CN202465956U - Argon isolation system for sapphire crystal growth furnace - Google Patents
Argon isolation system for sapphire crystal growth furnace Download PDFInfo
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- CN202465956U CN202465956U CN2012200190784U CN201220019078U CN202465956U CN 202465956 U CN202465956 U CN 202465956U CN 2012200190784 U CN2012200190784 U CN 2012200190784U CN 201220019078 U CN201220019078 U CN 201220019078U CN 202465956 U CN202465956 U CN 202465956U
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- sapphire
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Abstract
The utility model discloses an argon isolation system for a sapphire crystal growth furnace. The system comprises an air supply trunk, two air supply branches, two argon bottles, an air extracting trunk and an air extracting device. The argon isolation system for the sapphire crystal growth furnace can effectively solve the problem that the production efficiency of the sapphire crystal growth furnace is affected because the argon isolation system in the prior art cannot continuously supply air. In a preferred scheme, a first on-line filter and a first flow monitoring controller are sequentially arranged on the air supply trunk between a pressure reducing valve and the cavity of the sapphire crystal growth furnace in the airflow direction. Through the preferred scheme, the actual flow rate of argon can be timely known through the first flow monitoring controller, and the precision for adjusting the flow rate of the argon is high.
Description
Technical field
The utility model relates to the long brilliant apparatus field of sapphire, relates to a kind of argon gas isolated system that is used for the long brilliant stove of sapphire more specifically.
Background technology
Along with China's rapid development of economy, continuous progress has been obtained in LED technique of display field.The material that is used for the LED substrate mainly comprises silicon, silit, sapphire etc.Yet because the silicon single-crystal lattice match is relatively poor, it can't commercial applications, and the silicon nitride single crystal cost value is higher, and therefore, sapphire becomes the ideal of LED substrate material and selects.
At present, the long brilliant stove of sapphire in process of production, for prevent raw material at high temperature with air reaction, and then the finished product quality impacted.Therefore, needing that in the production process of the long brilliant stove of sapphire raw material is carried out the whole process rare gas element isolates.
In the prior art, adopt argon gas that raw material is isolated usually, its isolation processes is described below.Argon gas comes out through reducing valve from argon bottle, then through the throttling valve access arrangement, is full of the cavity of the long brilliant stove of sapphire, is then taken away by vacuum pump, and the equipment cavity is in negative pressure state.
Yet argon gas isolated system of the prior art is single bottle of argon gas supply.Argon gas uses in bottle, during the argon bottle that more renews, because argon gas also is responsible for product is lowered the temperature simultaneously.Therefore, when changing argon bottle, total system work stops, and can not guarantee non-stop run.And then the production efficiency of the long brilliant stove of sapphire brought influence.
In addition, argon gas comes out the back only through decompression from argon bottle, selects the throttle valve adjustment flow then for use, and the regulating precision is very low, and the finished product quality that the long brilliant stove of sapphire is produced impacts.
Therefore, how to solve that the argon gas isolated system can not continue air feed in the prior art, and, become those skilled in the art's important technological problems to be solved the problem that the long brilliant stove production efficiency of sapphire impacts.
The utility model content
The utility model discloses a kind of argon gas isolated system that sapphire is grown brilliant stove that is used for, it can effectively overcome, and the argon gas isolated system can not continue air feed in the prior art, and sapphire is grown the problem that brilliant stove production efficiency impacts.
A kind of argon gas isolated system that is used for the long brilliant stove of sapphire that the utility model provides comprises:
The air feed main line, said air feed main line one end is connected with the cavity of the long brilliant stove of sapphire, and said air feed main line is provided with reducing valve;
Two air feed branch roads, an end of two said air feed branch roads all are connected with the other end on said air feed main line, and two said air feed branch roads are equipped with first opening-closing valve and strainer;
Two argon bottles, the other end of two said argon bottles and two said air feed branch roads connects one to one;
Bleed main line and air extractor, said main line one end of bleeding is connected with the cavity of the long brilliant stove of said sapphire, and the other end is connected with said air extractor.
Preferably, upper edge, the said air feed main line air feed flow path direction between the cavity of the long brilliant stove of said reducing valve and said sapphire is provided with the first online strainer and first flow monitor controller successively.
Preferably, the said upper edge, main line of the bleeding flow path direction of bleeding is provided with the second online strainer and the second flow monitoring unit successively.
Preferably; Said air feed main line is provided with the bypass supply air line; Said bypass supply air line one end is connected between the said first online strainer and the said first flow monitor controller, and the other end is connected between the cavity of said first flow monitor controller and the long brilliant stove of said sapphire; Said bypass supply air line is provided with throttling valve and second switch valve; Said air feed main line between said bypass supply air line is provided with the 3rd opening-closing valve and the 4th opening-closing valve, and said first flow monitor controller is between said the 3rd opening-closing valve and said the 4th opening-closing valve.
Preferably; The said main line of bleeding is provided with the bypass bleed line; Said bypass bleed line one end is connected between the said second flow monitoring unit and the said second online strainer, and the other end is connected between said second flow monitoring unit and the said air extractor; Said bypass bleed line is provided with the 5th opening-closing valve; On the said main line of bleeding between the said bypass bleed line, be provided with the 6th opening-closing valve and minion closing valve, the said second online filter bits is between said the 6th opening-closing valve and said minion closing valve.
Preferably, comprise that also being connected in said sapphire grows the cavity of brilliant stove and the draws air pipeline between the said air extractor, and said draws air pipeline is provided with the octavo closing valve.
Preferably, said air feed main line and the said main line of bleeding are provided with pressure transmitter.
Preferably, said second switch valve, said the 4th opening-closing valve, said the 5th opening-closing valve, said minion closing valve and said octavo closing valve are operated pneumatic valve.
Preferably, said air extractor is a vacuum pump.
A kind of argon gas isolated system that is used for the long brilliant stove of sapphire that the utility model provides comprises: the air feed main line, and said air feed main line one end is connected with the cavity of the long brilliant stove of sapphire, and said air feed main line is provided with reducing valve; Two air feed branch roads, an end of two said air feed branch roads all are connected with the other end on said air feed main line, and two said air feed branch roads are equipped with first opening-closing valve and strainer; Two argon bottles, the other end of two said argon bottles and two said air feed branch roads connects one to one; Bleed main line and air extractor, said main line one end of bleeding is connected with the cavity of the long brilliant stove of said sapphire, and the other end is connected with said air extractor.
So be provided with, the argon gas isolated system that the utility model provides comprises two air feed branch roads, when the long brilliant stove of sapphire is produced; Only need open first opening-closing valve on one of them air feed branch road; Argon gas can be flowed out by argon bottle, and the entering of the strainer on this air feed branch road air feed main line, and the reducing valve on the air feed main line carries out pressure to argon gas to be regulated in the cavity of the long brilliant stove of back entering sapphire; With secluding air, guarantee product quality.Simultaneously, air extractor is taken out argon gas to the cavity of the long brilliant stove of sapphire, guarantees the circulation of argon gas, to guarantee the lasting cooling to production environment.Obviously, the argon gas isolated system that is used for the long brilliant stove of sapphire that the utility model provides, it can effectively overcome, and the argon gas isolated system can not continue air feed in the prior art, and sapphire is grown the problem that brilliant stove production efficiency impacts.
In the preferred version of the utility model, upper edge, the said air feed main line air feed flow path direction between the cavity of the long brilliant stove of said reducing valve and said sapphire is provided with the first online strainer and first flow monitor controller successively.Need to prove; The argon gas that feeds in the long brilliant stove of sapphire need have higher purity; If argon gas stream is being mingled with impurity and will the product quality of final formation be being impacted, simultaneously, if be mingled with impurity in the argon gas stream; Impurity is attached on the first flow monitor controller, will cause detrimentally affect to the control accuracy of first flow monitor controller.Therefore, the air feed main line that this embodiment provided is provided with the first online strainer, and it can in time filter argon gas stream, to filter out impurities.In addition, need to prove, the long brilliant stove of sapphire in process of production, the argon flow amount that feeds in its cavity needs strict control, to obtain the product of better quality.Should be appreciated that the first flow monitor controller can monitor the flow of supply air line, when its flux values that monitors was greater than or less than normal value, it can regulate the flow of argon gas stream automatically.Therefore, in the preferred version that the utility model provides, not only can in time understand the actual flow of argon gas, and the precision of adjusting argon flow amount is higher through the first flow monitor controller.
Description of drawings
Fig. 1 is for being used for the argon gas isolated system synoptic diagram of the long brilliant stove of sapphire in the utility model embodiment.
Embodiment
The utility model discloses a kind of argon gas isolated system that sapphire is grown brilliant stove that is used for, it can effectively overcome, and the argon gas isolated system can not continue air feed in the prior art, and sapphire is grown the problem that brilliant stove production efficiency impacts.
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, Fig. 1 is for being used for the argon gas isolated system synoptic diagram of the long brilliant stove of sapphire in the utility model embodiment.
This embodiment provided is used for the argon gas isolated system of the long brilliant stove of sapphire, comprises air feed main line 11, two air feed branch roads 12, two argon bottles 13, bleed main line 14 and air extractor 15.
Wherein, air feed main line 11 1 ends are connected with the cavity 16 of the long brilliant stove of sapphire, and air feed main line 11 is provided with reducing valve 111.
One end of two air feed branch roads 12 all is connected with the other end on air feed main line 11, and two air feed branch roads 12 are equipped with first switch-valve 121 and strainer 122.
The other end of two argon bottles 13 and two air feed branch roads 12 connects one to one.
So be provided with; The argon gas isolated system that this embodiment provided comprises two air feed branch roads 12; When the long brilliant stove of sapphire is produced; Only need open first switch-valve 121 on one of them air feed branch road 12, argon gas can be come out by the argon bottle 13 that is connected with this air feed branch road 12, and gets into air feed main line 11 through the strainer on the air feed branch road 12 122.
111 pairs of argon gas of reducing valve on the air feed main line 12 carry out pressure to be regulated in the cavity 16 of the long brilliant stove of back entering sapphire, with secluding air, guarantees product quality.Simultaneously, the cavity 16 of the long brilliant stove of 15 pairs of sapphires of air extractor is taken out argon gas, guarantees the circulation of argon gas, and then guarantees the lasting cooling to production environment.
Obviously, the argon gas isolated system that is used for the long brilliant stove of sapphire that this embodiment provides, it can effectively overcome, and the argon gas isolated system can not continue air feed in the prior art, and sapphire is grown the problem that brilliant stove production efficiency impacts.
In the preferred version of this embodiment, upper edge, the air feed main line air feed flow path direction between the cavity 16 of the long brilliant stove of reducing valve 111 and sapphire is provided with the first online strainer 117 and first flow monitor controller 112 successively.
Need to prove; The argon gas stream that feeds in the long brilliant stove of sapphire need have higher purity; If argon gas stream is being mingled with impurity and will the product quality of final formation be being impacted, simultaneously, if be mingled with impurity in the argon gas stream; Impurity is attached on the first flow monitor controller, will cause detrimentally affect to the control accuracy of first flow monitor controller.
Therefore, in the preferred version that this embodiment provided, air feed main line 11 is provided with the first online strainer 117, and it can in time filter argon gas stream, to filter out impurities.
In addition, need to prove, the long brilliant stove of sapphire in process of production, the argon flow amount that feeds in its cavity needs strict control, to obtain the product of better quality.Should be appreciated that first flow monitor controller 112 can monitor the flow of supply air line, when its flux values that monitors was greater than or less than normal value, it can regulate the flow of argon gas stream automatically.
Therefore, in the preferred version that the utility model provides, not only can in time understand the actual flow of argon gas through first flow monitor controller 112, and the precision of adjusting argon flow amount is higher.
Equally, when the long brilliant stove of sapphire was bled, the control of extraction flow also need have higher precision, can guarantee the quality of product.Given this, the argon gas isolated system that this embodiment provides, its 14 upper edges, main line of bleeding flow path direction of bleeding is provided with the second online strainer 142 and the second flow monitoring unit 141 successively.
So be provided with, the second flow monitoring unit 141 can be monitored the flow on the main line 14 of bleeding, and when its flux values that monitors was greater than or less than normal value, it can regulate the flow of argon gas stream automatically.In addition, the argon gas stream purity that the second online strainer 142 can effectively guarantee to get into the second flow monitoring unit 141 does not receive impurity effect with the control accuracy that guarantees the second flow monitoring unit 141.
Therefore, the argon gas isolated system that the utility model provides not only can in time understand actual extraction flow through the second flow monitoring unit 141, and the precision of bleeding regulating flow is higher.
In another preferred version of this embodiment; Air feed main line 11 is provided with bypass supply air line 113; Bypass supply air line 113 1 ends are connected between the first online strainer 117 and the first flow monitor controller 112, and the other end is connected between the cavity 16 of first flow monitor controller 112 and the long brilliant stove of sapphire.
In addition; In this embodiment; Bypass supply air line 113 is provided with throttling valve 114 and second switch valve 115; Air feed main line between bypass supply air line 113 is provided with the 3rd opening-closing valve 116 and the 4th opening-closing valve 118, and first flow monitor controller 112 is between the 3rd opening-closing valve 116 and the 4th opening-closing valve 118.
So be provided with, when first flow monitor controller 112 needs dismounting and change, only need the 3rd opening-closing valve 116 and the 4th opening-closing valve 118 are closed, simultaneously, open second switch valve 115.The air feed air-flow can be got in the cavity 16 of the long brilliant stove of sapphire by bypass supply air line 113; And because the 3rd opening-closing valve 116 and the 4th opening-closing valve 118 are closing condition; The air feed air-flow can not flow to first flow monitor controller 112 positions; Thereby problem can not leak air when dismounting first flow monitor controller 112.
In addition, can be through regulating the throttling valve 114 that is provided with on the bypass supply air line 113, regulate the flow in the cavity 16 that gets into the long brilliant stove of sapphire.
Therefore, this embodiment can be dismantled first flow monitor controller 112 under the condition that does not stop to produce, and has effectively improved production efficiency.
Certainly; The argon gas isolated system that this embodiment provided; Also can comprise bypass bleed line 143; And bypass bleed line 143 1 ends are connected between the second flow monitoring unit 141 and the second online strainer 142, and the other end is connected between the second flow monitoring unit 141 and the air extractor 15; Bypass bleed line 143 is provided with the 5th opening-closing valve 144; On the main line of bleeding between the bypass bleed line 143, be provided with the 6th opening-closing valve 145 and minion closing valve 146, and the second online strainer 141 is between the 6th opening-closing valve 145 and minion closing valve 146.
Equally, when the second flow monitoring unit 141 needs dismounting and change, only need the 6th opening-closing valve 145 and minion closing valve 146 are closed, simultaneously, open the 5th opening-closing valve 144.The air feed air-flow can be extracted out by bypass bleed line 143; And because the 6th opening-closing valve 145 and minion closing valve 146 are closing condition; Pumping airflow can not flow to the second flow monitoring unit, 141 positions, thereby problem can not leak air when the dismounting second flow monitoring unit 141.
Therefore, this embodiment also can be dismantled the second flow monitoring unit 141 under the condition that does not stop to produce, and has effectively improved production efficiency.
In addition, need to prove that the long brilliant stove of sapphire needs at first gas in its cavity and dust to be extracted out, then, argon gas is provided again before production.During draws air, the dust that is mingled with in the air is attached on bleed main line or the valve, and the normal use of bleed main line or valve is impacted before producing.This embodiment can comprise that also being connected in sapphire grows the cavity 16 of brilliant stove and the draws air pipeline 17 between the air extractor 15, and draws air pipeline 17 is provided with octavo closing valve 18.
So be provided with, before the long brilliant stove production of sapphire, can at first close the 6th opening-closing valve 145 and the 5th opening-closing valve 144, open the octavo closing valve simultaneously.Air extractor 15 can directly be bled to cavity 16 through draws air pipeline 17.Obviously, air main line 14 and the bypass bleed line 143 of bleeding of not flowing through during draws air, and then effectively avoided dust in the air to be attached to the problem of the parts such as main line 14, bypass bleed line 143 and valve thereof of bleeding.
In addition, the argon gas isolated system of the long brilliant stove of the sapphire that this embodiment provided, air feed main line 11 is provided with pressure transmitter 19 with the main line 14 of bleeding.
So be provided with, the staff can learn the air feed air pressure on the bleed air pressure 4 and the air feed main line 11 on the main line 1 of bleeding easily through pressure transmitter 19.
In addition; Need to prove; Second switch valve that this embodiment provided 115, the 4th opening-closing valve 118, the 5th opening-closing valve 144, minion closing valve 146 and octavo closing valve 18 can be operated pneumatic valve, certainly, also can be the valve of other type; Such as, SV, manual valve etc.First opening-closing valve 121, the 3rd opening-closing valve 116 and the 6th opening-closing valve can be specially manual valve, and be same, also can be the valve of other type, such as, pneumavalve, SV etc.The air extractor 15 that this embodiment provided can be specially vacuum pump, so can realize the operation of bleeding.
More than to the utility model provided a kind of argon gas isolated system that is used for the long brilliant stove of sapphire carried out detailed introduction; Used concrete example among this paper the principle and the embodiment of the utility model are set forth, the explanation of above embodiment just is used to help to understand the method and the core concept thereof of the utility model.Should be understood that; For those skilled in the art; Under the prerequisite that does not break away from the utility model principle, can also carry out some improvement and modification to the utility model, these improvement and modification also fall in the protection domain of the utility model claim.
Claims (9)
1. an argon gas isolated system that is used for the long brilliant stove of sapphire is characterized in that, comprising:
The air feed main line, said air feed main line one end is connected with the cavity of the long brilliant stove of sapphire, and said air feed main line is provided with reducing valve;
Two air feed branch roads, an end of two said air feed branch roads all are connected with the other end on said air feed main line, and two said air feed branch roads are equipped with first opening-closing valve and strainer;
Two argon bottles, the other end of two said argon bottles and two said air feed branch roads connects one to one;
Bleed main line and air extractor, said main line one end of bleeding is connected with the cavity of the long brilliant stove of said sapphire, and the other end is connected with said air extractor.
2. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 1; It is characterized in that upper edge, the said air feed main line air feed flow path direction between the cavity of the long brilliant stove of said reducing valve and said sapphire is provided with the first online strainer and first flow monitor controller successively.
3. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 2 is characterized in that, the said upper edge, main line of the bleeding flow path direction of bleeding is provided with the second online strainer and the second flow monitoring unit successively.
4. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 3; It is characterized in that; Said air feed main line is provided with the bypass supply air line; Said bypass supply air line one end is connected between the said first online strainer and the said first flow monitor controller, and the other end is connected between the cavity of said first flow monitor controller and the long brilliant stove of said sapphire; Said bypass supply air line is provided with throttling valve and second switch valve; Said air feed main line between said bypass supply air line is provided with the 3rd opening-closing valve and the 4th opening-closing valve, and said first flow monitor controller is between said the 3rd opening-closing valve and said the 4th opening-closing valve.
5. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 4; It is characterized in that; The said main line of bleeding is provided with the bypass bleed line; Said bypass bleed line one end is connected between the said second flow monitoring unit and the said second online strainer, and the other end is connected between said second flow monitoring unit and the said air extractor; Said bypass bleed line is provided with the 5th opening-closing valve; On the said main line of bleeding between the said bypass bleed line, be provided with the 6th opening-closing valve and minion closing valve, the said second online filter bits is between said the 6th opening-closing valve and said minion closing valve.
6. like each described argon gas isolated system that is used for the long brilliant stove of sapphire of claim 1-5; It is characterized in that; Comprise that also being connected in said sapphire grows the cavity of brilliant stove and the draws air pipeline between the said air extractor, and said draws air pipeline is provided with the octavo closing valve.
7. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 6 is characterized in that said air feed main line and the said main line of bleeding are provided with pressure transmitter.
8. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 6; It is characterized in that said second switch valve, said the 4th opening-closing valve, said the 5th opening-closing valve, said minion closing valve and said octavo closing valve are operated pneumatic valve.
9. the argon gas isolated system that is used for the long brilliant stove of sapphire as claimed in claim 8 is characterized in that said air extractor is a vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200190784U CN202465956U (en) | 2012-01-16 | 2012-01-16 | Argon isolation system for sapphire crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200190784U CN202465956U (en) | 2012-01-16 | 2012-01-16 | Argon isolation system for sapphire crystal growth furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202465956U true CN202465956U (en) | 2012-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200190784U Withdrawn - After Issue CN202465956U (en) | 2012-01-16 | 2012-01-16 | Argon isolation system for sapphire crystal growth furnace |
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| CN (1) | CN202465956U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205810A (en) * | 2012-01-16 | 2013-07-17 | 至砾机电设备（上海）有限公司 | Argon isolation system for sapphire crystal growth furnace |
| CN110094984A (en) * | 2019-03-08 | 2019-08-06 | 苏州金言来新材料科技有限公司 | A kind of vacuum drying oven reduced pressure atmosphere control device |
-
2012
- 2012-01-16 CN CN2012200190784U patent/CN202465956U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103205810A (en) * | 2012-01-16 | 2013-07-17 | 至砾机电设备（上海）有限公司 | Argon isolation system for sapphire crystal growth furnace |
| CN110094984A (en) * | 2019-03-08 | 2019-08-06 | 苏州金言来新材料科技有限公司 | A kind of vacuum drying oven reduced pressure atmosphere control device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20121003 Effective date of abandoning: 20160511 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |