CN107300433A - A kind of method that utilization piezoelectric force transducer measures static force - Google Patents
A kind of method that utilization piezoelectric force transducer measures static force Download PDFInfo
- Publication number
- CN107300433A CN107300433A CN201710465211.6A CN201710465211A CN107300433A CN 107300433 A CN107300433 A CN 107300433A CN 201710465211 A CN201710465211 A CN 201710465211A CN 107300433 A CN107300433 A CN 107300433A
- Authority
- CN
- China
- Prior art keywords
- mrow
- piezoelectric
- output voltage
- force
- measuring system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003068 static effect Effects 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000005259 measurement Methods 0.000 claims abstract description 70
- 238000009413 insulation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000691 measurement method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 3
- 238000007781 pre-processing Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0028—Force sensors associated with force applying means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
本发明公开了一种利用压电式力传感器测量静态力的方法，它包括以下步骤：1‑建立压电式力传感器测量系统输出电压随时间变化的数学式；2‑确定压电式力传感器测量系统的时间常数τ；3‑确定时间间隔Δt及压电式力传感器测量系统输出电压的衰减阈值Δu th ；4‑判断被测力是稳恒力还是变恒力，若在时间间隔Δt内测量系统输出电压的衰减值Δu不超过衰减阀值Δ u th ，则被测力为稳恒力，按u 0 输出一个恒定值；若衰减值Δu超过衰减阀值Δu th ，则被测力为变恒力，根据衰减值Δu对测量系统的输出电压补偿后输出。本发明的技术效果是：在不改变压电式力传感器结构的情况下，经补偿克服了压电式力传感器电荷衰减的影响，获得稳定的输出电压，实现利用压电式力传感器对静态力的测量。
The invention discloses a method for measuring static force by using a piezoelectric force sensor, which comprises the following steps: 1-establish a mathematical formula for the change of the output voltage of the piezoelectric force sensor measurement system with time; 2-determine the piezoelectric force sensor The time constant τ of the measurement system; 3-determine the time interval Δt and the attenuation threshold Δu th of the output voltage of the piezoelectric force sensor measurement system; 4-judging whether the measured force is a constant force or a variable constant force, if it is within the time interval Δt If the attenuation value Δu of the output voltage of the measurement system does not exceed the attenuation threshold Δu th , the measured force is a steady force, and a constant value is output according to u 0 ; if the attenuation value Δu exceeds the attenuation threshold Δu th , the measured force is Variable constant force, output after compensating the output voltage of the measurement system according to the attenuation value Δu . The technical effect of the present invention is: without changing the structure of the piezoelectric force sensor, the influence of the charge attenuation of the piezoelectric force sensor is overcome through compensation, a stable output voltage is obtained, and the use of the piezoelectric force sensor to control the static force is achieved. Measurement.
Description
技术领域technical field
本发明属于力的测量技术，具体涉及一种利用压电式力传感器实现静态力的测量方法。The invention belongs to force measurement technology, in particular to a method for measuring static force by using a piezoelectric force sensor.
背景技术Background technique
压电式力传感器是一种利用压电元件的压电效应的进行力测量的传感器。由于其具有结构简单、功耗小、动态特性良好等优点，被广泛应用于动态力的测量。但是，当被测力为静态的或者是频率很低时，压电式力传感器内部的压电元件上产生的电荷会在很短的时间内发生很大的衰减，因此业界认为这类传感器无法直接用于静态力或极低频力的测量。A piezoelectric force sensor is a sensor that uses the piezoelectric effect of a piezoelectric element for force measurement. Because of its simple structure, low power consumption, and good dynamic characteristics, it is widely used in the measurement of dynamic force. However, when the measured force is static or the frequency is very low, the charge generated on the piezoelectric element inside the piezoelectric force sensor will be greatly attenuated in a short period of time, so the industry believes that this type of sensor cannot Directly used for static force or very low frequency force measurement.
为了实现压电式力传感器对静态力的测量，在近几十年来，诸多研究人员提出了各种测量方法。目前，运用压电元件测量静态力的研究方法有压电谐振频率测量法，电容测量法，衰减时间测量法等。In order to realize the measurement of static force by piezoelectric force sensor, many researchers have proposed various measurement methods in recent decades. At present, the research methods of using piezoelectric elements to measure static force include piezoelectric resonance frequency measurement method, capacitance measurement method, decay time measurement method, etc.
压电谐振频率测量法是将压电元件作为电路的谐振器，利用作用在压电元件上的静态力与其等效阻抗的关系，通过检测导纳或谐振频率实现静态力测量。电容测量法的实质是将压电元件看作电容器，通过测量静态力作用下电容的变化实现静态力测量。衰减时间测量法是通过测量压电元件输出信号的衰减时间，一般首先测量压电元件在静态力作用下响应信号的衰减时间常数，然后找到衰减时间与静态力之间的关系实现对静态力的测量。然而，由于压电元件上述电气参数会随着测量环境、被测力大小等发生变化，因此这些方法目前仍然无法实现静态力测量，同时这些方法都需要重新设计压电式力传感器。The piezoelectric resonance frequency measurement method uses the piezoelectric element as the resonator of the circuit, and uses the relationship between the static force acting on the piezoelectric element and its equivalent impedance to realize the static force measurement by detecting the admittance or resonance frequency. The essence of the capacitance measurement method is to regard the piezoelectric element as a capacitor, and realize the static force measurement by measuring the change of capacitance under the action of static force. The decay time measurement method is to measure the decay time of the output signal of the piezoelectric element. Generally, the decay time constant of the response signal of the piezoelectric element under the static force is measured first, and then the relationship between the decay time and the static force is found to realize the static force. Measurement. However, since the above-mentioned electrical parameters of the piezoelectric element will change with the measurement environment, the measured force, etc., these methods are still unable to achieve static force measurement, and these methods need to redesign the piezoelectric force sensor.
发明内容Contents of the invention
本发明所要解决的技术问题就是提供一种利用压电式力传感器实现测量静态力的方法，它在不改变压电式力传感器结构的情况下，能够克服压电式力传感器在静态力测量中电荷衰减的不利影响，获得稳定的输出电压，准确地测量静态力。The technical problem to be solved by the present invention is to provide a method for measuring static force using a piezoelectric force sensor, which can overcome the problems of piezoelectric force sensors in static force measurement without changing the structure of the piezoelectric force sensor. Unfavorable effects of charge decay, obtain a stable output voltage, and accurately measure static force.
本发明所要解决的技术问题是通过这样的技术方案实现的，它包括以下步骤：The technical problem to be solved by the present invention is realized by such technical scheme, and it comprises the following steps:
步骤1、建立压电式力传感器测量系统输出电压u(t)随时间变化的数学式Step 1. Establish the mathematical formula of the output voltage u(t) of the piezoelectric force sensor measurement system changing with time
式中，u0为t＝0时压电式力传感器测量系统的输出电压；t为放电时间；R为压电式力传感器测量系统等效绝缘漏电阻；C为压电式力传感器测量系统的等效电容；取压电式力传感器测量系统的时间常数τ＝RC，则有：In the formula, u 0 is the output voltage of the piezoelectric force sensor measurement system at t=0; t is the discharge time; R is the equivalent insulation leakage resistance of the piezoelectric force sensor measurement system; C is the piezoelectric force sensor measurement system The equivalent capacitance; take the time constant τ=RC of the piezoelectric force sensor measurement system, then:
步骤2、确定压电式力传感器测量系统的时间常数τStep 2. Determine the time constant τ of the piezoelectric force sensor measurement system
在压电式力传感器测量系统的使用环境中，对压电式力传感器测量系统的输出电压的测试曲线进行拟合，得到时间常数τ；In the use environment of the piezoelectric force sensor measurement system, the test curve of the output voltage of the piezoelectric force sensor measurement system is fitted to obtain the time constant τ;
步骤3、确定时间间隔Δt及压电式力传感器测量系统的输出电压的衰减阈值Δuth Step 3. Determine the time interval Δt and the attenuation threshold Δu th of the output voltage of the piezoelectric force sensor measurement system
时间间隔Δt＝t1-t0＜τ，且Δt∈[Δtmin,Δtmax]，t0是初始时刻，t1是Δt的末时刻，Δtmin由压电式力传感器测量系统的采样频率决定，Δtmax由被测力的频率决定。Time interval Δt=t 1 -t 0 <τ, and Δt∈[Δt min ,Δt max ], t 0 is the initial moment, t 1 is the final moment of Δt, Δt min is determined by the sampling frequency of the piezoelectric force sensor measurement system Determined, Δt max is determined by the frequency of the force being measured.
压电式力传感器测量系统的输出电压的衰减阈值Δuth＝Δumax：The attenuation threshold of the output voltage of the piezoelectric force sensor measurement system Δu th = Δu max :
Δumax是在施加满量程静态力时，从初始时刻开始的时间间隔内，压电式力传感器测量系统输出电压的衰减值；Δu max is the attenuation value of the output voltage of the piezoelectric force sensor measurement system within the time interval from the initial moment when the full-scale static force is applied;
步骤4、判断静态力是稳恒力还是变恒力，并对压电式力传感器测量系统的输出电压进行补偿Step 4. Determine whether the static force is a constant force or a variable constant force, and compensate the output voltage of the piezoelectric force sensor measurement system
若在确定的时间间隔Δt内衰减值Δu未超过衰减阈值Δuth，则判断外力为静态力，则此时输出一个恒定值；If the attenuation value Δu does not exceed the attenuation threshold Δu th within the determined time interval Δt, it is judged that the external force is a static force, and a constant value is output at this time;
若在确定的时间间隔Δt内该衰减值Δu超过这一衰减阈值Δuth，则判定外力发生变化，称为变恒力，此时使用该衰减值Δu对压电式力传感器测量系统的输出电压进行补偿。If the attenuation value Δu exceeds the attenuation threshold Δu th within the determined time interval Δt, it is determined that the external force has changed, which is called a variable constant force. At this time, the attenuation value Δu is used to measure the output voltage of the piezoelectric force sensor system Make compensation.
本发明的技术效果是：Technical effect of the present invention is:
本发明不改变现有压电式力传感器结构，通过软件补偿克服了压电式力传感器电荷衰减的影响，实现了利用压电式力传感器测量系统对静态力的测量，且不受测量环境和被测力大小的影响。The present invention does not change the structure of the existing piezoelectric force sensor, overcomes the influence of piezoelectric force sensor charge attenuation through software compensation, and realizes the measurement of static force by the piezoelectric force sensor measurement system, and is not affected by the measurement environment and The influence of the measured force.
附图说明Description of drawings
本发明的附图说明如下：The accompanying drawings of the present invention are as follows:
图1(A)为现有压电式力传感器静态力测量系统的原理图Figure 1(A) is the schematic diagram of the static force measurement system of the existing piezoelectric force sensor
(B)为本发明压电式力传感器静态力测量系统的原理图；(B) is the schematic diagram of the piezoelectric force sensor static force measurement system of the present invention;
图2为压电式力传感器和电荷放大器两部分的等效电路图；Fig. 2 is the equivalent circuit diagram of two parts of the piezoelectric force sensor and the charge amplifier;
图3为本发明的电压补偿算法流程图；Fig. 3 is a flow chart of the voltage compensation algorithm of the present invention;
图4为本发明使用商用压电式力传感器在21N静态压力下的响应信号对比图；Fig. 4 is the response signal comparison figure of the present invention using commercial piezoelectric force sensor under 21N static pressure;
图5为本发明使用商用压电式力传感器在静态力阶梯加载下的响应信号对比图。FIG. 5 is a comparison diagram of response signals of the present invention using a commercial piezoelectric force sensor under static force step loading.
具体实施方式detailed description
下面结合附图和实施例对本发明作进一步说明：Below in conjunction with accompanying drawing and embodiment the present invention will be further described:
现有压电式力传感器测量系统原理图如图1(A)所示，包括压电式力传感器、电荷放大器和信号显示单元。本发明涉及的压电式力传感器测量系统如图1(B)所示，包括压电式力传感器、电荷放大器、信号预处理单元和信号显示单元，相比现有压电式力传感器测量系统增加了信号预处理单元；压电式力传感器将输入的力信号转换成电荷信号输出，电荷信号经电荷放大器转化为电压信号，电压信号进入预处理单元后经过补偿处理实现静态力的测量，最后进入信号显示单元显示出来。压电式力传感器和电荷放大器两部分可等效为图2所示电路。The schematic diagram of the existing piezoelectric force sensor measurement system is shown in Figure 1 (A), including a piezoelectric force sensor, a charge amplifier and a signal display unit. The piezoelectric force sensor measuring system involved in the present invention is shown in Fig. 1 (B), comprises piezoelectric force sensor, charge amplifier, signal preprocessing unit and signal display unit, compared with existing piezoelectric force sensor measuring system A signal preprocessing unit is added; the piezoelectric force sensor converts the input force signal into a charge signal output, and the charge signal is converted into a voltage signal by the charge amplifier. After the voltage signal enters the preprocessing unit, it is compensated to realize the static force measurement. Finally The entry signal display unit is displayed. The two parts of the piezoelectric force sensor and the charge amplifier can be equivalent to the circuit shown in Figure 2.
本发明包括以下步骤：The present invention comprises the following steps:
步骤1、建立压电式力传感器测量系统输出电压u(t)随时间变化的数学式Step 1. Establish the mathematical formula of the output voltage u(t) of the piezoelectric force sensor measurement system changing with time
由于压电式力传感器测量系统存在等效电容C和等效绝缘漏电阻R，由于R不能达到无限大，所以压电式力传感器测量系统的输出电压u(t)不能保持恒定值，任意时刻输出电压u(t)为Since the piezoelectric force sensor measurement system has an equivalent capacitance C and an equivalent insulation leakage resistance R, since R cannot reach infinity, the output voltage u(t) of the piezoelectric force sensor measurement system cannot maintain a constant value. The output voltage u(t) is
式(1)中，u0为t＝0时压电式力传感器测量系统的输出电压；t为放电时间，取压电式力传感器测量系统时间常数τ＝RC，那么可有In formula (1), u 0 is the output voltage of the piezoelectric force sensor measurement system when t=0; t is the discharge time, and the piezoelectric force sensor measurement system time constant τ=RC is taken, then we have
由(2)式可知，由于压电式力传感器测量系统的输出电压按照指数形式衰减，因此必须确定压电式力传感器测量系统的时间常数τ。It can be seen from formula (2) that since the output voltage of the piezoelectric force sensor measurement system decays exponentially, the time constant τ of the piezoelectric force sensor measurement system must be determined.
步骤2、确定压电式力传感器测量系统的时间常数τStep 2. Determine the time constant τ of the piezoelectric force sensor measurement system
由于测量环境和测量条件的影响，压电式力传感器测量系统的时间常数τ不是一个恒定值，这时，可以在压电式力传感器测量系统的实际测量环境中测量系统输出的衰减曲线，拟合出时间常数τ。Due to the influence of the measurement environment and measurement conditions, the time constant τ of the piezoelectric force sensor measurement system is not a constant value. At this time, the attenuation curve of the system output can be measured in the actual measurement environment of the piezoelectric force sensor measurement system. Combine the time constant τ.
步骤3、确定时间间隔Δt及压电式力传感器测量系统输出电压的衰减阈值Δuth Step 3. Determine the time interval Δt and the attenuation threshold Δu th of the output voltage of the piezoelectric force sensor measurement system
本发明的关键参数是时间间隔Δt和衰减阈值Δuth，时间间隔Δt的最小值由压电式力传感器测量系统的采样频率fs决定，Δtmin＝1/fs；时间间隔Δt的最大值由被测力的工作频率fw决定，Δtmax＝1/(2fw)，要求：fs＞2fw。The key parameters of the present invention are the time interval Δt and the attenuation threshold Δu th , the minimum value of the time interval Δt is determined by the sampling frequency f s of the piezoelectric force sensor measurement system, Δt min = 1/f s ; the maximum value of the time interval Δt Determined by the working frequency f w of the force to be measured, Δt max = 1/(2f w ), requirement: f s > 2f w .
设定初始时刻t0和末时刻t1,时间间隔Δt＝t1-t0，Δt是一个足够小的数，满足Δt∈[Δtmin,Δtmax]，根据式(2)得压电式力传感器测量系统输出电压的衰减值Δu：Set the initial time t 0 and the end time t 1 , the time interval Δt=t 1 -t 0 , Δt is a small enough number to satisfy Δt∈[Δt min ,Δt max ], according to formula (2), the piezoelectric formula The attenuation value Δu of the output voltage of the force sensor measurement system:
显然，压电式力传感器测量系统输出电压在初始时刻的衰减最快，且静态力越大，u0越大，在从初始时刻开始的时间间隔Δt内，压电式力传感器测量系统输出电压的衰减值Δu越大，所以在施加满量程静态力时，在从初始时刻开始的时间间隔Δt内，压电式力传感器测量系统输出电压的衰减值Δu最大Obviously, the output voltage of the piezoelectric force sensor measurement system decays fastest at the initial moment, and the greater the static force is, the greater u 0 is, and within the time interval Δt from the initial moment, the output voltage of the piezoelectric force sensor measurement system The greater the attenuation value Δu, so when the full-scale static force is applied, the attenuation value Δu of the output voltage of the piezoelectric force sensor measurement system is the largest within the time interval Δt from the initial moment
该值即可作为压电式力传感器测量系统输出电压的衰减阈值Δuth；当外力为稳恒力，则在确定的时间间隔Δt内，压电式力传感器测量系统的输出电压的衰减值Δu都不会超过Δuth，因此可以将Δuth作为一个衰减阈值来判断外力是否为稳恒力。This value can be used as the attenuation threshold Δu th of the output voltage of the piezoelectric force sensor measurement system; when the external force is a steady force, within a certain time interval Δt, the attenuation value Δu of the output voltage of the piezoelectric force sensor measurement system Neither will exceed Δu th , so Δu th can be used as an attenuation threshold to judge whether the external force is a steady force.
步骤4、判断静态力是稳恒力还是变恒力，并对压电式力传感器输出电压进行补偿Step 4. Determine whether the static force is a constant force or a variable constant force, and compensate the output voltage of the piezoelectric force sensor
若在确定的时间间隔Δt内衰减值Δu未超过衰减阈值Δuth，则判断外力为静态力，则此时输出一个恒定值。If the attenuation value Δu does not exceed the attenuation threshold Δu th within the determined time interval Δt, it is judged that the external force is a static force, and a constant value is output at this time.
若在确定的时间间隔Δt内该衰减值Δu超过这一衰减阈值Δuth，则判定外力发生变化，称为变恒力，此时使用该衰减值Δu对测量系统的输出电压进行补偿。If the attenuation value Δu exceeds the attenuation threshold Δu th within a certain time interval Δt, it is determined that the external force has changed, which is called a variable constant force. At this time, the attenuation value Δu is used to compensate the output voltage of the measurement system.
上述步骤4中，电压补偿的流程图如图3所示：In the above step 4, the flow chart of voltage compensation is shown in Figure 3:
在步骤01，赋值t＝0、u(t)＝u(0)和补偿后的输出电压u(t)offset＝u(0)；In step 01, assign values t=0, u(t)=u(0) and compensated output voltage u(t) offset =u(0);
当加载被测力，测得的电压是还没来得及衰减，所以令开始时压电式力传感器测量系统的补偿后输出电压u(t)offset和实际测得的电压u(t)都等于初始输出u(0)。When the measured force is applied, the measured voltage has not had time to decay, so the compensated output voltage u(t) offset and the actual measured voltage u(t) of the piezoelectric force sensor measurement system at the beginning are both equal to the initial output u(0).
在步骤02，比较|u(t+Δt)-u(t)|>Δuth，经过Δt后，采样电荷放大器的输出u(t+Δt)，将前一个采样值u(t)与当前采样值u(t+Δt)之差的绝对值，跟衰减阈值Δuth进行比较。In step 02, compare |u(t+Δt)-u(t)|>Δu th , after Δt, sample the output u(t+Δt) of the charge amplifier, compare the previous sampling value u(t) with the current sampling value The absolute value of the difference between the values u(t+Δt) is compared with the decay threshold Δu th .
如不等式成立，则执行步骤03；否则执行执行步骤04；If the inequality is established, execute step 03; otherwise execute step 04;
在步骤03，u(t+Δt)offset＝u(t)offset+u(t+Δt)-u(t)，然后执行步骤05；In step 03, u(t+Δt) offset =u(t) offset +u(t+Δt)-u(t), and then execute step 05;
本步骤中，外力发生了改变，输出电压需要作补偿，即在原来的补偿后输出电压u(t)offset的基础上加上在Δt时间间隔内的输出电压变化值，若u(t+Δt)-u(t)＞0，则u(t+Δt)offse增大；若u(t+Δt)-u(t)＜0，则u(t+Δt)offse减小。In this step, the external force has changed, and the output voltage needs to be compensated, that is, the output voltage change value within the Δt time interval is added to the original compensated output voltage u(t) offset , if u(t+Δt )-u(t)>0, then u(t+Δt) offset increases; if u(t+Δt)-u(t)<0, then u(t+Δt) offset decreases.
在步骤04，u(t+Δt)offset＝u(t)offset，然后执行步骤05；In step 04, u(t+Δt) offset = u(t) offset , and then execute step 05;
本步骤中，外力没有发生变化，输出电压也应保持稳定，当前的补偿后的输出电压u(t+Δt)offset等于原来的补偿后输出电压u(t)offset。In this step, the external force does not change, and the output voltage should also remain stable. The current compensated output voltage u(t+Δt) offset is equal to the original compensated output voltage u(t) offset .
在步骤05，计算测量时间t＝t+Δt，将u(t+Δt)offset赋值给u(t+Δt)；并输出u(t+Δt)out和时间t；In step 05, calculate the measurement time t=t+Δt, assign u(t+Δt) offset to u(t+Δt); and output u(t+Δt) out and time t;
在步骤06，判断是否结束测量，如果是，则执行步骤07；否则，执行步骤02；In step 06, judge whether to end the measurement, if yes, then execute step 07; otherwise, execute step 02;
在步骤07，结束程序。In step 07, the procedure is ended.
实施例Example
CL-YD-305A型压电式力传感器，承受的压力范围最高可达10KN，精度可以达到0.03％，灵敏度约为4PC/N，非线性误差可以控制在1％以内，本实验采用CL-YD-305A型号的压电式力传感器。首先施加最大力，测出衰减数据，采用最小二乘法拟合曲线，从而得到时间常数τ，因此R，C不需要直接测出。本文中采样率设定为f＝10kHz，但是，在现有的实验条件下，在操作系统中进行定时操作时，实验的操作最小的间隔是2ms，因此需要将Δt设置为不小于2ms的一个值。根据实验硬件条件，再考虑到实验中的纹波干扰，实验中选取阈值Δuth＝0.02V。CL-YD-305A piezoelectric force sensor can bear pressure range up to 10KN, accuracy can reach 0.03%, sensitivity is about 4PC/N, nonlinear error can be controlled within 1%, this experiment uses CL-YD -305A model piezoelectric force sensor. First apply the maximum force, measure the attenuation data, and use the least square method to fit the curve to obtain the time constant τ, so R and C do not need to be measured directly. In this article, the sampling rate is set to f=10kHz. However, under the existing experimental conditions, when the timing operation is performed in the operating system, the minimum interval of the experimental operation is 2ms, so it is necessary to set Δt to a value not less than 2ms. value. According to the experimental hardware conditions and considering the ripple interference in the experiment, the threshold value Δu th =0.02V is selected in the experiment.
然后在传感器上施加稳恒力F为21N，得到测量系统的输出电压如图4所示，虚线是经本发明处理后的压电式力传感器测量系统输出电压随时间变化的特性曲线，实线为现有压电式力传感器测量系统自身的输出电压随时间变化的特性曲线，二者相比较，本发明在2秒时间内稳定输出电压1V，现有压电式力传感器测量系统输出电压随时间增加逐渐降低，在历经2秒时，输出电压下降至0.5V。可见，本发明能够准确地对压电式力传感器测量系统的衰减量实施补偿，获得稳定的输出电压，实现静态力测量。Then apply the constant force F on the sensor to be 21N, the output voltage of the measurement system is obtained as shown in Figure 4, the dotted line is the characteristic curve of the piezoelectric force sensor measurement system output voltage changing with time through the present invention, and the solid line It is the characteristic curve of the output voltage changing with time of the existing piezoelectric force sensor measurement system itself. Compared with the two, the present invention stabilizes the output voltage 1V within 2 seconds, and the output voltage of the existing piezoelectric force sensor measurement system varies with time. The time increases gradually, and the output voltage drops to 0.5V at the elapse of 2 seconds. It can be seen that the present invention can accurately compensate the attenuation of the piezoelectric force sensor measurement system, obtain a stable output voltage, and realize static force measurement.
在变恒力F作用在压电式力传感器条件下，每次增加10N的力，得到压电式力传感器测量系统的输出电压如图5所示，虚线是经本发明处理后的输出电压随时间变化的特性曲线，实线为现有压电式力传感器测量系统自身的输出电压随时间变化的特性曲线，二者相比较，经本发明处理后的输出电压能真实反映作用力阶跃变化。所以，本发明能有效补偿输出电压随时间增加逐渐降低，获得稳定、真实的输出电压。Under the variable constant force F acting on the piezoelectric force sensor condition, increase the power of 10N each time, obtain the output voltage of the piezoelectric force sensor measurement system as shown in Figure 5, the dotted line is that the output voltage after the present invention handles with The time-varying characteristic curve, the solid line is the characteristic curve of the output voltage of the existing piezoelectric force sensor measuring system itself as a function of time. Compared with the two, the output voltage processed by the present invention can truly reflect the step change of the active force . Therefore, the present invention can effectively compensate for the gradual decrease of the output voltage as time increases, and obtain a stable and real output voltage.
在图4和图5中，在加力的初始阶段有一个冲击信号，该信号产生的原因是在加力时不可避免的有一个冲击信号施加在传感器上，但是很快就会消失，因此输出电压有一个冲击信号。In Figure 4 and Figure 5, there is an impact signal at the initial stage of force application. The reason for this signal is that an impact signal is inevitably applied to the sensor during force application, but it will disappear soon, so the output The voltage has a surge signal.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710465211.6A CN107300433B (en) | 2017-06-19 | 2017-06-19 | A method of static force is measured using piezoelectric force transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710465211.6A CN107300433B (en) | 2017-06-19 | 2017-06-19 | A method of static force is measured using piezoelectric force transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107300433A true CN107300433A (en) | 2017-10-27 |
| CN107300433B CN107300433B (en) | 2019-12-03 |
Family
ID=60134907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710465211.6A Expired - Fee Related CN107300433B (en) | 2017-06-19 | 2017-06-19 | A method of static force is measured using piezoelectric force transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107300433B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108458817A (en) * | 2018-05-04 | 2018-08-28 | 上海路虹电子科技有限公司 | A kind of novel pressure electric-type pressure sensor |
| CN108775978A (en) * | 2018-05-21 | 2018-11-09 | 长江大学 | A kind of static prestressed monitoring apparatus and method based on PZT |
| CN110868193A (en) * | 2019-11-13 | 2020-03-06 | 宁波大学 | A Self-Sensing Method for Output Displacement and Output Force of Piezoelectric Actuator |
| CN112284435A (en) * | 2020-09-23 | 2021-01-29 | 北京致感致联科技有限公司 | Piezoelectric substrate device, self-calibration method and system thereof, and monitoring system |
| CN114235229A (en) * | 2021-12-18 | 2022-03-25 | 浙江大学 | A quasi-static force detection system for ultra-precision cutting based on piezoelectric ceramic sensor |
| WO2023108663A1 (en) * | 2021-12-18 | 2023-06-22 | 浙江大学 | Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2800250Y (en) * | 2003-11-17 | 2006-07-26 | 重庆大学 | Piezoelectric three-dimensional force transducer |
| CN203191135U (en) * | 2013-04-10 | 2013-09-11 | 济南大学 | Spoke-type parallel piezoelectric six-dimensional force sensor |
| CN103630273A (en) * | 2012-09-12 | 2014-03-12 | 贝辛电子科技（上海）有限公司 | Device for measuring quasi-static force via piezoelectric sensing element |
| CN204330900U (en) * | 2014-12-29 | 2015-05-13 | 中国计量科学研究院 | Based on the piezoelectric strain constant measurement mechanism that dynamic force is directly measured |
-
2017
- 2017-06-19 CN CN201710465211.6A patent/CN107300433B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2800250Y (en) * | 2003-11-17 | 2006-07-26 | 重庆大学 | Piezoelectric three-dimensional force transducer |
| CN103630273A (en) * | 2012-09-12 | 2014-03-12 | 贝辛电子科技（上海）有限公司 | Device for measuring quasi-static force via piezoelectric sensing element |
| CN203191135U (en) * | 2013-04-10 | 2013-09-11 | 济南大学 | Spoke-type parallel piezoelectric six-dimensional force sensor |
| CN204330900U (en) * | 2014-12-29 | 2015-05-13 | 中国计量科学研究院 | Based on the piezoelectric strain constant measurement mechanism that dynamic force is directly measured |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108458817A (en) * | 2018-05-04 | 2018-08-28 | 上海路虹电子科技有限公司 | A kind of novel pressure electric-type pressure sensor |
| CN108775978A (en) * | 2018-05-21 | 2018-11-09 | 长江大学 | A kind of static prestressed monitoring apparatus and method based on PZT |
| CN110868193A (en) * | 2019-11-13 | 2020-03-06 | 宁波大学 | A Self-Sensing Method for Output Displacement and Output Force of Piezoelectric Actuator |
| CN112284435A (en) * | 2020-09-23 | 2021-01-29 | 北京致感致联科技有限公司 | Piezoelectric substrate device, self-calibration method and system thereof, and monitoring system |
| CN114235229A (en) * | 2021-12-18 | 2022-03-25 | 浙江大学 | A quasi-static force detection system for ultra-precision cutting based on piezoelectric ceramic sensor |
| WO2023108663A1 (en) * | 2021-12-18 | 2023-06-22 | 浙江大学 | Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107300433B (en) | 2019-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107300433B (en) | A method of static force is measured using piezoelectric force transducer | |
| US9778302B2 (en) | Apparatus and method for determining the sensitivity of a capacitive sensing device | |
| JP6742154B2 (en) | Method and system for online monitoring of electrolytic capacitor status | |
| TWI361280B (en) | Evaluation circuit for capacitance and method thereof | |
| CN101858811B (en) | Signal Compensation Method of High Accuracy Pressure Sensor | |
| JP6619471B2 (en) | Calibration of internal integrated circuit resistance | |
| CN106255868B (en) | Method for measuring capacitance | |
| CN107741295A (en) | A MENS capacitive air pressure sensor test calibration device and method | |
| US11680863B2 (en) | Method for reducing the hysteresis error and the high frequency noise error of capacitive tactile sensors | |
| CN113670986B (en) | Moisture evaluation method, device and equipment for transformer and storage medium | |
| CN116593060A (en) | Temperature compensation method, circuit and device for pressure sensor | |
| CN105652099A (en) | Micro capacitance difference detection method based on switching circuit | |
| JP4825782B2 (en) | System, circuit and method for accurately measuring parasitic capacitance inside automatic inspection equipment | |
| CN108181350B (en) | Resistance matching adjustment method of MEMS (micro-electromechanical systems) methane sensor | |
| CN115201585A (en) | Sensitivity drift compensation method for MEMS resonant electric field sensor | |
| CN105115535B (en) | The analogue means of capacitance sensor | |
| CN114878372B (en) | Method for determining parallel resistance value during PVDF current mode test explosion load | |
| CN109029236A (en) | It is a kind of to eliminate the engineering structure mechanical strain test method and device that temperature influences | |
| CN110595683B (en) | A low frequency compensation method for shock wave test system | |
| CN111678641B (en) | Performance test method and device of pressure sensor and storage medium | |
| CN111505543B (en) | Method and system for compensating dynamic hysteresis based on recurrent neural network | |
| WO2021120387A1 (en) | Material dynamic measurement method and axial vibration measurement system | |
| CN207132948U (en) | A fast and high-precision weighing instrument | |
| CN110220618B (en) | An integrated panel and testing method | |
| CN106441649B (en) | The method with measurement pressure is positioned with communicate-type piezoresistance sensor array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191203 Termination date: 20200619 |