CN107287566A - A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof - Google Patents
A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof Download PDFInfo
- Publication number
- CN107287566A CN107287566A CN201710556057.3A CN201710556057A CN107287566A CN 107287566 A CN107287566 A CN 107287566A CN 201710556057 A CN201710556057 A CN 201710556057A CN 107287566 A CN107287566 A CN 107287566A
- Authority
- CN
- China
- Prior art keywords
- cutter
- coating
- nano
- molybdenum nitride
- zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to coating for metal surfaces technical field, disclose one kind and nano-composite zirconium aluminium molybdenum nitride coatings and preparation method thereof are deposited on WC/CO hard alloy substrates.Zirconium aluminium molybdenum nitride coatings of the present invention are divided into two layers, and one layer is Zr/ZrN prime coats, and thickness is 100~400 nanometers；One layer is nano-composite zirconium aluminium molybdenum nitride coatings, and thickness is 2.8~3.4 microns；Total coating thickness is 2.9~3.8 microns.Coating of the present invention is deposited using multi sphere ion plating technology.Contain zirconium, aluminium, four kinds of elements of molybdenum and nitrogen in coating, coating microhardness reaches 33.6GPa, and high temperature oxidation resisting temperature is up to 1130 DEG C, and coefficient of friction is 0.33.The hard alloy cutter prepared by the present invention can be realized carries out high-speed dry cutting to the metal material of high rigidity.
Description
Technical field
The invention belongs to coating for metal surfaces technical field, it is related to a kind of nanometer of use multi sphere ion plating technology deposition and answers
Zirconium aluminium molybdenum nitride cutter coat and preparation method thereof.
Background technology
Coated cutting tool is to engage tool matrix with ganoine thin film top layer, effectively keeps and to have shown matrix each with coating
From advantage, so as to improve processing efficiency and machining accuracy, tool life reduces production cost, Yi Jiti
High tool surface oxidation resistance etc.；Therefore, cutting performance is significantly improved.According to statistics, more than 80% machining makes
With coated cutting tool, more than 80% hard alloy cutter and high speed steel cutter are institutes on coated cutting tool, Digit Control Machine Tool
Surface-coating technology is all employed with more than the 90% of cutting tool.At present, Cutting-Tool Coating Technology has become lifting manufacturing industry
One of key factor of technical merit.
Nitride is generally with very high hardness and intensity, low-friction coefficient, good antioxygenic property and heat endurance, height
Thermal shock resistance, will have important use, especially mistake in the field such as industry such as cutter, mould for needing to reduce friction and wear
Cross race's metal nitride and be often used as tool surface strengthening material, to improve the surface property of matrix material.Exploitation can be used for knife
Have the new material of surface peening to obtain more excellent metal cutting tool, be always the constant target of metal cutting.
The content of the invention
It is an object of the invention to provide one kind one layer of nano-composite zirconium aluminium molybdenum nitrogen is coated with carbide tool surface
Cutter coat of compound and preparation method thereof.The concrete technical scheme of the present invention is as described below.
The present invention provides a kind of nano-composite zirconium aluminium molybdenum nitride cutter coat, and its formula is：30~60at.% of zirconium, aluminium 5
~30at.%, 5~20at.% of molybdenum, 20~50at.% of nitrogen.The zirconium aluminum-silicon nitride coating being made of this formula, its each composition
Content sum should be 100%.
Above-mentioned coating is that one layer of Zr/ZrN prime coat is first deposited on hard alloy substrate, and thickness is 100~400 nanometers；
Then nano-composite zirconium aluminium molybdenum nitride coatings are just deposited, thickness is 2.8~3.4 microns；Total coating thickness is 2.9~3.8 micro-
Rice.
Above-mentioned hard alloy substrate can be WC/CO hard alloy cutters.
The present invention also provides the preparation method of above-mentioned nano-composite zirconium aluminium molybdenum nitride coatings, and methods described includes following step
Suddenly：
(1) substrate pretreated technique：Preplating cutter is put into the supersonic wave cleaning machine for filling the alcohol that concentration is 95%
5min is cleaned, then the cutter of taking-up is dried.
(2) Zr/ZrN prime coats are deposited：Cutter after cleaning is uniformly fixed on work rest, loads multi-arc ion coating
In coating machine, regulation work rest rotating speed is 10-165r/min.It is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmosphere section cavity gas
0.1-0.5Pa is depressed into, while opening heater is warming up to 350-450 DEG C.400-600V back bias voltages, sputtered substrate are applied to matrix
600-800s, sputtering power 5-7kw.Then reduction substrate negative voltage is passed through N to 280-320V2, regulation cavity air pressure to 1-
3Pa, temperature is increased to 450-550 DEG C.Zirconium target is set to be powered, power is fixed as 200W, deposition Zr/ZrN prime coats 600-800s.
(3) nano-composite zirconium aluminium molybdenum nitride coatings are deposited：Then molybdenum target and aluminium target is made to be powered, by adjusting molybdenum target and aluminium
The zirconium aluminium molybdenum nitride coatings of the different atom percentage contents of the power deposition of target, sedimentation time 240-300min.Deposition terminates
After cutter is cooled to less than 150 DEG C taking-ups with the furnace.
Substrate used in the present invention is WC/CO hard alloy cutters, and matrix surface coating is zirconium aluminium molybdenum nitride hard
Coating.Coating microhardness reaches 33.6GPa, and high temperature oxidation resisting temperature is up to 1130 DEG C.
The present invention can adjust the microstructure, hardness, friction system of coating by changing the content of each element component in coating
The performance of number and resistance to high temperature oxidation, is adapted to different cutting environment and processing conditions.
The beneficial effects of the invention are as follows：The cutter coated using coating of the present invention, cutting speed and service life can
Increase substantially；By adjusting the microstructure of coating, a variety of cutting environment and processing conditions are applicable to.
Brief description of the drawings
Fig. 1 is the structural representation of coating of the present invention；
In figure, 1 is matrix, and 2 be Zr/ZrN prime coats, and 3 be nano-composite zirconium aluminium molybdenum nitride coatings.
Embodiment
In order to better illustrate technical scheme, it is further detailed below with specific embodiment.
Embodiment 1
The present embodiment is that, in WC/CO hard alloy cutter substrate deposit zirconium aluminium molybdenum nitride coatings, coating is divided into two layers,
One layer is Zr/ZrN prime coats, and thickness is 100~400 nanometers；One layer is nano-composite zirconium aluminium molybdenum nitride coatings, and thickness is
2.8~3.4 microns；Total coating thickness is 2.9~3.8 microns.
Coating formula difference of the present invention is as follows：
Zirconium 30at.%, aluminium 16at.%, molybdenum 18at.%, nitrogen 36at.%
Zirconium 36at.%, aluminium 15at.%, molybdenum 20at.%, nitrogen 29at.%
Zirconium 42at.%, aluminium 30at.%, molybdenum 5at.%, nitrogen 23at.%
Zirconium 55at.%, aluminium 5at.%, molybdenum 20at.%, nitrogen 20at.%
Zirconium 60at.%, aluminium 5at.%, molybdenum 5at.%, nitrogen 30at.%
Zirconium 32at.%, aluminium 7at.%, molybdenum 11at.%, nitrogen 50at.%
The preparation method of nano-composite zirconium aluminium chromium nitride coatings comprises the following steps in the present embodiment：
(1) substrate pretreated technique：Preplating cutter is put into the supersonic wave cleaning machine for filling the alcohol that concentration is 95%
5min is cleaned, then the cutter of taking-up is dried.
(2) Zr/ZrN prime coats are deposited：Cutter after cleaning is uniformly fixed on work rest, loads multi-arc ion coating
In coating machine, regulation work rest rotating speed is 10-165r/min.It is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmosphere section cavity gas
0.1-0.5Pa is depressed into, while opening heater is warming up to 350-450 DEG C.400-600V back bias voltages, sputtered substrate are applied to matrix
600-800s, sputtering power 5-7kw.Then reduction substrate negative voltage is passed through N to 280-320V2, regulation cavity air pressure to 1-
3Pa, temperature is increased to 450-550 DEG C.Zirconium target is set to be powered, power is fixed as 200W, deposition Zr/ZrN prime coats 600-800s.
(3) nano-composite zirconium aluminium molybdenum nitride coatings are deposited：Then molybdenum target and aluminium target is made to be powered, by adjusting molybdenum target and aluminium
The zirconium aluminium molybdenum nitride coatings of the different atom percentage contents of the power deposition of target, sedimentation time 240-300min.Deposition terminates
After cutter is cooled to less than 150 DEG C taking-ups with the furnace.
Embodiment 2
Deposit nano-composite zirconium aluminium molybdenum nitride coatings of the present invention on YG8 carbide end mills surface, with
Identical carbide end mill surface cvd nitride zirconium hard coat and non-coated tool respectively take three, carry out wearability survey
Examination.Wearability test condition is：Cutter is the sword slotting cutters of Φ 5mm 4, is 4Cr5MoSiV (58HRC) by cut part, does milling,
Climb cutting, cutting speed is 350m/min, and per tooth cutting output is 0.05mm/Z, and radial feeds are 0.20mm, and axial feeding is
2mm, processing length is 80m.
Test result shows：With nano-composite zirconium aluminium molybdenum nitride of the present invention coat cutter knife face attrition value be
0.12mm, the cutter knife face attrition value of coating zirconium nitride coatings is 0.38mm, and non-coated tool knife face attrition value is 0.86mm.This
The cutter wearability of the described nano-composite zirconium aluminium molybdenum nitride coating of invention is greatly improved.
Embodiment 3
Nano-composite zirconium aluminium molybdenum nitride coatings of the present invention are deposited on M2 high-speed steel standard test pieces surface, and in phase
Three are respectively taken with high-speed steel strip cvd nitride zirconium hard coat and non-coating test piece, high temperature friction and wear is used after polishing
Machine carries out room temperature friction test, and friction pair is Al2O3 ceramic grinding balls (diameter 9.38mm), and friction type is ball-disk circumference friction,
Friction radius is 4mm, and load is 3N, and relative rotation speed 50r/min, fraction time is 30min.
Test result shows：With nano-composite zirconium aluminium molybdenum nitride of the present invention coat test piece coefficient of friction be
0.33, the test piece coefficient of friction of coating zirconium nitride coatings is 0.72, and non-coating test piece coefficient of friction is 1.02.It is of the present invention
The test piece coefficient of friction of nano-composite zirconium aluminium molybdenum nitride coating is greatly reduced.
Claims (6)
1. a kind of nano-composite zirconium aluminium molybdenum nitride cutter coat, it is characterised in that the formula of the coating is：Zirconium 30~
60at.%, 5~30at.% of aluminium, 5~20at.% of silicon, 20~50at.% of nitrogen, each component content sum should be 100%.
2. cutter coat according to claim 1, it is characterised in that the coating is first deposited on hard alloy substrate
One layer is Zr/ZrN prime coats, and thickness is 100~400 nanometers；One layer is nano-composite zirconium aluminium molybdenum nitride coatings, and thickness is
2.8~3.4 microns；Total coating thickness is 2.9~3.8 microns.
3. cutter coat according to claim 2, it is characterised in that the hard alloy substrate can be WC/CO hard
Alloy cutter.
4. a kind of preparation method of nano-composite zirconium aluminium molybdenum nitride cutter coat as any one of claim 1-3,
Characterized in that, the described method comprises the following steps：
(1) substrate pretreated technique；
(2) Zr/ZrN prime coats are deposited：Cutter after cleaning is uniformly fixed on work rest, loads plating films of multi-arc ion plating
In machine, tune is evacuated to base vacuum, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa, while opening heater is warming up to 350-
450 DEG C, 400-600V back bias voltages, sputtered substrate 600-800s, sputtering power 5-7kw are applied to matrix；Then reduction matrix is born
280-320V is biased into, N is passed through2, regulation cavity air pressure is to 1-3Pa, and temperature is increased to 450-550 DEG C, zirconium target is powered, power
It is fixed as 200W, deposition Zr/ZrN prime coats 600-800s；
(3) nano-composite zirconium aluminium molybdenum nitride coatings are deposited：Then molybdenum target and aluminium target is made to be powered, by adjusting molybdenum target and aluminium target
The zirconium aluminium molybdenum nitride coatings of power deposition difference atom percentage content, sedimentation time 240-300min, deposition makes after terminating
Cutter cools to less than 150 DEG C taking-ups with the furnace.
5. preparation method according to claim 4, it is characterised in that described matrix pretreating process is：By preplating cutter
It is put into the supersonic wave cleaning machine for filling the alcohol that concentration is 95% and cleans 5min, then dries the cutter of taking-up.
6. preparation method according to claim 4, it is characterised in that in step (2), work rest rotating speed is 10-165r/
Min, is evacuated to base vacuum 5 × 10-4Pa, is passed through Ar controlled atmospheres section cavity air pressure to 0.1-0.5Pa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556057.3A CN107287566A (en) | 2017-07-10 | 2017-07-10 | A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556057.3A CN107287566A (en) | 2017-07-10 | 2017-07-10 | A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107287566A true CN107287566A (en) | 2017-10-24 |
Family
ID=60101508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710556057.3A Pending CN107287566A (en) | 2017-07-10 | 2017-07-10 | A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107287566A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807850A (en) * | 2022-04-30 | 2022-07-29 | 西安交通大学 | Nitride hard film applied to surface of hot forging die and preparation method thereof |
-
2017
- 2017-07-10 CN CN201710556057.3A patent/CN107287566A/en active Pending
Non-Patent Citations (1)
| Title |
|---|
| 赵强: "ZrMoN、ZrAlMoN复合膜及ZrAlN/Mo2N多层膜的性能研究", 《中国优秀硕士学位论文全文数据库 工程科技I辑》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114807850A (en) * | 2022-04-30 | 2022-07-29 | 西安交通大学 | Nitride hard film applied to surface of hot forging die and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5424103B2 (en) | Covering mold for plastic working | |
| JP5344204B2 (en) | Surface coated cutting tool | |
| EP2762248B1 (en) | Covered member with excellent sliding properties | |
| US20210040597A1 (en) | High-temperature-resistant hard composite coating, preparation method thereof, and coated cutter | |
| CN104131250A (en) | Nanometer composite cutting tool coating with gradient composition design and preparation method thereof | |
| CN104928638A (en) | AlCrSiN-based multilayer nanometer composite cutter coating layer and preparation method thereof | |
| EP2262924B1 (en) | Thermally stabilized (ti, si)n layer for cutting tool insert | |
| CN101831608B (en) | Nano composite titanium-aluminum-silicon nitride cutter coating and preparation method thereof | |
| CN104131256A (en) | Multilayer nanometer composite cutting tool coating and preparation method thereof | |
| KR20150138246A (en) | Surface-coated cutting tool | |
| KR20040078062A (en) | Surface coated cutting tool of cermet | |
| JP2011183545A (en) | Coated tool excellent in sliding characteristic and method of manufacturing the same | |
| CN108118301B (en) | AlCrSiN coating with intermediate layer with gradient change of Si content and preparation method | |
| CN101831615A (en) | Nano composite titanium-chromium-aluminum-silicon nitride cutter coat and preparation method thereof | |
| CN113981369A (en) | Multilayer coating system and method for producing same | |
| CN103978748A (en) | Intermediate-high-temperature self-lubricating multi-arc ion-plated multiple-unit gradient tool coating and preparation method thereof | |
| KR102074469B1 (en) | Multilayer Nano Hard Coating Film for Forming Tool | |
| CN107287566A (en) | A kind of nano-composite zirconium aluminium molybdenum nitride cutter coat and preparation method thereof | |
| CN110158046B (en) | Composite coating, self-lubricating composite coating cutter and preparation method thereof | |
| CN107119257B (en) | A kind of nano-composite zirconium aluminium chromium nitride cutter coat and preparation method thereof | |
| CN102206808B (en) | High-hardness high-elastic-modulus TiAlN/AlON nano multilayer coating and preparation method thereof | |
| CN107287565B (en) | ZrCrN/ZrMoN laminated cutter coating and preparation method thereof | |
| CN107354441A (en) | A kind of nano-composite zirconium aluminum-silicon nitride cutter coat and preparation method thereof | |
| CN101831616B (en) | Nano composite titanium-chromium-silicon nitride cutter coat and preparation method thereof | |
| CN107299314A (en) | A kind of ZrCrN/ZrAlN laminations cutter coat and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171024 |
|
| RJ01 | Rejection of invention patent application after publication |