CN107315223B - Collect the optical interconnection device of Polarization filter and interlayer equalization coupler - Google Patents
Collect the optical interconnection device of Polarization filter and interlayer equalization coupler Download PDFInfo
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- CN107315223B CN107315223B CN201710575389.6A CN201710575389A CN107315223B CN 107315223 B CN107315223 B CN 107315223B CN 201710575389 A CN201710575389 A CN 201710575389A CN 107315223 B CN107315223 B CN 107315223B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2726—Optical coupling means with polarisation selective and adjusting means in or on light guides, e.g. polarisation means assembled in a light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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- Optics & Photonics (AREA)
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Abstract
The present invention provides a kind of optical interconnection devices for collecting Polarization filter and interlayer equalization coupler, it include: planar light waveguide, polarization filtering grating, interlayer equalization coupling grating, bottom layer silicon dioxide and top layer silicon dioxide, the planar light waveguide is located on the bottom layer silicon dioxide, the polarization filtering grating and the interlayer equalization coupling grating are located on the planar light waveguide, the top layer silicon dioxide is located on the polarization filtering grating and the interlayer equalization coupling grating, and the polarization filtering grating is located at before the interlayer equalization coupling grating；TE and TM polarised light is inputted from the planar light waveguide, one of polarised light is coupled into reverse transfer by the polarization filtering grating, polarization filtering grating described in another polarized light transmission reaches the interlayer equalization coupling grating, and by the interlayer equalization coupling grating, equalization couples output upwards, downwards.The present invention has the characteristics that wide bandwidth, High Extinction Ratio, macrotectonics tolerance, highly integrated interlayer interconnection.
Description
Technical field
The present invention relates to optic communication, optical interconnection and optical device integration fields, and in particular, to a kind of collection Polarization filter
With the optical interconnection device of interlayer equalization coupler.
Background technique
In recent years, silicon-on-insulator (Silicon-on-insulator, SOI) is since it is mutually simultaneous with mature CMOS technology
Hold and low cost and the extensive concern by researcher.And due to high-index-contrast, so that SOI material is conducive to tightlier
It gathers, is extensive, highdensity integreted phontonics.However high index-contrast also brings strong polarization sensitivity to device；In addition, three
The interlayer chip of dimension is conducive to further reduce device size, provides more integrated, more compact on piece photon circuit.Therefore different
The high rate communication of interlayer becomes urgent problem to be solved.
Currently, mainly use polarization diversity scheme on piece to solve the problems, such as polarization sensitivity, wherein polarization beam apparatus, partially
Polarization filter and polarization rotator are essential elements.Numerous device architectures, which has been reported, can be used on piece polarization beam splitting
Reason, comprising: asymmetrical directional coupler, multi-mode interference coupler, Mach-Zender interferometer, photonic crystal, grating etc.,
However these structures there is also some problems, for example device coupling length is longer, polarization extinction ratio is low, work belt width, device
Situations such as structure tolerance is small and manufacture is complicated.Therefore, there is still a need for further for new polarization control method or device working principle
Research is to realize high-performance Polarization Control；The coupling of three-dimensional difference interlayer, can use directional coupler realization, however this is needed
High alignment precision simultaneously brings manufacture complexity.Using the natural coupling advantage of grating, the interlayer of macrotectonics tolerance may be implemented
Coupler.But the layer coupling signal of varying strength can bring cost pressure to follow-up signal processing, it is therefore desirable to design light
Grid structure solves different interlayer coupled signal strength size issues.
Summary of the invention
For the defects in the prior art, the object of the present invention is to provide a kind of collection Polarization filters and interlayer equalization to couple
Device is in the optical interconnection device of one.
The optical interconnection device of a kind of the collection Polarization filter and interlayer equalization coupler that provide according to the present invention, comprising: flat
Plate optical waveguide, polarization filtering grating, interlayer equalization coupling grating, bottom layer silicon dioxide and top layer silicon dioxide, the plate light
Waveguide is located on the bottom layer silicon dioxide, and the polarization filtering grating and the interlayer equalization coupling grating are positioned at described
On planar light waveguide, the top layer silicon dioxide be located at the polarization filtering grating and the interlayer equalization coupling grating it
On, the polarization filtering grating is located at before the interlayer equalization coupling grating；
TE and TM polarised light is inputted from the planar light waveguide, and one of polarised light is coupled by the polarization filtering grating
At reverse transfer, polarization filtering grating described in another polarized light transmission reaches the interlayer equalization coupling grating, and by the layer
Between impartial coupling grating upwards, impartial coupling output downwards.
Preferably, the polarization filtering grating is TE polarization filtering grating, TE and TM polarised light is from the planar light waveguide
Input, TM polarised light is coupled into reverse transfer by the TE polarization filtering grating, and TE polarised light is polarized directly through the TE
It filters grating and reaches the interlayer equalization coupling grating, and upward by the interlayer equalization coupling grating, downward impartial coupling is defeated
Out.
Preferably, the TM polarised light of input meets coupled wave equation: kin-kg=-k0neff, and the TE polarised light inputted is discontented
Sufficient coupled wave equation, wherein kinFor onwards transmission mode, kgFor grating vector, k0neffFor reverse transfer mode.
Preferably, the polarization filtering grating is TM polarization filtering grating, TE and TM polarised light is from the planar light waveguide
Input, TE polarised light is coupled into reverse transfer by the TM polarization filtering grating, and TM polarised light is polarized directly through the TM
It filters grating and reaches the interlayer equalization coupling grating, and upward by the interlayer equalization coupling grating, downward impartial coupling is defeated
Out.
Preferably, the TE polarised light of input meets coupled wave equation: kin-kg=-k0neff, and the TM polarised light inputted is discontented
Sufficient coupled wave equation, wherein kinFor onwards transmission mode, kgFor grating vector, k0neffFor reverse transfer mode.
Preferably, the interlayer equalization coupling grating makes the polarised light for transmiting the polarization filtering grating meet optical grating diffraction
Equation: kin-kg=0, wherein kinFor onwards transmission mode, kgFor grating vector.
Preferably, the duty ratio of the interlayer equalization coupling grating linearly changes, and reduces since refractive index mismatches
Caused by incident light reflection.
Preferably, the height of the interlayer equalization coupling grating linearly changes, using film resonance principle, so that entering
Light is penetrated within the scope of wide wavestrip by upward, downward impartial coupling output.
Compared with prior art, the present invention have it is following the utility model has the advantages that
Using sub-wave length grating diffraction coupling principle, so that the different transmission of a certain specific polarization light in planar light waveguide
Conversion is realized between mode, and reverse transfer mode is changed by onwards transmission mode, and there is no between mode for another polarised light
Mutually conversion, directly transmission are unaffected in the past, to reach polarization filtering effect.The polarization filtering made using the principle
Device, with High Extinction Ratio, wide bandwidth, low-loss, characteristic easy to manufacture, construction tolerance is big and compact.And interlayer equalization couples
The introducing of device provides wide bandwidth, highdensity interlayer equalization coupling process.The Polarization filter and interlayer equalization are coupled
Device integrates the optical interconnection device of composition, has in three-dimensional interlayer optical interconnection, Quantum Optical Communication and quantum calculation wide
Application prospect.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is general structure schematic diagram provided in an embodiment of the present invention；
Fig. 2 is the cross-sectional view of polarization filtering grating provided in an embodiment of the present invention；
Fig. 3 is the schematic illustration of polarization filtering grating provided in an embodiment of the present invention, wherein k0=2 π/λ, π are circumference
λ vacuum medium wavelengths of rate, nsiFor the refractive index of silicon,For the refractive index of silica, neffTo be passed in polarization filtering grating
The equivalent refractive index lost；
Fig. 4 is that there are the equivalent refractive indexs of mode and wavelength to close inside TE polarization filtering grating provided in an embodiment of the present invention
It is schematic diagram；
Fig. 5 is that there are the equivalent refractive indexs of mode and wavelength to close inside TM polarization filtering grating provided in an embodiment of the present invention
It is schematic diagram；
Fig. 6 is TE polarization filtering grating transmitance figure provided in an embodiment of the present invention；
Fig. 7 is TM polarization filtering grating transmitance figure provided in an embodiment of the present invention；
Fig. 8 is the schematic illustration of interlayer equalization coupling grating provided in an embodiment of the present invention, and wherein the angle θ is that incident light exists
The angle of transmission direction and y-axis in interlayer equalization coupler；
Fig. 9 is the structure chart of TE interlayer equalization coupling grating provided in an embodiment of the present invention；
Figure 10 is the structure chart of TM interlayer equalization coupling grating provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in detail combined with specific embodiments below.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.These belong to the present invention
Protection scope.
Fig. 1 is general structure schematic diagram provided in an embodiment of the present invention.As shown in Figure 1, structure of the embodiment of the present invention includes:
Planar light waveguide 1, polarization filtering grating 2, interlayer equalization coupling grating 3, bottom layer silicon dioxide 4 and top layer silicon dioxide 5.Plate
Optical waveguide 1 is located on bottom layer silicon dioxide 4, and polarization filtering grating 2 and interlayer equalization coupling grating 3 are located at planar light waveguide 1
On, top layer silicon dioxide 5 is located on polarization filtering grating 2 and interlayer equalization coupling grating 3.Polarization filtering grating 2 is polarized
Polarization filter effect, and be located at before the interlayer equalization coupling grating 3 of interlayer equalization coupler effect.
Wherein, planar light waveguide 1, polarization filtering grating 2, interlayer equalization coupling grating 3 material be silicon；Bottom titanium dioxide
Silicon 4 and the material of top layer silicon dioxide 5 are silica.
As shown in Fig. 2, TE and TM polarised light is inputted from planar light waveguide 1, only has a kind of polarization after Polarization filter 2
Light: TE polarised light or TM polarised light directly through and reach 3 left end of interlayer equalization coupler, and another polarized light signal is anti-
It is emitted back towards.If it is TE Polarization filter, then TM light is reflected back, and TE polarised light it is unaffected directly through；If it is TM
Then TE light is reflected back Polarization filter, and TM polarised light it is unaffected directly through.
Wherein, for TE Polarization filter, design reasonable planar light waveguide thickness, polarization filtering grating height, account for
Sky ratio and period, so that there are the distributions of reasonable TE, TM mode in planar waveguide, by sub-wave length grating diffraction, so that
TM light is coupled into reverse transfer mode, and TE optical transmission mode is unaffected, realizes TM polarization filtering.For TM polarization filtering
Device equally rationally designs the structural parameters, and TE light can be made to be coupled into reverse transfer mode, and TM optical transmission mode is not
It is impacted, realize TE polarization filtering.
Wherein, for the TE light directly through TE Polarization filter, design TE interlayer equalization coupler, make it by upwards and
Impartial coupling output downwards；For the TM light directly through TM Polarization filter, design TM interlayer equalization coupler, make its by
Upper and output (each 50%) of equalization coupling downwards.Interlayer equalization coupler is the diffraction principle using interlayer equalization coupling grating,
The light that will be transmitted in the optocoupler synthetic silica transmitted in optical waveguide.The duty ratio of interlayer equalization coupling grating is linearly to change
Become, its object is to reduce the reflection of the incident light due to caused by refractive index mismatch, reduces device insertion loss.And
Its height is also linearly to change, its object is to using resonance principle make incident light within the scope of wide wavestrip by upwards, to
Lower impartial coupling output.
Fig. 3 is the schematic illustration of polarization beam apparatus provided in an embodiment of the present invention.As shown in figure 3, from three layer flat plate wave
Lead the onwards transmission mode k of inputin, reverse transfer mode k is coupled by sub-wave length grating diffraction0neff, optical grating diffraction equation is
kin-kg=-k0neff, wherein kgIt is grating vector, kg=2 π/T, π are pi, and T is polarization filtering screen periods.Pass through design
Planar waveguide thickness, the height of polarization filtering grating, duty ratio, period are inputted, so that existing inside Polarization filter reasonable
Mode distribution, and only a certain specific polarization light meets optical grating diffraction equation, and another polarised light is unsatisfactory for optical grating diffraction
Equation, therefore unaffected directly transmission past.
Fig. 4 is that there are the equivalent refractive index of mode and wavelength relationships inside TE polarization beam apparatus provided in an embodiment of the present invention
Schematic diagram.As shown in figure 4, inside TE polarization beam apparatus, there is only TE0And TM0Mode, wherein TM0Mode meets optical grating diffraction side
Journey is diffracted into reverse transfer mode-TM0, and TE0Mode light is unsatisfactory for optical diffraction equation, therefore cannot be diffracted into reverse transfer
Mode and directly transmit over.The structural parameters for the TE Polarization filter that embodiment provides are as follows: planar light waveguide 300nm, polarization
Grating height 110nm, duty ratio 0.5, period 300nm are filtered, grating number is greater than or equal to 35.
Fig. 5 is that there are the equivalent refractive index of mode and wavelength relationships inside TM polarization beam apparatus provided in an embodiment of the present invention
Schematic diagram.As shown in figure 5, inside TM polarization beam apparatus, there is only TE0、TE1And TM0Mode, wherein TE0Mode meets grating and spreads out
It penetrates equation and is diffracted into reverse transfer mode-TE1, and TM0Mode light is unsatisfactory for optical diffraction equation, therefore cannot be diffracted into reversed
Transmission mode and directly transmit over.The structural parameters for the TM polarization beam apparatus that embodiment provides are as follows: planar light waveguide thickness
340nm, polarization filtering grating height are 290nm, duty ratio 0.6, period 300nm, and grating number is greater than or equal to 35.
Fig. 6 is TE Polarization filter transmitance figure provided in an embodiment of the present invention.As shown in fig. 6, TE Polarization filter
30dB bandwidth is 76nm from 1505nm to 1582nm.
Fig. 7 is TM Polarization filter transmitance figure provided in an embodiment of the present invention.As shown in fig. 7, TM Polarization filter
30dB bandwidth is 86nm from 1500nm to 1586nm.
Fig. 8 is the schematic illustration of interlayer equalization coupler provided in an embodiment of the present invention.It is perforated through from Polarization filter
Polarised light meet optical grating diffraction equation: kin-kg=0, by the diffraction of interlayer equalization coupling grating, passed from planar light waveguide
Defeated mode is converted into silicon dioxide layer transmission mode.
Fig. 9 is the structure chart of TE interlayer equalization coupler provided in an embodiment of the present invention.As shown, being arrived in 1510nm
The transmissivity of diffraction light is less than or equal to 3% up and down in 1600nm bandwidth.The TE interlayer equalization coupler that embodiment provides
Structural parameters are as follows: its planar light waveguide is with a thickness of 300nm, screen periods 1300nm, grating number are 38, grating duty ratio
Changing rule is 0.15+ (0.84/38) * i, and grating height change rule is 368+ (257/38) * inm, and the i is represented i-th
Grating.
Figure 10 is the structure chart of TM interlayer equalization coupler provided in an embodiment of the present invention.As shown, being arrived in 1500nm
The transmissivity of diffraction light is less than or equal to 3% up and down in 1580nm bandwidth.The TM interlayer equalization coupler that embodiment provides
Structural parameters are as follows: its planar light waveguide is with a thickness of 340nm, screen periods 784nm, grating number are 80, grating duty ratio
Changing rule is 0.3+ (0.42/80) * i, and grating height change rule is that 83+ (425/80) * inm, the i represents i-th of light
Grid.
In conclusion the optical interconnection device of collection polarization filtering provided in an embodiment of the present invention and impartial layer coupling device has
Following advantage: 1 Polarization filter has High Extinction Ratio, wide bandwidth, low-loss, characteristic easy to manufacture, construction tolerance is big and compact.
The introducing of 2 interlayer equalization couplers provides wide bandwidth, highdensity interlayer equalization coupling process.By the Polarization filter
The optical interconnection device that composition is integrated with interlayer equalization coupler can be applicable to three-dimensional interlayer optical interconnection, Quantum Optical Communication
In quantum calculation.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or modify within the scope of the claims, this not shadow
Ring substantive content of the invention.In the absence of conflict, the feature in embodiments herein and embodiment can any phase
Mutually combination.
Claims (3)
1. a kind of optical interconnection device for collecting Polarization filter and interlayer equalization coupler characterized by comprising planar lightwave
It leads, polarization filtering grating, interlayer equalization coupling grating, bottom layer silicon dioxide and top layer silicon dioxide, the planar light waveguide position
On the bottom layer silicon dioxide, the polarization filtering grating and the interlayer equalization coupling grating are located at the plate light
On waveguide, the top layer silicon dioxide is located on the polarization filtering grating and the interlayer equalization coupling grating, described
Polarization filtering grating is located at before the interlayer equalization coupling grating；
Wherein, the polarization filtering grating is TE polarization filtering grating, TE and TM polarised light is inputted from the planar light waveguide, TM
Polarised light is coupled into reverse transfer by the TE polarization filtering grating, and TE polarised light is directly through the TE polarization filtering grating
The interlayer equalization coupling grating is reached, and impartial couple exports upwards, downwards by the interlayer equalization coupling grating；
The TM polarised light of input meets coupled wave equation: kin-kg=-k0neff, and the TE polarised light inputted is unsatisfactory for coupled wave equation,
In, kinFor onwards transmission mode, kgFor grating vector, k0neffFor reverse transfer mode；
Alternatively, the polarization filtering grating is TM polarization filtering grating, TE and TM polarised light is inputted from the planar light waveguide, TE
Polarised light is coupled into reverse transfer by the TM polarization filtering grating, and TM polarised light is directly through the TM polarization filtering grating
The interlayer equalization coupling grating is reached, and impartial couple exports upwards, downwards by the interlayer equalization coupling grating；
The TE polarised light of input meets coupled wave equation: kin-kg=-k0neff, and the TM polarised light inputted is unsatisfactory for coupled wave equation,
In, kinFor onwards transmission mode, kgFor grating vector, k0neffFor reverse transfer mode；
The interlayer equalization coupling grating makes the polarised light for transmiting the polarization filtering grating meet optical grating diffraction equation: kin-kg
=0, wherein kinFor onwards transmission mode, kgFor grating vector.
2. the optical interconnection device of collection Polarization filter and interlayer equalization coupler according to claim 1, which is characterized in that
The duty ratio of the interlayer equalization coupling grating linearly changes, and reduces incident light caused by mismatching due to refractive index
Reflection.
3. the optical interconnection device of collection Polarization filter and interlayer equalization coupler according to claim 1, which is characterized in that
The height of the interlayer equalization coupling grating linearly changes, using film resonance principle, so that incident light is in wide wavestrip model
It encloses interior by upward, downward impartial coupling output.
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| CN107942444A (en) * | 2017-11-20 | 2018-04-20 | 中山大学 | A kind of layer coupling device of three-dimensionally integrated photon chip |
| CN114114538B (en) * | 2021-12-14 | 2023-08-08 | 武汉光谷信息光电子创新中心有限公司 | Optical coupling structure, preparation method thereof and silicon-based chip comprising optical coupling structure |
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