CN107340685A - A kind of infrared acquisition intelligent nano marking press - Google Patents

A kind of infrared acquisition intelligent nano marking press Download PDF

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Publication number
CN107340685A
CN107340685A CN201710728522.7A CN201710728522A CN107340685A CN 107340685 A CN107340685 A CN 107340685A CN 201710728522 A CN201710728522 A CN 201710728522A CN 107340685 A CN107340685 A CN 107340685A
Authority
CN
China
Prior art keywords
lifting platform
pressurized tank
platform
lifting
marking press
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201710728522.7A
Other languages
Chinese (zh)
Inventor
赵敏洁
杨彦涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Imprint Nano Technology Co Ltd
Original Assignee
Wuxi Imprint Nano Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Imprint Nano Technology Co Ltd filed Critical Wuxi Imprint Nano Technology Co Ltd
Priority to CN201710728522.7A priority Critical patent/CN107340685A/en
Publication of CN107340685A publication Critical patent/CN107340685A/en
Withdrawn legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

The invention discloses a kind of infrared acquisition intelligent nano marking press, pressurized tank including top opening structure, directly over pressurized tank be used for place the lifting platform of substrate and template, the pressure-bearing platform directly over lifting platform, at least two is provided with the pressurized tank towards the lifting column of Longitudinal extending above pressurized tank, the lifting column runs through lifting platform and pressure-bearing platform, and the pressure-bearing platform is fixedly connected with lifting column.The present invention can targetedly adjust the pressure value in pressurized tank according to height value of the template received on lifting platform, so that no matter thickness is how many for template and substrate on lifting platform, template and substrate can be risen to accurate position by lifting platform, solves the defects of traditional nano marking press can not be adapted to different templates and substrate thickness, not only improve impressing effect, and expand using degree extensively, there is fabulous market application foreground.

Description

A kind of infrared acquisition intelligent nano marking press
Technical field
The invention belongs to nanometer embossing field, and in particular to a kind of infrared acquisition intelligent nano marking press.
Background technology
Existing nano marking press is mainly realized by way of pressurization rises lifting platform so that is positioned over lifting platform On template and substrate contact to pressure-bearing platform carry out to pressure imprint, but reality application process among, due to different works There is very big difference in each template of skill and the gross thickness of substrate, but the lifting height of lifting platform is depended primarily in pressurized tank Pressure size, but existing nano marking press can not according to each template and the gross thickness of substrate targetedly adjusting plus The pressure size in case is pressed, therefore the lifting height of lifting platform can not be adapted to the use demand of different process requirement, nanometer pressure There is significant limitation in the actual use of print machine, using effect is bad.
The content of the invention
Goal of the invention:In order to overcome the deficiencies in the prior art, there is provided a kind of to can adapt in the mould of any thickness The infrared acquisition intelligent nano marking press of the impressing demand of plate and substrate.
Technical scheme:To achieve the above object, the present invention provides a kind of infrared acquisition intelligent nano marking press, including top The pressurized tank of hatch frame, directly over pressurized tank be used for place substrate and template lifting platform, positioned at lifting platform just The pressure-bearing platform of side, at least two is provided with the pressurized tank towards the lifting column of Longitudinal extending above pressurized tank, the lifting column Through lifting platform and pressure-bearing platform, the pressure-bearing platform is fixedly connected with lifting column, and the lifting platform can move down along on lifting column Dynamic, the bottom of the pressurized tank is connected to pressurizer by forcing pipe, and ultraviolet lamp device, the liter are provided with the pressure-bearing platform The both ends of drop platform are respectively arranged with the infrared emission plate and infrared receiver plate being mutually matched, and are provided with the lifting platform for reading The signal conversion transmitter for the infrared ray altitude information that infrared receiver plate receives is got, is provided with the pressurizer for connecing Collection of letters conversion transmitter launches the display receiver of data, and the display receiver is connected to pressurizer.
The present invention design principle be:The infrared ray that infrared emission plate emits can be received using infrared receiver plate All altitude ranges, signal conversion transmitter can read the data area that infrared receiver plate receives, by being not received by The peak value of data area be height value of the template on lifting platform, this data value is sent to display by signal conversion transmitter Receiver, display receiver by the data transfer received to pressurizer, by pressurizer by the pressure value in pressurized tank with Height value of the template received on lifting platform carries out the program setting of functional value so that on corresponding height value can correspond to Specific pressure value, so that no matter thickness is how many for template and substrate on lifting platform, lifting platform can be by template and lining Bottom rises to the position of standard.
Further, the bottom of the lifting platform is provided with vacuum extractor.
Further, it is provided with silicagel pad between the lifting platform and substrate.
Further, the quantity of the lifting column is 4 and is located at four corners of pressurized tank respectively.
Further, described receive shows that transmitter and display receiver are carried out data transmission by WIFI signal.
Further, the signal conversion transmitter is fixed on the sidepiece of lifting platform.
Beneficial effect:Compared with prior art, pressurizer can be according to the template received on lifting platform by the present invention Height value targetedly adjusts the pressure value in pressurized tank, so that no matter thickness is more to the template and substrate on lifting platform Few, template and substrate can be risen to accurate position by lifting platform, and solving traditional nano marking press can not be adapted to not The defects of with template and substrate thickness, impressing effect is not only improved, and expanded using degree extensively, there is fabulous market Application prospect.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate The present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are each to the present invention's The modification of the kind equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, the present invention provides a kind of infrared acquisition intelligent nano marking press, include the pressurization of top opening structure Case 1, the lifting platform 2 for being used to place substrate 11 and template 12 directly over pressurized tank 1, holding directly over lifting platform 2 Present a theatrical performance as the last item on a programme 3,4 lifting columns 4 towards the top Longitudinal extending of pressurized tank 1 are provided with the pressurized tank 1,4 lifting columns 4 divide Not Wei Yu pressurized tank 1 four corners, the lifting column 4 runs through lifting platform 2 and pressure-bearing platform 3, the pressure-bearing platform 3 and lifting column 4 are fixedly connected, and the lifting platform 2 can move up and down along lifting column 4, and the bottom of the pressurized tank 1 is connected by forcing pipe 71 Then pressurizer 7, ultraviolet lamp device 5 are provided with the pressure-bearing platform 3, the both ends of the lifting platform 2 are respectively arranged with mutual The infrared emission plate 8 and infrared receiver plate 9 matched somebody with somebody, it is provided with what is received for reading infrared receiver plate 9 on the lifting platform 2 The signal conversion transmitter 91 of infrared ray altitude information, it is provided with for reception signal conversion transmitter 91 on the pressurizer 7 Launch the display receiver 10 of data, the display receiver 10 is connected to pressurizer 7, and the bottom of the lifting platform 2 is provided with Vacuum extractor 6, silicagel pad 13, the signal conversion transmitter 91 and display are provided between the lifting platform 2 and substrate 11 Receiver 10 is carried out data transmission by WIFI signal, and the signal conversion transmitter 91 is fixed on the sidepiece of lifting platform 2.

Claims (6)

1. a kind of infrared acquisition intelligent nano marking press, including the pressurized tank (1) of top opening structure, positioned at pressurized tank (1) just Top be used for place the lifting platform (2) of substrate (11) and template (12), the pressure-bearing platform (3) directly over lifting platform (2), institute State the lifting column (4) that at least two is provided with pressurized tank (1) towards Longitudinal extending above pressurized tank (1), the lifting column (4) Through lifting platform (2) and pressure-bearing platform (3), the pressure-bearing platform (3) is fixedly connected with lifting column (4), and the lifting platform (2) being capable of edge Lifting column (4) to move up and down, the bottom of the pressurized tank (1) is connected to pressurizer (7), the pressure-bearing by forcing pipe (71) Ultraviolet lamp device (5) is provided with platform (3), it is characterised in that:The both ends of the lifting platform (2) are respectively arranged with what is be mutually matched Infrared emission plate (8) and infrared receiver plate (9), it is provided with the lifting platform (2) for reading infrared receiver plate (9) reception The signal conversion transmitter (91) of the infrared ray altitude information arrived, it is provided with the pressurizer (7) and is changed for reception signal Transmitter (91) launches the display receiver (10) of data, and the display receiver (10) is connected to pressurizer (7).
A kind of 2. infrared acquisition intelligent nano marking press according to claim 1, it is characterised in that:The lifting platform (2) Bottom be provided with vacuum extractor (6).
A kind of 3. infrared acquisition intelligent nano marking press according to claim 1, it is characterised in that:The lifting platform (2) Silicagel pad (13) is provided between substrate (11).
A kind of 4. infrared acquisition intelligent nano marking press according to claim 1, it is characterised in that:The lifting column (4) Quantity for 4 and respectively be located at pressurized tank (1) four corners.
A kind of 5. infrared acquisition intelligent nano marking press according to claim 1, it is characterised in that:The signal conversion hair Emitter (91) and display receiver (10) are carried out data transmission by WIFI signal.
A kind of 6. infrared acquisition intelligent nano marking press according to claim 1, it is characterised in that:The signal conversion hair Emitter (91) is fixed on the sidepiece of lifting platform (2).
CN201710728522.7A 2017-08-23 2017-08-23 A kind of infrared acquisition intelligent nano marking press Withdrawn CN107340685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710728522.7A CN107340685A (en) 2017-08-23 2017-08-23 A kind of infrared acquisition intelligent nano marking press

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710728522.7A CN107340685A (en) 2017-08-23 2017-08-23 A kind of infrared acquisition intelligent nano marking press

Publications (1)

Publication Number Publication Date
CN107340685A true CN107340685A (en) 2017-11-10

Family

ID=60215272

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710728522.7A Withdrawn CN107340685A (en) 2017-08-23 2017-08-23 A kind of infrared acquisition intelligent nano marking press

Country Status (1)

Country Link
CN (1) CN107340685A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102806660A (en) * 2012-08-16 2012-12-05 上海交通大学 Device and method for processing polymer film surface microstructure based on roll-to-roll hot rolling
CN103149797A (en) * 2013-02-19 2013-06-12 无锡市正先自动化设备有限公司 Nanoimprint machine and pressurizing method thereof
CN106547175A (en) * 2017-01-22 2017-03-29 青岛德微光纳科技有限公司 A kind of fine registration formula nano-imprinting apparatus
CN107021318A (en) * 2017-04-27 2017-08-08 嵊州市万协汽车配件有限公司 Auto parts machinery loses line vacuum transferring machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102806660A (en) * 2012-08-16 2012-12-05 上海交通大学 Device and method for processing polymer film surface microstructure based on roll-to-roll hot rolling
CN103149797A (en) * 2013-02-19 2013-06-12 无锡市正先自动化设备有限公司 Nanoimprint machine and pressurizing method thereof
CN106547175A (en) * 2017-01-22 2017-03-29 青岛德微光纳科技有限公司 A kind of fine registration formula nano-imprinting apparatus
CN107021318A (en) * 2017-04-27 2017-08-08 嵊州市万协汽车配件有限公司 Auto parts machinery loses line vacuum transferring machine

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WW01 Invention patent application withdrawn after publication

Application publication date: 20171110

WW01 Invention patent application withdrawn after publication