CN107289878B - Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method - Google Patents

Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method Download PDF

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CN107289878B
CN107289878B CN201710232726.1A CN201710232726A CN107289878B CN 107289878 B CN107289878 B CN 107289878B CN 201710232726 A CN201710232726 A CN 201710232726A CN 107289878 B CN107289878 B CN 107289878B
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main surface
transparent plate
light source
inspection
lens
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CN107289878A (en
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木村友纪
有田祐介
池野田稔
东山明弘
北山大介
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AGC Inc
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Asahi Glass Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/898—Irregularities in textured or patterned surfaces, e.g. textiles, wood
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Pathology (AREA)
  • Wood Science & Technology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention provides a transparent plate surface inspection device with improved inspection precision. The device is a transparent plate surface inspection device for inspecting the main surface of the transparent plate, and comprises a light source including a stripe pattern, a line sensor camera arranged at the reflection position of the light from the light source on the main surface, and an image processing device for processing the image of the stripe pattern, the line sensor camera includes an image pickup element including a plurality of pixels arranged in a predetermined direction, a lens for forming an image of the stripe pattern on the image pickup element, the light source and the imaging element are both disposed on one side of the main surface and each obliquely face the main surface, and a ratio (S1/S2) between an area (S1) of an imaging point of the pixel disposed on one end in the predetermined direction on the main surface and an area (S2(S2> S1)) of an imaging point of the pixel disposed on the other end in the predetermined direction on the main surface is 0.20 or more.

Description

Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method
Technical Field
The invention relates to a transparent plate surface inspection device, a transparent plate surface inspection method and a glass plate manufacturing method.
Background
The inspection apparatus described in patent document 1 takes an image of a stripe pattern of a light source with a camera provided at a reflection point of the light from the light source on an inspection surface of a transparent plate, and inspects a surface shape of the transparent plate by performing image processing on the image taken by the camera. The photographed image has a stripe pattern in which bright portions and dark portions are alternately repeated. By detecting the deviation between the stripe pattern and the standard pattern, the surface shape of the inspection surface can be inspected. As the standard pattern, a stripe pattern photographed by a camera when the inspection surface is an ideal plane is used.
Documents of the prior art
Patent document
Patent document 1 Japanese patent laid-open No. 2005-345383
Disclosure of Invention
Technical problem to be solved by the invention
The camera includes an image pickup device including a plurality of pixels arranged in a straight line, and a lens for forming a fringe pattern on the image pickup device. The light source and the imaging element are both arranged on the same side of the inspection surface and are obliquely opposite to each other toward the inspection surface. With this configuration, a plurality of inspection apparatuses can be efficiently arranged.
Conventionally, for the purpose of downsizing an inspection apparatus, a camera is positioned close to an inspection surface, and a wide-angle lens is used as a lens of the camera.
In recent years, transparent plates are required to have higher flatness, and the inspection accuracy of conventional inspection apparatuses is insufficient.
The present invention has been made in view of the above-mentioned problems, and a main object of the present invention is to provide a transparent plate surface inspection apparatus with improved inspection accuracy.
Technical scheme for solving technical problem
In order to solve the above problems, the present invention provides a transparent plate surface inspection apparatus,
the apparatus is a transparent plate surface inspection apparatus that inspects a main surface of a transparent plate,
which comprises a light source including a stripe pattern, a line sensor camera provided at a position where light from the light source is reflected on the main surface and capturing the stripe pattern, and an image processing device for performing image processing on the captured image of the stripe pattern,
the line sensor camera includes an image pickup element including a plurality of pixels arranged in a predetermined direction, a lens for forming an image of the stripe pattern on the image pickup element,
the light source and the photographing element are both arranged on the same side of the main surface and are each obliquely opposed toward the main surface,
the ratio (S1/S2) between the area of the main surface at the imaging point of the pixel arranged at one end of the predetermined direction (S1) and the area of the main surface at the imaging point of the pixel arranged at the other end of the predetermined direction (S2(S2> S1)) is 0.20 or more.
Effects of the invention
The invention provides a transparent plate surface inspection device with improved inspection precision, a transparent plate surface inspection method and a glass plate manufacturing method.
Drawings
Fig. 1 is a sectional view of a transparent plate surface inspection apparatus according to an embodiment, when inspecting a front main surface of the transparent plate, and is a sectional view taken along I-I of fig. 2.
Fig. 2 is a plan view of a transparent plate surface inspection apparatus according to an embodiment, when inspecting a front main surface of a transparent plate.
Fig. 3 is a diagram showing the luminance distribution of a stripe pattern image reflected on the front main surface of the transparent plate in the luminance distribution of an image captured by the line sensor camera according to the embodiment.
Fig. 4 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at one end of an imaging element according to one embodiment.
Fig. 5 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at the other end of an imaging element according to one embodiment.
Fig. 6 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at a midpoint of an imaging element according to one embodiment.
Fig. 7 is a sectional view of a transparent plate surface inspection apparatus according to an embodiment when inspecting a main surface of a back side of a transparent plate.
Fig. 8 is a plan view of a transparent plate surface inspection apparatus according to a modification for inspecting a front main surface of a transparent plate.
Detailed Description
The following describes a mode for carrying out the transparent-plate surface inspection apparatus and the transparent-plate surface inspection method according to the present invention with reference to the drawings. In the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and description thereof is omitted.
Fig. 1 is a sectional view of a transparent plate surface inspection apparatus according to an embodiment, when inspecting a front main surface of the transparent plate, and is a sectional view taken along I-I of fig. 2. Fig. 2 is a plan view of a transparent plate surface inspection apparatus according to an embodiment, when inspecting a front main surface of a transparent plate.
As shown in fig. 1 and 2, the transparent board surface inspection apparatus 10 inspects the shape of a front main surface 61 (hereinafter also referred to as an "inspection surface 61") of the transparent board 60. The transparent plate 60 may be a glass plate or a resin plate. The transparent plate surface inspection apparatus 10 has, for example, a light source 20, a line sensor camera 30, and an image processing apparatus 50.
The light source 20 includes a light source body 21 such as an LED and a stripe pattern 22. The stripe pattern 22 is provided on the light emitting surface of the light source body 21. An optical sheet such as a light diffusion sheet may be provided between the stripe pattern 22 and the light source body 21.
The line sensor camera 30 is provided at a position where light from the light source 20 is reflected by the inspection surface 61, and images the stripe pattern 22 included in the light source 20. The line sensor camera 30 includes an image pickup device 31 including a plurality of pixels arranged in a predetermined direction, and a lens 32 for forming an image of the stripe pattern 22 on the image pickup device 31. As the imaging element 31, for example, a CCD imaging sensor, a CMOS imaging sensor, or the like is used.
The graphic processing device 50 performs image processing on the image captured by the line sensor camera 30. The image processing apparatus 50 includes a CPU (central processing unit) 51 and a storage medium 52 such as a memory. The image processing apparatus 50 performs image processing by running a program stored in the storage medium 52 on the CPU 51.
Fig. 3 is a diagram showing the luminance distribution of a stripe pattern image reflected on the front main surface of the transparent plate in the luminance distribution of an image captured by the line sensor camera according to the embodiment. In fig. 3, the horizontal axis represents the number of pixels of the line sensor camera 30, and the vertical axis represents the luminance. The number of pixels refers to the arrangement order (integer) of the pixels. As shown in fig. 3, the photographed image has a stripe pattern in which bright portions and dark portions are alternately repeated.
The image processing apparatus 50 detects a deviation between the photographed fringe pattern and the standard pattern. As the standard pattern, a stripe pattern photographed by the line sensor camera 30 when the inspection surface 61 is an ideal plane is used. The standard pattern reading uses a pattern obtained by calculation or the like and stored in advance in the storage medium 52.
The image processing device 50 can detect the inclination at each point of the inspection surface 61 by detecting the deviation between the shot stripe pattern and the standard pattern, and can detect the surface shape by integrating the inclination. As a method for deriving the surface pattern from the variation of the stripe pattern, a conventional method can be used, and for example, the method described in patent document 1 can be used.
As shown in fig. 1, the light source 20 and the imaging element 31 are both disposed on the same side of the inspection surface 61 and are diagonally opposed to each other toward the inspection surface 61. The inclination angle θ 1 of the center line of the light from the light source 20 with respect to the inspection surface 61 is, for example, 35 ° to 55 °, preferably 40 ° to 50 °. The inclination angle θ 2 of the center line of the light directed toward the imaging unit 31 with respect to the inspection surface 61 is, for example, 35 ° to 55 °, preferably 40 ° to 50 °. The inclination angle θ 1 and the inclination angle θ 2 are equal within the above range.
As described above, the light source 20 and the imaging element 31 are both disposed on the same side of the inspection surface 61 and are each obliquely opposed to each other toward the inspection surface 61, whereby a plurality of transparent plate surface inspection apparatuses 10 can be efficiently arranged. In order to improve the inspection accuracy of the transparent plate surface inspection apparatus 10, the present inventors paid attention to the variation in the area of the imaging point of each pixel of the imaging device 31 on the inspection surface 61.
Fig. 4 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at one end of an imaging element according to one embodiment. In fig. 4, one point 22P1 on the stripe pattern 22 of the light source 20 is imaged on a pixel 31P1 at one end of the photographing element 31. The area S1 of the imaging point of the pixel 31P1 on the inspection surface 61 can be calculated by the following expressions (1) to (3).
S1＝α×Sf×β12…(1)
β1＝A1b/A1…(2)
A1＝A1a+A1b…(3)
Here, α represents a coefficient of influence of inclination of the inspection surface 61 with respect to the optical axis orthogonal plane OP of the lens 32, Sf represents an aperture area (japanese: り area load) of the lens 32, A1a represents a distance from the optical center 32a of the lens 32 to the center P1 of the imaging point on the inspection surface 61, and A1b represents a distance from P1 to one point 22P1 of the light source 20. The orthogonal-to-optical-axis plane OP of the lens 32 is a plane orthogonal to the optical axis 32b of the lens 32. The aperture area Sf of the lens 32 is a function of the focal length f and the aperture coefficient (japanese: り value) of the lens 32, and has a constant value.
Fig. 5 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at the other end of an imaging element according to one embodiment. In fig. 5, one point 22P2 on the stripe pattern 22 of the light source 20 is imaged on the pixel 31P2 at the other end of the imaging element 31. The area S2 of the imaging point of the pixel 31P2 on the inspection surface 61 can be calculated by the following expressions (4) to (6).
S2＝α×Sf×β22…(4)
β2＝A2b/A2…(5)
A2＝A2a+A2b…(6)
Here, α represents a coefficient of influence of inclination of the inspection surface 61 with respect to the optical axis orthogonal plane OP of the lens 32, Sf represents an aperture area (japanese: り area load) of the lens 32, A2a represents a distance from the optical center 32a of the lens 32 to the center P2 of the imaging point on the inspection surface 61, and A2b represents a distance from P2 to one point 22P2 of the light source 20. A1 is equal to A2.
Fig. 6 is an explanatory diagram of an area of an imaging point on an inspection surface imaged by a pixel at a midpoint of an imaging element according to one embodiment. In fig. 6, one point 22P3 on the stripe pattern 22 of the light source 20 is imaged on the pixel 31P3 of the midpoint of the photographing element 31. The area S3 of the imaging point of the pixel 31P3 on the inspection surface 61 can be calculated by the following expressions (7) to (9).
S3＝α×Sf×β32…(7)
β3＝A3b/A3…(8)
A3＝A3a+A3b…(9)
Here, α represents a coefficient of influence of inclination of the inspection surface 61 with respect to the optical axis orthogonal plane OP of the lens 32, Sf represents an aperture area (japanese: り area load) of the lens 32, A3a represents a distance from the optical center 32a of the lens 32 to the center P3 of the imaging point on the inspection surface 61, and A3b represents a distance from P3 to one point 22P3 of the light source 20. P3 is the intersection of the optical axis of the lens 32 and the inspection surface 61.
As is clear from fig. 1 and 4 to 6, the maximum value of the area S of the imaging point on the inspection surface 61 of each pixel included in the imaging device 31 is S2, and the minimum value thereof is S1. The fluctuation of the area S of the shot points can be expressed as a ratio (S1/S2) of S1, which is the minimum value of S, to S2, which is the maximum value of S. In the above formulas (1) and (4), Sf is the same value, and α is substantially the same value. Thus, S1/S2 can be represented by S1/S2 ═ beta 12/β22This approximation is calculated. The closer to 1 the S1/S2 is, the smaller the fluctuation of the area S of the shot point is.
In addition, as described above, since both the light source 20 and the imaging element 31 are disposed on the same side of the inspection surface 61 and diagonally face each other toward the inspection surface 61, S2 is larger than S1, and S1/S2 is smaller than 1, as a matter of course. From the viewpoints of downsizing of the transparent plate surface inspection apparatus 10, prevention of interference between the optical system and the transparent plate 60, and the like, S1/S2 is preferably 0.45 or less.
The inventors found through experiments and the like that the inspection accuracy of the transparent plate surface inspection apparatus 10 can be improved by setting S1/S2 to 0.20 or more, and the details will be described in the examples section.
The focal length f of the lens 32 is preferably above 110 mm. If the focal length f of the lens 32 is 110mm or more, the lens 32 having a narrow viewing angle can be used, and since a plurality of light beams passing through the lens 32 are close to parallel lines, it is easy to set S1/S2 to 0.20 or more. The focal length f of the lens 32 is more preferably 120mm or more.
The following expression (4) holds for the focal length f of the lens 32.
1/f＝1/A3+1/B3…(4)
In the above formula (4), A3 is the sum of A3a and A3 b. On the other hand, B3 represents the distance from the optical center 32a of the lens 32 to the pixel 31P3 at the midpoint of the imaging element 31.
When the focal length f of the lens 32 is 110mm or more, the angle of view of the lens 32 is narrow, and therefore a3 is preferably 800mm or more in order to sufficiently enlarge the imaging range 61A on the inspection surface 61.
On the other hand, from the viewpoint of downsizing of the transparent plate surface inspection apparatus 10, a3 is preferably 1500mm or less. When a3 is 1500mm or less, the focal length f of the lens 32 is preferably 225mm or less in order to sufficiently enlarge the imaging range 61A on the inspection surface 61.
The line sensor camera 30 takes images of the fringe pattern 22 observed by reflection from the front main surface 61 and images of the fringe pattern 22 observed by reflection from the back main surface 62 in a superimposed manner.
The contrast between the bright portion and the dark portion of the image of the stripe pattern 22 observed in reflection on the front main surface 61 is higher than that of the image of the stripe pattern 22 observed in reflection on the back main surface 62.
These images are preferably in an easily separated state with misalignment between dark portions (or between bright portions). The inclination angle θ 1 and the inclination angle θ 2 are preferably 35 ° to 55 ° so that dark portions (or bright portions) do not overlap with each other.
In addition, as described above, since the contrast of the bright portion and the dark portion of the two images is different, even when the dark portions (or the bright portions) of the two images overlap each other, the two images can be separated.
The transparent plate surface inspection apparatus 10 inspects the surface shape of the front main surface 61 in fig. 1, and may inspect the surface shape of the rear main surface 62 (hereinafter also referred to as "inspection surface 62") as shown in fig. 7. In addition, the transparent plate surface inspection apparatus 10 can also inspect the surface shapes of the main surfaces 61 and 62 on both sides.
In the transparent board surface inspection apparatus 10, when the surface shape of the back-side main surface 62 is inspected, in the descriptions of "S1/S2", "f", "A3", and the like, "inspection surface 61" may be replaced with "inspection surface 62". Here, "S1/S2" and the like are calculated in consideration of refraction of light at the interface between the transparent plate 60 and the air. Since the thickness of the transparent plate 60 is sufficiently small, if the above-described condition (for example, S1/S2 is 0.20 or more) with respect to the front-side inspection surface 61 is satisfied, the above-described condition with respect to the rear-side inspection surface 62 is also substantially satisfied.
In the present embodiment, as shown in fig. 2, the imaging range 61A of the inspection surface 61 of the transparent plate 60 and the imaging range 22A of the stripe pattern 22 of the light source 20 are arranged on the same straight line in a plan view. As shown in fig. 8, the imaging element 31, the imaging range 61A of the inspection surface 61 of the transparent plate 60, and the imaging range 22A of the stripe pattern 22 of the light source 20 may be twisted without being aligned in a straight line in a plan view. Further, the surface shape may be checked while the transparent plate 60 is being conveyed.
The inspection step by the transparent plate surface inspection method described above can be applied to a method for manufacturing a glass plate including at least a step of forming a plate-like glass from a molten glass and a step of cutting out a glass plate by cutting the plate-like glass. Through the inspection step by the transparent plate surface inspection method, it is possible to confirm that a glass plate having a desired surface shape is obtained.
Examples
The present invention will be described in detail below with reference to examples and comparative examples, but the present invention is not limited to the following examples. Test example 1 is an example, and test example 2 is a comparative example.
[ test example 1]
In test example 1, the front main surface (hereinafter also simply referred to as "inspection surface") of the glass plate was inspected using a transparent plate surface inspection apparatus shown in fig. 1 and the like. The inspection face of the glass plate is brought infinitely close to the ideal plane by polishing in advance. Further, the distance L (see fig. 1) between the left end P1 (see fig. 1) and the right end P2 (see fig. 1) of the imaging range on the inspection surface was set to 250 mm. The number of pixels of the line sensor camera is 7450.
First, the shape of the inspection surface is calculated by capturing an image of a stripe pattern of the light source by a line sensor camera provided at a reflection point of the light from the light source on the inspection surface and performing image processing on the captured image. The calculated shape ranges are both (1) a portion within 30mm from the left end P1 (hereinafter also referred to as "left inspection portion") and (2) a portion within 30mm from the right end P2 (hereinafter also referred to as "right inspection portion"). Then, raw data of deviation (height difference) of each examined portion from the ideal plane is obtained. The photographing range was not changed, and it was repeated 250 times, resulting in 250 times of raw data for each examined section.
Next, the 250-order raw data was convolved with a window function, and (a) a frequency component of a periodic band gap (japanese: periodic band gap) centered around a wavelength of 10mm (hereinafter also referred to as "1 st frequency component") and (B) a frequency component of a periodic band gap centered around a wavelength of 5mm (hereinafter also referred to as "2 nd frequency component") were extracted. As the window function, a gaussian window is used. Then, the standard deviation of each frequency component is calculated for the central portion of each inspection portion, and the calculated standard deviation is used as an evaluation value. Here, the length of the central portion of each inspection portion was 5mm on the right and left sides. The reason why only the central portion of each inspection portion is used when calculating the standard deviation is to assume that the end portions are folded back at the time of convolution calculation in order to obtain an evaluation value in a sufficiently small range.
It is estimated that the glass plate has undulations of the long-period component and the short-period component, and the 1 st frequency component centered around the wavelength of 10mm is the long-period component and the 2 nd frequency component centered around the wavelength of 5mm is the short-period component.
[ test example 2]
In test example 2, the front main surface of the glass plate was inspected and evaluated in the same manner as in test example 1 except that "f", the diaphragm, "A3", and "A3 b" were changed so that "S3" was substantially the same and "S1/S2" was different.
[ conclusion ]
The test conditions and the test results are shown in table 1. In table 1, "FC 1L" represents the standard deviation of the 1 st frequency component at the central portion of the left-hand inspection portion, "FC 2L" represents the standard deviation of the 2 nd frequency component at the central portion of the left-hand inspection portion, "FC 1R" represents the standard deviation of the 1 st frequency component at the central portion of the right-hand inspection portion, and "FC 2R" represents the standard deviation of the 2 nd frequency component at the central portion of the right-hand inspection portion.
[ Table 1]
Test example 1 Test example 2
S1/S2 0.217 0.177
f(mm) 200 105
Aperture 22 16
A3(mm) 1205 750
A3b(mm) 258 300
FC1L(μm) 0.84 1.52
FC1R(μm) 0.57 0.62
FC1L/FC1R 1.48 2.45
FC2L(μm) 0.66 1.40
FC2R(μm) 0.55 0.82
FC2L/FC2R 1.20 1.71
As is clear from table 1, in test example 1, S1/S2 is 0.20 or more unlike test example 2, and therefore the ratio of FC1L to FC1R (FC1L/FC1R) and the ratio of FC2L to FC2R (FC2L/FC2R) are close to 1, respectively. These ratios close to 1 mean that the accuracy of the left-side inspection portion is close to the accuracy of the right-side inspection portion, and it is understood that the reduction in inspection accuracy due to the fluctuation in the area of the imaging point is suppressed.
While the embodiments of the transparent plate surface inspection apparatus and the like have been described above, the present invention is not limited to the above embodiments and the like, and various modifications and improvements can be made within the scope of the technical idea of the present invention described in the claims of the patent application.
Description of the symbols
10 inspection device for surface of transparent plate
20 light source
21 light source main body
22 stripe pattern
30 line sensor camera
31 image pickup element
32 lens
32a optical center
32b optical axis
50 image processing device
60 transparent plate
61 major surface (inspection surface) on front side
62 back side main surface (inspection surface)

Claims (8)

1. A transparent plate surface inspection apparatus which inspects a main surface of a transparent plate, characterized in that,
the image processing apparatus includes a light source including a stripe pattern, a line sensor camera provided at a position where light from the light source is reflected by the main surface and capturing the stripe pattern, and an image processing device performing image processing on an image of the captured stripe pattern,
the line sensor camera includes an image pickup element including a plurality of pixels arranged in a predetermined direction, a lens for forming an image of the stripe pattern on the image pickup element,
the light source and the photographing element are both arranged on the same side of the main surface and are each obliquely opposed toward the main surface,
the ratio S1/S2 between the area S1 of the main surface at the imaging point of the pixel arranged at one end of the predetermined direction and the area S2 of the main surface at the other end of the predetermined direction is 0.20 or more, wherein S2> S1.
2. The apparatus for inspecting the surface of a transparent plate according to claim 1, wherein the focal length of the lens is 110mm or more.
3. The transparent plate surface inspection apparatus according to claim 2, wherein the sum of the distance from the optical center of the lens to the intersection of the main surface and the optical axis of the lens and the distance from the intersection to the stripe pattern of the light source is 800mm or more.
4. A method for inspecting a surface of a transparent plate, which inspects a main surface of the transparent plate, characterized in that,
capturing a fringe pattern included in a light source by a line sensor camera provided at a position where light from the light source is reflected on the main surface, and performing image processing on a captured image of the fringe pattern,
the line sensor camera includes an image pickup element including a plurality of pixels arranged in a predetermined direction, a lens for forming an image of the stripe pattern on the image pickup element,
the light source and the photographing element are both arranged on the same side of the main surface and are each obliquely opposed toward the main surface,
the ratio S1/S2 between the area S1 of the main surface at the imaging point of the pixel arranged at one end of the predetermined direction and the area S2 of the main surface at the other end of the predetermined direction is 0.20 or more, wherein S2> S1.
5. The method for inspecting the surface of a transparent plate according to claim 4, wherein the focal length of the lens is 110mm or more.
6. The method for inspecting the surface of a transparent plate according to claim 5, wherein the sum of the distance from the optical center of the lens to the intersection of the main surface and the optical axis of the lens and the distance from the intersection to the stripe pattern of the light source is 800mm or more.
7. The method for inspecting the surface of a transparent board according to any one of claims 4 to 6, wherein the transparent board is a glass board.
8. A method for producing a glass plate, comprising a step of forming a plate-like glass from a molten glass, a glass plate cutting step of cutting the plate-like glass, and an inspection step by the transparent plate surface inspection method according to claim 7.
CN201710232726.1A 2016-04-13 2017-04-11 Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method Active CN107289878B (en)

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JP2016-080332 2016-04-13
JP2016080332A JP6642223B2 (en) 2016-04-13 2016-04-13 Transparent plate surface inspection device, transparent plate surface inspection method, and glass plate manufacturing method

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