CN107300433A - A kind of method that utilization piezoelectric force transducer measures static force - Google Patents
A kind of method that utilization piezoelectric force transducer measures static force Download PDFInfo
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- CN107300433A CN107300433A CN201710465211.6A CN201710465211A CN107300433A CN 107300433 A CN107300433 A CN 107300433A CN 201710465211 A CN201710465211 A CN 201710465211A CN 107300433 A CN107300433 A CN 107300433A
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- 238000005259 measurement Methods 0.000 claims abstract description 16
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- 238000010586 diagram Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 5
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0028—Force sensors associated with force applying means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
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Abstract
The invention discloses a kind of method that utilization piezoelectric force transducer measures static force, it comprises the following steps：1 sets up the mathematical expression that piezoelectric force transducer measuring system output voltage is changed over time；2 determine the timeconstantτ of piezoelectric force transducer measuring system；3 determine time intervalΔtAnd the drop threshold of piezoelectric force transducer measuring system output voltageΔu th ；4 judge that by dynamometry be steady power or change constant force, if in time intervalΔtThe pad value of interior measuring system output voltageΔuNo more than decay threshold valuesΔ u th , then it is steady power by dynamometry, pressesu 0 Export a steady state value；If pad valueΔuMore than decay threshold valuesΔu th , then by dynamometry to become constant force, according to pad valueΔuTo being exported after the output voltage compensation of measuring system.The solution have the advantages that：In the case where not changing piezoelectric force transducer structure, the compensated influence for overcoming piezoelectric force transducer charge decay obtains stable output voltage, realizes the measurement to static force using piezoelectric force transducer.
Description
Technical field
The invention belongs to the e measurement technology of power, and in particular to a kind of utilization piezoelectric force transducer realizes the measurement of static force
Method.
Background technology
Piezoelectric force transducer is a kind of sensor of the carry out power measurement of piezo-electric effect using piezoelectric element.Due to it
Have the advantages that simple in construction, small power consumption, dynamic characteristic are good, be widely used in the measurement of dynamic force.But, when by dynamometry
It is static when either frequency is very low, the electric charge produced on the piezoelectric element inside piezoelectric force transducer can be when very short
It is interior to occur very big decay, therefore industry thinks that this kind of sensor cannot be used directly for the measurement of static force or very low frequencies power.
In order to realize measurement of the piezoelectric force transducer to static force, in recent decades, many researchers propose
Various measuring methods.At present, the research method for measuring static force with piezoelectric element has piezoelectric resonator frequency measurement, and electric capacity is surveyed
Amount method, die-away time mensuration etc..
Piezoelectric resonator frequency measurement be using piezoelectric element as circuit resonator, using effect on the piezoelectric element
The relation of static force and its equiva lent impedance, by detecting that admittance or resonant frequency realize that static force is measured.The reality of capacitance measurement
Matter is to regard piezoelectric element as capacitor, realizes that static force is measured by the change for measuring the lower electric capacity of static force effect.During decay
Between mensuration be die-away time by measuring piezoelectric element output signal, typically measurement piezoelectric element is acted in static force first
The damping time constant of lower response signal, then finds survey of the relational implementation between die-away time and static force to static force
Amount.However, because the above-mentioned electric parameter of piezoelectric element can change with measuring environment, by dynamometry size etc., therefore these
Method still can not realize that static force is measured at present, while these methods are required for redesigning piezoelectric force transducer.
The content of the invention
The technical problems to be solved by the invention are just to provide a kind of realized using piezoelectric force transducer and measure static force
Method, it in the case where not changing piezoelectric force transducer structure, can overcome piezoelectric force transducer static force survey
The adverse effect of charge decay in amount, obtains stable output voltage, accurately measures static force.
The technical problems to be solved by the invention realize that it comprises the following steps by such technical scheme：
Step 1, set up the mathematical expression that piezoelectric force transducer measuring system output voltage u (t) is changed over time
In formula, u0The output voltage of piezoelectric force transducer measuring system during for t=0；T is discharge time；R is piezoelectric type
The equivalent insulation leakagel volume leakage resistance of force sensor measuring system；C is the equivalent capacity of piezoelectric force transducer measuring system；Take piezoelectric forces
Timeconstantτ=RC of sensor measuring system, then have：
Step 2, the timeconstantτ for determining piezoelectric force transducer measuring system
In the use environment of piezoelectric force transducer measuring system, to the output electricity of piezoelectric force transducer measuring system
The test curve of pressure is fitted, and obtains timeconstantτ；
Step 3, the drop threshold Δ u for determining time interval Δ t and the output voltage of piezoelectric force transducer measuring systemth
Time interval Δ t=t1-t0＜ τ, and Δ t ∈ [Δ tmin,Δtmax], t0It is initial time, t1When being Δ t end
Carve, Δ tminDetermined by the sample frequency of piezoelectric force transducer measuring system, Δ tmaxBy being determined by the frequency of dynamometry.
The drop threshold Δ u of the output voltage of piezoelectric force transducer measuring systemth=Δ umax：
ΔumaxBe when applying full scale static force, since in the time interval initial time, piezoelectric force transducer
The pad value of measuring system output voltage；
Step 4, judge that static force is steady power or becomes constant force, and to the output of piezoelectric force transducer measuring system electricity
Pressure is compensated
If it is determined that time interval Δ t in pad value Δ u not less than drop threshold Δ uth, then judge external force for static state
Power, then now export a steady state value；
If it is determined that time interval Δ t in pad value Δ u exceed this drop threshold Δ uth, then external force is judged
Change, is referred to as become constant force, now the output voltage of piezoelectric force transducer measuring system is mended using the pad value Δ u
Repay.
The solution have the advantages that：
The present invention does not change existing piezoelectric force transducer structure, and piezoelectric force transducer electricity is overcome by software compensation
The influence of lotus decay, is realized using measurement of the piezoelectric force transducer measuring system to static force, and not by measuring environment and
By the influence of dynamometry size.
Brief description of the drawings
The brief description of the drawings of the present invention is as follows：
Fig. 1 (A) is the schematic diagram of the static force measuring system of existing piezoelectric force transducer
(B) it is the schematic diagram of the static force measuring system of piezoelectric force transducer of the present invention；
Fig. 2 is piezoelectric force transducer and the two-part equivalent circuit diagram of charge amplifier；
Fig. 3 is Voltage Compensation Control Method flow chart of the invention；
Response signal comparison diagrams of the Fig. 4 for the present invention using Commercial piezoelectric formula force snesor under 21N static pressures；
Response signal comparison diagrams of the Fig. 5 for the present invention using Commercial piezoelectric formula force snesor under static force step-loaded.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples：
Shown in existing piezoelectric force transducer measuring system schematic diagram such as Fig. 1 (A), including piezoelectric force transducer, electric charge
Amplifier and signal display unit.Shown in piezoelectric force transducer measuring system such as Fig. 1 (B) of the present invention, including piezoelectricity
Formula force snesor, charge amplifier, Signal Pretreatment unit and signal display unit, compared to the measurement of existing piezoelectric force transducer
System adds Signal Pretreatment unit；The force signal of input is converted into charge signal output, electric charge by piezoelectric force transducer
Signal is converted into voltage signal through charge amplifier, and voltage signal, which enters to handle through overcompensation after pretreatment unit, realizes static force
Measurement, finally enter signal display unit and show.Piezoelectric force transducer and charge amplifier two parts can be equivalent to
Circuit shown in Fig. 2.
The present invention comprises the following steps：
Step 1, set up the mathematical expression that piezoelectric force transducer measuring system output voltage u (t) is changed over time
Because piezoelectric force transducer measuring system has equivalent capacity C and equivalent insulation leakagel volume leakage resistance R, because R can not reach
To infinity, so the output voltage u (t) of piezoelectric force transducer measuring system can not keep steady state value, any time output
Voltage u (t) is
In formula (1), u0The output voltage of piezoelectric force transducer measuring system during for t=0；T is discharge time, pressure electricity
Formula force sensor measuring system time constant τ=RC, then can have
From (2) formula, because the output voltage of piezoelectric force transducer measuring system is decayed according to exponential form, therefore
It must determine the timeconstantτ of piezoelectric force transducer measuring system.
Step 2, the timeconstantτ for determining piezoelectric force transducer measuring system
Due to the influence of measuring environment and measuring condition, the timeconstantτ of piezoelectric force transducer measuring system is not one
Individual steady state value, at this moment, can in the actual measuring environment of piezoelectric force transducer measuring system measuring system export decay
Curve, fits timeconstantτ.
Step 3, the drop threshold Δ u for determining time interval Δ t and piezoelectric force transducer measuring system output voltageth
The key parameter of the present invention is time interval Δ t and drop threshold Δ uth, time interval Δ t minimum value is by piezoelectricity
The sample frequency f of formula force sensor measuring systemsDetermine, Δ tmin=1/fs；Time interval Δ t maximum is by by the work of dynamometry
Working frequency fwDetermine, Δ tmax=1/ (2fw), it is desirable to：fs＞ 2fw。
Set initial time t0With last moment t1, time interval Δ t=t1-t0, Δ t is a sufficiently small number, meets Δ
t∈[Δtmin,Δtmax], the pad value Δ u of piezoelectric force transducer measuring system output voltage is obtained according to formula (2)：
Obviously, piezoelectric force transducer measuring system output voltage is most fast in the decay of initial time, and static force is bigger,
u0It is bigger, since in the time interval Δ t initial time, the pad value of piezoelectric force transducer measuring system output voltage
Δ u is bigger, so when applying full scale static force, since in the time interval Δ t initial time, piezoelectric forces are sensed
The pad value Δ u of device measuring system output voltage is maximum
The value can be used as the drop threshold Δ u of piezoelectric force transducer measuring system output voltageth；When external force is steady
Power, then it is determined that time interval Δ t in, the pad value Δ u of the output voltage of piezoelectric force transducer measuring system all without
More than Δ uth, therefore can be by Δ uthWhether it is steady power that external force is judged as a drop threshold.
Step 4, judge that static force is steady power or becomes constant force, and piezoelectric force transducer output voltage is compensated
If it is determined that time interval Δ t in pad value Δ u not less than drop threshold Δ uth, then judge external force for static state
Power, then now export a steady state value.
If it is determined that time interval Δ t in pad value Δ u exceed this drop threshold Δ uth, then external force is judged
Change, is referred to as become constant force, now the output voltage of measuring system is compensated using the pad value Δ u.
In above-mentioned steps 4, the flow chart of voltage compensation is as shown in Figure 3：
In step 01, the output voltage u (t) after assignment t=0, u (t)=u (0) and compensationoffset=u (0)；
When loading is by dynamometry, the voltage measured is not to be in time for decay also, so piezoelectric force transducer is surveyed when order starts
Output voltage u (t) after the compensation of amount systemoffsetIt is equal to initially export u (0) with actually measured voltage u (t).
In step 02, compare | u (t+ Δ t)-u (t) |>Δuth, after Δ t, the output u (t+ of sampled charge amplifier
Δ t), by previous sampled value u (t) and the current sample values u (absolute values of t+ Δs t) difference, with drop threshold Δ uthCompared
Compared with.
Such as inequality establishment, then step 03 is performed；Otherwise step 04 is performed；
In step 03, u (t+ Δs t)offset=u (t)offset(t+ Δ t)-u (t) then perform step 05 to+u；
In this step, external force is changed, and output voltage needs to compensate, i.e., the output voltage u after original compensation
(t)offsetOn the basis of plus output voltage changing value in Δ t time intervals, if u (t+ Δ t)-u (t) ＞ 0, u (t+
Δt)offseIncrease；If u (t+ Δ t)-u (t) ＜ 0, u (t+ Δs t)offseReduce.
In step 04, u (t+ Δs t)offset=u (t)offset, then perform step 05；
In this step, external force does not change, and output voltage should also keep stable, the output voltage after current compensation
u(t+Δt)offsetEqual to output voltage u (t) after original compensationoffset。
In step 05, time of measuring t=t+ Δ t are calculated, by u (t+ Δs t)offsetIt is assigned to u (t+ Δs t)；And export u (t+
Δt)outWith time t；
In step 06, judge whether to terminate measurement, if it is, performing step 07；Otherwise, step 02 is performed；
In step 07, terminate program.
Embodiment
CL-YD-305A type piezoelectric force transducers, the pressure limit born reaches as high as 10KN, and precision can reach
0.03%, sensitivity is about 4PC/N, and nonlinearity erron can be controlled within 1%, and this experiment is using CL-YD-305A models
Piezoelectric force transducer.Apply maximum, force first, measure attenuation data, using least square fitting curve, so that when obtaining
Between constant, τ, therefore R, C need not measure directly.Sample rate herein is set as f=10kHz, still, in existing experiment bar
Under part, when being timed operation in an operating system, the interval that the operation of experiment is minimum is 2ms, it is therefore desirable to be set to Δ t
A value not less than 2ms.According to Experimental Hardware condition, the ripple interference in experiment, selected threshold Δ in experiment are considered further that
uth=0.02V.
Then it is 21N to apply steady power F on a sensor, obtains the output voltage of measuring system as shown in figure 4, dotted line is
The characteristic curve that piezoelectric force transducer measuring system output voltage after processed by the invention is changed over time, solid line is existing
The characteristic curve that the piezoelectric force transducer measuring system output voltage of itself is changed over time, the two compares, and the present invention is 2
Regulated output voltage 1V in time second, existing piezoelectric force transducer measuring system output voltage is gradually reduced with time increase,
When after 2 seconds, output voltage drops to 0.5V.It can be seen that, the present invention can be exactly to piezoelectric force transducer measuring system
Attenuation implement compensation, obtain stable output voltage, realize that static force is measured.
Under the conditions of change constant force F acts on piezoelectric force transducer, increase 10N power, obtains piezoelectric forces sensing every time
The output voltage of device measuring system as shown in figure 5, dotted line be it is processed by the invention after the characteristic that changes over time of output voltage
Curve, the characteristic curve that solid line changes over time for the output voltage of existing piezoelectric force transducer measuring system itself, the two
Compare, it is processed by the invention after output voltage can truly reflect active force Spline smoothing.So, the present invention can effective compensation
Output voltage is gradually reduced with time increase, is stablized, real output voltage.
In figures 4 and 5, there is an impact signal in the starting stage of reinforcing, the signal Producing reason is in reinforcing
When inevitably there is impact signal to apply on a sensor, but will soon disappear, therefore output voltage has one
Impact signal.
Claims (2)
1. a kind of method that utilization piezoelectric force transducer measures static force, it is characterized in that, comprise the following steps：
Step 1, set up the mathematical expression that the output voltage u (t) of piezoelectric force transducer measuring system is changed over time
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In formula, u0The output voltage of piezoelectric force transducer measuring system during for t=0；T is discharge time；R passes for piezoelectric forces
The equivalent insulation leakagel volume leakage resistance of sensor measuring system；C is the equivalent capacity of piezoelectric force transducer measuring system；Piezoelectric forces are taken to pass
Timeconstantτ=RC of sensor measuring system, then have：
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Step 2, the timeconstantτ for determining piezoelectric force transducer measuring system
In piezoelectric force transducer measuring system use environment, the survey to the output voltage of piezoelectric force transducer measuring system
Examination curve is fitted, and obtains timeconstantτ；
Step 3, the drop threshold Δ u for determining time interval Δ t and piezoelectric force transducer measuring system output voltageth
Time interval Δ t=t1-t0＜ τ, and Δ t ∈ [Δ tmin,Δtmax], t0It is initial time, t1It is Δ t last moment, Δ
tminDetermined by the sample frequency of piezoelectric force transducer measuring system, Δ tmaxBy being determined by the frequency of dynamometry；
The drop threshold Δ u of piezoelectric force transducer measuring system output voltageth=Δ umax：
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ΔumaxBe when applying full scale static force, since in the time interval Δ t initial time, piezoelectric force transducer
The pad value of measuring system output voltage；
Step 4, judge that static force is steady power or becomes constant force, and the output voltage of piezoelectric force transducer measuring system is entered
Row compensation
If it is determined that time interval Δ t in pad value Δ u not less than this drop threshold Δ uth, then judge external force for static state
Power, then now export a steady state value；
If it is determined that time interval Δ t in pad value Δ u exceed this drop threshold Δ uth, then judge that external force becomes
Change, referred to as become constant force, now the output voltage of the measuring system of piezoelectric force transducer is mended using the pad value Δ u
Repay.
2. the method that utilization piezoelectric force transducer measuring system according to claim 1 measures static force, it is characterized in that,
In step 4, the step of voltage compensation includes：
Step 01, assignment t=0, u (t)=u (0) and compensation after output voltage u (t)offset=u (0)；
Step 02, compare | u (t+ Δ t)-u (t) |>Δuth, such as inequality establishment, then perform step 03；Otherwise step is performed
Rapid 04；
Step 03, u (t+ Δs t)offset=u (t)offset(t+ Δ t)-u (t) then perform step 05 to+u；
Step 04, u (t+ Δs t)offset=u (t)offset, then perform step 05；
Step 05, time of measuring t=t+ Δ t are calculated, by u (t+ Δs t)offsetIt is assigned to u (t+ Δs t)；And export u (t+ Δs t)out
With time t；
Step 06, judge whether to terminate measurement, if it is, performing step 07；Otherwise, step 02 is performed；
Step 07, program is terminated.
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| CN201710465211.6A CN107300433B (en) | 2017-06-19 | 2017-06-19 | A method of static force is measured using piezoelectric force transducer |
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| CN107300433B CN107300433B (en) | 2019-12-03 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108458817A (en) * | 2018-05-04 | 2018-08-28 | 上海路虹电子科技有限公司 | A kind of novel pressure electric-type pressure sensor |
| CN108775978A (en) * | 2018-05-21 | 2018-11-09 | 长江大学 | A kind of static prestressed monitoring apparatus and method based on PZT |
| CN110868193A (en) * | 2019-11-13 | 2020-03-06 | 宁波大学 | Self-sensing method for output displacement and output force of piezoelectric actuator |
| CN112284435A (en) * | 2020-09-23 | 2021-01-29 | 北京致感致联科技有限公司 | Piezoelectric substrate device, self-calibration method and system thereof, and monitoring system |
| CN114235229A (en) * | 2021-12-18 | 2022-03-25 | 浙江大学 | Ultra-precision cutting quasi-static force detection system based on piezoelectric ceramic sensor |
| WO2023108663A1 (en) * | 2021-12-18 | 2023-06-22 | 浙江大学 | Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor |
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| CN2800250Y (en) * | 2003-11-17 | 2006-07-26 | 重庆大学 | Piezoelectric three-dimensional force transducer |
| CN203191135U (en) * | 2013-04-10 | 2013-09-11 | 济南大学 | Spoke-type parallel piezoelectric six-dimensional force sensor |
| CN103630273A (en) * | 2012-09-12 | 2014-03-12 | 贝辛电子科技（上海）有限公司 | Device for measuring quasi-static force via piezoelectric sensing element |
| CN204330900U (en) * | 2014-12-29 | 2015-05-13 | 中国计量科学研究院 | Based on the piezoelectric strain constant measurement mechanism that dynamic force is directly measured |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2800250Y (en) * | 2003-11-17 | 2006-07-26 | 重庆大学 | Piezoelectric three-dimensional force transducer |
| CN103630273A (en) * | 2012-09-12 | 2014-03-12 | 贝辛电子科技（上海）有限公司 | Device for measuring quasi-static force via piezoelectric sensing element |
| CN203191135U (en) * | 2013-04-10 | 2013-09-11 | 济南大学 | Spoke-type parallel piezoelectric six-dimensional force sensor |
| CN204330900U (en) * | 2014-12-29 | 2015-05-13 | 中国计量科学研究院 | Based on the piezoelectric strain constant measurement mechanism that dynamic force is directly measured |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108458817A (en) * | 2018-05-04 | 2018-08-28 | 上海路虹电子科技有限公司 | A kind of novel pressure electric-type pressure sensor |
| CN108775978A (en) * | 2018-05-21 | 2018-11-09 | 长江大学 | A kind of static prestressed monitoring apparatus and method based on PZT |
| CN110868193A (en) * | 2019-11-13 | 2020-03-06 | 宁波大学 | Self-sensing method for output displacement and output force of piezoelectric actuator |
| CN112284435A (en) * | 2020-09-23 | 2021-01-29 | 北京致感致联科技有限公司 | Piezoelectric substrate device, self-calibration method and system thereof, and monitoring system |
| CN114235229A (en) * | 2021-12-18 | 2022-03-25 | 浙江大学 | Ultra-precision cutting quasi-static force detection system based on piezoelectric ceramic sensor |
| WO2023108663A1 (en) * | 2021-12-18 | 2023-06-22 | 浙江大学 | Ultra-precision cutting quasi-static force measurement system based on piezoelectric ceramic sensor |
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