CN107561856A - A kind of Intelligent pressing nano marking press - Google Patents

A kind of Intelligent pressing nano marking press Download PDF

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Publication number
CN107561856A
CN107561856A CN201710728500.0A CN201710728500A CN107561856A CN 107561856 A CN107561856 A CN 107561856A CN 201710728500 A CN201710728500 A CN 201710728500A CN 107561856 A CN107561856 A CN 107561856A
Authority
CN
China
Prior art keywords
pressure
pressurized tank
platform
lifting
bearing platform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710728500.0A
Other languages
Chinese (zh)
Inventor
赵敏洁
杨彦涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Imprint Nano Technology Co Ltd
Original Assignee
Wuxi Imprint Nano Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Imprint Nano Technology Co Ltd filed Critical Wuxi Imprint Nano Technology Co Ltd
Priority to CN201710728500.0A priority Critical patent/CN107561856A/en
Publication of CN107561856A publication Critical patent/CN107561856A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a kind of Intelligent pressing nano marking press, pressurized tank including top opening structure, the lifting platform directly over pressurized tank, the pressure-bearing platform directly over lifting platform, at least two is provided with the pressurized tank towards the lifting column of Longitudinal extending above pressurized tank, the lifting column runs through lifting platform and pressure-bearing platform, the pressure-bearing platform is fixedly connected with lifting column, the lifting platform can move up and down along lifting column, the bottom of the pressurized tank is connected to pressurizer by forcing pipe, and ultraviolet lamp device is provided with the pressure-bearing platform.Pressurizer can targetedly adjust the pressure value in pressurized tank according to real-time range value is received in the present invention, so that no matter thickness is how many for template and substrate on lifting platform, template and substrate can be risen to accurate position by lifting platform, solve the defects of traditional nano marking press can not be adapted to different templates and substrate thickness, there is fabulous market application foreground.

Description

A kind of Intelligent pressing nano marking press
Technical field
The invention belongs to nanometer embossing field, and in particular to a kind of Intelligent pressing nano marking press.
Background technology
Existing nano marking press is mainly realized by way of pressurization rises lifting platform so that is positioned over lifting platform On template and substrate contact to pressure-bearing platform carry out to pressure imprint, but reality application process among, due to different works There is very big difference in each template of skill and the gross thickness of substrate, but the lifting height of lifting platform is depended primarily in pressurized tank Pressure size, but existing nano marking press can not according to each template and the gross thickness of substrate targetedly adjusting plus The pressure size in case is pressed, therefore the lifting height of lifting platform can not be adapted to the use demand of different process requirement, nanometer pressure There is significant limitation in the actual use of print machine, using effect is bad.
The content of the invention
Goal of the invention:In order to overcome the deficiencies in the prior art, there is provided a kind of to can adapt in the mould of any thickness The Intelligent pressing nano marking press of the impressing demand of plate and substrate.
Technical scheme:To achieve the above object, the present invention provides a kind of Intelligent pressing nano marking press, including open top The pressurized tank of structure, the lifting platform directly over pressurized tank, the pressure-bearing platform directly over lifting platform, set in the pressurized tank At least two is equipped with towards the lifting column of Longitudinal extending above pressurized tank, the lifting column runs through lifting platform and pressure-bearing platform, described to hold Present a theatrical performance as the last item on a programme and be fixedly connected with lifting column, the lifting platform can move up and down along lifting column, and the bottom of the pressurized tank is by adding Pressure pipe is connected to pressurizer, ultraviolet lamp device is provided with the pressure-bearing platform, the bottom of the pressure-bearing platform is provided with distance perspective should Device, the display transmitter being connected with distance-sensor is provided with the pressure-bearing platform, be provided with the pressurizer for receiving The display receiver of transmitter transmitting data is shown, the display receiver is connected to pressurizer.
The present invention design principle be:Using distance-sensor can sense the template placed on lifting platform and substrate with Real-time range between distance-sensor, display transmitter can show current real-time range and send this data to aobvious Show receiver, display receiver by the data transfer received to pressurizer, by pressurizer by the pressure value in pressurized tank The program setting of functional value is carried out with the real-time range value received so that corresponding real-time range value can correspond to upper specific Pressure value, so that no matter thickness is how many for template and substrate on lifting platform, lifting platform can rise template and substrate To the position of standard.
Further, the bottom of the lifting platform is provided with vacuum extractor.
Further, it is provided with silicagel pad on the top surface of the lifting platform.
Further, the distance-sensor is embedded in the bottom of pressure-bearing platform, and such distance-sensor, which is not exposed to, holds Outside presenting a theatrical performance as the last item on a programme, the bottom of template contacts pressure-bearing platform is not interfered with.
Further, the distance-sensor is located at the center of pressure-bearing platform bottom, so no matter template and substrate How is size, and distance-sensor can correctly sense corresponding real-time range value.
Further, the quantity of the lifting column is 4 and is located at four corners of pressurized tank respectively.
Further, described receive shows that transmitter and display receiver are carried out data transmission by WIFI signal.
Beneficial effect:Compared with prior art, pressurizer can be according to receiving real-time range value come specific aim by the present invention Adjustment pressurized tank in pressure value so that no matter thickness is how many, the equal energy of lifting platform for template and substrate on lifting platform Template and substrate are risen into accurate position, different templates and substrate thickness can not be adapted to by solving traditional nano marking press The defects of spending, impressing effect is not only improved, and expanded using degree extensively, there is fabulous market application foreground.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate The present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are each to the present invention's The modification of the kind equivalent form of value falls within the application appended claims limited range.
As shown in figure 1, a kind of Intelligent pressing nano marking press of present invention offer, including the pressurized tank 1 of top opening structure, Lifting platform 2 directly over pressurized tank 1, the pressure-bearing platform 3 directly over lifting platform 2, four are provided with the pressurized tank 1 Towards the lifting column 4 of the top Longitudinal extending of pressurized tank 1, four lifting columns 4 are located at four corners of pressurized tank 1 respectively, The lifting column 4 runs through lifting platform 2 and pressure-bearing platform 3, and the pressure-bearing platform 3 is fixedly connected with lifting column 4, and the lifting platform 2 can Moved up and down along lifting column 4, the bottom of the pressurized tank 1 is connected to pressurizer 7 by forcing pipe 71, on the pressure-bearing platform 3 Be provided with ultraviolet lamp device 5, the bottom of the pressure-bearing platform 3 is provided with distance-sensor 8, be provided with the pressure-bearing platform 3 with away from The display transmitter 9 being connected from inductor 8, it is provided with the pressurizer 7 and shows that transmitter 9 launches the aobvious of data for receiving Showing receiver 10, the display receiver 10 is connected to pressurizer 7, and the bottom of the lifting platform 2 is provided with vacuum extractor 6, Silicagel pad 21 is provided with the top surface of the lifting platform 2, the distance-sensor 8 is embedded in the bottom of pressure-bearing platform 3, the distance Inductor 8 is located at the center of the bottom of pressure-bearing platform 3, and described receive shows that transmitter 9 and display receiver 10 are believed by WIFI Number carry out data transmission.

Claims (7)

1. a kind of Intelligent pressing nano marking press, including the pressurized tank (1) of top opening structure, directly over pressurized tank (1) Lifting platform (2), the pressure-bearing platform (3) directly over lifting platform (2), at least two is provided with the pressurized tank (1) towards adding The lifting column (4) of Longitudinal extending above case (1) is pressed, the lifting column (4) runs through lifting platform (2) and pressure-bearing platform (3), the pressure-bearing Platform (3) is fixedly connected with lifting column (4), and the lifting platform (2) can move up and down along lifting column (4), the pressurized tank (1) Bottom pressurizer (7) is connected to by forcing pipe (71), be provided with ultraviolet lamp device (5), its feature on the pressure-bearing platform (3) It is:The bottom of the pressure-bearing platform (3) is provided with distance-sensor (8), is provided with the pressure-bearing platform (3) and distance-sensor (8) connected display transmitter (9), it is provided with the pressurizer (7) and shows the aobvious of transmitter (9) transmitting data for receiving Show receiver (10), the display receiver (10) is connected to pressurizer (7).
A kind of 2. Intelligent pressing nano marking press according to claim 1, it is characterised in that:The bottom of the lifting platform (2) Portion is provided with vacuum extractor (6).
A kind of 3. Intelligent pressing nano marking press according to claim 1, it is characterised in that:The top of the lifting platform (2) Silicagel pad (21) is provided with face.
A kind of 4. Intelligent pressing nano marking press according to claim 1, it is characterised in that:The distance-sensor (8) It is embedded in the bottom of pressure-bearing platform (3).
A kind of 5. Intelligent pressing nano marking press according to claim 1 or 4, it is characterised in that:The distance-sensor (8) it is located at the center of pressure-bearing platform (3) bottom.
A kind of 6. Intelligent pressing nano marking press according to claim 1, it is characterised in that:The number of the lifting column (4) Measure four corners for being located at pressurized tank (1) for 4 and respectively.
A kind of 7. Intelligent pressing nano marking press according to claim 1, it is characterised in that:Described receive shows transmitter (9) carried out data transmission with display receiver (10) by WIFI signal.
CN201710728500.0A 2017-08-23 2017-08-23 A kind of Intelligent pressing nano marking press Pending CN107561856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710728500.0A CN107561856A (en) 2017-08-23 2017-08-23 A kind of Intelligent pressing nano marking press

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710728500.0A CN107561856A (en) 2017-08-23 2017-08-23 A kind of Intelligent pressing nano marking press

Publications (1)

Publication Number Publication Date
CN107561856A true CN107561856A (en) 2018-01-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710728500.0A Pending CN107561856A (en) 2017-08-23 2017-08-23 A kind of Intelligent pressing nano marking press

Country Status (1)

Country Link
CN (1) CN107561856A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110007556A (en) * 2019-04-02 2019-07-12 南京大学 A kind of electromagnetic induction heating type nano-imprinting device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1866128A (en) * 2005-05-16 2006-11-22 Asml荷兰有限公司 Imprint lithography
CN203217238U (en) * 2013-02-19 2013-09-25 无锡市正先自动化设备有限公司 Nano imprinting machine
CN105739247A (en) * 2016-02-25 2016-07-06 中国科学技术大学 Nano-imprinting equipment
WO2016145077A1 (en) * 2015-03-09 2016-09-15 University Of Washington Micro-and nanopatterned substrates for cell migration and uses thereof
CN106547175A (en) * 2017-01-22 2017-03-29 青岛德微光纳科技有限公司 A kind of fine registration formula nano-imprinting apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1866128A (en) * 2005-05-16 2006-11-22 Asml荷兰有限公司 Imprint lithography
CN203217238U (en) * 2013-02-19 2013-09-25 无锡市正先自动化设备有限公司 Nano imprinting machine
WO2016145077A1 (en) * 2015-03-09 2016-09-15 University Of Washington Micro-and nanopatterned substrates for cell migration and uses thereof
CN105739247A (en) * 2016-02-25 2016-07-06 中国科学技术大学 Nano-imprinting equipment
CN106547175A (en) * 2017-01-22 2017-03-29 青岛德微光纳科技有限公司 A kind of fine registration formula nano-imprinting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110007556A (en) * 2019-04-02 2019-07-12 南京大学 A kind of electromagnetic induction heating type nano-imprinting device

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Application publication date: 20180109