CN107291043A - A kind of servo-control system and its slide-back method with slide-back - Google Patents

A kind of servo-control system and its slide-back method with slide-back Download PDF

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Publication number
CN107291043A
CN107291043A CN201610193276.5A CN201610193276A CN107291043A CN 107291043 A CN107291043 A CN 107291043A CN 201610193276 A CN201610193276 A CN 201610193276A CN 107291043 A CN107291043 A CN 107291043A
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circuit
voltage
compensation
discharge circuit
input
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CN107291043B (en
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徐梦哲
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/33Director till display
    • G05B2219/33218Motor encoders, resolvers on common bus with drives, servo controllers

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  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Amplifiers (AREA)

Abstract

The invention discloses a kind of servo-control system with slide-back and its slide-back method, the slide-back system includes the discharge circuit being sequentially connected, control circuit, drive circuit, single-phase DC motor and current sensor, also include bias sampling and compensation circuit, the input of discharge circuit is connected to the output end of current sensor, the input of control circuit is connected to the output end of discharge circuit, the input of bias sampling and compensation circuit is connected between discharge circuit and control circuit, the output end of bias sampling and compensation circuit connects the input of discharge circuit, discharge circuit and bias sampling and compensation circuit constitute bias compensation circuit in the same direction and reverse biased compensation circuit.The slide-back system and method based on current sensor that the present invention is provided, can carry out real-Time Compensation automatically in system electrification, without the hardware circuit mechanically debugged, it is simple to operate, free from the influence of the external environment, accuracy is high, improves the stability of system.

Description

A kind of servo-control system and its slide-back method with slide-back
Technical field
The present invention relates to the control field of motor, and in particular to a kind of SERVO CONTROL system with slide-back System and its slide-back method.
Background technology
Litho machine is the key equipment in chip manufacturing industry, and the development of integrated circuit and the development of litho machine cease Manner of breathing is closed.Wherein accurate transmission technology plays more and more important as a key technology in litho machine Role.Before litho machine is processed imprinting to silicon chip, being accurately positioned for silicon chip is most important, and precision is passed Defeated system realizes being accurately positioned for silicon chip using servo-controlled mode, therefore servo-controlled accuracy is determined The quality of production technology and product, any trickle offset deviation can all cause huge shadow to the quality of product Ring.
As shown in figure 1, servo-control system typically uses the control mode of many closed loops, ring is successively from outside to inside Including position ring, speed ring and electric current loop.Speed, position and the electric current of motor are detected using current sensor, And compared with given reference quantity, realize PWM drivings to reach servo-controlled mesh by corresponding controller 's.The control process of wherein electric current loop is:Using current sensor feedback current and actual given electric current it Between difference, through overcurrent controller (generally PI controllers) amplification, with this come opening by FET Control PWM dutycycle is closed to reach the purpose of controlled motor.But needed in feedback procedure through overcurrent It can be mingled with current sensor and fortune in the processing of sensor sample, various discharge circuits, the electric current for causing feedback The voltage deviation that electric discharge road is brought, although these variation very littles, but after the amplification of PI controllers, The variation of very little can also cause the misoperation of FET, change PWM dutycycle, gently then cause to watch Take motor holding state lower rotor part to shake, collapse that is heavy then causing whole control system has a strong impact on and watched The accuracy and stability of control are taken, as the weight that can not ignore in the accurate Transmission system such as photo-etching machine work-piece platform Big problem.
In the prior art generally using the method for the mechanical hardware circuit compensation bias such as adjustable resistance, by adjusting Section adjustable resistance reaches the purpose of regulation bias.But this method needs manual debugging, debugging is bothered, and With the influence of the extraneous factors such as temperature change, hardware aging, offset voltage can change, mechanical in addition Vibration can also change the size of adjustable resistance, so as to reduce the reliability of this method.
In view of the above-mentioned problems, proposing in the prior art a kind of for the progress of three phase electric machine current sensor deviation The apparatus and method of compensation.This method first determines whether motor PWM control and interrupt status, in PWM The bias of the electric current, as current sensor of detection current sensor when disconnected.Pass through this as benchmark bias Frequently or dynamical system is compensated every some cycles, the big portion that current sensor is caused can be compensated Divide deviation, but the method still has following shortcoming:One be this method use compensating proportion COEFFICIENT K=1 (i.e. Obtained bias of sampling is the bias of compensation), and single compensation is carried out, but sampled in hardware circuit Obtained bias and the bias of compensation can not possibly definitely meet 1:1 relation, so remaining bias can not be determined, So as to reduce control accuracy;Two be that this method needs individually to mend each phase current in three phase electric machine Repay, each compensation system must be independent, adds the complexity of system;Three be that this method is ignored in system Phase difference between given electric current and sample rate current that inverter is caused, influences the standard of benchmark bias detected True property, so as to have impact on the control accuracy to motor.
Have also been proposed in the prior art afterwards it is a kind of for each phase current sensor current feedback of three phase electric machine with to Determine error between electric current, the method compensated respectively by vector controlled.I.e. by designing isolated DC component Symchronizing filter, by measuring the size and phase of each phase current, measures the harmonic distortion of each phase current respectively, Limited distortion harmonic wave is carried out again anti-phase, and be added into current sensor so that symchronizing filter is defeated The DC component gone out is reduced to zero, and slide-back is realized with this harmonic carcellation.But the direction is only for electric current The harmonic wave introduced in sensor is compensated, but due to introduce harmonic wave do not know, so compensation harmonic number and Values of factor K hardly possible is determined, and is compensated just for one of those or several low-order harmonics, to remaining Most of uncertain distortion harmonic wave is helpless, and symchronizing filter can not quickly isolate DC component. In addition this method have ignored the mistake during 2/3 conversion, 2/3 inverse transformation and static coordinate and rotating coordinate transformation Difference, and symchronizing filter is relied on, compensation method is complicated, it is difficult to realize, and the method is only for three-phase electricity Machine, and vector control method must be used, it is inapplicable to other motors and control method, therefore with certain Limitation.
The content of the invention
The invention provides a kind of servo-control system with slide-back and its slide-back method, to solve Certainly above-mentioned technical problem.
In order to solve the above-mentioned technical problem, the technical scheme is that:A kind of servo with slide-back Control system, including be sequentially connected discharge circuit, control circuit, drive circuit, single-phase DC motor and Current sensor, in addition to bias sampling and compensation circuit, the input of the discharge circuit are connected to electric current The output end of sensor, the input of the control circuit is connected to the output end of the discharge circuit, described The input of bias sampling and compensation circuit is connected between the discharge circuit and control circuit, the bias The output end of sampling and compensation circuit connects the input of the discharge circuit, and the discharge circuit and bias are adopted Sample and compensation circuit constitute bias compensation circuit in the same direction and reverse biased compensation circuit.
Further, the discharge circuit includes first, second, third, fourth instrument discharge circuit, institute The input for stating first instrument discharge circuit is connected to the output end of the current sensor, the second instrument The input of discharge circuit connect respectively the first instrument discharge circuit output end and the bias sampling and The output end of compensation circuit, the input of the 3rd instrument discharge circuit connects the second instrument fortune respectively The output end and system given voltage on electric discharge road, the output end of the 3rd instrument discharge circuit connect the control The input of the input of circuit processed, the bias sampling and compensation circuit is connected to the 3rd instrument amplifier Between circuit and control circuit, the first, second, third instrument discharge circuit and bias sampling and compensation Circuit constitutes reverse biased compensation circuit;The input of the 4th instrument discharge circuit connects the electricity respectively The output end of the output end of flow sensor and bias sampling and compensation circuit, the 4th instrument amplifier electricity The output end on road is connected with the input of the bias sampling and compensation circuit, the 4th instrument discharge circuit Bias compensation circuit in the same direction is constituted with bias sampling and compensation circuit.
Further, the bias sampling and compensation circuit include the adc circuit that is sequentially connected, editable and patrolled Device and DAC-circuit are collected, the input of the adc circuit connects the three, the 4th instrument fortune respectively The output end on electric discharge road, the output end of the DAC-circuit connects described second, the 4th instrument amplifier electricity respectively The input on road.
Further, the bias sampling and compensation circuit also include RC low pass filters, the RC low passes The input of wave filter is connected between the described 3rd, instrument discharge circuit and control circuit, the RC low passes The output end of wave filter is connected to the input of the adc circuit.
Further, the Programmadle logic device is FPGA registers.
Further, the output end of the 3rd instrument discharge circuit and the 4th instrument discharge circuit also connects respectively It is connected to the device that reports an error.
Further, in addition to bus dc source, the output end of the bus dc source is connected to described The input of drive circuit.
Further, it is described to control circuit to be PI circuits.
Further, the drive circuit is PWM drive circuit.
The present invention also provides a kind of slide-back method for servo-control system, comprises the following steps:
S1:Current sensor detects the biphase current of single-phase DC motor, is converted into exporting after secondary side voltage To discharge circuit, the discharge circuit by the secondary side voltage and system given voltage carry out calculation process it Initial reserve migration voltage and offset voltage in the same direction is respectively obtained afterwards;
S2:Bias sampling and compensation circuit are sampled the reserve migration voltage and offset voltage in the same direction respectively, point Do not stored and compensation deals after feed back to the input of the discharge circuit, the discharge circuit is according to institute Offset, secondary side voltage and the system given voltage of bias sampling and compensation circuit are stated, calculation process is carried out The reserve migration voltage after compensation and the offset voltage in the same direction after compensation are respectively obtained afterwards, complete single reverse Slide-back and single slide-back in the same direction, the reserve migration voltage is put by control circuit while sampling Drive circuit is sent to after big, the drive circuit sends respective drive order to single-phase DC motor;
S3:Repeat step S2 several times, until compensation after the reserve migration voltage and compensation after it is described Offset voltage in the same direction tends to convergence, judges whether the convergency value of the offset voltage in the same direction after compensation is in In the range of the offset voltage in the same direction of system maximum tolerance, if otherwise system reports an error;If then continuing to judge to mend Whether the convergency value of the reserve migration voltage after repaying is in the scope of the reserve migration voltage of system maximum tolerance It is interior, if otherwise system reports an error, if then compensating successfully.
Further, in the step S2, the bias sampling and compensation circuit are to the reserve migration voltage With offset voltage in the same direction stored and compensation deals after, first wait setting time, treat that the system is abundant Offset is fed back to the input of the discharge circuit again after response.
Further, the setting time t needs to meet:
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
Further, in the step S1, it is specially:The secondary side voltage sequentially passes through the amplifier electricity Feedback voltage, output to the amplifier are obtained after first, second instrument discharge circuit calculation process in road In 3rd instrument discharge circuit of circuit, the 3rd instrument discharge circuit is by the feedback voltage and the system System given voltage compares computing and obtains initial reserve migration voltage;The secondary side voltage is transfused to simultaneously The 4th instrument discharge circuit into the discharge circuit, initial skew in the same direction is obtained after carrying out calculation process Voltage.
Further, in the step S2, it is specially:The bias sampling and compensation circuit include ADC Circuit, Programmadle logic device and DAC-circuit, the adc circuit sampling reserve migration voltage, Sampled value is sent in the Programmadle logic device and compensates processing and stores, and passes through the DAC Exported after processing of circuit to the input of the second instrument discharge circuit, the second instrument discharge circuit will The offset received carries out feeding back to the 3rd instrument amplifier electricity after calculation process with the secondary side voltage The value of feedback received and system given voltage are carried out calculation process and obtained by road, the 3rd instrument discharge circuit Reserve migration voltage after to compensation, completes the compensation of single reverse biased;
The adc circuit sampling offset voltage in the same direction, the editable device is sent to by sampled value simultaneously Processing is compensated in part and is stored, and is transported by being exported after DAC-circuit processing to the 4th instrument Discharge the input on road, and the 4th instrument discharge circuit is by the offset received and the secondary side voltage The offset voltage in the same direction after calculation process is compensated is carried out, single slide-back in the same direction is completed.
Further, in step S2, the adc circuit samples the reserve migration voltage specially by institute K1 times of reserve migration voltage amplification is stated, the Programmadle logic device compensates processing specifically, will be from institute It is added again with the preceding voltage once stored after k2 times of voltage amplification for stating adc circuit reception, passes through the DAC Processing of circuit is specially that the voltage received from the Programmadle logic device is amplified into k3 times again, and wherein k1 is The amplifier proportionality coefficient of adc circuit, the amplifier proportionality coefficient that k3 is DAC-circuit, k2 is adc circuit The proportionality coefficient changed between DAC-circuit, and k1*k2*k3 span is 1~1.05.
Further, in step S2, the adc circuit samples the offset voltage in the same direction specially by institute State offset voltage in the same direction and amplify k4 times, the Programmadle logic device compensates processing specifically, will be from institute It is added again with the preceding voltage once stored after k5 times of voltage amplification for stating adc circuit reception, passes through the DAC Processing of circuit is specially that the voltage received from the Programmadle logic device is amplified into k6 times again, and wherein k4 is The amplifier proportionality coefficient of adc circuit, the amplifier proportionality coefficient that k6 is DAC-circuit, k5 is adc circuit The proportionality coefficient changed between DAC-circuit, and k4*k5*k6 span is 1~1.05.
The servo-control system and its method with slide-back that the present invention is provided, by setting discharge circuit Bias compensation circuit in the same direction and reverse biased compensation circuit are constituted with bias sampling and compensation circuit, for electric current Sensor output secondary side voltage simultaneously carry out reverse biased compensation and slide-back in the same direction, the present invention for Reverse biased and bias carries out difference compensation in the same direction that current sensor is produced, are adopted from the output end of discharge circuit Collect bias data, be stored in after calculating is handled in Programmadle logic device, and update compensation and export, Cumulative offset voltage is constantly updated, finite number of time compensation is carried out to each bias, it is tended to convergence. The present invention can carry out real-Time Compensation automatically in system electrification, without the hardware circuit mechanically debugged, Simple to operate, accuracy is high, and compensation is comprehensive, free from the influence of the external environment, greatly improves the stabilization of system Property.
Brief description of the drawings
Fig. 1 is the control mode schematic diagram for many closed loops that existing servo-control system is used;
Fig. 2 is the structural representation of servo-control system one specific embodiment of the present invention with slide-back;
Fig. 3 is the structure of reverse biased compensation circuit of the present invention and the specific embodiment of bias compensation circuit in the same direction one Schematic diagram.
Shown in figure:1st, discharge circuit;101~104, first~the 4th instrument discharge circuit;2nd, electricity is controlled Road;3rd, drive circuit;4th, single-phase DC motor;5th, current sensor;6th, bias sampling and compensation electricity Road;601st, adc circuit;602nd, Programmadle logic device;603rd, DAC-circuit;7th, bus direct current Power supply.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings:
As Figure 2-3, the present invention provides a kind of servo-control system with slide-back, is electric current ring system System provides slide-back, including the discharge circuit 1, control circuit 2, drive circuit 3, single-phase being sequentially connected Direct current generator 4 and current sensor 5, it is preferred that it is described control circuit 2 be PI (proportional integral, Proportional integration) circuit, the drive circuit 3 is PWM drive circuit, and control circuit 2 produces PWM ripples PWM drive circuit 3 is controlled, the servo-control system with slide-back of the invention also includes inclined Pressure sampling and compensation circuit 6 and bus dc source 7, the output end of the bus dc source 7 are connected to institute State the input of drive circuit 3.The input of the discharge circuit 1 is connected to the output of current sensor 5 End, the input of the control circuit 2 is connected to the output end of the discharge circuit 1, the bias sampling And the input of compensation circuit 6 is connected between the discharge circuit 1 and control circuit 2, the bias is adopted The output end of sample and compensation circuit 6 connects the input of the discharge circuit 1, the discharge circuit 1 and partially Pressure sampling and compensation circuit 6 constitute bias compensation circuit in the same direction and reverse biased compensation circuit.Specifically, anti- To slide-back it is handled for the secondary side voltage that system given voltage is exported with current sensor 5 by amplifier Slide-back between the feedback voltage obtained afterwards, its reverse biased for including current sensor 5 and amplifier electricity The bias that road 1 is produced.It is absolute between the secondary side voltage that slide-back in the same direction exports for current sensor 5 The bias that slide-back, its bias in the same direction for including current sensor 5 and discharge circuit 1 are produced.
As shown in figure 3, the discharge circuit 1 include the discharge circuit include first, second, third, 4th instrument discharge circuit 101,102,103,104, the input of the first instrument discharge circuit 101 It is connected to the output end of the current sensor 5, the input difference of the second instrument discharge circuit 102 Connect output end and bias sampling and the output of compensation circuit 6 of the first instrument discharge circuit 101 End, the input of the 3rd instrument discharge circuit 103 connects the second instrument discharge circuit 102 respectively Output end and system given voltage, the output end of the 3rd instrument discharge circuit 103 connects the control The input of the input of circuit 2, the bias sampling and compensation circuit 6 is connected to the 3rd instrument fortune Discharge road 103 and control circuit 2 between, the first, second, third instrument discharge circuit 101,102, 103 constitute reverse biased compensation circuit with bias sampling and compensation circuit 6;The 4th instrument discharge circuit 104 input connects the output end and bias sampling and compensation circuit of the current sensor 5 respectively Output end, the output end of the 4th instrument discharge circuit 104 and the bias sampling and compensation circuit 6 Input is connected, and the 4th instrument discharge circuit 104 and bias sampling and compensation circuit 6 are constituted in the same direction partially Press compensation circuit.
Specifically, the secondary side voltage that current sensor 5 is exported passes through the computing of first instrument discharge circuit 101 Processing, specially does difference operation, afterwards, and the offset voltage exported with bias sampling and compensation circuit 6 is (every Offset voltage is 0) together by the computing of second instrument discharge circuit 102 before cycle, compensation started for the first time Exported after reason into the 3rd instrument discharge circuit 103 and computing is compared with system given voltage obtain reversely partially Voltage is moved, meanwhile, the bias sampling and compensation circuit 6 gather the reserve migration voltage, are stored And exported after compensation deals to the input of the second instrument discharge circuit 102, complete single reverse biased Compensation;As shown in figure 3, the secondary side voltage passes through the calculation process of the 4th instrument discharge circuit 104, Specially do and computing, offset voltage in the same direction is directly obtained afterwards, the bias sampling and compensation circuit 6 are adopted Collect the offset voltage in the same direction, stored and compensation deals after export to the 4th instrument discharge circuit 104 Input, complete single slide-back in the same direction.
Fig. 3 is continued referring to, the bias sampling and compensation circuit 6 include the ADC (analog being sequentially connected To digital converter, analog-to-digital conversion) circuit 601, Programmadle logic device 602 and DAC (digital to Analog converter, digital-to-analogue conversion) circuit 603, three is integrated on Driver Card, unified power supply, institute The input for stating adc circuit 601 connects the 3rd instrument discharge circuit 103, the 4th instrument discharge circuit 104 output end, the output end of the DAC-circuit 603 is respectively connecting to described second, the 4th instrument fortune The input on electric discharge road 102,104.The bias sampling and compensation circuit 6 also include RC low pass filters, The input of the RC low pass filters is connected to the 3rd instrument discharge circuit 103 and control circuit 2 Between, the output end of the RC low pass filters is connected to the input of the adc circuit 601, passes through RC low pass filters are filtered before adc circuit 601 is acquired to reserve migration voltage to it, Place to go high-frequency noise interference.
It is preferred that, the Programmadle logic device 602 is FPGA (Field-Programmable Gate Array, i.e. field programmable gate array) register, it is preferred that the He of the 3rd instrument discharge circuit 103 The output end of 4th instrument discharge circuit 104 has been also respectively connected with the device that reports an error (not marked in figure).Specifically, Adc circuit 601 is stored in Programmadle logic device after gathering reserve migration voltage and offset voltage in the same direction In 602, Programmadle logic device 602 compensates processing, Zhi Houtong by backoff algorithm to the voltage of storage Cross the input progress that DAC-circuit 603 is correspondingly outputting to the second, the 4th instrument discharge circuit 102,104 Compensation, the backoff algorithm is that the reserve migration voltage and offset voltage in the same direction obtained to sampling amplifies K times, K Span be 1~1.05, make system slide-back tend to convergence, it is ensured that the stability of a system.The present invention In, bias compensation circuit in the same direction and reverse biased compensation circuit are used in conjunction with adc circuit 601, editable and patrolled Device 602 and DAC-circuit 603 are collected, two compensation circuits utilize adc circuit 601, Programmadle logic device Different passages in part 602 and the circuit chip of DAC-circuit 603, both do not interfere with each other, and save circuit device Part, improves resource utilization.
The present invention also provides a kind of slide-back method based on current sensor, comprises the following steps:
S1:The biphase current i of the detection single-phase DC of current sensor 5 motor 4A、iB, it is converted into secondary side electricity Press uA、uBAfter export to discharge circuit 1, the discharge circuit 1 is by the secondary side voltage uA、uBAnd system Given voltage VSETCarry out respectively obtaining initial reserve migration voltage and offset voltage in the same direction after calculation process, Specifically, the secondary side voltage uA、uBSequentially pass through first, second instrument in the discharge circuit 1 Feedback voltage, output to the 3rd of the discharge circuit 1 are obtained after discharge circuit 101,102 calculation process In instrument discharge circuit 102, the 3rd instrument discharge circuit 103 is by the feedback voltage and the system Given voltage VSETCompare computing and obtain initial reserve migration voltage;While the secondary side voltage uA、uB The 4th instrument discharge circuit 104 in the discharge circuit 1 is input to, carries out obtaining initial after calculation process Offset voltage in the same direction.As shown in Figure 1;Biphase current iA、iB, it is equal in magnitude in theory, in opposite direction, Similarly secondary side voltage uA、uBEqual in magnitude, in opposite direction, the presence yet with current sensor 5 is held Voltage deviation, including skew and reserve migration in the same direction are easily brought, skew in the same direction is secondary side voltage uA、uBTogether Shi Zeng great or reduction, reserve migration are secondary side voltage uA、uBOne of increase, another reduction.
S2:Bias sampling and compensation circuit 6 are sampled the reserve migration voltage and offset voltage in the same direction respectively, Stored respectively and compensation deals after feed back to the input of the discharge circuit 1, the discharge circuit 1 According to the bias sampling and offset, the secondary side voltage u of compensation circuit 6A、uBWith system given voltage VSET, carry out respectively obtaining the skew in the same direction electricity after the reserve migration voltage after compensation and compensation after calculation process Pressure, completes the compensation of single reverse biased and single slide-back in the same direction, reserve migration electricity while sampling Pressure is sent to drive circuit 3 after control circuit 2 amplifies, and the drive circuit 3 sends respective drive order To single-phase DC motor 4.Specifically, it is described bias sampling and compensation circuit include adc circuit 601, can Editorial logic device 602 and DAC-circuit 603, the adc circuit 601 are sampled reserve migration electricity Pressure, sampled value is sent in the Programmadle logic device 602 and compensates processing and stores, and is passed through The DAC-circuit 603 is exported after handling to the input of the second instrument discharge circuit 102, and described the Two instrument discharge circuits 102 are by the offset received and the secondary side voltage uA、uBCarry out calculation process After feed back to the 3rd instrument discharge circuit 103, the 3rd instrument discharge circuit 103 is anti-by what is received Feedback value and system given voltage VSETThe reserve migration voltage after calculation process is compensated is carried out, single is completed anti- To slide-back;
The offset voltage the V in the same direction while adc circuit 601 is sampled5, by sampled value be sent to it is described can Editor device 602 in compensate processing and store, and by the DAC-circuit 603 handle after export to The input of the 4th instrument discharge circuit 104, the 4th instrument discharge circuit 104 will be received Offset and the secondary side voltage uA、uBThe offset voltage in the same direction after calculation process is compensated is carried out, it is complete Into single slide-back in the same direction.
The adc circuit 601 samples the reserve migration voltage specially by the reserve migration voltage amplification K1 times, the Programmadle logic device 602 compensates processing specifically, will be from the adc circuit 601 It is added again with the preceding voltage once stored after k2 times of the voltage amplification of reception, passes through the DAC-circuit 603 Processing is specially that the voltage received from the Programmadle logic device 602 is amplified into k3 times again, and wherein k1 is The amplifier proportionality coefficient of adc circuit, the amplifier proportionality coefficient that k3 is DAC-circuit, k2 is adc circuit The proportionality coefficient changed between DAC-circuit, and k1*k2*k3 span is 1~1.05.
The adc circuit 601 samples the offset voltage in the same direction specially by the offset voltage amplification in the same direction K4 times, the Programmadle logic device 602 compensates processing specifically, will be from the adc circuit 601 It is added again with the preceding voltage once stored after k5 times of the voltage amplification of reception, passes through the DAC-circuit 603 Processing is specially that the voltage received from the Programmadle logic device 602 is amplified into k6 times again, and wherein k4 is The amplifier proportionality coefficient of adc circuit, the amplifier proportionality coefficient that k6 is DAC-circuit, k5 is adc circuit The proportionality coefficient changed between DAC-circuit, and k4*k5*k6 span is 1~1.05.
k1Selection maximum to utilize the full scale of adc circuit 601, the full scale be 10V, i.e. system most Big offset voltage in the same direction | V4|.k1=10, due to the reserve migration voltage that system is maximum | V4| understand, therefore can be true Determine k1Value, k2For fixed constant, same k4Selection maximum to utilize the full scale of adc circuit 601, should Full scale is 10V, i.e. the maximum offset voltage in the same direction of system | V5|.k4=10, due to system it is maximum it is in the same direction partially Move voltage | V5| understand, therefore can determine that k4Value;k5For permanent number
The bias sampling and 6 pairs of the compensation circuit reserve migration voltage and offset voltage in the same direction are stored And after compensation deals, setting time is first waited, offset is fed back to again after the system is sufficiently responded to The input of the discharge circuit.
The setting time t needs to meet:
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
S3:Repeat step S2 several times, until compensation after the reserve migration voltage and compensation after it is described Offset voltage in the same direction tends to convergence, judges whether the convergency value of the offset voltage in the same direction after compensation is in In the range of the offset voltage in the same direction of system maximum tolerance, if otherwise system reports an error;If then continuing to judge to mend Whether the convergency value of the reserve migration voltage after repaying is in the scope of the reserve migration voltage of system maximum tolerance It is interior, if otherwise system reports an error, if then compensating successfully.
In the present embodiment, repeat step S2 tri- times just completes once time single of complete compensation cycle, i.e., three Compensate as a complete compensation cycle, and after complete compensation cycle is completed once, it is responded in system Between, by biasing 601 pairs of the adc circuit reserve migration voltage V in sampling and compensation circuit 64With it is same To offset voltage V5Sampled respectively, obtain remaining reverse biased and remaining bias, and both are divided in the same direction Not with the patient maximum reverse bias of system institute | Ve| and maximum bias in the same direction | Vd| compare, if described remaining anti- Biased to the maximum reverse of bias≤system tolerant | Ve|, and the maximum of the remaining bias≤system tolerant in the same direction Bias, then compensate successfully in the same direction, otherwise compensation failure, and system reports an error.
In the present embodiment, for reverse biased compensation cycle, one group of actual parameter, k are given1=4.06, k2=0.25, k3=1.026, k1·k2·k3=1.0414 be slightly larger than 1, for each single compensate, collection it is reverse The data such as tables 1 such as bias, the data stored in PLD, the bias compensated every time and remaining bias It is shown.
The bias compensated every time in 1 one reverse biased compensation cycles of table and remaining bias data
As can be seen from the above table, system tends to convergence, ADC to 3 separate compensations (i.e. once complete compensation) afterwards The sample obtained remaining reverse biased of circuit 601 is | -0.0004V4|≤|Ve|, that is, the Contrary compensation cycle is completed, Wait and enter next reverse biased compensation cycle.
In embodiment, for a complete compensation cycle in the same direction, one group of actual parameter is also given: k4=33.28, k5=0.25, k6=0.123, k4·k5·k6=1.0234 are slightly larger than 1, because bias ratio is reverse in the same direction Bias is small, is the maximum full scale using adc circuit 601, so k4Compare k1Greatly.
Bias and remaining bias data that 2 one, table is compensated every time in the slide-back cycle in the same direction
As can be seen from the above table, system tends to receive after 3 separate compensations (i.e. once complete compensation cycle) Hold back, adc circuit 603 is sampled, and bias is obtained residue in the same direction | -0.0001V5|≤|Vd|, i.e. this time compensation in the same direction Cycle completes, and waits and enters next slide-back cycle in the same direction.
The servo-control system and its method with slide-back that the present invention is provided, by setting discharge circuit 1 Bias compensation circuit in the same direction and reverse biased compensation circuit are constituted with bias sampling and compensation circuit 6, for electricity The secondary side voltage that flow sensor 5 is exported carries out reverse biased compensation and slide-back in the same direction, the present invention simultaneously The reverse biased produced for current sensor 5 and discharge circuit 1 and bias progress difference compensation in the same direction, from The output end collection bias data of discharge circuit 1, are stored in Programmadle logic device after calculating is handled It is interior, and update compensation output, i.e., cumulative offset voltage is constantly updated, limited number of time is carried out to each bias Number compensation, makes it tend to convergence.The present invention can carry out real-Time Compensation automatically in system electrification, without The hardware circuit mechanically debugged, simple to operate, accuracy is high, and compensation is comprehensive, not by the shadow of external environment Ring, greatly improve the stability of system.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as Prompting, should not limit protection scope of the present invention.Various provinces are carried out without departing from the spirit and scope of the present invention Slightly, displacement and change should be included within the scope of the present invention.

Claims (16)

1. a kind of servo-control system with slide-back, it is characterised in that including the amplifier being sequentially connected Circuit, control circuit, drive circuit, single-phase DC motor and current sensor, in addition to bias sampling and Compensation circuit, the input of the discharge circuit is connected to the output end of current sensor, the control circuit Input be connected to the output end of the discharge circuit, the input of the bias sampling and compensation circuit connects It is connected between the discharge circuit and control circuit, the output end connection institute of the bias sampling and compensation circuit The input of discharge circuit is stated, the discharge circuit and bias sampling and compensation circuit constitute slide-back in the same direction Circuit and reverse biased compensation circuit.
2. servo-control system according to claim 1, it is characterised in that the discharge circuit includes First, second, third, fourth instrument discharge circuit, the input connection of the first instrument discharge circuit To the output end of the current sensor, the input of the second instrument discharge circuit connects described the respectively The output end of the output end of one instrument discharge circuit and bias sampling and compensation circuit, the 3rd instrument The input of discharge circuit connects the output end and system given voltage of the second instrument discharge circuit respectively, The input of the output end connection control circuit of the 3rd instrument discharge circuit, bias sampling and The input of compensation circuit is connected between the 3rd instrument discharge circuit and control circuit, described first, Second, third instrument discharge circuit and bias sampling and compensation circuit constitute reverse biased compensation circuit;It is described The input of 4th instrument discharge circuit connects output end and the bias sampling of the current sensor respectively And the output end of compensation circuit, the output end of the 4th instrument discharge circuit and the bias sampling and compensation The input connection of circuit, the 4th instrument discharge circuit and bias sampling and compensation circuit constitute inclined in the same direction Press compensation circuit.
3. servo-control system according to claim 2, it is characterised in that the bias sampling and benefit Repay adc circuit, Programmadle logic device and DAC-circuit that circuit includes being sequentially connected, the ADC electricity The input on road connects the output end of the three, the 4th instrument discharge circuit respectively, the DAC-circuit Output end connects the described second, input of the 4th instrument discharge circuit respectively.
4. servo-control system according to claim 3, it is characterised in that the bias sampling and benefit Repaying circuit also includes RC low pass filters, the inputs of the RC low pass filters is connected to the described 3rd, Between instrument discharge circuit and control circuit, the output end of the RC low pass filters is connected to the ADC The input of circuit.
5. servo-control system according to claim 3, it is characterised in that the Programmadle logic device Part is FPGA registers.
6. servo-control system according to claim 2, it is characterised in that the 3rd instrument amplifier The output end of circuit and the 4th instrument discharge circuit has been also respectively connected with the device that reports an error.
7. servo-control system according to claim 1, it is characterised in that also including bus direct current Source, the output end of the bus dc source is connected to the input of the drive circuit.
8. the slide-back system according to claim 1 based on current sensor, it is characterised in that It is described to control circuit to be PI circuits.
9. the slide-back system according to claim 1 based on current sensor, it is characterised in that The drive circuit is PWM drive circuit.
10. a kind of slide-back method for servo-control system, it is characterised in that including following step Suddenly:
S1:Current sensor detects the biphase current of single-phase DC motor, is converted into exporting after secondary side voltage To discharge circuit, the discharge circuit by the secondary side voltage and system given voltage carry out calculation process it Initial reserve migration voltage and offset voltage in the same direction is respectively obtained afterwards;
S2:Bias sampling and compensation circuit are sampled the reserve migration voltage and offset voltage in the same direction respectively, point Do not stored and compensation deals after feed back to the input of the discharge circuit, the discharge circuit is according to institute Offset, secondary side voltage and the system given voltage of bias sampling and compensation circuit are stated, calculation process is carried out The reserve migration voltage after compensation and the offset voltage in the same direction after compensation are respectively obtained afterwards, complete single reverse Slide-back and single slide-back in the same direction, the reserve migration voltage is put by control circuit while sampling Drive circuit is sent to after big, the drive circuit sends respective drive order to single-phase DC motor;
S3:Repeat step S2 several times, until compensation after the reserve migration voltage and compensation after it is described Offset voltage in the same direction tends to convergence, judges whether the convergency value of the offset voltage in the same direction after compensation is in In the range of the offset voltage in the same direction of system maximum tolerance, if otherwise system reports an error;If then continuing to judge to mend Whether the convergency value of the reserve migration voltage after repaying is in the scope of the reserve migration voltage of system maximum tolerance It is interior, if otherwise system reports an error, if then compensating successfully.
11. slide-back method according to claim 10, it is characterised in that in the step S2, The bias sampling and compensation circuit are stored and compensated to the reserve migration voltage and offset voltage in the same direction After processing, setting time is first waited, offset is fed back into the fortune again after the system is sufficiently responded to The input on electric discharge road.
12. slide-back method according to claim 11, it is characterised in that the setting time T needs to meet:
<mrow> <mi>t</mi> <mo>&gt;</mo> <msub> <mi>t</mi> <mi>r</mi> </msub> <mo>=</mo> <mfrac> <mn>0.35</mn> <msub> <mi>f</mi> <mi>H</mi> </msub> </mfrac> </mrow>
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
13. slide-back method according to claim 10, it is characterised in that in the step S1, Specially:The secondary side voltage sequentially passes through first, second instrument discharge circuit in the discharge circuit Feedback voltage is obtained after calculation process, is exported into the 3rd instrument discharge circuit of the discharge circuit, institute State the 3rd instrument discharge circuit the feedback voltage and the system given voltage are compared into computing and obtain initially Reserve migration voltage;The secondary side voltage is input to the 4th instrument fortune in the discharge circuit simultaneously Electric discharge road, initial offset voltage in the same direction is obtained after carrying out calculation process.
14. slide-back method according to claim 13, it is characterised in that in the step S2, Specially:The bias sampling and compensation circuit include adc circuit, Programmadle logic device and DAC electricity Road, the adc circuit sampling reserve migration voltage, the Programmadle logic device is sent to by sampled value Processing is compensated in part and is stored, and is transported by being exported after DAC-circuit processing to the second instrument Discharge the input on road, and the second instrument discharge circuit is by the offset received and the secondary side voltage Carry out feeding back to the 3rd instrument discharge circuit after calculation process, the 3rd instrument discharge circuit will be received To value of feedback and system given voltage carry out the reserve migration voltage after calculation process is compensated, complete single Secondary reverse biased compensation;
The adc circuit sampling offset voltage in the same direction, the editable device is sent to by sampled value simultaneously Processing is compensated in part and is stored, and is transported by being exported after DAC-circuit processing to the 4th instrument Discharge the input on road, and the 4th instrument discharge circuit is by the offset received and the secondary side voltage The offset voltage in the same direction after calculation process is compensated is carried out, single slide-back in the same direction is completed.
15. slide-back method according to claim 14, it is characterised in that in step S2, The adc circuit samples the reserve migration voltage specially by k1 times of the reserve migration voltage amplification, The Programmadle logic device compensates processing specifically, the voltage amplification that will be received from the adc circuit Be added again with the preceding voltage once stored after k2 times, by the DAC-circuit handle be specially will from it is described can The voltage that editorial logic device is received amplifies k3 times again, wherein k1 be adc circuit amplifier proportionality coefficient, K3 is the amplifier proportionality coefficient of DAC-circuit, and k2 is the ratio changed between adc circuit and DAC-circuit Coefficient, and k1*k2*k3 span is 1~1.05.
16. slide-back method according to claim 14, it is characterised in that in step S2, institute State adc circuit and sample the offset voltage in the same direction specially by k4 times of the offset voltage amplification in the same direction, institute State Programmadle logic device and compensate processing specifically, the voltage amplification k5 that will be received from the adc circuit It is added again with the preceding voltage once stored after times, it is specially that will be compiled from described to be handled by the DAC-circuit The voltage for collecting logical device reception amplifies k6 times again, and wherein k4 is amplifier proportionality coefficient, the k6 of adc circuit For the amplifier proportionality coefficient of DAC-circuit, k5 is the ratio system changed between adc circuit and DAC-circuit Number, and k4*k5*k6 span is 1~1.05.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108896816A (en) * 2018-08-15 2018-11-27 惠州市蓝微电子有限公司 A kind of high precision electro current detection circuit of brshless DC motor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007028809A (en) * 2005-07-19 2007-02-01 Meidensha Corp Offset voltage detector of pwm converter
CN103229406A (en) * 2010-11-24 2013-07-31 松下电器产业株式会社 DC power source device
CN103248345A (en) * 2013-05-23 2013-08-14 成都芯进电子有限公司 Temperature compensating circuit and temperature compensating method for switch-type Hall sensor
CN104335682A (en) * 2012-05-04 2015-02-04 皇家飞利浦有限公司 Offset compensation in driving circuits
US20150035510A1 (en) * 2013-08-01 2015-02-05 Rohm Co., Ltd. Switching power supply control circuit
CN104950158A (en) * 2015-06-17 2015-09-30 深圳市航盛电子股份有限公司 Current signal acquisition circuit and current signal acquisition system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007028809A (en) * 2005-07-19 2007-02-01 Meidensha Corp Offset voltage detector of pwm converter
CN103229406A (en) * 2010-11-24 2013-07-31 松下电器产业株式会社 DC power source device
CN104335682A (en) * 2012-05-04 2015-02-04 皇家飞利浦有限公司 Offset compensation in driving circuits
CN103248345A (en) * 2013-05-23 2013-08-14 成都芯进电子有限公司 Temperature compensating circuit and temperature compensating method for switch-type Hall sensor
US20150035510A1 (en) * 2013-08-01 2015-02-05 Rohm Co., Ltd. Switching power supply control circuit
CN104950158A (en) * 2015-06-17 2015-09-30 深圳市航盛电子股份有限公司 Current signal acquisition circuit and current signal acquisition system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108896816A (en) * 2018-08-15 2018-11-27 惠州市蓝微电子有限公司 A kind of high precision electro current detection circuit of brshless DC motor
CN108896816B (en) * 2018-08-15 2020-12-01 惠州市蓝微电子有限公司 High-precision current detection circuit of brushless direct current motor

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