CN107291043B - A kind of servo-control system and its slide-back method with slide-back - Google Patents
A kind of servo-control system and its slide-back method with slide-back Download PDFInfo
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- CN107291043B CN107291043B CN201610193276.5A CN201610193276A CN107291043B CN 107291043 B CN107291043 B CN 107291043B CN 201610193276 A CN201610193276 A CN 201610193276A CN 107291043 B CN107291043 B CN 107291043B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/33—Director till display
- G05B2219/33218—Motor encoders, resolvers on common bus with drives, servo controllers
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Abstract
The invention discloses a kind of servo-control system with slide-back and its slide-back methods, the slide-back system includes sequentially connected operational amplifier circuit, control circuit, driving circuit, single-phase DC motor and current sensor, it further include bias sampling and compensation circuit, the input terminal of operational amplifier circuit is connected to the output end of current sensor, the input terminal of control circuit is connected to the output end of operational amplifier circuit, the input terminal of bias sampling and compensation circuit is connected between operational amplifier circuit and control circuit, the input terminal of the output end connection operational amplifier circuit of bias sampling and compensation circuit, operational amplifier circuit and bias sampling and compensation circuit constitute bias compensation circuit in the same direction and reverse biased compensation circuit.Slide-back system and method provided by the invention based on current sensor, can carry out real-time compensation automatically in system electrification, not add the hardware circuit mechanically debugged, it is easy to operate, free from the influence of the external environment, accuracy is high, improves the stability of system.
Description
Technical field
The present invention relates to the control fields of motor, and in particular to a kind of servo-control system with slide-back and its
Slide-back method.
Background technique
Litho machine is the key equipment in chip manufacturing industry, and the development of integrated circuit and the development of litho machine cease manner of breathing
It closes.Wherein accurate transmission technology is played an increasingly important role as a key technology in litho machine.In litho machine pair
Before silicon wafer carries out processing imprinting, the accurate positioning of silicon wafer is most important, and accurate Transmission system is real using servo-controlled mode
The accurate positioning of existing silicon wafer, therefore servo-controlled accuracy determines the quality of production technology and product, any subtle displacement
Deviation all can cause tremendous influence to the quality of product.
As shown in Figure 1, servo-control system generally uses the control mode of more closed loops, ring successively includes position from outside to inside
Ring, speed ring and electric current loop.Using speed, position and the electric current of current sensor detection motor, and compared with given reference quantity,
Realize PWM driving to reach servo-controlled purpose by corresponding controller.The wherein control process of electric current loop are as follows: utilize electricity
The feedback current of flow sensor and the practical difference between constant current, put through overcurrent controller (generally PI controller)
Greatly, with this come achieved the purpose that by the duty ratio of the switch control PWM of field-effect tube control motor.However in feedback procedure
It is middle to need through over-current sensor sampling, the processing of various operational amplifier circuits to lead to that current sensor is mingled in the electric current of feedback
And operational amplifier circuit bring voltage deviation, although these variation very littles, after the amplification of PI controller, very little
Variation can also cause the malfunction of field-effect tube, change the duty ratio of PWM, gently then lead to lower turn of servo motor standby mode
Son is shaken, and collapse that is heavy then leading to entire control system seriously affects servo-controlled accuracy and stability, becomes light
The significant problem that can not ignore in the quarter accurate Transmission system such as machine work stage.
The method for generalling use the mechanical hardware circuit compensation bias such as adjustable resistance in the prior art, it is adjustable by adjusting
Resistance achievees the purpose that adjust bias.However this method needs debugging manually, debugging bothers, and with temperature change, hardware
The influence of the extraneous factors such as aging, offset voltage can change, and furthermore mechanical oscillation can also change the size of adjustable resistance, from
And reduce the reliability of this method.
It a kind of is compensated for three-phase motor current sensor deviation in view of the above-mentioned problems, proposing in the prior art
Device and method.This method first determines whether motor PWM control and interrupt status, the detection current sensor when PWM is interrupted
Electric current, the as bias of current sensor.Pass through this as benchmark bias frequently or every some cycles to dynamical system
It compensates, major part deviation caused by current sensor can be compensated, but the method still has following disadvantage: first is that should
Compensating proportion COEFFICIENT K=1 (bias sampled is the bias compensated) that method uses, and single compensation is carried out,
However the bias of the bias and compensation sampled in hardware circuit can not absolutely meet the relationship of 1:1, so remaining inclined
Pressure can not determine, to reduce control precision；Second is that this method needs to carry out individually each phase current in three-phase motor
Compensation, each compensation system must be independent, increase the complexity of system；It is caused third is that this method ignores inverter in system
To phase difference between constant current and sample rate current, the accuracy of benchmark bias detected is influenced, to affect to electricity
The control precision of machine.
It has also been proposed in the prior art later a kind of for each phase current sensor current feedback of three-phase motor and given electricity
Error between stream, the method compensated respectively by vector controlled.I.e. by the symchronizing filter of design isolated DC component, pass through
The size and phase for measuring each phase current measure the harmonic distortion of each phase current respectively, then carry out to limited distortion harmonic wave anti-
Phase, and be added into current sensor, so that the DC component of symchronizing filter output is reduced to zero, with this harmonic carcellation reality
Existing slide-back.However the direction is compensated only for the harmonic wave introduced in current sensor, but not true due to introducing harmonic wave
It is fixed, so compensation harmonic number and values of factor K difficulty determine, and mended just for one of those or several low-order harmonics
It repays, it is helpless to remaining most of uncertain distortion harmonic wave, and symchronizing filter cannot quickly isolate DC component.This
Outer this method has ignored the error during 2/3 transformation, 2/3 inverse transformation and static coordinate and rotating coordinate transformation, and relies on
Symchronizing filter, compensation method are complicated, it is difficult to realize, and the method is only for three-phase motor, and must use vector controlled side
Method, it is not applicable to other motors and control method, therefore there is certain limitation.
Summary of the invention
It is above-mentioned to solve the present invention provides a kind of servo-control system with slide-back and its slide-back method
Technical problem.
In order to solve the above-mentioned technical problem, the technical scheme is that a kind of SERVO CONTROL system with slide-back
System, including sequentially connected operational amplifier circuit, control circuit, driving circuit, single-phase DC motor and current sensor, further include inclined
Pressure sampling and compensation circuit, the input terminal of the operational amplifier circuit are connected to the output end of current sensor, the control circuit
Input terminal is connected to the output end of the operational amplifier circuit, and the bias samples and the input terminal of compensation circuit is connected to the amplifier
Between circuit and control circuit, the output end of the bias sampling and compensation circuit connects the input terminal of the operational amplifier circuit, institute
It states operational amplifier circuit and bias sampling and compensation circuit constitutes bias compensation circuit in the same direction and reverse biased compensation circuit.
Further, the operational amplifier circuit includes the first, second, third, fourth instrument operational amplifier circuit, the first instrument
The input terminal of operational amplifier circuit is connected to the output end of the current sensor, the input terminal difference of the second instrument operational amplifier circuit
The output end and the bias for connecting the first instrument operational amplifier circuit sample and the output end of compensation circuit, the third instrument
The input terminal of operational amplifier circuit is separately connected the output end and system given voltage of the second instrument operational amplifier circuit, the third instrument
The output end of table operational amplifier circuit connects the input terminal of the control circuit, the bias sampling and the input terminal connection of compensation circuit
To between the third instrument operational amplifier circuit and control circuit, the first, second, third instrument operational amplifier circuit and bias are sampled
And compensation circuit constitutes reverse biased compensation circuit；The input terminal of the 4th instrument operational amplifier circuit is separately connected the electric current and passes
The output end of the output end of sensor and bias sampling and compensation circuit, the output end of the 4th instrument operational amplifier circuit and institute
It states bias sampling and the input terminal connection of compensation circuit, the 4th instrument operational amplifier circuit and bias sampling and compensation circuit is constituted
Bias compensation circuit in the same direction.
Further, bias sampling and compensation circuit include sequentially connected adc circuit, Programmadle logic device and
DAC circuit, the input terminal of the adc circuit are separately connected the output end of the third, the 4th instrument operational amplifier circuit, the DAC
The output end of circuit is separately connected the input terminal of described second, the 4th instrument operational amplifier circuit.
Further, the bias sampling and compensation circuit further include RC low-pass filter, the RC low-pass filter
Input terminal is connected between the third, instrument operational amplifier circuit and control circuit, the output end connection of the RC low-pass filter
To the input terminal of the adc circuit.
Further, the Programmadle logic device is FPGA register.
Further, report is also respectively connected in the output end of the third instrument operational amplifier circuit and the 4th instrument operational amplifier circuit
Misloading is set.
It further, further include bus DC power supply, the output end of the bus DC power supply is connected to the driving electricity
The input terminal on road.
Further, the control circuit is PI circuit.
Further, the driving circuit is PWM drive circuit.
The present invention also provides a kind of slide-back methods for servo-control system, comprising the following steps:
S1: current sensor detects the biphase current of single-phase DC motor, exports after being converted into secondary side voltage to amplifier
Circuit, the operational amplifier circuit will respectively obtain initial after the secondary side voltage and system given voltage progress calculation process
Reserve migration voltage and offset voltage in the same direction；
S2: bias sampling and compensation circuit sample the reserve migration voltage and offset voltage in the same direction respectively, carry out respectively
The input terminal of the operational amplifier circuit is fed back to after storage and compensation deals, the operational amplifier circuit is sampled and compensated according to the bias
Offset, secondary side voltage and the system given voltage of circuit, progress calculation process respectively obtain compensated reversed inclined later
Move voltage and compensated offset voltage in the same direction, complete the compensation of single reverse biased and single slide-back in the same direction, sampling it is same
Shi Suoshu reserve migration voltage is sent to driving circuit after control circuit is amplified, and the driving circuit sends respective drive life
It enables to single-phase DC motor；
S3: repeat step S2 several times, until the compensated reserve migration voltage and it is compensated it is described in the same direction partially
It moves voltage to tend to restrain, judges whether the convergency value of the compensated offset voltage in the same direction is in the same of system maximum tolerance
To in the range of offset voltage, if otherwise system reports an error；If then continuing to judge the convergency value of compensated reserve migration voltage
Whether it is in the range of the reserve migration voltage of system maximum tolerance, if otherwise system reports an error, if compensating success.
Further, in the step S2, the bias sampling and compensation circuit are to the reserve migration voltage and in the same direction
After offset voltage carries out storage and compensation deals, setting time is first waited, again by offset after the system sufficiently responds to
Feed back to the input terminal of the operational amplifier circuit.
Further, the setting time t needs to meet:
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
Further, in the step S1, specifically: the secondary side voltage successively passes through in the operational amplifier circuit
One, feedback voltage is obtained after second instrument operational amplifier circuit calculation process, is exported to the third instrument amplifier of the operational amplifier circuit
In circuit, the feedback voltage and the system given voltage are compared operation and obtained initially by the third instrument operational amplifier circuit
Reserve migration voltage；The secondary side voltage is input to the 4th instrument operational amplifier circuit in the operational amplifier circuit simultaneously, into
Initial offset voltage in the same direction is obtained after row calculation process.
Further, in the step S2, specifically: the bias samples and compensation circuit includes adc circuit, editable
Logical device and DAC circuit, the adc circuit sample the reserve migration voltage, send the editable for sampled value and patrol
It collects and compensates processing and storage in device, and pass through after the DAC circuit is handled and export to the second instrument operational amplifier circuit
Input terminal, the second instrument operational amplifier circuit will the offset that received and the secondary side voltage carry out it is anti-after calculation process
Be fed to the third instrument operational amplifier circuit, the third instrument operational amplifier circuit by the value of feedback received and system given voltage into
Row calculation process obtains compensated reserve migration voltage, completes the compensation of single reverse biased；
The adc circuit samples the offset voltage in the same direction simultaneously, by sampled value be sent in the editable device into
Row compensation deals and storage, and export after being handled by the DAC circuit to the input terminal of the 4th instrument operational amplifier circuit, institute
State the 4th instrument operational amplifier circuit by the offset received and the secondary side voltage carry out calculation process obtain it is compensated same
To offset voltage, single slide-back in the same direction is completed.
Further, in step S2, it is specially by the reserve migration that the adc circuit, which samples the reserve migration voltage,
K1 times of voltage amplification, the Programmadle logic device compensates processing specifically, will put from the received voltage of the adc circuit
It is added again with the preceding voltage once stored after k2 times big, being handled by the DAC circuit specially will be from the Programmadle logic
The received voltage of device amplifies k3 times again, and wherein k1 is the amplifier ratio that amplifier proportionality coefficient, the k3 of adc circuit are DAC circuit
Coefficient, the proportionality coefficient that k2 is converted between adc circuit and DAC circuit, and the value range of k1*k2*k3 are 1~1.05.
Further, in step S2, it is specially by the offset in the same direction that the adc circuit, which samples the offset voltage in the same direction,
K4 times of voltage amplification, the Programmadle logic device compensates processing specifically, will put from the received voltage of the adc circuit
It is added again with the preceding voltage once stored after k5 times big, being handled by the DAC circuit specially will be from the Programmadle logic
The received voltage of device amplifies k6 times again, and wherein k4 is the amplifier ratio that amplifier proportionality coefficient, the k6 of adc circuit are DAC circuit
Coefficient, the proportionality coefficient that k5 is converted between adc circuit and DAC circuit, and the value range of k4*k5*k6 are 1~1.05.
Servo-control system and its method provided by the invention with slide-back passes through setting operational amplifier circuit and bias
Sampling and compensation circuit constitute bias compensation circuit in the same direction and reverse biased compensation circuit, for the secondary of current sensor output
Side voltage carries out reverse biased compensation and slide-back in the same direction simultaneously, the reverse biased that the present invention generates current sensor with
Bias in the same direction carries out difference compensation, acquires bias data from the output end of operational amplifier circuit, being stored in after calculation processing can
In editorial logic device, and compensation output is updated, i.e., constantly updated cumulative offset voltage, limited times is carried out to each bias
Number compensation, makes it tend to restrain.The present invention can carry out real-time compensation in system electrification automatically, do not add and mechanically debug
Hardware circuit, easy to operate, accuracy is high, and compensation is comprehensively, free from the influence of the external environment, greatly improves the stability of system.
Detailed description of the invention
Fig. 1 is the control mode schematic diagram for more closed loops that existing servo-control system uses；
Fig. 2 is the structural schematic diagram for one specific embodiment of servo-control system that the present invention has slide-back；
Fig. 3 is the structural representation of one specific embodiment of reverse biased compensation circuit of the present invention and bias compensation circuit in the same direction
Figure.
It is as shown in the figure: 1, operational amplifier circuit；101~104, first~the 4th instrument operational amplifier circuit；2, control circuit；3, it drives
Circuit；4, single-phase DC motor；5, current sensor；6, bias sampling and compensation circuit；601, adc circuit；602, editable
Logical device；603, DAC circuit；7, bus DC power supply.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing:
As Figure 2-3, the present invention provides a kind of servo-control system with slide-back, provides for electric current loop system
Slide-back, including sequentially connected operational amplifier circuit 1, control circuit 2, driving circuit 3, single-phase DC motor 4 and current sense
Device 5, it is preferred that the control circuit 2 is PI (proportional integral, proportional integration) circuit, the driving circuit
3 be PWM drive circuit, and control circuit 2 generates PWM wave and controls PWM drive circuit 3, and of the invention has slide-back
Servo-control system further include bias sampling and compensation circuit 6 and bus DC power supply 7, the bus DC power supply 7 it is defeated
Outlet is connected to the input terminal of the driving circuit 3.The input terminal of the operational amplifier circuit 1 is connected to the output of current sensor 5
End, the input terminal of the control circuit 2 are connected to the output end of the operational amplifier circuit 1, the bias sampling and compensation circuit 6
Input terminal is connected between the operational amplifier circuit 1 and control circuit 2, the bias sampling and the output end connection of compensation circuit 6
The input terminal of the operational amplifier circuit 1, the operational amplifier circuit 1 and bias sampling and compensation circuit 6 constitute bias compensation circuit in the same direction
With reverse biased compensation circuit.Specifically, reverse biased compensation is system given voltage and the secondary side that current sensor 5 exports
The slide-back between feedback voltage that voltage obtains after amplifier processing comprising the reverse biased of current sensor 5
The bias generated with operational amplifier circuit 1.Slide-back in the same direction is the absolute bias between the secondary side voltage that current sensor 5 exports
Compensation comprising the bias that the bias and operational amplifier circuit 1 in the same direction of current sensor 5 generates.
As shown in figure 3, the operational amplifier circuit 1 includes that the operational amplifier circuit is transported including the first, second, third, fourth instrument
Electric discharge road 101,102,103,104, the input terminal of the first instrument operational amplifier circuit 101 are connected to the current sensor 5
Output end, the input terminal of the second instrument operational amplifier circuit 102 are separately connected the output end of the first instrument operational amplifier circuit 101
With the output end of bias sampling and compensation circuit 6, the input terminal of the third instrument operational amplifier circuit 103 is separately connected described
The output end and system given voltage of second instrument operational amplifier circuit 102, the output end connection of the third instrument operational amplifier circuit 103
The input terminal of the input terminal of the control circuit 2, the bias sampling and compensation circuit 6 is connected to the third instrument amplifier electricity
Between road 103 and control circuit 2, the first, second, third instrument operational amplifier circuit 101,102,103 and bias are sampled and are mended
It repays circuit 6 and constitutes reverse biased compensation circuit；The input terminal of the 4th instrument operational amplifier circuit 104 is separately connected the electric current and passes
The output end of the output end of sensor 5 and bias sampling and compensation circuit, the output end of the 4th instrument operational amplifier circuit 104
It is connect with the input terminal of bias sampling and compensation circuit 6, the 4th instrument operational amplifier circuit 104 and bias are sampled and compensated
Circuit 6 constitutes bias compensation circuit in the same direction.
Specifically, the secondary side voltage that current sensor 5 exports passes through 101 calculation process of first instrument operational amplifier circuit, tool
Body is to do difference operation, and later, the offset voltage exported with bias sampling and compensation circuit 6 be (each cycle compensation beginning for the first time
Precompensation voltage is 0) together by exporting after 102 calculation process of second instrument operational amplifier circuit to third instrument operational amplifier circuit
Operation, which is compared, with system given voltage in 103 obtains reserve migration voltage, meanwhile, the bias sampling and compensation circuit 6 are adopted
Collect the reserve migration voltage, export after carrying out storage and compensation deals to the input terminal of the second instrument operational amplifier circuit 102,
Complete the compensation of single reverse biased；As shown in figure 3, the secondary side voltage passes through 104 operation of the 4th instrument operational amplifier circuit
Processing, specially does and operation, directly obtains offset voltage in the same direction later, and the bias sampling and compensation circuit 6 acquire described
Offset voltage in the same direction, output is completed single to the input terminal of the 4th instrument operational amplifier circuit 104 after carrying out storage and compensation deals
Secondary slide-back in the same direction.
Please continue to refer to Fig. 3, the bias sampling and compensation circuit 6 include sequentially connected ADC (analog to
Digital converter, analog-to-digital conversion) circuit 601, Programmadle logic device 602 and DAC (digital to analog
Converter, digital-to-analogue conversion) circuit 603, three is integrated on Driver Card, unified to power, the input of the adc circuit 601
End connects the output end of the third instrument operational amplifier circuit 103, the 4th instrument operational amplifier circuit 104, the DAC circuit 603 it is defeated
Outlet is respectively connected to the input terminal of the described second, the 4th instrument operational amplifier circuit 102,104.The bias sampling and compensation circuit
6 further include RC low-pass filter, and the input terminal of the RC low-pass filter is connected to the third instrument operational amplifier circuit 103 and control
Between circuit 2 processed, the output end of the RC low-pass filter is connected to the input terminal of the adc circuit 601, passes through RC low pass filtered
Wave device is filtered it before adc circuit 601 is acquired reserve migration voltage, the interference of place to go high-frequency noise.
Preferably, the Programmadle logic device 602 be FPGA (Field-Programmable Gate Array, i.e.,
Field programmable gate array) register, it is preferred that the third instrument operational amplifier circuit 103 and the 4th instrument operational amplifier circuit 104
The device that reports an error (not marking in figure) is also respectively connected in output end.Specifically, adc circuit 601 acquires reserve migration voltage and same
It is stored in Programmadle logic device 602 after to offset voltage, Programmadle logic device 602 is by backoff algorithm to storage
Voltage compensates processing, is correspondingly outputting to the defeated of the second, the 4th instrument operational amplifier circuit 102,104 by DAC circuit 603 later
Enter end to compensate, which is that the reserve migration voltage for obtaining sampling and offset voltage in the same direction amplify K times, and K's takes
Being worth range is 1~1.05, makes the slide-back of system tend to restrain, it is ensured that system stability.In the present invention, slide-back in the same direction
Circuit and reverse biased compensation circuit are used in conjunction with adc circuit 601, Programmadle logic device 602 and DAC circuit 603, two benefits
Circuit is repaid using the different channels in 603 circuit chip of adc circuit 601, Programmadle logic device 602 and DAC circuit, the two is mutual
It does not interfere, saves circuit devcie, improve resource utilization.
The slide-back method based on current sensor that the present invention also provides a kind of, comprising the following steps:
S1: the biphase current i of the detection single-phase DC motor 4 of current sensor 5A、iB, it is converted into secondary side voltage uA、uBAfterwards
Output is to operational amplifier circuit 1, and the operational amplifier circuit 1 is by the secondary side voltage uA、uBWith system given voltage VSETIt carries out at operation
Initial reserve migration voltage and offset voltage in the same direction are respectively obtained after reason, specifically, the secondary side voltage uA、uBSuccessively
Feedback voltage is obtained later by the first, second instrument operational amplifier circuit 101 in the operational amplifier circuit 1,102 calculation process, it is defeated
Out into the third instrument operational amplifier circuit 102 of the operational amplifier circuit 1, the third instrument operational amplifier circuit 103 is electric by the feedback
Pressure and the system given voltage VSETIt compares operation and obtains initial reserve migration voltage；The secondary side voltage u simultaneouslyA、
uBThe 4th instrument operational amplifier circuit 104 being input in the operational amplifier circuit 1, obtain after calculation process it is initial it is in the same direction partially
Move voltage.As shown in Figure 1；Biphase current iA、iB, theoretically equal in magnitude, contrary, similarly secondary side voltage uA、uBSize
It is equal, contrary, however since the presence of current sensor 5 is easy to bring voltage deviation, including deviate in the same direction and reversely
Offset, offset is secondary side voltage u in the same directionA、uBIt increases or reduces simultaneously, reserve migration, that is, secondary side voltage uA、uBOne of them
Increase, another reduction.
S2: bias sampling and compensation circuit 6 sample the reserve migration voltage and offset voltage in the same direction respectively, carry out respectively
The input terminal of the operational amplifier circuit 1 is fed back to after storage and compensation deals, the operational amplifier circuit 1 is sampled and mended according to the bias
Repay offset, the secondary side voltage u of circuit 6A、uBWith system given voltage VSET, carry out respectively obtaining compensation after calculation process
Reserve migration voltage and compensated offset voltage in the same direction afterwards, complete the compensation of single reverse biased and single bias in the same direction is mended
It repays, sampling while, the reserve migration voltage was sent to driving circuit 3, the driving circuit 3 after the amplification of control circuit 2
Respective drive order is sent to single-phase DC motor 4.Specifically, bias sampling and compensation circuit include adc circuit 601,
Programmadle logic device 602 and DAC circuit 603, the adc circuit 601 sample the reserve migration voltage, sampled value are sent
Compensate processing and storage into the Programmadle logic device 602, and exported after being handled by the DAC circuit 603 to
The input terminal of the second instrument operational amplifier circuit 102, the second instrument operational amplifier circuit 102 by the offset received with it is described
Secondary side voltage uA、uBThe third instrument operational amplifier circuit 103, the third instrument amplifier electricity are fed back to after carrying out calculation process
Road 103 is by the value of feedback received and system given voltage VSETIt carries out calculation process and obtains compensated reserve migration voltage, it is complete
It is compensated at single reverse biased；
The adc circuit 601 samples the offset voltage V in the same direction simultaneously5, the editable device is sent by sampled value
Processing and storage are compensated in 602, and are exported after being handled by the DAC circuit 603 to the 4th instrument operational amplifier circuit
104 input terminal, the offset and the secondary side voltage u that the 4th instrument operational amplifier circuit 104 will receiveA、uBIt is transported
Calculation handles to obtain compensated offset voltage in the same direction, completes single slide-back in the same direction.
It is specially the institute by described k1 times of reserve migration voltage amplification that the adc circuit 601, which samples the reserve migration voltage,
It states Programmadle logic device 602 and compensates processing specifically, will be after 601 k2 times of the received voltage amplification of adc circuit
It is added again with the preceding voltage once stored, being handled by the DAC circuit 603 specially will be from the Programmadle logic device
602 received voltages amplify k3 times again, and wherein k1 is the amplifier ratio system that amplifier proportionality coefficient, the k3 of adc circuit are DAC circuit
Number, the proportionality coefficient that k2 is converted between adc circuit and DAC circuit, and the value range of k1*k2*k3 are 1~1.05.
It is specially that the offset voltage in the same direction is amplified k4 times that the adc circuit 601, which samples the offset voltage in the same direction, institute
It states Programmadle logic device 602 and compensates processing specifically, will be after 601 k5 times of the received voltage amplification of adc circuit
It is added again with the preceding voltage once stored, being handled by the DAC circuit 603 specially will be from the Programmadle logic device
602 received voltages amplify k6 times again, and wherein k4 is the amplifier ratio system that amplifier proportionality coefficient, the k6 of adc circuit are DAC circuit
Number, the proportionality coefficient that k5 is converted between adc circuit and DAC circuit, and the value range of k4*k5*k6 are 1~1.05.
k1Selection want maximum using 601 full scale of adc circuit, which is 10V, the i.e. maximum offset in the same direction of system
Voltage | V4|.k1=10, due to the maximum reserve migration voltage of system | V4| it is found that therefore can determine k1Value, k2It is fixed normal
Number, same k4Selection want maximum using 601 full scale of adc circuit, which is 10V, the i.e. maximum offset in the same direction of system
Voltage | V5|.k4=10, due to the maximum offset voltage in the same direction of system | V5| it is found that therefore can determine k4Value；k5For permanent number
The bias sampling and compensation circuit 6 are stored and are compensated to the reserve migration voltage and offset voltage in the same direction
After processing, setting time is first waited, offset is fed back into the defeated of the operational amplifier circuit again after the system sufficiently responds to
Enter end.
The setting time t needs to meet:
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
S3: repeat step S2 several times, until the compensated reserve migration voltage and it is compensated it is described in the same direction partially
It moves voltage to tend to restrain, judges whether the convergency value of the compensated offset voltage in the same direction is in the same of system maximum tolerance
To in the range of offset voltage, if otherwise system reports an error；If then continuing to judge the convergency value of compensated reserve migration voltage
Whether it is in the range of the reserve migration voltage of system maximum tolerance, if otherwise system reports an error, if compensating success.
In the present embodiment, step S2 is repeated three times, just complete primary complete compensation cycle, i.e., single compensation is one three times
A complete compensation cycle, and after completing primary complete compensation cycle, between system response, is sampled and mended by bias
The adc circuit 601 in circuit 6 is repaid to the reserve migration voltage V4With offset voltage V in the same direction5It is sampled respectively, obtains residue
Reverse biased and remaining bias in the same direction, and by the two respectively with the patient maximum reverse bias of system institute | Ve| and maximum is in the same direction
Bias | Vd| it compares, if the maximum reverse bias of the residue reverse biased≤system tolerant | Ve|, and it is described remaining inclined in the same direction
The maximum bias in the same direction of pressure≤system tolerant, then compensate success, otherwise compensation failure, system report an error.
In the present embodiment, for reverse biased compensation cycle, one group of actual parameter, k are given1=4.06, k2=0.25,
k3=1.026, k1·k2·k3=1.0414 are slightly larger than 1, compensate for each single, reverse biased, the programmable logic of acquisition
The data such as the data that store in device, the bias compensated every time and remaining bias are as shown in table 1.
The bias compensated every time in 1 one reverse biased compensation cycles of table and remaining bias data
As can be seen from the above table, system tends to restrain 3 separate compensations (i.e. primary complete compensation) afterwards, adc circuit 601
Sampling obtained remaining reverse biased is | -0.0004V4|≤|Ve|, that is, it completes the Contrary compensation period, waits into next
Reverse biased compensation cycle.
In embodiment, for a complete compensation cycle in the same direction, one group of actual parameter: k is also given4=33.28, k5
=0.25, k6=0.123, k4·k5·k6=1.0234 are slightly larger than 1, since bias in the same direction is smaller than reverse biased, utilize to be maximum
The full scale of adc circuit 601, so k4Compare k1Greatly.
The bias compensated every time in 2 one, table slide-back periods in the same direction and remaining bias data
As can be seen from the above table, system tends to restrain after 3 separate compensations (i.e. primary complete compensation cycle),
Adc circuit 603 samples obtained residue, and bias is in the same direction | -0.0001V5|≤|Vd|, i.e., this time compensation cycle is completed in the same direction, etc.
Wait enter next slide-back period in the same direction.
Servo-control system and its method provided by the invention with slide-back, by setting operational amplifier circuit 1 and partially
Pressure sampling and compensation circuit 6 constitute bias compensation circuit in the same direction and reverse biased compensation circuit, export for current sensor 5
Secondary side voltage carries out reverse biased compensation and slide-back in the same direction simultaneously, and the present invention is for current sensor 5 and operational amplifier circuit 1
The reverse biased of generation and bias in the same direction carry out difference compensation, bias data are acquired from the output end of operational amplifier circuit 1, by calculating
It is stored in after processing in Programmadle logic device, and updates compensation output, i.e., constantly updated cumulative offset voltage, to every
A bias carries out finite number of time compensation, it is made to tend to restrain.The present invention can carry out real-time compensation in system electrification automatically, no
The hardware circuit mechanically debugged is added, easy to operate, accuracy is high, and compensation is comprehensively, free from the influence of the external environment, mentions significantly
The stability of high system.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as prompting,
It should not limit protection scope of the present invention.It is equal that various omission, substitution, and alteration are carried out without departing from the spirit and scope of the present invention
It should be included within the scope of the present invention.
Claims (15)
1. a kind of servo-control system with slide-back, which is characterized in that including sequentially connected operational amplifier circuit, control electricity
Road, driving circuit, single-phase DC motor and current sensor, further include bias sampling and compensation circuit, the operational amplifier circuit
Input terminal is connected to the output end of current sensor, and the input terminal of the control circuit is connected to the output of the operational amplifier circuit
The input terminal of end, the bias sampling and compensation circuit is connected between the operational amplifier circuit and control circuit, and the bias is adopted
Sample and the output end of compensation circuit connect the input terminal of the operational amplifier circuit, the operational amplifier circuit and bias sampling and compensation circuit
Constitute bias compensation circuit in the same direction and reverse biased compensation circuit；The operational amplifier circuit includes the first, second, third, fourth instrument
Table operational amplifier circuit, the input terminal of the first instrument operational amplifier circuit are connected to the output end of the current sensor, and described second
The input terminal of instrument operational amplifier circuit is separately connected the output end of the first instrument operational amplifier circuit and the bias samples and compensation
The output end of circuit, the input terminal of the third instrument operational amplifier circuit are separately connected the output end of the second instrument operational amplifier circuit
The input terminal of the control circuit, the bias are connected with the output end of system given voltage, the third instrument operational amplifier circuit
The input terminal of sampling and compensation circuit is connected between the third instrument operational amplifier circuit and control circuit, described first, second,
Third instrument operational amplifier circuit and bias sampling and compensation circuit constitute reverse biased compensation circuit；The 4th instrument operational amplifier circuit
Input terminal be separately connected the output end of the current sensor and the output end of bias sampling and compensation circuit, described the
The output end of four instrument operational amplifier circuits is sampled with the bias and the input terminal of compensation circuit is connect, the 4th instrument amplifier electricity
Road and bias sampling and compensation circuit constitute bias compensation circuit in the same direction.
2. servo-control system according to claim 1, which is characterized in that bias sampling and compensation circuit include according to
Adc circuit, Programmadle logic device and the DAC circuit of secondary connection, the input terminal of the adc circuit be separately connected the third,
The output end of 4th instrument operational amplifier circuit, the output end of the DAC circuit are separately connected described second, the 4th instrument operational amplifier circuit
Input terminal.
3. servo-control system according to claim 2, which is characterized in that the bias sampling and compensation circuit further include
RC low-pass filter, the input terminal of the RC low-pass filter be connected to the third instrument operational amplifier circuit and control circuit it
Between, the output end of the RC low-pass filter is connected to the input terminal of the adc circuit.
4. servo-control system according to claim 2, which is characterized in that the Programmadle logic device is FPGA deposit
Device.
5. servo-control system according to claim 1, which is characterized in that the third instrument operational amplifier circuit and the 4th instrument
The device that reports an error is also respectively connected in the output end of table operational amplifier circuit.
6. servo-control system according to claim 1, which is characterized in that further include bus DC power supply, the bus
The output end of DC power supply is connected to the input terminal of the driving circuit.
7. the servo-control system according to claim 1 with slide-back, which is characterized in that the control circuit is
PI circuit.
8. the servo-control system according to claim 1 with slide-back, which is characterized in that the driving circuit is
PWM drive circuit.
9. a kind of slide-back method for servo-control system, which comprises the following steps:
S1: current sensor detects the biphase current of single-phase DC motor, exports after being converted into secondary side voltage to operational amplifier circuit,
The secondary side voltage and system given voltage respectively obtain after calculation process initial reversed by the operational amplifier circuit
Offset voltage and offset voltage in the same direction；
S2: bias sampling and compensation circuit sample the reserve migration voltage and offset voltage in the same direction respectively, are stored respectively
And the input terminal of the operational amplifier circuit is fed back to after compensation deals, the operational amplifier circuit is sampled according to the bias and compensation circuit
Offset, secondary side voltage and system given voltage, carry out respectively obtaining compensated reserve migration electricity after calculation process
Pressure and compensated offset voltage in the same direction complete the compensation of single reverse biased and single slide-back in the same direction, sampling while institute
It states reserve migration voltage and is sent to driving circuit after control circuit is amplified, the driving circuit sends respective drive order extremely
Single-phase DC motor；
S3: repeating step S2 several times, until the compensated reserve migration voltage and the compensated offset electricity in the same direction
Pressure tends to restrain, and judges whether the convergency value of the compensated offset voltage in the same direction is in the in the same direction inclined of system maximum tolerance
It moves in the range of voltage, if otherwise system reports an error；If then continue to judge compensated reserve migration voltage convergency value whether
In the range of reserve migration voltage in system maximum tolerance, if otherwise system reports an error, if compensating success.
10. slide-back method according to claim 9, which is characterized in that in the step S2, bias sampling and
After compensation circuit carries out storage and compensation deals to the reserve migration voltage and offset voltage in the same direction, when first waiting setting
Between, offset is fed back to the input terminal of the operational amplifier circuit again after the system sufficiently responds to.
11. slide-back method according to claim 10, which is characterized in that the setting time t needs to meet:
Wherein trFor servo-control system response time, fHFor the bandwidth frequency of servo-control system.
12. slide-back method according to claim 9, which is characterized in that in the step S1, specifically: described two
Secondary side voltage successively obtains feedback electricity after the first, second instrument operational amplifier circuit calculation process in the operational amplifier circuit
Pressure, exports into the third instrument operational amplifier circuit of the operational amplifier circuit, and the third instrument operational amplifier circuit is by the feedback voltage
Operation, which is compared, with the system given voltage obtains initial reserve migration voltage；The secondary side voltage is input to simultaneously
The 4th instrument operational amplifier circuit in the operational amplifier circuit obtains initial offset voltage in the same direction after carrying out calculation process.
13. slide-back method according to claim 12, which is characterized in that in the step S2, specifically: it is described inclined
Pressure sampling and compensation circuit include adc circuit, Programmadle logic device and DAC circuit, and the adc circuit sampling is described reversed inclined
Voltage is moved, sends sampled value in the Programmadle logic device and compensates processing and storage, and pass through the DAC circuit
It is exported after processing to the input terminal of the second instrument operational amplifier circuit, the offset that the second instrument operational amplifier circuit will receive
The third instrument operational amplifier circuit, the third instrument operational amplifier circuit are fed back to after carrying out calculation process with the secondary side voltage
The value of feedback received and system given voltage are subjected to calculation process and obtain compensated reserve migration voltage, it is anti-to complete single
To slide-back；
The adc circuit samples the offset voltage in the same direction simultaneously, by sampled value be sent in the Programmadle logic device into
Row compensation deals and storage, and export after being handled by the DAC circuit to the input terminal of the 4th instrument operational amplifier circuit, institute
State the 4th instrument operational amplifier circuit by the offset received and the secondary side voltage carry out calculation process obtain it is compensated same
To offset voltage, single slide-back in the same direction is completed.
14. slide-back method according to claim 13, which is characterized in that in step S2, the adc circuit samples institute
Stating reserve migration voltage is specially by described k1 times of reserve migration voltage amplification, and the Programmadle logic device compensates processing
Specifically, by being added again with the preceding voltage once stored after k2 times of the adc circuit received voltage amplification, by described
DAC circuit processing is specially that will amplify again k3 times from the received voltage of Programmadle logic device, and wherein k1 is adc circuit
Amplifier proportionality coefficient, the amplifier proportionality coefficient that k3 is DAC circuit, the ratio system that k2 is converted between adc circuit and DAC circuit
Number, and the value range of k1*k2*k3 is 1~1.05.
15. slide-back method according to claim 13, which is characterized in that in step S2, the adc circuit samples institute
Stating offset voltage in the same direction is specially that the offset voltage in the same direction is amplified k4 times, and the Programmadle logic device compensates processing
Specifically, by being added again with the preceding voltage once stored after k5 times of the adc circuit received voltage amplification, by described
DAC circuit processing is specially that will amplify again k6 times from the received voltage of Programmadle logic device, and wherein k4 is adc circuit
Amplifier proportionality coefficient, the amplifier proportionality coefficient that k6 is DAC circuit, the ratio system that k5 is converted between adc circuit and DAC circuit
Number, and the value range of k4*k5*k6 is 1~1.05.
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| JP2007028809A (en) * | 2005-07-19 | 2007-02-01 | Meidensha Corp | Offset voltage detector of pwm converter |
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| JP6196834B2 (en) * | 2013-08-01 | 2017-09-13 | ローム株式会社 | Switching power supply control circuit |
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| JP2007028809A (en) * | 2005-07-19 | 2007-02-01 | Meidensha Corp | Offset voltage detector of pwm converter |
| CN103229406A (en) * | 2010-11-24 | 2013-07-31 | 松下电器产业株式会社 | DC power source device |
| CN104335682A (en) * | 2012-05-04 | 2015-02-04 | 皇家飞利浦有限公司 | Offset compensation in driving circuits |
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