CN111678641B - Performance test method and device of pressure sensor and storage medium - Google Patents
Performance test method and device of pressure sensor and storage medium Download PDFInfo
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- CN111678641B CN111678641B CN202010465051.7A CN202010465051A CN111678641B CN 111678641 B CN111678641 B CN 111678641B CN 202010465051 A CN202010465051 A CN 202010465051A CN 111678641 B CN111678641 B CN 111678641B
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Abstract
The invention discloses a performance test method, a device and a storage medium of a pressure sensor, wherein the performance test method of the pressure sensor applies pressure impact of a first preset pressure value to the pressure sensor to be tested at a first preset temperature; acquiring performance parameters of the pressure sensor to be detected; if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result; and determining the performance information of the pressure sensor to be tested according to the test result, thus effectively screening out the bad pressure sensor by applying the pressure impact of the first preset pressure value to the pressure sensor to be tested, avoiding inaccurate pressure test caused by the bad pressure sensor, and having simple flow logic, high test speed and no influence on production efficiency.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a method and a device for testing the performance of a pressure sensor and a storage medium.
Background
Along with the progress of science and technology, waterproof baroceptor is widely used in intelligent wearing equipment like cell-phone, unmanned aerial vehicle etc..
However, the existing pressure sensor only adopts single-point pressure test, and the pressure sensor is found to have difference in performance in the production process, so that when the pressure sensor is subjected to the same pressure point test after being subjected to one step-up and step-down, the pressure value deviation is large, and if the defective product flows out, the situation that the pressure test of terminal products such as unmanned aerial vehicles, mobile phones and the like is inaccurate can be caused, so that the use of customers is influenced; and at the present stage, the supplier of the pressure sensor does not perform test screening on the bad sensors.
Disclosure of Invention
The invention mainly aims to provide a method and a device for testing the performance of a pressure sensor and a storage medium, which solve the problem of inaccurate pressure test caused by the poor pressure chip of the pressure sensor.
In order to achieve the above object, the present invention provides a method for testing performance of a pressure sensor, the method comprising:
applying pressure impact of a first preset pressure value to the pressure sensor to be detected at a first preset temperature;
acquiring performance parameters of the pressure sensor to be detected;
if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result;
and determining the performance information of the pressure sensor to be tested according to the test result.
Further, the step of performing a pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result includes:
under the first preset temperature, sequentially acquiring first test pressure values detected by the pressure sensor when the pressure environment is 110Kpa, 85Kpa, 30Kpa and 85 Kpa;
and acquiring a difference value between each first test pressure value detected by the pressure sensor and a corresponding pressure value, and determining the test result according to the difference value.
Further, the step of determining the test result according to the difference value comprises:
if the difference value is within a preset pressure range, determining that the performance of the pressure sensor to be detected is normal;
and if the difference value is out of the preset pressure range, determining that the performance of the pressure sensor to be detected is abnormal.
Further, when the pressure test is performed by first reducing the pressure and then increasing the pressure, the step of performing the pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result comprises:
reducing the ambient pressure from 110Kpa to 85Kpa at the first preset temperature, and acquiring a second test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
at the first preset temperature, increasing the ambient pressure from 30Kpa to 85Kpa, and acquiring a third test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
determining the test result according to the difference value between the second test pressure value and the third test pressure value.
Further, the method further comprises:
acquiring a first actual temperature value corresponding to a chip of the pressure sensor to be detected when the environmental pressure is a second preset pressure value and a first actual pressure value detected by the pressure sensor to be detected at a first preset temperature;
acquiring a second actual temperature value corresponding to a chip of the pressure sensor to be detected and a second actual pressure value detected by the pressure sensor to be detected when the environmental pressure is a second preset pressure value at a second preset temperature, wherein the first preset temperature is greater than the second preset temperature;
acquiring a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value and the second actual pressure value;
and when the temperature drift value is smaller than or equal to a preset temperature drift value, executing the step of applying pressure impact of a first preset pressure value to the pressure sensor to be measured at a first preset temperature.
Further, the step of obtaining a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value, and the second actual pressure value includes:
acquiring an absolute value of a pressure difference value between the first actual pressure value and the second actual pressure value;
acquiring an absolute value of a temperature difference value between the first actual temperature value and the second actual temperature value;
and taking the ratio of the absolute value of the pressure difference value and the absolute value of the temperature difference value as the temperature drift value.
Further, the method further comprises:
acquiring fourth test pressure values detected by the pressure sensors when the ambient pressures are 40Kpa, 85Kpa, 95Kpa and 105Kpa respectively at a second preset temperature;
acquiring a fifth test pressure value detected by the pressure sensor when the ambient pressure is 40Kpa, 95Kpa and 105Kpa respectively at a third preset temperature, wherein the third preset temperature is higher than the second preset temperature;
and executing the steps of acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be tested and a first actual pressure value detected by the pressure sensor to be tested when the ambient pressure is a second preset pressure value at a first preset temperature when the difference value between the fourth test pressure value and the corresponding pressure value is within a preset range and the difference value between the fifth test pressure value and the corresponding pressure value is within the preset range.
In order to achieve the above object, the present invention further provides a performance testing apparatus for a pressure sensor, the performance testing apparatus for a pressure sensor includes a memory, a processor, and a performance testing program for a pressure sensor, stored in the memory and operable on the processor, wherein the performance testing program for a pressure sensor, when executed by the processor, implements the steps of the performance testing method for a pressure sensor as described above.
In addition, the present invention also provides a storage medium, wherein the storage medium stores a performance test program of the pressure sensor, and the performance test program of the pressure sensor is executed by a processor to realize the steps of the performance test method of the pressure sensor.
The invention provides a performance test method, a device and a storage medium of a pressure sensor, wherein the performance test method of the pressure sensor applies pressure impact of a first preset pressure value to the pressure sensor to be tested at a first preset temperature; acquiring performance parameters of the pressure sensor to be detected; if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result; and determining the performance information of the pressure sensor to be tested according to the test result, thus effectively screening out the bad pressure sensor by applying the pressure impact of the first preset pressure value to the pressure sensor to be tested, avoiding inaccurate pressure test caused by the bad pressure sensor, and having simple flow logic, high test speed and no influence on production efficiency.
Drawings
Fig. 1 is a hardware architecture diagram of a performance testing apparatus for a pressure sensor according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart illustrating a method for testing the performance of a pressure sensor according to a first embodiment of the present invention;
fig. 3 is a schematic flow chart of a performance testing method of a pressure sensor according to a second embodiment of the present invention.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The main solution of the embodiment of the invention is as follows: applying pressure impact of a first preset pressure value to the pressure sensor to be detected at a first preset temperature; acquiring performance parameters of the pressure sensor to be detected; if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result; and determining the performance information of the pressure sensor to be tested according to the test result.
Because the existing pressure sensor only adopts single-point pressure test, the pressure sensor is found to have difference in performance in the production process, when the pressure sensor has larger pressure value deviation of the same pressure point test after being subjected to one pressure increase and decrease, if the defective product flows out, the condition that the pressure test of terminal products such as unmanned aerial vehicles, mobile phones and the like is inaccurate can be caused, and the use of customers is influenced; and at the present stage, the supplier of the pressure sensor does not perform test screening on the bad sensors.
The embodiment of the invention provides a solution, which is characterized in that pressure impact of a first preset pressure value is applied to a pressure sensor to be detected at a first preset temperature; acquiring performance parameters of the pressure sensor to be detected; if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result; and determining the performance information of the pressure sensor to be tested according to the test result, thus effectively screening out the bad pressure sensor by applying the pressure impact of the first preset pressure value to the pressure sensor to be tested, avoiding inaccurate pressure test caused by the bad pressure sensor, and having simple flow logic, high test speed and no influence on production efficiency.
As an implementation manner, the hardware environment architecture involved in the performance test method of the pressure sensor may be as shown in fig. 1.
The execution main body of the invention is a performance testing device of the pressure sensor.
Further, the test device includes: a processor 101, e.g. a CPU, a memory 102, a communication bus 103. Wherein a communication bus 103 is used for enabling the connection communication between these components.
The memory 102 may be a high-speed RAM memory or a non-volatile memory (e.g., a disk memory).
Further, the execution program of the performance test method of the pressure sensor in the present embodiment may be stored in a storage medium as an independent program; and the processor 101 of the testing device may be configured to invoke the performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
applying pressure impact of a first preset pressure value to the pressure sensor to be detected at a first preset temperature;
acquiring performance parameters of the pressure sensor to be detected;
if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result;
and determining the performance information of the pressure sensor to be tested according to the test result.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
under the first preset temperature, sequentially acquiring first test pressure values detected by the pressure sensor when the pressure environment is 110Kpa, 85Kpa, 30Kpa and 85 Kpa;
and acquiring a difference value between each first test pressure value detected by the pressure sensor and a corresponding pressure value, and determining the test result according to the difference value.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
if the difference value is within a preset pressure range, determining that the performance of the pressure sensor to be detected is normal;
and if the difference value is out of the preset pressure range, determining that the performance of the pressure sensor to be detected is abnormal.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
reducing the ambient pressure from 110Kpa to 85Kpa at the first preset temperature, and acquiring a second test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
at the first preset temperature, increasing the ambient pressure from 30Kpa to 85Kpa, and acquiring a third test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
determining the test result according to the difference value between the second test pressure value and the third test pressure value.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
acquiring a first actual temperature value corresponding to a chip of the pressure sensor to be detected when the environmental pressure is a second preset pressure value and a first actual pressure value detected by the pressure sensor to be detected at a first preset temperature;
acquiring a second actual temperature value corresponding to a chip of the pressure sensor to be detected and a second actual pressure value detected by the pressure sensor to be detected when the environmental pressure is a second preset pressure value at a second preset temperature, wherein the first preset temperature is greater than the second preset temperature;
acquiring a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value and the second actual pressure value;
and when the temperature drift value is smaller than or equal to a preset temperature drift value, executing the step of applying pressure impact of a first preset pressure value to the pressure sensor to be measured at a first preset temperature.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
acquiring an absolute value of a pressure difference value between the first actual pressure value and the second actual pressure value;
acquiring an absolute value of a temperature difference value between the first actual temperature value and the second actual temperature value;
and taking the ratio of the absolute value of the pressure difference value and the absolute value of the temperature difference value as the temperature drift value.
In one embodiment, the processor 101 may be configured to invoke a performance testing program for the pressure sensor stored in the memory 102 and perform the following operations:
acquiring fourth test pressure values detected by the pressure sensors when the ambient pressures are 40Kpa, 85Kpa, 95Kpa and 105Kpa respectively at a second preset temperature;
acquiring a fifth test pressure value detected by the pressure sensor when the ambient pressure is 40Kpa, 95Kpa and 105Kpa respectively at a third preset temperature, wherein the third preset temperature is higher than the second preset temperature;
and executing the steps of acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be tested and a first actual pressure value detected by the pressure sensor to be tested when the ambient pressure is a second preset pressure value at a first preset temperature when the difference value between the fourth test pressure value and the corresponding pressure value is within a preset range and the difference value between the fifth test pressure value and the corresponding pressure value is within the preset range.
Based on the hardware architecture of the testing device, the embodiment of the performance testing method of the pressure sensor is provided.
Referring to fig. 2, fig. 2 is a first embodiment of a method for testing the performance of a pressure sensor according to the present invention, which includes the following steps:
s10, applying pressure impact of a first preset pressure value to the pressure sensor to be measured at a first preset temperature;
s20, acquiring performance parameters of the pressure sensor to be measured;
s30, if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result;
and S40, determining the performance information of the pressure sensor to be tested according to the test result.
In this embodiment, the execution main body is a performance testing device of the pressure sensor, or may be a performance testing terminal of the pressure sensor, such as a server or a central controller, and the control terminal is connected with the performance testing device of the pressure sensor wirelessly or by wire, so as to control the performance testing device of the pressure sensor to execute corresponding operations.
It is understood that the performance testing device of the pressure sensor in the present embodiment may include, but is not limited to, a testing machine, a testing device, and the like, and is not limited thereto.
Further, a sealed test cavity is arranged in the performance test device of the pressure sensor, and the pressure sensor to be tested is arranged in the sealed test cavity, namely, the pressure sensor to be tested is tested under a sealed condition in the embodiment.
Specifically, the pressure controller, the temperature controller and the temperature sensor in the sealed test cavity are controlled, wherein the pressure controller is used for controlling the pressure environment of the pressure sensor to be tested in the test process; the temperature controller is used for controlling the temperature environment of the pressure sensor to be tested in the testing process; and the temperature sensor is used for testing the temperature of the pressure sensor chip to be tested in the testing process in real time.
Further, in step S10, the first preset temperature may be 40 ℃, that is, in the environment of the first preset temperature, a pressure shock of the first preset pressure value is applied to the pressure sensor to be measured. Wherein the first preset pressure value is 5 ATM.
Specifically, the temperature environment of the sealed test chamber was set to 40 ℃ by the temperature controller, and a pressure shock of 5ATM was applied to the pressure sensor to be tested placed in the sealed test chamber.
Optionally, a plurality of pressure sensors to be tested can be placed in the sealed test cavity, that is, pressure impact of 5ATM can be performed on all pressure sensors to be tested in the sealed test cavity, so that bad sensors in all pressure sensors to be tested can be screened out, and the test accuracy of the pressure sensors to be tested can be improved. In this embodiment, the number of the pressure sensors to be tested may be set according to the volume of the sealed test cavity, and is not limited herein.
Further, after the performance parameters of the pressure sensor to be detected are obtained, whether the performance parameters meet preset conditions or not is judged. After the performance parameters of the pressure sensor to be tested are obtained, if the performance parameters meet preset conditions, the pressure sensor to be tested is subjected to pressure testing at the first preset temperature to obtain a test result, wherein the preset conditions can be set according to actual test requirements, and are not limited herein.
Optionally, the performance parameters include a standby current value, an operating current, a peak current, temperature data, a pressure accuracy value, and the like of the pressure sensor to be measured, which is not limited herein. Namely, whether the performance of the pressure sensor to be measured is normal is determined by judging whether the performance parameters meet preset conditions.
Specifically, taking the performance parameter as an example of a standby current value, if the standby current value is within a preset current range, that is, if it is determined that the performance parameter meets a preset condition, performing a pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result. For example, the preset current range is [ a, b ], when the standby current value is greater than or equal to a and less than or equal to b, it is determined that the standby current value is within the preset current range, and at this time, it is determined that the standby current value of the pressure sensor to be measured is not abnormal under the environmental pressure of 5ATM, that is, the pressure sensor to be measured is good.
Further, when the standby current value is out of a preset current range, namely the performance parameter is determined not to meet a preset condition, the pressure sensor to be tested is a defective product. Can be through screening bad pressure sensor effectively to the pressure sensor that awaits measuring applys 5 ATM's pressure impact to other pressure sensors except that bad pressure sensor carry out pressure test, with avoid leading to inaccurate at pressure test because of pressure sensor is bad, thereby accelerate test speed and improve production efficiency.
In this embodiment, the step of performing a pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result specifically includes: under the first preset temperature, sequentially acquiring first test pressure values detected by the pressure sensor when the pressure environment is 110Kpa, 85Kpa, 30Kpa and 85 Kpa; and acquiring a difference value between each first test pressure value detected by the pressure sensor and a corresponding pressure value, and determining the test result according to the difference value. The four first test pressure values are respectively corresponding to pressure environments with the pressure of 110Kpa, 85Kpa, 30Kpa and 85Kpa, namely, the four first test pressure values are respectively compared with the corresponding pressure values, and a test result is determined according to the comparison result.
Specifically, if the difference value is within a preset pressure range, determining that the performance of the pressure sensor to be detected is normal, that is, the pressure sensor to be detected is a normal pressure sensor; and if the difference value is out of the preset pressure range, determining that the performance of the pressure sensor to be detected is abnormal, namely determining that the pressure sensor to be detected is an abnormal pressure sensor.
Optionally, the predetermined pressure range is [ -40pa,40pa ]. Of course, in other embodiments, the preset pressure range may be set to other value ranges, and is not limited herein.
Namely, in the embodiment of the invention, the pressure impact of the first preset pressure value is applied to the pressure sensor to be measured at the first preset temperature; acquiring performance parameters of the pressure sensor to be detected; if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result; and determining the performance information of the pressure sensor to be tested according to the test result, thus effectively screening out the bad pressure sensor by applying the pressure impact of the first preset pressure value to the pressure sensor to be tested, avoiding inaccurate pressure test caused by the bad pressure sensor, and having simple flow logic, high test speed and no influence on production efficiency.
Based on the above embodiments, referring to fig. 3, a second embodiment of the method for testing the performance of the pressure sensor according to the present invention is shown.
Specifically, the performance test method of the pressure sensor comprises the following steps:
s50, acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be detected and a first actual pressure value detected by the pressure sensor to be detected when the environmental pressure is a second preset pressure value at a first preset temperature;
s60, acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be detected and a first actual pressure value detected by the pressure sensor to be detected when the environmental pressure is a second preset pressure value at a first preset temperature;
s70, obtaining a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value and the second actual pressure value.
And executing the step of S10 when the temperature drift value is less than or equal to the preset temperature drift value.
In the prior art, the temperature drift value of the pressure sensor is detected by testing pressure values in the same pressure environment at different temperatures, wherein the pressure value test at one temperature needs to be performed under high pressure, for example, after five atmospheres of impact treatment, the pressure value test at the same pressure environment at the temperature is performed, the pressure sensor after the pressure impact treatment is easy to have temporary sensitivity reduction, so that when subsequent tests are performed, the pressure value is low, the temperature drift value obtained through the low pressure value is large, and the reject ratio of the tested pressure sensor is low. The conductivity of the monocrystalline silicon piece increases exponentially with the increase of the temperature, so that the monocrystalline silicon piece is sensitive to the change of the temperature, and the piezoresistive sensor manufactured by the monocrystalline silicon piece is also easily influenced by the temperature, so that the temperature drift value is used as an important index for measuring the performance of the pressure sensor.
Further, under a first preset temperature, a first actual temperature value corresponding to the chip of the pressure sensor to be detected and a first actual pressure value detected by the pressure sensor to be detected are obtained when the environmental pressure is a second preset pressure value. The first preset temperature and the second preset pressure value can be set by a designer or adjusted, and if the first preset temperature is 40 ℃, the second preset pressure value is 95 Kpa.
Specifically, the temperature in the sealed test cavity is set as a first preset temperature, the pressure in the sealed test cavity is set as a second preset pressure value, and after the temperature and the pressure in the sealed test cavity are stabilized, a first actual temperature value of the pressure sensor to be detected is detected through the temperature sensor, and the first actual pressure value detected by the pressure sensor to be detected is read.
Further, at a second preset temperature, acquiring a second actual temperature value corresponding to the chip of the pressure sensor to be detected when the ambient pressure is a second preset pressure value and a second actual pressure value detected by the pressure sensor to be detected, wherein the first preset temperature is greater than the second preset temperature;
specifically, the temperature in the sealed test cavity is set as a second preset temperature, the pressure in the sealed test cavity is set as a second preset pressure value, after the temperature and the pressure in the sealed test cavity are stabilized, a second actual temperature value of the pressure sensor to be detected is detected through the temperature sensor, and the second actual pressure value detected by the pressure sensor to be detected is read. Optionally, the reading may be performed in batches for multiple times, an average value of the temperatures detected at the second preset temperature and the second preset pressure value is taken as a second actual temperature value, and an average value of the pressures detected at the second preset temperature and the second preset pressure value is taken as a second actual pressure value. Wherein the first preset temperature is lower than the second preset temperature. The second predetermined temperature may also be set by the designer or adjusted, for example, the second predetermined temperature is 25 ℃.
As an optional implementation manner, the second preset pressure value is greater than or equal to 95Kpa and less than or equal to 105 Kpa.
In order to reduce the influence of the ambient air pressure value on the pressure sensor, the value range of the second preset pressure value is limited to be greater than or equal to 95Kpa and smaller than or equal to 105Kpa, the second preset pressure value is maintained near the standard atmospheric pressure, the influence of the ambient air pressure value on the performance of the pressure sensor can be reduced, a single variable is kept, the influence of the temperature on the pressure sensor is only considered, and the accuracy of the performance test of the pressure sensor is improved.
Because pressure sensor tests the pressure value in sealed test cavity, reducible air current fluctuation makes it to have better test stability to pressure sensor performance's influence.
Further, the temperature drift value is obtained according to the first actual temperature value, the first actual pressure value, the second actual temperature value and the second actual pressure value, the temperature drift value can be used for reflecting the stability of the pressure sensor testing pressure value under different temperatures, the smaller the temperature drift value is, the better the stability under different temperatures is, the larger the temperature drift value is, and the worse the stability under different temperatures is.
And when the temperature drift value is smaller than or equal to a preset temperature drift value, executing the step of applying pressure impact of a preset pressure value to the pressure sensor to be measured at the first preset temperature, namely executing the step of S10.
Wherein, predetermine the temperature drift value and can be set up by the designer, if: the preset temperature drift value is 1, and can be adjusted. When the temperature drift value is smaller than or equal to the preset temperature drift value, the change of the pressure sensor along with the temperature is shown, the stability of the detected pressure value is good, and the performance of the pressure sensor is normal.
Further, the step of obtaining the temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value, and the second actual pressure value specifically includes: acquiring an absolute value of a pressure difference value between the first actual pressure value and the second actual pressure value, and acquiring an absolute value of a temperature difference value between the first actual temperature value and the second actual temperature value; and taking the ratio of the absolute value of the pressure difference value to the absolute value of the temperature difference value as the temperature drift value after the absolute value of the pressure difference value and the absolute value of the temperature difference value are obtained.
That is, in the embodiment, before applying the pressure impact of 5ATM to the pressure sensor to be measured, the temperature drift of the pressure sensor to be measured is checked, so as to avoid the influence of pressurization on the silicon diaphragm of the pressure sensor, and reduce the beneficial effect of the misjudgment rate of the pressure sensor.
In another embodiment, the step of performing a pressure test on the pressure sensor to be tested at the first preset temperature includes reducing the pressure and then increasing the pressure, that is, performing a pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result includes:
reducing the ambient pressure from 110Kpa to 85Kpa at the first preset temperature, and acquiring a second test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
at the first preset temperature, increasing the ambient pressure from 30Kpa to 85Kpa, and acquiring a third test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
determining the test result according to the difference value between the second test pressure value and the third test pressure value.
Namely, when the difference value between the second test pressure value and the third test pressure value is within a preset pressure range [ -40pa,40pa ], it is determined that the performance of the pressure sensor is normal in the test process of firstly reducing the pressure and then increasing the pressure. And if the difference value between the second test pressure value and the third test pressure value is not within a preset pressure range, judging that the performance of the pressure sensor is abnormal and the requirement is not met.
In this embodiment, through carrying out the pressure reduction to pressure sensor, carry out the processing of stepping up to pressure sensor again, acquire two pressure values that pressure sensor detected after the processing of stepping down and the processing of stepping up, according to the difference of two pressure values, confirm whether pressure sensor's performance is normal to judge the stability of pressure sensor test performance, with the product of selecting high quality.
In an embodiment, the method further comprises:
acquiring fourth test pressure values detected by the pressure sensors when the ambient pressures are 40Kpa, 85Kpa, 95Kpa and 105Kpa respectively at a second preset temperature;
acquiring a fifth test pressure value detected by the pressure sensor when the ambient pressure is 40Kpa, 95Kpa and 105Kpa respectively at a third preset temperature, wherein the third preset temperature is higher than the second preset temperature;
and when the difference value between the fourth test pressure value and the corresponding pressure value is within a preset range and the difference value between the fifth test pressure value and the corresponding pressure value is within a preset range, executing the step of acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be tested and a first actual pressure value detected by the pressure sensor to be tested when the environmental pressure is a second preset pressure value at a first preset temperature.
That is, at a second preset temperature, for example, 25 ℃, fourth test pressure values detected by the pressure sensors under the pressure environments of 40Kpa, 85Kpa, 95Kpa and 105Kpa are obtained, and the fourth test pressure values detected by the pressure sensors are compared with corresponding pressure values, respectively, where the corresponding pressure values are the pressures set by the pressure environments where the pressure sensors are located, and include 40Kpa, 85Kpa, 95Kpa and 105 Kpa. If the fourth test pressure value is within the allowable range of the corresponding preset pressure value, it indicates that the pressure test of the pressure sensor at the second preset temperature is normal, in this embodiment, the range of the preset pressure value is ± 40Pa, that is, the difference between the fourth test pressure value and the corresponding pressure value is ± 40Pa, and the pressure test is normal.
Further, at a third preset temperature, for example 60 ℃, fifth test pressure values detected by the pressure sensors under the pressure environments of 40Kpa, 95Kpa and 105Kpa are respectively obtained, and a difference value between the fifth test pressure value detected by the pressure sensor and a corresponding pressure value is respectively obtained, wherein the corresponding pressure value is a pressure set by the pressure environment where the pressure sensor is located, and the corresponding pressure value includes 40Kpa, 95Kpa and 105 Kpa. And when the difference value between the fifth test pressure value and the corresponding pressure value is within a preset range, such as [ -40Pa,40Pa ], indicating that the pressure test of the pressure sensor at the third preset temperature is normal. At this time, when the pressure test of the pressure sensor at the second preset temperature and the third preset temperature is normal, it indicates that the test requirements are met, and the step S50 is executed.
Of course, in the process of performing the pressure test at the second preset temperature and the third preset temperature, the embodiment also performs the temperature test on the pressure sensor to be tested, compares the tested temperature data with the corresponding temperature, and if the difference between the tested temperature data and the corresponding temperature is within the preset difference range, determines that the temperature test on the pressure sensor to be tested is normal.
Further, before the pressure sensor performs the pressure test at the second preset temperature, in order to facilitate the test, the sealed test cavity is set to an ambient temperature of 25 ℃, the maximum Output MAX Output and the minimum Output MIN Output of the balanced original data of the pressure sensor to be tested are calculated under the pressure of 76Kpa, and | MAX Output | ≈ | MIN Output |. And calculating the Output value Gain of the amplified original data of the pressure sensor to be tested under the pressure of 40Kpa, and ensuring that the original Output does not exceed the full range, namely, the Gain is | Output limit |/| MAX Output |, so as to ensure the resolution of the product and facilitate the subsequent pressure test.
In order to achieve the above object, the present invention further provides a performance testing apparatus for a pressure sensor, which includes a memory, a processor, and a performance testing program for a pressure sensor, stored in the memory and operable on the processor, and when executed by the processor, implements the various embodiments of the performance testing method for a pressure sensor as described above.
In addition, the present invention also provides a storage medium, which stores a performance test program of the pressure sensor, and when the performance test program of the pressure sensor is executed by a processor, the various embodiments of the performance test method of the pressure sensor as described above are realized.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. A method for testing the performance of a pressure sensor, the method comprising:
under a first preset temperature, acquiring a first actual temperature value corresponding to a chip of a pressure sensor to be detected when the environmental pressure is a second preset pressure value and a first actual pressure value detected by the pressure sensor to be detected;
acquiring a second actual temperature value corresponding to a chip of the pressure sensor to be detected and a second actual pressure value detected by the pressure sensor to be detected when the environmental pressure is a second preset pressure value at a second preset temperature, wherein the first preset temperature is greater than the second preset temperature;
acquiring a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value and the second actual pressure value;
when the temperature drift value is smaller than or equal to a preset temperature drift value, applying pressure impact of a first preset pressure value to the pressure sensor to be measured at a first preset temperature; the unit level of the first preset pressure value is ATM;
acquiring performance parameters of the pressure sensor to be detected;
if the performance parameters meet preset conditions, performing pressure test on the pressure sensor to be tested at the first preset temperature to obtain a test result;
and determining the performance information of the pressure sensor to be tested according to the test result.
2. The method for testing the performance of the pressure sensor according to claim 1, wherein the step of performing the pressure test on the pressure sensor to be tested at the first preset temperature to obtain the test result comprises:
under the first preset temperature, sequentially acquiring first test pressure values detected by the pressure sensor when the pressure environment is 110Kpa, 85Kpa, 30Kpa and 85 Kpa;
and acquiring a difference value between each first test pressure value detected by the pressure sensor and a corresponding pressure value, and determining the test result according to the difference value.
3. The method for testing the performance of a pressure sensor of claim 2, wherein said step of determining said test result based on said difference comprises:
if the difference value is within a preset pressure range, determining that the performance of the pressure sensor to be detected is normal;
and if the difference value is out of the preset pressure range, determining that the performance of the pressure sensor to be detected is abnormal.
4. The method for testing the performance of the pressure sensor according to claim 1, wherein when the pressure test is performed by first reducing the pressure and then increasing the pressure, the step of performing the pressure test on the pressure sensor to be tested at the first preset temperature to obtain the test result comprises:
at the first preset temperature, reducing the ambient pressure from 110Kpa to 85Kpa, and acquiring a second test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
at the first preset temperature, increasing the ambient pressure from 30Kpa to 85Kpa, and acquiring a third test pressure value detected by the pressure sensor when the ambient pressure is 85 Kpa;
determining the test result according to the difference value between the second test pressure value and the third test pressure value.
5. The method for testing performance of a pressure sensor according to claim 1, wherein the step of obtaining a temperature drift value according to the first actual temperature value, the first actual pressure value, the second actual temperature value, and the second actual pressure value comprises:
acquiring an absolute value of a pressure difference value between the first actual pressure value and the second actual pressure value;
acquiring an absolute value of a temperature difference value between the first actual temperature value and the second actual temperature value;
and taking the ratio of the absolute value of the pressure difference value and the absolute value of the temperature difference value as the temperature drift value.
6. The method for testing the performance of a pressure sensor of claim 5, further comprising:
acquiring fourth test pressure values detected by the pressure sensors when the ambient pressures are 40Kpa, 85Kpa, 95Kpa and 105Kpa respectively at a second preset temperature;
acquiring a fifth test pressure value detected by the pressure sensor when the ambient pressure is 40Kpa, 95Kpa and 105Kpa respectively at a third preset temperature, wherein the third preset temperature is higher than the second preset temperature;
and executing the steps of acquiring a first actual temperature value corresponding to the chip of the pressure sensor to be tested and a first actual pressure value detected by the pressure sensor to be tested when the ambient pressure is a second preset pressure value at a first preset temperature when the difference value between the fourth test pressure value and the corresponding pressure value is within a preset range and the difference value between the fifth test pressure value and the corresponding pressure value is within the preset range.
7. A performance testing apparatus of a pressure sensor, characterized in that the performance testing apparatus of the pressure sensor comprises a memory, a processor and a performance testing program of the pressure sensor stored in the memory and operable on the processor, and the performance testing program of the pressure sensor, when executed by the processor, implements the steps of the performance testing method of the pressure sensor according to any one of claims 1-6.
8. A storage medium storing a performance testing program for a pressure sensor, the performance testing program for a pressure sensor being executed by a processor to implement the steps of the performance testing method for a pressure sensor according to any one of claims 1 to 6.
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