CN103149797A - Nanoimprint machine and pressurizing method thereof - Google Patents
Nanoimprint machine and pressurizing method thereof Download PDFInfo
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- CN103149797A CN103149797A CN2013100538289A CN201310053828A CN103149797A CN 103149797 A CN103149797 A CN 103149797A CN 2013100538289 A CN2013100538289 A CN 2013100538289A CN 201310053828 A CN201310053828 A CN 201310053828A CN 103149797 A CN103149797 A CN 103149797A
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- marking press
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Abstract
The invention discloses a nanoimprint machine and a pressurizing method thereof. The nanoimprint machine comprises a vacuum chamber, a drive unit, a pressurizing disc, a bearing platform and a curing forming device, the bearing platform is arranged at the bottom in the vacuum chamber, the pressurizing disc is arranged above the bearing platform in the vacuum chamber and is connected with the drive unit, the drive unit comprises a direct-driven servo electric cylinder composed of a servo motor and a ball screw, a high-sensitivity pressure sensor is arranged in the cylinder body of the servo electric cylinder, the pressurizing disc comprises an upper pressurizing disc and a lower pressurizing disc, the upper pressurizing disc is connected with the ball screw, rolling friction balls are arranged between the upper pressurizing disc and the lower pressurizing disc, the bearing platform is provided with a heater, and the bottom of the bearing platform is provided with an ultraviolet light source. The nanoimprint machine has the advantages of uniform pressure distribution, self control and arrangement of an imprint pressure, a dwelling time and an imprint speed, and suitableness for the thermocuring formation and ultraviolet curing formation.
Description
Technical field
The present invention relates to the processing technique field of nanoscale structures and device, relate in particular to a kind of nano marking press and pressure method thereof.
Background technology
" nano impression " is a kind of brand-new nano graph clone method.In nano impression, impressing mould is exactly the template of nano impression, the size of convex-concave structure is in nanometer scale, the template that will have the convex-concave nanostructured is pressed in macromolecule membrane by certain pressure, and pressurize, by heating cooling or the method such as uv-exposure makes the nanostructured typing, remove afterwards template, then by other technique, nanostructured is transferred on semi-conductor silicon chip.This process is called nano impression.The difficult point of nanometer embossing is to provide the nanoscale pressuring flat device, and the most rational type of drive and operability, and at present, traditional nano marking press ubiquity pressure distribution is uneven, can only carry out a kind of solidified forming of form, the shortcoming of bad adaptability.
Summary of the invention
The object of the present invention is to provide a kind of nano marking press and pressure method thereof, it is even that it has pressure distribution, impression pressure, dwell time and the characteristics that speed of imprint can be controlled voluntarily and setting and applicable heat curing shaping and ultra-violet curing are shaped are to solve the problem that in prior art, nano marking press exists.
For reaching this purpose, the present invention by the following technical solutions:
A kind of nano marking press, it comprises vacuum chamber, drive unit, pressurization disk, pressure-bearing platform and solidified forming device, described pressure-bearing platform is arranged at the bottom in vacuum chamber, described platen is arranged at the top of pressure-bearing platform in vacuum chamber, and described platen connecting drive device, wherein, described pressurization disk comprises upper and lower pressurization disk, described upper pressurization disk connecting drive device, and be furnished with the rolling friction ball between described upper and lower platen, described solidified forming device comprises the heating arrangement that is arranged on pressure-bearing platform and is arranged at the ultraviolet source of pressure-bearing platform bottom.
Especially, described drive unit comprises the direct-drive type servo electric jar that is comprised of servomotor and ball-screw, is provided with high sensibility pressure transducer in the cylinder body of described servo electric jar, and described upper pressurization disk connects ball-screw.
Especially, described pressure-bearing platform is made by any of stainless steel or quartz glass.
Especially, described heating arrangement is the electric furnace that is built-in with water-cooling circulating system.
Especially, the wavelength of described ultraviolet source is 375nm.
A kind of pressure method of nano marking press: it comprises the following steps:
Step 1: set its impression pressure, dwell time and speed of imprint;
Step 2: start servo electric jar, substrate is exerted pressure first to 1/3rd of setup pressure value, then remove pressure;
Step 3: again start servo electric jar, substrate is exerted pressure again to 2/3rds of setup pressure value, then remove pressure;
Step 4: start at last servo electric jar, substrate is exerted pressure to arriving setup pressure value and pressurize.
Beneficial effect of the present invention is that compared with prior art described nano marking press and pressure method thereof have following advantage:
1) the nanoscale pressing is a link most crucial in the nano impression process.The present invention adopts self-adaptation levelling principle to be provided with rolling friction hemisphere at the impression dish, and to minute surface, its coefficient of rolling friction is less than 0.01 through precise finiss, self-adaptation levelling in loading the applying process.Be to impress on 10cm special-purpose nanometer impression test paper through experimental verification at diameter, pressure distribution is even, without the impression defective.
2) nano impression driving force is designed to the electric servo cylinder that servomotor and ball-screw form and directly drives, and is provided with high sensibility pressure transducer (the minimum pressure perception can reach 1N) in cylinder, and its impression pressure, dwell time, speed of imprint are all controlled, can arrange.Whole impression course of exerting pressure divides three sections execution, is conducive to the thorough levelling of self-adaptation impression platform.Be power source owing to adopting servomotor, be easy to realize on software.Experimental verification, this invention is controlled, effective, and technical in the passive levelling of nano impression is a kind of breakthrough.
3) pressure-bearing platform is designed to put on the stainless steel platform electric furnace (containing the water-cooled circulation) and two kinds of forms of quartz glass platform, and front a kind of form is applicable to heat curing and is shaped, and heating-up temperature can reach 350 ℃, built-in sealing Water-cooling circulating device.Rear a kind of form can be used for ultra-violet curing and is shaped in conjunction with the uviol lamp source (wavelength is 375nm) of vacuum chamber bottom setting.(quartz glass sees through the UVA infrared ray and is conducive to solidified forming) as laboratory equipment, this array configuration has satisfied the demand of different experiments kind, has very strong adaptability.
Description of drawings
Fig. 1 is the structural representation of the nano marking press that provides of the specific embodiment of the invention 1.
Embodiment
Further illustrate technical scheme of the present invention below in conjunction with accompanying drawing and by embodiment.
See also shown in Figure 1ly, Fig. 1 is the structural representation of the nano marking press that provides of the specific embodiment of the invention 1.
in the present embodiment, a kind of nano marking press comprises vacuum chamber 1, bottom in described vacuum chamber 1 is provided with pressure-bearing platform 2, described pressure-bearing platform 2 is made by any of stainless steel or quartz glass, and be provided with the electric furnace 3 that is built-in with water-cooling circulating system on described pressure-bearing platform 2, and it is 375nm ultraviolet source 4 that its bottom is provided with wavelength, can be according to different experiment demands, any forming mode of selecting heat curing shaping or ultra-violet curing to be shaped, the top of the interior pressure-bearing platform 1 of described vacuum chamber 1 is provided with pressurization disk 5, described pressurization disk 5 comprises pressurization disk 6 and lower pressurization disk 7, described upper pressurization disk 6 connects servo electric jar 9, and be furnished with most rolling friction balls 8 between described upper pressurization disk 6 and lower pressurization disk 7, described rolling friction ball 8 through precise finiss to minute surface, its coefficient of rolling friction is less than 0.01, the effect that has the self-adaptation levelling in loading the applying process.
Described servo electric jar 9 is direct-drive type, is comprised of servomotor and ball-screw 10, is provided with high sensibility pressure transducer 11 in the cylinder body of described servo electric jar 9, and described upper pressurization disk connects ball-screw 10.
During impression, the first step: first substrate 12 to be imprinted is placed on pressure-bearing platform 2.(platform is quartz glass when ultra-violet curing impresses, and when being heating and curing, platform is stainless steel).Second step: vacuum chamber 1 is evacuated to 1 * 10
-2Pa.The 3rd step: servo electric jar 9 drive pressurization disk 5 slowly descending being adjacent to be pressed substrate 12 and exert pressure, the 4th step: pressure transducer 11 sensed pressure are to setting value, pressurize.The 5th step: uv-exposure solidifies or is heating and curing.The 6th step: vacuum chamber 1 is inflated to an atmospheric pressure.The 7th step: it is up that servo electric jar 9 drives pressurization disk 5, takes out the impression sample and get final product.
The servo electric jar 9 of above-mentioned nano marking press is treated the method that imprinted substrate 12 pressurizes and is comprised the following steps:
Step 1: set its impression pressure, dwell time and speed of imprint;
Step 2: start servo electric jar 9, treat imprinted substrate 12 and exert pressure first to 1/3rd of setup pressure value, then remove pressure;
Step 3: again start servo electric jar 9, treat imprinted substrate 12 and again exert pressure to 2/3rds of setup pressure value, then remove pressure;
Step 4: start at last servo electric jar 9, treat imprinted substrate 12 and exert pressure to arriving setup pressure value and pressurize.
Above embodiment has just set forth ultimate principle of the present invention and characteristic; the present invention is not limited by above-mentioned example; without departing from the spirit and scope of the present invention, the present invention also has various variations and change, and these variations and change all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (6)
1. nano marking press, it comprises vacuum chamber, drive unit, pressurization disk, pressure-bearing platform and solidified forming device, described pressure-bearing platform is arranged at the bottom in vacuum chamber, described platen is arranged at the top of pressure-bearing platform in vacuum chamber, and described platen connecting drive device, it is characterized in that, described pressurization disk comprises, lower pressurization disk, described upper pressurization disk connecting drive device, and on described, be furnished with the rolling friction ball between pressing disc, described solidified forming device comprises the heating arrangement that is arranged on pressure-bearing platform and is arranged at the ultraviolet source of pressure-bearing platform bottom.
2. nano marking press according to claim 1, it is characterized in that, described drive unit comprises the direct-drive type servo electric jar that is comprised of servomotor and ball-screw, is provided with high sensibility pressure transducer in the cylinder body of described servo electric jar, and described upper pressurization disk connects ball-screw.
3. nano marking press according to claim 1, is characterized in that, described pressure-bearing platform is made by any of stainless steel or quartz glass.
4. nano marking press according to claim 1, is characterized in that, described heating arrangement is the electric furnace that is built-in with water-cooling circulating system.
5. nano marking press according to claim 1, is characterized in that, the wavelength of described ultraviolet source is 375nm.
6. the pressure method of a nano marking press: it is characterized in that: comprise the following steps:
Step 1: set its impression pressure, dwell time and speed of imprint;
Step 2: start servo electric jar, substrate is exerted pressure first to 1/3rd of setup pressure value, then remove pressure;
Step 3: again start servo electric jar, substrate is exerted pressure again to 2/3rds of setup pressure value, then remove pressure;
Step 4: start at last servo electric jar, substrate is exerted pressure to arriving setup pressure value and pressurize.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310053828.9A CN103149797B (en) | 2013-02-19 | 2013-02-19 | A kind of nano marking press and pressure method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310053828.9A CN103149797B (en) | 2013-02-19 | 2013-02-19 | A kind of nano marking press and pressure method thereof |
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| CN103149797A true CN103149797A (en) | 2013-06-12 |
| CN103149797B CN103149797B (en) | 2016-04-13 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103543603A (en) * | 2013-10-28 | 2014-01-29 | 天津工业大学 | High polymer nano hot stamping device |
| CN107340685A (en) * | 2017-08-23 | 2017-11-10 | 无锡英普林纳米科技有限公司 | A kind of infrared acquisition intelligent nano marking press |
| CN107688324A (en) * | 2017-08-31 | 2018-02-13 | 无锡英普林纳米科技有限公司 | A kind of nano marking press controlling organization |
| CN108098393A (en) * | 2018-01-02 | 2018-06-01 | 中电智能卡有限责任公司 | Applied to the card support platform of smart card slotter and smart card slotter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102346369A (en) * | 2011-09-08 | 2012-02-08 | 青岛理工大学 | Nanoimprint lithography machine for whole wafer |
| CN102591143A (en) * | 2012-02-29 | 2012-07-18 | 青岛理工大学 | Device and method for large-area nano imprinting photoetching |
| CN202445252U (en) * | 2012-01-10 | 2012-09-26 | 汪小立 | Shoe-pressing machine and steel ball pressure device |
| CN202517191U (en) * | 2012-03-29 | 2012-11-07 | 北京百能汇通科技股份有限公司 | Laser welding head device for welding bipolar structural battery element |
-
2013
- 2013-02-19 CN CN201310053828.9A patent/CN103149797B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102346369A (en) * | 2011-09-08 | 2012-02-08 | 青岛理工大学 | Nanoimprint lithography machine for whole wafer |
| CN202445252U (en) * | 2012-01-10 | 2012-09-26 | 汪小立 | Shoe-pressing machine and steel ball pressure device |
| CN102591143A (en) * | 2012-02-29 | 2012-07-18 | 青岛理工大学 | Device and method for large-area nano imprinting photoetching |
| CN202517191U (en) * | 2012-03-29 | 2012-11-07 | 北京百能汇通科技股份有限公司 | Laser welding head device for welding bipolar structural battery element |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103543603A (en) * | 2013-10-28 | 2014-01-29 | 天津工业大学 | High polymer nano hot stamping device |
| CN107340685A (en) * | 2017-08-23 | 2017-11-10 | 无锡英普林纳米科技有限公司 | A kind of infrared acquisition intelligent nano marking press |
| CN107688324A (en) * | 2017-08-31 | 2018-02-13 | 无锡英普林纳米科技有限公司 | A kind of nano marking press controlling organization |
| CN108098393A (en) * | 2018-01-02 | 2018-06-01 | 中电智能卡有限责任公司 | Applied to the card support platform of smart card slotter and smart card slotter |
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| Publication number | Publication date |
|---|---|
| CN103149797B (en) | 2016-04-13 |
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