CN107328440A - Deeply integrated sensor of thermohaline based on thick-film technique technology and preparation method thereof - Google Patents
Deeply integrated sensor of thermohaline based on thick-film technique technology and preparation method thereof Download PDFInfo
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Abstract
Deeply integrated sensor of thermohaline based on thick-film technique technology and preparation method thereof, is related to sensor technical field.The present invention be in order to solve the multi-parameter integrated sensor of existing use semiconductor planar fabrication techniques, exist adverse environment resistant ability, manufacture method it is difficult, it is complicated the problem of.2 salinity electrodes and 1 pair of depth electrodes are located at least 4 substrates, have 4 signal ends on No. two matrixes, 4 signal ends be respectively used to 1 pair of depth electrodes power, export 1 pair of depth electrodes depth signal, to a salinity electrode power and measure another salinity electrode signal；2 salinity electrodes and 1 RTD are located at least 3 substrates, there are 4 signal ends on a number matrix, 4 signal ends are respectively used to power to a salinity electrode, measure another salinity electrode signal, power and export two output end signals of RTD to RTD, and salinity data is obtained according to the two of measurement salinity electrode signals.For the deep sensor of integrated thermohaline.
Description
Technical field
The present invention relates to the structure and preparation method of the deep sensor of thermohaline, belong to sensor technical field.
Background technology
Temperature sensor is used for temperature gas, liquid, solid of measuring environment etc., and salinity sensor is used to measure liquid
Salinity, depth transducer is used for the depth for measuring liquid, and the synthesis of liquid is commonly used to measure after above-mentioned three kinds of sensors is integrated
Characteristic, is mainly used in the detection of marine environment, is additionally operable to the overall characteristic of the water systems such as rivers and lakes.Thick film co-sintering technology
Due to be easily achieved large-scale production and realize the miniaturization of products, array, it is integrated the characteristics of, be widely used in half
The fields such as conductor field, integrated circuit, sensor, the technology includes curtain coating, punching, silk-screen printing, lamination, isostatic pressed, cut
The processing step such as cut, sinter.
The symbol of temperature is T, and unit is DEG C, the temperature of the measurement covering measured medium freezing point of temperature to boiling spread；Salt
The symbol of degree is S, is nondimensional amount, and the measurement range of salinity covers ultra-pure water to the salinity range of seawater；The symbol of depth
For H, unit is m, and the measurement range of depth covers the scope from 0m to 5000m.
A kind of deep e measurement technology of thermohaline includes using RTD non-cpntact measurement measured medium temperature, former with conductivity type contact
Reason measurement measured medium salinity, is fathomed with pressure principle.RTD realizes measurement using the corresponding relation of resistance and temperature,
Electrical conductivity is measured using electrode principle, and pressure is measured using capacitance principle.
The deep sensor construction of traditional thermohaline is that temperature sensor, salinity sensor, depth transducer are carried out into the system integration
Into a housing, three kinds of sensors is each independent.
In recent years, by using the multi-parameter integrated sensor of semiconductor planar fabrication techniques, semiconductor processes skill is passed through
Each functional pattern is produced on silicon chip by art, and this technology is easy to the integrated of multisensor core body, and size is small, suitable for extensive system
Make, cost is low, but the sensor adverse environment resistant ability of this fabrication techniques, manufacture method is difficult, complicated.
The content of the invention
The present invention is to solve the multi-parameter integrated sensor of existing use semiconductor planar fabrication techniques, there is resistance to evil
Bad environment capacity is poor, manufacture method is difficult, it is complicated the problem of.Now provide the thermohaline based on thick-film technique technology deep integration
Integrated sensor and preparation method thereof.
The deeply integrated sensor of thermohaline based on thick-film technique technology, it includes matrix 1, No. two matrixes 2, three
Number matrix 3,1 RTD 8,4 salinity electrodes 9 and 1 pair of depth electrodes 6,
A number matrix 1 is arranged on the upper table of a matrix 1 with the parallel and alignment setting about 2 of No. two matrixes, No. three matrixes 3
Between the lower surface of face and No. two matrixes 2, No. two matrixes 2 include at least 4 substrates, and a matrix 1 includes at least 3 substrates,
2 salinity electrodes 9 and 1 pair of depth electrodes 6 are arranged at least 4 substrates, and 4 are provided with altogether on No. two matrixes 2
Signal end 7,4,4 signal ends 7 of via that each signal end 7 is each coupled electrically on each substrate are respectively used to 1 pair of depth electrodes 6
The letter power, exported the depth signal of 1 pair of depth electrodes 6, power and measure another salinity electrode 9 to a salinity electrode 9
Number；
2 salinity electrodes 9 and 1 RTD 8 are arranged at least 3 substrates, are provided with 4 letters on a matrix 1 altogether
Number end 7,4,4 signal ends 7 of via that each signal end 7 is each coupled electrically on each substrate are respectively used to a salinity electrode 9
Power, measure another salinity electrode 9 signal, to RTD 8 power and export the signals of 8 two output ends of RTD, root
According to the signal of two another salinity electrodes 9 of measurement, salinity data is obtained.
According to the deeply integrated sensor of the thermohaline based on thick-film technique technology,
When No. two matrixes 2 include 4 substrates, when a matrix 1 includes 3 substrates,
4 substrates of No. two matrixes 2 are defined as a No. two substrate 2-1, two No. two substrate 2-2, two or three successively from bottom to top
Number substrate 2-3 and two No. four substrate 2-4,
4, No. two substrate 2-1 lower surfaces of via are respectively provided with every substrate of No. two matrixes 2 and are provided with two salinity electricity
Two salinity electrodes 9 are electrically connected to a No. two substrate 2- by pole 9 respectively by two leads 5 of a No. two substrate 2-1 upper surfaces
At via 4 on 1,
Two No. two substrate 2-2 upper surfaces and two No. three substrate 2-3 lower surface are each provided with a depth electrodes 6, or
Two No. two substrate 2-2 upper surfaces and two No. four substrate 2-4 lower surfaces are each provided with a depth electrodes 6, two depth electrodes 6 with
Via 4 on respective substrate is electrically connected, and two No. four substrate 2-4 upper surfaces are provided with 4 signal ends 7, and each signal end is electrically connected
4,4 signal ends 7 of the via being connected on each substrate are respectively used to power, export the depth of 1 pair of depth electrodes 6 to 1 pair of depth electrodes 6
Spend signal, power and measure another salinity electricity on a No. two substrate 2-1 to a salinity electrode 9 on a No. two substrate 2-1
The signal of pole 9,
3 substrates of a number matrix 1 are defined as number substrate 1-1, one No. two substrate 1-2 and one or three one by one successively from bottom to top
Number substrate 1-3,
The upper surface that 4, one No. three substrate 1-3 of via are respectively provided with every substrate of a number matrix 1 is provided with two salinity
Electrode 9, two salinity electrodes 9 are electrically connected by the lead 5 on one No. two substrate 1-2 with the via 4 on one No. two substrate 1-2,
One No. two substrate 1-2 lower surface or upper surface are provided with 1 RTD 8, two output ends of the RTD 8
It is connected respectively with two vias 4 on one No. two substrate 1-2, a number substrate 1-1 lower surfaces are provided with 4 signal ends 7,4 one by one
Signal end 7 is electrically connected respectively to the via 4 on each substrate by the via on the substrate, and 4 signal ends 7 are respectively used to one
A salinity electrode 9 on No. three substrate 1-3 powers, measure the signal of another salinity electrode 9 on one No. three substrate 1-3, to
The signal of 8 two output ends of RTD is powered and exported to RTD 8, according to another salinity electrode 9 on a No. two substrate 2-1
The signal of another salinity electrode 9, obtains salinity data on one No. three substrate 1-3 of signal and measurement.
The preparation method of the deeply integrated sensor of thermohaline based on thick-film technique technology, methods described includes following step
Suddenly：
Step 1: the via 4 for meeting and being electrically interconnected and requiring is made on every substrate using punching techniques；
Step 2: filling out conducting metal in every substrate via 4 using screen printing technique or hole filling technology；
Step 3: making two salinity electricity on a matrix 1 using screen printing technique or other thick-film technique technologies
Pole 9 and 1 RTD 8, make two salinity electrodes 9 and two depth electrodes 6 on No. two matrixes 2, and by 1 RTD 8,
Four salinity electrodes 9 and two depth electrodes 6 are each coupled electrically to the via 4 on respective substrate；
Step 4: using screen printing technique or other thick-film technique technologies in substrate internal production lead 5, respectively by one
Salinity electrode 9 on No. three substrate 1-3 and a No. two substrate 2-1 is electrically connected to the via 4 on corresponding substrate；
Step 5: using screen printing technique or other thick-film technique technologies on a matrix 1, No. two surfaces of matrix 2 point
Not Zhi Zuo 4 signal ends, 7,4 signal ends 7 via 4 on each substrate is electrically connected respectively to by the via on the substrate, can
Apply operating voltage to salinity electrode 9, depth electrodes 6 and RTD 8 from signal end 7 respectively and measurement salinity data, temperature are believed
Number and depth signal；
Step 6: using isostatic pressing technology by each floor substrate stack on a matrix 1, No. two matrixes 2 and No. three matrixes 3
To together, each layer substrate on each matrix is combined and carried out close using co-sintering technology or sealing technology
Envelope, the combination is inorganic combination, so as to form the deeply integrated sensor of thermohaline.
Beneficial effects of the present invention are：
There is three Parameters Integrated Survey Method integrated sensors, body using the deep sensor of the ceramic base thermohaline of thick-film technique fabrication techniques
Product is small, be easy to process circuit etc. unit is integrated, be easy to large-scale production, cost is low the characteristics of, be integrated sensing on a kind of piece
Device, the application prospect with the deep sensor of the traditional thermohaline of substitution.
Temperature sensor, salinity sensor, depth transducer sensitive core body realize integrated on piece, can realize small-sized
Change, making simply be easily achieved, and can by adjustment pattern electrode or sensing unit and substrate the number of plies and reality
Existing different ranges or the deep sensor of thermohaline for different field, manufacturing technology are simple, it is easy to accomplish batch production.
The application uses four salinity electrodes, two depth electrodes and 1 RTD so that measurement effect is existing on year-on-year basis
Metering system stability improves more than 5 times, and precision improves more than 6 times,
The deep sensor bulk of the more traditional thermohaline of the application is smaller, it is easier to realize mass production, and uniformity is obtained
Improve, price reduction, it is easier to realize Integration Design and making with other sensors.
Brief description of the drawings
Fig. 1 is the deep integrated sensor dimensional structure diagram of thermohaline of the invention.
Fig. 2 is the structure combination diagram of the deep integrated sensor of thermohaline of the present invention.
Fig. 3 is the structure combination diagram of No. two substrates of the deep integrated sensor of thermohaline of the present invention.
Fig. 4 is the structure combination diagram of a substrate of the deep integrated sensor of thermohaline of the present invention.
Fig. 5 is Fig. 1 profile.
Embodiment
Embodiment one：Illustrate present embodiment referring to figs. 1 to Fig. 5, described in present embodiment based on thickness
The deeply integrated sensor of the thermohaline of membrane process technology, it includes matrix 1, No. two matrixes 2, No. three matrixes 3,1 platinum
Resistance 8,4 salinity electrodes 9 and 1 pair of depth electrodes 6,
A number matrix 1 is arranged on the upper table of a matrix 1 with the parallel and alignment setting about 2 of No. two matrixes, No. three matrixes 3
Between the lower surface of face and No. two matrixes 2, No. two matrixes 2 include at least 4 substrates, and a matrix 1 includes at least 3 substrates,
2 salinity electrodes 9 and 1 pair of depth electrodes 6 are arranged at least 4 substrates, and 4 are provided with altogether on No. two matrixes 2
Signal end 7,4,4 signal ends 7 of via that each signal end 7 is each coupled electrically on each substrate are respectively used to 1 pair of depth electrodes 6
The letter power, exported the depth signal of 1 pair of depth electrodes 6, power and measure another salinity electrode 9 to a salinity electrode 9
Number；
2 salinity electrodes 9 and 1 RTD 8 are arranged at least 3 substrates, are provided with 4 letters on a matrix 1 altogether
Number end 7,4,4 signal ends 7 of via that each signal end 7 is each coupled electrically on each substrate are respectively used to a salinity electrode 9
Power, measure another salinity electrode 9 signal, to RTD 8 power and export the signals of 8 two output ends of RTD, root
According to the signal of two another salinity electrodes 9 of measurement, salinity data is obtained.
In present embodiment, the application is integrated using four salinity electrodes, two depth electrodes and 1 RTD
Sensor, more preferably, precision is higher for stability.The scope of the measurement salinity of salinity electrode 9 increases with the increase of No. three thickness of matrix 3
Greatly,
Embodiment two：Illustrate present embodiment referring to figs. 1 to Fig. 5, described in present embodiment based on thickness
The deeply integrated sensor of the thermohaline of membrane process technology, when No. two matrixes 2 include 4 substrates, a matrix 1 includes 3
During substrate,
4 substrates of No. two matrixes 2 are defined as a No. two substrate 2-1, two No. two substrate 2-2, two or three successively from bottom to top
Number substrate 2-3 and two No. four substrate 2-4,
4, No. two substrate 2-1 lower surfaces of via are respectively provided with every substrate of No. two matrixes 2 and are provided with two salinity electricity
Two salinity electrodes 9 are electrically connected to a No. two substrate 2- by pole 9 respectively by two leads 5 of a No. two substrate 2-1 upper surfaces
At via 4 on 1,
Two No. two substrate 2-2 upper surfaces and two No. three substrate 2-3 lower surface are each provided with a depth electrodes 6, or
Two No. two substrate 2-2 upper surfaces and two No. four substrate 2-4 lower surfaces are each provided with a depth electrodes 6, two depth electrodes 6 with
Via 4 on respective substrate is electrically connected, and two No. four substrate 2-4 upper surfaces are provided with 4 signal ends 7, and each signal end is electrically connected
4,4 signal ends 7 of the via being connected on each substrate are respectively used to power, export the depth of 1 pair of depth electrodes 6 to 1 pair of depth electrodes 6
Spend signal, power and measure another salinity electricity on a No. two substrate 2-1 to a salinity electrode 9 on a No. two substrate 2-1
The signal of pole 9,
3 substrates of a number matrix 1 are defined as number substrate 1-1, one No. two substrate 1-2 and one or three one by one successively from bottom to top
Number substrate 1-3,
The upper surface that 4, one No. three substrate 1-3 of via are respectively provided with every substrate of a number matrix 1 is provided with two salinity
Electrode 9, two salinity electrodes 9 are electrically connected by the lead 5 on one No. two substrate 1-2 with the via 4 on one No. two substrate 1-2,
One No. two substrate 1-2 lower surface or upper surface are provided with 1 RTD 8, two output ends of the RTD 8
It is connected respectively with two vias 4 on one No. two substrate 1-2, a number substrate 1-1 lower surfaces are provided with 4 signal ends 7,4 one by one
Signal end 7 is electrically connected respectively to the via 4 on each substrate by the via on the substrate, and 4 signal ends 7 are respectively used to one
A salinity electrode 9 on No. three substrate 1-3 powers, measure the signal of another salinity electrode 9 on one No. three substrate 1-3, to
The signal of 8 two output ends of RTD is powered and exported to RTD 8, according to another salinity electrode 9 on a No. two substrate 2-1
The signal of another salinity electrode 9, obtains salinity data on one No. three substrate 1-3 of signal and measurement.
In present embodiment, as shown in Fig. 2 each substrate is constituted by 4 layers of substrate, substrate is made using casting method,
With certain thickness, substrate is made up of the composition of ceramics, glass or both, substrate be typically it is non-conductive and inorganic,
Substrate material includes zirconium oxide, aluminum oxide, glass or any other suitable material.
There are via 4, the electrical connection that via 4 is used between functional pattern on substrate in Fig. 4 and Fig. 5.Via is using suitably
Technical method shaping, such as machinery or laser boring technology.It is minimum in No. two matrixes 2 to include 4 substrates, a matrix 1
It is minimum to include 3 substrates,
Depth electrodes, salinity electrode, RTD and lead are patterned in Fig. 4 and Fig. 5, and pass through screen printing technique
It is produced on substrate.Via is through hole on substrate, is realized, is at least partially filled using proper technologies such as machinery or laser borings
Conductive material, extends through the whole length of via from substrate to substrate, realizes the connection of functional pattern between each substrate, this to fill out
Filling can be realized by filling perforation or screen printing technique.
Substrate carries out contraposition lamination by high accuracy contraposition lamination techniques to the substrate on each matrix, passes through isostatic pressing technology
The combination and sealing between substrate are realized, a matrix and No. two matrixes is ultimately formed.No. three matrixes are passed through high-precision by multi layer substrate
Degree contraposition lamination techniques carry out contraposition lamination, and the combination and sealing between substrate, the thickness of No. three matrixes are realized by isostatic pressing technology
Degree is determined by salimity measurement scope.Three matrixes carry out contraposition lamination by high accuracy contraposition lamination techniques, pass through isostatic pressed skill
Art realizes the combination and sealing between substrate.By ceramic cutting technique by sensor monomer separation, finally by sintering process skill
Art sinter molding.
RTD is made up of any material with resistance characteristic, its resistance value variation with temperature and change.Using splashing
Penetrate, in the fabrication techniques such as silk-screen printing to substrate.
The deep integrated sensor of thermohaline in the present invention can be embedded in appropriate pedestal, and is connected with appropriate signal processor
Connect.
Embodiment three：Present embodiment is to the temperature based on thick-film technique technology described in embodiment two
The deeply integrated sensor of salt is described further, in present embodiment, two salinity electrodes 9 on a No. two substrate 2-1
It is oppositely arranged with two salinity electrodes 9 on one No. three substrate 1-3.
Embodiment four：Present embodiment is to the temperature based on thick-film technique technology described in embodiment one
The deeply integrated sensor of salt is described further, in present embodiment, and every substrate uses aluminum oxide, zirconium oxide or glass
One or more kinds of casting film-formings that carry out in material are made.
Embodiment five：The deeply integrated sensing of the thermohaline based on thick-film technique technology described in present embodiment
Device preparation method, the described method comprises the following steps：
Step 1: the via 4 for meeting and being electrically interconnected and requiring is made on every substrate using punching techniques；
Step 2: filling out conducting metal in every substrate via 4 using screen printing technique or hole filling technology；
Step 3: making two salinity electricity on a matrix 1 using screen printing technique or other thick-film technique technologies
Pole 9 and 1 RTD 8, make two salinity electrodes 9 and two depth electrodes 6 on No. two matrixes 2, and by 1 RTD 8,
Four salinity electrodes 9 and two depth electrodes 6 are each coupled electrically to the via 4 on respective substrate；
Step 4: using screen printing technique or other thick-film technique technologies in substrate internal production lead 5, respectively by one
Salinity electrode 9 on No. three substrate 1-3 and a No. two substrate 2-1 is electrically connected to the via 4 on corresponding substrate；
Step 5: using screen printing technique or other thick-film technique technologies on a matrix 1, No. two surfaces of matrix 2 point
Not Zhi Zuo 4 signal ends, 7,4 signal ends 7 via 4 on each substrate is electrically connected respectively to by the via on the substrate, can
Apply operating voltage to salinity electrode 9, depth electrodes 6 and RTD 8 from signal end 7 respectively and measurement salinity data, temperature are believed
Number and depth signal；
Step 6: using isostatic pressing technology by each floor substrate stack on a matrix 1, No. two matrixes 2 and No. three matrixes 3
To together, each layer substrate on each matrix is combined and carried out close using co-sintering technology or sealing technology
Envelope, the combination is inorganic combination, so as to form the deeply integrated sensor of thermohaline.
Claims (5)
1. the deeply integrated sensor of the thermohaline based on thick-film technique technology, it is characterised in that it include a matrix (1),
No. two matrixes (2), No. three matrixes (3), 1 RTD (8), 4 salinity electrodes (9) and 1 pair of depth electrodes (6), a matrix
(1) parallel up and down with No. two matrixes (2) and alignment is set, and No. three matrixes (3) are arranged on the upper surface of a matrix (1) and No. two
Between the lower surface of matrix (2), No. two matrixes (2) include at least 4 substrates, and a matrix (1) includes at least 3 substrates,
2 salinity electrodes (9) and 1 pair of depth electrodes (6) are arranged at least 4 substrates, and 4 are provided with altogether on No. two matrixes (2)
Individual signal end (7), each signal end (7) is each coupled electrically to the via (4) on each substrate, and 4 signal ends (7) are respectively used to 1
Powered to depth electrodes (6) power supply, the depth signal of 1 pair of depth electrodes (6) of output, to a salinity electrode (9) and measurement is another
The signal of one salinity electrode (9)；
2 salinity electrodes (9) and 1 RTD (8) are arranged at least 3 substrates, and 4 are provided with altogether on a matrix (1)
Signal end (7), each signal end (7) is each coupled electrically to the via (4) on each substrate, and 4 signal ends (7) are respectively used to one
Salinity electrode (9) power supply, measure another salinity electrode (9) signal, to RTD (8) power and export RTD (8) two
The signal of individual output end, according to the signal of the two of measurement another salinity electrodes (9), obtains salinity data.
2. the deeply integrated sensor of the thermohaline based on thick-film technique technology according to claim 1, it is characterised in that
When No. two matrixes (2) include 4 substrates, when a matrix (1) includes 3 substrates,
4 substrates of No. two matrixes (2) are defined as No. two substrates (2-1), two No. two substrates (2-2), two successively from bottom to top
No. three substrates (2-3) and two No. four substrates (2-4),
Via (4) is respectively provided with every substrate of No. two matrixes (2), No. two substrate (2-1) lower surfaces are provided with two salinity
Two salinity electrodes (9) are electrically connected to two by electrode (9) respectively by two leads (5) of No. two substrate (2-1) upper surfaces
Via (4) place on a number substrate (2-1),
The lower surface of two No. two substrate (2-2) upper surfaces and two No. three substrates (2-3) is each provided with a depth electrodes (6), or
Two No. two substrate (2-2) upper surfaces of person and two No. four substrate (2-4) lower surfaces are each provided with a depth electrodes (6), two depths
Degree electrode (6) is electrically connected with the via (4) on respective substrate, and two No. four substrate (2-4) upper surfaces are provided with 4 signal ends (7),
Each signal end is each coupled electrically to the via (4) on each substrate, and 4 signal ends (7) are respectively used to supply to 1 pair of depth electrodes (6)
Electricity, output 1 pair of depth electrodes (6) depth signal, on No. two substrates (2-1) a salinity electrode (9) power supply and survey
The signal of another salinity electrode (9) on No. two substrates (2-1) is measured,
3 substrates of a number matrix (1) are defined as number substrate (1-1), one No. two substrates (1-2) and one one by one successively from bottom to top
No. three substrates (1-3),
Via (4) is respectively provided with every substrate of a number matrix (1), the upper surface of one No. three substrates (1-3) is provided with two salt
Electrode (9) is spent, two salinity electrodes (9) pass through on the lead (5) on one No. two substrates (1-2) and one No. two substrates (1-2)
Via (4) is electrically connected,
The lower surface of one No. two substrates (1-2) or upper surface are provided with 1 RTD (8), two outputs of the RTD (8)
End is connected with two vias (4) on one No. two substrates (1-2) respectively, and number substrate (1-1) lower surface is provided with 4 signals one by one
Hold (7), 4 signal ends (7) are electrically connected respectively to the via (4) on each substrate by the via on the substrate, 4 signal ends
(7) it is respectively used to another on a salinity electrode (9) power supply on one No. three substrates (1-3), one No. three substrates (1-3) of measurement
The signal of individual salinity electrode (9), to RTD (8) power and export (8) two output ends of RTD signal, according to two No. one
Another salinity electrode (9) on one No. three substrates (1-3) of the signal of another salinity electrode (9) and measurement on substrate (2-1)
Signal, obtains salinity data.
3. the deeply integrated sensor of the thermohaline based on thick-film technique technology according to claim 2, it is characterised in that
Two salinity electrodes (9) on No. two substrates (2-1) set relatively with two salinity electrodes (9) on one No. three substrates (1-3)
Put.
4. the deeply integrated sensor of the thermohaline based on thick-film technique technology according to claim 1, it is characterised in that
Every substrate uses one or more kinds of casting film-formings that carry out in aluminum oxide, zirconium oxide or glass material to be made.
5. the preparation method of the deeply integrated sensor of the thermohaline based on thick-film technique technology, it is characterised in that methods described
Comprise the following steps：
Step 1: the via (4) for meeting and being electrically interconnected and requiring is made on every substrate using punching techniques；
Step 2: filling out conducting metal in every substrate via (4) using screen printing technique or hole filling technology；
Step 3: making two salinity electrodes on a matrix (1) using screen printing technique or other thick-film technique technologies
(9) two salinity electrodes (9) and two depth electrodes (6) and 1 RTD (8), are made on No. two matrixes (2), and by 1
RTD (8), four salinity electrodes (9) and two depth electrodes (6) are each coupled electrically to the via (4) on respective substrate；
Step 4: using screen printing technique or other thick-film technique technologies in substrate internal production lead (5), respectively by one or three
Salinity electrode (9) on number substrate (1-3) and No. two substrates (2-1) is electrically connected to the via (4) on corresponding substrate；
Step 5: using screen printing technique or other thick-film technique technologies on a matrix (1), No. two matrix (2) surfaces point
Not Zhi Zuo 4 signal ends (7), 4 signal ends (7) are electrically connected respectively to the via on each substrate by the via on the substrate
(4), operating voltage and measurement can be applied to salinity electrode (9), depth electrodes (6) and RTD (8) from signal end (7) respectively
Salinity data, temperature signal and depth signal；
Step 6: a number matrix (1), No. two matrixes (2) and each floor substrate on No. three matrixes (3) are folded using isostatic pressing technology
Each layer substrate on each matrix is combined and carried out close using co-sintering technology or sealing technology to together by layer
Envelope, the combination is inorganic combination, so as to form the deeply integrated sensor of thermohaline.
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| CN107764425A (en) * | 2017-11-17 | 2018-03-06 | 上海航士海洋科技有限公司 | A kind of manufacture method of the integrated sheet type sensor chip of ocean temperature and pressure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103592341A (en) * | 2013-11-12 | 2014-02-19 | 广州中国科学院先进技术研究所 | Contact type four-electrode salinity sensor based on MEMS (micro electro mechanical systems) technology and detection method of salinity sensor |
| CN103076500B (en) * | 2012-12-31 | 2015-02-18 | 中国电子科技集团公司第四十九研究所 | Conductivity sensor in cofiring structure and manufacturing method thereof |
| CN104677343A (en) * | 2013-11-27 | 2015-06-03 | 哈尔滨功成科技创业投资有限公司 | Temperature-salinity-depth sensor data acquiring and processing system |
| US20150192535A1 (en) * | 2012-09-20 | 2015-07-09 | University Of Southampton | Apparatus for sensing at least one parameter in water |
| CN105424092A (en) * | 2015-12-07 | 2016-03-23 | 田川 | Anti-marine organism-adhesion marine conductivity-temperature-depth measuring instrument |
| CN106053308A (en) * | 2016-07-07 | 2016-10-26 | 中国第汽车股份有限公司 | Chip type particulate matter sensor chip for vehicles and method for manufacturing chip type particulate matter sensor chip |
-
2017
- 2017-07-17 CN CN201710582765.4A patent/CN107328440A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150192535A1 (en) * | 2012-09-20 | 2015-07-09 | University Of Southampton | Apparatus for sensing at least one parameter in water |
| CN103076500B (en) * | 2012-12-31 | 2015-02-18 | 中国电子科技集团公司第四十九研究所 | Conductivity sensor in cofiring structure and manufacturing method thereof |
| CN103592341A (en) * | 2013-11-12 | 2014-02-19 | 广州中国科学院先进技术研究所 | Contact type four-electrode salinity sensor based on MEMS (micro electro mechanical systems) technology and detection method of salinity sensor |
| CN104677343A (en) * | 2013-11-27 | 2015-06-03 | 哈尔滨功成科技创业投资有限公司 | Temperature-salinity-depth sensor data acquiring and processing system |
| CN105424092A (en) * | 2015-12-07 | 2016-03-23 | 田川 | Anti-marine organism-adhesion marine conductivity-temperature-depth measuring instrument |
| CN106053308A (en) * | 2016-07-07 | 2016-10-26 | 中国第汽车股份有限公司 | Chip type particulate matter sensor chip for vehicles and method for manufacturing chip type particulate matter sensor chip |
Non-Patent Citations (1)
| Title |
|---|
| 刘洋等: "一种四电极电导率传感器的研制与实验", 《环境技术》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764425A (en) * | 2017-11-17 | 2018-03-06 | 上海航士海洋科技有限公司 | A kind of manufacture method of the integrated sheet type sensor chip of ocean temperature and pressure |
| CN107764425B (en) * | 2017-11-17 | 2019-07-26 | 哈尔滨工程大学 | A kind of manufacturing method of ocean temperature and the integrated sheet type sensor chip of pressure |
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