CN107217298A - Single crystal growing furnace gas supply system - Google Patents
Single crystal growing furnace gas supply system Download PDFInfo
- Publication number
- CN107217298A CN107217298A CN201710496574.6A CN201710496574A CN107217298A CN 107217298 A CN107217298 A CN 107217298A CN 201710496574 A CN201710496574 A CN 201710496574A CN 107217298 A CN107217298 A CN 107217298A
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- CN
- China
- Prior art keywords
- plc
- single crystal
- crystal growing
- growing furnace
- gas supply
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to single crystal growing furnace production technical field, particularly a kind of single crystal growing furnace gas supply system, including PLC, also include sensor unit, the sensor unit is connected with PLC input, and the PLC output end is connected with magnetic valve, air feed pump and alarm respectively；The PLC is powered by power supply, and the output end of the PLC is also associated with display lamp, and the PLC input has been also associated with/stop button.After said structure, the present invention can realize according to sensing data the constant pressure air feeding to single crystal growing furnace automatically by PLC, manual mode can also be switched to, autonomous supplies to single crystal growing furnace, so hand/automatic cooperation improves supply efficiency, also meets the difference demand of different single crystal growing furnace crystal pullings.
Description
Technical field
The present invention relates to single crystal growing furnace production technical field, particularly a kind of single crystal growing furnace gas supply system.
Background technology
Single crystal growing furnace be one kind in inert gas (based on nitrogen, helium) environment, it is with graphite heater that polysilicon etc. is more
Brilliant melt material, with the equipment of Grown by CZ Method dislocation-free monocrystalline.
Single crystal diameter can be by temperature, pull rate and rotating speed in growth course, crucible tracking velocity and rotating speed, protection
The influence of the factors such as the flow velocity of gas.Wherein temperature mainly determine can Cheng Jing, and speed will directly influence the inherence of crystal
Quality, and this influence can only can just be known after monocrystalline pull-out by detection.The suitable thermal field of Temperature Distribution, not only monocrystalline
Growth is smooth, and quality is higher；Easily produced if the Temperature Distribution of thermal field is not quite reasonable, during growth monocrystalline each
Defect is planted, quality is influenceed, the appearance morphotropism growth of situation seriously does not come out monocrystalline.Therefore in investment crystal growth enterprise
Early stage, must configure most rational thermal field, so as to ensure the quality of monocrystalline produced according to growth apparatus.
The content of the invention
The technical problem to be solved in the invention is to provide a kind of high single crystal growing furnace gas supply system of control accuracy.
To solve above-mentioned technical problem, single crystal growing furnace gas supply system of the invention, including PLC, in addition to
Sensor unit, the sensor unit is connected with PLC input, the PLC output end respectively with electricity
Magnet valve, air feed pump are connected with alarm；The PLC is powered by power supply, and the output end of the PLC is also connected with
There is a display lamp, the PLC input has been also associated with/stop button.
Further, the sensor unit includes flow sensor and pressure transducer, the pressure transducer and PLC
Controller input is connected, and the flow sensor is connected by A/D converter with PLC input.
Further, the PLC is connected by RS232 interfaces with upper managing computer.
Further, hand/automatic switching module is connected between the power supply and PLC.
Further, the hand/automatic switching module includes hand/auto-switching push button, the hand/auto-switching push button
It is connected with Control end；The relay output end is connected with power supply, is connected between the power supply and relay
It is provided with electromagnetic valve switch, the air feed pump branch road and sets on the parallel circuit of magnetic valve and air feed pump, the magnetic valve branch road
It is equipped with supply switch pump.
Further, the hand/auto-switching push button is in series with manual indicator lamp, and the magnetic valve refers to magnetic valve
Show that lamp is in series, the air feed pump is in series with air feed pump indicator lamp.
After said structure, the present invention can be automatically realized to single crystal growing furnace according to sensing data by PLC
Constant pressure air feeding, can also be switched to manual mode, and autonomous supplies to single crystal growing furnace, and such hand/automatic cooperation improves confession
Gas efficiency, also meets the difference demand of different single crystal growing furnace crystal pullings.
Brief description of the drawings
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description.
Fig. 1 is the structured flowchart of single crystal growing furnace gas supply system of the present invention.
Fig. 2 is the circuit theory diagrams of hand/automatic switching module of the present invention.
In figure：1 is PLC, and 2 be flow sensor, and 3 be pressure transducer, 4 be/stop button, 5 be that A/D is changed
Device, 6 be magnetic valve, and 7 be air feed pump, and 8 be alarm, and 9 be RS232 interfaces, and 10 be upper managing computer, and 11 be power supply, 12 be hand/
Automatic switching module, 13 be display lamp, and 14 be relay, and 15 be hand/auto-switching push button, and 16 be manual indicator lamp, and 17 be electricity
Magnet valve indicator lamp, 18 be electromagnetic valve switch, and 19 be steam supply valve indicator lamp, and 20 be supply switch pump
Embodiment
As shown in figure 1, the single crystal growing furnace gas supply system of the present invention, including PLC 1, in addition to sensor unit,
The sensor unit is connected with the input of PLC 1, the output end of PLC 1 respectively with magnetic valve 6, supply
Pump 7 is connected with alarm 8.The PLC 1 is powered by power supply 11, and the output end of the PLC 1 is also associated with
Display lamp 13, the PLC input has been also associated with/stopped button 4.
Further, the sensor unit include flow sensor 2 and pressure transducer 3, the pressure transducer 3 with
The input of PLC 1 is connected, and the flow sensor 2 is connected by A/D converter 5 with PLC input.
Further, for the ease of managing and uploading data, the PLC 1 passes through RS232 interfaces 9 and upper pipe
Reason machine 10 is connected.
Further, it is connected with hand/automatic switching module 12 between the power supply 11 and PLC 1.As shown in Fig. 2
Hand/the automatic switching module 12 includes hand/auto-switching push button 15, and the hand/auto-switching push button 15 is controlled with relay 14
End processed is connected；The output end of relay 14 is connected with power supply, and electromagnetism is connected between the power supply 11 and relay 14
It is provided with electromagnetic valve switch 18, the air feed pump branch road and sets on the parallel circuit of valve 6 and air feed pump 7, the magnetic valve branch road
It is equipped with supply switch pump 20.
Further, in order to preferably instruction system hand/automatic mode, the hand/auto-switching push button
15 are in series with manual indicator lamp 16；Equally, in order to preferably instruction magnetic valve, air feed pump working condition, the electromagnetism
Valve 6 is in series with magnetic valve indicator lamp 17, and the air feed pump 7 is in series with air feed pump indicator lamp 19.
Although the foregoing describing the embodiment of the present invention, those skilled in the art should be appreciated that this
It is merely illustrative of, various changes or modifications can be made to present embodiment, without departing from the principle and essence of the present invention,
Protection scope of the present invention is only limited by the claims that follow.
Claims (6)
1. a kind of single crystal growing furnace gas supply system, including PLC, it is characterised in that：Also include sensor unit, the biography
Sensor cell is connected with PLC input, the PLC output end respectively with magnetic valve, air feed pump and alarm
Device is connected；The PLC is powered by power supply, and the output end of the PLC is also associated with display lamp, the PLC
Controller input has been also associated with/stop button.
2. according to the single crystal growing furnace gas supply system described in claim 1, it is characterised in that：The sensor unit includes flow
Sensor and pressure transducer, the pressure transducer are connected with PLC input, and the flow sensor passes through A/
D converters are connected with PLC input.
3. according to the single crystal growing furnace gas supply system described in claim 1, it is characterised in that：The PLC passes through RS232
Interface is connected with upper managing computer.
4. according to the single crystal growing furnace gas supply system described in claim 1, it is characterised in that：The power supply and PLC it
Between be connected with hand/automatic switching module.
5. according to the single crystal growing furnace gas supply system described in claim 4, it is characterised in that：The hand/automatic switching module bag
Hand/auto-switching push button is included, the hand/auto-switching push button is connected with Control end；The relay output end with
Power supply is connected, and the parallel circuit of magnetic valve and air feed pump, the magnetic valve branch road are connected between the power supply and relay
On be provided with electromagnetic valve switch, the air feed pump branch road and be provided with supply switch pump.
6. according to the single crystal growing furnace gas supply system described in claim 5, it is characterised in that：Hand/the auto-switching push button with
Manual indicator lamp is in series, and the magnetic valve is in series with magnetic valve indicator lamp, and the air feed pump is mutually gone here and there with air feed pump indicator lamp
Connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710496574.6A CN107217298A (en) | 2017-06-26 | 2017-06-26 | Single crystal growing furnace gas supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710496574.6A CN107217298A (en) | 2017-06-26 | 2017-06-26 | Single crystal growing furnace gas supply system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107217298A true CN107217298A (en) | 2017-09-29 |
Family
ID=59950264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710496574.6A Pending CN107217298A (en) | 2017-06-26 | 2017-06-26 | Single crystal growing furnace gas supply system |
Country Status (1)
| Country | Link |
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| CN (1) | CN107217298A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941033A (en) * | 2017-11-12 | 2018-04-20 | 山东万达环保科技有限公司 | Kiln Intelligent operation system of variable power |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101175873A (en) * | 2005-06-20 | 2008-05-07 | 株式会社Sumco | Apparatus for manufacturing semiconductor single crystal |
| CN202090099U (en) * | 2011-04-01 | 2011-12-28 | 上海三晶新能源设备有限公司 | Argon gas flow control device of single-crystal furnace |
| CN203080105U (en) * | 2013-02-17 | 2013-07-24 | 英利能源（中国）有限公司 | Gas supply system of single crystal furnace |
| CN105941100A (en) * | 2016-06-21 | 2016-09-21 | 常州工学院 | Novel constant-pressure sprinkling irrigation control system |
-
2017
- 2017-06-26 CN CN201710496574.6A patent/CN107217298A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101175873A (en) * | 2005-06-20 | 2008-05-07 | 株式会社Sumco | Apparatus for manufacturing semiconductor single crystal |
| CN202090099U (en) * | 2011-04-01 | 2011-12-28 | 上海三晶新能源设备有限公司 | Argon gas flow control device of single-crystal furnace |
| CN203080105U (en) * | 2013-02-17 | 2013-07-24 | 英利能源（中国）有限公司 | Gas supply system of single crystal furnace |
| CN105941100A (en) * | 2016-06-21 | 2016-09-21 | 常州工学院 | Novel constant-pressure sprinkling irrigation control system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107941033A (en) * | 2017-11-12 | 2018-04-20 | 山东万达环保科技有限公司 | Kiln Intelligent operation system of variable power |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170929 |