CN107299314A - A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof - Google Patents
A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof Download PDFInfo
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- CN107299314A CN107299314A CN201710556298.8A CN201710556298A CN107299314A CN 107299314 A CN107299314 A CN 107299314A CN 201710556298 A CN201710556298 A CN 201710556298A CN 107299314 A CN107299314 A CN 107299314A
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- Prior art keywords
- zrcrn
- zraln
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- coating
- cutter
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
Abstract
The invention belongs to coating for metal surfaces technical field, disclose one kind and ZrCrN/ZrAlN lamination cutter coats and preparation method thereof are deposited on WC/CO hard alloy substrates.ZrCrN/ZrAlN laminated coatings of the present invention are followed successively by from matrix to top layer：Cr/CrN transition zones, ZrCrN layers, ZrAlN layers ... ZrCrN layers, ZrAlN layers.Signal layer coating thickness is 40~80nm, and total coating thickness is 3~4 microns.Coating of the present invention is deposited using multi sphere ion plating technology.Contain zirconium, aluminium, four kinds of elements of chromium and nitrogen in coating, coating microhardness reaches 38.3GPa, high temperature oxidation resisting temperature is up to 1280 DEG C, and scarification measures adhesion that coating is shown in matrix up to 138N.The carbide cutter tool prepared by the present invention has higher film-substrate cohesion, can be achieved to carry out high-speed dry cutting to the metal material of high rigidity.
Description
Technical field
The invention belongs to coating for metal surfaces technical field, it is related to a kind of a kind of using multi sphere ion plating technology deposition
ZrCrN/ZrAlN lamination cutter coats and preparation method thereof.
Background technology
With the fast development of modern science and technology, people propose higher combination property requirement to mechanical part, but
The performance range that some requirements can often reach beyond homogenous material.For example, for the part used in hot environment,
In addition to requiring it and having higher elevated temperature strength, also require that it has the energy of good resistance to high temperature oxidation, burn into erosion and abrasion
Power.For the instrument used in sharp wear environment, then it is proposed in terms of elevated temperature strength, toughness, wearability
Than requirement higher in the past.Single material can not possibly often meet above-mentioned all properties requirement, and use coating process system
Standby combination of materials then can effectively play the advantage of various materials, while avoiding respective limitation.
Earliest hard wear-resistant coating is usually to apply on alloy cutter, and the hard material of a floor height is coated on tool matrix
Coating, improves the wearability of tool surface, anti-adhesion, inoxidizability and reduction coefficient of friction, so as to improve cutter
Service life.With coating technology continue to develop and improve and abrasion-resistant coating material exploitation, increasing coating should
For needing to improve wear-resisting, the heat-resisting and antiseptic property of material on wear-resisting and protection component of machine.Development of Novel coating
Material and coat preparing technology are always coating technology important content, and present invention provides a kind of new cutter that is applied to
Coating.
The content of the invention
It is an object of the invention to provide a kind of cutter that ZrCrN/ZrAlN laminations are coated with carbide tool surface
Coating and preparation method thereof.The concrete technical scheme of the present invention is as described below.
The present invention provides a kind of ZrCrN/ZrAlN laminations cutter coat, and described ZrCrN/ZrAlN laminated coatings are from matrix
It is followed successively by top layer：Cr/CrN transition zones and ZrCrN layers and ZrAlN layers of alternately laminated coating.Signal layer coating thickness be 40~
80nm, total coating thickness is 3~4 microns.
The present invention also provides a kind of preparation method of above-mentioned nano-composite zirconium aluminium chromium nitride coatings, and its specific steps is such as
Under：
(1) cutter after cleaning is uniformly fixed on work rest, be fitted into plating films of multi-arc ion plating machine, adjust workpiece
Frame rotating speed is 10-165r/min.It is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa, simultaneously
Open heater and be warming up to 350-450 DEG C.
(2) 400-600V back bias voltages, sputtered substrate 600-800s, sputtering power 5-7kw are applied to matrix.
(3) Cr/CrN transition zones are deposited：Substrate negative voltage is reduced to 280-320V, N is passed through2, Ar gas is closed, cavity is adjusted
Air pressure to 1-3Pa, temperature is increased to 450-550 DEG C.Chromium target is set to be powered, 50~60A of target current, deposition Cr/CrN transition zones 600-
800s。
(4) ZrCrN layers are deposited：Zirconium target is set to be powered, 90~100A of target current deposits ZrCrN layers of 600-800s.
(5) ZrAlN layers are deposited：Chromium target is closed, aluminium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s.
(6) ZrCrN layers are deposited：Aluminium target is closed, chromium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s.
(7) (5), (6) step ... alternating deposit ZrCrN, ZrAlN coating totally 110~130min are repeated
(8) deposition makes cutter cool to less than 150 DEG C taking-ups with the furnace after terminating.
Need to pre-process matrix before the preparation of above-mentioned cutter coat, concrete technology is：Preplating cutter is put into
5min is cleaned in the supersonic wave cleaning machine for filling the alcohol that concentration is 95%, then the cutter of taking-up is dried.
The present invention can adjust microstructure, hardness and the high temperature resistance of coating by changing the content of each element component in coating
The performance of oxidation, is adapted to different cutting environment and processing conditions.
The beneficial effects of the invention are as follows：The adhesion of coating and matrix can be improved, is coated using coating of the present invention
Cutter, cutting speed and service life can be increased substantially；By adjusting the microstructure of coating, various differences are applicable to
Cutting environment and processing conditions.
Brief description of the drawings
Fig. 1 is coating structure SEM image of the present invention；
In figure, 1 is matrix, and 2 be Cr/CrN transition zones, and 3,5,7,9,11,13,17,19,21 be ZrCrN coatings, 2,4,6,
8th, 10,12,14,16,18,20,22 be ZrAlN coatings.
Embodiment
In order to better illustrate technical scheme, it is further detailed below with specific embodiment.
Embodiment 1
The present embodiment is in WC/CO hard alloy cutter substrate deposit ZrCrN/ZrAlN lamination cutter coats.The present invention
Described ZrCrN/ZrAlN laminated coatings are followed successively by from matrix to top layer：Cr/CrN transition zones, ZrCrN layers, ZrAlN layers ...
ZrCrN layers, ZrAlN layers.Signal layer coating thickness is 40~80nm, and total coating thickness is 3~4 microns.
The substrate pretreated technique that the present embodiment is related to is：It is the super of 95% alcohol that preplating cutter, which is put into, and fills concentration
5min is cleaned in sound wave cleaning machine, then the cutter of taking-up is dried.
The plating steps of the present embodiment are：
(1) cutter after cleaning is uniformly fixed on work rest, be fitted into plating films of multi-arc ion plating machine, adjust workpiece
Frame rotating speed is 10-165r/min.It is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa, simultaneously
Open heater and be warming up to 350-450 DEG C.
(2) 400-600V back bias voltages, sputtered substrate 600-800s, sputtering power 5-7kw are applied to matrix.
(3) Cr/CrN transition zones are deposited：Substrate negative voltage is reduced to 280-320V, N is passed through2, Ar gas is closed, cavity is adjusted
Air pressure to 1-3Pa, temperature is increased to 450-550 DEG C.Chromium target is set to be powered, 50~60A of target current, deposition Cr/CrN transition zones 600-
800s。
(4) ZrCrN layers are deposited：Zirconium target is set to be powered, 90~100A of target current deposits ZrCrN layers of 600-800s.
(5) ZrAlN layers are deposited：Chromium target is closed, aluminium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s.
(6) ZrCrN layers are deposited：Aluminium target is closed, chromium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s.
(7) (5), (6) step ... alternating deposit ZrCrN, ZrAlN coating totally 110~130min are repeated
(8) deposition makes cutter cool to less than 150 DEG C taking-ups with the furnace after terminating.
Embodiment 2
ZrCrN/ZrAlN laminated coatings of the present invention are deposited on YG8 carbide end mills surface, and identical hard
Matter alloy slotting cutter surface cvd nitride zirconium hard coat and non-coated tool respectively take three, carry out cutter life and wearability
Test.Wearability test condition is：Cutter is the sword slotting cutters of Φ 5mm 4, is 4Cr5MoSiV (58HRC) by cut part, does milling
Cut, climb cutting, cutting speed is 350m/min, per tooth cutting output is 0.05mm/Z, and radial feeds are 0.20mm, axial feeding
For 2mm, processing length is 80m.
Test result shows：With ZrCrN/ZrAlN laminated coatings of the present invention coat cutter knife face attrition value be
0.18mm, the cutter knife face attrition value of coating zirconium nitride coatings is 0.38, and non-coated tool knife face attrition value is 0.86.The present invention
The cutter wearability of described ZrCrN/ZrAlN laminated coatings coating is greatly improved.
Lifetime testing conditions are：Cutter is the sword slotting cutters of Φ 5mm 4, is 4Cr5MoSiV (58HRC) by cut part, does milling
Cut, climb cutting, cutting speed is 350m/min, per tooth cutting output is 0.05mm/Z, and radial feeds are 0.20mm, axial feeding
For 2mm.
Test result shows：Under identical experiment condition, coated with ZrCrN/ZrAlN laminated coatings of the present invention
Tool in Milling length reached 960m, the Tool in Milling length of coating zirconium nitride coatings is 520m, and non-coated tool milling is long
Degree only has 230m.The cutter life of ZrCrN/ZrAlN laminated coatings coating of the present invention is greatly improved.
Embodiment 3
ZrCrN/ZrAlN laminated coatings of the present invention are deposited on YG8 carbide end mills surface, are surveyed with scarification
The adhesion of coating is tried, test result shows：The critical load of coating of the present invention is up to 138N.
Claims (4)
1. a kind of ZrCrN/ZrAlN laminations cutter coat, it is characterised in that ZrCrN/ZrAlN laminated coatings of the present invention from
Matrix is followed successively by top layer：Cr/CrN transition zones and ZrCrN layers and ZrAlN layers of alternately laminated coating, signal layer coating thickness is
40~80nm, total coating thickness is 3~4 microns.
2. a kind of preparation method of ZrCrN/ZrAlN laminations cutter coat, it is characterised in that the described method comprises the following steps：
(1) cutter after cleaning is uniformly fixed on work rest, is fitted into plating films of multi-arc ion plating machine, is evacuated to background true
Sky, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa, while opening heater is warming up to 350-450 DEG C；
(2) 400-600V back bias voltages, sputtered substrate 600-800s, sputtering power 5-7kw are applied to matrix；
(3) Cr/CrN transition zones are deposited：Substrate negative voltage is reduced to 280-320V, N is passed through2, Ar gas is closed, cavity air pressure is adjusted
To 1-3Pa, temperature is increased to 450-550 DEG C.Chromium target is set to be powered, 50~60A of target current, deposition Cr/CrN transition zones 600-
800s；
(4) ZrCrN layers are deposited：Zirconium target is set to be powered, 90~100A of target current deposits ZrCrN layers of 600-800s；
(5) ZrAlN layers are deposited：Chromium target is closed, aluminium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s；
(6) ZrCrN layers are deposited：Aluminium target is closed, chromium target is powered, 50~60A of target current deposits ZrCrN layers of 600-800s；
(7) (5), (6) step, alternating deposit ZrCrN, ZrAlN coating totally 110~130min are repeated；
(8) deposition makes cutter cool to less than 150 DEG C taking-ups with the furnace after terminating.
3. method according to claim 2, it is characterised in that need to carry out matrix before the preparation of above-mentioned cutter coat
Pre-process, concrete technology is：Preplating cutter is put into the supersonic wave cleaning machine for filling the alcohol that concentration is 95% and cleans 5min,
Then the cutter of taking-up is dried.
4. method according to claim 2, it is characterised in that the condition of work of multi-arc ion coating includes, adjusts work rest
Rotating speed is 10-165r/min, is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556298.8A CN107299314A (en) | 2017-07-10 | 2017-07-10 | A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556298.8A CN107299314A (en) | 2017-07-10 | 2017-07-10 | A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof |
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| Publication Number | Publication Date |
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| CN107299314A true CN107299314A (en) | 2017-10-27 |
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| CN201710556298.8A Pending CN107299314A (en) | 2017-07-10 | 2017-07-10 | A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807850A (en) * | 2022-04-30 | 2022-07-29 | 西安交通大学 | Nitride hard film applied to surface of hot forging die and preparation method thereof |
-
2017
- 2017-07-10 CN CN201710556298.8A patent/CN107299314A/en active Pending
Non-Patent Citations (2)
| Title |
|---|
| L. ROGSTROM ET AL.,: "Thermal stability and mechnical properties of arc evaporated ZrN/ZrAlN multilayers", 《THIN SOLID FILMS》 * |
| S.M. AOUADI,ET AL.: "Physical and mechanical properties of chromium zirconium nitride thin films", 《SURFACE & COATINGS TECHNOLOGY》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807850A (en) * | 2022-04-30 | 2022-07-29 | 西安交通大学 | Nitride hard film applied to surface of hot forging die and preparation method thereof |
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Application publication date: 20171027 |