electrical integration, aerospace, military, national defense and the like.
The angle measurement technology mainly comprises a mechanical angle measurement technology, an electromagnetic angle measurement technology and an optical angle measurement technology. In the optical angle measurement technology, the interference angle measurement technology based on the laser self-mixing theory gradually becomes an important research object for high-precision angle measurement due to the advantages of a single optical path structure, auto-collimation and the like. However, the existing angle measuring device based on the laser self-mixing theory can only realize dynamic angle measurement and cannot be applied to measurement occasions where fixed angle measurement and quantitative measurement are required.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides an angle sensing measuring device and method capable of realizing fixed angle measurement and quantitative measurement based on a multi-longitudinal-mode self-mixing effect
In order to achieve the technical purpose, the technical scheme of the invention is as follows:
a pentagon prism type angle sensing measuring device based on a multi-longitudinal-mode self-mixing effect comprises a multi-longitudinal-mode laser, a sensing unit, a vibration target, a sliding device, a beam splitter, a photoelectric detector, a signal preprocessing unit and a signal processing unit;
the sensing unit comprises a turntable and a pentagonal prism, one of five angles of the pentagonal prism is a right angle, the pentagonal prism is horizontally placed on the turntable, and the intersection line of the side surfaces where two right-angle sides of the pentagonal prism are located is located at the center of the turntable;
the vibration target can vibrate, a reflection structure is attached to a vibration surface of the vibration target, the vibration target is located on a light path of laser emitted by the pentagonal prism, the vibration surface is perpendicular to the light path, the bottom of the vibration target is fixed on the sliding device, the vibration target can move back and forth along the direction of a laser beam incident on the vibration surface by adjusting the sliding device, and the vibration surface is always perpendicular to the laser beam incident on the vibration surface in the moving process;
the multi-longitudinal-mode laser emits laser beams to the pentagonal prism, and in an initial state, the emitted laser beams are vertical to the side face of the pentagonal prism where a right-angle side is located;
the beam splitter is arranged between the multi-longitudinal-mode laser and the right-angle prism and is used for splitting a laser beam onto the photoelectric detector;
the photoelectric detector is used for converting the received laser signal into an electric signal and then sending the electric signal to the signal preprocessing unit;
the signal preprocessing unit is used for preprocessing the received electric signals, and the preprocessing at least comprises shaping, amplifying and filtering;
the signal processing unit is used for analyzing and processing the preprocessed electric signals to obtain the rotation angle of the turntable to be tested.
As an improvement, an optical attenuator is also arranged between the multi-longitudinal mode laser and the beam splitter.
As an improvement, the sliding device comprises a sliding rail and a sliding block arranged on the sliding rail, and the bottom of the vibration target is fixed on the sliding block; the slide rail and the emergent laser are positioned on the same straight line;
as an improvement, the reflecting structure is a reflecting plane mirror or a reflecting film.
As a refinement, the vibration target is a speaker or a piezoelectric ceramic driven by a signal generator.
The angle measurement method of the pentagonal prism type angle sensing measurement device based on the multi-longitudinal mode self-mixing effect comprises the following steps: the vibration target vibrates, laser beams emitted by the multi-longitudinal-mode laser are incident on the vibration target through the sensing unit, the emitted laser is reflected by the reflecting structure and then fed back to the resonant cavity of the multi-longitudinal-mode laser along the original path to form a laser self-mixing signal, in the process, the turntable in the sensing unit rotates to cause the waveform of the laser self-mixing signal to change, the vibration target moves back and forth along the direction of the laser beams incident on the vibration surface by adjusting the sliding device, the vibration surface and the laser beams incident on the vibration surface are always kept vertical in the moving process to change the optical path of the vibration target from the multi-longitudinal-mode laser, so that the required laser self-mixing signals under different laser external cavity lengths are formed, the laser self-mixing signals under different laser external cavity lengths are collected by the photoelectric detector, and then the laser self-mixing signals are preprocessed by the signal preprocessing unit, and finally, analyzing the preprocessed laser self-mixing signals by using a signal processing unit to obtain the rotation angle of the turntable in the sensing unit, wherein the specific measurement and analysis method comprises the following steps:
for laser self-mixing signals of a multi-longitudinal-mode laser, different longitudinal modes of the laser only interfere with the self-mode, the finally formed laser self-mixing signals are laser self-mixing signal intensity superposition formed by the respective longitudinal modes, and according to a related interference mixing theory model, under the condition of not considering speckle influence, the multi-longitudinal-mode laser self-mixing signal intensity is obtained:
Figure BDA0002223010520000031
beta in the formula (1) is the total number of oscillation starting modes in the multi-longitudinal-mode laser, j represents the jth longitudinal mode in the laser, I0Is the initial light intensity,. DELTA.IjAmplitude of variation of light intensity of j-mode laser, phitjPhase, k, of the j-mode laser back and forth around the outer cavity0jWave number, op, of j mode in vacuumt(t) is the total optical path of the real-time external cavity of the laser, c.c. represents the complex conjugate of the formula, and the refractive index change caused by different longitudinal modes in the same material can be ignored in the calculation;
when the phase of the sensing unit changes, the external cavity total phase relationship is as follows:
phi in the formula (2)0jInitial phase of j-mode laser back and forth one revolution of the external cavity, delta phisjFor sensing unit phase change, delta phi, caused by rotation angle of the turntablecjFor compensating for phase changes, delta phi when measuring anglessj＝-δφcj，op0Is the initial optical path of the external cavity of the laser, delta opsFor changes in the optical path of the sensing unit, delta op, caused by the angle of rotation of the turntablecTo compensate for optical path, ncIs the refractive index of air in the external cavity, and has a value of 1, nsIs the refractive index of the sensing unit, and has a constant value, LsFor the total geometrical length of the actual path of the laser light propagating in the sensor unit, LcTo compensate for the length;
Figure BDA0002223010520000033
in the formula (3) < omega >0Is the angular frequency of the laser, c is the speed of light in vacuum, ngIs the refractive index of the laser resonant cavity medium group, L0Is the laser resonant cavity length;
substituting formula (3) into formula (1) to obtain:
Figure BDA0002223010520000041
if the waveforms of the laser self-mixing signals of different modes are not separated, the waveforms of the modes need to keep the same phase or the phase delay is integral multiple of 2 pi:
φtj＝k0jopt＝2mk0jngL0＝mφgjformula (II)(5)
Namely:
opt＝2mngL0formula (6)
In the formula (5), m is the external cavity mode order of the laser and is a positive integer phigjThe laser has a series of special position points for the phase of the laser which makes the laser self-mixing signal after being superimposed not generate waveform separation. As can be seen from equation (5), when the turntable rotates a certain angle, the phase of the light transmitted by the sensing unit changes, resulting in phi of each modetjChanging m value to make m no longer be integer, separating the waveform of the superposed laser self-mixing signal, regulating slide device to change vibration target position to compensate phase change, making the waveform of the superposed laser self-mixing signal become complete waveform, measuring vibration target position to obtain compensation phase change delta phicjFurther obtain the phase change delta phi of the sensing unit caused by the rotation angle of the rotary tablesjHere, the angle of rotation of the turntable causes a phase change δ φ in the sensing unitsjThe relationship of (a) is shown as follows:
Figure BDA0002223010520000042
in the formula (7)Is the coefficient of variation of external optical path with angle, L, in the sensing units0For the total initial geometric length of the actual path of the laser light propagating in the sensor unit, ns0Is the refractive index of the sensing unit material;
using compensated phase in combination with sensing cell material refractive index ns0Total initial geometric length L of the actual path of the laser light propagating in the sensor units0The coefficient of variation of the external optical path in the sensing unit along with the angle
Figure BDA0002223010520000044
And calculating to obtain the rotation angle of the rotary disc in the sensing unit.
From the above description, it can be seen that the present invention has the following advantages:
1. the sensing unit of the measuring device is a passive optical sensor, and power supply is not needed;
2. the test device has smaller volume and lower cost;
3. non-contact real-time high-precision measurement can be realized;
4. the optical path of the measuring device is a single optical path, the measuring device is small in environmental interference, simple in structure and convenient to adjust the optical path;
5. the sensitivity and resolution of angle measurement can be adjusted by designing parameters of the sensing unit and selecting different external cavity measuring tools.
Drawings
FIG. 1 is a schematic structural view of embodiment 1 of the present invention;
FIG. 2 is a schematic structural view of embodiment 1 of the present invention;
FIG. 3 is a schematic diagram of the optical path structure of an arbitrary-angle intersecting plane mirror in example 1 of the present invention;
FIG. 4 is a diagram showing simulation results of embodiment 1 of the present invention;
FIG. 5 is a diagram showing simulation results of embodiment 1 of the present invention;
FIG. 6 is a schematic structural view of embodiment 2 of the present invention;
FIG. 7 is a schematic diagram showing the optical path structure in the initial state of embodiment 2 of the present invention;
FIG. 8 is a schematic diagram showing the optical path structure after rotation in embodiment 2 of the present invention;
fig. 9 is a diagram showing simulation results of embodiment 2 of the present invention.
Detailed Description
Embodiment 1 of the present invention is described in detail with reference to fig. 1 to 5, but the present invention is not limited to the claims.
As shown in fig. 1, an angle sensing and measuring device based on a multi-longitudinal-mode self-mixing effect includes a multi-longitudinal-mode laser 1, a sensing unit 2, a vibrating target 3, a sliding device 4, a beam splitter 5, a photodetector 6, a signal preprocessing unit 7 and a signal processing unit 8; the sensing unit 2 comprises a first turntable 211,The second rotating disc 212, the transmission rod 213 and the intersecting plane mirror 214, the first rotating disc 211 and the second rotating disc 212 rotate synchronously through the transmission rod 213, the end parts of the two ends of the transmission rod 213 are respectively connected with the first connecting column 215 and the second connecting column 216, the bottom of the first connecting column 215 and the bottom of the second connecting column 216 are respectively arranged on the first rotating disc 211 and the second rotating disc 212 through bearings, the transmission rod 213 is parallel to the connecting line between the center of the first rotating disc 211 and the center of the second rotating disc 212, the intersecting plane mirror 214 comprises a first plane mirror 2141 and a second plane mirror 2142 with opposite mirror surfaces, one side of the first plane mirror 2141 is connected with one side of the second plane mirror 2142, the connecting sides of the first plane mirror 2141 and the second plane mirror 2142 are connected to the second connecting column 216, the mirror surfaces of the first plane mirror 2141 and the second plane mirror 2142 are both deviated from the transmission rod 213, the bisector of the included angle between the first plane, an included angle between the first plane mirror 2141 and the second plane mirror 2142 is denoted as α, and a value range of α is: 0 degree<α<180 degrees; the vibrating target 3 can vibrate, a reflecting structure is attached to the vibrating surface of the vibrating target 3, the vibrating target 3 is arranged outside the second plane mirror 2142, and the included angle between the vibrating surface and the mirror surface of the first plane mirror 2141 is equal to
Figure BDA0002223010520000061
The bottom of the vibration target 3 is fixed on a sliding device 4, the vibration target 3 can move back and forth along the direction of the laser beam incident on the vibration surface by adjusting the sliding device 4, and the vibration surface is always vertical to the laser beam incident on the vibration surface in the moving process; the multi-longitudinal-mode laser 1 emits laser beams onto the second plane mirror 2142, and the included angle between the laser beams and the second plane mirror 2142 is
Figure BDA0002223010520000062
The included angle formed by the laser beams emitted by the multi-longitudinal-mode laser 1 and the laser beams reflected by the second plane mirror 2142 is equal to alpha, and the included angle between the laser beams emitted by the multi-longitudinal-mode laser and the vibration surface of the vibration target is equal to alpha
Figure BDA0002223010520000063
The beam splitter 5 is arranged between the multi-longitudinal-mode laser 1 and the second plane mirror 2142 and is used for splitting the laser beam to the photoelectric detector 6; the photoelectric detector 6 is used for converting the received laser signal into an electric signal and then sending the electric signal to the signal preprocessing unit 7; the signal preprocessing unit 7 is used for preprocessing the received electric signals, and the preprocessing at least comprises shaping, amplifying and filtering; the signal processing unit 8 is configured to analyze the preprocessed electrical signals to obtain rotation angles of the first rotating disk 211 and the second rotating disk 212 to be tested.
The angle measuring method based on the measuring device comprises the following steps: the vibration target vibrates, the laser beam emitted by the multi-longitudinal mode laser is reflected to the second plane mirror, then reflected to the first plane mirror and then reflected to the vibration target, the laser beam incident to the vibration target is reflected by the reflection structure, the reflected beam is fed back to the resonant cavity of the multi-longitudinal mode laser along the original path to form a laser self-mixing signal, in the process, any rotating disc in the sensing unit rotates (the first rotating disc and the second rotating disc can synchronously rotate based on the arrangement of the transmission rod, when any rotating disc rotates, the transmission rod drives the other rotating disc to synchronously rotate), the intersecting plane mirror is driven to horizontally move to change the waveform of the laser self-mixing signal, the vibration target moves back and forth along the direction of the laser beam incident to the vibration surface by adjusting the sliding device, and the vibration surface and the laser beam incident to the vibration surface are always kept vertical in the moving process, the method comprises the following steps of changing the optical path of a multi-longitudinal-mode laser at a vibration target distance to form required laser self-mixing signals under different laser external cavity lengths, collecting the laser self-mixing signals under the different laser external cavity lengths by using a photoelectric detector, preprocessing the laser self-mixing signals by using a signal preprocessing unit, and analyzing the preprocessed laser self-mixing signals by using a signal processing unit to obtain the rotation angle of a turntable in a sensing unit, wherein the specific measurement and analysis method comprises the following steps:
for laser self-mixing signals of a multi-longitudinal-mode laser, different longitudinal modes of the laser only interfere with the self-mode, the finally formed laser self-mixing signals are laser self-mixing signal intensity superposition formed by the respective longitudinal modes, and according to a related interference mixing theory model, under the condition of not considering speckle influence, the multi-longitudinal-mode laser self-mixing signal intensity is obtained:
Figure BDA0002223010520000071
beta in the formula (1) is the total number of oscillation starting modes in the multi-longitudinal-mode laser, j represents the jth longitudinal mode in the laser, I0Is the initial light intensity,. DELTA.IjAmplitude of variation of light intensity of j-mode laser, phitjPhase, k, of the j-mode laser back and forth around the outer cavity0jWave number, op, of j mode in vacuumt(t) is the total optical path of the real-time external cavity of the laser, c.c. represents the complex conjugate of the formula, and the refractive index change caused by different longitudinal modes in the same material can be ignored in the calculation;
when the phase of the sensing unit changes, the external cavity total phase relationship is as follows:
Figure BDA0002223010520000072
phi in the formula (2)0jInitial phase of j-mode laser back and forth one revolution of the external cavity, delta phisjFor sensing unit phase change, delta phi, caused by rotation angle of the turntablecjFor compensating for phase changes, delta phi when measuring anglessj＝-δφcj，op0Is the initial optical path of the external cavity of the laser, delta opsFor changes in the optical path of the sensing unit, delta op, caused by the angle of rotation of the turntablecTo compensate for optical path, ncIs the refractive index of air in the external cavity, and has a value of 1, nsIs the refractive index of the sensing unit, and has a constant value, LsFor the total geometrical length of the actual path of the laser light propagating in the sensor unit, LcTo compensate for the length;
Figure BDA0002223010520000073
in the formula (3) < omega >0Is the angular frequency of the laser, c is the speed of light in vacuum, ngIs the refractive index of the laser resonant cavity medium group, L0Is the laser resonant cavity length;
substituting formula (3) into formula (1) to obtain:
Figure BDA0002223010520000081
if the waveforms of the laser self-mixing signals of different modes are not separated, the waveforms of the modes need to keep the same phase or the phase delay is integral multiple of 2 pi:
φtj＝k0jopt＝2mk0jngL0＝mφgjformula (5)
Namely:
opt＝2mngL0formula (6)
In the formula (5), m is the external cavity mode order of the laser and is a positive integer phigjThe laser has a series of special position points for the phase of the laser which makes the laser self-mixing signal after being superimposed not generate waveform separation. As can be seen from equation (5), when the turntable rotates a certain angle, the phase of the light transmitted by the sensing unit changes, resulting in phi of each modetjChanging m value to make m no longer be integer, separating the waveform of the superposed laser self-mixing signal, regulating slide device to change vibration target position to compensate phase change, making the waveform of the superposed laser self-mixing signal become complete waveform, measuring vibration target position to obtain compensation phase change delta phicjFurther obtain the phase change delta phi of the sensing unit caused by the rotation angle of the rotary tablesjHere, the angle of rotation of the turntable causes a phase change δ φ in the sensing unitsjThe relationship of (a) is shown as follows:
Figure BDA0002223010520000082
in the formula (7)Is the coefficient of variation of external optical path with angle, L, in the sensing units0For the total initial geometric length of the actual path of the laser light propagating in the sensor unit, ns0Is the refractive index of the sensing unit material;
using compensated phase in combination with sensing cell material refractive index ns0Total initial geometric length L of the actual path of the laser light propagating in the sensor units0The coefficient of variation of the external optical path in the sensing unit along with the angle
Figure BDA0002223010520000091
And calculating to obtain the rotation angle of the rotary disc in the sensing unit.
The external cavity change sensitivity S of the angle sensor can be further obtained by the formula (7)mLcAnd adjacent order angle difference delta thetam. Wherein the external cavity variation sensitivity SmLcMeans the length change of the compensation external cavity caused by the change of unit angle and the angle difference delta theta of adjacent levelmRefers to the angle theta2Position (m +1 level) and angle theta of external cavity equiphase point caused by (after change)1And (before change) the adjacent-level angle difference corresponding to the position (m level) of the external cavity equiphase point. In general, in the angle measurement process, if the measured angle difference in two consecutive measurement intervals is greater than the adjacent-stage angle difference Δ θmThe number of cycles of the waveform change of the self-mixing signal, i.e. the change of the value m, in two consecutive measurement intervals is recorded, and the length of the compensation external cavity is adjusted to restore the waveform of the laser self-mixing signal to the position where the waveform of the signal corresponding to the mth level coincides.
The external cavity variation sensitivity S is expressed by the formulas (8) and (9), respectivelymLcAnd adjacent order angle difference delta thetamExpression:
Figure BDA0002223010520000092
Figure BDA0002223010520000093
in the above measurement and analysis method, the analysis method of the relationship between the external optical path of the sensing unit and the angle change is as follows:
as shown in fig. 2, a start position O2V (i.e. the center O of the second turntable)2A line connecting the fixed points V of the intersecting plane mirrors) is parallel to the y-axis, and when the rotation angle of the first rotating disc 1 is theta
Figure BDA0002223010520000094
The second turntable 2 rotates by the same angle, and the transmission rod is always parallel to the x axis to ensure that the intersecting plane mirror does not deviate in the vertical direction and only generates translation in the xy plane. After the rotation, the first plane mirror and the second plane mirror are both crossed and shifted, the laser 1 emits laser through the point A, in the whole rotation process, the position of the laser 1 is always kept at the point A, light rays are reflected by the plane mirror and the reflector for multiple times and then return from the point D along the original path, and the radiuses of the first rotary disc and the second rotary disc are both R.
Based on the angle measurement system with the single-intersection plane mirror, the optical path change of the angle measurement system is theoretically calculated, a single intersection plane mirror structure diagram with any included angle as shown in figure 3 is established, and the vertex V of the intersection plane mirror1Reaches V after rotating2Primary light path AB1C1D1Become AB2C2D2The optical path difference can be derived as follows:
wherein the content of the first and second substances,
Figure BDA0002223010520000102
geometrically derived:
Figure BDA0002223010520000103
the optical path difference caused by the angle change can be expressed as:
Figure BDA0002223010520000104
substituting equation (7) yields:
Figure BDA0002223010520000105
combining the formula (12), it can be known that the optical path difference is related to the included angle α between the two mirror surfaces and the rotation angle θ of the turntable, and the included angle between the special mirror surfaces is simplified as follows for the simplified equation:
(1) when the included angle alpha of the two mirror surfaces is 90 degrees, namely the two mirror surfaces are vertical, the optical path difference can be obtained:
ΔL＝-4R sinθ (14)
in this case, formula (14) is substituted into formulae (7), (8), and (9) to obtain:
δφsj＝k0jns0|-4R sinθ|＝-k0jδ(ncLc)＝-δφcj (15)
Figure BDA0002223010520000111
the experimental device is established based on the technical scheme, the experimental device adopts the dual-mode LD laser as a light source, simulation software is utilized for analog simulation, and for simplicity, only the intensity superposition waveform of the dual-mode LD laser self-mixing signal with the same amplitude is considered. The simulation results are shown in fig. 4. As can be seen from FIG. 4, when the angle is 0, the initial external cavity optical length of the laser is 1050mm and ngL0M is 1000, and the laser self-mixing signal waveform is not separated. When the angle of the sensing unit increases
Figure BDA0002223010520000113
When the phase of a sensing unit is slightly changed, the waveform of overlapped laser self-mixing signals is separated, the length of a fine-tuning compensation external cavity is 18.15mm, and the external cavity phase of the laser becomes phi againgM is 1000, the superposed laser beam disappears from the mixed signal waveform separately, and the integral multiple of m is measuredAnd compensating the phase, and finally obtaining the change of the angle of the corresponding sensing unit to realize the measurement of the rotating angle of the rotating disc of the sensing unit.
(2) When the included angle α of the mirror surface is 60 °, the optical path difference can be obtained:
Figure BDA0002223010520000114
in this case, by substituting equation (18) into equations (7), (8), and (9):
Figure BDA0002223010520000115
Figure BDA0002223010520000116
Figure BDA0002223010520000117
the experimental device is established based on the technical scheme, the experimental device adopts the dual-mode LD laser as a light source, simulation software is utilized for analog simulation, and for simplicity, only the intensity superposition waveform of the dual-mode LD laser self-mixing signal with the same amplitude is considered. The simulation diagram is shown in fig. 5. As can be seen from FIG. 5, when the angle is 0, the initial external cavity optical length of the laser is 1050mm and ngL0M is 1000, and the laser self-mixing signal waveform is not separated. When the angle of the sensing unit increases
Figure BDA0002223010520000121
When the laser self-mixing signal waveform is separated, the length of a fine-tuning compensation external cavity is 0.28mm, and the external cavity phase of the laser becomes phi againgThe overlapped laser wave shape disappears separately from the mixed signal wave shape, and finally the change of the corresponding sensing unit angle is obtained by measuring the compensation phase, thereby realizing the measurement of the rotating angle of the sensing unit turntable.
It can be seen from the derivation process that, compared with the conventional laser self-mixing angle measurement method, the incident type self-mixing angle measurement system and measurement method in the single arbitrary angle intersection plane mirror described in this embodiment have the advantages that the angle measurement range is not limited, and the system resolution is higher.
As can be seen from the above description, the present embodiment has the following advantages:
1. the sensing unit of the measuring device is a passive optical sensor, and power supply is not needed;
2. the test device has smaller volume and lower cost;
3. non-contact real-time high-precision measurement can be realized;
4. the optical path of the measuring device is a single optical path, the measuring device is small in environmental interference, simple in structure and convenient to adjust the optical path;
5. the sensitivity and the resolution of angle measurement can be adjusted by designing and selecting different external cavity measuring tools through parameters of the sensing unit;
6. the structure of the sensing unit is as follows: (1) when laser beams are incident to the intersecting plane mirrors, the laser beams are firstly incident to the second plane mirror on the inner side, namely, an internal incidence mode is adopted, so that the overall structure of the measuring system is compact; (2) through the reflection unit formed by the intersecting plane mirror and the vibration target, the auto-collimation of the laser self-mixing signal is realized, and compared with the reflection unit formed by the traditional plane mirror or the reflection unit formed by a right-angle prism, the optical path difference of the laser self-mixing signal is increased before and after rotation under the same rotation angle, so that the measurement resolution and the measurement range of the system are improved; (3) the whole structure of the measuring system is simple and easy to realize, the mechanical error is small, the included angle between the first plane mirror and the second plane mirror is adjustable, different angles correspond to different system measurement resolutions, and the included angle can be selected according to actual requirements.
Embodiment 5 of the present invention is described in detail with reference to fig. 6 to 9, but the present invention is not limited in any way by the claims.
As shown in fig. 6, an angle sensing and measuring device based on a multi-longitudinal-mode self-mixing effect includes a multi-longitudinal-mode laser 1, a sensing unit 2, a vibrating target 3, a sliding device 4, a beam splitter 5, a photodetector 6, a signal preprocessing unit 7, and a signal processing unit 8; the sensing unit 2 comprises a turntable 23 and a pentagonal prism 24, one of five angles of the pentagonal prism 24 is a right angle, the pentagonal prism 24 is horizontally placed on the turntable (namely, one of two parallel surfaces of the pentagonal prism is placed on the turntable), and the intersection line of the side surfaces where two right-angle sides of the pentagonal prism are located is located at the center of the turntable; the vibration target 3 can vibrate, a reflection structure is attached to a vibration surface of the vibration target 3, the vibration target 3 is positioned on a light path of laser emitted by the pentagonal prism 24, the vibration surface is perpendicular to the light path, the bottom of the vibration target 3 is fixed on the sliding device 4, the vibration target can move back and forth along the direction of a laser beam incident on the vibration surface by adjusting the sliding device 5, and the vibration surface and the laser beam incident on the vibration surface are always perpendicular in the moving process; the multi-longitudinal-mode laser 2 emits laser beams to the pentagonal prism 24, and in an initial state, the emitted laser beams are vertical to the side face of the pentagonal prism where a right-angle side is located; the beam splitter 5 is arranged between the multi-longitudinal-mode laser 1 and the pentagonal prism 24 and is used for splitting a laser beam onto the photoelectric detector 6; the photoelectric detector 6 is used for converting the received laser signal into an electric signal and then sending the electric signal to the signal preprocessing unit 7; the signal preprocessing unit 7 is used for preprocessing the received electric signal, wherein the preprocessing at least comprises shaping, amplifying and filtering; the signal processing unit 8 is used for analyzing and processing the preprocessed electric signals to obtain the rotation angle of the turntable 23 to be measured.
The angle measuring method based on the measuring device comprises the following steps: the vibration target vibrates, the laser beam emitted by the multi-longitudinal mode laser is placed on the turntable in an initial state, the incidence angle is 0 (namely, the emitted laser beam is vertical to the side surface where one right-angle side of the pentagonal prism is located in the initial state), the turntable rotates, the laser beam is emitted onto one right-angle surface of the pentagonal prism, the laser beam is emitted onto the vibration target from the other right-angle surface after entering the pentagonal prism after being reflected twice inside, the laser beam emitted onto the vibration target is vertical to the direction of the emitted laser beam of the laser and is reflected by the reflecting structure, based on the characteristics of the pentagonal prism, the reflected beam is fed back to the resonant cavity of the multi-longitudinal mode laser along the original path to form a laser self-mixing signal, and in the process, the turntable in the sensing unit rotates to drive the pentagonal prism to rotate, so that the waveform of the laser self-mixing signal is changed, the vibration target moves back and forth along the direction of the laser beam incident to the vibration surface by adjusting the sliding device, the vibration surface and the laser beam incident to the vibration surface are always kept vertical in the moving process, the optical path of the multi-longitudinal-mode laser at the vibration target distance is changed, required laser self-mixing signals under different laser outer cavity lengths are formed, the laser self-mixing signals under different laser outer cavity lengths are collected by a photoelectric detector, then the laser self-mixing signals are preprocessed by a signal preprocessing unit, and finally the preprocessed laser self-mixing signals are analyzed by a signal processing unit, so that the rotating angle of a rotating disc in a sensing unit can be obtained.
The specific measurement and analysis method of this embodiment is the same as the measurement and analysis method in embodiment 1, and referring to the analysis processes from formula (1) to formula (9), the difference between this embodiment and embodiment 1 is only that the specific structure of the sensing unit is different, so that the relationship between the external optical path and the angle change of the sensing unit in this embodiment is different from the relationship in embodiment 1.
In this embodiment, the method for analyzing the relationship between the external optical path of the sensing unit and the angle change is as follows:
as shown in fig. 7, in an initial state, the pentagonal prism is placed on the turntable, the incident angle is 0, the incident angle (i.e., the measured angle) of the light beam incident on the side surface where one right-angle side of the pentagonal prism is located changes along with the rotation of the turntable, and the incident light enters the pentagonal prism, is reflected twice inside the pentagonal prism, and then exits from the side surface where the other right-angle side is located. As shown in fig. 8, the turntable is rotated by θ degrees (i.e., the rectangular prism is rotated by θ degrees).
To simplify the calculation, the pentagonal prism in fig. 7 and 8 is unfolded to straighten the optical path where the turn occurs, so that the actual optical path in the prism indicated by the solid line can be indicated by the dotted line shown in the figure. A
As shown in fig. 7, the light beam enters the pentagonal prism from point a, is reflected twice inside, and then exits from point B, and the light path can be regarded as entering from point a, and exits from point B 'by propagating along a straight line, and when the prism rotates by the angle θ in fig. 8, the light beam enters from point C and exits from point D, and can be regarded as exiting from point D' along a straight line. From the geometrical relationships shown in fig. 7 and 8, the optical path difference generated by the pentagonal prism during rotation can be obtained through numerical calculation, wherein the optical path length AB in fig. 7 can be represented as follows:
Figure BDA0002223010520000141
the total optical path difference variation caused by the angle variation is:
where d refers to the side length of the right-angle side of the pentagonal prism, θ refers to the angle of incidence of the light beam into the pentagonal prism, and n refers to the refractive index of the prism.
In this case, by substituting equation (23) into equations (7), (8), and (9):
Figure BDA0002223010520000151
sensitivity of external cavity variation SmLcAnd adjacent order angle difference delta thetam：
Figure BDA0002223010520000152
The experimental device is established based on the technical scheme, the experimental device adopts the dual-mode LD laser as a light source, simulation software is utilized for analog simulation, and for simplicity, only the intensity superposition waveform of the dual-mode LD laser self-mixing signal with the same amplitude is considered. The simulation diagram is shown in fig. 9. As can be seen from FIG. 9, when the angle is 0, the initial external cavity optical length of the laser is 1050mm and ngL0M is 1000, and the laser self-mixing signal waveform is not separated. When the angle of the sensing unit increases
Figure BDA0002223010520000154
When the phase of the sensing unit slightly changes, the overlapped laser self-mixing signal waveform is separated, the length of the fine-tuning compensation external cavity is 0.74mm, and the external cavity phase of the laser becomes phi againgThe overlapped laser self-mixing signal waveform disappears separately, and the change of the corresponding sensing unit angle is finally obtained by measuring the compensation phase, so that the measurement of the laser sensing unit angle is realized.
As can be seen from the above description, the present embodiment has the following advantages:
1. the sensing unit of the measuring device is a passive optical sensor, and power supply is not needed;
2. the test device has smaller volume and lower cost;
3. non-contact real-time high-precision measurement can be realized;
4. the optical path of the measuring device is a single optical path, the measuring device is small in environmental interference, simple in structure and convenient to adjust the optical path;
5. the sensitivity and the resolution of angle measurement can be adjusted by designing and selecting different external cavity measuring tools through parameters of the sensing unit;
6. the structure of the sensing unit is as follows: (1) the laser beam is directly emitted into the pentagonal prism, the beam is simple and easy to adjust, and the optical path difference of the laser self-mixing signal is increased before and after the laser beam rotates under the same rotation angle, so that the measurement resolution of the system is improved; (2) the pentagonal prism is directly fixed at the center of the turntable without other linkage devices, so that the whole structure of the measuring system is compact, the machining error is reduced, and the light path is more easily collimated.
In the two embodiments, the measuring device may be optimized or improved as follows:
1. preferably, in an embodiment with two rotating discs, a driving belt is sleeved on the first rotating disc and the second rotating disc, and the two rotating discs rotate synchronously through the driving belt;
2. preferably, the sliding device 4 includes a sliding rail 41 and a sliding block 42 disposed on the sliding rail 41, and the bottom of the vibration target is fixed on the sliding block 42; the slide rail 41 is in the same straight line with the direction of the laser beam incident to the vibration surface of the vibration target;
3. preferably, the reflecting structure may be a reflecting plane mirror, or may be a material having scattering properties or reflecting properties, such as a reflecting film;
4. preferably, the vibration target 3 can adopt a loudspeaker 32 driven by a signal generator 31 or piezoelectric ceramics, two loudspeakers 32 in fig. 1 and 6 respectively represent the positions of the loudspeaker before and after sliding along the sliding device;
5. preferably, the signal processing unit 8 may be a computer, an oscilloscope or a spectrometer;
6. in an improved mode, an optical attenuator 218 is additionally arranged between the multi-longitudinal-mode laser and the beam splitter, the optical attenuator 218 is used for adjusting the light intensity of feedback light received by the laser, and the feedback light is prevented from being too strong or exceeding a laser damage threshold, so that the accuracy of a measurement result is further ensured, and the optical attenuator can be a displacement type attenuator, an attenuation sheet type attenuator or other types of optical attenuators;
7. in the improved mode, the multi-longitudinal-mode laser 1 adopts a semiconductor laser, and integrates a photodiode in the semiconductor laser by utilizing the characteristics of the semiconductor laser to realize the function of the photoelectric detector, thereby simplifying the optical path of the whole device and removing a beam splitter and the photoelectric detector.
In summary, the invention has the following advantages:
1. the sensing unit of the measuring device is a passive optical sensor, and power supply is not needed;
2. the test device has smaller volume and lower cost;
3. non-contact real-time high-precision measurement can be realized;
4. the optical path of the measuring device is a single optical path, the measuring device is small in environmental interference, simple in structure and convenient to adjust the optical path;
5. the sensitivity and the resolution of angle measurement can be adjusted by designing and selecting different external cavity measuring tools through parameters of the sensing unit;
6. the optical path structure of the sensing unit is selected variously, and the sensing unit with corresponding characteristics can be selected according to specific requirements.
It should be understood that the detailed description of the invention is merely illustrative of the invention and is not intended to limit the invention to the specific embodiments described. It will be appreciated by those skilled in the art that the present invention may be modified or substituted equally as well to achieve the same technical result; as long as the use requirements are met, the method is within the protection scope of the invention.

Claims (6)

1. The utility model provides a pentagon prism type angle sensing measuring device based on many longitudinal modes are from mixing effect which characterized in that: the device comprises a multi-longitudinal-mode laser, a sensing unit, a vibration target, a sliding device, a beam splitter, a photoelectric detector, a signal preprocessing unit and a signal processing unit;
the sensing unit comprises a turntable and a pentagonal prism, one of five angles of the pentagonal prism is a right angle, the pentagonal prism is horizontally placed on the turntable, and the intersection line of the side surfaces where two right-angle sides of the pentagonal prism are located is located at the center of the turntable;
the vibration target can vibrate, a reflection structure is attached to a vibration surface of the vibration target, the vibration target is located on a light path of laser emitted by the pentagonal prism, the vibration surface is perpendicular to the light path, the bottom of the vibration target is fixed on the sliding device, the vibration target can move back and forth along the direction of a laser beam incident on the vibration surface by adjusting the sliding device, and the vibration surface is always perpendicular to the laser beam incident on the vibration surface in the moving process;
the multi-longitudinal-mode laser emits laser beams to the pentagonal prism, and in an initial state, the emitted laser beams are vertical to the side face of the pentagonal prism where a right-angle side is located;
the beam splitter is arranged between the multi-longitudinal-mode laser and the right-angle prism and is used for splitting a laser beam onto the photoelectric detector;
the photoelectric detector is used for converting the received laser signal into an electric signal and then sending the electric signal to the signal preprocessing unit;
the signal preprocessing unit is used for preprocessing the received electric signals, and the preprocessing at least comprises shaping, amplifying and filtering;
the signal processing unit is used for analyzing and processing the preprocessed electric signals to obtain the rotation angle of the turntable to be tested.
2. The pentagonal prism type angle sensing measuring device based on multi-longitudinal mode self-mixing effect as claimed in claim 1, characterized in that: and an optical attenuator is also arranged between the multi-longitudinal-mode laser and the beam splitter.
3. The pentagonal prism type angle sensing measuring device based on multi-longitudinal mode self-mixing effect as claimed in claim 1, characterized in that: the sliding device comprises a sliding rail and a sliding block arranged on the sliding rail, and the bottom of the vibration target is fixed on the sliding block; the slide rail and the emergent laser are positioned on the same straight line.
4. The pentagonal prism type angle sensing measuring device based on multi-longitudinal mode self-mixing effect as claimed in claim 1, characterized in that: the reflecting structure is a reflecting plane mirror or a reflecting film.
5. The pentagonal prism type angle sensing measuring device based on multi-longitudinal mode self-mixing effect as claimed in claim 1, characterized in that: the vibration target is a speaker or a piezoelectric ceramic driven by a signal generator.
6. The angle measurement method of the pentagonal prism-shaped angle sensing measurement device based on the multi-longitudinal mode self-mixing effect as claimed in claim 1, is characterized in that: the vibration target vibrates, laser beams emitted by the multi-longitudinal-mode laser are incident on the vibration target through the sensing unit, the emitted laser is reflected by the reflecting structure and then fed back to the resonant cavity of the multi-longitudinal-mode laser along the original path to form a laser self-mixing signal, in the process, the turntable in the sensing unit rotates to cause the waveform of the laser self-mixing signal to change, the vibration target moves back and forth along the direction of the laser beams incident on the vibration surface by adjusting the sliding device, the vibration surface and the laser beams incident on the vibration surface are always kept vertical in the moving process to change the optical path of the vibration target from the multi-longitudinal-mode laser, so that the required laser self-mixing signals under different laser external cavity lengths are formed, the laser self-mixing signals under different laser external cavity lengths are collected by the photoelectric detector, and then the laser self-mixing signals are preprocessed by the signal preprocessing unit, and finally, analyzing the preprocessed laser self-mixing signals by using a signal processing unit to obtain the rotation angle of the turntable in the sensing unit, wherein the specific measurement and analysis method comprises the following steps:
for laser self-mixing signals of a multi-longitudinal-mode laser, different longitudinal modes of the laser only interfere with the self-mode, the finally formed laser self-mixing signals are laser self-mixing signal intensity superposition formed by the respective longitudinal modes, and according to a related interference mixing theory model, under the condition of not considering speckle influence, the multi-longitudinal-mode laser self-mixing signal intensity is obtained:
Figure FDA0002223010510000021
beta in the formula (1) is the total number of oscillation starting modes in the multi-longitudinal-mode laser, j represents the jth longitudinal mode in the laser, I0Is the initial light intensity,. DELTA.IjAmplitude of variation of light intensity of j-mode laser, phitjPhase, k, of the j-mode laser back and forth around the outer cavity0jWave number, op, of j mode in vacuumt(t) is the total optical path of the real-time external cavity of the laser, c.c. represents the complex conjugate of the formula, and the refractive index change caused by different longitudinal modes in the same material can be ignored in the calculation;
when the phase of the sensing unit changes, the external cavity total phase relationship is as follows:
Figure FDA0002223010510000022
phi in the formula (2)0jInitial phase of j-mode laser back and forth one revolution of the external cavity, delta phisjFor sensing unit phase change, delta phi, caused by rotation angle of the turntablecjFor compensating for phase changes, delta phi when measuring anglessj＝-δφcj，op0Is the initial optical path of the external cavity of the laser, delta opsFor changes in the optical path of the sensing unit, delta op, caused by the angle of rotation of the turntablecTo compensate for optical path, ncIs the refractive index of air in the external cavity, and has a value of 1, nsIs the refractive index of the sensing unit, and has a constant value, LsFor the total geometrical length of the actual path of the laser light propagating in the sensor unit, LcTo compensate for the length;
Figure FDA0002223010510000031
in the formula (3) < omega >0Is the angular frequency of the laser, c is the speed of light in vacuum, ngIs the refractive index of the laser resonant cavity medium group, L0Is the laser resonant cavity length;
substituting formula (3) into formula (1) to obtain:
if the waveforms of the laser self-mixing signals of different modes are not separated, the waveforms of the modes need to keep the same phase or the phase delay is integral multiple of 2 pi:
φtj＝k0jopt＝2mk0jngL0＝mφgjformula (5)
Namely:
opt＝2mngL0formula (6)
In the formula (5), m is the external cavity mode order of the laser and is a positive integer phigjThe laser has a phase of reciprocating in the resonant cavity of the laser, so that the laser has a series of special position points, the superposed laser self-mixing signal does not generate waveform separation, and the formula (5) shows that when the laser self-mixing signal does not generate waveform separationWhen the rotary disc rotates a certain angle, the phase of light transmitted by the sensing unit changes, resulting in phi of each modetjChanging m value to make m no longer be integer, separating the waveform of the superposed laser self-mixing signal, regulating slide device to change vibration target position to compensate phase change, making the waveform of the superposed laser self-mixing signal become complete waveform, measuring vibration target position to obtain compensation phase change delta phicjFurther obtain the phase change delta phi of the sensing unit caused by the rotation angle of the rotary tablesjHere, the angle of rotation of the turntable causes a phase change δ φ in the sensing unitsjThe relationship of (a) is shown as follows:
Figure FDA0002223010510000041
in the formula (7)
Figure FDA0002223010510000042
Is the coefficient of variation of external optical path with angle, L, in the sensing units0For the total initial geometric length of the actual path of the laser light propagating in the sensor unit, ns0Is the refractive index of the sensing unit material;
using compensated phase in combination with sensing cell material refractive index ns0Total initial geometric length L of the actual path of the laser light propagating in the sensor units0The coefficient of variation of the external optical path in the sensing unit along with the angle
Figure FDA0002223010510000043
And calculating to obtain the rotation angle of the rotary disc in the sensing unit.
CN201910941460.7A 2018-05-18 2018-05-18 Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect Expired - Fee Related CN110631514B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910941460.7A CN110631514B (en) 2018-05-18 2018-05-18 Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910941460.7A CN110631514B (en) 2018-05-18 2018-05-18 Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect
CN201810481300.4A CN108680121B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in single-arbitrary-angle intersecting plane mirror

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201810481300.4A Division CN108680121B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in single-arbitrary-angle intersecting plane mirror

Publications (2)

Publication Number Publication Date
CN110631514A true CN110631514A (en) 2019-12-31
CN110631514B CN110631514B (en) 2021-03-30

Family

ID=63805703

Family Applications (5)

Application Number Title Priority Date Filing Date
CN201910940538.3A Active CN110631511B (en) 2018-05-18 2018-05-18 Right-angle prism type angle sensing measurement device and method based on multi-longitudinal-mode self-mixing effect
CN201910941460.7A Expired - Fee Related CN110631514B (en) 2018-05-18 2018-05-18 Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect
CN201910940583.9A Expired - Fee Related CN110631512B (en) 2018-05-18 2018-05-18 External incident type angle sensing measuring device and method for bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect
CN201810481300.4A Active CN108680121B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in single-arbitrary-angle intersecting plane mirror
CN201910940599.XA Expired - Fee Related CN110631513B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in biorthogonal plane mirror

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201910940538.3A Active CN110631511B (en) 2018-05-18 2018-05-18 Right-angle prism type angle sensing measurement device and method based on multi-longitudinal-mode self-mixing effect

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN201910940583.9A Expired - Fee Related CN110631512B (en) 2018-05-18 2018-05-18 External incident type angle sensing measuring device and method for bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect
CN201810481300.4A Active CN108680121B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in single-arbitrary-angle intersecting plane mirror
CN201910940599.XA Expired - Fee Related CN110631513B (en) 2018-05-18 2018-05-18 Incident type angle sensing measuring device and method in biorthogonal plane mirror

Country Status (1)

Country Link
CN (5) CN110631511B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114322825A (en) * 2021-12-08 2022-04-12 中国电子科技集团公司第十一研究所 Visual super-large-size optical plane detection device and method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110411377B (en) * 2019-06-11 2021-09-28 湖北光安伦芯片有限公司 Right angle detection and adjustment system and method
CN111141744B (en) * 2019-12-31 2023-01-31 广州维思车用部件有限公司 Lens detection device
CN113340370B (en) * 2021-06-04 2023-01-24 淄博海源电子科技有限公司 Intelligent sensing Internet of things water meter based on heterogeneous network

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061724A (en) * 1975-09-22 1977-12-06 Union Carbide Corporation Crystalline silica
CN1073522A (en) * 1991-12-12 1993-06-23 清华大学 The laser longitudinal mode splitting angular transducer
DE4400680A1 (en) * 1994-01-12 1995-07-13 Kayser Threde Gmbh Measurement of positional change using self-mixing interference laser
CN1215152A (en) * 1998-11-13 1999-04-28 清华大学 High-resolution surface plasma wave angle/refractive index sensor
CN1477372A (en) * 2002-08-21 2004-02-25 中国科学院长春光学精密机械与物理研 Cylindrical grating shaft interference encoder
CN1668939A (en) * 2002-05-29 2005-09-14 肯特·L·戴尼斯 System and method for measuring velocity using frequency modulation of laser output
CN101236076A (en) * 2008-02-29 2008-08-06 成都工具研究所 Laser angle interferometry system possessing standard angle rotating platform and its measurement method
CN101583462A (en) * 2006-11-08 2009-11-18 辛迪斯股份公司 Industrial machine provided with interferometric measuring means
CN101949685A (en) * 2010-09-08 2011-01-19 南京师范大学 Fiber laser self-mixing interferometer and measurement method thereof
KR20140017886A (en) * 2012-08-01 2014-02-12 한국과학기술원 Slope-angle sensor with accuracy in steady state and transient state
TW201530100A (en) * 2014-01-22 2015-08-01 Academia Sinica Optical measurement system and method for measuring linear displacement, rotation and rolling angles
CN105794057A (en) * 2013-12-27 2016-07-20 英特尔公司 Asymmetric optical waveguide grating resonators & DBR lasers
CN107576285A (en) * 2017-10-12 2018-01-12 安徽大学 Laser mixes micro- angle measurement system and measuring method certainly

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004317424A (en) * 2003-04-18 2004-11-11 Pioneer Electronic Corp Autocollimator
CN1257382C (en) * 2003-09-19 2006-05-24 南开大学 Electrooptical angle measurer
CN102564909B (en) * 2011-11-29 2014-05-07 中国科学院安徽光学精密机械研究所 Laser self-mixing multi-physical parameter measurement method and device for atmospheric particulate
PL219676B1 (en) * 2012-01-27 2015-06-30 Politechnika Warszawska Measuring method for angular deviations of the laser beam and an interferometer for measuring the angular deviations of the laser beam
CN103472254B (en) * 2013-09-09 2016-03-23 中国科学院合肥物质科学研究院 Based on square wave current modulation and the laser of FP etalon light splitting from mixing velocity measuring system and method
CN106802165A (en) * 2017-03-02 2017-06-06 阜阳师范学院 Speed and distance synchronous measuring method and device based on laser self-mixing interference

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4061724A (en) * 1975-09-22 1977-12-06 Union Carbide Corporation Crystalline silica
CN1073522A (en) * 1991-12-12 1993-06-23 清华大学 The laser longitudinal mode splitting angular transducer
DE4400680A1 (en) * 1994-01-12 1995-07-13 Kayser Threde Gmbh Measurement of positional change using self-mixing interference laser
CN1215152A (en) * 1998-11-13 1999-04-28 清华大学 High-resolution surface plasma wave angle/refractive index sensor
CN1668939A (en) * 2002-05-29 2005-09-14 肯特·L·戴尼斯 System and method for measuring velocity using frequency modulation of laser output
CN1477372A (en) * 2002-08-21 2004-02-25 中国科学院长春光学精密机械与物理研 Cylindrical grating shaft interference encoder
CN101583462A (en) * 2006-11-08 2009-11-18 辛迪斯股份公司 Industrial machine provided with interferometric measuring means
CN101236076A (en) * 2008-02-29 2008-08-06 成都工具研究所 Laser angle interferometry system possessing standard angle rotating platform and its measurement method
CN101949685A (en) * 2010-09-08 2011-01-19 南京师范大学 Fiber laser self-mixing interferometer and measurement method thereof
KR20140017886A (en) * 2012-08-01 2014-02-12 한국과학기술원 Slope-angle sensor with accuracy in steady state and transient state
CN105794057A (en) * 2013-12-27 2016-07-20 英特尔公司 Asymmetric optical waveguide grating resonators & DBR lasers
TW201530100A (en) * 2014-01-22 2015-08-01 Academia Sinica Optical measurement system and method for measuring linear displacement, rotation and rolling angles
CN107576285A (en) * 2017-10-12 2018-01-12 安徽大学 Laser mixes micro- angle measurement system and measuring method certainly

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
吕亮等: "基于垂直腔面发射半导体激光器的自混合测速实验", 《光学精密工程》 *
胡险峰等: "多纵模激光二极管自混合干涉的观察和分析", 《光学学报》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114322825A (en) * 2021-12-08 2022-04-12 中国电子科技集团公司第十一研究所 Visual super-large-size optical plane detection device and method

Also Published As

Publication number Publication date
CN110631514B (en) 2021-03-30
CN108680121A (en) 2018-10-19
CN110631511A (en) 2019-12-31
CN108680121B (en) 2020-11-27
CN110631513B (en) 2021-03-30
CN110631511B (en) 2021-01-05
CN110631512B (en) 2021-08-06
CN110631513A (en) 2019-12-31
CN110631512A (en) 2019-12-31

Similar Documents

Publication Publication Date Title
CN110631514B (en) Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect
CA2007190C (en) Laser optical ultrasound detection
Deferrari et al. Vibrational displacement and mode‐shape measurement by a laser interferometer
CA1224935A (en) Optical interferometric reception of ultrasonic energy
CN100434862C (en) Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
CN110132179B (en) Biorthogonal internal incidence type laser self-mixing micro-angle measuring system and measuring method
US3809481A (en) Single reflector interference spectrometer and drive system therefor
CN102735646B (en) Measuring apparatus and measuring method for refractive index of transparent medium
CN104713649B (en) A kind of Fourier transform spectrometer, interferometer
US5196902A (en) Two-beam interferometer apparatus and method, and spectrometer utilizing the same
CN105333815A (en) Super lateral resolution surface three-dimensional online interference measuring system based on spectral dispersion line scanning
CN110806397B (en) Liquid concentration sensing measurement device and method based on multi-longitudinal-mode self-mixing effect
US3535024A (en) Interferometer servo system
CN108709717B (en) Device and method for measuring resonant cavity FSR of multi-longitudinal-mode laser by using large-amplitude laser self-mixing vibration signal
EP2167908B1 (en) Improved interferometer
CN106017441B (en) A kind of big working distance autocollimation of portable high-accuracy laser and method
JPS6134430A (en) Active mirror wave-front sensor
CN109489939B (en) S, P polarized reflectivity and phase difference high-precision simultaneous measurement method of high-reflectivity optical element
US3912394A (en) Method and system of interferometric measurements of modulation transfer functions
Ren et al. External dihedral-angle error measurement based on Differential Wavefront Sensing
CN106052597B (en) A kind of portable high frequency rings big working distance autocollimation and method
CN106052598B (en) A kind of big working distance autocollimation of high frequency sound and method
CN106052548B (en) A kind of big working distance autocollimation of portable high-accuracy and method
Weigel et al. Accurate optical measurement of surface acoustic wave phase velocity
CN111044265A (en) Medium refractive index measuring instrument based on Taemann Green measuring system

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20210330